KR101287831B1 - Appratus for lifting substrate - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate elevating device for elevating a substrate provided in a process chamber for manufacturing a semiconductor device. The substrate lifting apparatus includes a plate on which a substrate is seated; A plurality of lifting pins installed through the plate to support the substrate; A plurality of lift pin drive shafts each of which lift pins are fixed and lifted together with the lift pins; An elevating driver for elevating the plurality of elevating pin drive shafts simultaneously; The lifting drive unit includes: a driving arm connected to the plurality of lifting pin drive shafts to allow relative movement in a horizontal direction with respect to the lifting pin drive shaft; A drive device for transmitting power to the drive arm; And a control unit.
According to this configuration, it is possible to provide a substrate lifting apparatus that guides the lifting operation of the lifting pins for lifting the substrate and accurately transfers the force to the lifting pins so that the lifting operation can be performed quickly and smoothly.

Description

Substrate lifting device {Appratus for lifting substrate}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate elevating device for elevating a substrate provided in a process chamber for manufacturing a semiconductor device.

In general, in the process of manufacturing a semiconductor device, a semiconductor substrate is subjected to various steps such as a process of depositing a material layer, a process of etching a deposited material layer, a cleaning process, and a drying process. These processes are performed in a process chamber, which is a semiconductor manufacturing apparatus.

The process chamber is a reaction vessel having a reaction region enclosed therein, and a chuck is installed to fix the semiconductor substrate seated therein. In this case, the chuck may be classified into a vacuum chuck using a vacuum or an electrostatic chuck using an electrostatic force according to the holding method of the substrate, and recently, an electrostatic chuck is mainly used.

The substrate is transferred by the substrate transfer device into or out of the process chamber. The transfer of the substrate takes place with the substrate raised away from the electrostatic chuck. To this end, the electrostatic chuck is provided with a substrate elevating device for raising or lowering the substrate from the electrostatic chuck.

1 is a view showing a conventional substrate lifting device.

The electrostatic chuck 2 for mounting the substrate S is provided in the process chamber 1. The shaft 20 is attached to the lower portion of the electrostatic chuck (2).

The lifting pin 10 penetrates the electrostatic chuck 2 and is fixed to the shaft 20. Lift pin 10 is provided in plurality. The lifting pins 10 come into contact with the bottom surface of the substrate S to support the lifting of the substrate S.

The driving device 30 transmits power for lifting the lifting pin 10. The driving arm 31 is connected to the driving device 30 to receive power, and the driving arm 31 is connected to the shaft 20. When three lifting pins 10 are provided on the electrostatic chuck 2, one side of the driving arm 31 is connected to the driving device 30, and the other side thereof is divided into three parts and connected to each shaft 20. .

According to the operation of the drive device 30, the driving force is sequentially transmitted to the drive arm 31 and the shaft 20, so that the lifting pin 10 fixed to the shaft 20 can be lifted.

However, in the conventional substrate elevating device, it is difficult to transfer the force transmitted from the driving device 30 to the three elevating pins 10 connected to the driving arm 31 accurately in the vertical direction, thereby elevating the elevating pins 10. Problems such as poor operation or damage to the device occur.

Accordingly, the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a substrate lifting apparatus capable of guiding a lifting operation of a lifting pin for lifting a substrate and accurately transmitting a force to the lifting pin.

According to an aspect of the present invention for achieving the above object, the substrate lifting apparatus, the plate on which the substrate is seated; A plurality of lifting pins installed through the plate to support the substrate; A plurality of lift pin drive shafts each of which lift pins are fixed and lifted together with the lift pins; An elevating driver for elevating the plurality of elevating pin drive shafts simultaneously; The lifting drive unit includes: a driving arm connected to the plurality of lifting pin drive shafts to allow relative movement in a horizontal direction with respect to the lifting pin drive shaft; A drive device for transmitting power to the drive arm; Characterized in that it comprises a.

In addition, the elastic member is provided on the outside of each of the lifting pin drive shaft for generating a resistance to the lifting of the lifting pin drive shaft; And further comprising:

In addition, the case member is fixed to the lower portion of the plate to cover the elastic member, the case member for guiding the lifting of the lifting pin drive shaft; And further comprising:

In addition, the head of the case member is characterized in that it comprises a bearing bush in close contact with the lifting pin drive shaft.

In addition, the elastic member is characterized in that the bellows.

In addition, the lifting pin is provided with three, the drive arm has three arms formed integrally, each of the arms is characterized in that connected to the lifting pin drive shaft.

In addition, the drive arm has a plurality of integral arms each connected to the lifting pin drive shaft, the end of the arm is formed in a U-shape, it is sandwiched between two stepped portions formed on the lifting pin drive shaft It is done.

In addition, the base member is attached to the lower portion of the plate is formed with a through hole for lifting the lifting pin; Further comprising, the through-hole is characterized in that the bearing bush is mounted.

In addition, the O-ring formed to surround the through hole between the plate and the base member; Further comprising:

According to another aspect of the present invention for achieving the above object, the substrate lifting apparatus, the plate on which the substrate is seated; A plurality of lifting pins installed through the plate to support the substrate; A plurality of lift pin drive shafts each of which lift pins are fixed and lifted together with the lift pins; A plurality of guide rods fixed to the lower portion of the plate adjacent to each of the lifting pin driving shafts; A plurality of connection members connected to each of the lifting pin drive shafts and lifted along an outer surface of the guide rod; An elevating drive unit for elevating the plurality of connection members at the same time; Characterized in that it comprises a.

In addition, the elastic member is provided on the outside of each of the lifting pin drive shaft for generating a resistance to the lifting of the lifting pin drive shaft; And further comprising:

The elevating drive unit may further include: a driving arm connected to the plurality of connection members to allow relative movement in the horizontal direction with respect to the connection member; A drive device for transmitting power to the drive arm; Characterized in that it comprises a.

In addition, the connecting member is characterized in that it comprises a shaft-side connecting portion connected to the lifting pin drive shaft, and the rod-side connecting portion formed integrally with the shaft-side connecting portion and extends to a predetermined length along the outer surface of the guide rod.

In addition, the driving arm has a plurality of integral arms each connected to the plurality of connecting members, the end of the arm is formed in a U-shape, between the two stepped portions formed in the rod-side connecting portion of the connecting member It is characterized by being fitted.

In addition, between the rod-side connection portion and the guide rod is characterized in that two or more bearing bushings are mounted.

In addition, the shaft-side connecting portion of the connecting member, the shaft pin hole through which the lifting pin drive shaft is fitted, and the opening connected to the shaft through hole, the lift pin drive shaft is a coupling member and the shaft through hole located in the opening. It is characterized by being coupled through.

In addition, the lifting pin is provided with three, the drive arm is characterized in that it has three arms formed integrally, each of the arms is connected to the connecting member.

In addition, the guide rod is characterized in that fixed to the base member.

According to the present invention, it is possible to provide a substrate lifting apparatus capable of guiding the lifting operation of the lifting pin for lifting the substrate and accurately transferring the force to the lifting pin so that the lifting operation can be performed quickly and smoothly.

1 is a view showing a conventional substrate lifting device.
2 is a diagram illustrating a configuration of a substrate elevating device according to an embodiment of the present invention.
FIG. 3 is a perspective view showing the lift driver in the embodiment of FIG. 2. FIG.
4 is a diagram illustrating a configuration of a substrate lift apparatus according to another embodiment of the present invention.
FIG. 5 is a cross-sectional view showing a configuration of main parts of the embodiment of FIG. 4. FIG.
FIG. 6 is a perspective view illustrating a configuration of main parts of the embodiment of FIG. 4. FIG.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, like reference numerals refer to like elements throughout. The same reference numerals in the drawings denote like elements throughout the drawings.

The semiconductor substrate for manufacturing a semiconductor device is subjected to various steps such as a deposition process, an etching process, a cleaning process, and a drying process of a material layer. This process is performed in a process chamber which is a semiconductor manufacturing apparatus.

The process chamber is a reaction vessel having a reaction region sealed therein, and a chuck is installed to fix the semiconductor substrate seated therein. Such chucks may be classified into a vacuum chuck using a vacuum or an electrostatic chuck using an electrostatic force according to the holding method of the substrate, and recently, an electrostatic chuck is mainly used.

The substrate is transferred into or out of the process chamber by the substrate transfer device. The transfer of the substrate takes place with the substrate raised away from the chuck. To this end, the chuck is equipped with a substrate elevating device for raising or lowering the substrate from the chuck while minimizing physical damage to the substrate. Lifting pins are provided in the substrate lifting device, and lifting is performed while supporting the lower surface of the substrate with the lifting pins.

1st Example

2 is a diagram illustrating a configuration of a substrate elevating device according to an embodiment of the present invention. FIG. 3 is a perspective view showing the lift driver in the embodiment of FIG. 2. FIG.

The substrate lifting apparatus includes a plate 110, a lifting pin 120, a lifting pin driving shaft 130, an elastic member 140, a case member 160, a base member 150, a lifting driving unit 170, and the like. .

The plate 110 is seated and supported. Here, the substrate may be a semiconductor substrate. The substrate is seated on the plate 110 in the process chamber during the various steps of the deposition process, the etching process, the cleaning process, and the drying process. The plate 110 may be a vacuum chuck that grips the substrate using a vacuum or an electrostatic chuck that grips the substrate using an electrostatic force. The plate 110 has a pin hole 111 is formed so that the lifting pin 120 can be elevated.

The elevating pin 120 is installed to penetrate through the plate 110. The lifting pin 120 supports and lifts the lower surface of the substrate when the substrate seated on the plate 110 is transferred into or out of the process chamber. The lifting pin 120 has an elongated shape to minimize physical damage at the same time of the substrate. A plurality of lifting pins 120, for example, three are installed spaced apart on the plate (110).

The lift pin 120 is fixed to the lift pin drive shaft 130, and is lifted together when the lift pin drive shaft 130 is lifted. The lifting pin 120 may be fixed to the lifting pin drive shaft 130 by, for example, screwing. A sealing cap 131 may be covered at an end of the lifting pin driving shaft 130 to maintain airtightness between the upper and lower portions of the lifting pin driving shaft 130. The lifting pin 120 may be connected to the lifting pin drive shaft 130 through the sealing cap 131.

An elastic member 140 is installed outside the lift pin drive shaft 130 to generate a resistance force when the lift pin drive shaft 130 is raised. The elastic member 140 may be, for example, a bellows. The bellows has the characteristics of a spring to absorb vibrations and to transmit a constant force. The elastic member 140 is positioned between the lower end of the plate 110 (or the base member 150) and the stepped portion 132 formed on the lifting pin drive shaft 130. The elastic member 140 is compressed or expanded when the lifting pins 120 are elevated, thereby reducing noise, vibration, and the like during the lifting operation of the lifting pins 120.

The case member 160 is fixed to the lower portion of the plate 110 to cover the elastic member 140. The case member 160 guides the lifting and lowering of the lifting pin drive shaft 130 while protecting the elastic member 140. The head portion 160a of the case member 160 extends to a predetermined length along the outer diameter of the lift pin drive shaft 130 to guide the lift of the lift pin drive shaft 130. The bearing bush 161 may be mounted between the head 160a of the case member 160 and the lifting pin driving shaft 130. The bearing bush 161 serves to reduce the friction between the surfaces while guiding the lifting of the lifting pin drive shaft 130. The bearing bush 161 may be configured as a ball bush.

The base member 150 may be located between the case member 160 and the plate 110. The base member 150 is attached to the lower portion of the plate 110, and a through hole 150a is formed therein so that the lifting pin 120 can be lifted and lowered. The bearing bush 151 may be mounted in the through hole 150a. The bearing bush 151 serves to reduce the friction between the surfaces while guiding the lifting of the lifting pin drive shaft 130. The bearing bush 151 may be configured as a ball bush.

An O-ring 152 may be mounted between the base member 150 and the plate 110. O-ring 152 serves to maintain airtightness between the top of the plate 110 and the base member 150. The O-ring 152 is formed to surround the through hole 150a. In general, when the process for the substrate is in progress, the upper end of the plate 110 is maintained in vacuum, the lower end of the base member 150 is maintained at atmospheric pressure. Thus, the O-ring 152 prevents gas from moving between the lower end of the base member 150 and the upper end of the plate 110.

The lifting drive unit 170 is configured to simultaneously raise and lower the plurality of lifting pin drive shafts 130. The lifting driving unit 170 includes a driving arm 180 and a driving device 190.

Referring to FIGS. 2 and 3, the driving arm 180 is connected to the driving device 190 and vertically lifted to transfer driving force of the driving device 190 to the lifting pin driving shaft 130. As the driving device 190, a hydraulic motor, a pneumatic motor, a cylinder, or the like may be used.

The driving arm 180 may have a plurality of arms 180a integrally connected to each of the lifting pin driving shafts 130 so as to be capable of power transmission. The number of arms 180a is equal to the number of lifting pin drive shafts 130. For example, when three lifting pins 120 are installed on the plate 110, three lifting pin drive shafts 130 also become three, and the driving arm 180 also has three arms 180a.

The end of the arm 180a may be formed in a U shape. Two stepped portions 133 are spaced apart from each other in the lifting pin driving shaft 130, and the U-shaped arm 180a is fitted between the two stepped portions 133. The longitudinal length of the U-shaped end of the arm 180a becomes approximately equal to the distance between the two stepped portions 133. Therefore, in a state where the arm 180a is sandwiched between the stepped portions 133 of the lifting pin driving shaft 130, the arm 180a cannot move relative to the lifting pin driving shaft 130 in the vertical direction, and in the horizontal direction. Can move relative to some degree.

The driving arm 180 receives the power from the driving device 190 and moves vertically, lifting and lowering the lifting pin driving shaft 130 connected to the driving arm 180. At this time, each arm 180a of the driving arm 180 is connected to the plurality of lifting pin drive shafts 130 to elevate the plurality of lifting pin drive shafts 130 simultaneously.

However, the force required for elevating each of the elevating pin drive shafts 130 may be slightly different for each of the elevating pin drive shafts 130 due to various factors such as the difference in elastic force by the elastic member 140. This means that in the process of raising the lift pin drive shaft 130 by the drive arm 180, the drive arm 180 may be inclined in any direction without being lifted in a state in which the drive arm 180 is accurately leveled.

When the driving force is transmitted to the lifting pin driving shaft 130 while the driving arm 180 is inclined, the driving force of the driving device 190 is not transmitted to the plurality of lifting pin driving shafts 130 in the vertical direction accurately, but in the horizontal direction. Force can be generated.

Since the lifting pin drive shaft 130 is guided by the bearing members 151 and 161 and is lifted in close contact with the bearing members 151 and 161, when the horizontal force is transmitted to the lifting pin drive shaft 130, the bearing member ( The force is generated in the direction for pressing the 151, 161, the lifting operation of the lifting pin drive shaft 130 is not smooth. In addition, the bearing members 151 and 161 may be worn, or noise may be generated during the lifting operation of the lifting pin drive shaft 130.

In this embodiment, the driving arm 180 and the lifting pin driving shaft 130 are not completely fixed, and the driving arm 180 is connected relative to the lifting pin driving shaft 130 in a horizontal direction. This is implemented in the form of the U-shaped arm 180a is fitted between the two stepped portions 133 of the lifting pin drive shaft 130.

By such a configuration, in the process of elevating the lift pin drive shaft 130 by the drive arm 180, even if a horizontal force is generated with respect to the lift pin drive shaft 130 by various factors, the drive arm 180 or the lift is lowered. The pin drive shaft 130 may move relative to the horizontal direction, thereby reducing or canceling the generated horizontal force.

Accordingly, the driving force of the driving device 190 can be accurately transmitted in the vertical direction to the lifting pin drive shaft 130. This allows the lifting operation of the lifting pin 120 connected with the lifting pin drive shaft 130 to be made quickly and accurately. In addition, it is possible to prevent the occurrence of noise or wear of the device during the lifting operation of the lifting pin (120).

Second Example

4 is a diagram illustrating a configuration of a substrate lift apparatus according to another embodiment of the present invention. FIG. 5 is a cross-sectional view showing a configuration of main parts of the embodiment of FIG. 4. FIG. FIG. 6 is a perspective view illustrating a configuration of main parts of the embodiment of FIG. 4. FIG.

The substrate lifting device includes a plate 210, a lifting pin 220, a lifting pin driving shaft 230, an elastic member 240, a case member 260, a base member 250, a guide rod 270, and a connection member ( 280, the lift driver 290, and the like.

The plate 210 is seated and supported by the plate 210. Here, the substrate may be a semiconductor substrate. Plate 210 may be a vacuum chuck or an electrostatic chuck. The plate 210 has a pinhole 211 is formed so that the lifting pin 220 can be elevated.

The lifting pin 220 is installed to penetrate through the plate 210. The lifting pin 220 supports and lifts the substrate when the substrate is transferred into or out of the process chamber. A plurality of lifting pins 220 may be installed, for example, three spaced apart from the plate 210.

The elevating pin 220 is fixed to the elevating pin driving shaft 230, and is lifted together when the elevating pin driving shaft 230 is elevated. The lifting pin 220 may be fixed to the lifting pin drive shaft 230 by, for example, screwing. An end of the lift pin drive shaft 230 may be covered with a sealing cap 231 for airtightness. The lifting pin 220 may be connected to the lifting pin driving shaft 230 through the sealing cap 231.

An elastic member 240 is installed outside the lift pin drive shaft 230 to generate a resistance force when the lift pin drive shaft 230 rises. The elastic member 240 may be, for example, a bellows. The elastic member 240 is positioned between the lower end of the plate 210 (or the base member 250) and the stepped portion 232 formed on the lifting pin driving shaft 230. The elastic member 240 is compressed or expanded when the lifting pin 220 is lifted, thereby reducing noise, vibration, and the like during the lifting operation of the lifting pin 220.

The case member 260 is fixed to the bottom of the plate 210 to cover the elastic member 240. The case member 260 guides the lifting and lowering of the lifting pin driving shaft 230 while protecting the elastic member 240. The head part 260a of the case member 260 extends to a predetermined length along the outer diameter of the lifting pin driving shaft 230 to guide the lifting of the lifting pin driving shaft 230. The bearing bush 261 may be mounted between the head part 260a of the case member 260 and the lifting pin driving shaft 230. The bearing bush 261 serves to reduce the friction between the surfaces while guiding the lifting and lowering of the lifting pin drive shaft 230. The bearing bush 261 may be configured as a ball bush.

The base member 250 may be positioned between the case member 260 and the plate 210. The base member 250 is attached to the lower portion of the plate 210, and a through hole 250a is formed therein so that the lifting pin 220 can be lifted. The bearing bush 251 may be mounted in the through hole 250a. The bearing bush 251 serves to reduce the friction between the surfaces while guiding the lifting of the lifting pin drive shaft 230. The bearing bush 251 may be configured as a ball bush.

An O-ring 252 may be mounted between the base member 250 and the plate 210 to maintain airtightness. The O-ring 252 is formed to surround the through hole 250a. O-ring 252 serves to prevent the movement of gas between the bottom of the base member 250 and the top of the plate 210.

The guide rod 270 is mounted adjacent to the lifting pin driving shaft 230. The guide rod 270 is fixed to the lower portion of the plate 210 and extends in the longitudinal direction. The guide rod 270 may be fixed to the base member 250 attached to the bottom of the plate 210.

The connecting member 280 is connected to the lifting pin drive shaft 230 and is elevated along the outer surface of the guide rod 270. When power is transferred from the lift driver 290 to the connection member 280, the connection member 280 is moved along the guide rod 270 to transmit power to the lift pin drive shaft 230.

The connecting member 280 is formed on the shaft side connecting portion 280a which is connected to the lifting pin driving shaft 230 and the shaft connecting portion 280a and is rod-side which extends to a predetermined length along the outer surface of the guide rod 270. It is made of a connecting portion (280b). When the connecting member 280 is elevated along the outer surface of the guide rod 270, the lifting pin driving shaft 230 connected with the connecting member 280 is also elevated.

Referring to FIG. 5, a shaft through hole 284 into which the lifting pin driving shaft 230 is fitted, and an opening 285 connected to the shaft through hole 284 are formed in the shaft connecting portion 280a of the connecting member 280. do. The end of the lifting pin drive shaft 230 is fitted to the shaft through-hole 284 and then coupled to the coupling member 286 located in the opening 285. The lifting pin drive shaft 230 may be coupled to the coupling member 286 by, for example, screwing.

The rod side connecting portion 280b of the connecting member 280 is fitted to the guide rod 270 to be elevated along the outer surface of the guide rod 270. Two or more bearing bushes 283 and 284 may be mounted between the rod side connecting portion 280b and the guide rod 270. The bearing bushes 283 and 284 serve to reduce friction while guiding the lift as the rod-side connecting portion 280b is lifted along the guide rod 270. The bearing bushes 283 and 284 may be configured as ball bushes.

4 and 6, the elevating driver 290 is configured to elevate a plurality of elevating pin drive shafts 230 connected to the connecting member 280 by elevating a plurality of connecting members 280 at the same time. The lifting lowering driver 290 includes a driving arm 291 and a driving unit 292.

The driving arm 291 is connected to the driving unit 292 and lifted vertically to transmit the driving force of the driving unit 292 to the connecting member 280. As the driving unit 292, a hydraulic motor, a pneumatic motor, a cylinder, or the like may be used.

The driving arm 291 may have a plurality of integral arms 291a which are connected to each of the connecting members 280 and are capable of power transmission. The end of the arm 291a may be formed in a U shape.

Two step portions 281 and 282 are formed to be spaced apart from the rod side connection portion 280b of the connecting member 280, and the U-shaped arm 291a is fitted between the two step portions 281 and 282. The longitudinal length of the U-shaped end of the arm 291a becomes approximately equal to the distance between the two step portions 281 and 282. With the arm 291a sandwiched between the stepped portions 281 and 282 of the connecting member 280, the arm 291a cannot move relative to the connecting member 280 in the vertical direction, and in any horizontal direction. Relative movement is possible.

When power is transmitted from the drive unit 292, the drive arm 291 moves vertically, and lifts the connecting member 280 connected to the drive arm 291. At this time, the connecting member 280 is guided and lifted along the outer surface of the guide rod 270, thereby elevating the lifting pin drive shaft 230 connected to the connecting member 280. Each arm 291a of the drive arm 291 is connected to the plurality of connection members 280, thereby simultaneously lifting the plurality of lifting pin drive shafts 230. Accordingly, the plurality of lifting pins 220 are also lifted at the same time.

In this embodiment, when the connecting member 280 is elevated, the guide rod 270 is guided to move vertically, so the vertical movement of the lifting pin drive shaft 230 connected to the connecting member 280 can be made stable. In addition, since the connecting member 280 is guided by the guide rod 270 and moved vertically precisely, the force transmitted to the lift pin drive shaft 230 is also transmitted exactly vertically, and the force in the horizontal direction is lift pin drive shaft 230. To prevent).

In addition, the driving arm 291 in the process of lifting the plurality of connecting members 280 at the same time, the force for lifting each connecting member 280 is connected due to various factors such as the difference in elastic force by the elastic member 240 Each member 280 may be slightly different. This difference in force means that the driving arm 291 can be inclined in any direction without being raised and lowered in a precisely leveled state.

When the driving force is transmitted to the lifting pin driving shaft 230 through the connecting member 280 in a state where the driving arm 291 is inclined, the driving force of the driving device 292 is perpendicular to the plurality of lifting pin driving shafts 230. It is not transmitted to, but a horizontal force can be generated. The horizontal force generates a force in a direction in which the bearing pins 251 and 261 are pressed during the lifting pin driving shaft 230 is lifted, so that the lifting operation of the lifting pin drive shaft 230 is not smooth. In addition, the bearing members 251 and 261 may be worn or noise may be generated during the lifting operation of the lifting pin drive shaft 230.

In this embodiment, the driving arm 291 and the connecting member 280 are not completely fixed, and the driving arm 291 is connected to the connecting member 280 in a horizontal direction so as to be relatively movable. With this configuration, in the process of elevating the connecting member 280 by the driving arm 291, even if a force in the horizontal direction is generated with respect to the connecting member 280 by various factors, the driving arm 291 or the connecting member. 280 can be moved relative to the horizontal direction, thereby canceling the generated horizontal force.

Accordingly, the driving force of the driving unit 292 can be accurately transmitted to the connecting member 280 in the vertical direction. The driving force transmitted to the connection member 280 is accurately transmitted in the vertical direction to the lifting pin drive shaft 230 connected to the connection member 280, so that the lifting operation of the lifting pin 220 is made quickly and accurately. In addition, it is possible to prevent the occurrence of noise or wear of the device during the lifting operation of the lifting pin 220.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention will be.

100 substrate lifting device 110 plate
111: pinhole 120: lifting pin
130: lifting pin drive shaft 131: sealing cap
132: stepped part 133: stepped part
140: elastic member 150: base member
150a: through hole 151: bearing bush
152: O-ring 160: case member
160a: head portion 161: bearing bush
170: lifting drive unit 180: driving arm
180a: arm 190: drive device
270: guide rod 280: connecting member
280a: shaft side connection portion 280b: rod side connection portion
281, 282: stepped portion 283, 284: bearing bush
285: opening 286: coupling member
290: lifting drive unit 291: driving arm
291a: arm 292: drive unit

Claims (23)

A plate on which the substrate is seated;
A plurality of lifting pins installed through the plate to support the substrate;
A plurality of lift pin drive shafts each of which lift pins are fixed and lifted together with the lift pins;
An elevating driver for elevating the plurality of elevating pin drive shafts simultaneously;
Lt; / RTI >
The lifting drive unit,
A driving arm connected to the plurality of lifting pin drive shafts to allow relative movement in a horizontal direction with respect to the lifting pin drive shafts;
A drive device for transmitting power to the drive arm; Including;
The driving arm has a plurality of integral arms each connected to the lifting pin drive shaft,
An end portion of the arm is formed in a U-shape, it is sandwiched between the two stepped portions formed on the lifting pin drive shaft, substrate lifting apparatus. The method of claim 1,
An elastic member installed outside of each of the lifting pin driving shafts and generating a resistance to the rising of the lifting pin driving shafts;
Substrate elevating device further comprising. The method of claim 2,
A case member fixed to the lower portion of the plate to cover the elastic member and configured to guide the lifting of the lifting pin drive shaft;
Substrate elevating device further comprising. The method of claim 3,
And the head portion of the case member includes a bearing bush in close contact with the lift pin drive shaft. The method of claim 2,
And the elastic member is a bellows. The method of claim 1,
The lifting pin is provided with three,
And said drive arm has three arms integrally formed, each said arm being connected to said lift pin drive shaft. delete The method of claim 1,
A base member attached to a lower portion of the plate and having a through hole through which the lifting pin is lifted and formed;
Further comprising:
And a bearing bush is mounted to the through hole. 9. The method of claim 8,
An O ring formed to surround the through hole between the plate and the base member;
Substrate elevating device further comprising. A plate on which the substrate is seated;
A plurality of lifting pins installed through the plate to support the substrate;
A plurality of lift pin drive shafts each of which lift pins are fixed and lifted together with the lift pins;
A plurality of guide rods disposed below the plate adjacent to each of the lifting pin driving shafts;
A plurality of connection members connected to each of the lifting pin drive shafts and lifted along an outer surface of the guide rod;
And a lift driver for lifting the plurality of connection members at the same time.
The lifting drive unit,
A driving arm connected with the plurality of connecting members to allow relative movement in the horizontal direction with respect to the connecting member;
And a driving device for transmitting power to the driving arm.
The driving arm has a plurality of integral arms each connected with the plurality of connecting members,
An end portion of the arm is formed in a U-shape, it is sandwiched between the two stepped portions formed in the rod-side connecting portion of the connecting member. The method of claim 10,
An elastic member installed outside of each of the lifting pin driving shafts and generating a resistance to the rising of the lifting pin driving shafts;
Substrate elevating device further comprising. delete The method of claim 10,
The connecting member is a substrate lifting device comprising a shaft side connection portion connected to the lifting pin drive shaft, and a rod side connection portion integrally formed with the shaft side connection portion and extending to a predetermined length along the outer surface of the guide rod. delete The method of claim 13,
And two or more bearing bushings are mounted between the rod side connecting portion and the guide rod. The method of claim 13,
The axial side connecting portion of the connecting member includes a shaft through hole through which the lifting pin drive shaft is fitted, and an opening connected to the shaft through hole.
And the lift pin driving shaft is coupled to the coupling member positioned in the opening through the shaft through hole. 12. The method of claim 11,
A case member fixed to the lower portion of the plate to cover the elastic member and configured to guide the lifting of the lifting pin drive shaft;
Substrate elevating device further comprising. 18. The method of claim 17,
And the head portion of the case member includes a bearing bush in close contact with the lift pin drive shaft. 12. The method of claim 11,
And the elastic member is a bellows. The method of claim 10,
The lifting pin is provided with three,
And said drive arm has three arms integrally formed, each said arm being connected to said connection member. The method of claim 10,
A base member attached to a lower portion of the plate and having a through hole through which the lifting pin is lifted and formed;
Further comprising:
And a bearing bush is mounted to the through hole. The method of claim 21,
An O ring formed to surround the through hole between the plate and the base member;
Substrate elevating device further comprising. The method of claim 21,
And the guide rod is fixed to one of the lower portion of the plate and the base member.

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