KR101285221B1 - micro-dynamic system applying high durability·low friction coating - Google Patents

Abstract

A micro dynamic system employing a high durability and low friction coating is disclosed. In the micro-dynamic system applying the high durability and low friction coating according to an embodiment of the present invention, the coating layer is formed on the surface of the contact element, but the coating layer is formed on the surface of the CNT layer and the CNT layer. It includes;

Description

Micro-dynamic system applying high durability, low friction coating

The present invention relates to a micro dynamic system employing a high durability, low friction coating.

In addition to micro-electrical systems, various micro dynamic systems with drives such as micro mirrors, hinges, switches, gears and actuators have been developed and successfully implemented. It is recognized as a major factor in determining reliability.

As a result, efforts have been made to optimize the tribology characteristics of the components of the microdynamic system. However, due to its viscosity and surface tension, liquid lubricants cannot be used. have.

Tribology is a technique for physical and chemical interactions that occur on two or more surfaces of a relative contact frictional motion. Friction occurs when a surface of an object is in contact with it or stops. It refers to practical science and technology that deals with the characteristic contact interface phenomena due to wear, lubrication and lubrication.

Self-assembled monolayers (SAMs), molybdenum disulfide (MoS2), graphite, and soft metals (gold, silver, copper, etc.) have been studied to reduce contact friction in micro dynamic systems. Research has been conducted on diamond-like-carbon coatings.

Recently, researches have been carried out to apply the excellent mechanical properties of carbon nanotubes (CNT) to tribological behavior, and studies on coating carbon nanotubes on the surface of contact elements, metals and polymers. Research on carbon nanotube composites in which carbon nanotubes are added to materials and the like is being conducted.

However, coatings such as soft metals have excellent frictional force reduction characteristics, but it is difficult to guarantee the reliability of contact performance due to the wear of the coatings, and carbon nanotube coatings protect the surface of the coatings due to high surface stiffness while There was a problem that damage the surface of the contact object to be caused thereby causing increased friction.

Korean Registered Patent 663,893 Japanese Laid-Open Patent 2009-58488

The present invention devised to solve the problems as described above, the high durability and low friction coating that can implement a combination of high durability and low friction characteristics by a multi-layer coating of a material having a high durability and a material having low friction characteristics Another object of the present invention is to provide a contact structure of a contact element, a micro dynamic system, and a method for forming the same, which constitute a dynamic system using the same.

The present invention for achieving the object as described above, in the coating formed on the surface of the device or structure, comprising a carbon nanotube (CNT, carbon nanotube), CNT layer formed on the surface of the device or structure 20; And a soft layer 30 formed on the surface of the CNT layer 20, and comprising a material that is softer than the carbon nanotubes, and has a high durability and low friction coating.

Here, the CNT layer 20 may be formed in a mesh structure in which the carbon nanotube strands are entangled with each other.

In addition, the CNT layer 20 may be formed to a thickness of 1nm or more to 5㎛ or less.

In addition, in the soft layer 30, some of the soft metal particles may be penetrated into the CNT layer 20 having a mesh structure and may be anchored with the CNT layer 20.

In addition, the soft layer 30 may be formed of a metal material having a shear modulus of less than 50 G㎩.

In addition, the soft layer 30 may include one or two or more of Ag, Cu, and Au.

In addition, the soft layer 30 may be formed to a thickness of 10 nm or more to 600 nm or less.

In addition, the present invention, in the structure of the contact portion of the dynamic system having a sliding contact surface, a plurality of carbon nanotubes (CNT, carbon nanotube) is formed on the surface of the contact element 10 of the dynamic system, the surface end side A CNT layer 20 formed of an irregular mesh structure capable of distributing and supporting locally transferred loads to the plurality of carbon nanotubes; And a metal material that is softer than the carbon nanotubes, and forms the sliding contact surface with a lower surface roughness than the CNT layer 20 on the surface of the CNT layer 20 and applies a vertical contact load to the CNT layer ( The soft contact portion 31 to be delivered to the side 20, and continuously formed at the contact end with the CNT layer 20 of the soft contact portion 31 and the metal particles penetrate between the carbon nanotube strands to the CNT layer 20 The contact structure of the contact element constituting a dynamic system including; a soft layer 30 having a CNT binding portion 32 for implementing an anchoring structure with the other technical gist.

In addition, the present invention, a micro dynamic system having a drive unit, which is provided in the drive unit of the dynamic system, the contact element 10 in sliding contact with the contact object; A CNT layer 20 formed by bonding carbon nanotubes (CNTs) to the sliding contact surface of the contact element 10; And a metal material that is softer than the carbon nanotubes, and covers a surface of the CNT layer 20 with a surface roughness lower than that of the CNT layer 20 and is softly coupled to penetrate into the CNT layer 20. Layer 30 is another technical subject matter.

In addition, the present invention, in coating the surface of the device or structure, CNT layer formation state of bonding or depositing carbon nanotubes (CNT, carbon nanotube) on the contact surface of the device or structure; And a soft layer forming state of bonding or depositing a material that is softer than the carbon nanotubes to the surface of the carbon nanotubes.

The CNT layer forming state may be formed in a mesh structure in which the carbon nanotube strands are entangled with each other by dip-coating by dipping the device or structure in a carbon nanotube solution. .

In addition, the carbon nanotube solution, isopropyl alcohol (IPA, isopropyl alcohol) as a dispersing agent (dispersing agent) to the carbon nanotube strands in the ratio of CNT: IPA = 1-10% by volume: 90-99% by volume It can be produced by mixing.

In addition, the soft layer formation state may be deposited so that metal particles partially penetrate between the carbon nanotube strands forming a mesh structure by sputtering.

In addition, it is possible to implement an anchoring structure between the CNT layer 20 composed of the carbon nanotubes and the soft layer composed of the soft metal material by the metal particles penetrated between the carbon nanotube strands.

The present invention according to the above configuration, by sequentially coating the CNT layer and the soft layer on the surface of the contact element constituting the micro dynamic system, it is high by the multi-layer coating of the material having high durability and the material having low friction characteristics Durability and low friction can be combined.

In forming the CNT layer, the CNT strands are formed in a mesh structure in which the CNT strands are intricately intertwined with each other.In forming the soft layer, the soft metal particles are partially penetrated into the CNT layer in the mesh structure, thereby firmly binding the CNT layer and the soft layer. By implementing the structure, the wear resistance and the frictional force reduction effect of the soft metal (eg, Ag) according to the excellent mechanical strength of the carbon nanotubes can be complexly implemented.

That is, the low wear resistance, which is a disadvantage of the soft metal coating with excellent friction reduction performance, is solved by solid anchoring with the CNT layer mesh structure, and high friction, which is a disadvantage of the carbon nanotube coating with excellent surface protection performance. This can be solved by the soft metal layer bound to the silver surface.

In addition, while the local load acting on the surface of the contact element can be flexibly dispersed by deformation of the mesh structure of the CNT layer, the rough surface of the CNT layer is lowered by the soft property of the soft layer. The frictional force (friction coefficient) can be reduced by making the surface state having surface roughness and surface energy.

The present invention discloses a new type of dual-layer coating structure that can significantly solve the disadvantages occurring in a single material, but can be easily applied regardless of the size and shape of the target device by a simple process. In addition, it can be applied to various fields requiring high precision and minimization of wear, thereby improving reliability and longevity.

In addition to a variety of micro dynamic systems with drives such as micro mirrors, hinges, switches, gears and actuators, in addition to ultra-fine micromachines, MEMS applications and aerospace applications based on applications in extreme environments, It can be widely applied to all fields where requirements and performance of reducing friction and abrasion are comprehensively required.

1-Conceptual view showing a high durability, low friction coating structure according to a first embodiment of the present invention
FIG. 2-Scanning electron micrograph of Comparative Example 2 applying Ag coating having an average thickness of 350 nm
3-Scanning electron micrograph of Comparative Example 3 applying a thick CNT coating having an average of 3㎛
4-Scanning electron micrograph of Comparative Example 4 applying a thin CNT coating having an average of 300 nm
Figure 5-Scanning electron micrograph of Prototype 1 with multi-layered thick CNT coating and Ag coating
6-cross-sectional picture of FIG.
7-enlarged photograph of the dotted line region of FIG.
8 to 7 are enlarged photographs of the dotted line region of FIG.
9-Scanning electron micrograph of prototype 2 having a thin CNT coating and Ag coating multilayered
Fig. 10-Cross section picture of Fig. 9
11-enlarged photograph of the dotted line area of FIG.
12-Graph showing the real-time change of the coefficient of friction during a sliding friction experiment of 3,600 cycles
Figure 13-Graph showing the friction coefficients at the beginning of the sliding friction experiment and at 3,600 cycles.
14-A conceptual diagram illustrating the wear mechanism of Comparative Example 2
15-A conceptual diagram illustrating the wear reduction mechanism of prototypes 1 and 2
16-Graph showing wear rate after sliding friction experiment
17-Optical photo of the wear track of Comparative Example 1 after the sliding friction experiment
18-Optical photo of the wear track of Comparative Example 2 after a sliding friction experiment
19-Optical photo of the wear track of Comparative Example 3 after a sliding friction experiment
20-Optical photo of the wear track of Comparative Example 4 after a sliding friction experiment
21-Optical photo of the wear track of Example 1 after a sliding friction experiment
22-Optical photo of the wear track of Example 2 after a sliding friction experiment

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a conceptual diagram showing a high durability and low friction coating structure according to a first embodiment of the present invention, in which an embodiment applied to a contact surface of a contact element 10 constituting a micro dynamic system having a driving part is shown.

Referring to FIG. 1, the high durability and low friction coating according to the first embodiment of the present invention is a carbon nanotube on a surface of a contact portion of the contact element 10 in sliding (slip, friction) contact with the contact object 50. The CNT layer 20 including (CNT, carbon nanotube) and the soft layer 30 including a softer material than the carbon nanotubes are sequentially stacked.

The CNT layer 20 is formed by combining a plurality of carbon nanotubes on the surface of the contact element 10 of the dynamic system, the surface end side by the contact with the contact object 50 (the soft layer 30) Side) is formed in an irregular mesh structure capable of distributing and supporting the locally transmitted load (contact pressure) with the plurality of carbon nanotubes.

The soft layer 30 is penetrated between the soft contact portion 31 and the carbon nanotube strand to form a sliding contact surface with the contact object 50 with a lower surface roughness (surface roughness) than the CNT layer 20 The CNT layer 20 has a structure consisting of a CNT binding portion 32 that is engaged with (anchoring, interlocking).

The soft layer 30 is configured to include a material that is softer than the carbon nanotubes and is harder than the contact element 10, and is made of a metal material having a shear modulus of less than 50 G㎩. For example, Ag has a shear modulus of 27.8 GPa, Cu 46.0 GPa, and Au 27.2 GPa. The soft layer 30 may include any one or two or more of Ag, Cu, Au.

When there is a speed difference between two layers in contact with each other, a shear force occurs, and friction occurs between the two layers, thereby resisting the shear force. The shear modulus causes the material to resist deformation in the vertical direction. It is a measure of the ability to do so, which is the elasticity index that holds only in the micro-deformation where the material can return to its original state.

Compared with the CNT layer 20, the soft contact portion 31 is a flexible and smooth surface of the soft material, which is slidable in contact with the contact object 50 with less frictional force, that is, relatively low surface roughness. By providing a surface with a surface energy (surface energy) and to achieve a frictional force reducing effect.

The vertical (sliding direction) contact pressure by the contact with the contact object 50 is transmitted to the CNT layer 20 side through the soft contact portion 31.

The contact pressure with the contact object 50 is a major factor that causes the wear of the soft layer 30. A portion of the soft contact part 31 is attenuated by the ductility of the soft contact part 31, and most of the contact pressure 50 is transferred to the CNT layer 20. It is transmitted as it is and is dispersed and attenuated into the plurality of carbon nanotube strands constituting the CNT layer 20.

When the CNT layer 20 is formed in a mesh structure, the plurality of carbon nanotube strands are flexibly deformed by the local load acting on the surface of the CNT layer 20, thereby flexibly damping and dispersing the load. The contact pressure can be effectively reduced while minimizing wear and tear of the soft layer 30.

The CNT binding portion 32 is continuously formed integrally at the contact end with the CNT layer 20 of the soft contact portion 31, the hollow particles between the carbon nanotube strands having an irregular mesh structure of the constituent particles It penetrates and implements a firm binding structure that restrains the departure from the CNT layer 20.

As the thickness of the CNT binding portion 32 is thicker, the binding structure between the CNT layer 20 and the soft layer 30 may be more firmly implemented, which is a bulk contact such as a silicon wafer. When the metal coating is directly applied to the surface of the device, the bonding depth, the bonding area, and the like are different from those determined by the surface roughness of the contact device.

By such a dual-layer coating structure, it is possible to simultaneously solve the wear and friction problems caused by the application of a single material (including a mixed material). In other words, it solves the problem caused by wear of soft metal materials by complex application of carbon nanotube mesh structure, and solves the problem caused by excessive surface stiffness of carbon nanotube by softening and controlling surface stiffness by composite application of soft material. The friction force can be reduced.

In addition, even if a bulk coating is disclosed that can achieve the same degree of friction and wear reduction performance, according to the embodiment of the present invention, a relatively small density can be realized by the CNT layer 20, and thus, weight If the high durability and low friction coating is applied over a large area that is sensitive to the sensitive element or the overall weight of the device, it can be more usefully applied.

The CNT layer 20 is within a thickness range of 1 nm or more and 5 µm or less, and the soft layer 30 is within a thickness range of 10 nm or more and 600 nm or less, and more suitable in consideration of its implementation conditions. It is preferable to apply the thing.

Next, a method of forming a high durability and low friction coating according to an embodiment of the present invention will be described.

The micro dynamic system to which the high durability and low friction coating according to the first embodiment of the present invention is applied includes known micromachining processes including micro bulk micromachining, surface micromachining, and the like. It can be processed into a specified form by the combination of.

In the method for forming a high durability and low friction coating according to the first embodiment of the present invention, the CNT is formed by bonding or depositing carbon nanotubes (CNTs) on the contact surface of the contact element 10 of the micro dynamic system. The CNT layer forming state forming the layer 20 and the soft layer forming state forming the soft layer 30 by bonding or depositing a material softer than the carbon nanotubes on the surface of the CNT layer 20 are sequentially formed. It can be done through.

In the CNT layer forming state, the carbon nanotube strands are formed in a mesh structure in which the carbon nanotube strands are entangled with each other by a dip-coating method in which the contact portion of the contact element 10 is immersed in a carbon nanotube solution. do.

The carbon nanotube solution may be prepared by mixing the carbon nanotube strands at a ratio of CNT: IPA = 1 to 10% by volume: 90 to 99% by volume with isopropyl alcohol (IPA, isopropyl alcohol) as a dispersing agent. Can be.

In the first embodiment of the present invention, the CNT layer 20 is formed in a non-uniform shape in which the plurality of carbon nanotubes are entangled with each other by the dip-coating method, but the plurality of carbon nanotubes are If the CNT layer 20 can be formed in an unevenly intertwined structure, other dip-coating methods or other methods such as chemical vapor deposition (CVD) may be applied.

In addition, in the first embodiment of the present invention, in forming the CNT layer 20, the plurality of carbon nanotubes are formed in an uneven shape in which they are entangled with each other. If feasible, it is not limited to a specific structure and shape, including an embodiment formed in the form of a carbon nanotube array (CNT array, Carbon Nano Tube array) by chemical vapor deposition.

In the soft layer forming state, by sputtering, the soft particles may be deposited to partially penetrate between the carbon nanotube strands forming a mesh structure, and the soft particles penetrate between the carbon nanotube strands. An anchoring structure between the CNT layer 20 and the soft layer 30 is realized.

When a particle with a very high energy impinges on a cathode material (eg ion beam), the energy is transferred to the atoms around the collision site and some of the atoms bounce outwards. Called a sputtering phenomenon, target material atoms are released in the vapor phase and deposited on the workpiece (the contact portion of the contact element 10 in the first embodiment of the present invention) located on the opposite side.

This sputtering allows the impingement of impingement particles to be transferred directly to the target material atoms, resulting in clear target material atoms into the CNT layer 20 as compared to conventional vacuum evaporation or ion plating. And can easily penetrate.

Next, the high durability and low friction characteristics of the high durability and low friction coating actually manufactured according to the embodiment of the present invention will be confirmed through various experiments.

2, 3, and 4 are Comparative Examples 2 in which an Ag coating having an average thickness of 350 nm was applied to a surface of a Si wafer (Comparative Example 1), and Comparative Example 3 in which an average 3 μm thick CNT coating was applied. , Scanning electron microscope (SEM) photograph of Comparative Example 4 to which an average of 300 nm thin CNT coating was applied.

FIG. 5 is a scanning electron microscope photograph of the prototype 1, in which the thick CNT coating of Comparative Example 3 and the Ag coating of Comparative Example 2 were applied in a dual-layer, among prototypes prepared according to an embodiment of the present invention. FIG. 5 is an enlarged photograph of the dotted line region of FIG. 6, and FIG. 8 is an enlarged photograph of the dotted line region (the CNT binding unit 32) of FIG. 7.

And, Figure 9 is a scanning electron microscope photograph of the prototype 2 applied a thin CNT coating of Comparative Example 4 and the Ag coating of Comparative Example 2 of the prototype produced according to an embodiment of the present invention, Figure 10 is 11 is an enlarged photograph of a dotted line region (the CNT binding portion 32) of FIG.

In manufacturing the prototypes 1 and 2, in forming the CNT layer 20, a multi-walled carbon nanotube is coated on a silicon wafer in a mesh structure, and the soft layer 30 is coated. In forming, some Ag particles were formed to penetrate into the CNT layer 20 having a mesh structure by sputtering.

Friction and wear experiments of Comparative Example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, Prototype 1, and Prototype 2 were carried out using a pin-on-reciprocator tribotester. It was.

The stroke of the reciprocating motion was driven at a reciprocating displacement of 4 mm and a speed of 1 kPa, and a pin for abrasion of the coating surface was made of a spherical ball made of Zirconia (ZrO2) material having a diameter of 0.5 mm. In addition, for all experiments, the vertical load of 20mN was applied in a batch, and the total sliding friction time was applied equally to 3,600 cycles.

12 is a graph showing a real-time change of the friction coefficient of Comparative Example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, Prototype 1, Prototype 2 during the sliding friction experiment of 3,600 cycles, and FIG. This is a graph comparing the friction coefficient in the initial state (after 10 cycles) and the final state (after 3,600 cycles).

12 and 13, Comparative Example 1 (Si wafer of FIGS. 12 and 13) and Comparative Example 2 (Ag coating) (Ag of FIGS. 12 and 13) initially have a low coefficient of friction, As it continues, it can be seen that the friction coefficient tends to increase continuously from 0.55 to 0.6 due to wear.

In comparison, Comparative Example 3 (thick CNT coating) (T of FIGS. 12 and 13) initially had a high coefficient of friction of about 0.55 due to structural influences and strong stiffness caused by carbon nanotube strands. As it persists, the friction coefficient increases to 0.74 and then converges to a steady state.

Comparative Example 4 (thin CNT coating) (t in FIGS. 12 and 13) initially had a friction coefficient of about 0.55, similarly to Comparative Example 3, and after the friction coefficient became maximum at about 100 cycles, It can be seen that it rapidly decreases to 500 cycles, then slowly decreases, and then converges to a steady state with a small coefficient of friction of 0.3.

Prototypes 1 and 2 (thick CNT-Ag coating, thin CNT-Ag coating) (T / Ag, t / Ag in FIGS. 12 and 13) initially have a relatively small coefficient of friction of 0.3 to 0.35 around 100 cycles. It can be seen that even if the experiment is continued, the steady state is maintained without any obvious change.

Through the long-term friction test for 3,600 cycles for Comparative Example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, Prototype 1, Prototype 2, the final state (3,600 cycles) than the friction coefficient of the initial state (10 cycles immediately) It can be seen that the frictional coefficient (friction force) of the back) increases significantly.

This means that in the initial state, the friction coefficient was measured before the surface of the coating was worn, and in the final state, the friction coefficient was measured with the wear occurring on the surface of the coating.

In addition, the smaller friction coefficient rise of the prototypes 1 and 2 compared to the coatings of Comparative Examples 1 to 4 means that a relatively good friction reduction performance is realized, and the prototypes 1 and 2 maintain low friction coefficients. Maintaining with means that the coating state is maintained continuously without abrasion.

14 (a) and 14 (b) are conceptual views illustrating the wear mechanism of Comparative Example 2 (Ag coating), and FIGS. 15 (a) and 15 (b) illustrate the prototypes 1 and 2 (thick CNT- Ag coating, thin CNT-Ag coating) is a conceptual diagram illustrating the wear reduction mechanism.

In the case of Comparative Example 2 (Ag coating), by sliding friction with the contact object (pin of the tribotester of the pin-on-reciprocator method), (a) As shown in Fig. 6), a portion of the surface of the Ag layer is pushed to delamination and debris is generated. In the final state, as shown in FIG. Exposed.

In comparison, in the case of the prototypes 1 and 2 (thick CNT-Ag coating, thin CNT-Ag coating), initially, as shown in FIG. 15A, the soft layer 30 (Ag coating) Although a portion of the surface was pushed away and fragments were generated, even if the time of the friction experiment persists, as shown in FIG. 15 (b), the soft layer 30 on the CNT layer 20 without a significant progress of abrasion. This bound state remained stable.

16 is a graph showing the wear rate (abrasion amount) of the comparative example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, Prototype 1, Prototype 2 in the sliding friction test state at 3,600 cycles.

Referring to FIG. 16, it can be seen that the wear rate of the comparative example 3 (T) is the largest, and the wear rate of the comparative example 1 (Si) and the comparative example 2 (Ag) is measured in the order of the largest, and the prototype It can be seen that 1 (T / Ag) and prototype 2 (t / Ag) have the smallest wear rate.

It can be seen that the wear rate of Comparative Example 4 (t) is significantly lower than that of Comparative Example 3 (T), but the wear rate of Figure 16, Comparative Example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, a prototype 1, Prototype 2 It represents the absolute value, not relative to the volume of each coating layer, since the wear rate of Comparative Example 4 (t) is about the same as the volume of the thin CNT coating layer constituting the Comparative Example 4 (t). It can be judged that the entire thin CNT coating is completely worn out.

That is, the relatively low wear rate of Comparative Example 4 (t) in FIG. 16 does not mean that the wear resistance of the thin CNT coating is excellent, and the final state of the Comparative Example 4 (t) in FIGS. 12 and 13 (after 3,600). The friction coefficient (frictional force) of the cycles) measured as low as 0.27 similar to the friction coefficient of the initial state (after 10 cycles) of Comparative Example 1 (Si) can also be judged to be due to the complete wear of the thin CNT coating. .

17 to 22 are optical images of the wear tracks of the comparative example 1, comparative example 2, comparative example 3, comparative example 4, prototype 1, and prototype 2, which were subjected to sliding friction experiments at 3,600 cycles. After the image was divided into seven locations, the images were continuously integrated.

Referring to FIG. 17, which captures the wear track of Comparative Example 1, it can be clearly seen that wear has occurred on the silicon wafer surface (green).

Referring to FIG. 18 in which the wear track of Comparative Example 2 is photographed, most of the Ag coating (light yellow) in the thickness direction is worn and the silicon wafer (green) is exposed, and the Ag debris peeled off during the wear process is the edge of the wear track. In particular, it can be found that they are pushed to both ends of the reciprocating displacement.

Referring to FIG. 19 in which the wear track of Comparative Example 3 is imaged, it can be seen that the thick CNT coating (silver) is kept in a squeezed state.

Referring to FIG. 20, in which the wear track of Comparative Example 4 is photographed, it can be seen that most of the thickness direction of the thin CNT coating (gold) is worn and the silicon wafer (white) surface is exposed.

21 and 22 of the wear tracks of the first and second embodiments, the thick CNT-Ag coating (Ag: yellow) and the thin CNT-Ag coating (Ag: yellow) are kept in a compressed state. It can be confirmed that, from this it can be confirmed the friction and wear reduction effect according to the structure (anchoring) structure between the CNT layer 20 and the soft layer (30).

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It is to be understood that the techniques which can be used by those skilled in the art to which the present invention belongs are included in the technical scope of the present invention.

10: contact element 20: CNT layer
30: soft layer 31: soft contact portion
32: CNT binding unit 50: contact object

Claims (14)

delete delete delete delete delete delete delete delete In a micro dynamic system having a drive,
A contact element (10) provided in the driving unit of the dynamic system and in sliding contact with the contact object;
A plurality of carbon nanotubes (CNTs) are formed on the surface of the contact element 10 of the dynamic system, and an irregular mesh capable of distributing and supporting the load transferred locally from the surface end side to the plurality of carbon nanotubes. CNT layer 20 formed of a (mesh) structure; And
It is composed of a metal material that is softer than the carbon nanotubes, the sliding contact surface is formed on the surface of the CNT layer 20 with a lower surface roughness than the CNT layer 20 and the vertical contact load is applied to the CNT layer 20 The soft contact portion 31 to be delivered to the side, and the continuous contact is formed at the contact end with the CNT layer 20 of the soft contact portion 31 and the metal particles penetrate between the carbon nanotube strands and the CNT layer 20 and Soft layer 30 is provided with a CNT binding portion 32 to implement the anchoring structure of (anchoring);
Micro dynamic system comprising a.
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