KR101283700B1 - Pulse output type power supply for xenon lamp - Google Patents

Abstract

PURPOSE: A xenon lamp pulse type power supply is provided to stabilize the wavelength of emitted ultraviolet rays, thereby improving sterilization efficiency. CONSTITUTION: A control unit (30) is connected to a display control unit and includes a communication unit. A chopping unit (40) controls a PWM signal of a certain frequency, outputs square wave pulses, measures voltage, current, and temperature, and sends the measured data regularly to the control unit. A voltage boosting unit (50) determines whether a trigger signal is received from the control unit or not and then outputs the trigger signal in a pulse form. A trigger rectifier (60) rectifies the trigger signal and extracts a trigger waveform. A trigger coil unit includes a trigger coil on the outer surface of a xenon lamp and applies the trigger waveform into the xenon lamp.

Description

Xenon lamp pulsed power supply {PULSE OUTPUT TYPE POWER SUPPLY FOR XENON LAMP}

The present invention relates to a xenon lamp pulse-applied power supply, and more particularly, to contribute to the stabilization of the wavelength emitted from the xenon lamp as well as to provide a stable power supply to the xenon lamp, and to achieve stable operation and high reliability. The present invention relates to a xenon lamp pulsed power supply.

In general, a power supply is a power supply, a device that supplies power for driving various electrical and electronic devices, and has a power circuit that generates output power required from input power.

Looking at the prior art related to such a power supply, Korean Patent Laid-Open No. 10-2005-0034363 has a transformer in which the first winding is wound on the primary side, the second winding and the third winding on the secondary side; Inputs a commercial voltage to the first winding, provides a voltage to the third winding, and adjusts a switching time of the voltage input to the first winding according to a change in the voltage generated in the third winding. A switching mode power supply controller for maintaining a constant secondary voltage; And a common connection to the second winding and the third winding, wherein an AC voltage generated in the second winding and the third winding is passed, and is connected to the second winding and the third winding by the switching mode power supply controller. The switching mode power supply noise generated is characterized in that it comprises a filter, which is to supply power suitable for power line communication system using a lot of low voltage DC power for internal operation, through the power line The present invention relates to a switching mode power supply device for power line communication (PLC), which is a technology for transmitting data.

In addition, Korean Patent No. 10-0942308 No. EMI filter unit provided in the input terminal of the commercial AC power, rectification and PFC switch circuit unit for rectifying the AC power through the EMI filter unit and correcting the power efficiency, the rectification and PFC switch circuit unit SMPS switch circuit unit for converting the DC voltage of the high frequency alternating current, secondary rectifier circuit unit for converting the high frequency AC voltage of the SMPS switch circuit unit into a DC voltage for applying to the LED, PWM control circuit unit for switching the SMPS switch circuit unit, the A constant voltage feedback circuit unit receiving a feedback output voltage of the LED and outputting a control signal for controlling the duty ratio of the PWM control circuit unit, and detecting the temperature of the LED to generate heat above a predetermined temperature, Characterized in that the configuration including a thermal sensing circuit portion for outputting a sense signal When the LED generates heat above a certain temperature, the output resistance of the thermal sensing circuit is changed to control the duty ratio of the PWM control circuit through the constant voltage feedback circuit to reduce the effective value of the output power of the secondary rectifier circuit. Its purpose is to limit the output when the temperature rises above a certain temperature, to provide a power supply circuit suitable for LED streetlights.

Furthermore, in Korean Patent No. 10-0908461, a program logic controller (PLC) for sensing and adjusting output power; A program logic controller (PLC) interface that receives the output of the program logic controller and buffers the output of the program logic controller to provide it to a power supply; A DC power supply unit receiving an output provided from the program logic controller (PLC) interface and generating an output to the main inverter to provide an operating power source for a cold cathode fluorescent lamp; A remote control device remotely connected to the DC power supply unit to generate and process a signal for controlling an output; And a synchronization device (SYNC BOX) for receiving a pulse width modulation (PWM) signal generated from the program logic controller (PLC) interface and providing a synchronization signal between a main inverter and a server inverter connected to the load side. This is related to the aging power supply of the cold cathode fluorescent lamp for stably supplying the power according to the load variation through the program logic control.

Meanwhile, the applicant of the present application intends to utilize a xenon lamp filled with a xenon gas for exposure processing of a semiconductor process, or for sterilization of air or water, and proposes a power supply for stabilizing a wavelength of a xenon lamp and driving it stably. However, the power supply of the embodiments described above will be different in use and implementation technology.

Here, the xenon lamp is mainly used as a headlight of a vehicle, and it is possible to supplement the disadvantage of having a ballast (ballast) as well as replacing the existing high intensity discharge (HID) lamp. Is being reported.

The xenon lamp is a lamp that uses light emission due to discharge generated in xenon gas. The xenon lamp is charged with a pair of electrodes at regular intervals in a glass tube such as a quartz tube and charged with xenon gas. It is a lamp that emits light.

The present invention provides a stable power supply for supplying the xenon lamp, but contributes to the stabilization of the wavelength emitted from the xenon lamp, to achieve a stable operation and high reliability for the purpose of use of the xenon lamp. It is an object of the present invention to provide a xenon lamp pulse-applied power supply.

The present invention makes it possible to utilize a xenon lamp for exposure processing of semiconductor processes or for sterilization of air or water, and induces stable emission of ultraviolet wavelengths and applies a pulsed power supply to exert a useful and useful effect thereof. It is an object of the present invention to provide a xenon lamp pulse-applied power supply.

A xenon lamp pulse application type power supply according to an embodiment of the present invention for achieving the above object is an output voltage or pulse in a power supply for using the xenon lamp for exposure or sterilization of air or water. A display operation unit for variably setting a width or trigger period, a menu of a relay and adjusting a value thereof; A control unit having a built-in microcomputer and having a central control function, the control unit including a communication unit connected to input an output signal of a display operation unit, and configured to communicate with a chopping unit and a booster unit to communicate data; Based on the menu setting and the adjusted value according to the user input, the controller receives data from the controller and adjusts the PWM signal of the frequency according to the received data to output the square wave pulse, and controls and relays the current according to the controlled pulse width. In addition to providing a signal to measure the voltage, current, temperature to transmit data to the control unit at regular intervals, a chopping unit with a microcomputer built-in communication unit; It is connected to supply high voltage for discharging to xenon lamp, and it is used to determine whether there is a trigger signal from the control part and to output the trigger signal in the form of pulse and to measure the voltage and to transmit data to the control part at regular intervals. A booster having a built-in microcomputer and a communication unit; A trigger rectifier for extracting a trigger waveform through rectification by receiving a trigger signal output in a pulse form from a booster; A trigger coil inserted on an outer surface of the xenon lamp, the trigger coil for applying a pulse to the xenon lamp; And a control unit.

On the other hand, the xenon lamp pulse application type power supply according to another embodiment of the present invention for achieving the above object, the output in the power supply for using the xenon lamp for exposure or sterilization of air or water A display operation unit for variably setting a voltage, pulse width or trigger period, and a menu of a relay and adjusting a value thereof; A control unit for connecting the output signal of the display control unit to be input and having a built-in microcomputer and a central control function; Based on the menu setting and the adjusted value according to the user input, the controller receives data from the controller and adjusts the PWM signal of the frequency according to the received data to output the square wave pulse, and controls and relays the current according to the controlled pulse width. In addition to providing a signal, the chopping unit for measuring the voltage, current, temperature and transmit data to the control unit at regular intervals; It is connected to supply high voltage for discharge to the xenon lamp, and it determines whether there is a trigger signal from the control unit and outputs the trigger signal in the form of pulse, and measures the voltage to transmit the data to the control unit at regular intervals. part; A communication unit by a photocoupler serving as a relay means for data exchange between the control unit and the chopping unit or between the control unit and the boost unit; A trigger rectifier for extracting a trigger waveform through rectification by receiving a trigger signal output in a pulse form from a booster; A trigger coil inserted on an outer surface of the xenon lamp, the trigger coil for applying a pulse to the xenon lamp; And a control unit.

According to the present invention, a xenon lamp filled with xenon gas and emitted with an ultraviolet wavelength can be usefully used for exposure treatment for emitting light in a semiconductor process or for sterilization treatment of air or water, thereby expanding the scope of application. At this time, it is possible to supply a stable pulse power to the xenon lamp and emit a stable wavelength, it is possible to achieve the usefulness to implement stable operation and high reliability even in the micro-change of the power source.

Therefore, by stabilizing the emitted ultraviolet wavelength, it is possible to increase the yield of circuit products as well as the production of microcircuits during exposure treatment, to increase the sterilization efficiency during sterilization treatment, and to extend the life of the lamp with stable wavelength emission and power supply. have.

In addition, the present invention is not only applicable to a variety of methods using a microcomputer and communication unit, but also by the digital method, the control characteristics of the xenon lamp can be more easily adjusted, and a pulsed trigger signal is applied to the xenon lamp using a trigger coil. Accordingly, the lamp can be driven with low current consumption and the emission wavelength and emission intensity can be increased.

In addition, when the communication unit for data exchange is configured as CAN communication, it is possible to enhance the resolution of error and error detection due to the data exchange, thereby achieving usefulness that can realize more stable operation characteristics and quick response.

1 is a block diagram showing a xenon lamp pulse applied power supply according to an embodiment of the present invention.
Figure 2 is a schematic diagram showing the main data transmission and reception relationship in the xenon lamp pulse-applied power supply according to an embodiment of the present invention.
Figure 3 is a block diagram showing a xenon lamp pulse applying power supply according to another embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The present invention will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.

Xenon lamp pulse application type power supply according to an embodiment of the present invention is to use a xenon lamp that emits an ultraviolet wavelength for exposure processing of semiconductor process or sterilization treatment of air or water to extend the application range and its purpose of use As shown in FIG. 1, the power supply unit 10, the display control unit 20, the control unit 30, the chopping unit 40, and a high voltage (HV) unit are provided. 50, a trigger rectifying unit 60, and a trigger coil unit 70.

The power supply unit 10 may display an AC voltage such as AC 220V or 380V and / or a rectified DC voltage such as DC 5V or 12V, such as a display control unit 20, a control unit 30, a chopping unit 40, It is for supplying the electric power required for the boosting part 50 or the like.

The display operator 20 is provided with a plurality of input keys for adjusting power (output voltage), pulse width or trigger period, relay setting and value, and menu setting or adjusted value or current driving. An LCD display is provided for displaying status such as status.

In this case, the display operation unit 20 is a variable setting and the value of the menu such as output voltage, pulse width or trigger period, relay through the user input using the input key, the output signal is the control unit 30 Configured to be sent).

The control unit 30 has a central control function, a microcomputer is built in, and is provided to enable data communication with the chopping unit 40 and the boosting unit 50.

In this case, the control unit 30, the chopping unit 40 and the boosting unit 50 may be provided with a communication unit 31, 41, 51 for each of the microcomputer is built-in and exchange data. It may be desirable to apply CAN (Controller Area Network) communication, and RS232, RS485 or I / O interface may be possible.

In addition, the CAN is capable of performing data transmission with a plurality of controllers as it has a multi-to-many communication scheme, that is, a multi-master communication function, rather than a one-to-one communication. Not only can it solve the data rate, but it can be installed inexpensively, and it uses 15-bit cyclic redundancy check (CRC) bits to provide error detection, error correction, and noise resistance. Can be implemented.

The chopping part 40 is provided to exchange data with the control part 30 and the boosting part 50 through communication, and outputs a square wave pulse with respect to a DC voltage, but a current suitable for the controlled pulse width flows. In addition to providing the ON / OFF signal to the relay, it also has a voltage or duty control function.

The booster 50 is provided to exchange data with the control unit 30 and the chopping unit 40 through communication, and outputs a trigger signal in the form of a pulse when a trigger signal is received from the control unit 30. It is provided to.

The boosting unit 50 is responsible for generating a high pressure for supplying a high pressure for discharge to the electrode of the xenon lamp 1 is filled with xenon gas and emits an ultraviolet wavelength, the electrode of the xenon lamp 1 Connected.

Specifically, the data transmission and reception relationship between the control unit 30 and the chopping unit 40 and between the control unit 30 and the boosting unit 50 will be described with reference to FIG. 2. The number (ID) is recorded and data can be initialized by using a microcomputer, and data can be transmitted and received through the communication units 31, 41 and 51.

The chopping unit 40 receives data from the control unit 30 based on a menu setting and an adjusted value according to a user input, and adjusts a PWM (pulse width modulation) signal of a frequency according to the received data. It outputs a pulse, allows the current to flow in the controlled pulse width, adjusts the duty according to the amount of current, and provides an ON / OFF signal to the relay.

In addition, the chopping part 40 measures the voltage, current, temperature, and the like of the current state to the control part 30 at regular intervals, and transmits such data. Allows you to control the TV.

The booster 50 determines whether there is a trigger signal that is a synchronization signal when receiving data from the controller 30 based on a menu setting and an adjusted value according to a user input, but only when there is a trigger signal. The trigger signal is output in pulse form and sent to the trigger rectifier 60.

At this time, the trigger signal is preferably configured to be made within a certain period according to the user input or a predetermined type.

In addition, the booster 40 measures the voltage of the current state and sends voltage data to the control unit 30 at regular intervals.

As described above, in configuring the control unit 30, the chopping unit 40, and the boosting unit 50, a pulse width control for stable driving of the xenon lamp 1 is applied by applying a digital method according to each microcomputer. Such characteristics can be adjusted more easily.

The trigger rectifier 60 is provided to generate a self-triggered signal for providing a synchronization signal by rectifying the trigger signal output in the form of a pulse from the booster 50.

At this time, the trigger rectifying unit 60 extracts the waveform of only the positive side in the ON state or only the negative side in the OFF state from the repeated pulse output of ON / OFF through rectification, depending on the direction in which the diode is installed in the forward or reverse direction. You can select and extract the trigger waveform of positive (ON / OFF or +/-) form.

The trigger coil part 70 is provided by inserting the trigger coil on the outer surface of the xenon lamp 1 to increase the light emission intensity of the xenon lamp 1, and apply a trigger pulse to the xenon lamp 1. It will play a role.

At this time, by providing the trigger coil of the trigger coil unit 70 on the xenon lamp 1 side, not only can the xenon lamp 1 be driven with low current consumption by pulse application, but also the luminous efficiency can be increased. The wavelength emitted from the lamp 1 can be stably controlled and the life of the xenon lamp can be extended.

On the other hand, Figure 3 is a block diagram showing another embodiment of the xenon lamp pulse-applied power supply according to the present invention, the power supply unit 110, the display control unit 120, the control unit 130, chopping (chopping) 140, a high voltage (HV) unit 150, a trigger rectifying unit 160, and a trigger coil unit 170 are formed.

At this time, in another embodiment according to the present invention can be said that the corresponding component and the function in the above-mentioned embodiment already have the same, it shall be applied mutatis mutandis, only the microcomputer for the control action control unit ( 110 is provided with only one built-in control unit 130 and the chopping unit 140 or communication unit 181, 182 for transmitting and receiving data between the control unit 130 and the booster 150 as a separate relay means There will be differences provided.

Here, the communication unit 181, 182 may be configured as a photo coupler for data exchange.

Accordingly, the xenon lamp pulse-applied power supply according to the present invention having the configuration as described above may contribute to stabilization of the wavelength emitted from the xenon lamp, and thus the xenon lamp may be used for exposure processing of semiconductor processes or air or water quality. It can be usefully used for sterilization treatment, and can show stable operation and high reliability, and can increase its processing efficiency during exposure or sterilization treatment.

The embodiments described above are merely illustrative of the preferred embodiments of the present invention and are not limited to these embodiments, and various modifications and variations may be made by those skilled in the art within the spirit and scope of the present invention. Substitutions may be made, which will fall within the technical scope of the present invention.

1: xenon lamp 10,110: power supply
20,120: display control unit 30,130: control unit
40, 140: chopping part 50, 150: boosting part
60,160: trigger rectification part 70,170: trigger coil part
31,41,51,181,182: communication unit

Claims (2)

In the power supply for using the xenon lamp for exposure or sterilization of air or water,
A display operation unit for variablely setting an output voltage, a pulse width, a trigger period, and a menu of a relay and adjusting a value thereof;
A control unit having a built-in microcomputer and having a central control function, the control unit including a communication unit connected to input an output signal of a display operation unit, and configured to communicate with a chopping unit and a booster unit to communicate data;
Based on the menu setting and the adjusted value according to the user input, the controller receives data from the controller and adjusts the PWM signal of the frequency according to the received data to output the square wave pulse, and controls and relays the current according to the controlled pulse width. In addition to providing a signal to measure the voltage, current, temperature to transmit data to the control unit at regular intervals, a chopping unit with a microcomputer built-in communication unit;
It is connected to supply high voltage for discharging to xenon lamp, and it is used to determine whether there is a trigger signal from the control part and to output the trigger signal in the form of pulse. A booster having a built-in microcomputer and a communication unit;
A trigger rectifier for extracting a trigger waveform through rectification by receiving a trigger signal output in a pulse form from a booster;
A trigger coil inserted on an outer surface of the xenon lamp, the trigger coil for applying a pulse to the xenon lamp; Xenon lamp pulse application type power supply comprising a. In the power supply for using the xenon lamp for exposure or sterilization of air or water,
A display operation unit for variablely setting an output voltage, a pulse width, a trigger period, and a menu of a relay and adjusting a value thereof;
A control unit for connecting the output signal of the display control unit to be input and having a built-in microcomputer and a central control function;
Based on the menu setting and the adjusted value according to the user input, the controller receives data from the controller and adjusts the PWM signal of the frequency according to the received data to output the square wave pulse, and controls and relays the current according to the controlled pulse width. In addition to providing a signal, the chopping unit for measuring the voltage, current, temperature and transmit data to the control unit at regular intervals;
It is connected to supply the high voltage for discharge to the xenon lamp, and it determines whether there is a trigger signal from the control unit, outputs the trigger signal in the form of pulse, and measures the voltage to transmit the data to the control unit at regular intervals. part;
A communication unit by a photocoupler serving as a relay means for data exchange between the control unit and the chopping unit or between the control unit and the boost unit;
A trigger rectifier for extracting a trigger waveform through rectification by receiving a trigger signal output in a pulse form from a booster;
A trigger coil inserted on an outer surface of the xenon lamp, the trigger coil for applying a pulse to the xenon lamp; Xenon lamp pulse application type power supply comprising a.

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