KR101264224B1 - cylindrical magnetic levitation stage - Google Patents

cylindrical magnetic levitation stage Download PDF

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Publication number
KR101264224B1
KR101264224B1 KR1020100138525A KR20100138525A KR101264224B1 KR 101264224 B1 KR101264224 B1 KR 101264224B1 KR 1020100138525 A KR1020100138525 A KR 1020100138525A KR 20100138525 A KR20100138525 A KR 20100138525A KR 101264224 B1 KR101264224 B1 KR 101264224B1
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KR
South Korea
Prior art keywords
cylindrical
magnetic levitation
electromagnet
array
horizontal
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KR1020100138525A
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Korean (ko)
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KR20120076805A (en
Inventor
전정우
오현석
김종문
김현택
카라이아니 미티카
이창린
정성일
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한국전기연구원
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Priority to KR1020100138525A priority Critical patent/KR101264224B1/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
    • H02K21/12—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/15—Sectional machines
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Abstract

The present invention relates to a cylindrical magnetic levitation stage, comprising a cylinder in a vertical direction (up and down direction) in which a cylinder floats, an axial direction in a straight line transfer direction, and a horizontal direction in a horizontal direction in a horizontal direction in a horizontal direction along with the rotation direction of the cylinder. The main purpose is to provide a cylindrical magnetic levitation stage capable of precisely controlling the position of. In order to achieve the above object, by the magnetic levitation force, magnetic rotational force, magnetic transfer force by the interaction between the permanent magnet array and the electromagnet array of the following base portion integrally mounted to the cylindrical mold and provided with a permanent magnet array A cylindrical moving part capable of rotating and linearly moving in a non-contact manner by floating; A base part having an electromagnet array and disposed below the cylindrical moving part to support the cylindrical moving part in a non-contact manner so as to rotate and linearly move; The horizontal position of the cylindrical moving part and the cylindrical mold is arranged to the side of the cylindrical moving part and is provided with an electromagnet array to generate a horizontal transfer force generated by the interaction between the electromagnet array and the permanent magnet array of the cylindrical moving part. Disclosed is a cylindrical magnetic levitation stage configured to control;

Description

Cylindrical magnetic levitation stage

The present invention relates to a cylindrical magnetic levitation stage, and more particularly, to a vertical direction (up and down direction) in which a cylinder floats, an axial direction to be a linear transport direction, and a horizontal direction to be left and right on a cylindrical cross section, along with a rotation direction of the cylinder. It relates to a cylindrical magnetic levitation stage capable of precisely controlling the position of the cylinder in the direction.

In the lithography process, which is one of the processes for manufacturing semiconductor devices such as semiconductor devices, liquid crystal display (LCD) panels, and solar cells, a photoresist-coated wafer or glass plate is used. An exposure apparatus is used to transfer the fine circuit pattern.

Photolithography is a technique of passing light through a mask having a circuit pattern to be made on a substrate and transferring its form from a mask to a photoresist, that is, forming a fine pattern in a desired portion using a light source. An apparatus for performing the process is an exposure apparatus.

Conventionally, since the substrate has a flat plate shape such as a wafer or glass plate, a planar stage corresponding to the size of the wafer or glass plate is used to perform a large area exposure operation.

However, there has been a limitation in dealing with conventional planar stages as a high-precision exposure apparatus is required due to the miniaturization of circuit patterns due to the recent miniaturization and large capacity of semiconductor chips.

Therefore, a technique for forming a fine circuit pattern on a cylindrical surface has been developed. As a method for forming an optical pattern on a cylindrical substrate, a fine pattern mold is processed and a pattern is formed on the substrate surface using the fine pattern mold. The method is being applied.

To date, no device for processing nanometer-sized patterns directly on a large cylindrical surface has been proposed, and a similar device capable of engraving micro-sized patterns on a cylindrical surface has been used.

The technology applied to these devices is based on the use of contact mechanical bearings for the rotation of the cylinders or a combination of contactless air bearings and rotary motors, and contact linear guides or contactless air guides and linear motors for axial feed of the cylinders. Was used in combination.

However, in this case, there is a limit in minimizing the pattern size depending on the degree of processing of the mechanism constituting the device.

In particular, in the case of a light source such as an X-ray, an electron beam, and extreme ultraviolet (EUV), a vacuum environment is required, and thus it is not easy to apply the conventional techniques.

In addition, there is a limit in conventionally minimizing the error occurring during the rotation and axial transfer of the cylinder to the nanometer size, due to this error is to engrave the nanometer size pattern using a light source directly on the large cylindrical surface It is difficult.

Accordingly, an object of the present invention is to provide a cylindrical magnetic levitation stage capable of directly engraving a nanometer-sized pattern using a light source on a large cylindrical surface.

In particular, the present invention precisely controls the position of the cylinder in the vertical direction (up and down direction) in which the cylinder rises, in the axial direction in the straight line transfer direction, and in the horizontal direction in the left and right directions on the cylindrical cross section, along with the rotation direction of the cylinder. The purpose is to provide a cylindrical magnetic levitation stage.

In order to achieve the above object, the present invention, the magnetic levitation force, magnetic rotational force, magnetic by the interaction between the permanent magnet array and the electromagnet array of the following base portion integrally mounted to the cylindrical mold and provided with a permanent magnet array A cylindrical moving part capable of rotating and linearly moving in a non-contact manner by rising by a feeding force; A base part having an electromagnet array and disposed below the cylindrical moving part to support the cylindrical moving part in a non-contact manner so as to rotate and linearly move; The horizontal position of the cylindrical moving part and the cylindrical mold is arranged to the side of the cylindrical moving part and is provided with an electromagnet array to generate a horizontal transfer force generated by the interaction between the electromagnet array and the permanent magnet array of the cylindrical moving part. It provides a cylindrical magnetic levitation stage comprising; a horizontal magnetic levitation auxiliary control.

In a preferred embodiment, the horizontal magnetic levitation auxiliary portion is characterized in that disposed on both sides of the left and right of the cylindrical moving portion.

In addition, the electromagnet arrays each of the horizontal magnetic levitation auxiliary parts on both the left and right sides are externally connected to each other so that current application can be controlled independently.

In addition, the electromagnet array of the horizontal magnetic levitation auxiliary portion is externally connected independent of the electromagnet arrangement of the base portion, characterized in that the current application can be controlled independently.

In addition, the cylindrical moving part includes a rotating cylindrical moving part and a linear moving cylindrical moving part having a permanent magnet array formed so that the permanent magnets are arranged to form a cylindrical shape, the base portion is the rotating cylinder is respectively The eastern part and the lower part of the linear transfer member is characterized in that it comprises a rotation fixing part having a electromagnet array formed to be arranged to form an arc shape and a linear transport fixing portion to the lower side.

In addition, the rotating fixing part and the linear transport fixing part is formed in a concave shape while the upper surface is an arc so that the cylindrical moving portion can be rotated in a state in which a portion of the cylindrical moving portion is accommodated inside the arc of the upper surface, Electromagnets are arranged and arranged along the inner surface, characterized in that the electromagnet array of the fixed part for rotation and the fixed for straight line transfer is configured.

In addition, the linear transfer fixing part has a split electromagnet arrangement in which the electromagnets are divided into two columns in the circumferential direction, each having a plurality of electromagnets arranged along the axial direction of the cylindrical moving part, and the first electromagnet array divided. And the second electromagnet array are independently externally connected so that current application can be controlled independently.

In addition, the electromagnet array of the linear transport fixing part is provided so that all the electromagnets are integrally externally connected so that the current application can be controlled integrally, whereby the linear transport fixing part controls the vertical direction of the cylindrical moving part and the cylindrical mold. The horizontal magnetic levitation auxiliary unit is configured to independently handle the horizontal direction control.

In addition, the rotating fixing part has an electromagnet array in which a plurality of electromagnets are arranged along the circumferential direction, and the first electromagnet array and the second electromagnet are divided into two groups and arranged in the circumferential direction. Each of the arrangements can be independently connected to each other so that the current can be controlled independently.

In addition, the electromagnet array of the rotating fixing part is integrally externally connected with all electromagnets so that the current application is integrally controlled, whereby the rotating fixing part controls the vertical direction of the cylindrical moving part and the cylindrical mold, and the horizontal magnetic levitation auxiliary part is horizontal. Characterized in that it is configured to independently handle the direction control.

In addition, as a means for assisting the magnetic levitation of the cylindrical moving portion is disposed above the cylindrical moving portion and a vertical magnetic levitation auxiliary portion having a ferromagnetic material to generate a suction force by interaction with the permanent magnet arrangement of the cylindrical moving portion It further comprises.

Accordingly, in the cylindrical magnetic levitation stage according to the present invention, the cylinder can be floated and rotated in a non-contact manner, as well as the active control of the position with an error of nanometer size, which can correct errors and disturbances caused by machining in real time. Back nanometer-sized patterns can be processed directly on large surface areas of large size cylinders.

In particular, in the present invention, the position of the cylinder is precisely controlled in the vertical direction (up and down direction) in which the cylinder rises, in the axial direction in the straight line transfer direction, and in the horizontal direction in the left and right directions on the cross section of the cylinder. There is an advantage to this.

1 is a perspective view showing a cylindrical magnetic levitation stage according to an embodiment of the present invention.
2 is a front view illustrating the cylindrical magnetic levitation stage according to the embodiment of the present invention.
3 is a side view showing a cylindrical magnetic levitation stage according to an embodiment of the present invention, (a) is a left side view, (b) is a right side view.
4 is a perspective view illustrating a permanent magnet array and an electromagnet array in a cylindrical magnetic levitation stage according to an exemplary embodiment of the present invention.
5 and 6 are views showing the arrangement of the horizontal magnetic levitation auxiliary portion and the fixed portion (for rotation / linear transfer) in the cylindrical magnetic levitation stage according to an embodiment of the present invention.
FIG. 7 is a perspective view illustrating a configuration of an electromagnet array employed in the embodiment of FIG. 6.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cylindrical magnetic levitation stage, and more particularly, to a cylindrical magnetic levitation stage capable of rotating and axially conveying a large cylinder in a non-contact manner after floating by a magnetic levitation principle.

In particular, the present invention precisely controls the position of the cylinder in the vertical direction (up and down direction) in which the cylinder rises, in the axial direction in the straight line transfer direction, and in the horizontal direction in the left and right directions on the cylindrical cross section, along with the rotation direction of the cylinder. And a cylindrical magnetic levitation stage.

The cylindrical magnetic levitation stage of the present invention can be precisely positioned in the vertical direction, the axial direction, the rotation direction, and the horizontal direction, while floating and rotating the cylinder by floating the cylinder. Exposure equipment requiring precise control of each direction of the cylinder, fine pattern mold processing equipment for processing nanometer-sized patterns on the cylindrical mold, and liquid coating liquid such as a photosensitizer on the surface of the cylindrical substrate It can be usefully applied to a coating device for coating and coating.

First, FIG. 1 is a perspective view illustrating a cylindrical magnetic levitation stage according to an embodiment of the present invention, and FIG. 2 is a front view illustrating the cylindrical magnetic levitation stage according to an embodiment of the present invention. An example is shown in the chamber.

3 is a side view showing a cylindrical magnetic levitation stage according to an embodiment of the present invention, (a) is a left side view, (b) is a right side view, Figure 4 is a cylindrical magnetic levitation stage according to an embodiment of the present invention A perspective view showing a permanent magnet array and an electromagnet array.

5 and 6 are an arrangement state and a force generation state of the electromagnet arrangement of the horizontal magnetic levitation auxiliary portion and the fixed portion (for rotation / linear transfer) in the cylindrical magnetic levitation stage according to an embodiment of the present invention It is a figure which shows.

The cylindrical magnetic levitation stage according to the present invention is integrally mounted to the cylindrical mold 100 and includes permanent magnet arrays 112 and 113, and the electromagnet arrays 122 and 123 of the permanent magnet arrays 112 and 113 and the base portion 120 below. A cylindrical moving part 110 capable of rotating and linearly moving in a non-contact manner by floating by magnetic levitation force, magnetic rotation force, and magnetic transfer force due to interaction between the two; A base part 120 having an electromagnet arrangement 122 and 123 disposed below the cylindrical moving part 110 to support the cylindrical moving part 110 in a non-contact manner so as to rotate and linearly move; It is disposed by the side of the cylindrical moving unit 110 and provided with an electromagnet array 141 is generated by the interaction between the electromagnet array 141 and the permanent magnet array (112, 113) of the cylindrical moving unit 110 It includes a horizontal magnetic levitation auxiliary unit 140 for controlling the horizontal position of the cylindrical moving unit 110 and the cylindrical mold 100 by the horizontal transfer force.

As described below, in the cylindrical magnetic levitation stage of the present invention, the cylinder is formed by the magnetic levitation force, the magnetic transfer force, the magnetic rotation force, and the horizontal transfer force generated by the interaction between the permanent magnet arrays 112 and 113 and the electromagnetic arrays 122, 123 and 141. The mold 100 is floated, rotated, linearly axially moved, and horizontally transferred in a non-contact manner.

Hereinafter, in the present specification, the vertical direction refers to the vertical direction in which the floating of the cylindrical mold 100 occurs, and the horizontal direction refers to the left and right horizontal directions taken on the cylindrical cross section, and the linear movement of the cylindrical mold 100 is performed in the cylindrical axial direction. .

In the above-described configuration, the cylindrical moving part 110 includes a rotary cylindrical moving part 110a and a linear moving cylindrical moving part 110b for installing the permanent magnet arrays 112 and 113 on both sides of the cylindrical mold 100. The base portion 120 is configured to install the electromagnet arrangements 122 and 123 at positions corresponding to the lower side of the rotary cylindrical portion 110a for rotation and the linear cylindrical portion 110b for linear movement, respectively. It is configured to include a dedicated fixing portion (120a) and a linear transfer fixing portion (120b).

The permanent magnet arrays 112 and 113 are configured by arranging a plurality of permanent magnets 111, and the electromagnet arrays 122 and 123 are configured by arranging a plurality of electromagnets 121 formed of coils.

Accordingly, in the cylindrical magnetic levitation stage of the present invention, the cylindrical mold 100 is lifted by non-contact by interaction between the permanent magnet arrays 112 and 113 of the cylindrical moving unit 110 and the electromagnet arrays 122 and 123 of the fixing unit. Rotational and axial feed.

That is, the magnetic levitation force and the magnetic rotation force are generated by the interaction between the permanent magnet array 112 of the rotating cylinder moving part 110a and the electromagnet array 122 of the rotating fixing part 120a, The magnetic levitation force and the magnetic transfer force are generated by the interaction between the permanent magnet array 113 of the cylindrical transfer unit 110b and the electromagnet array 123 of the linear transport fixing unit 120b. Cylindrical mold 100 is floated by the force, the magnetic rotation force, and the magnetic feed force to be rotated and axially transported.

In a preferred embodiment, the rotary cylindrical portion 110a and the linear cylindrical portion 110b for linear transfer may be integrally mounted at both ends of the cylindrical mold 100 as illustrated in FIGS. 1 and 2. The dedicated fixing part 120a and the straight line fixing part 120b may be disposed above the support 125 in a position below and corresponding to the rotating cylindrical moving part 110a and the linear moving cylindrical moving part 110b, respectively. Can be.

When explaining in more detail with respect to the rotating cylindrical moving part (110a) and the linear moving cylindrical moving part (110b), each of the cylindrical moving parts (110a, 110b) integrally formed inner peripheral portion 102 and outer peripheral portion 103, permanent And a magnet array 112 and 113, and the permanent magnet array 112 of the rotary cylinder moving part 110a for the cylindrical mold 100 together with the electromagnet array 122 of the rotating part 120a. The permanent magnet array 113 of the linear movement cylindrical portion 110b for the linear movement of the cylindrical die 100 together with the electromagnet array 123 of the fixed portion 120b for linear transfer. It is in charge of floating and axial straight line transfer.

At this time, in each of the cylindrical moving parts (110a, 110b), the shaft 101 protruding from the end of the cylindrical mold 100 is fitted into the central hole of the inner peripheral portion 102 is coupled, a plurality of along the inner peripheral surface of the outer peripheral portion 103 Permanent magnets 111 are arranged and installed so that the permanent magnet arrays 112 and 113 are constructed.

The permanent magnets 111 are installed to be press-fitted into the space between the outer circumferential portion 103 and the inner circumferential portion 102 in an axial direction, and are installed to alternate between directions of magnetic poles between neighboring permanent magnets.

For example, each of the permanent magnet arrays 112 and 113 may be configured such that the permanent magnets 111 having four kinds of magnetization directions form a cylindrical shape while forming a Halbach array.

In addition, the rotating fixing part 120a and the linear transport fixing part 120b are formed to be concave while forming an upper surface of a substantially circular arc, and are fixed to the support 125 and the cylindrical moving parts 110a and 110b inside the arc of the upper surface. The cylindrical moving part can be rotated with a part of which is accommodated.

Electromagnet array for generating magnetic force (magnetism, magnetic rotational force, magnetic transfer force) by interaction with the permanent magnet array (112, 113) installed in the cylindrical moving parts (110a, 110b) along the inner surface of the arc ( 122 and 123 are installed, wherein the electromagnets 121 made of coils are arranged to form an arc shape in the arc of the fixing parts 120a and 120b, thereby configuring the electromagnet arrays 122 and 123.

As an example, the electromagnets 121 in each of the electromagnet arrays 122 and 123 may be inserted into grooves formed on the inner side surfaces of the arcs of the fixing parts 120a and 120b and treated and fixed by epoxy molding to prevent arrangement separation. .

Referring to the embodiment of FIG. 4, the twelve electromagnets 121 are arranged along the circumferential direction under the permanent magnet array 112 of the rotating cylinder moving unit, and the electromagnet array 122 of the fixing unit for the rotating unit is configured. 12, the electromagnets 121 are arranged along the front and rear axial direction from the lower side of the permanent magnet array 113 of the linear movement cylindrical movement portion, so that the electromagnet arrangement 123 of the fixed portion for linear movement is constructed. can see.

When a three-phase current is applied to the electromagnet array 122 of the rotating part 120a, a sine wave-shaped magnetic flux is generated, and the magnetic flux is a permanent magnet array 112 of the rotating cylinder moving part 110a. The repulsive force is generated in synchronism with the magnetic flux generated in the c). The repulsive force generates the floating force in the vertical direction and the rotational force in the rotation direction.

In addition, when a three-phase current is applied to the electromagnet array 123 of the linear transfer portion 120b, the electromagnet array 123 of the linear transfer portion 120b and the cylindrical transfer portion 110b for linear transfer. By the interaction between the permanent magnet array 113 of the vertical force and the linear transfer force in the axial direction is generated.

As a result, by the above-described configuration, the cylindrical moving part 110 is lifted from the base part 120 composed of the rotating fixing part 120a and the linear transfer fixing part 120b integrally with the cylindrical mold 100 so as to be contactless. Rotational and axially conveyed by the controller, and the current applied to the coil of each electromagnet from the base unit 120 is controlled by a controller (not shown) so that the floating part 110 rotates, the rotational position and the rotational speed, and the axial direction. Position and axial feedrate are controlled.

At this time, as the cylindrical moving part permanent magnet 111 and the base part electromagnet 121 form an arrangement as shown in FIG. 4, the magnetic levitation force and the magnetic rotation force are generated on one side by interaction with each other. In the case of magnetic levitation force and magnetic transfer force.

On the other hand, the cylindrical magnetic levitation stage of the present invention is provided with a vertical magnetic levitation auxiliary unit 130 as a means for assisting the magnetic levitation force, the vertical magnetic levitation auxiliary unit 130 as shown in the embodiment shown in the fixing portion (120a, 120b) 1) may be disposed on opposite sides of the c), namely, above the rotating cylindrical moving part 110a and the linear moving cylindrical moving part 110b.

The vertical magnetic levitation auxiliary unit 130 is a permanent magnet array 112 of the rotating cylindrical moving unit (110a) and the electromagnet array 122 of the fixed fixing unit (120a), a cylindrical moving unit (110b) for linear transfer As a means for assisting the magnetic levitation force by the interaction of the permanent magnet array 113 and the electromagnet array 123 of the linear transfer fixing part (120b), provided in the cylindrical moving parts (110a, 110b) The ferromagnetic material is configured to generate an assisting force through interaction with the permanent magnet arrays 112 and 113.

The vertical magnetic levitation auxiliary unit 130 may be fixedly installed at a predetermined position of the device employing the cylindrical magnetic levitation stage of the present invention. For example, as shown in FIG. Can be.

The ferromagnetic material of the vertical magnetic levitation auxiliary unit 130 generates a suction force by interaction with the permanent magnet arrays 112 and 113 of the cylindrical moving parts 110a and 110b, and the suction force is an electromagnet array of the fixing parts 120a and 120b. It is used to assist the magnetic levitation force by the interaction between the sieve (122, 123) and the permanent magnet array (112, 113) of the cylindrical moving parts (110a, 110b).

The vertical magnetic levitation auxiliary unit 130 is controlled by the installation height is adjusted by the suction force by the interaction with the permanent magnet array (112, 113) of the cylindrical moving parts (110a, 110b).

Referring to FIGS. 5 and 6, it can be seen that the magnetic levitation force is assisted by the vertical magnetic levitation auxiliary unit 130. The permanent magnet array of the cylindrical moving parts 110a and 110b (reference numerals 112 and 113 in FIG. 4). Levitation force due to the interaction between the electromagnet arrays 122, 123, 122a, 122b, 123a, and 123b of the fixing part (denoted by reference numeral 120a and 120b in FIG. 1) is to lift up the cylindrical mold (for magnetic injuries). ) The electromagnet array acts to push the permanent magnet array upward, but the suction force due to the interaction between the permanent magnet array of the cylindrical moving parts (110a, 110b) and the electromagnet array of the vertical magnetic levitation auxiliary unit (130) The magnetic levitation force generated between the permanent magnet array of the cylindrical moving parts 110a and 110b and the electromagnet array of the fixed part is assisted.

In addition, the cylindrical magnetic levitation stage according to the present invention is provided with a horizontal magnetic levitation auxiliary unit 140 for generating a horizontal force (horizontal transfer force) between the permanent magnet array of the cylindrical moving parts (110a, 110b), As shown in the illustrated embodiment, the horizontal magnetic levitation auxiliary unit 140 may be disposed one by one on both the left and right sides of the cylindrical cylinder 110 for rotation and the linear cylinder 110 for linear transfer.

This arrangement structure is a structure in which the horizontal magnetic levitation auxiliary section 140 is disposed to face in the left and right 180 ° directions on the cross sections of the cylindrical moving parts 110a and 110b (cylindrical mold) as shown in FIGS. 5 and 6.

The horizontal magnetic levitation auxiliary part 140 is a means for precisely controlling the horizontal position by moving the cylindrical mold 100 and the cylindrical moving parts 110a and 110b in the horizontal direction, which is also a cylindrical moving part 110a. Since the force is generated by interacting with the permanent magnet array of (110b), it is configured to include an electromagnet array 141 configured by arranging the electromagnets arranged in the lateral direction of the cylindrical moving portion.

Since the horizontal magnetic levitation auxiliary part 140 should be installed in the left and right sides with respect to the rotary cylindrical moving part 110a and the linear transfer cylindrical moving part 110b, respectively, each horizontal magnetic levitation auxiliary part 140 is shown in FIG. As described above, it may be fixedly installed on the upper side of the rotating fixing part 120a and the linear transport fixing part 120b.

The force (repulsive force) generated by the interaction between the electromagnet array 141 of the horizontal magnetic levitation auxiliary unit 140 and the permanent magnet array of the cylindrical moving units 110a and 110b is determined by the electromagnet arrays 122, 123 and 122a of the fixed unit. It occurs on the same principle as the magnetic levitation force generated by the interaction between the 122b, 123a, 123b and the permanent magnet arrangement of the cylindrical moving parts (110a, 110b), that is, the repulsive force to push each other.

As shown in FIGS. 5 and 6, the horizontal magnetic levitation auxiliary part 140 is disposed between the horizontal magnetic levitation auxiliary part 140 and the cylindrical moving parts 110a and 110b disposed on both sides by a mutual repulsion force between the electromagnet and the permanent magnet. Forces in the form of pushing the moving parts (110a, 110b) is generated, and these forces act on both the left and right sides of the cylindrical moving parts (110a, 110b) to move the cylindrical moving parts (110a, 110b) and the cylindrical mold in the horizontal direction It is possible to precisely control the position.

The horizontal magnetic levitation auxiliary unit 140 is also controlled by the current applied to the electromagnet coil by the controller to control the force by the interaction with the permanent magnet array of the cylindrical moving parts (110a, 110b).

However, since both horizontal magnetic levitation auxiliary parts 140 on both the left and right sides control the horizontal positions of the cylindrical moving parts 110a and 110b and the cylindrical mold independently of floating, rotating and axial feeding, the left and right horizontal magnetic levitation auxiliary parts The electromagnet array 141 of 140 is externally wired independently of both the left and right sides and independently of the electromagnet arrays 122, 123, 122a, 122b, 123a and 123b of the fixed part, and also in the control of the electromagnet array of the fixed part. Current control independent of current control is achieved.

That is, the electromagnet array of the left horizontal magnetic levitation assistant, the electromagnet array of the right horizontal magnetic levitation assistant, and the electromagnet array of the fixed portion are all independently current controlled.

As a result, in the cylindrical magnetic levitation stage according to the present invention, the cylindrical cylindrical mold 100 has a cylindrical cross-sectional shape formed by the horizontal magnetic levitation auxiliary unit 140 along with the axial direction and the rotational direction which become the vertical direction in which the injury occurs, and the axial direction and the rotation direction. There is an advantage that the position can be precisely controlled in the horizontal direction that becomes the left and right directions.

In addition, an external wiring may be integrally performed on the electromagnet array of the left horizontal magnetic levitation assistant and the electromagnet array of the right horizontal magnetic levitation assistant. If the current is controlled by the integrated control, the same current is applied to the left and right electromagnet arrays, so that the repulsive force between the horizontal magnetic levitation auxiliary part and the fixing part on the left side and the reaction force between the horizontal magnetic levitation auxiliary part and the fixing part on the right side are the same. do.

In this case, the cylindrical moving part and the cylindrical mold are controlled so that their horizontal position is always located at the center position between the left and right horizontal magnetic levitation auxiliary parts under the same reaction force on both sides.

5 and 6 show the respective embodiments configured by varying the configuration of the electromagnet arrangement of the fixed part for rotation and the fixed line for transporting, Figure 5 is a split electromagnet array (122a, 122b, 123a, 123b) 6 illustrates an embodiment employing the integrated electromagnet arrays 122 and 123.

In addition, the configuration of the electromagnet arrangement 122a, 122b, 123a, 123b employed in the embodiment of FIG. 5 is as shown in FIG. 4, and the configuration of the electromagnet arrangement 122,123 employed in the embodiment of FIG. Shown in

In the cylindrical magnetic levitation stage according to the present invention, a plurality of rows of the electromagnets 121 arranged along the axial direction of the cylindrical moving part 110 (cylindrical mold) are arranged in the column in the circumferential direction. For example, divided electromagnet arrays 123a and 123b divided into two rows as shown in FIG. 4 are employed, or an integrated electromagnet array in which a plurality of electromagnets are arranged in one row along the front-rear axial direction as shown in FIG. 123 may be employed.

Referring to FIG. 4, twelve electromagnets 121 are arranged in a row along the front and rear axial direction, and rows of twelve electromagnets are arranged in two rows in the circumferential direction, so that a total of 24 electromagnets in each of twelve rows are provided. Is being installed.

In the embodiment of FIG. 4, since the electromagnet arrays 123a and 123b are divided into two rows, the electromagnet group constituting one row is referred to as the first electromagnet array 122a and the electromagnet group constituting the other row. It will be referred to as a second electromagnet array 123b.

In addition, referring to FIG. 7, twelve electromagnets 121 are arranged in rows along the front and rear axial directions, and in this case, a total of twelve electromagnets are installed since only one row of electromagnets are disposed.

In the rotating fixing part 120a, a plurality of electromagnets 121 are arranged to form a row along the circumferential direction, but in the embodiment of FIG. 4, the entire electromagnet 121 is formed of a plurality of groups, for example. The first electromagnet arrangement 122a and the second electromagnet arrangement 122b are divided into two groups divided in the circumferential direction, and the first electromagnet arrangement 122a and the second electromagnet are arranged so as to be arranged in the circumferential direction. By performing external wiring independently for each of the arrays 122b, the first electromagnet array 122a and the second electromagnet array 122b can be controlled independently.

In addition, the embodiment of Figure 7 is that all the electromagnet coils are connected in series so that the same three-phase current flows to all the electromagnets 121 in the electromagnet array 122 of the rotating fixture, for the electromagnet array 122 By integrally performing an external connection, all the electromagnets 121 are configured to be integrated and controlled by a controller.

In the rotating fixing part 120a and the linear transport fixing part 120b, the electromagnets constituting the first electromagnet arrays 122a and 123a are all electromagnet coils connected in series so that the same three-phase current flows. In addition, the electromagnets constituting the second electromagnet arrays 122b and 123b are also connected in series so that all three-phase currents flow, and are independently connected to the first electromagnet arrays 122a and 123a externally connected. With respect to the second electromagnet arrays 122b and 123b, the control unit can independently control the three-phase current applied to each electromagnet array.

Referring to the difference in the action when the current is applied to the electromagnet array in the configuration of the embodiment of Figure 4 and 7, first, in the embodiment of Figure 4 the first electromagnet arrangement 122a, 123a) and the second electromagnet arrays 122b and 123b can be controlled independently, so that the permanent magnet arrays 112 and 113 and the respective electromagnet arrays 122a, 122b, 123a and 123b in the cylindrical moving parts 110a and 110b. The forces generated by the interaction between them can be controlled independently.

That is, the magnetic levitation force acting in a diagonal direction in cross section between the permanent magnet arrays 112 and 113 and the first electromagnet arrays 122a and 123a, and the permanent magnet arrays 112 and 113 and the second electromagnet arrays. The magnetic levitation force acting in the oblique cross section between the sieves 122b and 123b can be independently controlled through the three-phase current control applied to each array.

Accordingly, in the embodiment of Figs. 4 and 5, the cylinders are formed only by the cylindrical moving parts 110a and 110b, the permanent magnet arrays 112 and 113, and the fixed part side first and second electromagnet arrays 122a, 122b, 123a and 123b. Left and right horizontal position control of the moving parts 110a and 110b and the cylindrical mold 100 is possible.

As a result, in the embodiments of FIGS. 4 and 5, the horizontal magnetic levitation auxiliary unit 140 serves as a means of assisting the horizontal position control of the cylindrical mold as the name, and in particular, the horizontal magnetic levitation auxiliary unit 140 is installed. The horizontal direction control can be more precisely compared to the cylindrical moving part and the fixed part.

On the other hand, in the embodiment of Figure 7, all the electromagnets 121 of the electromagnet arrays 122 and 123 in the fixed part are integrally controlled so that the permanent magnet array and the fixed part in the cylindrical moving parts (110a, 110b) as shown in FIG. Only the magnetic levitation force between the electromagnet arrays 122 and 123 is controlled, but not the horizontal direction control.

Therefore, the embodiment of FIGS. 6 and 7 is a concept in which the horizontal control and the vertical control of the cylindrical mold are separated, and the electromagnet arrays 122 and 123 in the fixed part have vertical control (magnetism). The electromagnet array 141 in the two horizontal magnetic levitation auxiliary units 140 is responsible for the horizontal direction control.

6 and 7 in which the integrated electromagnet arrays 122 and 123 are used in the fixing part, the fixing part (denoted by reference numeral 120a and 120b in FIG. 1) and the horizontal magnetic levitation auxiliary part 140 are respectively perpendicular. Independently responsible for control and horizontal control, no interference occurs between the horizontal control force and the vertical control force for controlling the position of the cylindrical mold 100, and the control is simpler than using an independent controlled split type electromagnet array There is an advantage in that.

In addition, the structure of the integrated electromagnet array (reference numeral 123 in FIG. 7) is simpler than the case of using the split type electromagnet array (reference numeral 123a and 123b in FIG. 4) in the linear transport fixing part. There is an advantage that can be made.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. Modified forms are also included within the scope of the present invention.

1: chamber 100: cylindrical mold
101: axis 102: inner circumference
103: outer peripheral part 110: cylindrical moving part
110a: cylindrical moving part for rotation 110b: cylindrical moving part for linear transfer 111: permanent magnet 112, 113: permanent magnet array
120: base portion 120a: fixing part for rotation
120b: Fixed part for straight line transfer 121: Electromagnet
122, 123: electromagnet array 122a, 123a: first electromagnet array
122b and 123b: second electromagnet array 125: support
130: vertical magnetic levitation auxiliary unit 140: horizontal magnetic levitation auxiliary unit
141: electromagnet array

Claims (13)

Integrally mounted on the cylindrical mold and equipped with a permanent magnet array, floating by magnetic levitation force, magnetic rotation force and magnetic transfer force due to the interaction between the permanent magnet array and the electromagnet array of the base portion below, and rotating and linear transfer in a non-contact manner. Two possible cylindrical moving parts;
A base part having an electromagnet array and disposed below the cylindrical moving part to support the cylindrical moving part in a non-contact manner so as to rotate and linearly move;
It is provided by the side of the cylindrical moving portion, and provided with an electromagnet array disposed to the side of the cylindrical moving portion, generated by the interaction between the electromagnet array arranged to the side of the cylindrical moving portion and the permanent magnet array of the cylindrical moving portion A horizontal magnetic levitation auxiliary part for controlling the horizontal position of the cylindrical moving part and the cylindrical mold with a horizontal transfer force;
And,
As a means for assisting the magnetic levitation of the cylindrical moving portion, the vertical magnetic levitation auxiliary portion disposed above the cylindrical moving portion and having a ferromagnetic material to generate a suction force by interaction with the permanent magnet arrangement of the cylindrical moving portion. Include,
The vertical magnetic levitation auxiliary portion cylindrical magnetic levitation stage, characterized in that the suction force by the interaction with the permanent magnet arrangement of the cylindrical moving portion is adjusted as the installation height is adjusted.
The method according to claim 1,
The horizontal magnetic levitation auxiliary portion is cylindrical cylindrical levitation stage, characterized in that arranged on both sides of the left and right.
The method according to claim 2,
Each of the electromagnet arrays of the horizontal magnetic levitation auxiliary portion on both the left and right sides is externally connected to each other so that current application can be controlled independently.
The method according to claim 2,
Electromagnet arrays of the horizontal magnetic levitation auxiliary portion on both the left and right sides are integrally externally connected to each other so that the current application can be controlled integrally.
The method according to claim 2,
And the electromagnetic array of the horizontal magnetic levitation auxiliary portion is externally connected independently of the electromagnetic array of the base portion so that current application can be controlled independently.
The method according to claim 1,
The cylindrical moving part includes a rotating cylindrical moving part and a linear moving cylindrical moving part having a permanent magnet arrangement formed by permanent magnets arranged to form a cylindrical shape,
The base portion is configured to include a rotation fixing portion and a linear transport fixing portion having an electromagnet array formed so that the electromagnets are arranged to form an arc shape to the lower side of the rotary cylindrical movement portion and the linear transfer cylindrical movement portion, respectively. Cylindrical magnetic levitation stage, characterized in that.
The method of claim 6,
The rotating fixing part and the linear transport fixing part is formed to be concave while forming an upper surface of the circular arc so that the cylindrical moving part can be rotated in a state where a portion of the cylindrical moving part is accommodated inside the arc of the upper surface.
Electromagnets are arranged along the inner surface of the circular arc, the cylindrical magnetic levitation stage, characterized in that the electromagnet arrangement of the fixing part for the rotation and the linear transport is configured.
The method of claim 6,
The linear transport fixing part includes a split type electromagnet array in which the electromagnets are divided into two columns in the circumferential direction, each having a plurality of electromagnets arranged along the axial direction of the cylindrical moving part, and the divided first electromagnet array and 2. The cylindrical magnetic levitation stage, characterized in that the second electromagnet array is independently externally connected so that current application can be controlled independently.
The method of claim 6,
The electromagnet array of the linear transport fixing part is provided so that all electromagnets are integrally externally connected so that current application can be controlled integrally, whereby the linear transport fixing unit controls the vertical direction of the cylindrical moving part and the cylindrical mold. Cylindrical magnetic levitation stage, characterized in that the magnetic levitation assistant is configured to independently control the horizontal direction.
The method of claim 6,
The rotating fixing part includes an electromagnet array in which a plurality of electromagnets are arranged in a row along the circumferential direction, and the first electromagnet array and the second electromagnet array are divided in two groups and arranged in the circumferential direction. A cylindrical magnetic levitation stage, characterized in that the sieves are independently externally connected so that current can be independently controlled.
The method of claim 6,
The electromagnet array of the rotating fixing part is integrally externally connected to all the electromagnets so that the current application is integrally controlled. Thus, the rotating fixing part controls the vertical direction of the cylindrical moving part and the cylindrical mold, and the horizontal magnetic levitation auxiliary part is in the horizontal direction. Cylindrical magnetic levitation stage, characterized in that it is configured to independently control.
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KR1020100138525A 2010-12-30 2010-12-30 cylindrical magnetic levitation stage KR101264224B1 (en)

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Publication number Priority date Publication date Assignee Title
KR100352937B1 (en) 2000-05-20 2002-09-16 미래산업 주식회사 Linear Electric Motor of Rotational and Linear Movement Type
JP2008131732A (en) 2006-11-20 2008-06-05 Sumitomo Electric Ind Ltd Driver for rotor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100352937B1 (en) 2000-05-20 2002-09-16 미래산업 주식회사 Linear Electric Motor of Rotational and Linear Movement Type
JP2008131732A (en) 2006-11-20 2008-06-05 Sumitomo Electric Ind Ltd Driver for rotor

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