KR101252488B1 - Inductive position sensor - Google Patents

Inductive position sensor Download PDF

Info

Publication number
KR101252488B1
KR101252488B1 KR1020110113088A KR20110113088A KR101252488B1 KR 101252488 B1 KR101252488 B1 KR 101252488B1 KR 1020110113088 A KR1020110113088 A KR 1020110113088A KR 20110113088 A KR20110113088 A KR 20110113088A KR 101252488 B1 KR101252488 B1 KR 101252488B1
Authority
KR
South Korea
Prior art keywords
pcb
receiving
position sensor
coil
transmitting
Prior art date
Application number
KR1020110113088A
Other languages
Korean (ko)
Inventor
이석원
Original Assignee
대성전기공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 대성전기공업 주식회사 filed Critical 대성전기공업 주식회사
Priority to KR1020110113088A priority Critical patent/KR101252488B1/en
Application granted granted Critical
Publication of KR101252488B1 publication Critical patent/KR101252488B1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature

Abstract

PURPOSE: An inductive position sensor is provided to enable to detect a distorted angle of a wheel axis and a handle axis of a vehicle and to improve the resolution of the sensor by regular output improvement. CONSTITUTION: An inductive position sensor comprises a power coil unit(11), a receiving PCB(12), a transmitting PCB(13), and a sensing PCB(15). The power coil unit generates a magnetic field by receiving an AD current of a predetermined frequency. The receiving PCB is arranged into a cylindrical plate shape in an inner side of the power coil unit, and receiving coil patterns in which the current from the magnetic field generated by the power coil unit is induced are formed on the surface of the receiving PCB. The transmitting PCB is arranged into a cylindrical plate shape to be parallel to the receiving PCB, and transmitting patterns receiving the induced current from the receiving coil patterns are formed on the surface of the transmitting PCB. The sensing PCB is arranged to be spaced at a predetermined space from the transmitting PCB and formed corresponding to the transmitting coil patterns so that a sensing coil unit in which a voltage induced from the magnetic field generated by the transmitting coil patterns.

Description

인덕티브 포지션 센서{INDUCTIVE POSITION SENSOR}Inductive Position Sensors {INDUCTIVE POSITION SENSOR}

본 발명은 인덕티브 포지션 센서에 관한 것으로서, 특히 자동차의 바퀴축과 핸들축의 비틀림 각도를 검출하는데 이용되는 인덕티브 포지션 센서에 관한 것이다.The present invention relates to an inductive position sensor, and more particularly, to an inductive position sensor used to detect the torsion angle between a wheel shaft and a handle shaft of a vehicle.

종래의 인덕티브 포지션 센서, 예를 들어 미국특허등록 제6,384,598호 "INDUCTIVE POSITION SENSOR HAVING MULTIPLE RECEIVING GEOMETRIES"(등록일: 2002.05.07)에 개시되어 있는 것은, 도 1에 도시된 바와 같이, 회전축(SHAFT) 상에 일체로 결합되어 회전하는 로터(ROTOR)와, 상기 회전축에 대해 상대적으로 고정된 스테이터(STATOR)를 포함하여 구성된다.A conventional inductive position sensor, for example, US Patent No. 6,384,598 "INDUCTIVE POSITION SENSOR HAVING MULTIPLE RECEIVING GEOMETRIES" (registered date: May 7, 2002), as shown in Figure 1, the shaft (SHAFT) It is configured to include a rotor (ROTOR) integrally coupled to rotate on the phase, and a stator (STATOR) relatively fixed to the rotation axis.

상기 로터 측 표면에는, 도 2에 도시된 바와 같이, 교류 전원의 신호가 인입되어 흐르는 여자코일로 이루어진 로터 회로(ROTOR GEOMETRY)가 형성되고, 이에 대응하여 상기 스테이터 측 표면에는 상기 로터 회로에 의해 발생되는 자계로부터 전압이 유기되는 수신코일로 이루어진 수신 회로(RECEIVING GEOMETRY)가 형성된다.On the rotor side surface, as shown in FIG. 2, a rotor circuit (ROTOR GEOMETRY) consisting of an excitation coil in which an AC power signal flows in is formed. A receiving circuit (RECEIVING GEOMETRY) consisting of a receiving coil in which voltage is induced from the magnetic field is formed.

그러나, 이러한 종래의 인덕티브 포지션 센서에 의하면, 로터(ROTOR) 측에 패턴으로 여자코일이 형성되어 있으므로 여기에 인가할 수 있는 전원의 세기에 한계가 있을 수밖에 없다는 문제가 있었다.However, according to the conventional inductive position sensor, since the excitation coil is formed in a pattern on the rotor side, there is a problem that there is no limit in the strength of the power that can be applied thereto.

또한, 여자코일에 의해 발생되는 자계의 세기는 상기 여자코일의 권선 수에 비례하는데 상기와 같이 패턴의 모양을 갖는 여자코일로는 공간적인 한계를 가질 수밖에 없어 자계의 세기를 더 크게 조절할 수 없다는 문제가 있었다.In addition, the intensity of the magnetic field generated by the excitation coil is proportional to the number of windings of the excitation coil, but the excitation coil having a pattern shape as described above has a spatial limit, and thus the intensity of the magnetic field cannot be adjusted more. There was.

따라서, 본 발명의 목적은 여자코일에 유도되는 자계의 세기를 더욱 크게 조절할 수 있도록 개선함으로써 출력 향상을 통한 센서의 분해능 향상을 달성할 수 있는 인덕티브 포지션 센서를 제공하는 데 있다.Accordingly, it is an object of the present invention to provide an inductive position sensor that can achieve a resolution improvement of a sensor by improving the output by improving the intensity of the magnetic field induced by the excitation coil.

상기 목적을 달성하기 위해 본 발명은 인덕티브 포지션 센서(inductive position sensor)에 있어서, 일정 주파수의 교류 전류가 인가됨으로써 자계를 발생시키는 고리 형상의 전원코일부와; 상기 전원코일부의 내측에 원형의 판상으로 배치되고 표면에 상기 전원코일부로부터 발생되는 자계로부터 전류가 유기되는 수신코일패턴이 형성된 수신 PCB와; 상기 수신 PCB에 평행하게 원형의 판상으로 배치되고 표면에 상기 수신코일패턴으로부터 유기된 전류를 전달받는 발신코일패턴이 형성된 발신 PCB; 및 상기 발신 PCB에 대해 소정 간극을 두고 배치되고, 상기 발신코일패턴에 대응되게 형성되어 상기 발신코일패턴에 의해 발생되는 자계로부터 전압이 유기되는 센싱코일부가 형성된 센싱 PCB를 포함하는 것을 특징으로 하는 인덕티브 포지션 센서를 제공한다.In order to achieve the above object, the present invention provides an inductive position sensor, comprising: an annular power supply coil unit for generating a magnetic field by applying an alternating current having a constant frequency; A receiving PCB disposed inside the power supply coil portion in a circular plate shape and having a receiving coil pattern on the surface of which current is induced from a magnetic field generated from the power supply coil portion; A transmission PCB disposed in a circular plate shape parallel to the reception PCB and having a transmission coil pattern receiving a current induced from the reception coil pattern on a surface thereof; And a sensing PCB disposed with a predetermined gap with respect to the transmission PCB, and formed with a sensing coil part corresponding to the transmission coil pattern to induce a voltage from a magnetic field generated by the transmission coil pattern. Provide a creative position sensor.

여기서, 상기 수신코일패턴과 상기 발신코일패턴 간의 통전을 위해 상기 수신 PCB와 상기 발신 PCB 사이에 설치되는 다수의 연결핀을 더 포함할 수도 있다.Here, the plurality of connection pins may be further provided between the receiving PCB and the sending PCB for energizing the receiving coil pattern and the sending coil pattern.

이상과 같은 본 발명에 따른 인덕티브 포지션 센서에 의하면, 수신 PCB 상에 패턴으로 형성되는 여자코일(즉, 수신코일패턴)의 외부에 별도의 전원코일부를 마련하여 이를 통해 상기 여자코일에 유도되는 자계의 세기를 더욱 크게 조절할 수 있도록 함으로써 전체적인 출력 향상을 통해 센서의 분해능을 향상시킬 수 있다.According to the inductive position sensor according to the present invention as described above, by providing a separate power coil to the outside of the excitation coil (that is, the receiving coil pattern) formed as a pattern on the receiving PCB is induced to the excitation coil through this By allowing greater control of the field strength, the overall output can be improved to improve the resolution of the sensor.

특히, 본 발명은 전류의 유도를 위한 수신 PCB와 자계의 발생을 위한 발신 PCB가 공간적으로 확실하게 구분되는 구조를 가짐으로써 서로간 간섭을 줄여 센서의 성능 향상에 기여할 수 있다.In particular, the present invention has a structure in which the receiving PCB for the induction of the current and the outgoing PCB for the generation of the magnetic field are surely spatially separated, thereby reducing interference with each other and contributing to the improvement of the performance of the sensor.

도 1은 종래기술에 따른 인덕티브 포지션 센서의 설치상태를 도시한 단면도,
도 2는 도 1의 인덕티브 포지션 센서의 코일 패턴을 도시한 평면도,
도 3은 본 발명의 실시예에 따른 인덕티브 포지션 센서의 사시도,
도 4는 도 3의 인덕티브 포지션 센서의 분해 사시도,
도 5 및 도 6은 각각 도 3의 인덕티브 포지션 센서의 부품간 배치관계를 설명하기 위한 사시도이다.1 is a cross-sectional view showing the installation state of the inductive position sensor according to the prior art,
2 is a plan view illustrating a coil pattern of the inductive position sensor of FIG. 1;
3 is a perspective view of an inductive position sensor according to an embodiment of the present invention;
4 is an exploded perspective view of the inductive position sensor of FIG. 3;
5 and 6 are perspective views illustrating the arrangement relationship between the components of the inductive position sensor of FIG. 3, respectively.

본 발명의 실시예에 따른 인덕티브 포지션 센서(inductive position sensor, 10)는, 도 3 및 도 4에 도시된 바와 같이, 전원코일부(11), 수신 PCB(12), 발신 PCB(13), 다수의 연결핀(14), 센싱 PCB(15)를 포함하여 구성된다.Inductive position sensor 10 according to an embodiment of the present invention, as shown in Figs. 3 and 4, the power coil unit 11, the receiving PCB 12, the outgoing PCB 13, It comprises a plurality of connecting pins 14, the sensing PCB (15).

전원코일부(11)는 고리 형상의 코일로서 외부로부터 일정 주파수의 교류 전류가 인가됨으로써 자계를 발생시킨다.The power supply coil portion 11 is a ring-shaped coil that generates an magnetic field by applying an alternating current having a predetermined frequency from the outside.

수신 PCB(12)는 전원코일부(11)의 내측에 원형의 판상으로 배치되며, 그 저면에는 도 5에 도시된 바와 같은 수신코일패턴(12a)이 형성된다.The receiving PCB 12 is arranged in a circular plate shape inside the power supply coil portion 11, and a receiving coil pattern 12a as shown in FIG. 5 is formed on the bottom thereof.

수신 PCB(12)는 차량의 핸들(steering wheel) 측의 회전축(도면 미도시)에 일체로 또는 연동하여 회전하도록 구비된다.The receiving PCB 12 is provided to rotate integrally or in conjunction with a rotating shaft (not shown) on the steering wheel side of the vehicle.

수신 PCB(12)의 수신코일패턴(12a)에는 상기 전원코일부(11)로부터 발생되는 자계로부터 전류가 유기된다.In the receiving coil pattern 12a of the receiving PCB 12, current is induced from the magnetic field generated from the power coil unit 11.

발신 PCB(13)는 상기 수신 PCB(12)에 축방향으로 평행하게 동일한 크기의 원형의 판상으로 배치되며, 그 저면에는 도 5에 도시된 바와 같은 발신코일패턴(13a)이 형성된다.The outgoing PCB 13 is arranged in the shape of a circular plate of the same size parallel to the receiving PCB 12 in the axial direction, and the outgoing coil pattern 13a as shown in FIG.

발신코일패턴(13a)은 상기 수신코일패턴(12a)으로부터 전류를 전달받아 자계를 발생시키는 영역으로서, 이때 패턴 간 전류의 통전을 위해 수신 PCB(12)와 발신 PCB(13) 간에는 다수의 연결핀(14)이 설치된다.The outgoing coil pattern 13a is an area for generating a magnetic field by receiving current from the receiving coil pattern 12a. In this case, a plurality of connection pins are connected between the receiving PCB 12 and the outgoing PCB 13 to conduct current between the patterns. 14 is installed.

센싱 PCB(15)는 상기 발신 PCB(13)에 대해 축방향으로 소정 간극을 두고 배치되며, 상기 발신코일패턴(13a)에 대응되는 표면 상에는 센싱코일부(15a)가 형성된다.The sensing PCB 15 is disposed with a predetermined gap in the axial direction with respect to the transmission PCB 13, and a sensing coil portion 15a is formed on a surface corresponding to the transmission coil pattern 13a.

센싱코일부(15a)에는 상기와 같이 전류가 흐르는 발신코일패턴(13a)에 의해 발생되는 자계로부터 전압이 유기된다.In the sensing coil unit 15a, a voltage is induced from the magnetic field generated by the transmission coil pattern 13a through which current flows.

특히, 상기한 구조의 인덕티브 포지션 센서(10)는, 도 5에 도시된 바와 같이, 수신 PCB(12)의 수신코일패턴(12a)가 전원코일부(11)의 내측에 소정 간극을 두고 나란히 배치됨으로써 A 영역을 통해 상기 전원코일부(11)의 자계로부터 전류가 유도되는 구조를 갖는다.In particular, in the inductive position sensor 10 having the above-described structure, as shown in FIG. 5, the receiving coil pattern 12a of the receiving PCB 12 is arranged side by side with a predetermined gap inside the power supply coil part 11. As a result, the current is induced from the magnetic field of the power supply coil part 11 through the region A. FIG.

또한, 연결핀(14)을 통해 상기 수신코일패턴(12a)로부터 전류를 전달받는 발신 PCB(13)의 발신코일패턴(13a)은 자계를 발생시키고, 도 6에 도시된 바와 같이, B 영역을 통해 축방향으로 소정 간극을 두고 대응되게 형성된 센싱 PCB(15) 상의 센싱코일부(15a)로 전압을 유기시키는 구성을 갖는다.In addition, the transmission coil pattern 13a of the transmission PCB 13 which receives current from the reception coil pattern 12a through the connection pin 14 generates a magnetic field, and as shown in FIG. It has a configuration to induce a voltage to the sensing coil portion 15a on the sensing PCB 15 correspondingly formed with a predetermined gap in the axial direction.

이와 같이, 본 발명의 실시예에 따른 인덕티브 포지션 센서(10)는, 전원코일부(11)에 대한 수신역할을 담당하는 수신 PCB(12)와 센싱 PCB(15)로의 전압 유기를 위한 발신역할을 담당하는 발신 PCB(13)가 구조적으로 명확히 구분되는 구성을 가짐으로써 서로간 간섭을 줄일 수 있다.As described above, the inductive position sensor 10 according to the exemplary embodiment of the present invention serves as an outgoing role for voltage induction to the receiving PCB 12 and the sensing PCB 15 that are responsible for the receiving role for the power coil unit 11. The outgoing PCB 13 in charge of having a structure that is clearly distinguished structurally can reduce the interference between each other.

센싱코일부(15a)에 유기된 전압은 별도 마련된 ASIC 소자 등에 의해 데이터로 변환되어 위치 계산이 수행된다.The voltage induced in the sensing coil unit 15a is converted into data by an ASIC device or the like separately provided, and position calculation is performed.

한편, 상기한 인덕티브 포지션 센서(10)는 본 발명의 이해를 돕기 위한 일 실시예에 불과하므로 본 발명의 권리범위 내지 기술적 범위가 상기 설명된 바에 한정되는 것으로 이해되어서는 곤란하다.On the other hand, since the inductive position sensor 10 is only an embodiment for helping the understanding of the present invention, it is difficult to understand the scope of the present invention to the technical scope of the present invention is limited to the above description.

본 발명의 권리범위 내지 기술적 범위는 후술하는 특허청구범위 및 그 균등범위에 의해 정하여진다.The scope of the present invention is defined by the appended claims and their equivalents.

10: 인덕티브 포지션 센서 11: 전원코일부
12: 수신 PCB 12a: 수신코일패턴
13: 발신 PCB 13a: 발신코일패턴
14: 연결핀 15: 센싱 PCB
15a: 센싱코일부10: Inductive position sensor 11: power coil part
12: Receive PCB 12a: Receive Coil Pattern
13: Outgoing PCB 13a: Outgoing Coil Pattern
14: connecting pin 15: sensing PCB
15a: part of sensing coil

Claims (2)

인덕티브 포지션 센서(inductive position sensor)에 있어서,
일정 주파수의 교류 전류가 인가됨으로써 자계를 발생시키는 고리 형상의 전원코일부와;
상기 전원코일부의 내측에 원형의 판상으로 배치되고 표면에 상기 전원코일부로부터 발생되는 자계로부터 전류가 유기되는 수신코일패턴이 형성된 수신 PCB와;
상기 수신 PCB에 평행하게 원형의 판상으로 배치되고 표면에 상기 수신코일패턴으로부터 유기된 전류를 전달받는 발신코일패턴이 형성된 발신 PCB; 및
상기 발신 PCB에 대해 소정 간극을 두고 배치되고, 상기 발신코일패턴에 대응되게 형성되어 상기 발신코일패턴에 의해 발생되는 자계로부터 전압이 유기되는 센싱코일부가 형성된 센싱 PCB를 포함하는 것을 특징으로 하는 인덕티브 포지션 센서.In inductive position sensor,
A ring-shaped power coil unit for generating a magnetic field by applying an alternating current having a predetermined frequency;
A receiving PCB disposed inside the power supply coil portion in a circular plate shape and having a receiving coil pattern on the surface of which current is induced from a magnetic field generated from the power supply coil portion;
A transmission PCB disposed in a circular plate shape parallel to the reception PCB and having a transmission coil pattern receiving a current induced from the reception coil pattern on a surface thereof; And
An inductive sensor disposed at a predetermined gap with respect to the transmission PCB, and including a sensing PCB having a sensing coil part formed to correspond to the transmission coil pattern to induce a voltage from a magnetic field generated by the transmission coil pattern. Position sensor. 제1항에 있어서,
상기 수신코일패턴과 상기 발신코일패턴 간의 통전을 위해 상기 수신 PCB와 상기 발신 PCB 사이에 설치되는 다수의 연결핀을 더 포함하는 것을 특징으로 하는 인덕티브 포지션 센서.The method of claim 1,
Inductive position sensor, characterized in that it further comprises a plurality of connecting pins provided between the receiving PCB and the transmitting PCB for the current between the receiving coil pattern and the transmitting coil pattern.
KR1020110113088A 2011-11-02 2011-11-02 Inductive position sensor KR101252488B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110113088A KR101252488B1 (en) 2011-11-02 2011-11-02 Inductive position sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110113088A KR101252488B1 (en) 2011-11-02 2011-11-02 Inductive position sensor

Publications (1)

Publication Number Publication Date
KR101252488B1 true KR101252488B1 (en) 2013-04-09

Family

ID=48442715

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110113088A KR101252488B1 (en) 2011-11-02 2011-11-02 Inductive position sensor

Country Status (1)

Country Link
KR (1) KR101252488B1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160046520A (en) 2014-10-21 2016-04-29 박남철 Inductive displacement sensor and control method thereof
US20210348910A1 (en) * 2020-05-08 2021-11-11 Avx Electronics Technology Limited Inductive Sensor Having One or More Modular Circuit Boards
US11902643B2 (en) 2019-06-04 2024-02-13 Lg Innotek Co., Ltd. Camera module and camera device comprising same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584577A (en) * 1982-10-20 1986-04-22 Brookes & Gatehouse Limited Angular position sensor
JPH06207833A (en) * 1991-04-26 1994-07-26 Walter Mehnert Guidance position display device
KR20100003172A (en) * 2008-06-30 2010-01-07 주식회사 트루윈 Inductive displacement sensor and receiving coil structure and signal processing method for gap compensation of the same
US20110181302A1 (en) * 2010-01-25 2011-07-28 Ksr Technologies Co. Inductive position sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4584577A (en) * 1982-10-20 1986-04-22 Brookes & Gatehouse Limited Angular position sensor
JPH06207833A (en) * 1991-04-26 1994-07-26 Walter Mehnert Guidance position display device
KR20100003172A (en) * 2008-06-30 2010-01-07 주식회사 트루윈 Inductive displacement sensor and receiving coil structure and signal processing method for gap compensation of the same
US20110181302A1 (en) * 2010-01-25 2011-07-28 Ksr Technologies Co. Inductive position sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160046520A (en) 2014-10-21 2016-04-29 박남철 Inductive displacement sensor and control method thereof
US11902643B2 (en) 2019-06-04 2024-02-13 Lg Innotek Co., Ltd. Camera module and camera device comprising same
US20210348910A1 (en) * 2020-05-08 2021-11-11 Avx Electronics Technology Limited Inductive Sensor Having One or More Modular Circuit Boards

Similar Documents

Publication Publication Date Title
EP3129761B1 (en) System and method of magnetic shielding for sensors
EP2533019B1 (en) System and method for providing control of an electric motor using inductive rotary sensor
EP2178738B1 (en) A generator for a bicycle
JP2018531392A6 (en) Rotation angle sensor
JP2018531392A (en) Rotation angle sensor
JP2018503841A (en) Magnetic angular displacement measurement system
KR101252488B1 (en) Inductive position sensor
US20130342192A1 (en) Angle sensor
JP5927891B2 (en) Rotation angle detector
JP2011089898A (en) Rotation angle detector
CN107401975A (en) For carrying out the linear response formula position sensor of angular surveying to the mechanical part of rotation
WO2009093043A3 (en) Rotary electromagnetic machines
JP2021025851A (en) Rotation sensor
CN114977662A (en) Rotor for an electrical machine and electrical machine having a rotor
JP6849188B2 (en) Angle detector
JP2003097582A (en) Bearing device with sensor
KR101252473B1 (en) Inductive position sensor
JP6556341B2 (en) Rotating electric machine
JP5995759B2 (en) Rotor with temperature measurement function
JP2015068640A (en) Position sensor
CN104871033B (en) Sensor for locating metal or magnetic objects
JP5411084B2 (en) Rotation angle detector
JP2011122878A (en) Rotation angle detector
JP6258880B2 (en) Rotary scale
CN107645223B (en) Motor assembly

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20160318

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20170317

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20180316

Year of fee payment: 6