KR101247968B1 - Apparatus for Nano-particle Coating, Manufacturing Method of Core-Shell type Nano-particle and Measuring Method of Coating-Thickness Using the Same - Google Patents

Abstract

Nanoparticle coating apparatus of the present invention comprises a core particle generator for generating spherical core material particles by evaporating, agglomerated the core material; A particle coating reactor for coating a shell material on the core material particles introduced from the core particle generator; And a vacuum pump as a means for maintaining the pressure in the particle coating reactor at a low pressure. The nanoparticle coating apparatus comprising: a pressure separation means between the core particle generator and the particle coating reactor.
The nanoparticle coating apparatus of the present invention is provided with a pressure separation means between the core particle maker and the particle coating reactor, and can be operated in different pressure ranges by separating the pressure of both, while coating the core particles in the low pressure particle coating process Real-time control of the coating thickness is possible.

Description

Apparatus for Nano-particle Coating, Manufacturing Method of Core-Shell type Nano-particle and Measuring Method of Coating-Thickness Using the Same}

The present invention relates to a nanoparticle coating apparatus and a method for manufacturing core-shell nanoparticles using the same, and more particularly, to a nanoparticle coating apparatus including a core material maker and a particle coating reactor, wherein the core material maker and the particle coating reactor A nanoparticle coating apparatus and a core using the same are provided with a pressure separating means between the two to separate the pressure to operate in different pressure ranges, while real-time control of the thickness coated on the core particles in the low-pressure particle coating process The present invention relates to a method for preparing shell nanoparticles and a method for measuring coating thickness.

Core-shell structured nanoparticles are used in various fields such as catalysts, anticancer drugs, and solar cells because of the ability to combine the functions of various materials in a single particle. Accordingly, progress has been made in the technology for producing the core-shell structured nanoparticles.

For example, in Non-Patent Document 1, the surface of silver nanoparticles is coated with SiO 2 using photoinduced chemical vapor deposition to form a core-shell structure to prepare Au-SiO ₂ composite nanoparticles, and at a atmospheric pressure before and after the photoinductive particle coating reactor. A pair of differential mobility analyzer (Differential Mobility Analyzer) was placed on the back side and a condensation particle counter (Condensation particle counter) was connected to measure the thickness of the coated particles using a scanning particle size distribution measurement system.

In Non-Patent Document 2, a low pressure generator is used to extract a gas containing nanoparticles at a low pressure to an outside of the reactor at atmospheric pressure in order to measure the size distribution of nanoparticles prepared from a high temperature plasma reactor at a low pressure. Disclosed is a method for measuring nanoparticle size distribution using a scanning particle size distribution measurement system comprising a differential mobility analyzer and a condensation particle counter.

In Non-Patent Document 3, a differential electrophoretic analyzer was operated at low pressure to measure slip correction coefficients of nanoparticles.

Gas phase nanoparticle coating reactors can be constructed in a variety of ways. When nanoparticle coating material or core material leaks, there are many environmental and industrial health risks, so it needs to be operated at low pressure. This gas phase coating method can produce nano-particles of core-shell structure by various combinations including metal-metal, metal-ceramic, metal-organic, organic-organic structure, but the apparatus related to this has not been attempted in particular. There is a need for development.

Adam M Boies et al., Nanotechnology, 20, 295604 (2009). Xiaoliang Wang et al., Plasma Chemistry and Plasma Processing, 25 (5), 439-453 (2005). Kim et al., J. Res. Natl. Inst. Stand. Technol. 110, 31 (2006).

An object of the present invention is to provide a nanoparticle coating apparatus capable of real-time control of the low-pressure particle coating process while being able to operate in a different range by separating the pressure of the core material manufacturer and particle coating reactor.

Another object of the present invention to provide a method for producing core-shell nanoparticles, characterized in that the coating of the shell material and the generation of the core particles using the coating apparatus is carried out at a separate pressure.

Still another object of the present invention is to provide a method for measuring real-time coating thickness of core-shell nanoparticles prepared using the nanoparticle coating apparatus.

Nanoparticle coating apparatus of the present invention for achieving the above object is a core particle generator for generating spherical core material particles by evaporating, agglomerated the core material; A particle coating reactor for coating a shell material on the core material particles introduced from the core material maker; And a vacuum pump, which is a means for maintaining the pressure in the particle coating reactor at a low pressure. The nanoparticle coating apparatus comprising: a pressure separation means between the core material manufacturer and the particle coating reactor.

Preferably, the pressure separating means is a critical orifice.

Particle distribution control means may be further provided between the core material manufacturer and the pressure separation means.

The particle distribution adjusting means is preferably a differential electrophoresis analyzer.

Further comprising a particle size / distribution measuring device for measuring the size and distribution of the particles coated on the rear end of the particle coating reactor, a low pressure generating means may be further provided between the particle coating reactor and the particle size / distribution measuring device. have.

The low pressure generating means is preferably a venturi pump.

In the method for producing core-shell nanoparticles of the present invention is a method for producing core-shell nanoparticles comprising the step of generating core particles in a core particle generator and coating the shell material on the core particles in a particle coating reactor. In this case, the core particles are generated and the coating of the shell material is performed at a separated pressure.

Separation of the pressure is carried out by a pressure separation means provided between the core particle generator and the particle coating reactor.

Generation of the core particles is carried out at atmospheric pressure, the coating of the shell material is preferably carried out at 500 ~ 10 Torr.

In the coating thickness measurement method of the core-shell nanoparticles of the present invention, in preparing the core-shell nanoparticles for coating a coating material on the core particles generated in the core particle generator using a particle coating reactor operated at a low pressure, Operating only the core particle generator and measuring the size / distribution of only the core particles; And measuring the size / distribution of the core-shell nanoparticles prepared by simultaneously operating the core particle generator and the particle coating reactor.

The nanoparticle coating apparatus of the present invention may use a critical orifice to operate the core particle generator independently at normal or high pressure while operating the particle coating reactor at low pressure. The critical orifice controls the volume flow rate of the carrier gas containing the core particles entering the coating reactor while allowing the pressure at the inlet and outlet of the critical orifice to be in different ranges.

In addition, the core particles sent to the coating reactor may have the form of complex dispersion particles or simple dispersion particles, it is possible to classify the complex dispersion particles into simple dispersion particles by arranging particle distribution control means at the rear of the core particle generator.

In addition, a particle coating reactor is used by using a Scanning Mobility Particle Sizer composed of a Differential Mobility Analyzer and a Condensation Particle Counter after the Particle Coating Reactor at low pressure. By measuring the particle size distribution of the core particles before operation, and by operating the particle coating reactor to measure and compare the particle size distribution when the particles are coated, it is possible to determine the coating thickness of the core particles. The gas containing the coated particles is extracted from the low pressure reactor at atmospheric pressure using a low pressure generator, and the size distribution is measured using a scanning particle size distribution measuring system located at the rear of the reactor. The coating thickness can be measured at the nanometer level through comparative analysis of the distribution of particle sizes measured before and after each particle coating process.

1 is a schematic diagram of a nanoparticle coating apparatus 100 according to an embodiment of the present invention.
2 is a cross-sectional view of a critical orifice 140 ′ which is an example used as the pressure separating means 140 in the nanoparticle coating apparatus 100 of the present invention.
3 is a schematic diagram of a nanoparticle coating apparatus 200 according to another embodiment of the present invention.
Figure 4 is a schematic diagram of the differential electrophoretic analyzer 260` used as an example of the particle distribution control means 260 added to the nanoparticle coating apparatus 200 according to another embodiment of the present invention.
5 is a schematic diagram of a nanoparticle coating apparatus 300 according to another embodiment of the present invention.
Figure 6 is a schematic cross-sectional view of the venturi pump 370` used as the low pressure generating means 370 in the nanoparticle coating apparatus 300 according to another embodiment of the present invention.
7 is a schematic view for explaining the principle of operation of the venturi pump 370`.

Hereinafter, the nanoparticle coating apparatus 100 of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram of a nanoparticle coating apparatus 100 according to an embodiment of the present invention. 1, the nanoparticle coating apparatus 100 of the present invention is a core particle generator 110; Particle coating reactor 120; And a vacuum pump 130 which is a means for maintaining the pressure in the particle coating reactor 120 at a low pressure. In the nanoparticle coating apparatus 100, the core particle generator 110 and the particle coating reactor 120 are included. It is characterized by having a pressure separating means 140 in between.

In the above, the core particle generator 110 may be a device that functions to generate spherical core material particles by evaporating and condensing a material used as a core material in the nanoparticles having a core-shell structure. The material evaporated to be used as the core material may initially be in powder or liquid form. In addition, the core particle generator 110 may be a device for generating the colloidal core particles present in the form of solid particles in the solvent in the gas phase. In addition, the core particle generator may be a device for generating and drying the core particles from the colloidal solution containing the core particles using a spray device to send the solid core particles to the coating reactor.

The particle coating reactor 120 functions to coat the shell material on the core material particles introduced into the fluidized state such as the flow of gas from the core particle generator 110. The particle coating reactor 120 and the core particle generator 110 may be connected to a conduit 111 having a valve 112. The valve 112 may be omitted as necessary. In this case, the particle coating reactor 120 is to properly maintain the temperature of the coating chamber 121 by heating the coating chamber 121 and the coating chamber 121 is substantially the coating of the shell material on the core material particles It consists of a chamber furnace 122. The shape of the particle coating reactor 120 may be variously modified according to the core material particles and the shell material coated thereon, whereby a different material is deposited on the surface of the core particle to make a composite nanoparticle having a core-shell structure. Can lose. An example of an apparatus composed of the core particle generator 110 and the particle coating reactor 120 has been illustrated in Non-Patent Document 1.

Meanwhile, the material corresponding to the shell may be coated with a thickness calculated in advance in the coating chamber 121 by the shell material supplied at an appropriate location (not shown) of the particle coating reactor 120. The adjustment of the coating thickness may be performed by adjusting the flow rate of the precursor coating material or the flow rate of the gas including the core particles.

In the preparation of core-shell type nanoparticles prepared by conventional chemical vapor deposition (CVD) or physical vapor deposition (PVD) methods, any of them are commonly used as core materials. The core particle generator 110 may be evaporated and condensed without being converted into a core material, and then coated by the particle coating reactor 120 to be converted into core-shell particles. Particles that can be coated by the nanoparticle coating apparatus 100 of the present invention, for example, TiO ₂ -SiO _{2 ,} SnO ₂ (Core) -SiO ₂ (Shell), TiO ₂ (Core)-SnO ₂ (Shell), TiO ₂ (core) -SnO ₂ + SiO ₂ (shell) composite particles (Lee et al., J. Mater. Sci., 2003), Fe ₂ O ₃ -SiO ₂ , Ag-SiO ₂ (Boies et al., Nanotechnology , 20, 295604, 2009), Au-SiO ₂ , Al-C ₂ H ₄ Al ₂ O ₃ / SiO ₂ , Al ₂ O ₃ / ZrO ₂ , or SiO ₂ / ZrO ₂ .

The vacuum pump 130 connected to the particle coating reactor 120 and the conduit (111 ') is a means for maintaining the pressure in the particle coating reactor 120 at a low pressure, the position is not particularly limited, as illustrated in FIG. In an embodiment, but is provided at the rear end of the particle coating reactor 120 according to the flow of the coating material is not limited thereto.

Low pressure in the present invention refers to a pressure of 500 ~ 10 Torr.

Gas phase nanoparticle coating reactors can be constructed in a variety of ways. When nanoparticle coating material or core material leaks, there are many environmental and industrial health risks, so it needs to be operated at low pressure.

Nanoparticle coating apparatus 100 of the present invention of the present invention is the core particle generator 110, the particle coating reactor 120, the vacuum pump 130 in the configuration of the core particle generator 110 and particle coating reactor 120 It is characterized by having a pressure separating means 140 between the).

The pressure separating means 140 functions to separate the pressure in the core particle generator 110 and the particle coating reactor 120 by different. The core material production performed in the core particle generator 110 while operating the nanoparticle coating apparatus 100 by the pressure separation means 140 is at a relatively high pressure, in the coating chamber 121 of the particle coating reactor 120. The coating reaction can be carried out at a relatively low pressure, that is, the production of the core material particles and the coating of the shell material at different pressures, but can be performed in one process without separating the two processes separately.

In one embodiment of the present invention, the pressure separating means 140 may be a critical orifice 140 ′. In the present invention, the critical orifice refers to an orifice in which the flow velocity on the outlet side becomes a sound velocity when the pressure ratio of the inlet and outlet fluid passing through the orifice falls below the critical pressure ratio.

2 is a cross-sectional view of the critical orifice 140 'used as the pressure separating means 140 in the present invention. In FIG. 2, the critical orifice 140 ′ is a critical orifice body 141, and a space formed in the body to become a passage through which the fluid flows is sequentially formed at the critical orifice inlet 142 and a specific position of the passage. Orifice 143 for controlling the flow and flow rate of the orifice and the orifice outlet 144 through which the fluid passing through the orifice exits. The passage and orifice are illustrated in FIG. 2 as a circular space, but are not necessarily limited thereto, and may be in other forms, for example, in the form of flat tubes or squares, rectangles, and the like. On the other hand, the critical orifice 140 ′ illustrated by way of example in FIG. 2 is an assembly of two separate sets as one for convenience of manufacture, or of course, it does not depart from the spirit of the present invention even if it is produced integrally.

The critical orifice 140 ′ serves to control the flow rate of the gas while flowing gas from the inlet 142 and passing the small orifice 143. If the outlet pressure in the critical orifice 140 ′ is less than 0.45 times the inlet pressure, a choking phenomenon occurs and the velocity of the gas passing through the orifice 143 has a sound velocity. This critical orifice allows the coating reactor to be operated at low pressure and the front of the coating reactor inlet to be operated at atmospheric or high pressure. In addition, the critical orifice 140 ′ may play an additional role of controlling the flow rate of the gas containing the core particles introduced into the particle coating reactor 120. That is, the critical orifice 140 ′ enables the control of the flow rate at the same time as the pressure separation.

Meanwhile, although not shown in FIG. 1, the shell material coated on the front end of the particle coating reactor 120 according to a specific position of the particle coating reactor 120, preferably, the coating material flows in a coating chamber ( 121) may be provided with a device (eg, a bubbler) to allow it to flow into.

The core-shell particles exiting the particle coating reactor 120 in FIG. 1 are partially flown through a sampling probe to a particle measurement device (not shown) and the remainder is a filter which is typically mounted in a pump via a pump 130. Exhausted through.

In addition, when the nanoparticle coating apparatus 100 of the present invention is used for photo-induced CVD, although not shown in FIG. 1, a means for introducing light into the coating chamber 121, for example, For example, a generator such as a VUV (Vacuum Ultra Violet), an excimer laser, or the like may be further provided.

In addition, when the coating in the coating chamber 121 is to be supplied with an inert gas containing N ₂ , Ar, Ne, etc., an apparatus capable of supplying the same may also be further provided, although not shown in FIG. 1. have.

3 is a schematic diagram of a nanoparticle coating apparatus 200 according to another embodiment of the present invention. In another embodiment of the present invention, the nanoparticle coating apparatus 200 may further include a particle distribution adjusting means 260 between the core particle generator 210 and the pressure separation means 240. In general, since the core material particles generated in the core particle generator are in the form of a poly-disperse aerosol, the composite dispersion aerosol may be converted into a mono-disperse aerosol in some cases, and then introduced into a particle coating reactor. It may be necessary, the particle distribution control means 260 can be used for this purpose. In order to obtain monodisperse aerosol particles, the particle distribution control means 260 is usually used in combination with a particle charger (Charger) (250). If the composite dispersion particles to be coated in Figure 3 as it is without passing through the particle distribution control means 260, pressure separation means 240 through a separate conduit 211 connecting the core particle generator 210 and the particle coating reactor And particle coating reactor 220 may be connected in series in the order of course. On the other hand, in Fig. 3, the functions and functions of the valves 212 and 212 ', the particle coating reactor, the vacuum pump 230, the conduit 211' and the like are the same as in the first embodiment of the present invention.

In an embodiment according to the present invention, the particle distribution adjusting means 260 may be a differential mobility analyzer. 4 is a schematic diagram of a differential electrophoretic analyzer 260 'added in another embodiment of the present invention. 4, the differential electrophoretic analyzer 260 'includes two laminar flow meters 261 and 261', two differential pressure gauges 262 and 262 ', a pressure gauge 263 and a thermometer 264, a filter. 265 and 265 ', two flow control valves 269 and 269', a rotor meter 268, a power supply 270, and the like.

The particle charge unit 250 functions to charge the aerosol-type particles generated in the core particle generator 210, and the differential electrophoretic analyzer 260` has an electric field applied therein and according to the size of the particles' electrical mobility. It is a device that can classify. Differential electrophoretic analysis device is composed of a center electrode 266 and a grounded outer cylinder (267). The center electrode 66 is connected to the power supply 270.

The size of the particles to be classified can be changed by changing the size of the electric field. The particle's electrical mobility size is influenced by the particle's slip correction factor, particle size, and gas viscosity. The viscosity of the gas is affected by the gas temperature, and the slip correction coefficient of the particle is affected by the particle size and the mean free path of the gas molecules. The mean free path of gas molecules is influenced by the pressure and temperature of the gas.

The flow into the differential electrophoretic analyzer is divided into Sheath flow and Aerosol flow. Aerosol flow rates can be accurately measured from the Hagen-Poiseuille law using laminar flow meters (261, 261 ') and differential pressure gauges (262, 262') at the front and rear of the differential electrophoretic analyzer. The laminar flow meter may be used instead of other types of flow meters, such as thermal mass flow meters, rotor meters, and the like. At this time, the aerosol flow rate can be precisely controlled using the valve 269 '. The sheath flow rate may be controlled by using a rotor meter 268 after passing a high-pressure inert gas through a filter to form a clean gas. In addition, the pressure gauge 263 and the thermometer 264 may be used to classify the particle size by measuring the gas pressure and temperature inside the differential electrophoretic analyzer 260 ′. In the differential electrophoretic analyzer shown in FIG. 3, the flow rate of the sheath is acyclic, but the pump may be operated in a circulatory form.

The complex dispersed aerosol particles to be measured and the particle-free inert sheath gas enter the differential electrophoretic analyzer through the laminar flow meter 261 and the rotor meter 268, respectively. The complex dispersed aerosol flow rate and the sheath flow rate flow downwardly between the electrodes while maintaining laminar flow. The sheath flow initially serves to separate the aerosol particles from the electrode on the opposite side. In the case where the complex dispersed aerosol particles are charged, the degree of movement of the charged particles along the electric field varies as the size of the electric field is adjusted between the two electric electrodes. Particulate electrophoresis allows particles to be separated by exiting the analyzer exit. The operating principle of the detailed differential electrophoretic analyzer including the numerical analysis is as described in detail in Non-Patent Document 3.

Another embodiment of the nanoparticle coating apparatus according to the present invention further comprises a particle size / distribution measuring device for classifying and measuring the size and distribution of particles coated on the rear end of the particle coating reactor, wherein the particle coating reactor and particles Low pressure generating means may be further provided between the size / distribution measuring devices.

5 is a schematic diagram of a nanoparticle coating apparatus 300 according to another embodiment of the present invention. In FIG. 5, the particle size / distribution measuring device 390 is composed of a particle chargeer 350 ', a differential electrophoretic analyzer, a particle distribution 360', and a condensation particle counter (CPC) 380. do. The particle charge 350 'and the differential electrophoretic analyzer 360' have the same function and function as the particle charge 250 and the particle distribution control means 260 described above. However, the condensation particle counter 380 is added to the configuration, by the counter 380, particles coated in the core-shell form in the particle coating reactor is counted by size, the particles coated in the core-shell form as a whole The coating thickness of can be measured in real time. In the art, a particle distribution measurement system consisting of a particle charger 360 ', a differential electrophoretic analyzer 360', and a condensation particle counter 380 is called a Scanning Mobility Particle Sizer.

On the other hand, the nanoparticle coating apparatus (100, 200) according to the present invention is a particle coating reactor (120, 220) in which the process of coating the shell material on the core material particles is operated at a low pressure, while conventional particle size / distribution The measuring device is operated at normal pressure. Therefore, it is difficult to sample the coated nanoparticles in the nanoparticle coating apparatus due to the pressure difference between them. In order to solve this problem, in the nanoparticle coating apparatus 300 according to another embodiment of the present invention, the low pressure generating means 370 is provided as a sampling means between the particle coating reactor 320 and the particle size / distribution measuring device 390. It is further provided. On the other hand, in another embodiment of the present invention, the core particle generator 310, particle coating reactor 320, vacuum pump 330, pressure separation means 340, particle charger 350, particle distribution control means ( The operation and possibility of 360 is controlled by the core particle generator 210, particle coating reactor 220, vacuum pump 230, pressure separation means 240, particle charger 250, particle distribution control in the second embodiment. Same as in the means 260.

FIG. 6 is a schematic cross-sectional view of a venturi pump 370 ′ that may be used as an example of the low pressure generating means 370 provided in the nanoparticle coating apparatus 300 according to the third embodiment of the present invention. It is a schematic diagram explaining the operating principle of the said venturi pump 370 '. 6 and 7, the venturi pump 370` used as the low pressure generating means in the third embodiment of the present invention includes a low pressure gas inlet 371 and a high pressure gas generator 374 connected to the particle coating reactor 320. And a high pressure gas inlet 372 into which the high pressure inert gas generated is introduced and a mixed gas outlet 373 through which the mixed gas flows. The low pressure gas inlet 371 is obtained through a isokinetic sampling probe 376 inserted after the particle coating reactor 320 or between the interior of the conduit connected thereto to obtain a representative sample of the coated particles. It is equipped.

Particle sampling in the flowing air is very important for the inertial force of the particles due to flow, and isokinetic sampling and probes with no tube inlet loss regardless of particle size or inertia due to the relative difference between the probe sampling rate and the flowing air velocity. Classified as Anisokinetic Sampling due to the difference in velocity and external air velocity. When the inlet of the probe is aligned in parallel with the streamline and the air velocity flowing into the probe and the external air velocity match, the particle loss can be eliminated without being affected by particle size or inertia force. Isokinetic Sampling). That is, there is no relative difference between the probe speed and the outside air speed. When the probe sampling rate is greater than the outside air velocity, the outside air streamline bends inside the probe inlet, causing particles that follow the streamline to flow out of the probe by inertial forces in the bend of the streamline, so that fewer particles are sampled than the constant velocity sampling method. Sampling error occurs. On the other hand, when the outside air velocity is greater than the probe sampling rate, the outside air streamline bends out of the probe inlet and the particles that follow the streamline do not continue to follow the streamline due to inertia forces at the bent portion of the streamline and are introduced into the probe rather than the constant velocity sampling method. Many particles are sampled.

Referring to FIGS. 6 and 7, the sampling principle of the nanoparticle coating apparatus 300 according to the third embodiment of the present invention will be described. The high-pressure gas inlet 371 is a high-pressure inert gas generated from the high-pressure gas generator 374. When the high-pressure inert gas is expanded through the narrow inlet, and the speed increases, a portion having a lower pressure than the inside of the particle coating reactor 320 is formed. Accordingly, the gas in which the coated particles are suspended is sucked through the low pressure gas inlet 372 connected to the particle coating reactor 320, and the mixed gas outlet 373 mixed with the high pressure inert gas from the high pressure gas inlet 371. A gas containing particles coated with) is discharged. At this time, the counting concentration of the particles is lowered but the size distribution of the particles is not changed. The discharge gas containing the coated particles is mostly exhausted through a filter (not shown), and a part of the discharge gas is sent to the differential electrophoretic analyzer 360`. While classifying the particles by size, the condensation particle counter 380 counts monodisperse particles and measures the size distribution of the particles.

The method for preparing core-shell nanoparticles of the present invention includes the steps of generating core particles in a core particle generator) and coating a shell material on the core particles in a particle coating reactor. In the present invention, the core particles are generated and the coating of the shell material is performed at a separated pressure.

Separation of the pressure is carried out by a pressure separation means provided between the core particle generator and the particle coating reactor. In this case, the pressure separation means is preferably a critical orifice. As described above, it can be performed in a state where the pressure is separated from the core particle generation step and the particle coating reaction step by the critical orifice.

Generation of the core particles by the critical orifice 140 ′ is performed at normal pressure, and coating of the shell material may be performed at low pressure, specifically at 500 to 10 Torr.

Meanwhile, as described above, when the nanoparticle coating apparatus of the present invention is additionally configured with the particle distribution adjusting means 360 and the particle distribution measuring apparatus 390, the particle size / distribution of the core material in the nanoparticle coating apparatus And coating thickness / distribution of coated core-shell particles can be measured in real time. That is, by measuring the particle distribution when the coating reactor on / off, respectively, the thickness of the particle coating can be measured in real time. Based on the analysis results, the operating conditions of the nanoparticle coating machine can be adjusted to determine the coating thickness of the particles in real time. Specific coating thickness measurement method according to the present invention consists of the following method:

That is, in preparing the core-shell nanoparticles that coat the coating material on the core particles generated by the core particle generator using a particle coating reactor operated at low pressure, first, the core particle generator 310 and the particle distribution measuring device With only 390 running, the particle size / distribution of only the core particles is measured. Next, after further operating the particle coating reactor 320, the size / distribution of the coated particles is measured. Finally, comparing the two, only the coated thickness of the core-shell nanoparticles can be calculated. Real-time measurement of such particle size / distribution is possible with or without the particle distribution control means 360 running.

Each connecting part between the particle coating reactor, the vacuum pump, the critical orifice and the low pressure generating means may be flanged at both ends to insert an O-ring (or gasket) between the flanges and bolted to prevent leakage. Or, if necessary, it can be connected by welding.

Although the present invention has been described in detail only with respect to the described embodiments, it is obvious that various modifications and changes are possible within the spirit of the present invention, and such modifications and modifications belong to the appended claims.

Nanoparticle coating apparatus 100 of the present invention can be used for the production of various nanoparticles having a core-shell structure.

100, 200, 300 .. Nano particle coating equipment
110, 210, 310 .. Core particle generator
120, 220, 320 .. Particle coating reactor 130, 230, 330 .. Vacuum pump
140, 240, 340 .. pressure separation means 140 `. Critical orifice
150, 250, 350, 350` .. Particle Charger
160, 260, 360 .. Particle distribution control means
370. Low pressure means 380. Condensation particle counter
390 .. Particle distribution measuring device

Claims (10)

A core particle generator for evaporating and condensing the core material to generate spherical core material particles; A particle coating reactor for coating a shell material on the core material particles introduced from the core particle generator; In the nanoparticle coating apparatus comprising a; vacuum pump which is a means for maintaining the pressure in the particle coating reactor at a low pressure,
Nanoparticle coating apparatus comprising a pressure separation means between the core particle generator and the particle coating reactor. The nanoparticle coating apparatus according to claim 1, wherein the pressure separating means is a critical orifice having an outlet pressure of less than 0.45 times the inlet pressure. The nanoparticle coating apparatus according to claim 1, further comprising a particle distribution adjusting means between the core particle generator and the pressure separation means. The nanoparticle coating apparatus according to claim 3, wherein the particle distribution adjusting means is a differential electrophoretic analyzer. According to claim 1, further comprising a particle size / distribution measuring device for measuring the size and distribution of the particles coated on the rear end of the particle coating reactor, the low pressure generating means between the particle coating reactor and particle size / distribution measuring device The nanoparticle coating apparatus, characterized in that further provided. 6. The nanoparticle coating apparatus according to claim 5, wherein the low pressure generating means is a venturi pump. Generating core particles in the core particle generator; And coating a shell material on the core particles in a particle coating reactor.
The core-shell nanoparticles manufacturing method characterized in that the generation of the core particles and the coating of the shell material is carried out at a separate pressure. The method of claim 7, wherein the separation of the pressure is performed by pressure separation means provided between the core particle generator and the particle coating reactor. The method of claim 7, wherein the generation of the core particles is performed at atmospheric pressure, and the coating of the shell material is performed at 500˜10 Torr. In preparing the core-shell nanoparticles for coating the coating material on the core particles generated in the core particle generator using a particle coating reactor operated at low pressure,
Operating only the core particle generator and measuring the size / distribution of only the core particles; And
And measuring the size / distribution of core-shell nanoparticles prepared by simultaneously operating the core particle generator and the particle coating reactor.

Images