KR101229404B1

KR101229404B1 - A hazardous substances detection sensor chip

Info

Publication number: KR101229404B1
Application number: KR1020100129458A
Authority: KR
Inventors: 김용훈; 김기영; 양길모; 윤홍선
Original assignee: 대한민국
Priority date: 2010-12-16
Filing date: 2010-12-16
Publication date: 2013-02-05
Also published as: KR20120067840A

Abstract

The present invention discloses a hazardous substance detection sensor chip. The apparatus includes an electrochemical sensing unit which receives a variable voltage and detects heavy metals contained in a sample by using voltammetry; A spectroscopic analysis unit which detects toxic substances contained in the sample by measuring the intensity at each wavelength of light transmitted by irradiating the sample with light; And a platform housing formed of a PDMS elastic membrane and configured to mount the electrochemical sensing unit and the spectroscopic analysis unit in an opening of a predetermined shape. Therefore, according to the present invention, even in the case of detecting heavy metals or organic toxic substances, the conventional polarography apparatus is unnecessary, so that the measurement cost and equipment maintenance cost can be reduced, and the heavy metal detection function and the spectral analysis function of the toxic substances are repeated. Simultaneous detection allows for ease of use and efficiency.

Description

Hazardous Substance Detection Sensor Chip

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hazardous substance detection sensor chip, and more particularly, to a hazardous substance detection sensor chip for flowing a silicon block in a fluid to attach and align the silicon block in a predetermined region on a substrate.

In general, polarography, which is used for quantitative qualitative analysis of various trace components, uses the principle that voltage-current characteristics are determined in proportion to the type and concentration of analyte.

Polarography is an electrochemical method for analyzing oxidizing or reducing substances. It is called voltammetry and the solution to be analyzed is placed in a glass cell containing two electrodes, which are made of glass capillaries. Mercury flows through the capillary on one electrode, and mercury is usually stored on the other electrode.

Usually, when the dropping mercury electrode is connected to the cathode of the polarization voltage, the voltage slightly increases and the current corresponding to this voltage can be detected by an ammeter. The current flowing in the dropping mercury electrode is very small until it is applied a voltage large enough to reduce the material to be analyzed. When the applied voltage increases above this threshold, the current initially increases rapidly, but gradually reaches a certain value and remains constant to some degree as the voltage increases further. The threshold voltage needed to rapidly increase the current is a characteristic of the material to be reduced, which is the value that identifies (qualitatively analyzes) the material. Under appropriate conditions, the specific limiting current is controlled by the rate at which the reducing material diffuses to the surface of the mercury, and the magnitude of the limiting current is consistent with the measurement of the concentration of the reducing material (quantitative analysis).

If the solution contains several substances that are reduced or oxidized at different voltages, the voltage-current curve shows an increase in discrete currents (polar graph wave) and a limiting current for each. Thus, this method is useful for detecting or determining several substances simultaneously, and can detect or determine substances even at relatively very small concentrations.

By the way, the conventional polarographic apparatus mainly uses ICP, AA and UV spectra, Raman spectroscopy, HPLC, etc., when detecting heavy metals or organic toxic substances, there is a limit that the measurement cost and equipment maintenance cost is expensive.

In addition, most of the conventional polarographic apparatus cannot measure the harmful substances such as mercury or heavy metals such as mercury, so recently, in the commercialization stage, the detection function of heavy metals and the spectroscopic analysis of toxic substances can be used simultaneously. There is a growing need for the development of a hazardous substance detection device capable of simultaneously detecting several substances, such as PH measurement of water quality, and capable of continuously repeating automatic measurement.

An object of the present invention is to electrochemically detect the presence of heavy metals and the concentration of heavy metals in a sample by using voltammetry and at the same time spectroscopically analyze the light transmitted through the sample to detect toxic substances contained in the sample. To provide a substance detection sensor chip.

According to an aspect of the present invention, there is provided a hazardous substance detection sensor chip comprising: an electrochemical sensing unit configured to detect a heavy metal contained in a sample by using a voltammetric method by receiving a variable voltage; A spectroscopic analysis unit which detects toxic substances contained in the sample by measuring the intensity at each wavelength of light transmitted by irradiating the sample with light; And a platform housing formed of a PDMS elastic membrane and configured to mount the electrochemical sensing unit and the spectroscopic analysis unit in an opening of a predetermined shape.

The electrochemical sensing unit of the hazardous substance detection sensor chip according to the present invention for achieving the above object is a counter electrode for allowing a current to flow through the cell by the supplied voltage; A reference electrode for maintaining a constant interface potential difference regardless of the change in voltage; And a working electrode which measures the potential difference of the sample by using the voltammetry and detects the presence and concentration of the heavy metal.

The counter electrode of the hazardous substance detection sensor chip according to the present invention for achieving the above object is characterized in that it comprises any one of platinum, gold, stainless steel and carbon.

In order to achieve the above object, the reference electrode of the hazardous substance detection sensor chip according to the present invention is a standard hydrogen electrode (SHE), a saturated magenta electrode (SCE), a copper-copper (II) sulfate electrode, and silver / silver chloride (Ag / AgCl). It characterized in that it comprises any one of the electrodes.

The working electrode of the hazardous substance detection sensor chip according to the present invention for achieving the above object is a glass carbon electrode electrically connected to measure the potential difference of the sample;

A polymer in contact with the sample while surrounding the outer circumferential surface of the glass carbon electrode; A copper rod connected to a power supply and receiving the variable voltage to probe the current to measure the current; And a carbon paste for adhering and fixing the glass carbon electrode, the polymer and the copper rod.

The polymer of the hazardous substance detection sensor chip according to the present invention for achieving the above object is characterized in that the fluororesin material having a hollow shape and does not erode into the sample.

The spectroscopic analysis unit of the hazardous substance detection sensor chip according to the present invention for achieving the above object is an energy source for supplying light having multiple wavelengths; A first collimator receiving the light to irradiate the sample with light; A second collimator for focusing light transmitted from the sample into a parallel beam; A grating which receives the parallel beam and weights each wavelength of the multiple wavelengths; And a photo detector for receiving the weighted light and measuring the intensity at each wavelength.

The energy source of the hazardous substance detection sensor chip according to the present invention for achieving the above object is characterized in that it comprises any one of a lamp, filament, LED and light spectrum.

The first and second collimators of the hazardous substance detection sensor chip according to the present invention for achieving the above object is characterized in that the lens or mirror.

The optical detector of the hazardous substance detection sensor chip according to the present invention for achieving the above object is characterized in that it contains germanium or silicon.

The PDMS elastic membrane of the hazardous substance detection sensor chip according to the present invention for achieving the above object is characterized by producing by mixing the PDMS stock solution and the curing agent in a mixing ratio of 10: 1.

Even when detecting a heavy metal or an organic toxic substance, the hazardous substance detection sensor chip of the present invention eliminates the need for a conventional polarographic apparatus, thereby reducing measurement cost and equipment maintenance cost. Simultaneous detection can be repeated at the same time for ease of use and efficiency.

1 is a perspective view of a hazardous substance detection sensor chip according to the present invention.
2 (a) to 2 (e) is a MEMS process diagram illustrating a preliminary process for manufacturing a hazardous substance detection sensor chip according to the present invention shown in FIG.
3 is a block diagram of an apparatus for detecting a heavy metal using the electrochemical sensing unit in the hazardous substance detection sensor chip according to the present invention shown in FIG.
4 is a cross-sectional view of the working electrode in the electrochemical sensing unit of the hazardous material detection sensor chip according to the present invention shown in FIG.
5 is a perspective view of a spectroscopic analysis unit in a hazardous substance detection sensor chip according to the present invention illustrated in FIG. 1.

Hereinafter, the hazardous substance detection sensor chip according to the present invention will be described with reference to the accompanying drawings.

1 is a perspective view of a hazardous substance detection sensor chip 100 according to the present invention, and includes an electrochemical sensing unit 300, a spectroscopic analysis unit 400, and a platform housing 245.

Referring to Figure 1 will be described the function of each configuration of the hazardous substance detection sensor chip 100 according to the present invention.

The electrochemical sensing unit 300 is electrically connected to a power supply and receives a voltage and a current to measure the presence of one or more heavy metals and the concentration of the heavy metals by using voltammetry.

The spectroscopic analysis unit 400 focuses the transmitted light by irradiating light onto the sample with a parallel beam, and then weights them at each wavelength to measure the intensity of the light at each wavelength, thereby toxic substances included in the sample. Is detected.

The platform housing 245 is formed of a polydimethylsiloane (PDMS) elastic membrane to mount the electrochemical sensing unit 300 and the spectroscopic analysis unit 400 in a predetermined opening.

2 (a) to 2 (e) is a MEMS process diagram illustrating a preliminary process for manufacturing the hazardous substance detection sensor chip 100 according to the present invention shown in FIG.

First, as shown in FIG. 2A, an insulating film 220 is deposited on the substrate 210.

In this case, the insulating film 220 is preferably formed to a thickness of 450 to 550 angstroms, because deposition above the thickness range may cause interlayer separation.

As shown in FIG. 2B, a resist film 230 is formed on the insulating film 220, and the resist film 230 is exposed to light by performing a drawing exposure on the resist film 230 using a laser drawing machine or the like. .

As shown in FIG. 2 (c), the resist pattern 235 is formed by coating and developing the developer on the resist film 230 by a spraying method or the like.

The resist film 230 can form a positive photoresist material or a negative photoresist material using a method such as spin coating or a slit coater. In this embodiment, the resist film 230 is formed of a negative photoresist material. It shall be formed.

As shown in FIG. 2 (d), the insulating film 220 formed outside the resist pattern 235 using the resist pattern 235 as a mask is etched to form an embossed mold 225 having a predetermined shape under the resist pattern 235. To form.

Here, the shape of the embossed mold 225 is the shape of the electrochemical sensing unit 300 and the spectroscopic analysis unit 400 to be mounted later.

As shown in FIG. 2 (e), an elastic film 240 in which the PDMS stock solution and the curing agent are mixed is applied onto the substrate 210 and the embossed mold 225 exposed by the etching.

The mechanical properties of the elastic membrane 240 are determined according to the mixing ratio of the PDMS stock solution and the curing agent. Generally, the mixing ratio is preferably set to 10: 1.

As shown in FIG. 2 (f), the substrate 210 and the embossed mold 225 are removed to form the platform housing 245 in which the opening pattern of the predetermined shape is formed.

3 is a block diagram of an apparatus for detecting a heavy metal using the electrochemical sensing unit 300 in the hazardous substance detection sensor chip 100 shown in FIG. 1, the counter electrode 310 and the working electrode ( 320, a reference electrode 330, a container 340, and a sample 350 are provided.

Referring to Figure 3 describes the electrochemical sensing unit 300 in the hazardous substance detection sensor chip 100 according to the present invention.

The counter electrode 310 measures the change in current caused by the movement of electrons when oxidation or reduction of the chemical species to be detected occurs. In general, the counter electrode 310 is chemically inert to the medium so that its potential does not change significantly during the measurement results. Materials, for example platinum, gold, stainless steel and carbon.

The working electrode 320 may be provided in plurality, one working electrode 320 may comprise a semiconductor surface having a redox active moiety that is sensitive to pH, such as anthracene, and the other working electrode 320 may be Redox active moieties that are insensitive to pH, such as ferrocene. The current measured at the plurality of potentials by the voltammetry is used to determine the heavy metal concentration, and the determined heavy metal concentration is used to control the process parameters.

The reference electrode 330 is a chemical that the counter electrode 310 generally completes a circuit to allow current to flow through the cell, while maintaining a constant interfacial potential difference regardless of the current while detecting the heavy metal with respect to the applied voltage. Determine the location of the oxidation or reduction of the species.

Reference electrodes 330 that may be used include known standard hydrogen electrodes (SHE), saturated maroon electrodes (SCE), copper-copper (II) sulfate electrodes and silver / silver chloride (Ag / AgCl) electrodes.

A probe for electrically supplying a plurality of potentials to the working electrode 320, the counter electrode 310, and the reference electrode 330, and a device for measuring the current through the working electrode 320 at the plurality of potentials; Can be connected.

Sample 350 may include, but is not limited to, a food product, such as salt, as a liquid sample, gel, suspension, melt, or semi-solid medium.

In one embodiment with the above components, the heavy metal is applied to the surface of the working electrode 320 by applying a voltage of less than 1.5V, and then scan the voltage from 1.1V to -100 mV, the type of heavy metal at a specific voltage value Determine the content of heavy metal with the measured current value.

4 is a cross-sectional view of the working electrode 320 in the electrochemical sensing unit 300 of the hazardous substance detection sensor chip 100 according to the present invention shown in FIG. 1, the glass carbon electrode 130, the polymer 140, The carbon paste 120 and the copper rod 110 are provided.

Referring to FIGS. 3 and 4, the working electrode 320 in the electrochemical sensing unit 300 of the hazardous substance detection sensor chip 100 according to the present invention will be described as follows.

The glass carbon electrode 130 is electrically connected to measure the potential difference of the sample 350 by using voltammetry.

The polymer 140 is a hollow fluorine resin material, which covers the outer circumferential surface of the glass carbon electrode 130 and contacts the standard sample, the electrolyte, the pure water, and the sample, so that the polymer 140 is flame retardant and has excellent heat resistance. It should show excellent resistance against erosion by the same chemicals, and excellent electrical insulation and high frequency characteristics.

The copper rod 110 is electrically connected to a power supply for supplying a plurality of potentials to function as a probe in a device for measuring current at the plurality of potentials.

The carbon paste 120 bonds and fixes the glass carbon electrode 130, the polymer 140, and the copper rod 110.

FIG. 5 is a perspective view of the spectroscopic analyzer 400 in the hazardous substance detection sensor chip 100 according to the present invention shown in FIG. 1. The energy source 410, the first collimator 420, the sample 430, Two collimators 440, a grating 460, and a photodetector 450.

The spectroscopic analysis unit 440 in the hazardous substance detection sensor chip 100 according to the present invention will be described with reference to FIG. 5.

When the energy source 410 irradiates the sample 430 through the first collimator 420, the light transmitted from the sample 430 is collimated by the second collimator 440 to focus on a parallel beam.

Light focused in parallel beams is transported through air or other suitable medium to a grating 460, which is a kind of interference device, and the photodetector 450 receives weighted light 54 from the grating 460 at each wavelength. Measure the intensity.

Energy source 410 includes a broadband light source that approximates sample 430, including a deuterium lamp, tungsten lamp, filament, LED, or other device that provides multi-wavelength light across the visible and approximate visible light spectrum. .

The first and second collimators 420 and 440 include lenses or mirrors, and the grating 460 includes multiple layers of material having different refractive indices.

The grating 460 can selectively pass certain portions of light at different wavelengths, and once the appropriate weighting at each wavelength is determined, the materials and spaces making up the grating 460 can be determined using various approximation methods. .

The sum of the intensities at each wavelength of light measured at the photo detector 450 may be derived by the processor, which may be a unique device such as a microprocessor and may be included in the photo detector 450.

The photo detector 450 may be, for example, a charge-coupled device (CCD) composed of germanium or silicon for measuring the intensity of incident light.

As described above, the hazardous substance detection sensor chip of the present invention electrochemically detects the presence of heavy metals and the concentration of heavy metals in the sample by using voltammetry, and simultaneously spectroscopically analyzes the light transmitted through the sample to detect the toxicity contained in the sample. By detecting a substance, even when detecting a heavy metal or an organic toxic substance, a conventional polarography apparatus is unnecessary, thereby reducing measurement cost and equipment maintenance cost, and repeatedly detecting a heavy metal detection function and spectroscopic analysis function of a toxic substance. It can be used for convenience and efficiency.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art can be variously modified and modified within the scope of the present invention without departing from the spirit and scope of the present invention described in the claims below. It will be understood that it can be changed.

100: hazardous substance detection sensor chip
245: platform housing
300: electrochemical sensing unit
310: counter electrode
320: working electrode
330: reference electrode
400: spectroscopic analysis unit

Claims

An electrochemical sensing unit which receives a variable voltage and detects heavy metals contained in a sample by using voltammetry;
A spectroscopic analysis unit which detects toxic substances contained in the sample by measuring the intensity at each wavelength of light transmitted by irradiating the sample with light;
A platform housing formed of a PDMS elastic membrane for mounting the electrochemical sensing unit and the spectroscopic analysis unit in an opening of a predetermined shape;
And,
The electrochemical sensing unit
And a working electrode measuring the potential difference of the sample by using the voltammetry to detect the presence and concentration of the heavy metal.
The working electrode
A glass carbon electrode electrically connected to measure a potential difference of the sample;
And a polymer contacting the sample while surrounding the outer circumferential surface of the glass carbon electrode.
The polymer
Fluorine resin that has a hollow shape and does not erode the sample.
Hazardous substance detection sensor chip, characterized in that.

The method of claim 1,
The electrochemical sensing unit
A counter electrode allowing current to flow through the cell by the supplied voltage;
A reference electrode for maintaining a constant interface potential difference regardless of the change in voltage;
Hazardous substance detection sensor chip further comprising.

The method of claim 2,
The counter electrode
A hazardous substance detection sensor chip comprising any one of platinum, gold, stainless steel and carbon.

The method of claim 2,
The reference electrode
A hazardous substance detection sensor chip comprising any one of a standard hydrogen electrode (SHE), a saturated magenta electrode (SCE), a copper-copper (II) sulfate electrode and a silver / silver chloride (Ag / AgCl) electrode.

The method of claim 2,
The working electrode
A copper rod connected to a power supply and receiving the variable voltage to probe the current to measure the current;
A carbon paste for bonding and fixing the glass carbon electrode, the polymer, and the copper rod;
Hazardous substance detection sensor chip further comprising.

delete

The method of claim 1,
The spectroscopic analysis unit
An energy source for supplying light with multiple wavelengths;
A first collimator receiving the light to irradiate the sample with light;
A second collimator for focusing light transmitted from the sample into a parallel beam;
A grating which receives the parallel beam and weights each wavelength of the multiple wavelengths;
A photo detector for receiving the weighted light and measuring intensity at each wavelength;
Hazardous substance detection sensor chip comprising a.

The method of claim 7, wherein
The energy source is
A hazardous substance detection sensor chip comprising any one of a lamp, a filament, an LED and a light spectrum.

The method of claim 7, wherein
The first and second collimators
Hazardous substance detection sensor chip, characterized in that the lens or mirror.

The method of claim 7, wherein
The photo detector is
A hazardous substance detection sensor chip containing germanium or silicon.

The method of claim 1,
The PDMS elastic membrane
The hazardous substance detection sensor chip, characterized in that the PDMS stock solution and the curing agent are produced by mixing in a mixing ratio of 10: 1.