KR101195002B1 - Vitrified bonder for micro blade, micro blade using the vitrified bonder and manufacturing method of the micro blade - Google Patents

Abstract

The present invention, in the bit-bonding material for bonding the abrasive particles to form a micro blade, 50 to 60 mol% SiO ₂ , 0.1 to 4 mol% Na ₂ O, 16 to 20 mol% B ₂ O ₃ , Li ₂ O 4 to 9 mol%, Al ₂ O ₃ 8 to 16 mol% and ZnO 2 to 8 mol%, an expansion softening point for the micro blade bitley binder material, a micro blade using the same and a method for manufacturing the same It is about. According to the present invention, it is also possible to use a material of high hardness, such as Si ₃ N ₄ , firing is possible at low temperatures by selecting a glass composition of high hardness and lowering the dilatometric softening point.

Description

Vitrified binder for micro blades, micro blades using the same and method for manufacturing the same {Vitrified bonder for micro blade, micro blade using the vitrified bonder and manufacturing method of the micro blade}

The present invention relates to a micro blade vitreous bonding material, a micro blade using the same, and a method for manufacturing the same, and more particularly, can be used in a high hardness material such as Si ₃ N _4, and select a high hardness glass composition and expand it. The present invention relates to a new microbladed vitrified bond, a microblade using the same, and a method of manufacturing the same, which can be fired even at low temperatures by lowering a softening point.

Most notable for high efficiency grinding machines is the ability to cope with cubic boron nitride (CBN) grinding. In general, the grinding efficiency of the CBN grindstone is 2 to 6 times higher than that of the conventional grindstone, and the grinding cycle is also increased by 10 times or more. The demand for CBN grindstones is increasing day by day since the dimensional tolerances of finished products are reduced to within 2 to 4 µm.

CBN grinding wheels used in these precision grinding machines can be classified according to the composition of the binder, and the grinding wheel (Vitrified) is a method of fixing abrasive grains using an amorphous ceramic bond (Vitrified Ceramic Bond). Bonded Wheels (hereinafter referred to as 'VBW') have begun to replace traditional grinding wheels in the field of metal precision machining, starting with precision products such as automotive engines. VBW has a high initial cost, but as mentioned above, it has become one of the super abrasive grinding tools that has been recognized for its excellence through its long life, excellent grinding performance and high productivity. VBW contains super abrasive grains such as diamond and CBN based on inorganic amorphous binders, some ceramic components and a large amount of pores. Reduces working time, improves productivity, and reduces the amount of truing due to the strength of the binder by simultaneously enabling the truing and dressing problems of the wheel (resin or metal). Truing alone allows longer life without burring. Due to these characteristics, high quality workpieces are obtained, which enables high precision and high efficiency grinding in automatic grinding and difficult material grinding.

If we list the main characteristics of VBW that are being mass produced, we can describe as follows.

It is excellent in heat resistance and abrasion resistance (shape holding ability) by using ceramic binder. In diamond / CBN tools, the binder serves to support the diamond / CBN grains to be polished. The amorphous binder has excellent abrasion resistance and thus has excellent ability to support abrasive grains.

It is brittle. Wheels using ceramic binders are brittle, so special care is required in fabrication and use, but when grinding, they may be easily dressing.

The coefficient of thermal expansion is low. Since the coefficient of thermal expansion of the ceramic binder is similar to that of diamond (DIA) / CBN, the abrasive particles are less likely to fall off due to the grinding heat generated during the grinding process.

Such VBW is composed of abrasive grains, SiO ₂ -Al ₂ O ₃ -B ₂ O ₃ -based ceramic binders (about 15%) and organic binders (phenolic resins), the porosity of the final product is 20 ~ 30 % Level. Although VBW has already been mass-produced by domestic companies, productivity is improved due to problems such as import dependence of ceramic binders, standardization of evaluation criteria for sinterability, changes in burnout and porosity of organic binders, and quantification of grinding characteristics. Increase in production) and quality stability and reliability.

The above problems can be largely summarized as 1) undeveloped low temperature sintering ceramic binder, 2) lack of optimizing the firing conditions, and 3) lack of quality evaluation technology for the final product. It can be an obstacle to localization of materials.

On the other hand, the core physical properties required for the ceramic binder is a low coefficient of thermal expansion of the CBN level, in terms of the stability of the particle size and the content of the organic binder. Currently, most of ceramic binders manufactured in Korea are 8 ~ 12x10 ^-6 / ℃, so the difference from the specification is very large. Therefore, it is necessary to develop a separate composition for CBN.

On the other hand, the optimization of the sintering conditions is an amorphous liquid sintered body, so the viscosity relationship of the material to the temperature conditions is the key, and the control of the initial surface sintering affects the porosity, density, microstructure and strength of the overall sintered body. When the initial surface sintering proceeds rapidly, the surface pores are closed due to the characteristics of liquid phase sintering, and trapping of the unburned organic binder therein occurs, and it becomes very difficult to control the amount and the microstructure of the pores. Changes in the microstructure will affect the quality and reliability of the product itself. Therefore, it is necessary to optimize the sintering conditions that suppress the initial surface sintering and promote burnout of the organic binder therein.

Recently, VBW, which has been used only as a grinding material for automobile parts, is expected to serve as a wheel bond for dicing. In particular, the demand for ultra-precision and highly reliable dicing technologies has been simultaneously demanded due to the high integration of semiconductors, the increase in the thickness of wafers, and the appearance of ceramic wafers including LEDs (Light Emitting Diodes). As the silicon wafer diameter was expanded from 8 inches (200 mm) to 12 (300 mm) and 15 inches (450 mm), the thickness also increased (8 ": 620 mu m, 12": 775 mu m, 15 ": 925 mu m). Resin Bonded Blades are currently used as a harder material than silicon, such as sapphire substrates such as LEDs and quartz wafers for mobile semiconductors, especially for power semiconductor SiC and optical communication LiNbO ₃ . Wafer-hardened materials require more than resin bonded blades Recently, Vitrified Bond Micro-Blade products for micro blades have emerged (2008, Disco VT-70 Series) This microblade requires mechanical stability with a thick plate of 200 µm thick Vitri material with physical contradictions beyond urea technology.

Therefore, the present invention proposes a new vitrified bond material that can be used even in a high hardness material such as Si ₃ N ₄ and that can be fired even at a low temperature.

The problem to be solved by the present invention can be used in high hardness materials such as Si ₃ N ₄ , the new micro blades that can be fired at low temperatures by selecting a high hardness glass composition and lowering the dilatometric softening point The present invention provides a vitrified bond, a micro blade using the same, and a method of manufacturing the same.

The present invention, in the bit-bonding material for bonding the abrasive particles to form a micro blade, 50 to 60 mol% SiO ₂ , 0.1 to 4 mol% Na ₂ O, 16 to 20 mol% B ₂ O ₃ , Li ₂ O It provides 4 to 9 mol%, Al ₂ O ₃ 8 to 16 mol% and ZnO 2 to 8 mol%, and provides a bite binder for micro blades having an expansion softening point of 550 ~ 620 ℃ range.

The bitley binder may further contain 0.5 to 6 mol% of K ₂ O.

The bitley binder may further contain 0.01 to 0.5 mol% MgO.

The bitley binder may further contain 0.01 to 0.3 mol% of CaO.

In addition, the present invention, in the Vitri binder material for bonding the abrasive particles to form a microblade, 55 to 65 mol% SiO ₂ , 8 to 12 mol% Na ₂ O, 10 to 14 mol% B ₂ O ₃ , Li ₂ O 5 ~ 9 _{mol%, Al 2 O 3 8 ~} 14 mol%, MgO 0.01 ~ 0.5 mol% and CaO 0.01 ~ includes 0.3 mol%, the expansion softening point of 550 ~ 620 ℃ range of non-tree binder for micro blade To provide.

The bitley binder may further contain 0.5 to 6 mol% of K ₂ O.

The bitley binder may further contain 2 to 8 mol% of ZnO.

The vitri binder may have a porosity of 15 to 25% range.

The bitwise binder may have a 3-point bending strength value in the range of 30 to 45 MPa.

In addition, the present invention, SiO ₂ 50 ~ 60 mol%, Na ₂ O 0.1 ~ 4 _{mol%, B 2 O 3 16 ~} 20 mol%, Li ₂ O 4 ~ 9 _{mol%, Al 2 O 3 8 ~} 16 mole The organic binder is combusted by mixing the bitley binder for the microblade including% and ZnO 2 to 8 mol%, the abrasive particles and the organic binder, forming the mixed product, and forming the mixed product. It provides a method for producing a micro blade comprising the step of firing at a temperature of 650 ~ 1000 ℃ while allowing the pores to be formed.

The micro blade bridging material may further contain 0.5 to 6 mol% of K ₂ O.

The micro blade vitreous binder may further contain 0.01 to 0.5 mol% MgO.

The micro blade bridging material may further contain 0.01 to 0.3 mol% CaO.

In addition, the present invention, SiO ₂ 55 ~ 65 mol%, Na ₂ O 8 ~ 12 _{mol%, B 2 O 3 10 ~} 14 mol%, Li ₂ O 5 ~ 9 _{mol%, Al 2 O 3 8 ~} 14 mole %, MgO 0.01-0.5 mol% and CaO 0.01-0.3 mol% of a bite binder for micro blades, the step of mixing the abrasive particles and the organic binder, the step of forming the mixed product and the molded product The organic binder is combusted to provide a method of manufacturing a micro blade comprising the step of firing at a temperature of 650 ~ 1000 ℃ while forming a plurality of pores.

The micro blade bridging material may further contain 0.5 to 6 mol% of K ₂ O.

The micro blade bridging material may further contain 2 to 8 mol% of ZnO.

In addition, the present invention provides a microblade in which abrasive particles are bonded by the bitley binder for the microblade, and a plurality of pores are formed therein.

The micro blade bridging material of the present invention can be used as a micro blade bridging material because it shows low porosity and low expansion softening point and high mechanical strength. As a result of the strength measurement, it is stronger than the diamond frit and has the same or superior characteristics as the frit for cBN.

In addition, the micro-blade fastening material for the microblade of the present invention has a low dilatometric softening point (T _dsp ), and thus may lower the firing condition temperature condition.

In addition, the high temperature surface tension is excellent, and there is almost no collapse of the molded shape even when fired at 900 ° C or higher. In the firing at 900 ° C. or higher, there is no change in the plastic shrinkage rate, and there is almost no decrease in the porosity in the cBN frit or the diamond frit.

1 is a graph showing mechanical properties for each type of glass.
Figure 2a is a graph showing the change in porosity with the firing time at 700 ℃.
Figure 2b is a graph showing the change in porosity with the firing time at 800 ℃.
Figure 3a is a graph showing the change in strength with a firing time at 700 ℃.
Figure 3b is a graph showing the change in strength with firing time at 800 ℃.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is limited to the embodiments described below. It doesn't happen.

Bitley binders for microblades can act as effective bitley bonds unless crystallization occurs easily. In the present invention, it was investigated with a focus on high-hardness glass in composition of Al ₂ O ₃ -SiO ₂ based glass of the composition.

In addition, it was considered that the melt can be manufactured at low temperature when selecting the composition of the bitley binder, which can be easily manufactured at low cost. If the melting at a high temperature of more than 1500 ℃ causes a rise in the price of the bitley binder. In consideration of this, R ₂ O-RO-B ₂ O ₃ -Al ₂ O ₃ -SiO ₂ -based glass was selected and studied.

1 is a graph showing the mechanical properties of each type of glass.

As shown in Figure 1, considering the mechanical properties of the glass type, alumino-silicate (Alumino-Silicate) glass shows the most hard glass. Some of the borate glasses also exhibit high hardness of 6 GPa.

Al ₂ O ₃ -SiO ₂ -based glass has a coefficient of thermal expansion of 50 × 10 ^-7 / ° C or less using the theoretical formulas related to the glass composition of Appen, and the hardness value is about 600 Hv higher than that predicted in the existing composition. The composition was designed using a self-made simulation program.

By using the Appen's factor, the theoretical hardness and coefficient of thermal expansion were simulated. The designed composition is shown in Table 1 below. The unit of each content shown in Table 1 below means mole%.

oxide SiO ₂ Na ₂ O B ₂ O ₃ Li ₂ O CaO Al ₂ O ₃ MgO ZnO SnO ₂ K ₂ O Sample 1 51.8 6.5 18.3 0.2 13.5 8.8 0.11 Sample 2 68.7 5 14.4 4.2 2.2 5.5 Sample 3 56 11 21 6 5 Sample 4 41 6 23 6 2.18 8 14.33 S ample 5 61 8 12 6 3.01 10 0.21 Sample 6 61 10 12 7 0.07 11 0.22 Sample 7 52 7 18 9 0.11 14 Sample 8 52 7 18 9 0.11 7.5 Sample 9 49 20 7 3 12 6 5 Sample 10 49 20 7 5 12 5 Sample 11 51 20 7 2 10 5 5 Sample 12 51 18 7 2 12 5 5 Sample 13 49 20 7 2 10 5 Sample 14 55 One 18 6 12 5 3 Sample 15 55 18 10 12 5 Sample 16 55 2 18 8 12 5 Sample 17 55 18 8 12 5 2

Samples 3 to 6 have a higher content of sodium oxide (Na ₂ O) than Samples 9 to 16 and differ in the addition of CaO and MgO. In addition, zinc oxide (ZnO) was not added from Sample 3 to Sample 6. Samples 7 and 8 are characterized by no addition of lithium oxide (Li ₂ O).

On the other hand, from the sample 9 to the sample 17 to which the addition of tin oxide (SnO ₂ ) is added in the sample 9 to the sample considering the Appen's factor, it is determined that the high temperature property or the mechanical properties will be adversely affected.

Table 2 summarizes the results obtained in the experiment. In Table 2, the bending strength is three-point bending strength data (800 ° C., 2 hours firing) measured when the porosity is 20 ± 3%.

characteristic T _g (° C) T _dsp
(℃) CTE
(x10 ^-7 / ℃) Hv
(kgf / cm ² ) Bending strength
(MPa) Shrinkage (%) Remarks 700 ℃ 800 ℃ Sample 1 621 666 66.69 627 27.87 94 80.81 Sample 2 566 631 55.54 608 42.84 82.55 84.23 Sample 3 516 571 82.78 530 Sample 4 566 628 71.5 473 - - - Sample 5 538 587 78.27 599 Sample 6 531 583 68.57 589 Sample 7 583 644 58.73 537 40.82 97.31 83.84 Sample 8 602 661 62.02 573 41.85 96.9 82.3 Sample 9 588 645 43.50 572 47.3 96.8 81.8 Part milk Sample 10 598 669 53.94 - - - - Milk white Sample 11 573 637 50.60 587 41.8 95.9 82.6 Milk white Sample 12 578 650 41.45 - - - - Milk white Sample 13 584 632 50.10 583 38.9 96.8 80.9 Sample 14 535 600 55.27 564 36.7 92.34 86.5 Sample 15 497 651 56.09 655 13.7 97.49 83.15 Part milk Sample 16 553 611 60.14 567 39.8 93.18 79.17 Sample 17 536 583 61.67 611 32.63 90.97 81.6

Table 2 shows the flexural strengths of Sample 7, Sample 8, Sample 11, Sample 13, Sample 14, Sample 16, and Sample 17, the coefficient of thermal expansion (CTE) of Samples 15-17, and the dilatometric softening point of Sample 16. The softening point (T _dsp ) is superior to that of sample 1, which is a composition of diamond frit, but inferior to that of sample 2, which is a composition of frit for cBN.

In addition, in Table 2, the bending strength of Sample 9, the glass transition temperature (T _g ), the expansion softening point (T _dsp ) and the coefficient of thermal expansion (CTE) of the sample, the glass transition temperature (T _g ) and the expansion softening point (T _dsp ) of the sample 17. ) Is superior to Sample 2, which is the composition of the frit for cBN.

In addition, the coefficients of thermal expansion (CTE) of samples 3 to 6, the expansion softening point (T _dsp ) of samples 4 and 7 to 13, and sample 15, and the bending strength of sample 15 exceed the allowable limits for individual characteristics or diamonds. These are inferior to Sample 1, which is the composition of the frit, or Sample 2, which is the composition of the frit for cBN.

The expansion softening point (T _dsp ) of samples 3, 4, 14, and 17 is 600 ° C. or lower, and the expansion softening point (T _dsp ) means that the softening is performed at low temperature. It is relatively superior to the sample 2 which is the composition of the phosphorus sample 1 or the frit for cBN.

Higher flexural strength is an alternative to the properties of bond material in wheel manufacturing. An alternative property of conventional bond materials was to measure by Rockwell hardness. There is no significant difference between Rockwell measurements. Therefore, in the present invention, the bond between the bond and the abrasive grain is expressed by the bending strength value.

Most of the compositions shown in Table 2 were not much superior to Sample 1, which is a composition of diamond frit, or Sample 2, which is a composition of frit for cBN. However, if the composition can lower the firing temperature even at 50 ° C. compared to the existing one, the sample 6, the sample 14, the sample 16, and the sample 17 may be considered as subjects for examination.

The selection of sintering conditions measures the porosity or shrinkage rate in general ceramics. In the present invention, it was evaluated based on the porosity. Since the main factor determining the porosity is the content of the actual organic binder, it is expected that the firing time of the glass powder will not be affected. However, due to trapping while the organic binder is debinding, trapping air bubbles between glass particles, changing the solubility of the gas phase in the glass, or foaming by changing the oxidation number due to internal polyatomic ions Since the phenomenon of re-foaming occurs at high temperatures, there is a tendency of re-foaming when the glass is fired for a long time. In the present invention, it is expected that there is a possibility of refoaming by the first or second cause among the above various reasons.

If re-foaming occurs, the strength of the fired samples will be lowered.

2A and 2B are graphs showing changes in porosity according to firing times of samples 1, 2, 14, 16, and 17. FIG. 2A and 2B, 'for Diamond' is for Sample 1, 'for cBN' is for Sample 2, 'Test 6' is for Sample 14, 'Test 8' is for Sample 16, 'Test 9' is for sample 17.

As shown in FIGS. 2A and 2B, re-foaming occurred at 6 hours in Sample 14, Sample 16, and Sample 17. FIG. In sample 1, which is a frit composition for diamond, and sample 2, which is a frit composition for cBN, no re-foaming occurred at 700 and 800 ° C. This reason is considered to be a phenomenon that occurs because the sample 14, 16 and 17 has a lower expansion softening point (T _dsp ).

This re-exposure is expected to be less if the debinding time is maintained more sufficiently, but considering the low organic softening point of sample 14, 16 and 17, considering the commonly used organic binder panol resin It seems that longer debinding time is needed than before.

It is believed that such a change in porosity will affect the mechanical strength of the bitley binder for microblades.

3A and 3B are graphs showing the change in strength with firing time. In FIGS. 3A and 3B 'Diamond' is for Sample 1, 'cBN' is for Sample 2, 'Test 6' is for Sample 14, 'Test 8' is for Sample 16, 'Test 9' is for sample 17.

3A and 3B, in the case of Sample 14, Sample 16, and Sample 17, the sintering at 700 ° C. for about 10 hours maintains the porosity at about 20% while the strength is shown to be the highest value. The firing at 800 ° C is similar but shows a slightly different appearance. Short firing shows a higher strength than the firing for a long time.

The highest composition and process conditions in this experiment were a short firing of sample 16 for 1 hour. However, when used as a diamond bitley binder, all of the compositions of the sample 14, the sample 16, and the sample 17 exhibited higher strength values and porosity values at any temperature than the diamond frit materials.

  Accordingly, it is determined that firing at any temperature of 700 to 800 ° C. for the Vitri binder having the composition of Sample 14, Sample 16, and Sample 17 is possible. In addition, since there is no sudden change in the plastic shrinkage at 900 ° C. or higher, there is no decrease in porosity or collapse of sample shape like the cBN frit and diamond frit. This feature means that it can be used as a high temperature bond (bond) material such as cBN. In conclusion, it is determined that the firing temperature can be arbitrarily selected from 700 to 900 ° C. for the vitri binder of the composition proposed in the present invention.

These results confirm that the Vitri binders of the Sample 14, Sample 16 and Sample 17 compositions showed higher strength values at any temperature than at the frit composition for diamond. This exemplifies that high strength can be achieved in spite of low temperature firing with an appropriate arrangement for the composition of the R ₂ O—RO—B ₂ O ₃ —Al ₂ O ₃ —SiO ₂ -based glass.

In the case of working time, it is determined that it is necessary to secure appropriate experimental value because it may be affected by the experimental conditions.

Vitreous binders with a composition based on R ₂ O-RO-B ₂ O ₃ -Al ₂ O ₃ -SiO ₂ system, which is a high hardness glass composition system, were prepared. The R ₂ O-RO-B ₂ O ₃ -Al ₂ O ₃ -SiO ₂ -based glass composition applied in this development is not only improved low temperature plasticity characteristics due to low softening point but also chemical resistance as low alkali aluminosilicate glass. Characteristics improvement is expected.

On the basis of the above-described experiments present a bite binder for micro blades according to a preferred embodiment of the present invention.

≪ Example 1 >

Example 1 is a bite binder for microblades based on Sample 14, Sample 16 and Sample 17 discussed above.

Bitley binder for micro blades according to Example 1 is a bitley binder for bonding microparticles to form a micro blade, 50 to 60 mol% SiO ₂ , 0.1 to 4 mol% Na ₂ O, B ₂ O ₃ 16 ˜20 mol%, Li ₂ O 4-9 mol%, Al ₂ O ₃ 8-16 mol% and ZnO 2-8 mol%, the expansion softening point is in the range of 550 ~ 620 ℃.

The bitley binder may further contain 0.5 to 6 mol% of K ₂ O.

In addition, the vitri binder may further contain 0.01 to 0.5 mol% MgO.

In addition, the vitri binder may further contain 0.01 to 0.3 mol% CaO.

<Example 2>

Example 2 is a bite binder for microblades based on sample 6 discussed above.

Bitley binder for micro blades according to Example 2 is a bitley binder for bonding microparticles to form a micro blade, 55 to 65 mol% SiO ₂ , 8 to 12 mol% Na ₂ O, B ₂ O ₃ 10 ~ 14 mol%, Li ₂ O 5-9 mol%, Al ₂ O ₃ 8-14 mol%, MgO 0.01-0.5 mol% and CaO 0.01-0.3 mol%, the expansion softening point is in the range of 550 ~ 620 ℃ .

The bitley binder may further contain 0.5 to 6 mol% of K ₂ O.

In addition, the vitri binder may further contain 2 to 8 mol% ZnO.

Vitreous bonding material for a microblade according to a preferred embodiment of the present invention has a porosity of 15 to 25% range, three-point bending strength value of 30 to 45MPa range.

The microblade bite binder according to the preferred embodiment of the present invention can be used as the bite binder for the microblade because it shows low porosity and low expansion softening point and high mechanical strength. As a result of the strength measurement, it is stronger than the diamond frit and has the same or superior characteristics as the frit for cBN.

In addition, the micro blade vitreous binder according to the preferred embodiment of the present invention has a low dilatometric softening point (T _dsp )) and thus may lower the firing condition temperature condition.

In addition, the high temperature surface tension is excellent, and there is almost no collapse of the molded shape even when fired at 900 ° C or higher.

Hereinafter, a method for manufacturing a microblade using a bitley binder for microblades according to a preferred embodiment of the present invention will be described.

<Example 3>

Example 3 uses a bite binder for microblades based on Sample 14, Sample 16 and Sample 17 discussed above.

SiO ₂ 50 ~ 60 mol%, Na ₂ O 0.1 ~ 4 _{mol%, B 2 O 3 16 ~} 20 mol%, Li ₂ O 4 ~ 9 _{mol%, Al 2 O 3 8 ~} 16 mole% and ZnO 2 ~ 8 Mixing the bitley binder for micro blades containing the mol%, the abrasive particles and the organic binder in a certain ratio (for example, the mixing ratio of the abrasive particles: bitley binder for the microblade: organic binder in a volume ratio of 50:20:30) do. The micro blade bridging material may further contain 0.5 to 6 mol% of K ₂ O. In addition, the micro-blade fasteners may further contain 0.01 to 0.5 mol% MgO. In addition, the micro blade bridging material may further contain 0.01 to 0.3 mol% CaO.

The abrasive particles may be abrasive particles made of a material such as cBN, diamond, alumina, and the like, and the particle size of the abrasive particles is determined in consideration of the size and arithmetic precision of the workpiece, for example, an average of about 1 nm to 30 μm. It may have a particle diameter. The organic binder may include carbohydrates such as sugar starch, acetyl cellulose, carboxymethyl cellulose, carbohydrate derivatives such as hydroxyethyl cellulose, phenol resin, polyamide, polyvinyl acetate, vinyl chloride resin, vinylidene chloride resin, and polyacrylonitrile. Thermoplastic resins, such as resin, etc. can be used.

The resulting mixture is shaped into the desired shape.

The organic binder is combusted with respect to the resultant molded product and fired at a temperature of 650 to 1000 ° C. while forming a plurality of pores.

<Example 4>

Example 4 uses a bite binder for microblades based on Sample 6 discussed above.

SiO ₂ 55 ~ 65 mol%, Na ₂ O 8 ~ 12 _{mol%, B 2 O 3 10 ~} 14 mol%, Li ₂ O 5 ~ 9 _{mol%, Al 2 O 3 8 ~} 14 mol%, MgO 0.01 ~ 0.5 The mixing ratio of the bitley binder for microblades including mol% and CaO 0.01 to 0.3 mol%, the abrasive particles and the organic binder in a certain ratio (for example, the abrasive particles: the bitley binder for the microblade: organic binder) is 50% by volume. : 20: 30). The micro blade bridging material may further contain 0.5 to 6 mol% of K ₂ O. In addition, the micro-blade fastener may further contain 2 to 8 mol% of ZnO.

The abrasive particles may be abrasive particles made of a material such as cBN, diamond, alumina, and the like, and the particle size of the abrasive particles is determined in consideration of the size and arithmetic precision of the workpiece, for example, an average of about 1 nm to 30 μm. It may have a particle diameter. The organic binder may include carbohydrates such as sugar starch, acetyl cellulose, carboxymethyl cellulose, carbohydrate derivatives such as hydroxyethyl cellulose, phenol resin, polyamide, polyvinyl acetate, vinyl chloride resin, vinylidene chloride resin, and polyacrylonitrile. Thermoplastic resins, such as resin, etc. can be used.

The resulting mixture is shaped into the desired shape.

The organic binder is combusted with respect to the resultant molded product and fired at a temperature of 650 to 1000 ° C. while forming a plurality of pores.

In the micro blade manufactured as described above, the abrasive particles are bonded by the bite binder for the micro blade, and a plurality of pores are formed therein.

As mentioned above, although the preferable experimental example of this invention was described in detail, this invention is not limited to the said Example, A various deformation | transformation by a person with ordinary skill in the art within the scope of the technical idea of this invention. This is possible.

Claims (17)

In the bitwise binder material to combine the abrasive particles to form a micro blade,
SiO ₂ 50 ~ 60 mol%, Na ₂ O 0.1 ~ 4 _{mol%, B 2 O 3 16 ~} 20 mol%, Li ₂ O 4 ~ 9 _{mol%, Al 2 O 3 8 ~} 16 mole% and ZnO 2 ~ 8 Bitley binder material for a microblade comprising a mol%, the expansion softening point is in the range of 550 ~ 620 ℃.
2. The beetle binder for microblades according to claim 1, wherein the beetle binder further contains 0.5 to 6 mol% of K ₂ O.
2. The bitley binder material for microblades according to claim 1, wherein the bitley binder material further contains 0.01 to 0.5 mol% MgO.
2. The beetle binder for microblades according to claim 1, wherein the beetle binder further contains 0.01 to 0.3 mol% of CaO.
In the bitwise binder material to combine the abrasive particles to form a micro blade,
SiO ₂ 55 ~ 65 mol%, Na ₂ O 8 ~ 12 _{mol%, B 2 O 3 10 ~} 14 mol%, Li ₂ O 5 ~ 9 _{mol%, Al 2 O 3 8 ~} 14 mol%, MgO 0.01 ~ 0.5 A molar% and CaO 0.01 to 0.3 mole%, and the expansion softening point is a micro blade vitreous binder, characterized in that the range of 550 ~ 620 ℃.
2. The beetle binder for microblades according to claim 1, wherein the beetle binder further contains 0.5 to 6 mol% of K ₂ O.
The bite binder for microblades according to claim 1, wherein the bitley binder further contains 2 to 8 mol% of ZnO.
6. The method according to claim 1 or 5,
The vitri binder material is a micro blade vitri binder material, characterized in that the porosity is 15 ~ 25%.
6. The method according to claim 1 or 5,
The bite binder material is a bite binder material for a micro blade, characterized in that the three-point bending strength value is in the range of 30 ~ 45MPa.
SiO ₂ 50 ~ 60 mol%, Na ₂ O 0.1 ~ 4 _{mol%, B 2 O 3 16 ~} 20 mol%, Li ₂ O 4 ~ 9 _{mol%, Al 2 O 3 8 ~} 16 mole% and ZnO 2 ~ 8 Mixing the bitwise binder for microblades according to claim 1, comprising the mol%, the abrasive particles and the organic binder;
Shaping the mixed result; And
The method of manufacturing a micro blade comprising the step of firing at a temperature of 650 ~ 1000 ℃ while the organic binder is combusted to form a plurality of pores with respect to the molded product.
The method for manufacturing a microblade according to claim 10, wherein the bitley binder for the microblade further contains 0.5 to 6 mol% of K ₂ O.
The method for manufacturing a microblade according to claim 10, wherein the bitley binder for microblade further contains 0.01 to 0.5 mol% of MgO.
The method of manufacturing a microblade according to claim 10, wherein the bitley binder for the microblade further contains 0.01 to 0.3 mol% of CaO.
SiO ₂ 55 ~ 65 mol%, Na ₂ O 8 ~ 12 _{mol%, B 2 O 3 10 ~} 14 mol%, Li ₂ O 5 ~ 9 _{mol%, Al 2 O 3 8 ~} 14 mol%, MgO 0.01 ~ 0.5 Mixing the bite binder for microblade according to claim 5, comprising the mole% and the 0.01 to 0.3 mole% CaO, the abrasive particles and the organic binder;
Shaping the mixed result; And
The method of manufacturing a micro blade comprising the step of firing at a temperature of 650 ~ 1000 ℃ while the organic binder is combusted to form a plurality of pores with respect to the molded product.
The method for manufacturing a microblade according to claim 14, wherein the bitley binder for microblade further contains 0.5 to 6 mol% of K ₂ O.
The method of manufacturing a microblade according to claim 14, wherein the bitley binder for the microblade further contains 2 to 8 mol% of ZnO.
A microblade, wherein the abrasive grains are bonded by the bite binder for microblade according to claim 1 or 5, and a plurality of pores are formed therein.

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