KR101178529B1 - Method for pulsed plasma treatment of metals - Google Patents
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- KR101178529B1 KR101178529B1 KR20100119042A KR20100119042A KR101178529B1 KR 101178529 B1 KR101178529 B1 KR 101178529B1 KR 20100119042 A KR20100119042 A KR 20100119042A KR 20100119042 A KR20100119042 A KR 20100119042A KR 101178529 B1 KR101178529 B1 KR 101178529B1
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Abstract
Disclosed is a method of pulsed plasma surface treatment of metals. The pulsed plasma surface treatment method of a metal according to the present invention includes a thermochemical process and a pulse plasma surface treatment method of a metal including a pulse plasma process, wherein the thermochemical process and the pulse plasma process are integrated in one cycle so that the plasma jet and The heterogeneous magnetic field is formed by releasing current pulses from a product in which the fuel gas mixture is exploded and burned at the gap between the plasmatron electrode, the eroding electrode and the tapered surface of the plasmatron nozzle and the impact compression plasma layer of the component surface. .
Description
The present invention relates to a metal surface treatment method, and more particularly to a metal surface treatment method using a pulsed plasma.
According to the prior art, as a method of hardening a metal surface, a method of hardening a metal cutting tool has been disclosed, which is related to metallurgy, in particular, to strengthen the surface of a metal working tool to prolong the life of the tool, increase the substrate adhesive coating, and Can improve the quality.
The metal cutting tool reinforcement method can significantly improve the performance of the tool by using a reinforcement method consisting of surface treatment of the anode corona discharge region, deposition of a refractory metal nitride coating, and pulse magnetic field treatment.
However, the disadvantage of the tool reinforcement method is that since the pre-coating process in a vacuum state, the productivity is reduced and heat must be used to maintain a good coating state, which negatively affects the strength of the metal parts.
It is also well known that the nitride layer does not provide sufficient thermal resistance to the working surface of the hot press die.
The metal substrate surface treatment method is to pulse the surface of the substrate with a high temperature plasma jet port so that the surface layer can be rapidly heated without applying heat to the volume under the substrate.
In addition, rapid freezing can inhibit the formation of nuclei and crystals, eliminating phase segregation and urea separation in the substrate.
The technique allows for the modification of the surface of metal parts, but the low density of plasma jets has a negative impact on the quality and productivity of the treatment.
The present invention was devised to solve the above problems, and an object thereof is to provide a pulsed plasma surface treatment method of a metal.
Pulse plasma surface treatment method of a metal according to a preferred embodiment of the present invention for achieving the above object in the pulse plasma surface treatment method of a metal component comprising a thermochemical process and a pulse plasma process, the thermochemical process and the pulse plasma process It is integrated into one cycle and carried out in combination with the plasma jet in a heterogeneous magnetic field, which is exploded and burned by the fuel gas mixture in the gap between the tapered surface of the plasma electrode, the eroding electrode and the plasmatron nozzle and the impact compression plasma layer of the component surface. By emitting a current pulse from the finished product.
The pulsed plasma surface treatment method of the metal component is characterized in that a longitudinal magnetic field is formed in the interelectrode gap, and the magnetic field interacts with the natural magnetic field of the discharge current flowing out of the combusted product.
And operate with the polarity of the current flowing straight between the eroding electrode tip in the plasmatron and the impact compression plasma layer on the surface of the component.
It is also characterized by operating with a reversed polarity of current between the eroding electrode tip in the plasmatron and the impact compression plasma layer on the component surface.
It is also characterized in that it operates by intersecting the polarity of the current between the eroding electrode tip in the plasmatron and the impact compression plasma layer on the component surface.
The direction of current between the eroding electrode tip in the plasmatron and the impact compression plasma layer on the component surface changes as the capacitance changes in the capacitor bank in the 600mF to 1,200mF region.
By applying the present invention as described above, it is possible to prevent a drop in the toughness of the whole part while increasing the hardness and strength of the metal surface.
In addition, the surface coating deposition method of the metal part of the present invention has the advantage of preliminary conditions for automating the surface treatment process, the surface preparation is reduced.
The high energy plasma jet according to the present invention can reduce the labor cost of depositing the coating by purifying and heating the surface, increasing productivity and improving the quality of the coating.
The method of the present invention makes it possible to locally reinforce only the working surface of the part, omit the part preheating and pretreatment, the deformation is small and there is no size constraint of the treated part.
1 is a schematic configuration diagram of a pulsed plasma surface treatment apparatus for implementing a method of pulse surface treatment of a metal according to the present invention.
Figure 2 is a cross-sectional photograph of the metal reinforced by the pulsed surface treatment method according to the present invention.
Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, it is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. It is intended that the disclosure of the present invention be limited only by the terms of the appended claims. Like reference numerals refer to like elements throughout the specification.
Hereinafter, a pulse plasma surface treatment method of a metal according to a preferred embodiment of the present invention will be described with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail to avoid unnecessarily obscuring the subject matter of the present invention.
1 is a view showing the configuration of an apparatus for implementing a method of pulsed plasma surface treatment of a metal according to the present invention.
Pulse plasma surface treatment method of a metal according to an embodiment of the present invention is a pulse plasma surface treatment method of a metal comprising a thermochemical process and a pulsed plasma process, the thermochemical process and the pulse plasma process is integrated in one cycle to be heterogeneous The heterogeneous magnetic field is coupled to a plasma jet in a magnetic field, and the heterogeneous magnetic field is generated by a current pulse from a product in which the fuel gas mixture has exploded and burned in the gap between the tapered surface of the plasma electrode, the eroding electrode and the plasmatron nozzle, and the impact compression plasma layer on the component surface. By release.
The pulsed plasma surface treatment method of the metal of the present invention is characterized in that a longitudinal magnetic field is formed in the interelectrode gap, and the magnetic field interacts with a natural magnetic field of discharge current flowing out of the combusted product.
More specifically, the inter-electrode spacing means the spacing between the erosion electrode and the reaction chamber. The negative electrode is applied to the erosion electrode and the positive electrode is applied to the reaction chamber. Since the interelectrode spacing is empty, the space between the erosion electrodes disposed in the center of the chamber and the chamber surface is the interelectrode spacing as seen on the equipment cross section.
The direction of current between the eroding electrode tip in the plasmatron and the impact extruded plasma layer on the component surface changes as the capacitance changes in the capacitor bank in the 600mF to 1200mF region.
Pulsed plasma energy generated in the pulsed plasma surface treatment process increases in proportion to the capacitor capacity.
In more detail, when the capacitor capacity is less than 600 mF, it is not preferable because sufficient energy is not generated and it is difficult to expect a surface modification effect such as an increase in hardness during surface treatment of the steel-based material.
On the other hand, exceeding 1,200mF of capacitor capacity is not preferable because excessive increase of energy generated may cause equipment damage and endurance life problem.
Therefore, the range of 600mF to 1,200mF can be said to be the optimum range that can prevent damage to the equipment while obtaining the surface modification effect of various materials such as steel.
In the pulsed plasma surface treatment method for metals according to the present invention, thermal chemical and pulsed plasma treatments are combined in one cycle and carried out on a plasma jet containing an essential alloy element.
Thermal chemical treatment refers to a process in which a fuel gas mixture generated in a small explosion gun is heated and accelerated as it is injected into a reaction chamber and finally affects the surface modification of a metal part.
For example, if the composition of the fuel gas mixture is adjusted to include excessive amounts of carbon and nitrogen, the fuel gas mixture accelerated and heated through the reaction chamber is sprayed onto the surface of the metal component to form a nitride layer and a carbonized layer on the surface of the metal component. Formed thereby resulting in the modification of the metal parts.
On the other hand, the pulsed plasma treatment refers to a process of rapidly heating the surface of the component by high temperature plasma and a pulse magnetic field and modifying the surface of the metallic component.
In addition, combining in one cycle means that the thermal chemical treatment and the pulsed plasma treatment occur simultaneously in combination through periodic explosions in a small explosion gun.
The plasma focuses on the heterogeneous electric field generated by the current pulses.
In synchronizing the currents to induce a heterogeneous magnetic field, the currents are converted by the by-products that have been exploded into the fuel gas mixture.
The current flows between the gap between the plasmatron electrodes and between the eroded electrode and the tapered surface of the plasmatron nozzle, and in the final step, the current flows from the eroded electrode to the metal part.
This is necessary to increase the energy density and processing efficiency of the plasma jet.
Moving the tip of the eroding electrode allows the vector direction of the coupled magnetic field to be diverted relative to the taper surface of the plasmatron nozzle, which directly affects the focus position of the plasma jet and the energy density of the surface. Synchronization of the plasma focus in the heterogeneous magnetic field and interaction with the modified surface is caused by the flow of current from the product made due to the explosion combustion of the fuel gas mixture.
The method of the present invention is described in more detail as follows. Current flows between the tapered surface of the plasmatron nozzle and the tip of the erosion electrode and between the tip of the erosion electrode and the component surface layer. The current flows through the product made by the explosive combustion of the fuel gas mixture.
These technical features allow for fixing the size of the affected area of the plasma jet on the surface of the metal part. The focus of the plasma jet at the exit of the plasmatron increases the temperature considerably and causes elements in the plasma to ionize.
Plasma jet focus in heterogeneous magnetic fields is efficient and does not require additional energy consumption. Heterogeneous magnetic fields are formed only when the plasma jet leaves the plasmatron, which enables the integration of the magnetic field without the consumption and heating of the plasmatron structural elements.
The pulsed current electricity generated by the combustion materials creates a heterogeneous magnetic field when passing through the plasma jet.
In addition, in the pulsed plasma surface treatment method of the metal of the present invention, the current flowing in the plasma may flow straight, inverted, or crosswise.
As a result, heat and mass conversion processes can be performed on the component surface layer, and the polarity of the impact compression layer can also be changed to change the speed of ions passing through the layer. The direction of current flow between the plasmatron eroded electrode tip in the plasma jet and the impact compression plasma of the component surface is provided by the capacitance switching of the capacitor bank.
Further, in the present invention, the shape of the surface is modified by plasma deceleration in the impact compression plasma layer. Pulsed currents with densities ranging from 2,000 A / cm 2 to 6,000 A / cm 2 flow through the bombardment plasma layer, with significant energy leakage. In the end, this effectively affects the part surface through minimal energy consumption.
According to the present invention, metal elements and carbon form elements produced from finely dispersed powders saturate the metal surface by flowing into a high energy plasma jet or by heating a compact electrode tip under the influence of a pulsed current. .
Nitrogen and carbon are added to the plasma jet in the form of hydrocarbons and nitrogen containing gases. In order to add metal, a compact erosion electrode synthesized with a composite component can be used.
The metal pulse plasma surface treatment method of the present invention is characterized by flowing a current to the component surface layer. This technical feature is influenced by the pulsed magnetic field along with the plastic deformation of the surface layer material of the part.
Increasing the energy density of the plasma jet improves the strength of the component surface and activates the alloying process. As a result, the temperature of the gradient increases when the part surface layer is heated, the magnetic field is strong, and the plastic deformation value is high.
The simultaneous generation of various types of pulses significantly accelerates the mass conversion process. In addition, as the energy density of the plasma jet increases, the temperature gradient and cooling rate of the surface layer metal increase, which causes the layer to complexly deform to form a nanocrystalline structure.
Cooling gases, mostly nitrogen, can be injected onto the work surface, which is used to increase the temperature of the gradient. After each pulse treatment, gas can be sprayed onto the part surface, which determines the thermal cycle of the surface layer to enhance the heating and cooling conversion of the alloying elements.
Plasma jet treatment and periodic current flow through the surface of components can induce a variety of new effects. This includes the conversion of the surface layer to the new nanocrystalline structure, as well as the saturation of the surface layer containing the elements of the material synthesized by conventional plasma pulses and the conversion of the plasma chemical composite to the component surface.
Synchronization of the plasma focusing process and the addition of alloying elements increases the efficiency of plasma chemical synthesis, saturation and strengthening of the component surface layer.
According to the pulsed plasma surface treatment of the metal of the present invention, a process may be performed in which current flows between the eroding electrode tip in the plasma tron and the component surface layer in an upright, inverted or alternating manner.
The polarity of the current can be changed as the inductive capacitance loop parameter of the plasmatron power circuit changes.
The capacitance of the capacitor bank has a significant effect on the discharge characteristics of the inter-electrode reaction chamber, provided that the voltage and induction coefficient of the plasmatron power circuit are constant.
Electrons and anode ions in the arc plasma participate in the current conversion process. The anode charge ions pass through the cathode voltage region under the influence of a strong electric field of approximately 10 6 V / cm. Recombination of electrons results in the formation of atoms that continue to move to the cathode at the rate of ions (approximately 10 5 cm / c). The amount of electrically stimulated atoms increases with increasing current, partial pressure, time the current flows and possible cathode charges.
Therefore, in the pulsed plasma treatment, the thermal strengthening process is preferably performed when the capacitances are 400 mF, 1000 mF, and 1200 mF, and the alloying process is performed at 600 mF and 800 mF.
As a result of the high energy impact process, the surface layer is rapidly heated (
The surface metal layer high percentage (10 4 ~ 10 7 K / s) is heated to and cooled able to be a nano-dispersion structure formed in the layer, the higher the concentration of the alloying elements.
In order to practice the present invention, the surface of the part is alloyed in a solid state in combination with heat influence, or the precoated portion is melted. Saturation is carried out with alloying elements of the plasma, namely nitrogen, carbon and metal. The efficiency of the pulse bombardment by the plasma on the part surface depends on the energy density and the electrode of the current flowing from the electrode to the part.
Hereinafter, a method for treating a pulsed plasma surface of a metal according to the present invention will be described in detail with reference to Examples. However, the following examples are merely to illustrate the invention, but the content of the present invention is not limited by the following examples.
≪ Example 1 >
The apparatus shown in FIG. 1 was configured to implement a pulsed plasma surface treatment method of metal.
According to FIG. 1, the
The
The components of the fuel gas mixture flow into the explosion chamber of the
The combusted product flows between the
As a result, a current conducting layer of the combustion product is formed in the reaction chamber. The gas layer is accelerated under the impact of gas dynamics and magnetic forces. The
The current pulse flow between the
The process of passing current and forming a heterogeneous magnetic field takes place at the same time and takes 0.1ms ~ 1ms. The dispersing force is sufficient for the plasma flow to be complex compressed and contracted with a jet of 8 mm to 12 mm in diameter.
The plasma flow in the coaxial channel, ie the plasmatron reaction chamber, is created by the interaction between the discharge current and the natural orientation magnetic field. Longitudinal fields created by external conductors, such as reaction chamber walls, have a strong effect on flow.
The plasma acceleration process depends on the ratio of the characteristic values of the components of the longitudinal and azimuth angles of the electrode gaps in the reaction chamber. The plasma jet flow of the longitudinal heterogeneous magnetic field is qualitatively different compared to the non-longitudinal field.
The characteristics of the plasma jet at the plasmatron outlet depend on the strength of the electric field and the length of the reaction chamber. When the chamber length L is 300 mm and the electric field strength is 400-500 kV / m, the temperature of the plasma jet is 20,000 K and the speed reaches 8 km / sec.
The component surface is initially pulsed plasma treated as the elastic deformation interacts between the shock wave and the pulsed plasma jet, and the surface is vulnerable to the impact caused by the current. The amplitude value of the current reached 8 kA. This forms a pulsed magnetic field whose intensity reaches H = 4 × 10 5 A / m. In addition, combusted and eroded electrode products containing alloying elements flow to the surface for 3-5 ms.
As a result, the surface layer turns into a nanocrystalline alloy layer. The elemental components of this layer depend on the alloying element content in the plasma and the amount of treatment pulses. The hardened surface becomes thicker and larger in diameter after multi-pulse plasma (> 5 pulses) treatment.
Alloying elements interact with the active constituents of the plasma and condense on the part surface. The quality of the coating is enhanced by the synthesis and deposition of chemical components on the surface cleaned and heated by the plasma. By moving the elements involved in the synthesis and placing them on the surface, deposition efficiency of 5-10 μm per pulse can be achieved.
The polarity of the current from the anode electrode to the component surface is due to the change in capacitance of the capacitor bank in the power supply. The currents, depending on their polarity, have activated the process of synthesizing the chemical composition, heating or heating of the component surface and mass conversion.
<Example 2>
As a material used for carrying out the method of pulsed plasma surface treatment of metals according to the present invention on metal parts, carbon steel known as hot tool steel was used.
The alloying components of the carbon steel used were 0.27 wt% carbon (C), 0.4 wt% silicon (Si), 0.5 wt% manganese (Mn), 3.5 wt% chromium (Cr), 0.4 wt% vanadium (V), and molybdenum (Mo). ) 2.5 wt%, and nickel (Ni) 0.35 wt%.
Plasma treatment parameters were chosen to the extent that the pulsed plasma ensures sufficient energy density to heat and melt the surface. Through these parameters, the surface of the part was alloyed with the elements that make up the plasma jet.
Alloying elements were added using tungsten carbide and cobalt electrodes and excess carbon-comprising plasma gas. Treatment was performed when five plasma pulses were affecting the hardened surface.
When the outlet section of the tapered surface of FIG. 1 was A = 18 mm, the diameter of the treatment point reached 15 mm through focusing and the pulse frequency was 2 Hz.
As a result of the influence of the pulsed plastic jet, a 40 mm-50 mm thick reinforced alloy layer was formed as shown in the cross-sectional texture image shown in FIG. 2, and the surface was alloyed with tungsten and carbon.
The fine hardness of the reinforcing alloy layer reached 996 HV in Vickers hardness, and the content of tungsten (W) as a reinforcing element was 38% (weight ratio).
Even under the white compound layer, hardness increased by about 500 HV in Vickers hardness due to the strengthening by diffusion of the tungsten (W) element. On the other hand, the hardness of the internal base material was only 170 HV.
As a result of the experiment, tools treated using the present invention did not cause brittle fracture. When the component was treated with a pulsed plasma, the contents of the alloying elements on the surface of the component increased and the life of the tool surface due to thermal fatigue was extended, while brittle fracture did not occur when an alloy with high impact toughness was used.
In addition, the abrasion resistance of the parts increased by 3 to 5 times when operated for industrial use after the pulse plasma treatment.
While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, You will understand.
It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present invention. .
10
20: insulator 30: barrel
40: explosion gun 50: reaction chamber
53 side of
60: surface of the metal parts 70: focus plasma jet
75: shock compression plasma 80: capacitor
90: heterogeneous magnetic field
Claims (6)
The thermochemical process and the pulsed plasma process are performed in one cycle and combined with the plasma jet in a heterogeneous magnetic field,
The heterogeneous magnetic field is a pulsed plasma surface of a metal formed by the discharge of a current pulse from a product in which a fuel gas mixture is exploded and burned in the gap between the plasmatron electrode, the erosion electrode, the tapered surface of the plasmatron nozzle and the impact compression plasma layer of the component surface. Treatment method.
A longitudinal magnetic field is formed in the interelectrode gap, the magnetic field interacting with a natural magnetic field of discharge current flowing out of the combusted product.
And operating the polarity of the current between the eroding electrode tip in the plasma tron and the impact-compressed plasma layer on the surface of the component in a straight line.
And inverting the polarity of the current between the eroding electrode tip in the plasma tron and the impact compression plasma layer on the surface of the component.
And intersecting the polarity of the current between the eroding electrode tip in the plasma tron and the impact compression plasma layer on the surface of the component.
And the direction of current between the eroding electrode tip in the plasma tron and the impact extruded plasma layer on the surface of the component changes as the capacitance changes in a capacitor bank in the region of 600 mF to 1200 mF.
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| KR20100119042A KR101178529B1 (en) | 2010-11-26 | 2010-11-26 | Method for pulsed plasma treatment of metals |
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| KR20100119042A KR101178529B1 (en) | 2010-11-26 | 2010-11-26 | Method for pulsed plasma treatment of metals |
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| KR101178529B1 true KR101178529B1 (en) | 2012-08-30 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119664A (en) | 1984-11-16 | 1986-06-06 | Mitsubishi Heavy Ind Ltd | Plasma spraying method |
| JP2004221019A (en) | 2003-01-17 | 2004-08-05 | Ebara Corp | Method and device for igniting microwave plasma under atmospheric pressure |
| JP2008231471A (en) | 2007-03-19 | 2008-10-02 | Toyohashi Univ Of Technology | Film-forming method using progressive plasma, plasma-baked substrate, and apparatus for forming film with plasma |
| JP2009235469A (en) | 2008-03-26 | 2009-10-15 | Tokyo Electron Ltd | Plasma process apparatus, plasma process method, and object processed by the plasma process method |
-
2010
- 2010-11-26 KR KR20100119042A patent/KR101178529B1/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119664A (en) | 1984-11-16 | 1986-06-06 | Mitsubishi Heavy Ind Ltd | Plasma spraying method |
| JP2004221019A (en) | 2003-01-17 | 2004-08-05 | Ebara Corp | Method and device for igniting microwave plasma under atmospheric pressure |
| JP2008231471A (en) | 2007-03-19 | 2008-10-02 | Toyohashi Univ Of Technology | Film-forming method using progressive plasma, plasma-baked substrate, and apparatus for forming film with plasma |
| JP2009235469A (en) | 2008-03-26 | 2009-10-15 | Tokyo Electron Ltd | Plasma process apparatus, plasma process method, and object processed by the plasma process method |
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