KR101172827B1 - Tablet and Maximum stream flow Provision equipment using Mass Store-tank of Chemical solution or Liquid gas - Google Patents

Abstract

The present invention relates to a refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank, and more particularly, to control the pressure and temperature of the large-capacity chemical or liquid gas according to the heat medium in the storage tank with a controller within an error range. Thus, a supply system capable of purifying ultra-high purity chemical or liquid gas and supplying ultra-high purity gas, comprising a first storage tank and a second storage tank interconnected, and a large-capacity chemical or liquid gas twice. It is characterized by consisting of a large flow rate supply system that removes impurities throughout the process and obtains a high-purity large-capacity chemical or liquid gas through two refining processes, and enables large flow rate supply by increasing the pressure through its heat medium. .

Chemical solution, liquid gas, storage tank, water tank, recovery tank, air cooling, large capacity, large flow rate, supply system, purification

Description

Tablet and Maximum stream flow Provision equipment using Mass Store-tank of Chemical solution or Liquid gas}

The present invention relates to a refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank, and more particularly, to control the pressure and temperature of the large-capacity chemical or liquid gas according to the heat medium in the storage tank with a controller within an error range. Thus, a supply system capable of purifying ultra-high purity chemical or liquid gas and supplying ultra-high purity gas, comprising a first storage tank and a second storage tank interconnected, and a large-capacity chemical or liquid gas twice. A chemical solution consisting of a large flow rate supply system which removes impurities over a period of time, obtains a high-purity large-capacity chemical or liquid gas through two purification processes, and enables a large flow rate supply by raising the pressure through a heat medium. Pipeline purification and large flow rate supply device using liquid gas large-capacity storage tank It is.

As the semiconductor and liquid crystal display (LCD) and light emitting diode (LED) markets have grown and technology is more intensive, and the size of semiconductor wafer and LCD flat panel has gradually increased, the ultra high purity used in the above process (ultra high purity) The use of chemical solutions or liquefied gases is also increasing in large quantities. In general, ultra high purity chemical solutions and liquid gases have been shipped to consumers as canisters, cylinders, Y cylinders (see below) and toner.

However, the increase in demand has provided a supply system where traditional small and medium sized containers are no longer satisfactory to consumers, making large containers such as tube trailers, International Standards Organization (ISO) containers and tankers more practical. Is considered.

The ISO container is a standard means of transporting equipment and other goods by air, land, sea and rail for a long time. The container is durable, durable and placed on the floor of cargo compartments of trains, trucks, docks and large aircraft. It has a size and shape that can be easily and economically fixed.

In general, freight transport containers are formed in standard dimensions and are used for international transportation such as land, sea or air. In addition, such containers are provided with corner connectors which are used to lift the container and also lock the container to the means of transport in which the container is carried. The dimensions of these containers are usually referred to as ISO containers since they have been defined by international standards bodies.

The purity of the chemical solution and gas delivered to the ISO vessel is the most important factor for large delivery systems. Ultra-pure chemical solutions and gases must meet very stringent specifications for humidity, metal content, and particulates.

For example, the amount of 1 ppm (part per million) humidity in the gas phase is often considered to be the maximum allowable humidity level for chemical solutions and gases used in high technology industries.

The problem with large ultra high purity chemical solution and gas delivery systems is that there is little industry experience in the preparation and use of large vessels.

Typically, ultrapure chemical solution and gas delivery systems are divided into two main parts. The first part is a storage vessel for storing and transporting liquefied chemical solution and gas, and the second part is a vaporizer for vaporizing liquid and supplying gaseous phase to the distribution system.

The current technology to meet the high volume of use process is to cover both the tonnage cylinder and the heater with insulation inside, and install the vaporizing system (HVS) that acts as a vaporizer in the pipe after the vessel. However, it is a situation that two or more containers are used because they do not meet the usage of the process.

As mentioned above, the main concern with gas delivery systems is the purity of chemical solutions and gases, but the disadvantages that can be an additional source of contaminating chemical solutions and liquid gases when using vaporizers, vaporizers typically take up a lot of space and are expensive. It has a disadvantage.

One attempt to remove this vaporizer and convey the gaseous phase directly from the vessel is described in US Pat. No. 6,025,576 to a large vessel heater skid for liquefied compressed gas, which technique dispenses compressed chemical solution and gas from a cylinder. If you have the following problems.

When the high compression chemical solution and gas are released from the cylinder, the expansion absorbs thermal energy, which causes cooling at the distribution point delivered throughout the cylinder, resulting in undesirable cooling of the chemical solution and gas in the cylinder, the cylinder wall. Cooling of the valve or regulator can cause freezing, which causes other problems in the flow of vaporized material in the overall system. This is the most vulnerable point at the moment when high flow rates are required.

Larger cylinders are referred to as "large containers" or "tonnage containers" and US Pat. No. 6,025,576 deals with a large-sized container such as "Y" cylinders. The "Y" cylinder is approximately 24 inches in diameter, approximately 7 feet in length, and weighs approximately 1150 lbs when empty. Typically, chemicals such as HCI and ammonia are distributed in large gas delivery systems using "Y" cylinders.

Current requirements are for gas flows in the range of 100 to 500 standard liters per minute (slpm), but some gases have speeds above about 25 slpm due to adverse effects from cooling in large gas delivery systems using "Y" cylinders. It is difficult to provide.

Various measurements exist in the prior art that attempt to maintain the temperature of the dispensing cylinder.

One approach is to cover the cylinder with insulation to help maintain the temperature of the cylinder. However, the commonly used insulation does not keep the cylinder at a high enough temperature and actually has the disadvantage of preventing the queue from heating the cylinder.

In the past, however, cylinders were handled and stored by placing or attaching them to a skeletal structure, ie a "skid". This was time consuming and prevented the heater from attaching to the cylinder, and most of the transport skids had a small space to fix the heater.

The heater should be attached when the cylinder is taken from the carrying skid and placed on the dispensing skid. Later, the heater has the disadvantage that it must be removed when it is necessary to return the cylinder to consume it and recharge it.

U. S. Patent No. 6,025, 576 discloses a skid with a built-in heating element for heating and supporting a large vessel for compressed gas distribution, but the technique presented above allows the system to incorporate two important components: a heater skid separate from the vessel. There are disadvantages of having it, and it can be applied to medium cylinders such as Y containers or toners, but it cannot be suitably used in large containers such as ISO containers.

When used in an ISO container, for example, the skid will have a significant weight when mounted with the ISO container, which will reduce the container size to meet transport requirements.

On the other hand, ISO containers cannot be placed on skids that are used as stand alone units due to the container frame structure. Thus, other systems are required.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art,

Purification using a chemical solution or liquid gas large-capacity storage tank that can purify and maintain a large-capacity chemical solution or liquid gas according to the heat medium in the storage tank by controlling the pressure and temperature within the error range with a high-purity large-capacity chemical solution or liquid gas And a large flow rate supply device.

In addition, the present invention is composed of a first storage tank and a second storage tank interconnected in the present invention to remove impurities in a large volume of a chemical solution or a liquid gas twice, and through a two-stage purification process, a high-purity large-capacity chemical solution or a liquid gas Another object is to provide a refining and large flow rate feeder using a chemical solution or a liquid gas bulk storage tank that can be obtained.

The present invention also provides a refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank, which enables a large flow rate supply in the first storage tank and the second storage tank by increasing the pressure through a heat medium. There is a purpose.

In order to achieve the above object, the present invention provides a device for refining and supplying a large-volume chemical solution or liquid gas to the boiling point of the gas,

A storage tank in which the chemical solution or the liquid gas is stored therein, and a coil tube is formed along an inner circumference such that the heat medium is supplied and circulated therein, and both ends of the coil tube penetrate the outside;

A water storage tank in which a high / low temperature heat medium to be connected and connected to a coil pipe formed at both sides of the coil pipe formed inside the storage tank is stored;

The recovery tank is connected to the storage tank and the low temperature heat medium circulated along the coil pipe is recovered and stored therein, and the low temperature heat medium stored therein is connected to the water storage tank and the return pipe (P4) to be transferred to the water storage tank through a pump. ;

And a control unit for adjusting the respective devices by the input data. The present invention relates to a purification and a large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank.

As described above, the purification and large flow rate supplying device using the chemical solution or the liquid gas large-capacity storage tank of the present invention controls the pressure and the temperature of the large-capacity chemical solution or the liquid gas in the storage tank according to the heating medium within the error range. By adjusting, there is an effect that can be purified into a high-purity large-capacity chemical solution or liquid gas.

In addition, the present invention is composed of a first storage tank and a second storage tank interconnected in the present invention to remove impurities in a large volume of a chemical solution or a liquid gas twice, and through a two-stage purification process, a high-purity large-capacity chemical solution or a liquid gas There is an effect that can be obtained.

In addition, the present invention has the effect of enabling a large flow rate supply in the first storage tank and the second storage tank by the pressure rise through the heat medium.

The present invention has the following features to achieve the above object.

The present invention is a device for refining and supplying a large-volume chemical solution or liquid gas to the boiling point of the gas,

A storage tank in which the chemical solution or the liquid gas is stored therein, and a coil tube is formed along an inner circumference such that the heat medium is supplied and circulated therein, and both ends of the coil tube penetrate the outside;

A storage tank in which a high / low temperature heat medium to be connected and introduced into the pipes P1 and P2 is stored at both sides of the coil pipe formed inside the storage tank;

The recovery tank is connected to the storage tank and the low temperature heat medium circulated along the coil pipe is recovered and stored therein, and the low temperature heat medium stored therein is connected to the water storage tank and the return pipe (P4) to be transferred to the water storage tank through a pump. ;

And a controller for adjusting each device by the input data.

In addition, the present invention is a device for refining the boiling point of the gas by supplying a heat medium to a large-capacity chemical solution or liquid gas,

A first storage tank in which the chemical solution or the liquid gas is stored therein, and a coil pipe is formed along an inner circumference such that the heat medium is supplied and circulated therein, and both ends of the coil pipe penetrate the outside;

A second storage tank communicating with the first storage tank by pipes (P8 and P9), having a chemical solution or a liquid gas stored therein, and having a volume larger than that of the first storage tank;

A storage tank in which a high / low temperature heat medium to be connected and introduced into the pipes P1 and P2 is stored at both sides of the coil pipe formed inside the first storage tank;

The low temperature heat medium connected to the first storage tank and circulated along the coil pipe is recovered and stored therein, and the low temperature heat medium stored therein is connected to the water storage tank and the return pipe P4 to be transferred to the water storage tank through a pump. A recovery tank;

And a controller for adjusting each device by the input data.

In addition, the present invention is a device for refining the boiling point of the gas by supplying a heat medium to a large-volume chemical solution or liquid gas,

The fixture is provided with a lower side to facilitate the protection and fixing of the storage vessel equipped with a temperature sensor and a pressure sensor for storing the chemical or liquid gas, the chamber for supplying a heat medium installed around the outside of the storage vessel, and the storage vessel in which the chamber is installed. A first storage tank comprising a frame installed at a lower side of the frame and a valve box installed at one side of the frame to facilitate movement;

A second storage tank communicating with the first storage tank by pipes (P8 and P9) and having a chemical solution or a liquid gas stored therein, the second storage tank having a volume larger than that of the first storage tank;

A storage tank in which a high / low temperature heat medium to be connected to the valve box and the pipes P1 and P2 of the first storage tank is introduced;

The low temperature heat medium connected to the first storage tank and circulated along the chamber is recovered and stored therein, and the low temperature heat medium stored therein is connected to the reservoir and the return pipe P4 to transfer the low temperature heat medium stored therein to the reservoir through a pump. Joe;

And a controller for adjusting each device by the input data.

The present invention having such characteristics can be more clearly described by the preferred embodiments thereof.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Prior to this, terms or words used in the specification and claims should not be construed as having a conventional or dictionary meaning, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiments of the present invention and do not represent all of the technical idea of the present invention, various equivalents that may be substituted for them at the time of the present application It should be understood that there may be water and variations.

1 is a schematic view showing a purification and large flow rate supply apparatus using a chemical solution or a liquid gas large-capacity storage tank according to a first embodiment of the present invention.

As shown in FIG. 1, the purification and large flow rate supply device using the chemical solution or the liquid gas large-capacity storage tank of the present invention is a system for supplying a heat medium to purify and maintain the large-volume chemical solution or liquid gas at the boiling point of gas. And a storage tank 50, a water storage tank 10, a recovery tank 20, and a control unit 30.

The storage tank 50 is formed of a fixed hermetically sealed container so that 50 to 50,000 kg of a chemical solution or liquid gas is stored therein, and the heat medium transferred through the reservoir 10 is supplied to the inside of the storage tank 50. A coil-shaped tube is formed along the inner circumference to circulate the inside, and both ends of the coil tube 40 are formed through the outer surface of the storage tank and connected to the outside. At this time, valves are provided at both ends of the coil pipe 40 protruding from the outer surface of the storage tank 50 to open and close the heat medium, and the high temperature heat medium transferred from the reservoir 10 is the coil pipe 40. Inflow to the bottom of the discharged to the top, the low temperature heat medium is introduced into the top of the coil tube 40 is discharged to the bottom.

Here, the storage tank 50 is the injection valve 51 is installed on the upper and lower end surfaces, respectively, so that the chemical solution or liquid gas is stored therein, the ultra-high purity chemical solution purified in the storage tank 50 Alternatively, a process valve 52 connected to another device to supply liquid gas is installed at an upper surface thereof, and a temperature sensor 53 and a pressure sensor 54 are configured to measure the temperature and pressure inside the storage tank 50. It is installed on the top surface.

In addition, the storage tank 50 is provided with a drain valve 55 on the bottom surface so that the chemical solution or liquid gas is purified and the remaining impurities are discharged to the outside, the pressure inside the storage tank 50 is maintained and ultra-high purity Gas inlet valve 56 is installed on the upper surface so that the external gas pressure flows in order to supply the purified chemical solution or liquid gas to the other supply device through the process valve 52, the storage tank 50 The level gauge 57 is further installed on one side so as to check the capacity of the chemical solution or liquid gas stored in the interior.

As such, the storage tank 50 is connected to a device to be supplied to the process valve 52 to supply the chemical solution or the liquid gas by internal pressure.

In addition, the storage tank 50 may be installed in multiple, so that the number of all pipes connected to the storage tank 50 is increased or branched to each other, the plurality of storage tank 50 is one It is formed in the same structure as the storage tank 50.

The reservoir 10 is connected to the both sides of the coil tube 40 of the storage tank 50 by a pipe, the heat medium is stored in the reservoir 10 is the heat medium to the heater coil 11 and the air cooling (14) By converting the high temperature / low temperature according to the conditions, only the high temperature flows into the storage tank (50). In this case, the heat medium is usually water, but other heat medium with a higher specific pressure specific heat than water may be used.

Here, the heater coil 11 is installed inside the storage tank 10 to convert the heat medium stored therein to a high temperature, and a temperature sensor 12 is installed to measure the temperature inside the storage tank 10, and the storage tank The level gauge 13 is further provided to detect the heat medium level in the 10.

In addition, the air cooling (air cooling) is further installed on the outside of the reservoir to convert the heat medium stored in the reservoir (10) to a low temperature, the air cooling 14 is connected by the reservoir (10) and the pipe (P6) The heat medium in the reservoir 10 is converted to low temperature by heat exchange with the outside air to adjust and maintain the temperature of the heat medium in the reservoir 10.

Thus, the reservoir 10 serves to control the heat medium to be injected into the storage tank 50 to maintain the same temperature.

The recovery tank 20 is connected to the storage tank 50, the low-temperature heat medium circulated along the coil pipe 40 is recovered and stored therein, the recovery tank 20 is the water storage tank 10 and the return pipe ( It is connected to P4) to transfer the low temperature heat medium stored therein to the reservoir 10. At this time, the return pipe (P4) is installed in the pump is a low-temperature heat medium stored in the recovery tank 20 is to be transferred to the reservoir (10).

Here, the temperature sensor 21 is installed in the recovery tank 20 to measure the internal temperature, and the level gauge 22 is further installed to detect the level of the low temperature heat medium in the recovery tank 20.

As such, the devices are each connected by a pipe, the high temperature heat medium supply pipe (P1) is connected between the bottom of the coil pipe 40 and the reservoir of the storage tank 50, the high temperature heat medium supply pipe (P1) The high temperature heat medium is transferred from the reservoir 10 by a pump installed at one end thereof, and a low temperature heat medium transfer pipe P2 is connected between the upper end of the coil pipe 40 and the water storage tank 10, and the low temperature heat medium transfer is performed. Pipe (P2) is a high temperature heat medium introduced through the high temperature heat medium supply pipe (P1) transfers the coil pipe 40, the heat exchange to transfer the low temperature heat medium is dropped to the reservoir (10). At this time, one end portion of the high temperature heat medium supply pipe (P1) is further installed in a parallel high temperature heat medium supply pipe (P7), the pump and a plurality of valves necessary for the transfer is installed in the high temperature heat medium supply pipe (P7). do.

In addition, branched from one end of the high temperature heat medium supply pipe (P1) is connected to the storage tank 50 and the recovery tank 20 so that the low temperature heat medium is recovered in the recovery tank 20 when the storage tank 50 is cooled. Low temperature heat medium recovery pipe (P3) is installed, one end of the low temperature heat medium transfer pipe (P2) is formed by branching the cooling water pipe (P5) connected from the outside, the cooling water pipe (P5) is the storage tank (50) It is connected to the outside to supply coolant from the outside for quick cooling in case of abnormality in the inside. At this time, one end of the cooling water pipe (P5) is branched separately is connected to the interior of the reservoir 10, thereby filling the heat medium insufficient in the reservoir (10).

In addition, at one end of the low temperature heat transfer pipe (P2), the purge pipe (P10) is branched to be connected to the outside to pull out the heat medium in the pipe when repairing or replacing the entire apparatus, and the purge pipe (P10) Air and gas are introduced from the outside and the heat medium is removed by pressure.

Here, each of the pipes (P1, P2, P3, P5, P10) is provided with a valve so as to open and close the inside, the plurality of valves are located in one place is protected by the valve case (80). At this time, the valve case 80 is multi-installed in accordance with the quantity of the storage tank 50, or each of the piping (P1, P2, P3, in one valve case 80 according to the quantity of the storage tank 50) P5, P10) number is increased or branched respectively.

The control unit 30 is an electrical speech to the temperature sensor (12, 21, 53), pressure sensor 54, level gauges (13, 22, 57), pumps, valves installed in each device is input by the user Adjust by controlling within the error range of data value.

Figure 2 is a schematic view showing a purification and large flow rate supply apparatus using a chemical solution or a liquid gas large-capacity storage tank according to a second embodiment of the present invention, Figure 3 is a first embodiment of another form according to a second embodiment of the present invention This is a schematic diagram showing a purification and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank in which a storage tank is installed.

As shown in FIG. 2, the purification and large flow rate supply device using the chemical solution or the liquid gas large-capacity storage tank of the present invention is a system for supplying a heat medium to purify and maintain the large-volume chemical solution or the liquid gas at the boiling point of gas. And a first storage tank 60, a second storage tank 70, a reservoir 10, a recovery tank 20, and a control unit 30.

Here, the reservoir 10, the recovery tank 20, the control unit 30 and the pipes (P1 ~ P7, P10) respectively connected to the same configuration and structure and the same as in the first embodiment described above No further description is required.

The first storage tank 60 and the second storage tank 70 are the same configuration and structure as the storage tank of the first embodiment described above. However, the second storage tank 70 is formed larger than the volume of the first storage tank 60, the coil tube 40 is not installed inside the second storage tank (70).

At this time, the first storage tank 60 and the second storage tank 70 are connected to each other by two pipes (P8, P9), one pipe (P9) of the two pipes (P8, P9) 1 is connected to the outer surface of the lower end of the storage tank 60 and the second storage tank 70, the other pipe (P8) is the outer surface of the upper end of the first storage tank 60 and the second storage tank (70) Is connected to the installation.

Here, the two pipes (P8, P9) are each provided with a valve to open and close the inside, the large-capacity chemical solution or liquid gas introduced into the first storage tank 60 through the pipe (P9) is a second Is transferred to the storage tank 70, in this case, the pressure between the first storage tank 60 and the second storage tank 70 through the pipe (P8) equal or one side predominantly controls the pipe (P9) Through the second storage tank 70 facilitates the transfer of large-capacity chemical solution or liquid gas.

In addition, the first storage tank 60 is not a coil pipe 40 installed therein in another embodiment with reference to FIG. 3, and the first storage tank 60 is formed around the outer circumference of the first storage tank 60. A chamber is installed to heat and cool the 60. At this time, the low-temperature heat medium transfer pipe (P2) is connected to the outer surface of the upper end of the chamber 61, the low-temperature heat medium is introduced into the inside, and the high-temperature heat medium supply pipe (P1) is provided on the outer surface of the lower end of the chamber 61 It is connected to the high temperature heat medium is introduced into the heat exchange and then discharged through the low temperature heat medium transfer pipe (P2).

Figure 4 is a schematic diagram showing a purification and large flow rate supply apparatus using a chemical solution or a liquid gas large-capacity storage tank according to a third embodiment of the present invention, Figure 5 is a second embodiment of another form according to a third embodiment of the present invention This is a schematic diagram showing a purification and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank in which a storage tank is installed.

As shown in FIG. 4, the purification and large flow rate supply device using the chemical solution or the liquid gas large-capacity storage tank of the present invention is a system for supplying a heat medium to purify and maintain the large-volume chemical solution or the liquid gas at the boiling point of gas. And a first storage tank 60, a second storage tank 70, a reservoir 10, a recovery tank 20, and a control unit 30.

Here, the reservoir 10, the recovery tank 20, the control unit 30 and the pipes (P1 ~ P7, P10) respectively connected to the same configuration and structure and the same as in the first embodiment described above No further description is required. In addition, since the second storage tank 70 has the same configuration, structure, and function as the second storage tank 70 of the second embodiment described above, no separate description will be made. However, one pipe P8 of the two pipes P8 and P9 connected between the second storage tank 70 and the first storage tank 60 of the present invention is an upper portion of the first storage tank 60. The surface is connected to the upper surface of the second storage tank 70, the other pipe (P9) is connected to the lower surface of the second storage tank 70 from the upper surface of the first storage tank (60).

Here, the two pipes (P8, P9) are each provided with a valve to open and close the inside, the large-capacity chemical solution or liquid gas introduced into the first storage tank 60 through the pipe (P9) is a second Is transferred to the storage tank 70, in this case, the pressure between the first storage tank 60 and the second storage tank 70 through the pipe (P8) equal or one side predominantly controls the pipe (P9) Through the second storage tank 70 facilitates the transfer of large-capacity chemical solution or liquid gas.

The first storage tank 60 is a movable sealed container, a storage container 1 having a temperature sensor 53 and a pressure sensor 54 in which a chemical or liquid gas is stored, and a circumference of the outside of the storage container 1. In order to facilitate the protection and fixing of the chamber 2 to which the heat medium is installed and the storage container 1 in which the chamber 2 is installed, the fastener 3 is installed at the lower side and the moving wheel 4 to facilitate the movement. The frame 5 is installed on the lower side, and the valve box 6 is provided on one side of the frame (5).

Here, the storage container 1 is formed so that the capacity of 50 ~ 50,000 kg of the chemical or liquid gas can be stored, the temperature sensor 53 and the pressure sensor 54 to check the temperature and pressure therein is Is installed. In addition, a level gauge 57 may be further formed at one side of the storage container 1 to check the capacity of the stored chemical or liquid gas.

The outer periphery of the storage container 1 made as described above is provided with a chamber 2 is supplied with a heat medium to heat and cool the storage container 1. At this time, the insulation (not shown) is further installed on the upper side of the chamber (2).

Here, the frame (5) is formed of a structurally stable hexahedral structure, the storage container (1) in which the chamber (2) is formed in the space portion of the inner side is placed, the chemical or liquid gas in the storage container (1) Is stored and easily fixed to a transfer means (not shown) such as a vehicle by the fastener (3) during movement to facilitate the transfer, and move easily to a desired position when dismantling from the transfer means by the moving wheel (4) To help. At this time, one side of the frame 5 is provided with a valve box 6, a plurality of valves are installed.

In addition, the valves installed in the valve box 6 are generally one-touch valves, and the valves are chambers for injection / discharge valves and heat medium for injecting and discharging chemical or liquid gas into the storage container 1. It consists of the supply valve supplied to (2), and the collection | recovery valve by which the heat medium is discharged | emitted and collect | recovered from the chamber (2).

Referring to FIG. 5, the second storage tank 70 is provided with a coil pipe 40 in another embodiment, and one end of one of both ends of the coil pipe 40 is first storage tank 60. ) And is connected to the pipe (P8) connected to the upper surface of the second storage tank (70), the other end of the coil pipe starting from the first storage tank (60) to the lower end of the second storage tank (70) It is connected to the pipe (P9) connected to the surface.

As such, the first and second storage tanks 60 and 70 described in the second and third embodiments are disposed to remove the impurities in two large-capacity chemical solutions or liquid gases, and to purify the product through two purification steps. It is possible to obtain a large capacity chemical or gas.

1 is a schematic view showing a purification and a large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank according to a first embodiment of the present invention,

Figure 2 is a schematic diagram showing a purification and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank according to a second embodiment of the present invention,

3 is a schematic diagram showing a refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank having a first storage tank of another type according to a second embodiment of the present invention;

Figure 4 is a schematic diagram showing a purification and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank according to a third embodiment of the present invention,

5 is a schematic view showing a purification and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank having a second storage tank of another form according to a third embodiment of the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS

10: reservoir 11: heater coil

12,21,53: Temperature sensor 13,22,57: Level gauge

14: air cooling 20: recovery tank

30: control unit 40: coil tube

50: storage tank 51: injection valve

52: process valve 54: pressure sensor

55: drain valve 56: gas inlet valve

60: first storage tank 61: chamber

70: second storage tank 80: valve case

Claims (7)

In the apparatus for refining and supplying a large-volume chemical solution or liquid gas to the boiling point of the gas, The chemical solution or the liquid gas is stored therein, the coil pipe 40 is formed along the inner circumference so that the heat medium is supplied to the inside and circulated, the storage tank in which both ends of the coil pipe 40 are formed through the outside 50; A storage tank 10 in which a high / low temperature heat medium to be connected and connected to the pipes P1 and P2 is introduced into both sides of the coil pipe 40 formed in the storage tank 50; The low temperature heat medium connected to the storage tank 50 and circulated along the coil pipe 40 is recovered and stored therein, and the low temperature heat medium stored inside is connected to the reservoir 10 and the return pipe P4. A recovery tank 20 for transferring the water storage tank 10 through a pump; It comprises a; control unit 30 for adjusting each device by the input data, The reservoir 10 has a heater coil 11 installed therein to convert the heat medium stored therein into a high temperature, and a temperature sensor 12 is installed to measure the temperature therein, and the air to convert the stored heat medium into a low temperature. Cooling (14) is connected by a pipe (P6) is installed and purified by using a chemical solution or liquid gas large-capacity storage tank characterized in that to control the heat medium stored therein according to the conditions. In the apparatus for refining and supplying a large-volume chemical solution or liquid gas to the boiling point of the gas, The chemical solution or the liquid gas is stored therein, the coil tube 40 is formed along the inner circumference so that the heat medium is supplied and circulated therein, and both ends of the coil tube 40 are formed to penetrate the outside. A storage tank 60; The second storage tank which is in communication with the first storage tank 60 and the pipes (P8, P9), the chemical solution or liquid gas is stored therein, and formed in a volume larger than the first storage tank 60 70 and; A storage tank 10 in which a high / low temperature heat medium to be connected and connected to pipes P1 and P2 is stored at both sides of the coil pipe 40 formed in the first storage tank 60; The low temperature heat medium circulated along the coil pipe 40 connected to the first storage tank 60 is collected and stored therein, and connected to the water storage tank 10 and the return pipe P4 to store the low temperature heat stored therein. A recovery tank 20 for transferring the heat medium to the water storage tank 10 through the pump; A control unit (30) for controlling each device by input data; Refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank comprising a. In the apparatus for refining and supplying a large-volume chemical solution or liquid gas to the boiling point of the gas, A storage container 1 in which the temperature sensor 53 and a pressure sensor 54 are stored, in which the chemical or liquid gas is stored, and a chamber 2 in which a heat medium provided around the storage container 1 is supplied; Frame (5) and the side of the frame (5), the fastener (3) is installed on the lower side to facilitate the protection and fixing of the storage container in which the chamber (2) is installed and the moving wheel (4) is installed on the lower side to facilitate movement. A first storage tank (60) composed of a valve box (6) installed on the first storage tank (60); The second storage tank which is in communication with the first storage tank 60 and the pipes (P8, P9), the chemical solution or liquid gas is stored therein, and formed in a volume larger than the first storage tank 60 70 and; A storage tank 10 in which a high / low temperature heat medium to be connected to the valve box 6 and the pipes P1 and P2 of the first storage tank 60 is introduced; The low temperature heat medium, which is connected to the first storage tank 60 and circulated along the chamber 2, is recovered and stored therein, and is connected to the water storage tank 10 and the return pipe P4 and stored therein. Recovery tank 20 for transferring to the reservoir 10 through the pump; A control unit (30) for controlling each device by input data; Refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank comprising a. The method of claim 1, The storage tank 50 is formed in a fixed hermetically sealed container and the injection valve 51 is installed on the upper and lower end surfaces, respectively, so that the chemical solution or the liquid gas is stored therein, and is purified in the storage tank 50. The process valve 52 is connected to the upper surface of the process valve 52 which is connected to another device to supply an ultra high purity chemical solution or liquid gas, and once the temperature sensor 53 and the pressure sensor 54 measure the temperature and pressure therein, It is installed on the surface, and the drain valve 55 is installed on the bottom surface so that the chemical solution or the liquid gas is purified and the remaining impurities are discharged to the outside, maintaining the pressure inside the storage tank 50 and purified to ultra high purity Gas inlet valve 56 is installed on the upper surface so that the external gas pressure flows in order to supply the chemical solution or liquid gas to the other supply device through the process valve 52 Refining and large flow rate supply device using a chemical solution or a liquid gas large-capacity storage tank. The method of claim 2 or 3, The reservoir 10 has a heater coil 11 installed therein to convert the heat medium stored therein into a high temperature, and a temperature sensor 12 is installed to measure the temperature therein, and the air to convert the stored heat medium into a low temperature. Cooling (14) is connected by a pipe (P6) is installed and purified by using a chemical solution or liquid gas large-capacity storage tank characterized in that to control the heat medium stored therein according to the conditions. The method of claim 1, The high temperature heat medium supply pipe (P1) and the coil pipe (10) connected between the lower end of the coil pipe 40 and the reservoir 10 of the storage tank 50 to transfer the high temperature heat medium by the pump in the reservoir 10, 40 is connected between the upper end of the reservoir and the reservoir 10, the low temperature heat transfer pipe (P2) for transferring the low temperature heat medium to the reservoir 10, and branched at one end of the high temperature heat medium supply pipe (P1) storage tank The low temperature heat medium recovery pipe (P3) connecting the storage tank (50) and the recovery tank (20) so that the low temperature heat medium is recovered in the recovery tank (20) during cooling of the (50), and the low temperature heat medium transfer pipe (P2) Refining using a chemical solution or liquid gas large-capacity storage tank characterized in that the branch consisting of a cooling water pipe (P5) is connected to the outside to supply the cooling water from the outside for quick cooling in the event of an abnormality in the storage tank (50) Large flow feeder. The method of claim 3, A high temperature heat medium supply pipe (P1) connected between the bottom pipe of the valve box 6 of the first storage tank 60 and the water storage tank 10 to transfer a high temperature heat medium in the water storage tank 10 by a pump; It is connected between the upper end pipe of the valve box 6 and the reservoir 10, the low temperature heat medium transfer pipe (P2) for transferring the low temperature heat medium to the reservoir 10, and at one end of the high temperature heat medium supply pipe (P1) A low temperature heat medium recovery pipe (P3) connected to the storage tank 50 and the recovery tank 20 so that the low temperature heat medium is recovered in the recovery tank 20 when the storage tank 50 is cooled by being branched, and the low temperature heat medium transfer pipe Chemical solution or liquid gas large-capacity storage tank branched from one end of (P2) consisting of a cooling water pipe (P5) connected to the outside to supply the cooling water from the outside for rapid cooling in the event of an abnormality in the storage tank (50) Refined and oiled with Supply.

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