KR101167693B1 - Temperature sensor for vacuum equipment - Google Patents

Abstract

PURPOSE: A temperature sensor for vacuum equipment is provided to easily repair and replace a damaged signal wire by applying a structure sealing a gap between an insulating pipe and a sleeve. CONSTITUTION: A temperature sensor for vacuum equipment comprises a sensor head, a upper fitting(11), and a lower fitting(12). The upper fitting is coupled in the sensor head and the lower fitting is coupled in the upper fitting. The sensor body is coupled in the lower fitting. The temperature sensor comprises a fitting globe(17). The fitting globe is coupled to the sensor body by being inserted. The fitting globe controls an installation height of a sensor by adjusting a coupling position in the sensor body.

Description

Temperature sensor for vacuum equipment

The present invention relates to a temperature sensor for vacuum equipment, and more particularly to a sensor used for measuring the temperature of equipment such as a vacuum chamber using a platinum (Pt) element.

In general, the temperature sensor is a sensor for measuring the temperature by detecting the change in the internal resistance value, voltage or current by the temperature change.

These temperature sensors use the thermistors using negative characteristics that reduce the internal resistance according to temperature, the platinum temperature sensors using the proportional resistance of platinum element according to temperature, and the principle that the electromotive voltage is generated when temperature is applied to different objects. Thermocouple temperature sensor and the like.

Among them, platinum temperature sensor using platinum element detects and controls high temperature for industrial use such as electric furnace, smelting, furnace, etc. in addition to measuring engine temperature, transformer oil temperature, gearbox temperature, gas temperature, operating environment temperature of equipment, etc. Is utilized.

For example, many steel mills or steel mills use high-explosive gases in their vessels, such as hydrogen annealing lines and blast furnace hot-blast furnaces, and use high-temperature explosive gases. Of great importance, the temperature inside the vessel is controlled using a platinum temperature sensor.

Recently, it is a trend that is widely used for measuring and controlling the internal temperature of the vacuum equipment, such as a vacuum chamber for manufacturing components by making a vacuum and high temperature environment.

In general, the platinum temperature sensor has a structure including a head for connecting a signal wire, an insulating tube through which the signal wire passes, an insulating tube sleeve for receiving the insulating tube, and the like. It prevents the short circuit caused by the contact of signal wire.

In addition, the gap between the insulated tube and the insulated sleeve has a structure that is molded with an adhesive such as an epoxy resin for vacuum interruption.

That is, the gap between the insulated tube and the insulated tube sleeve is molded by using an adhesive such as epoxy resin for vacuum sealing.

However, the above integrally molded structure of the insulator tube and the insulator tube sleeve cannot be replaced or repaired because the insulator tube and the insulator sleeve are integrally molded with adhesive when the replacement and repair is necessary due to damage of the signal wire. There is this.

In addition, the conventional temperature sensor has a disadvantage in that it is not limited to the external vacuum blocking due to the fixed installation and use by welding to the vacuum equipment, and also the installation height of the sensor is not adjustable, so that various limitations in terms of usability.

Accordingly, the present invention has been made in view of the above, and is interposed between the upper insulating tube and the lower insulating tube between the insulating tube and the sleeve using a compression strain of the vacuum blocking tube. It is an object of the present invention to provide a temperature sensor for vacuum equipment that can easily replace and repair the insulation tube and the signal wire installed inside the temperature sensor by implementing a new type of sealing method.

In addition, the present invention by adjusting the tightening position when the temperature sensor is installed and by applying a fitting that can be sealed, it is possible to adjust the installation height of the sensor placed inside the vacuum equipment, a vacuum field that can achieve a perfect sealing effect Another purpose is to provide a cost temperature sensor.

In order to achieve the above object, the vacuum sensor temperature sensor provided by the present invention has the following features.

The temperature sensor for the vacuum equipment is a sensor used for measuring the temperature of the vacuum equipment using a platinum (Pt) element, a sensor head, an upper fitting fastened to the sensor head, a lower fitting fastened to the upper fitting, It consists of a structure including a sensor body is fastened to the lower fitting, in particular the upper fitting and the lower fitting inside the sleeve having an upper insulating tube, a vacuum blocking tube made of an elastic material and the lower insulating tube in close contact In addition, the vacuum blocking tube is compressed up and down by the fastening force between the upper fitting and the lower fitting, and at the same time, the inner sealing can be made by the deformation force that expands from side to side.

Here, the vacuum blocking tube of the temperature sensor for the vacuum equipment is composed of a cylindrical silicone material installed concentrically inside the lower fitting, it is preferable to perform the sealing function through the deformation force pressed on the inner peripheral surface of the fitting. Do.

In addition, the temperature sensor for the vacuum equipment is inserted into the sensor body and fastened, and may further include a fitting hole for adjusting the installation height of the sensor by adjusting the fastening position on the sensor body, the fitting holes at this time up and down each other The upper nut member and the lower bolt member, and being installed inside the upper nut member and the lower bolt member while being fitted to the outer circumferential surface of the sensor body has a sloping surface at one end and a part of the circumference cut by the incision; It may be made of a structure including a pressure ring in contact with the inclined surface of the pressing ring.

The fitting sphere is characterized in that the diameter of the pressing ring is reduced by the pressing action of the pressing ring by the fastening force between the upper nut member and the lower bolt member can be fixed at any position on the sensor body side.

The temperature sensor for vacuum equipment provided by the present invention has the following advantages.

First, by excluding the molding structure using the adhesive, by adopting a structure that seals the gap between the insulator tube and the sleeve by using a strain force that expands from side to side while compressing the vacuum blocking tube made of an elastic material such as silicone up and down. , There is an advantage that can easily replace and repair the signal wire by separating easily during replacement and repair due to damage of the signal wire.

Second, it is possible to adjust the fastening position along the length direction of the sensor body, and by applying the fitting hole with the sealing structure inside, it is possible to adjust the installation height of the sensor placed inside the vacuum equipment at the same time, The sealing structure can be implemented, and accordingly, the external vacuum can be effectively blocked, and the sensor can be installed and used according to the conditions of the vacuum equipment, thereby securing a wide range of application of the sensor.

1 is an exploded perspective view showing a temperature sensor for vacuum equipment according to an embodiment of the present invention;
Figure 2 is a combined perspective view showing a temperature sensor for vacuum equipment according to an embodiment of the present invention
3 is a cross-sectional view showing a temperature sensor for vacuum equipment according to an embodiment of the present invention.
Figure 4a and 4b is a cross-sectional view showing a state before and after deformation of the vacuum blocking tube in the temperature sensor for vacuum equipment according to an embodiment of the present invention.
Figure 5 is a front view showing the position adjustment state of the fitting sphere in the temperature sensor for vacuum equipment according to an embodiment of the present invention

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 to 3 are a perspective view and a cross-sectional view showing a temperature sensor for vacuum equipment according to an embodiment of the present invention.

As shown in Figures 1 to 3, the temperature sensor for the vacuum equipment is to improve the sealing structure of the insulating tube for blocking the internal vacuum, it is not made of a molding structure by the conventional adhesive, but made of an elastic material such as silicon material It consists of a structure for sealing using the compressive deformation force of the vacuum blocking tube.

To this end, the temperature sensor for vacuum equipment is made of a type for measuring the temperature of the vacuum equipment using a platinum (Pt) element, basically the sensor head (10 in Fig. 5), the upper fitting 11 and the lower Fitting 12, and sensor body 30.

Here, the upper fitting 11 has male threads and female threads formed at the upper end and the lower end, respectively, and the lower fitting 12 has male threads formed at the upper end and the lower end, respectively.

Accordingly, the upper fitting 11 and the lower fitting 12 are assembled by being fastened through the female and male threads of each other from above and below, and together with the male screw of the upper end of the upper fitting 11, the female screw of the sensor head 10 The lower end male thread of the fitting 12 is assembled to the female thread of the sensor body 30, respectively.

As a result, the sensor head 10, the upper fitting 11, the lower fitting 12, and the sensor body 30 may be fastened up and down in turn to be integrally assembled.

Insulating tubes are provided as a means for preventing shorts due to contact of the signal wires 29, and the insulating tubes are formed of two combinations of the upper insulating tube 13 and the lower insulating tube 16. .

The upper and lower insulating tubes 13 and 16 have a cylindrical shape having a plurality of holes 24a and 24b formed side by side in the axial direction, and the signal wire 29 penetrates through the holes 24a and 24b at this time. It becomes possible.

At this time, the upper insulating tube 13 is assembled into a concentric circle inside the sleeve 14, which will be described later, the lower insulating tube 13 is assembled into a concentric circle inside the lower fitting (12).

In particular, the present invention provides a vacuum blocking tube 15 of an elastic material as a means for blocking the internal vacuum.

The vacuum blocking tube 15 is made of an elastic material that can be deformed upon compression, for example, a silicon material, and has a cylindrical shape having a plurality of holes 24c formed side by side in the axial direction.

Of course, the holes 24c formed in the vacuum blocking tube 15 at this time may achieve one-to-one matching with the holes 24a and 24b in the upper and lower insulating tubes 13 and 16.

The vacuum cut-off tube 15 is disposed in a concentric manner inside the lower fitting 12 and is installed in such a way that one side of the tube seating jaw 28 in the lower fitting 12 is supported. It can be positioned between the (13) and the lower insulator tube (16).

At this time, the diameter of the vacuum blocking tube 15 has a diameter that is relatively larger than the diameter of the upper and lower insulating tubes 13 and 16, and is substantially the same as the size of the diameter of the sleeve 14, and thus the sleeve When contacted with the (14) side, it can be compressed in a balanced manner through the entire cross section which is in contact with each other.

Thus, between the upper insulating tube 13 and the lower insulating tube 16, the vacuum cut-off tube 15 of the elastic material having a structure in which the signal wire penetrates, so that the tightening force between the components when the temperature sensor is assembled, for example Due to the clamping force between the upper fitting 12 and the lower fitting 13, the vacuum blocking tube 15 is compressed in the vertical direction (axial direction) and causes deformation to expand in the left and right directions (radial direction). The deformation of the tube 15 allows the gap between the insulation tube and the sleeve to be sealed.

That is, while the vacuum cut-off tube 15 is deformed, the side of the signal wire penetrating the inside is pressed at the same time as the sleeve 14 having the upper insulation tube 13 and the inner wall surface of the lower fitting 12. By being pressed toward the contact surface and the contact surface with the lower insulating tube 16 side, the entire sealing of the inner space to which the vacuum cut-off tube 25 at this time can be made perfectly.

A sleeve 14 is provided as a means for accommodating the upper insulation tube 13, and the sleeve 14 is partially inserted into the lower fitting 12 while using a key 25 mounted on an outer circumference thereof. It can be installed in a structure that is fastened to the key groove 26 of the lower fitting (13).

One of the sleeves 14 thus installed is in contact with the vacuum blocking tube 15, and the other is supported by a jaw portion (not shown) inside the upper fitting 11.

Accordingly, when the upper fitting 11 and the lower fitting 12 are assembled while being fastened to each other, the sleeve 14 may be pushed toward the vacuum blocking tube 15 to exert a force, and thus the vacuum blocking tube ( The compression deformation of 15) can be made.

Therefore, the sealing action for blocking the internal vacuum of the temperature sensor configured as described above is as follows.

4A and 4B are cross-sectional views illustrating a state before and after deformation of a vacuum blocking tube in a temperature sensor for a vacuum device according to an exemplary embodiment of the present invention.

As shown in FIGS. 4A and 4B, a sleeve 14, a vacuum blocking tube 15, and a lower insulating tube in which the upper insulating tube 13 is accommodated in the upper fitting 11 and the lower fitting 12 are disposed. 16 are installed in close contact from the top (from the left in the drawing), and the signal wires are formed through the holes 24a, 24b, and 24c of the upper insulator tube 13, the vacuum shield tube 15, and the lower insulator tube 16. (29) is penetrated, and the upper fitting (11) and the lower fitting (12) are fastened through the female and male threads of each other.

In this state, when the upper fitting 11 and the lower fitting 12 are further tightened, the vacuum interruption tube 15 having both end surfaces in contact with the tube seating jaw 28 and the sleeve 14 of the lower fitting 12 is connected. ) Is compressed in the vertical direction and expands in the left and right directions (arrow direction), causing deformation, and thus, the space around the vacuum cut-off tube 15, that is, the gap between the insulation tube and the sleeve and the gap around the signal wire. The back can be completely sealed.

On the other hand, in the present invention provides a fitting port 17 as a means to enable the adjustment of the installation height of the temperature sensor.

The fitting port 17 is connected to the vacuum equipment (chamber) side serves to enable the installation height adjustment, as well as the external vacuum of the temperature sensor.

To this end, the fitting hole 17 includes an upper nut member 18 and a lower bolt member 19 which are assembled up and down with each other while being concentrically assembled on the sensor body 30 side, and the upper nut member 18 at this time. ) And the lower bolt member 19 is provided with a pressing ring 21 and the pressure ring 22 and the O-ring 27 in contact with each other in order.

Here, the upper nut member 18 and the lower bolt member 19 can be fastened to each other through the female screw and the male screw that each has.

Particularly, the pressing ring 21 is fitted while being in close contact with the outer circumferential surface of the sensor body 30, and has a cutout portion 20 in which a portion of the circumference thereof is cut in the longitudinal direction (axial direction) and broken. The end, ie, the end of the side in contact with the pressure ring 22 is composed of the inclined surface (23).

In addition, the pressing ring 22 serves to press the pressing ring 21 in the radial direction while moving in the axial direction by the fastening force at the time of fastening between the upper nut member 18 and the lower bolt member 19. .

Therefore, when the upper nut member 18 and the lower bolt member 19 are fastened, the pressure ring 22 moves in the axial direction on the inclined surface 23 of the crimping ring 21, and eventually the crimping at this time As the diameter of the pressing ring 21 is reduced by the pressing force exerted by the ring 21, the pressing nut 21 is pressed toward the outer circumferential surface side of the sensor body 30, so that the upper nut member including the pressing ring 22 and the pressing ring 21 ( 18) and the entire position of the lower bolt member 19 can be fixed on the sensor body 30.

5 is a front view showing a position adjustment state of the fitting sphere in the temperature sensor for vacuum equipment according to an embodiment of the present invention.

As shown in FIG. 5, the state of arbitrarily adjusting the position of the fitting opening 17 on the sensor body 30 is shown here.

For example, in a state where the fastening state between the upper nut member 18 and the lower bolt member 19 is slightly loosened (the pressure ring does not press the pressing ring), the pressing ring 22 and the pressing ring 21 are removed. Including the upper nut member 18 and the lower bolt member 19 can be moved along the longitudinal direction of the sensor body 30 (the upper nut member and the lower bolt member that is fixed when installed on the actual vacuum equipment side) To the entire temperature sensor, including the sensor body).

In this state, adjust the installation height of the temperature sensor placed inside the vacuum device appropriately, that is, adjust the temperature sensor's sensing unit (not shown) to the inside of the vacuum device or take it out of the vacuum device. When the upper nut member 18 and the lower bolt member 19 installed on the side are fastened to each other, the sensor body 30 of the temperature sensor is fixed by the upper nut member 18 and the lower bolt member 19. In this way, the adjusted height of the temperature sensor can be maintained.

As described above, the present invention implements a method of sealing the inside of the sensor such as a gap between the insulated tube and the sleeve by deforming the vacuum blocking tube interposed between the two insulated tubes, thereby providing an insulated tube or signal installed inside the temperature sensor. The wire can be easily replaced and repaired, and the height of the temperature sensor can be adjusted according to the equipment conditions while effectively blocking the external vacuum.

10 sensor head 11 upper fitting
12 lower fitting 13 upper insulating tube
14 sleeve 15 vacuum blocking tube
16: lower insulation tube 17: fitting hole
18: upper nut member 19: lower bolt member
20: cut 21: compression ring
22: pressure ring 23: inclined surface
24a, 24b, 24c: hole 25: key
26: keyway 27: O-ring
28: tube seating jaw 29: signal wire
30: sensor body

Claims (6)

Sensor used for temperature measurement of vacuum equipment using platinum (Pt) element,
A sensor head 10, an upper fitting 11 fastened to the sensor head 10, a lower fitting 12 fastened to the upper fitting 11, and a sensor body fastened to the lower fitting 12. Including 30,
The fitting body 17 is fastened to the sensor body 30, and further includes a fitting port 17 to adjust the installation height of the sensor by adjusting the fastening position on the sensor body 30,
The fitting hole 17 is installed inside the upper nut member 18 and the lower bolt member 19 and the upper nut member 18 and the lower bolt member 19 which are fastened up and down with each other while being the sensor body 30. It is fitted to the outer circumferential surface of the circumference includes a pressing ring 21 is cut a part of the circumference by the incision 20 and the pressing ring 22 in contact with the pressing ring 21, the upper nut member 18 and the lower Temperature of the vacuum equipment, characterized in that the position of the pressing ring 21 is reduced by the pressing action of the pressing ring 22 by the fastening force between the bolt members 19, the position of the pressing ring 21 can be fixed to the sensor body 30 side. sensor.
According to claim 1, The upper fitting 11 and the lower fitting 12 inside the sleeve 14 having an upper insulating tube 13, the vacuum blocking tube 15 made of an elastic material and the lower insulating tube 16 Closely installed in this order, the vacuum blocking tube 15 is made of a cylindrical silicone material installed concentrically in the lower fitting 12, it is possible to perform a sealing function through the deformation force pressed on the inner peripheral surface of the fitting Temperature sensor for vacuum equipment, characterized in that.
The temperature sensor of claim 2, wherein the vacuum blocking tube (15) is made of the same diameter as the sleeve (14), so that the vacuum blocking tube (15) can be compressed in a balanced manner through the entire cross section.
delete delete The sensor body of claim 1, wherein one end of the pressing ring 21 is formed of an inclined surface 23, and as the pressure ring 22 presses the inclined surface 23, the diameter of the compression ring 21 is reduced. Temperature sensor for a vacuum equipment, characterized in that it can be bound to the outer peripheral surface of (30).

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