KR101160774B1 - Ringresonator using slotwaveguide, ringresonator sensor including the same and microresonator apparatuses for sensing including ringresonator sensor - Google Patents

Abstract

A ring resonator using a slot wave guide, a ring resonator sensor having the same, and a sensor device including the ring resonator sensor are disclosed. The ring resonator using a slot wave guide is an optical coupling waveguide for coupling an optical signal generated from a light source to the ring resonator, and a circular waveguide and an optical coupling waveguide for propagating the optical signal coupled in the optical coupling waveguide in the ring resonator. And optical path changing means for changing an advancing path of the optical signal so that the optical signal travels in the main waveguide. Therefore, not only the sensitivity of the sensor may be increased by using the slot wave guide in which the optical signal progresses at a low refractive index, but also the stability and reliability of the sensor may be improved by reducing the modal volume to increase the light confinement effect.

Description

RINGRESONATOR USING SLOTWAVEGUIDE, RINGRESONATOR SENSOR INCLUDING THE SAME AND MICRORESONATOR APPARATUSES FOR SENSING INCLUDING RINGRESONATOR SENSOR}

The present invention relates to a ring resonator, a ring resonator sensor, and a micro resonator sensor device using a ring resonator sensor. More particularly, the present invention relates to a ring resonator, a ring resonator sensor, and a ring resonator sensor. A micro resonator sensor device.

In traditional integrated optics, optical signals are processed, distributed and filtered using optical devices using wave guides with high refractive index. Traditional optical signal propagation in a waveguide uses a total internal reflection (TIR) phenomenon of a high refractive index material (core) surrounded by a low refractive index material (cladding). The total reflection phenomenon may serve to trap the optical signal in a portion having a high refractive index.

Recent studies have suggested several methods for advancing and enhancing optical signals in materials with low refractive indices. The proposed method is to propagate the optical signal in the part with low refractive index using the external reflection generated by the interference effect, not the total reflection phenomenon.

However, unlike total reflection, the external reflection cannot be completely equal to the incident optical signal and the reflected optical signal, resulting in some loss in the mode of the optical signal. In addition, when the external reflection is used, since the interference occurs when the optical signal progresses, the structure using the external reflection depends on the wavelength of the optical signal.

According to "Guiding and confining light in void nanostructure" (OPTICAL LETTER, 1, JUNE, 2004), the optical signal can be processed through total reflection, not external reflection, even in the low refractive index.

The Maxwell equation shows that in order for the vertical component of Electric Field Density (D) to satisfy continuity, the E-field has discontinuities with increased amplitude in the region with low refractive index.

When the electric field is discontinuous, the optical signal may be confined to a portion having a width in nano units having a low refractive index. In the paper "Guiding and confining light in void nanostructure" (OPTICAL LETTER, 1, JUNE, 2004), it is shown that the optical signal from the low-refraction optical waveguide using total reflection can proceed in the low-refraction optical waveguide in Eigen mode. .

1 is a conceptual diagram illustrating a structure of a low refractive optical waveguide.

Referring to FIG. 1, a low refractive optical waveguide may include a low refractive index slot 120 positioned between a slab 100 having a high refractive index and a slab 110 having a high refractive index. The low refractive optical waveguide may be used in the same sense as the term slot wave guide.

는 아래의 수학식 1과 같다. Transverse Electric Field (TE) in Basic Transverse Magnetic (TM) Eisen Mode of Slab Structure Slot Wave Guide

Is the same as Equation 1 below.

는 굴절률이 상대적으로 높은 슬라브에 있는 트랜버스 파장 수(Tranverse Wave Number)이고,

는 클래딩에서의 필드 감쇠 계수(Field Decay Coefficient),

는 슬롯에서의 필드 감쇠 계수(Field Decay Coefficient)이고, 수학식 1의 상수

는 아래의 수학식 2와 같이 정의된다. here,

Is the Transverse Wave Number in the slab with a relatively high refractive index,

Is the field decay coefficient in the cladding,

Is a field decay coefficient in the slot, and is a constant of Equation 1

Is defined as in Equation 2 below.

는 임의의 상수이고,

는 진공 파장 수(Vacuum Wave Number)이다. here,

Is any constant,

Is the vacuum wave number.

,

, 및

는 아래 수학식 3의 관계를 동시에 만족해야 한다. Transverse parameter

,

, And

Must satisfy the relationship of Equation 3 below.

는 아이젠 모드 진행 상수(Eigen Mode Propagation Constant)이고

는 아래의 수학식 4를 계산함으로서 유도할 수 있다.here,

Is the Eigen Mode Propagation Constant

Can be derived by calculating Equation 4 below.

를 만족해야 한다. here,

Must be satisfied.

배 큰 값을 가진다.

는 슬라브와 슬롯이

로 이루어진 경우, 6의 값을 가지고

인 경우에는 12의 값을 가진다. As can be seen from Equation 1, the magnitude of the electric field (E-field) of the inner portion of the slot portion is larger than that of the inner portion of the slab.

It has twice the value.

Has slabs and slots

Has a value of 6

Has a value of 12.

), 슬롯에서의 전기장은 큰 값을 가질 수 있다.If the width of the slot is much smaller than the characteristic attenuation length inside the slot (

), The electric field in the slot can have a large value.

로 가정한 경우, 슬롯에서 불연속성을 가지면서 증가된 크기를 가지는 전기장의 분포를 보여주는 그래프이다. 2 is

If we assume that is a graph showing the distribution of the electric field having an increased magnitude with discontinuities in the slot.

,

,

,

로 가정한 경우, 파장

에서

의 분포를 계산한 것이다. The distribution of the electric field in the graph depends on the parameters of the slot wave guide.

,

,

,

Wavelength,

in

The distribution of is calculated.

Referring to FIG. 2, it can be seen that the magnitude of the electric field formed in the slot portion has a value that rises to a large value with discontinuity in the slot portion.

3 is a conceptual diagram illustrating a slot wave guide in a three-dimensional form having a constant height.

Quasi-TE Eisen mode represents the electric field component along the x direction and in three-dimensional slot wave guides, Quasi-TE Eisen mode is similar to TM Eisen mode of slot wave guides based on slab structure.

Quasi-TE Eisen mode is a nonuniform grid mesh full-vectorical finite-difference mode solver that can be calculated to account for the degree of dispersion of the material.

,

,

인 경우, Quasi- TE 모드의 TE field 분포를 나타낸 그래프이다.4 is

,

,

In this case, the graph shows the TE field distribution in the Quasi-TE mode.

Referring to Figure 4, it can be seen that the magnitude of the electric force line and the electric field is represented by the contour line. The bright part in the middle of the graph shows the magnitude of the strong electric field formed in the slot. The direction of the electric field lines in the slots is perpendicular to the portion where the electric field has a high refractive index, and because of the direction of the electric field lines the electric field has a strong discontinuity.

5 is a graph showing the size characteristics of the electric field in a three-dimensional form.

0일 때, x 방향에 따른 전기장의 진폭 특성은 도 2의 그래프와 대응됨을 볼 수 있다. 슬롯 부분의 전기장의 수직 성분은 굴절률이 높은 부분에 의해 영향을 받는다. 이론적으로는 슬롯 웨이브 가이드 구조는 아이젠 모드를 가지기 때문에 광신호의 손실이 없다. 슬롯에서 전기장 증가의 결과로서, 슬롯에서의 광 강도(Optical Intensity)는 굴절률이 높은 부분인 슬라브 부분보다 훨씬 강해진다.
5,

When 0, it can be seen that the amplitude characteristic of the electric field along the x direction corresponds to the graph of FIG. The vertical component of the electric field of the slot portion is affected by the portion of high refractive index. Theoretically, since the slot waveguide structure has an eigen mode, there is no loss of the optical signal. As a result of the electric field increase in the slot, the optical intensity in the slot becomes much stronger than the slab portion, which is the portion with the highest refractive index.

6 is a graph illustrating optical power and average optical intensity.

와 평균 광 강도

는

과

의 함수로 표현된다. Optical power inside the slot

And average light intensity

Is

and

It is expressed as a function of.

및

를 전체 웨이브가이드 광 파워와 관련하여 정규화(Normalize)할 수 있다. Referring to Figure 6, for comparison between each number

And

Can be normalized with respect to the total waveguide optical power.

인 경우,

은 거의 30% 정도 남아있다.

인 경우,

은

이고 이것은

보다 6배 정도 큰 값을 가진다. 그래프에서 볼 수 있듯이,

값은 슬롯 웨이브 가이드 성능에 영향을 끼치지 못한다.

Quot;

Nearly 30% remain.

Quot;

silver

And this is

It is 6 times larger than that. As you can see in the graph,

The value does not affect slot waveguide performance.

That is, the progress of the optical signal in the slot wave guide may have a light intensity higher than that obtained in the conventional wave guide structure.

에서

보다 작은 값을 가진다.

의 구조를 가진 경우, 이 값은 최적의 면적인

에서

보다 작은 값으로 감소하고 이것은 슬롯 웨이브 가이드보다 20배 정도 작은 값이다. Optimal area for conventional SOI waveguide structure

in

Has a smaller value.

If you have a structure of, this value is the optimal area

in

Decrease to a smaller value, which is about 20 times smaller than the slot wave guide.

에서

를 넘기가 어렵다. External reflection-based waveguides, such as antiresonant reflecting waveguides and photonic crystal waveguides, have a small index of refraction. The refractive index is limited to larger than the half wavelength of the wavelength length of the traveling optical signal in the small portion. Therefore, in conventional waveguides using external reflection, the normalized light intensity

in

It is difficult to turn over.

과

의 파장 종속성을 나타낸 그래프이다. 7 is

and

Is a graph showing the wavelength dependence of.

과

는 10% 내의 작은 변화를 가진다. Referring to FIG. 7, the graph shows a very low wavelength dependency since there is no interference effect in the method of advancing and confining the optical signal in the slot. At a wavelength change of 400 nm

and

Has a small change within 10%.

That is, when the optical signal is transmitted in a portion where the refractive index is relatively low by using the slot wave guide, it is possible to obtain a high electric field and light intensity that cannot be obtained in the wave guide used to transmit the optical signal. The properties of these slot waveguides can create effective interactions between fields and materials. In addition, in the low refractive index of nanometer size, the electric field (E-field) is generated with a large value, and this increased electric field component can improve the sensitivity of the optical sensor device using the low refractive wave guide.

The requirements for manufacturing sensors are stability and reliability. That is, in the development of the sensor, despite the severe change in sensitivity and noise interference, the test result of the material to be measured should have stability and reliability.

In addition, miniaturization and portability of the sensor is also required in developing the sensor in order to easily develop a sensor to be used at home, such as a home healthcare system using a home network.

In order to increase the Q-factor of the sensor, sensors using spherical ring resonators of the microsphere, toroid, and disk types have been researched and are being mass-produced. However, the microsphere and toroid Since the disk type resonator has a three-dimensional shape, there are many difficulties in the manufacturing process of the sensor, and the sensor utilizing the ring resonator has a large structure. In addition, since the integration with external modules such as a light source and a light detector is virtually impossible, it cannot be implemented as a bulk-type biosensor system using a prism instead of an integrated device.

In addition, the sensor using the optical signal has a limitation in improving the sensitivity of the sensor by changing only the structure of the wave guide when using the existing wave guide. In addition, the polygonal ring resonator using the conventional wave guide has a modal volume of Because of its size, the light confinement effect is low and the Q-factor of the sensor is limited.

Accordingly, a first object of the present invention is to provide a ring resonator having a slot wave guide for increasing the sensitivity of the sensor to improve the stability and reliability of the sensor.

A second object of the present invention is to provide a sensor device including a ring resonator sensor having a slot wave guide using such a ring resonator.

In addition, a third object of the present invention is to provide a micro resonator sensor including a ring resonator sensor having a slot wave guide using such a ring resonator.

Ring resonator using a slot wave guide according to an aspect of the present invention for achieving the first object of the present invention described above is an optical coupling waveguide for coupling an optical signal generated from a light source to the ring resonator, the coupling in the optical coupling waveguide And a optical path changing means for changing a propagation path of the optical signal to propagate the optical signal in the ring resonator and the optical signal coupled in the optical coupling waveguide in the main waveguide. And at least one of the winding waveguides may be a slot wave guide. The ring resonator including the slot wave guide may include a sensor unit capable of detecting a material to be measured in at least one of the main waveguide and the optical path changing means. The ring resonator may have a triangular shape having the optical coupling waveguide as the bottom side and the peripheral waveguide as both sides. The ring resonator may have a rectangular shape having the optical coupling waveguide as the bottom side and the main waveguide as the remaining three sides.

In addition, the ring resonator sensor using a slot wave guide according to an aspect of the present invention for achieving the second object of the present invention is a main waveguide for receiving an optical signal from a light source and transmitting to the ring resonator, received from the main waveguide And a ring resonator receiving the optical signal and resonating at a specific wavelength of the optical signal, wherein at least one of the main waveguide and the ring resonator may be a slot wave guide. The ring resonator sensor using the slot wave guide may further include a flow path unit configured to transfer a material to be measured to the ring resonator. The flow path unit may further include a control unit for controlling the mobility of the measurement target material, a measurement target material storage unit which is a moving start point of the measurement target material, and a measurement target material arrival unit which is a movement arrival point of the measurement target material. The ring resonator is an optical coupling waveguide for coupling the optical signal generated from the light source to the ring resonator, a circulating waveguide for propagating the optical signal coupled in the optical coupling waveguide in the ring resonator, and the optical coupling in the optical coupling waveguide. And optical path changing means for changing a traveling path of the optical signal so that the signal travels in the main waveguide. The ring resonator may include a sensor unit capable of detecting a material to be measured in at least one of the main waveguide and the optical path changing means. The sensor unit provided in the optical path changing means may detect a material to be measured by using a surface plasmon resonance phenomenon. The sensor unit provided in the light path changing means may detect a measurement target material using a multi-metal film structure. The ring resonator may have a triangular shape having the optical coupling waveguide as the bottom side and the peripheral waveguide as both sides. The ring resonator,

The optical coupling waveguide may have a base shape and the main waveguide may have a quadrangle shape having three remaining sides. The main waveguide may be an asymmetric Mach-gender interferometer in which at least one of the arms included in the Mach-gender interferometer has a different shape. The asymmetric Mach-Gender interferometer may have the same magnitude of the optical signal output from the first arm of the Mah-Gender interferometer and an optical signal emitted from the second arm of the Mah-Gender interferometer and may have a 180 degree difference in phase. .

In addition, a micro-resonator sensor having a ring resonator sensor using a slot wave guide according to an aspect of the present invention for achieving the third object of the present invention is a light source unit for generating an optical signal and transmitting to the ring resonator sensor, the The light resonator may include a ring resonator sensor including a ring resonator including a slot wave guide and an optical detector for detecting an optical signal emitted from the ring resonator sensor. The light source unit filters through a light source for generating an optical signal, an optical coupler for coupling the optical signal generated from the light source, a wavelength filter for filtering an optical signal having a predetermined wavelength among the optical signals generated in the light source, and the wavelength filter. The optical signal may include a rotating polarizer for polarizing the optical signal in at least one of a TM (Tranverse Magnetic) mode and a TE (Tranverse Electric) mode. The ring resonator sensor includes a main waveguide receiving an optical signal from a light source and transmitting the optical signal to a ring resonator, and including a ring resonator receiving the optical signal received from the main waveguide and resonating at a specific wavelength of the optical signal, wherein the main waveguide and the At least one of the ring resonators may be a slot wave guide. The main waveguide may be an asymmetric Mach-gender interferometer in which at least one of the arms included in the Mach-gender interferometer has a different shape. The ring resonator sensor may be included in at least one micro resonator sensor having a ring resonator sensor using the slot wave guide. The micro resonator sensor having a ring resonator sensor using a slot wave guide may further include a fine signal detection device for attenuating noise present in the optical signal. The micro resonator sensor having a ring resonator sensor using a slot wave guide may be implemented as an integrated circuit.

As described above, according to a ring resonator using a slot wave guide according to an embodiment of the present invention, a ring resonator sensor having the same, and a sensor device including the ring resonator sensor, a slot wave guide through which an optical signal travels at a low refractive index may be used. In addition to increasing the sensitivity of the sensor (Sensitivity), by increasing the light confinement effect by reducing the modal volume can increase the stability and reliability of the sensor.

과

의 파장 종속성을 나타낸 그래프이다.
도 8은 본 발명의 일실시예에 따른 슬롯 웨이브 가이드의 구조를 나타내는 개념도이다.
도 9는 본 발명의 일시예에 따른 슬롯 웨이브 가이드의 구조를 입체적으로 나타낸 개념도이다.
도 10은 슬롯 웨이브 가이드에 전기장이 형성되는 원리를 나타낸 개념도이다.
도 11은 저굴절 도파로에 광신호를 진행시킨 경우 생성된 전기장의 모습을 나타내는 개념도이다.
도 12는 광신호를 TE 모드 및 TM 모드로 진행시킨 경우, 센서의 감도를 비교하기 위한 그래프이다.
도 13은 본 발명의 일실시예에 따른 슬롯 웨이브 가이드를 사용한 구조를 이용해 측정 대상 물질을 탐지하는 방법을 나타낸 개념도이다.
도 14 및 도 15는 본 발명의 일실시예에 따른 슬롯 웨이브 가이드를 통해 진행하는 광신호의 경로를 변경하는 전반사 미러와 슬롯 웨이브 가이드를 나타낸 개념도이다.
도 16은 본 발명의 일실시예에 따른 MOI(Model Overlap Integral)의 관점에서 벤딩 효율(BE)를 나타낸 그래프이다.
도 17은 본 발명의 일실시예에 따른 구스-한센(Goos-Hnchen) 특성을 고려한 전반사 미러를 나타내기 위한 개념도이다.
도 18은 본 발명의 일실시예에 따른 링 공진기 센서에 포함되는 링 공진기를 나타낸 개념도이다.
도 19는 본 발명의 일실시예에 따른 광신호를 광결합 도파로에 결합시키는 방법을 나타낸 개념도이다.
도 20은 본 발명의 일실시예에 따른 금속막 구조를 나타내기 위한 개념도
도 21은 본 발명의 일실시예에 따른 금속막 구조에 따른 공진 공선을 나타낸 그래프이다.
도 22는 본 발명의 일실시예에 따른 링 공진기 센서에 포함되는 링 공진기를 나타낸 개념도이다.
도 23은 본 발명의 일실시예에 따른 마흐-젠더 간섭계(Mach-Zehnder Interferometer)를 사용한 링 공진기 센서를 나타낸 개념도이다.
도 24는 본 발명의 일실시예에 따른 유로부를 포함한 링 공진기 센서를 나타낸 개념도이다.
도 25는 본 발명의 일실시예에 따른 자기 참조 도파로를 사용한 링 공진기 센서를 나타낸 개념도이다.
도 26은 본 발명의 일실시예에 따른 링 공진기 센서를 직접화하여 구현한 센서를 나타낸 개념도이다.
도 27은 본 발명의 일실시예에 따른 복수의 링 공진기 센서를 구비한 센서를 나타낸 개념도이다. 1 is a conceptual diagram illustrating a structure of a low refractive optical waveguide.
2 is a graph showing the distribution of electric fields with increased magnitude with discontinuities in the slots.
3 is a conceptual diagram illustrating a slot wave guide in a three-dimensional form having a constant height.
4 is a graph showing the TE field distribution in Quasi-TE mode.
5 is a graph showing the size characteristics of the electric field in a three-dimensional form.
6 is a graph illustrating optical power and average optical intensity.
7 is

and

Is a graph showing the wavelength dependence of.
8 is a conceptual diagram illustrating a structure of a slot wave guide according to an embodiment of the present invention.
9 is a conceptual diagram showing in three dimensions the structure of a slot wave guide according to an embodiment of the present invention.
10 is a conceptual diagram illustrating a principle in which an electric field is formed in a slot wave guide.
FIG. 11 is a conceptual diagram illustrating an electric field generated when an optical signal is advanced through a low refractive waveguide.
12 is a graph for comparing the sensitivity of the sensor when the optical signal is advanced in the TE mode and TM mode.
13 is a conceptual diagram illustrating a method of detecting a material to be measured by using a structure using a slot wave guide according to an embodiment of the present invention.
14 and 15 are conceptual views illustrating a total reflection mirror and a slot wave guide for changing a path of an optical signal traveling through a slot wave guide according to an embodiment of the present invention.
16 is a graph showing the bending efficiency (BE) in terms of MOI (Model Overlap Integral) according to an embodiment of the present invention.
FIG. 17 is a conceptual view illustrating a total reflection mirror considering Goos-Hnchen characteristics according to an embodiment of the present invention.
18 is a conceptual diagram illustrating a ring resonator included in a ring resonator sensor according to an embodiment of the present invention.
19 is a conceptual diagram illustrating a method of coupling an optical signal to an optical coupling waveguide according to an embodiment of the present invention.
20 is a conceptual diagram illustrating a metal film structure according to an embodiment of the present invention.
21 is a graph illustrating resonance collinearity according to a metal film structure according to an embodiment of the present invention.
22 is a conceptual diagram illustrating a ring resonator included in a ring resonator sensor according to an embodiment of the present invention.
FIG. 23 is a conceptual diagram illustrating a ring resonator sensor using a Mach-Zehnder Interferometer according to an embodiment of the present invention.
24 is a conceptual diagram illustrating a ring resonator sensor including a flow path part according to an exemplary embodiment of the present invention.
25 is a conceptual diagram illustrating a ring resonator sensor using a self referencing waveguide according to an embodiment of the present invention.
26 is a conceptual diagram illustrating a sensor implemented by directly implementing a ring resonator sensor according to an embodiment of the present invention.
27 is a conceptual diagram illustrating a sensor including a plurality of ring resonator sensors according to an embodiment of the present invention.

As the invention allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the written description. It should be understood, however, that the invention is not intended to be limited to the particular embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. And / or < / RTI > includes any combination of a plurality of related listed items or any of a plurality of related listed items.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Hereinafter, with reference to the accompanying drawings, it will be described in detail a preferred embodiment of the present invention. Hereinafter, the same reference numerals are used for the same components in the drawings, and duplicate descriptions of the same components are omitted.

In the following embodiments of the present invention, the ring resonator may be used as a term referring to a structure including an optical coupling waveguide, a circumferential waveguide, and a total reflection mirror, and the ring resonator sensor may include a main waveguide (for example, a coupling optical signal to the ring resonator). For example, Mach-gender structure) can be used as a term referring to a structure combined. In addition, the micro resonator sensor or sensor may be used as a term referring to a structure including an external module such as a light source, a light detector, and a polarizer in the ring resonator sensor. Sensors may be used to detect biochemicals, but may be used for purposes other than detecting biochemicals as long as they do not depart from the nature of the present invention.

In addition, the term slot wave guide used in an embodiment of the present invention may be used in the same sense as the term indicating a low refractive optical waveguide that utilizes a portion having a low refractive index as a portion through which an optical signal travels. In addition, the main waveguide serves to transfer an optical signal from the light source to the ring resonator, and the Mach-gender interferometer is also included in the main waveguide.

8 is a conceptual diagram illustrating a structure of a slot wave guide according to an embodiment of the present invention.

Referring to FIG. 8, the slot wave guide may be formed in a structure including at least two slabs 800 and 810 having a high refractive index on a material having a low refractive index. A slot 820, which is a nano size space, may be provided between wave guides having a high refractive index to allow an optical signal to travel through the slot.

When the optical signal is transmitted in a portion having a relatively low refractive index by using the slot wave guide, an electric field intensity and a light intensity that cannot be obtained in a wave guide for advancing the optical signal in a portion where a high refractive index is high can be obtained.

In order for an optical signal to progress in the wave guide, a mode must be formed, and the volume of such a mode is called a modal volume. In the case of using the slot wave guide, the modal volume is made small because the optical signal propagates through the slot structure. When the modal volume is made small, the optical signal has only a fundamental mode, and there is no loss of the optical signal when the optical signal travels through the wave guide in this basic mode.

If there is no loss of the optical signal in the ring resonator structure, the Q-factor of the sensor is high. That is, in the case of using the slot wave guide structure, the loss of the optical signal is reduced, thereby improving the Q-factor of the sensor.

9 is a conceptual diagram showing in three dimensions the structure of a slot wave guide according to an embodiment of the present invention.

구조를 가질 수 있다. 하지만, 이에 한정되지 않고, 상대적으로 굴절률이 낮은 구조로 광신호가 진행하는 저굴절 광 도파로 구조인 경우, 다른 구조 및 다른 물질을 사용한 구조 역시 본 발명의 실시예에 따른 슬롯 웨이브 가이드에 포함될 수 있다. Referring to the top of Figure 9, the slot wave guide is

It may have a structure. However, the present invention is not limited thereto, and in the case of a low refractive optical waveguide structure in which an optical signal travels with a relatively low refractive index structure, another structure and a structure using another material may also be included in the slot wave guide according to an embodiment of the present invention.

The optical signal formed in the waveguide having the low refractive index may travel along the waveguide having the low refractive index by total reflection. When the optical signal of the TE (Tranverse Electric) mode is incident, discontinuity of the electric field (E-field) is generated, the optical signal proceeds to a material of low refractive index. A strong electric field (E-field) formed in a slot with a relatively low refractive index allows the material to be measured to be bonded to the sensor with high adhesion. The stability and reliability of the is improved.

9 also shows the slot wave guide. Unlike the slot wave guide structure at the top of FIG. 9, the optical signal may travel through a gap formed in parallel between the high refractive waveguides. In order to use the slot wave guide structure at the bottom of FIG. 9, the input light has to enter the TM mode and proceed.

Hereinafter, an embodiment of the present invention discloses a ring resonator, a ring resonator sensor, and a micro resonator sensor using the slot wave guide structure shown in the upper part of FIG. 9 for convenience of description, but the lower part of FIG. 9 is omitted from the nature of the present invention. The ring resonator, ring resonator sensor and micro resonator sensor using the slot wave guide structure disclosed in the above are also included in the scope of the present invention.

10 is a conceptual diagram illustrating a principle in which an electric field is formed in a slot wave guide.

10 is a conceptual diagram illustrating a conventional wave guide structure in which an optical signal is advanced by using a portion having a high refractive index.

Referring to the left figure of FIG. 10, when the TE mode optical signal is applied to the wave guide, the electric dipole moment is aligned and the charge in the wave guide is canceled as a result and charges are formed on the dielectric outer surface.

10 is a conceptual diagram illustrating a slot wave guide structure for propagating an optical signal using a portion having a low refractive index.

Referring to the right diagram of FIG. 10, when the TE mode optical signal is applied to the wave guide, charges in the dielectric are canceled, and only surface charge remains. When these dielectrics face at narrow intervals, such as slots, Coulomb's law forces the power in inverse proportion to the square of the distance between charges, so that the smaller the slot width, the stronger the force between charges and, as a result, a stronger electric field. . Thus, the measuring counterparts reacting to charges, such as biomolecules, are attracted to the strongly generated electric field and the sensitivity of the sensor to detect the material to be measured can be improved.

FIG. 11 is a conceptual diagram illustrating an electric field generated when an optical signal is advanced through a low refractive waveguide.

Referring to FIG. 11, the left side of FIG. 11 illustrates an electric field generated when the TE mode and TM mode optical signals are advanced through the slot wave guide when the slab is formed perpendicular to the slot, and the right side of FIG. When the slab is formed at a certain angle with the slot, it shows the electric field generated when the TE mode and TM mode optical signal is advanced through the slot wave guide. It can be seen that the electric field is strongly formed in the slot when the traveling optical signal is in the TE mode, and the strong electric field is formed in the slab when the traveling optical signal is the TM mode.

12 is a graph for comparing the sensitivity of the sensor when the optical signal is advanced in the TE mode and TM mode.

Referring to FIG. 12, the upper two graphs compare the change of effective index values according to the TE mode and the TM mode, and the lower two graphs show the wavelength sensitivity according to the TE mode and the TM mode. This is a graph comparing the sensitivity.

The gas is inserted into the slot and the change in the effective index of the slot according to the gas concentration and its effect are calculated.

When the optical signal is in the TE mode, as shown in FIG. 11, the optical signal is applied to the slot having a relatively low refractive index, and when the optical signal is the TM mode, the optical signal is applied to the slab.

Referring to the upper two graphs showing the change of the effective refractive index according to the TE mode and the TM mode of FIG. 12, it can be seen that the change of the effective refractive index is about three times larger than the TM mode in the TE mode. If the change in the effective refractive index is large, the sensor can recognize the change in the optical signal relatively accurately, thereby improving the stability and reliability of the sensor. The x-axis value of the graph represents the width of the slab. It can be seen that the narrower the slab structure, the larger the change in the effective refractive index.

The two graphs at the bottom of FIG. 12 show changes in wavelength sensitivity according to the TE mode and the TM mode. In the case of the TE mode, the maximum value of the wavelength sensitivity is about 2 times larger than the TM mode, and the minimum value has a sensitivity difference of about 0.1 when normalized. The x axis of the graph represents the width of the slab and the g value represents the width of the slot.

That is, referring to FIG. 12, the slot wave guide structure (two graphs on the left side of FIG. 12) in which the optical signal proceeds through the portion having a low refractive index as the TE mode is used. It can be seen that the wave guide structure (two graphs on the right side of FIG. 12) has a higher change in wavelength sensitivity and a larger effective index. As a result, when the optical signal propagates through the low refractive waveguide, the refractive index is decreased. The performance of the sensor can be improved compared to the case where the optical signal proceeds through the high portion.

In the method of detecting a measurement target, a resonance peak according to an index change generated when a biochemical material adheres to an evanescent wave when an optical signal progresses through a wave guide having a high refractive index. Detect changes in). However, since the slot wave guide through which the optical signal propagates through the low refractive index generates the main wave of the optical signal in the slot and detects the change in the refractive index of the main wave, the sensitivity is improved than the conventional wave guide structure. In addition, since the stronger the electric field is formed, the confinement effect of the optical signal is maximized, so that the slot wave guide can detect the minute change of the material to be measured relatively easily than the conventional wave guide structure, thereby increasing the sensitivity of the sensor.

13 is a conceptual diagram illustrating a method of detecting a material to be measured by using a structure using a slot wave guide according to an embodiment of the present invention.

FIG. 13 is a conceptual diagram illustrating a structure of detecting a material to be measured by using a dissipation wave when a conventional wave guide is used instead of a slot wave guide, and the right view of FIG. 13 is a measurement target using a slot wave guide. A conceptual diagram showing the structure of detecting a substance.

Referring to the left figure of FIG. 13, the structure of proceeding the optical signal by using the portion of the conventional high refractive index is used to change the change according to the reaction of the measurement target material and the dissipation wave using the evanescent wave region of the optical signal. Can be detected. On the other hand, referring to the right drawing of FIG. 13, in the case of the slot wave guide, the measurement target material may be detected using the main area of the optical signal formed in the slot area.

That is, in the case of the structure using the slot wave guide, since the interaction between the main region of the optical signal and the material to be measured is detected, the width of the characteristic change is greater than that of the conventional wave guide structure using the dissipation wave to obtain information on the material to be measured. This can be relatively large and the sensitivity of the sensor can be improved.

14 and 15 are conceptual views illustrating a total reflection mirror and a slot wave guide for changing a path of an optical signal traveling through a slot wave guide according to an embodiment of the present invention.

Referring to FIG. 14, a propagation path of an optical signal may be changed through a structure including a triangular resonant cavity structure 1410 and a parallel slot wave guide 1430 parallel to the total reflection mirror 1420.

FIG. 15 illustrates a structure including a rectangular resonant cavity structure 1510 and a parallel slot wave guide 1530 parallel to the total reflection mirror 1520, rather than the triangular resonant cavity structure illustrated in FIG. 14. It shows a method of changing the progress path of the optical signal through.

The conventional slot wave guide structure and the horizontal slot wave guide structure are used to change the path of the optical signal, but the wave guide structure for changing the path of the optical signal according to an embodiment of the present invention is a vertical slot wave guide. 1440 and the horizontal slot wave guide 1450 may further include a parallel slot wave guide 1430 inclined 45 degrees to face the total reflection mirror in parallel. The width of the parallel wave guide 1430 may be equal to the width of the horizontal slot wave guide and the vertical slot wave guide.

In the following embodiments of the present invention, an angle formed by the vertical slot wave guide 1440, the horizontal slot wave guide 1450, and the parallel wave guide 1430 to ideally change the propagation path of the optical signal is assumed to be 45 degrees. Unless departed from the essence of the present invention, the angle formed by the parallel wave guide 1430 of the vertical slot wave guide 1440 and the horizontal slot wave guide 1450, respectively, may be an individual value having a constant error at 45 degrees and accordingly, The total reflection mirror 1420 and the parallel wave guide 1430 may not be completely parallel. In addition, the width of the parallel wave guide 1430 may also have a value having a constant error range with the width of the horizontal slot wave guide 1450 and the vertical slot wave guide 1440.

In addition, the horizontal slot wave guide and the vertical slot wave guide are used because the structure of the optical path changing means and the wave guide for advancing the optical signal are perpendicular to each other. If the wave guide is not perpendicular to the optical path changing means, the term is vertical. The slot wave guide and the horizontal slot wave guide may be used as a term meaning a wave guide for injecting incident light as a light path changing unit and a wave guide for emitting an optical signal reflected from the light path changing unit.

The total reflection mirror 1420 may direct the optical signal traveling through the vertical wave guide 1440 to the horizontal wave guide 1450, and the total reflection mirror 1420 may be inclined at 45 degrees from the z axis to form a parallel wave guide ( 1430 in parallel. The distance between the total reflection mirror 1420 and the parallel slot wave guide 1420 can be changed by adjusting dx.

The total reflection mirror 1420 may be formed in a structure in consideration of Goos-Hnchen characteristics.

구조이고, 굴절률이 높은 부분은

이고 굴절률이 낮은 부분은

인 경우를 가정할 수 있다. 삼각형 캐버티(1410)는 이등변 삼각형 형태로서

와

의 길이를

로 두고, 수직 웨이브 가이드(1440)의 광신호가 입력되는 부분에서부터 원점까지의 거리와 원점에서 수평 웨이브 가이드(1450)의 광신호가 출력되는 부분까지의 거리는 각각

와

라고 둘 수 있다.
According to one embodiment of the invention, the slot wave guide is

Structure, the part with high refractive index

And the low refractive index

Can be assumed. Triangle cavity 1410 is an isosceles triangle

Wow

The length of

The distance from the portion where the optical signal of the vertical wave guide 1440 is input to the origin and the distance from the origin to the portion where the optical signal of the horizontal wave guide 1450 is output are respectively

Wow

It can be said.

Bending efficiency (BE) is a value for the loss that occurs when the optical signal changes the traveling path. The higher the bending efficiency, the smaller the loss of the optical signal.

16 is a graph showing the bending efficiency (BE) in terms of MOI (Model Overlap Integral) according to an embodiment of the present invention.

일 때,

이고, 사각형 캐버티를 포함한 구조일 경우

일 때,

의 값을 가진다. 이러한 수치는 기존의 전반사 구조를 이용하여 광신호의 진행 경로를 변경하는 경우 벤딩 효율치 보다 증가된 값으로서 광신호가 진행 경로를 변경시 기존의 구조를 사용한 경우 보다 광신호의 손실이 적다. 최적치는 구스-한센(Goos-Hnchen) 특성을 추가적으로 고려한 값이 될 수 있다.Referring to FIG. 16, when the optimal bending efficiency value is a structure including a triangular cavity

when,

, If the structure contains a rectangular cavity

when,

Has the value This value is higher than the bending efficiency value when the path of the optical signal is changed by using the conventional total reflection structure. When the optical signal is changed by the path, the optical signal has less loss than the conventional structure. The optimal value may be a value in consideration of the Goos-Hnchen characteristic.

FIG. 17 is a conceptual view illustrating a total reflection mirror considering Goos-Hnchen characteristics according to an embodiment of the present invention.

The Goose-Hansen characteristic is a phenomenon in which the optical signal is reflected from the surface of the material when the light signal is reflected from the materials having different indices, and then enters and reflects the surface depth (Skin Depth). This means that the light is moved laterally by a certain length than the reflected optical signal and reflected. Therefore, the optical path changing means may be designed in consideration of the reflection characteristic of the optical signal.

In the following embodiments of the present invention, the slot wave guide and the optical path changing means may include a parallel slot wave guide structure and the optical path changing means including a triangular or square resonant cavity, as shown in FIGS. 14 and 15. The scope of the present invention is not limited to the structure shown in FIGS. 14 and 15, but the traveling path of the optical path may be changed only by the vertical slot wave guide and the horizontal slot wave guide without the parallel slot wave guide.

18 is a conceptual diagram illustrating a ring resonator included in a ring resonator sensor according to an embodiment of the present invention.

18 illustrates a ring resonator using a slot wave guide structure having a different shape, respectively.

For the sake of convenience, the ring resonator shown in the upper part of FIG. 18 is disclosed, but the ring resonator shown in the lower part of FIG. 18 is also included in the scope of the present invention.

Referring to FIG. 18, the ring resonator 1800 may include an optical coupling waveguide 1810, a first winding waveguide 1820, a second winding waveguide 1830, a first optical path changing unit 1840, and a second optical path changing. And a means 1850 and a third light path changing means 1860.

The optical coupling waveguide 1810, the first winding waveguide 1820, and the second winding waveguide 1830 included in the ring resonator 1800 may be formed as slot wave guides.

In the following embodiments of the present invention, the term winding waveguide may be used as a concept including at least one of the first winding waveguide 1820 and the second winding waveguide 1830, and the light path changing means may be a first light path changing means. 1840, the second optical path changing unit 1850, and the third optical path changing unit 1860 may be used as a concept.

The optical coupling waveguide 1810, the first winding waveguide 1820, and the second winding waveguide 1830 have the optical coupling waveguide 1810 as the base, and the first winding waveguide 1820 and the second winding waveguide 1830 are the same. It can have the shape of a triangle made into length.

However, a triangular shape having the same length as the first winding waveguide 1820 and the second winding waveguide 1830 is an embodiment, and the first winding waveguide 1820 and the second winding waveguide 1830 have a predetermined length. In combination with the optical coupling waveguide 1810 may have a triangular shape. In other words, the first winding waveguide 1820 and the second winding waveguide 1830 may have a predetermined length, as long as they do not depart from the essence of the present invention.

The optical coupling waveguide 1810 may include an optical coupling region for coupling the optical signal incident to the ring resonator 1800 through the driving waveguide that propagates the optical signal from the light source. The optical coupling region uses optical directional couplers using vertical coupling and horizontal coupling, or multimode interferometers (MMIs) to transmit optical signals from the primary waveguide to optical coupling waveguides (1810). ) Can be used.

19 is a conceptual diagram illustrating a method of coupling an optical signal to an optical coupling waveguide according to an embodiment of the present invention.

19 is a conceptual diagram illustrating a method of coupling an optical signal to an optical coupling waveguide using a horizontal coupling technique among directional coupling methods. 19 shows an optical signal coupling method using a vertical coupling method of the directional coupling method, and the lower part of FIG. 19 uses a multi-mode interferometer (MMI) to couple an optical signal to an optical coupling waveguide. A conceptual diagram illustrating the method.

However, the directional coupling method and the coupling method using the multi-mode interferometer are only some embodiments of the method of coupling the optical signal to the optical coupling waveguide, and the optical signal is coupled to the optical coupling waveguide, unless it deviates from the nature of the present invention. The method is not limited to the embodiment described above.

The winding waveguides 1820 and 1830 may be coupled to the light coupling waveguide 1810 at a predetermined angle. Since the lengths of the first winding waveguide 1820 and the second winding waveguide 1830 may have the same length, each of the first winding waveguide 1820 and the second winding waveguide 1830 may be coupled to the optical coupling waveguide 1810. The angle may have the same value.

However, the shape of a triangle having the same length as the first winding waveguide 1820 and the second winding waveguide 1830 is one embodiment of the present invention, and the first winding waveguide 1820 and the second winding waveguide 1830 are The first coupling waveguide 1820 and the second winding waveguide 1830 may be combined with the optical coupling waveguide 1810 and may have a triangular shape by being combined with the optical coupling waveguide 1810 with a predetermined length difference. May have a predetermined difference. That is, the angle between the first winding waveguide 1820, the second winding waveguide 1830, and the optical coupling waveguide 1810 may have a predetermined difference, unless it deviates from the essence of the present invention.

At the point where the optical coupling waveguide 1810 and the first winding waveguide 1820 meet, a first optical path changing means 1840 capable of changing the path of the optical signal is coupled to the optical coupling waveguide 1810. The path of the optical signal may be changed so that the received optical signal may travel through the first winding waveguide 1820.

At the point where the first main waveguide 1820 and the second main waveguide 1830 meet, a second optical path changing unit 1850 is coupled to transmit an optical signal transmitted through the first main waveguide 1820 to the second main waveguide 1830. Can be progressed through

At the point where the second winding waveguide 1830 and the optical coupling waveguide 1810 meet, the third optical path changing means 1860 is coupled so that the optical signal propagated through the second winding waveguide 1830 passes through the optical coupling waveguide 1810. Can proceed.

The optical path changing means may be implemented as a means capable of changing the path of the optical signal, such as a total reflection mirror, but the optical path changing means is not limited to the total reflection mirror and is not totally reflected in the essence of the present invention. Other means for changing the path of the optical signal other than the mirror may also be used as the optical path changing means. In addition, the Goos-Hnchen characteristic may be taken into consideration when implementing the optical path changing means.

According to an embodiment of the present invention, the sensor unit for detecting the measurement target material may be located in at least one of the first winding waveguide 1820, the second winding waveguide 1830, and the second optical path changing means 1850. have.

Referring to the drawing of FIG. 18, when using the slot wave guide, the sensor units 1870-1 and 1870-2 included in at least one of the first winding waveguide 1820 and the second winding waveguide 1830 are slots. All or part of the waveguide can be used to detect the material being measured. That is, the material to be measured may be detected by using the front surface of the slot wave guide, or the material to be measured may be detected by using only a part of the slot wave guide.

The sensor units 1870-1 and 1870-2 included in the first winding waveguide 1820 and the second winding waveguide 1830 may react through the ring resonator 1800 when the material to be measured reacts with the optical signal. The effective refractive index of the optical signal is changed, and the resonance condition of the ring resonator 1800 is changed according to the change of the effective refractive index, so that the information of the output optical signal is changed. Information about the material to be measured may be provided based on the changed information of the optical signal.

The sensor unit 1870-3 included in the second optical path changing unit 1850 may detect a change in the measurement target material by using surface plasmon resonance (SPR).

In addition, the sensor unit 1870-3 included in the second optical path changing unit 1850 may detect a change in the measurement target material using an evanescent wave instead of surface plasmon resonance.

The sensor unit 1870-3 may be located on a surface opposite to a surface on which the optical signal of the second optical path changing unit 1850 is reflected.

When reacting with a receptor reacting with the measurement target material and the measurement target material located in the sensor unit 1870-3, the resonance condition of the optical signal incident on the second optical path changing means 1850 causes surface plasmon resonance to change. The resonance angle of the optical signal is changed. As the resonance angle changes, the wavelength value of the optical signal having the minimum power changes. If there is a resonant angle or wavelength value with minimum power, as well as other changed information due to the reaction of the material to be measured with the receptor, information about at least one of the changed information can be obtained to provide information on the change of the material to be measured. Can be.

20 is a conceptual diagram illustrating a metal film structure for using the surface plasmon resonance phenomenon included in the sensor unit 1870-3 included in the second optical path changing unit 1850 according to an embodiment of the present invention. to be.

Referring to FIG. 20, the metal film may be formed of a single metal film structure 2000 made of one metal such as gold (Au), and a multi-metal film structure 2010 made of gold (Au) and silver (Ag).

Gold (Au) and silver (Ag) are one embodiment for implementing metal films and sensors using a single metal film structure or multiple metal film structures using a combination of metals other than gold (Au) and silver (Ag). We can also implement wealth.

21 is a graph illustrating resonance collinearity according to a metal film structure according to an embodiment of the present invention.

Referring to FIG. 21, two graphs at the top are resonance curves in the case of a single metal film structure, and two graphs at the bottom are graphs showing the resonance curves in the multiple metal film structure. It can be seen that the multilayer metal film structure has a sharper resonance condition and a sharp phase change. That is, when having a multi-metal film structure, the sensitivity of the sensor unit can be further improved.

22 is a conceptual diagram illustrating a ring resonator included in a ring resonator sensor according to another exemplary embodiment of the present invention.

Referring to FIG. 22, the ring resonator 2200 may include an optical coupling waveguide 2010, a first winding waveguide 2020, a second winding waveguide 2030, a third winding waveguide 2040, and a first optical path changing means ( 2050, the second optical path changing unit 2060, the third optical path changing unit 2070, and the fourth optical path changing unit 2080.

The optical coupling waveguide 2010 and the circumference waveguide 2020, 2030, and 2040 may have a slot wave guide structure.

In the following embodiments of the present invention, the term winding waveguide may be used as a concept including at least one of a first winding waveguide 2020, a second winding waveguide 2030, and a third winding waveguide 2040, and changing a light path. The means may be used as a concept including at least one of the first light path changing means 2050, the second light path changing means 2060, the third light path changing means 2070, and the fourth light path changing means 2080. Can be.

The optical coupling waveguide 2010, the first winding waveguide 2020, the second winding waveguide 2030, and the third winding waveguide 2040 have the optical coupling waveguide 2010 as the base, and the first winding waveguide 2020 and the first winding waveguide 2020. The second winding waveguide 2030 and the third winding waveguide 2040 may have a quadrangular shape having the remaining sides.

The optical coupling waveguide 2010 may include an optical coupling region for coupling the optical signal incident through the driving waveguide to the ring resonator 2200. The optical coupling region uses optical directional couplers using vertical coupling and horizontal coupling, or multimode interferometers (MMIs) to transmit optical signals from the primary waveguide to optical coupling waveguides (2010). ) Can be used.

However, the directional coupling method and the coupling method using the multi-mode interferometer are only some embodiments of the method of coupling the optical signal to the optical coupling waveguide, and the optical signal is coupled to the optical coupling waveguide, unless it deviates from the nature of the present invention. The method is not limited to the embodiment described above.

At the point where the optical coupling waveguide 2010 and the first winding waveguide 2020 meet, a first optical path changing means 2050 for changing the path of the optical signal is coupled to the optical waveguide for coupling to the optical coupling waveguide 2010. The path of the optical signal may be changed so that the received optical signal may travel through the first winding waveguide 2020.

At the point where the first main waveguide 2020 and the second main waveguide 2030 meet, a second optical path changing unit 2060 is coupled to transmit an optical signal transmitted through the first main waveguide 2020 to the second main waveguide 2030. May be performed.

At the point where the second main waveguide 2030 and the third main waveguide 2040 meet each other, the third optical path changing means 2070 is coupled to transmit an optical signal transmitted through the second main waveguide 2030 to the third main waveguide 2040. May proceed to.

At the point where the third winding waveguide 2040 and the optical coupling waveguide 2010 meet, the fourth optical path changing means 2080 is coupled so that the optical signal propagated through the third winding waveguide 2040 may proceed to the optical coupling waveguide 2010. Can be.

The optical path changing means may be implemented as a means capable of changing the path of the optical signal, such as a total reflection mirror, but the optical path changing means is not limited to the total reflection mirror and is not totally reflected in the essence of the present invention. Other means for changing the path of the optical signal other than the mirror may also be used as the optical path changing means.

According to an embodiment of the present invention, the sensor unit for detecting the measurement target material may be located in at least one of the first winding waveguide 2020, the second winding waveguide 2030, and the third winding waveguide 2040.

Referring to FIG. 22, when the slot wave guide is used, the sensor unit 2090-1 included in at least one of the first winding waveguide 2020, the second winding waveguide 2030, and the third winding waveguide 2040. 2090-2 and 2090-3 may detect the substance to be measured using all or part of the slot wave guide.

In the following embodiments of the present invention, a ring resonator sensor and a sensor including a triangular ring resonator are described for convenience of description, but the scope of the present invention of the triangular ring resonator sensor is not limited to the above-described quadrangular shape. Ring resonator sensors and sensors, including the ring resonator of may also be included in the scope of the present invention.

FIG. 23 is a conceptual diagram illustrating a ring resonator sensor using a Mach-Zehnder Interferometer according to another embodiment of the present invention.

Referring to FIG. 23, the ring resonator sensor 2300 may include a ring resonator 2310, a Mach-gender interferometer 2320, and a flow path part (not shown).

The Mach-gender interferometer 2320 is an embodiment of a main waveguide that receives an optical signal from a light source and transmits an optical signal to the ring resonator 2310. It is also possible to form the main waveguide, which is a wave guide for transmitting an optical signal to the 2310.

At least one of the Mach-gender interferometer 2320 and the ring resonator 2310 may have a slot wave guide structure.

The flow path part may not be included in the configuration of the ring resonator sensor 2300 when the measurement target material is a gas or when the measurement target material may be measured using the wave guide of the ring resonator 2310 without passing through the flow path part.

The ring resonator 2310 may be implemented in the same configuration as described above with reference to FIG. 18 or 22.

The flow path part may be used to flow the material to be measured and couple it to the sensor part of the ring resonator 2310. The flow path part may proceed through a predetermined space in which a measurement target material having fluidity such as gas or liquid is provided in the flow path part. The flow path part may be implemented in a form for contacting the measurement material with the sensor part when the sensor part for detecting the material to be measured exists in the main waveguide, and the sensor part is opposite to the surface on which the optical signal of the optical path changing means is reflected. When formed, it may be implemented in a form for contacting the material to be measured to the sensor unit provided on the opposite side of the surface on which the optical signal of the optical path changing means is reflected.

24 is a conceptual diagram illustrating a ring resonator sensor including a flow path part according to an exemplary embodiment of the present invention.

Referring to FIG. 24, a conceptual diagram of the upper left portion of FIG. 24 illustrates that a flow path part is formed so that a material to be measured may contact the first main waveguide and the second main waveguide.

The flow path unit 2400 may include a measurement target material storage unit 2410, a measurement target material arrival unit 2420, and a controller 2430.

The configuration including the measurement target material storage unit 2410, the measurement target material arrival unit 2420, and the control unit 2430 is an embodiment of the flow path unit 2400, and the flow path unit according to the embodiment of the present invention may measure the measurement target material. In the case of shedding role is included in the scope of the present invention.

The controller 2430 may control the moving speed of the measurement target material flowing through the flow path 2400 by applying a voltage to the measurement target material storage unit 2410 and the arrival unit 2420 of the measurement target material.

In order to move the substance to be measured and control the rate at which the substance is moved, not only voltage but also other physical pressures or biological principles such as capillary phenomenon can be used, so that the controller 2430 moves and speeds the movement of the substance to be measured. In the case of controlling, the controller may control a variable other than the voltage.

In addition, when a plurality of substances are mixed in the measurement target material by applying a voltage to the measurement target material through the control unit 2430, the mixture may be measured by the ring resonator sensor by varying the moving speed of the mixture at different times. It is possible.

 The following flow path part may include components such as the measurement target material storage part 2410, the measurement target material arrival part 2420, and the control part 2430, but for convenience of description, only the location of the flow path part is illustrated in FIG. 24. do.

The conceptual diagram of the upper right part of FIG. 24 illustrates a flow path portion in which the material to be measured flows into each of the first and second winding waveguides and exits through one passage.

The conceptual diagram of the lower left portion of FIG. 24 illustrates that a flow path part is implemented so that only the opening of one winding waveguide can pass through the measurement target material so that only the opening of the winding waveguide can be detected using only one opening of the winding waveguide.

The conceptual diagram of the lower right part of FIG. 24 illustrates a flow path part formed to flow a measurement target material into the sensor part when the sensor part is formed on the side opposite to the surface on which the optical signal of the second optical path changing means is reflected.

The shape of the flow path part shown in FIG. 24 is only one embodiment of implementing the flow path part in the present invention, and the shape of the flow path part is not limited to the shape of FIG. 24. If the flow path portion is implemented in the form of the nature of the present invention, that is to contact the material to be measured in the sensor unit it may be included in the scope of the present invention. In the case of a ring resonator sensor including a rectangular ring resonator, the shape of implementing the flow path part in the sensor part may be different from that of FIG. 24 because the shape of the flow path part is different from that of the triangular ring resonator. Can be.

Referring to FIG. 23, the Mach-gender interferometer may include a first arm 2320-1 and a second arm 2320-2 and have a slot wave guide structure.

Although the Mach-gender interferometer according to an embodiment of the present invention is composed of two arms, the Mach-gender interferometer may be implemented to include two or more arms. Hereinafter, in the embodiment of the present invention, for convenience of description, a Mach-gender interferometer having two arms is disclosed, but a Mach-gender interferometer having two or more arms may also be included in the embodiment of the present invention.

The Mach-gender interferometer 2320 may be implemented with a first arm 2320-1 that can be coupled with the optical coupling waveguide of the ring resonator and a second arm 2320-2 that is not coupled with the optical coupling waveguide of the ring resonator. have. Hereinafter, when using the self-referenced waveguide to be described later, the second arm 2320-2 may also have a form coupled to the optical coupling waveguide of the ring resonator.

The first arm 2320-1 and the second arm 2320-2 may have different shapes. According to an embodiment of the present invention, in order to increase the sensitivity of the sensor, the optical signal output from the first arm 2320-1 and the optical signal output from the second arm 2320-2 are powered at a specific wavelength. The magnitudes of V are similar and should have a phase difference close to 180 degrees. Ideally, the optical signals output from the first arm 2320-1 and the second arm 2320-2 should have the same power and have a 180 degree phase difference. However, the first arm 2320-1 and the second arm 2320-1 have a phase difference of 180 degrees. In the implementation of the arm 2320-2, the power of the optical signal from both arms has a constant range of error values, or the phase of the optical signal from both arms has a constant range of error values at a phase difference of 180 degrees. May have

Hereinafter, it is assumed that the phase difference of 180 degrees of the optical signal emitted from both of the Mach Gender genders and the same power value of the optical signal emitted from both the Machender genders will be described in an embodiment of the present invention. The case where the optical signals from both arms have a constant error range at 180 degrees of phase difference and the optical signals from both arms of the Mach-gender interferometer have a certain error range at the same power value may also be included in the scope of the present invention.

The magnitude of the optical signal power coming out of the first arm 2320-1 and the magnitude of the optical signal power coming out of the second arm 2320-2 may be adjusted to have the same magnitude of power in the part of detecting the output optical signal. Can be.

Since the magnitude of the optical signal output from the first arm 2320-1 is an optical signal output through the ring resonator, the loss of the optical signal may be larger than that of the second arm 2320-2. Therefore, in order to adjust the magnitudes of the optical signals output from both arms to the same size, a gain of the optical signal generated in the first arm 2320-1 is gained or output from the second arm 2320-2. Attenuation may be applied to the optical signals to make the magnitudes of the optical signals output from the first arm 2320-1 and the second arm 2320-2 the same.

25 is a conceptual diagram illustrating a ring resonator sensor using a self referencing waveguide according to an embodiment of the present invention.

The ring resonator sensor using the magnetic reference waveguide may include a magnetic reference waveguide 2500, a first measuring unit 2510, and a second measuring unit 2520.

At least one of the magnetic reference waveguide 2500, the first measuring unit 2510, and the second measuring unit 2520 may have a structure including a slot wave guide structure.

The differential amplifier 2530 and the signal processor 2540 may be included when implementing the micro resonator sensor using the ring resonator sensor.

The self-referencing waveguide 2500 includes a first waveguide 2500-1 and a second waveguide 2500-2, and the first waveguide 2500-1 includes an asymmetrical measurement of an actual measurement target material through a sensor unit. A ring resonator sensor having a Mach-gender structure is implemented and the second waveguide 2500-2 includes a ring resonator sensor that outputs an optical signal when there is no material to be measured, instead of measuring the material to be measured. The optical signal traveling in the second waveguide 2500-2 may serve as a reference optical signal for comparing with the optical signal exiting from the first waveguide 2500-1.

In the following embodiments of the present invention, for convenience of description, a ring resonator sensor using a magnetic reference waveguide using a Mach-gender interferometer is disclosed. However, the ring resonator sensor is not a Mach-gender interferometer. May also be implemented. That is, not only the structure using the Mach-gender interferometer but also the shape using the waveguide are included in the scope of the present invention.

The first measuring unit 2510 may be implemented in the form of a ring resonator sensor including a Mach-gender structure, and the first measuring unit 2510 contacts the sensor unit implemented in the ring resonator with an optical signal to measure an optical signal. You can output

The second measurement unit 2520 may be implemented in the form of a ring resonator sensor including a Mach-gender structure, and unlike the first measurement unit 2510, only the test solution having no actual measurement target material and not the actual measurement target material ring An optical signal may be output by contacting the sensor unit implemented in the resonator.

The differential amplifier 2530 may be used to amplify an optical signal output from the first measuring unit 2510 and an optical signal output from the second measuring unit 25 to amplify a difference between relative optical signals.

The signal processor 2530 may be used to analyze the optical signal output from the first measurement unit 2510 and the signal output from the second measurement unit 2520.

When the magnetic reference waveguide 2500 is used, the second measurement unit 2520 generates a second reference signal that can be analyzed relatively to the optical signal output from the first measurement unit 2510, and thus, Regardless of temperature change, the refractive index and concentration of the material to be measured can be accurately measured. Systems using self-referencing waveguides do not require a separate temperature holding device, which can be miniaturized when manufacturing ring resonator sensors.

FIG. 26 is a conceptual view illustrating a micro resonator sensor implemented by directly implementing a ring resonator sensor according to another embodiment of the present invention.

Referring to FIG. 26, the micro resonator sensor 2600 may include a light source 2610, an optical coupler 2615, a wavelength filter 2620, a rotation polarizer 2630, and a photo detector 2640. Photo Detector), a ring resonator sensor 2650, it may be configured to include a fine signal detection device (2660).

The micro resonator sensor 2600 may be implemented as a photonic integrated circuit integrated on a single wafer.

The light source 2610, the optical coupler 2615, the wavelength filter 2620, and the polarization rotation polarizer 2630 are light sources 2610, the optical coupler 2615, an optical coupler, and the wavelength. At least two components of the filter 2630 and the polarization rotation polarizer 2630 may be combined to be implemented as one module. That is, a form in which the light source 2610, the optical coupler 2615, the wavelength filter 2620, and the rotation polarizer 2630 are implemented as at least one module is within the scope of the present invention. Included. In addition, at least one of a light source 2610, an optical coupler 2615, a wavelength filter 2620, and a polarization rotation polarizer 2630 is excluded unless it departs from the essence of the present invention. It may also be implemented as a light source of. In the following embodiments of the present invention, for convenience of description, which is not implemented as a module, the disclosure is divided into components.

The light source 2610 may be implemented as a module capable of generating an optical signal such as a laser diode (LD), a light emitting diode (LED), and a semiconductor optical amplifier (SOA).

The optical coupler 2615 may serve to couple the optical signal generated by the light source 2610 to the wavelength filter 2620.

The wavelength filter 2620 may filter to selectively use only an optical signal of a predetermined wavelength region among the optical signals generated from the light source 2610. Since an optical signal output from a light source unit such as an LED or SOA generates an optical signal in a wide wavelength region, the wavelength filter 2620 may be used to selectively filter only an optical signal in a region necessary for detecting a measurement target material.

The rotating polarizer 2630 may be used to inject only the optical signal having the transverse magnetic (TM) mode or the transverse electric (TE) mode to the ring resonator sensor 2650 among the optical signals incident through the wavelength filter 2620.

The TE mode can be used to detect the material to be measured using the total reflection mirror of the ring resonator sensor, and the TM mode can be used to detect the material to be measured using the opening of the ring resonator sensor. That is, the traveling mode of the optical signal may be changed by the rotating polarizer 2630 according to a portion of the ring resonator sensor that detects the material to be measured.

The ring resonator included in the ring resonator sensor 2650 may be implemented in the same configuration as described above with reference to FIG. 18 or 22. The ring resonator sensor 2650 may be implemented by including a Mach-gender interferometer, a ring resonator, and a flow path part. The Mach-Gender interferometer may be implemented by varying the structure of each arm of the Mach-Gender interferometer so that the phase difference between the first and second arms of the Mach-Gender interferometer is 180 degrees. .

The fine signal detection apparatus 2660 may be included in the micro resonator sensor to attenuate the influence of noise generated inside the circuit.

The micro resonator sensor 2600 may be implemented without the fine signal detection device 2660 as necessary.

The microsignal detection device may include components such as a variable crystal oscillator (VCO), a frequency mixer, a phase locked loop, a filter, and a detector. Some of these components may not be included as needed.

The variable crystal oscillator generates a reference signal having the same frequency as the signal to be detected and sends it to the frequency mixer. Here, the variable crystal oscillator is one example included in the fine signal detection apparatus, and may generate a reference signal using a function generator or the like and send it to the frequency mixer. The frequency mixer receives a reference signal from the detection target signal and the variable crystal oscillator, outputs a mixed signal of each frequency to the filter, and extracts only a specific component from the signal received through the frequency mixer. The detector may selectively detect at least one signal to be detected by using at least one of the extracted specific component signals.

In the following embodiments of the present invention, for convenience of description, a structure using a Mach-gender interferometer is used as the main waveguide shape, but a single waveguide type main waveguide structure may also be used.

The flow path part included in the ring resonator sensor 2650 may be configured to include an input part for flowing a material to be measured in the form shown in FIG. 26 and an output part passing through a sensor part included in the ring resonator. The flow path part may be implemented in the shape shown in FIG. 24 as well as the flow path part shown in FIG. 26. However, the shape of the flow path part shown in FIG. 24 is only one embodiment for implementing the flow path part, and the shape of the flow path part is not limited to the shape of FIG. 24. The nature of the present invention, that is, in the case of implementing the form to contact the material to be measured in the sensor unit may be included in the scope of the present invention. In addition, the ring resonator sensor 2650 may not include a flow path part depending on the measurement target material.

The optical detector 2640 detects the optical signal output from the ring resonator sensor and detects the optical signal output from the ring resonator so that information related to the material to be measured may be provided based on the information of the optical signal output. have.

27 is a conceptual diagram illustrating a micro resonator sensor having a plurality of ring resonator sensors according to another exemplary embodiment of the present invention.

The plurality of ring resonator sensors 2700 may be used to perform a plurality of detections using one measurement target material. For example, one blood sample can be used to detect multiple disease factors. However, the present invention is not limited to the purpose of the plurality of detections, but a single factor detection or one ring resonator may be used as a structure used to generate a reference signal without flowing a measurement target material.

The light source 2710, the optical coupler 2715, the wavelength filter 2720, the polarization rotation polarizer 2730, and the fine signal detection device 2750 may have the same configuration as that of FIG. 26. have.

A plurality of ring resonator sensors can be used to obtain a plurality of measurement results. The ring resonator included in the plurality of ring resonator sensors includes a triangular ring resonator, in which a sensor unit is formed at an opening, a triangular ring resonator is formed on the opposite side of the optical path changing unit, and a triangular form including a Mach-gender interferometer. Ring resonator sensor with sensor part in opening, triangular ring resonator sensor including Mach-gender interferometer, sensor part created on opposite side of total reflection mirror, triangular ring resonator sensor using SPR phenomenon, SPR phenomenon At least one of various ring resonators, such as a triangular ring resonator sensor including the Mach-gender structure, may be provided in the plurality of ring resonator sensors. That is, it may be implemented in the form of a ring resonator sensor using a slot wave guide according to an embodiment of the present invention.

The flow path portion may be implemented to have a different shape individually according to the position and shape of the sensor portion of the ring resonator including a plurality of ring resonator sensors.

Although described with reference to the embodiments above, those skilled in the art will understand that the present invention can be variously modified and changed without departing from the spirit and scope of the invention as set forth in the claims below. Could be.

Claims (22)

In a ring resonator using a slot wave guide,
An optical coupling waveguide coupling the optical signal generated from the light source to the ring resonator;
A main waveguide for propagating the optical signal coupled from the optical waveguide at the ring resonator; And
And optical path changing means for changing an optical path of the optical signal coupled to the optical waveguide in the main waveguide, wherein at least one of the optical waveguide and the main waveguide is a slot wave guide. Ring resonator using a slot wave guide characterized in that. The ring resonator of claim 1, wherein the ring resonator comprises the slot wave guides.
Ring resonator using a slot wave guide, characterized in that the sensor unit for detecting the material to be measured in at least one of the main waveguide and the optical path changing means. The method of claim 1, wherein the ring resonator,
A ring resonator using a slot wave guide, characterized in that the triangular shape having the optical coupling waveguide as the base side and the circumferential waveguide as both sides. The method of claim 1, wherein the ring resonator,
The ring resonator using a slot wave guide, characterized in that the optical waveguide is the base side and the main waveguide is a rectangular shape having the remaining three sides. In the ring resonator sensor using a slot wave guide,
A main waveguide receiving an optical signal from a light source and transferring the optical signal to a ring resonator; And
And a ring resonator receiving the optical signal received from the main waveguide and resonating at a specific wavelength of the optical signal, wherein at least one of the main waveguide and the ring resonator is a slot wave guide. Resonator sensor. According to claim 5, The ring resonator sensor using the slot wave guide,
The ring resonator sensor using a slot wave guide, characterized in that it further comprises a flow path for delivering a material to be measured to the ring resonator. The method of claim 6, wherein the flow path unit,
A controller for controlling mobility of the measurement target material;
A measurement material storage unit which is a starting point of movement of the measurement material; and
The ring resonator sensor of claim 1, further comprising a slot wave guide further comprising a measurement target material arrival point of the movement of the target material. The method of claim 5, wherein the ring resonator,
An optical coupling waveguide coupling the optical signal generated from the light source to the ring resonator;
A main waveguide for propagating the optical signal coupled from the optical waveguide at the ring resonator; And
And a light path changing means for changing a traveling path of the optical signal to propagate the optical signal coupled by the optical coupling waveguide in the main waveguide. The method of claim 8, wherein the ring resonator,
Ring resonator sensor using a slot wave guide, characterized in that the sensor unit for detecting the measurement target material is provided in at least one of the winding waveguide and the optical path changing means. The method of claim 9, wherein the sensor unit provided in the optical path changing means,
Ring resonator sensor using a slot wave guide, characterized in that for detecting the target material using the surface plasmon resonance phenomenon. The method of claim 9, wherein the sensor unit provided in the optical path changing means,
Ring resonator sensor using a slot wave guide, characterized in that for detecting the material to be measured using a multi-metal film structure. The method of claim 8, wherein the ring resonator,
Ring resonator sensor using a slot wave guide, characterized in that the triangular shape of the optical coupling waveguide as the base side and the circumferential waveguide both sides. The method of claim 8, wherein the ring resonator,
A ring resonator sensor using a slot wave guide, characterized in that the rectangular wave shape of the optical coupling waveguide as the base side and the circumferential waveguide to the remaining three sides. The method of claim 6, wherein the main waveguide,
Ring resonator sensor using a slot wave guide, characterized in that at least one of the arms included in the Mach-gender interferometer is an asymmetric Mah-gender interferometer having a different shape. The method of claim 14, wherein the asymmetric Mach-gender interferometer,
The slot wave guide, characterized in that the optical signal output from the first arm of the Mach-Gender interferometer and the optical signal emitted from the second arm of the Mach-Gender interferometer are equal in magnitude and 180 degrees out of phase. Ring resonator sensor. In the micro resonator sensor having a ring resonator sensor using a slot wave guide,
A light source unit generating an optical signal and transmitting the optical signal to the ring resonator sensor;
A ring resonator sensor receiving an optical signal from the light source unit and having a ring resonator including a slot wave guide; And
And a ring resonator sensor using a slot wave guide including a photo detector for detecting an optical signal emitted from the ring resonator sensor. The method of claim 16, wherein the light source unit,
A light source for generating an optical signal;
An optical coupler coupling the optical signal generated from the light source;
A wavelength filter for filtering an optical signal having a predetermined wavelength among the optical signals generated by the light source; And
Micro-resonator having a ring resonator sensor using a slot wave guide including a rotating polarizer for polarizing the optical signal filtered through the wavelength filter in at least one of a TM (Tranverse Magnetic) mode and a TE (Tranverse Electric) mode sensor. The method of claim 17, wherein the ring resonator sensor,
A main waveguide receiving an optical signal from a light source and transferring the optical signal to a ring resonator; And
And a ring resonator receiving the optical signal received from the main waveguide and resonating at a specific wavelength of the optical signal, wherein at least one of the main waveguide and the ring resonator is a slot wave guide. Micro resonator sensor with resonator sensor. The method of claim 18, wherein the main waveguide,
Micro-resonator sensor with a ring resonator sensor using a slot wave guide, characterized in that at least one of the arms included in the Mach-gender interferometer is an asymmetric Mah-gender interferometer having a different shape. The method of claim 17, wherein the ring resonator sensor,
And at least one micro resonator sensor including a ring resonator sensor using the slot wave guide. 18. The micro resonator sensor of claim 17, further comprising a ring resonator sensor using a slot wave guide.
And a ring resonator sensor using a slot wave guide further comprising a fine signal detection device for attenuating noise present in the optical signal. 18. The micro resonator sensor of claim 17, further comprising a ring resonator sensor using a slot wave guide.
Micro-resonator sensor having a ring resonator sensor using a slot wave guide, characterized in that implemented as an integrated circuit.

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