KR101127680B1 - Apparatus for charged particle beam computed tomography using toroidal coils and method of the same - Google Patents

Abstract

By using a plurality of toroidal coils that do not affect the charged particle beam, the energy of the charged particle beam is reduced by the object to be measured, and the single layer is determined using the determined energy. Disclosed are a charged particle beam imaging apparatus and method for reconstructing an image and a three-dimensional image.

Charged particle beam, tomography, toroidal coil, toroidal coil, magnetic induction

Description

Apparatus and method for charged particle beam tomography using donut coils {APPARATUS FOR CHARGED PARTICLE BEAM COMPUTED TOMOGRAPHY USING TOROIDAL COILS AND METHOD OF THE SAME}

Embodiments of the present invention measures the amount of energy reduction caused by the object to be measured during the progress of the charged particle beam through at least one coil, and using the measured energy reduction amount distribution for the internal configuration of the material to be measured By imaging the image, at least one of the tomographic image and the three-dimensional image of the measurement object can be obtained.

The present invention is derived from the research carried out as part of the nuclear research base expansion project of the Ministry of Education, Science and Technology. [Task management number: 20090078723, Title: Demonstration and application of a 5mm resolution Compton camera (Development and development of Compton camera system Analysis application)].

The key to computed tomography (CT) is the precision of energy measurements for charged particle beams. In other words, depending on how precisely the energy is measured, the precision of the result according to CT imaging can be determined.

Unlike X-ray tomography, where X-rays are imaged using the degree of transmission in the material, CT is an imaging technique using energy absorption of the charged particle beam by the material.

In other words, X-ray tomography is based on X-ray measurement through the material. Therefore, even if the measurement efficiency is 100%, the image acquisition is difficult even if the density of the material is low, since it is difficult to distinguish between the amount of X-ray absorption and the background pollution source.

However, since the CT using the charged particle beam is based on the energy measurement of the charged particle beam passing through the material, it is possible to acquire an image even when the density of the measurement target is low.

In other words, the CT using the charged particle beam is low in density, and even when the energy change is small, the image can be obtained through the use of a measurement system with excellent energy resolution. Therefore, the accuracy of the measurement in the CT is very important.

Charged particle beam imaging apparatus according to an embodiment of the present invention is a beam irradiation unit for irradiating a charged particle beam (Charged Particle Beam) to the object to be measured, an energy change measuring unit for measuring the energy change of the irradiated charged particle beam, and The image acquisition unit may be configured to acquire an image of the measurement target object by using the measured energy change.

Charged particle beam imaging method according to an embodiment of the present invention comprises the steps of irradiating a charged particle beam (Charged Particle Beam) to the object to be measured, measuring the energy change of the irradiated charged particle beam, and the measured energy And using the change, acquiring an image of the measurement object.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In describing the present invention, when it is determined that detailed descriptions of related known functions or configurations may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. Terminology used herein is a term used to properly express a preferred embodiment of the present invention, which may vary according to a user, an operator's intention, or a custom in the field to which the present invention belongs. Therefore, the definitions of the terms should be made based on the contents throughout the specification. Like reference numerals in the drawings denote like elements.

1 is a view schematically illustrating a charged particle beam imaging apparatus 100 according to an embodiment of the present invention.

The charged particle beam imaging apparatus 100 according to an embodiment of the present invention uses three donut coils to reduce beam energy generated while the charged particle beams such as protons and heavy ions pass through the measurement object 103. It is a device to measure the distribution of the internal constituent material of the object by measuring the.

The charged particle beam imaging apparatus 100 according to the exemplary embodiment of the present invention may measure the energy of the incident particle of the charged particle beam and the charged particle beam generated while passing through the measurement target object 103. And a secondary coil 102 and a tertiary coil 104 behind the object to be photographed.

More specifically, in the charged particle beam imaging apparatus 100 according to an embodiment of the present invention, the charged particle beam irradiated from a source may include a first coil 101, a second coil 102, an object to be measured 103, And measuring energy decreasing while passing through the third coil 104 in order to reconstruct the tomographic image or the 3D image.

At this time, the energy of the charged particle beam irradiated from the source until the moment passing through the first coil 101 and the second coil 102 does not decrease, and passes the third coil 104 past the second coil 102. The energy of the charged particle beam passing may be reduced.

In other words, the measurement object 103 exists between the second coil 102 and the third coil 104, and the charged particle beam irradiated from the source has characteristics such as the density of the measurement object 103 and the like. Thereby reducing the speed.

The decrease in speed of the charged particle beam irradiated from the source can be directly related to the decrease in energy.

To this end, the charged particle beam imaging apparatus 100 should know the distance between the first coil 101 and the second coil 102, the distance between the second coil 102 and the third coil 104.

The charged particle beam imaging apparatus 100 measures the speed of the charged particle beam in the interval between the first coil 101 and the second coil 102 by using the known distance in order to measure the decreasing energy. It can be measured.

In addition, the charged particle beam imaging apparatus 100 may measure the speed in the section of the second coil 102 and the third coil 104 passing through the measurement object 103 by using the previously known distance. have.

Specifically, when the distance between the first coil 101 and the second coil 102 is divided by the flight time of the charged particle beam passing through the first coil 101 and the second coil 102, the first coil The speed of the charged particle beam may be determined in the section 101 and the second coil 102.

Similarly, when the distance between the second coil 102 and the third coil 103 is divided by the flight time of the charged particle beam passing through the second coil 102 and the third coil 103, the second coil 102 is used. ) And the speed of the charged particle beam in the section of the third coil 103 may be determined.

When the speed is used, energy in each section is calculated, and the charged particle beam imaging apparatus 100 compares the calculated energy, so that the charged particle beam passes through the measurement object object 103 and the second coil 102. The energy decreasing in the section of the third coil 103 can be calculated.

When the energy of decreasing the charged particle beam by the measurement object 103 is calculated, it may be determined that the reduced energy has been absorbed by the measurement object 103. That is, the incident energy of the charged particle beam passing through the first coil 101 and the second coil 102 before passing through the object to be measured 103, and the second coil 102 and the third coil 103. By comparing the transmission energy of the charged particle beam passing through, the energy absorbed by the measurement object 103 can be determined. In addition, the determined absorbed energy may be used to obtain at least one image from tomographic images and three-dimensional images of the object to be measured 103.

Acquisition of images is possible through the general method of acquiring tomographic images and 3D images by using the energy absorption measured using image reconstruction software.

The charged particle beam imaging apparatus 100 according to the exemplary embodiment may change the incident energy in consideration of characteristics such as the density of the measurement object 103.

In other words, the charged particle beam imaging apparatus 100 according to the embodiment of the present invention may increase the intensity of the charged particle beam irradiated to be photographed at a high resolution even in the case of the measurement object 103 having a high density. have.

In this case, the distance between the coils is very short, so the measurement of energy may be impossible due to the problem that the flight time is shorter than the threshold value.

Therefore, the charged particle beam imaging apparatus 100 according to an embodiment of the present invention may adjust the distance between each coil so that the flight time of the charged particle beam between each coil is greater than the time resolution of a circuit for processing a signal.

The object driving device 105 may move the object to be measured 103 up, down, left, and right to measure energy change at various angles.

That is, the object driving device 105 may move in the rotation direction or the vertical direction of the measurement object 103 to change the incident position of the charged particle beam for reconstruction of the 3D tomography image.

Due to these characteristic configurations, the charged particle beam imaging apparatus 100 according to an embodiment of the present invention may be used for imaging soft body tissues that are difficult to discriminate with conventional CT and X-ray tomography of body tissues during cancer treatment. Applicable to medical diagnostic techniques.

In addition, since low-density materials such as gas and liquid can be imaged, they can be applied to non-destructive inspection techniques such as imaging of hydrogen gas distribution in hydrogen fuel cells.

Charged particle beam imaging apparatus 100 according to an embodiment of the present invention can be applied to the field of cancer treatment technology using a charged particle beam that relies on theoretical calculation in recent years.

In addition, when the charged particle beam imaging apparatus 100 according to an embodiment of the present invention is commercially available for cancer treatment, a plurality of donut-shaped coils may be used to image characteristics in which the charged particle beam responds to body tissues. .

At this time, the charged particle beam imaging apparatus 100 according to an embodiment of the present invention is capable of high-resolution tomography of low-density material, and in that it can minimize the error of the arrival position of the charged particle beam in the body This can reduce the damage to normal tissues involved in cancer treatment.

2 is a block diagram illustrating in detail a charged particle beam imaging apparatus 200 according to an embodiment of the present invention.

The charged particle beam imaging apparatus 200 may include a beam irradiator 210, an energy change measurer 220, and an image acquirer 230.

The beam irradiator 210 may irradiate a charged particle beam to a measurement object.

The beam irradiator 210 according to an embodiment of the present invention may include a cyclotron accelerator, and irradiate the object to be measured with pulsed protons or heavy particles.

The energy change measuring unit 220 may measure an energy change of the irradiated charged particle beam.

The energy change measuring unit 220 may measure the energy change of the irradiated charged particle beam by using at least one coil.

Specifically, the at least one coil includes a first coil, a second coil, and a third coil, the energy change measuring unit 220 is the charged particle beam is the first coil, the second coil, the measurement The energy change occurring while sequentially passing through an object and the third coil may be measured.

For example, the energy change measuring unit 220 may measure a first flight time for the irradiated charged particle beam to fly in a section between the first coil and the second coil in order to measure the energy change. have.

In addition, the energy change measurement unit 220 may further measure a second flight time for the irradiated charged particle beam to reach the third coil through the object to be measured in the second coil.

Thereafter, the energy change measuring unit 220 may measure (determine) the amount of energy reduction in which the charged particle beam is irradiated by the measuring object using the measured first flight time and the second flight time. have. In addition, the energy change measuring unit 220 may measure the energy change based on the measured energy reduction amount.

The energy change measuring unit 220 will be described in more detail later with reference to FIG. 3.

Next, the image acquisition unit 230 may acquire an image of the measurement object by using the measured energy change.

The image acquirer 230 may calculate the energy absorbed by the measurement object by using the measured energy change. In addition, the image acquisition unit 230 may obtain at least one image from the tomographic image and the three-dimensional image of the measurement object by using the calculated absorbed energy.

Acquisition of an image in the present specification may be possible through a general method of acquiring tomographic images and three-dimensional images based on energy absorption measured using image reconstruction software, and since a well-known conventional technique may be applied, a detailed description thereof is omitted. .

3 is a block diagram for explaining in detail the energy change measurement unit 300 according to an embodiment of the present invention.

First, the energy change measuring unit 300 according to an embodiment of the present invention may measure the flight time before and after transmission of the charged particle beam by using a logic signal derived from each coil.

In addition, by dividing the distance between each coil by the measured flight time it is possible to calculate the speed of the charged particle beam in the section between the coil.

To this end, the energy change measuring unit 300 may include at least one coil 310, amplification and signal generator 320, at least one flight time measuring instrument 330, and the energy determination device 340. have.

At least one coil 310 generates an induced current caused by electromagnetic induction when the irradiated charged particle beam passes, and the first coil 311, the second coil 312, and the third coil 313 It may include.

The at least one amplification and signal generator 320 may amplify a signal based on the induced current generated by the at least one coil 310 and generate a logic signal informing the generation of the signal after noise cancellation. As shown in FIG. 3, the at least one amplification and signal generation discriminator 320 includes an amplification and signal generation discriminator 321, an amplification and signal generation discriminator 322, and an amplification and signal generation discriminator 323. It may include.

The at least one flight time measuring instrument 330 may measure the time for which the irradiated charged particle beams fly in sections divided into at least one coil 310 based on the generation of the signal. As shown in FIG. 3, the at least one flight time meter 330 may include a first flight time meter 331 and a second flight time meter 332.

For example, the first flight time measuring instrument 331 may measure a first flight time for the irradiated charged particle beam generated in a first section divided into a first coil 311 and a second coil 312. Can be.

In addition, the second flight time measuring instrument 332 may measure the second flight time of the irradiated charged particle beam generated in the second section divided into the second coil 312 and the third coil 313.

More specifically, the first flight time measuring instrument 331 measures the first flight time based on the induced current generated in the first coil 311 as the irradiated charged particle beam passes through the first coil 311. This can be determined by the start signal required to do so.

In addition, the first flight time measuring instrument 331 is required to measure the second flight time of the induced current generated in the second coil 312 as the irradiated charged particle beam passes through the second coil 312. Can be determined by the end signal.

The first flight time measuring device 331 determining the start signal and the end signal may determine the time that elapses from the time when the start signal occurs to the time when the end signal occurs as the first flight time.

As a specific example, it is assumed that the distance of the first section is S1 and the distance of the second section is S2, and the time at which the irradiated charged particle beam reaches the first coil 311 is t1, and the irradiated charged particle beam It can be assumed that the time for reaching the second coil 312 is t2 and the speed in the first section is v.

In this case, v may be determined by Equation 1 below.

[Equation 1]

Similarly, the second flight time measuring instrument 332 is required to measure the second flight time of the induced current generated in the second coil 312 as the irradiated charged particle beam passes through the second coil 312. Can be determined by the start signal.

In addition, the second flight time measuring instrument 332 transmits the induced current generated in the third coil as an end signal necessary for measuring the second flight time as the irradiated charged particle beam passes through the second coil 313. You can decide.

The second flight time measuring device 332 determining the start signal and the end signal may determine the time that elapses from the time when the start signal is generated to the time when the end signal is generated as the second flight time.

The energy determination device 340 may calculate incident energy and transmission energy of the charged particle beam with respect to the measurement object using at least one measured flight time.

In addition, the energy determination device 340 may determine the energy change by determining the energy absorbed by the measurement target object by using the calculated incident energy and transmission energy.

To this end, the energy determination device 340 may determine the energy of the charged particle beam in the first section using the determined first flight time.

The energy E of the charged particle beam may be determined through Equation 2 according to a relativistic energy formula.

[Equation 2]

In this case, m0 is the mass of the charged particles constituting the charged particle beam, c is the speed of light, v can be interpreted as the speed of the charged particle beam in the first section or the second section calculated above.

If the energy of the charged particle beam is smaller than the predetermined reference size, the energy E may be calculated by Equation 3. That is, the energy E may use Newton's kinetic energy formula, which is an approximation of Equation 2.

&Quot; (3) "

In this case, m0 is the mass of the charged particles constituting the charged particle beam, v may be interpreted as the speed of the charged particle beam in the first section or the second section calculated above.

That is, by measuring only the time that the charged particle beam passes a specific section, it is possible to determine the energy in a specific section for the charged particle beam.

The method of measuring the time that the charged particle beam passes by using a toroidal coil may use an induced current caused by magnetic induction.

According to Faraday's law of induction, current is generated by generating induced electromotive force at both ends of the coil due to the change of magnetic flux in the coil.

The toroidal coil may be formed by winding a hollow (vacuum or air) quartz tube in a donut shape to wind a copper wire on the quartz tube. In this case, the quartz tube may be replaced by a glass tube, and the copper wire may be replaced by an enamel wire.

When the charged particle beam passes through the center of the toroidal coil, the charged particle beam acts as if it is a current, which may cause a change in the magnetic field inside the quartz tube according to the relative position with the donut coil.

The electromotive force V induced in the toroidal coil may be calculated by Equation 4.

&Quot; (4) "

Where N is the number of times the coil is wound around the donut-shaped quartz tube, A is the size of the inner cross section of the quartz tube, I is the current caused by the charged particle beam, and F (r) is the quartz tube with respect to the position of the charged particle beam. The position function for any position in the interior, da, means a small area at any position inside the quartz tube.

The amplification and signal generation discriminator according to an embodiment of the present invention can measure the moment when the charged particle beam passes through each coil based on [Equation 4].

According to Equation 4, since the sign of before and after the charged particle beam passes through the center of the donut-shaped coil is changed, V = 0 is satisfied at the moment passing through the center of the donut-shaped coil.

Therefore, the amplification and signal discriminator according to an embodiment of the present invention can capture the moment when V = 0 by applying a zero-crossing method to the signal induced in the toroidal coil.

Amplification and signal discriminator according to an embodiment of the present invention will be described in detail with reference to FIG.

4 is a diagram illustrating an amplification and signal generator according to an embodiment of the present invention.

Referring to FIG. 4, the amplification and signal generation discriminator may include a differential amplifier 401, a high pass filter 402, and a comparator 403.

The differential amplifier 401 amplifies the signal generated from the toroidal coil with a predetermined gain, and the high pass filter 402 may remove low frequency noise from the amplified signal.

In addition, the comparator 403 may generate and output a logic signal corresponding to the signal from which the noise is removed.

The amplification and signal generator can reduce the measurement error generated during the measurement of the flight time. To this end, the amplification and signal generator can significantly reduce the electrical noise generated during the measurement of the flight time.

The toroidal coil acts as a kind of antenna, which also captures a variety of electrical noise, which must be removed to accurately capture the signal at the moment the charged beam passes through the donut coil.

The most potent of the electrical noise that can be picked up is the RF signal used to pulse the charged particle beam.

Fortunately, real signals have bandwidths above 100MHz, while RF signals have bandwidths below 100MHz. Therefore, the RF signal can be removed from the captured signal by passing the high pass filter 402 of 100MHz or more.

Since the electrical noise of 100MHz or more in the natural state is rare, the high pass filter 402 also helps to remove the electrical noise in the natural state.

In the present invention, the energy of the charged particle beam can be derived very precisely through the amplification and signal generation discriminator including the high pass filter 402. In addition, the energy of the derived very precise charged particle beam can be directly related to the acquisition of high quality CT images.

The amplification and signal generation discriminator may measure a time at which the charged particle beam passes through the center of the toroidal coil based on the generated logic signal.

The amplification and signal generation discriminator may capture a moment when V = 0 by applying a zero-crossing method through a comparator 403 to a signal induced in a donut-type coil. In addition, since the amplification and signal generation discriminator generates a logic signal selected by the comparator 403 at the time when V = 0, the time when the charged particle beam passes through the center of the toroidal coil can be measured. .

Referring to FIG. 3 again, after arranging two donut coils at regular intervals, when a charged particle beam passes through the center thereof, a logic signal is generated at each instant by the amplification and signal generator. At this time, the time interval of these two signals is the time taken for the charged particle beam to pass through the gap between the two coils.

In the present invention, the center of the primary coil and the secondary coil may be disposed in the path through which the charged particle beam travels.

In addition, by measuring the time taken while the charged particle beam is advancing the distance between the two coils to obtain the speed based on [Equation 1], the charged particle beam based on [Equation 2] or [Equation 3] Energy can be determined.

In the present invention, the energy after the charged particle beam has passed through the object is determined in the same manner as the incident energy of the charged particle beam using the primary and secondary coils, using the secondary and tertiary coils. You can decide.

Since the charged particle beam is incident on a point of the object, the image acquisition unit according to an embodiment of the present invention needs a process of scanning the object with the charged particle beam in order to obtain a tomographic image of the object.

To this end, the charged particle beam imaging apparatus according to an embodiment of the present invention may include a target object driving device for moving the measurement target object up, down, left, and right to measure energy changes at various angles of the measurement object. .

The object driving device according to the embodiment of the present invention moves and rotates the charged particle beam extraction device and the beam energy determination device 340 together for scanning the object to be measured, or moves only the object to be measured up and down, left and right and You can rotate it.

When the object driving device moves and rotates together with the beam energy determining device 340, the movement of the object to be measured may be minimized to obtain a high quality acquired image.

In addition, when the object driver drives only the object to be measured up, down, left and right, and rotates, the driving system may be simply implemented.

Image acquisition unit according to an embodiment of the present invention tomography and three-dimensional to use the energy absorption amount of the charged particle beam for each position and direction of the measurement object obtained through the scanning process in conventional X-ray tomography The image reconstruction algorithm can be used as it is.

Since the amount of measurement required by the image reconstruction algorithm of the conventional X-ray tomography is the amount of X-ray absorption for each position and direction of the object, in the present invention, the amount of energy absorption (reduction amount) of the charged particle beam is reduced instead of the amount of X-ray absorption. Can be replaced.

According to the present invention, by detecting a change in the magnetic field generated in the surrounding space as the charged particle beam passes by using a toroidal coil, the energy measurement error can be reduced without affecting the charged particle beam energy.

5 is a flowchart specifically illustrating a charged particle beam imaging method according to an embodiment of the present invention.

In the charged particle beam imaging method according to the exemplary embodiment of the present invention, a charged particle beam is irradiated to an object to be measured (step 501). In this case, the charged particle beam may include charged particles such as protons and heavy ions.

Next, the charged particle beam imaging method according to an embodiment of the present invention can measure the first flight time between the first coil and the second coil, the second flight time between the second coil and the third coil. (Step 502).

More specifically, the charged particle beam imaging method according to an embodiment of the present invention measures the first flight time for the irradiated charged particle beam to fly in the interval between the first coil and the second coil, The second flight time of the total particle beam passing through the measurement object from the second coil to the third coil may be measured.

In the charged particle beam imaging method according to the exemplary embodiment of the present invention, the amount of energy reduction of the charged particle beam may be determined in consideration of the measured first flight time and the second flight time (step 503).

In the charged particle beam imaging method according to the exemplary embodiment of the present invention, the energy change of the irradiated charged particle beam may be measured using the determined energy reduction amount (step 504).

More specifically, the charged particle beam imaging method according to an embodiment of the present invention, measuring the energy change that occurs while sequentially passing through the first coil, the second coil, the measurement object, and the third coil. can do.

The measured energy change may be measured using a change in speed in each section.

That is, by comparing the speed of the charged particle beam flying from the first coil to the second coil and the speed of the charged particle beam flying from the second coil to the third coil through the measurement object, The energy change can be measured.

Then, the charged particle beam imaging method according to an embodiment of the present invention can obtain an image for the measurement object by using the measured energy change (505).

Charged particle beam imaging method according to an embodiment of the present invention is implemented in the form of program instructions that can be executed by various computer means may be recorded on a computer readable medium. The computer readable medium may include program instructions, data files, data structures, etc. alone or in combination. Program instructions recorded on the media may be those specially designed and constructed for the purposes of the present invention, or they may be of the kind well-known and available to those having skill in the computer software arts. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tape, optical media such as CD-ROMs, DVDs, and magnetic disks, such as floppy disks. Magneto-optical media, and hardware devices specifically configured to store and execute program instructions, such as ROM, RAM, flash memory, and the like. Examples of program instructions include not only machine code generated by a compiler, but also high-level language code that can be executed by a computer using an interpreter or the like. The hardware device described above may be configured to operate as one or more software modules to perform the operations of the present invention, and vice versa.

As described above, the present invention has been described by way of limited embodiments and drawings, but the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined not only by the claims below but also by the equivalents of the claims.

1 is a view schematically illustrating a charged particle beam imaging apparatus according to an embodiment of the present invention.

2 is a block diagram illustrating in detail a charged particle beam imaging apparatus according to an embodiment of the present invention.

3 is a block diagram for explaining in detail the energy change measurement unit according to an embodiment of the present invention.

4 is a diagram illustrating an amplification and signal generator according to an embodiment of the present invention.

5 is a flowchart specifically illustrating a charged particle beam imaging method according to an embodiment of the present invention.

Claims (14)

A beam irradiator irradiating a charged particle beam to a measurement object; An energy change measuring unit measuring an energy change of the irradiated charged particle beam; And An image acquisition unit which acquires an image of the object to be measured using the measured energy change. Including, The energy change measuring unit, The charged particle beam imaging apparatus, characterized in that for measuring the energy change that occurs while the charged particle beam is sequentially passing through the first coil, the second coil, the object to be measured, and the third coil. delete delete The method of claim 1, The energy change measuring unit, Measuring a first flight time during which the irradiated charged particle beams fly in a section between the first coil and the second coil, Measuring a second flight time of the irradiated charged particle beam from the second coil to the third coil after passing through the measurement object; The energy reduction amount of the irradiated charged particle beam by the measurement object is determined by using the measured first flight time and the second flight time, and the energy change is measured based on the determined energy reduction amount. Charged particle beam imaging device. The method of claim 1, The energy change measuring unit, At least one coil generating an induced current by electromagnetic induction when the irradiated charged particle beam passes; At least one amplification and signal generation discriminator for amplifying a signal based on the induced current generated in the at least one coil and generating a logic signal informing the generation of the signal after noise cancellation; A time-of-flight meter based on the generation of the signal, measuring a time for which the irradiated charged particle beams fly in sections divided into the at least one coil; And The incident energy and transmission energy of the charged particle beam with respect to the measurement object are calculated using at least one measured flight time, and the energy absorbed by the measurement object is calculated using the calculated incident energy and transmission energy. Energy determination device for measuring energy change Charged particle beam imaging apparatus comprising a. The method of claim 5, The flight time measuring device, Measuring a flight time occurring in a section divided into a first coil and a second coil among the at least one coil, In accordance with the passage of the charged particle beam to be irradiated, the induction current generated in the first coil is a start signal for measuring the flight time, and the induction current generated in the second coil is required for measuring the flight time. Determined by a signal, Charged particle beam imaging apparatus, characterized in that for determining the time elapsed from the time when the start signal is generated to the time when the end signal occurs as the flight time. The method of claim 5, The image acquisition unit, Charged particle beam imaging device, characterized in that to obtain at least one image of the tomographic image and the three-dimensional image of the measurement object by using the energy absorbed by the measurement object. The method of claim 5, The at least one amplification and signal generation discriminator, A differential amplifier amplifies the generated signal with a predetermined gain A high pass filter for removing low frequency noise of the amplified signal; And Comparator for generating and outputting a logic signal corresponding to the signal from which the noise is removed Charged particle beam imaging apparatus comprising a. The method of claim 1, An apparatus for driving an object to move the object to be measured up, down, left and right so as to measure energy change at various angles of the object to be measured. Charged particle beam imaging device further comprises. The method of claim 5, The at least one coil is a charged particle beam imaging device, characterized in that the toroidal coil (toroidal coil). Irradiating a charged particle beam to the object to be measured; Measuring an energy change of the irradiated charged particle beam; And Acquiring an image of the object to be measured using the measured energy change; Including, Measuring the energy change of the irradiated charged particle beam, Measuring an energy change occurring while the charged particle beam sequentially passes through the first coil, the second coil, the measurement object, and the third coil Charged particle beam imaging method comprising a. delete The method of claim 11, Measuring the energy change, Measuring a first flight time for the irradiated charged particle beam to fly in a section between a first coil and a second coil; Measuring a second flight time for the irradiated charged particle beam to reach a third coil from the second coil through the object to be measured; Determining an amount of energy reduction of the irradiated charged particle beam by the measurement object using the first flight time and the second flight time; And Based on the determined amount of energy reduction, measuring the energy change Charged particle beam imaging method comprising a. A computer-readable recording medium having recorded thereon a program for performing the method of claim 11.

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