KR101124311B1 - Throttling structure for use in a fluid pressure device - Google Patents

Abstract

The present invention relates to a deceleration structure for use in a fluid pressure device. A nozzle passage 98 is formed between the primary side port 38 and the nozzle back pressure chamber 78. The nozzle passage 98 is provided with a reduction mechanism 106 composed of a plurality of orifice plates 104a to 104d. The orifice plates 104a to 104d have openings 102 having a diameter smaller than that of the nozzle passage 98. The outer periphery of the orifice plates 104a-104d is retained in the second body 34 by the seal member 108. In addition, the orifice plates 104a to 104d are spaced apart from each other at predetermined intervals along the extending direction of the nozzle passage 98.

Hydraulic device, deceleration structure

Description

THROTTLING STRUCTURE FOR USE IN A FLUID PRESSURE DEVICE}

The present invention relates to a deceleration structure for use in a fluid pressure device that can adjust the pressure of the pressure fluid in a fluid pressure device to which the pressure fluid is supplied and discharged.

As disclosed in Japanese Patent Application Laid-open No. Hei 10-198433, the present inventor proposes a pressure reducing valve used when supplying air at a desired set pressure from a pressure fluid source to a fluid pressure device. The pressure reducing valve is configured to supply the pressure fluid to the secondary side by reducing the pressure fluid on the primary side supplied from the pressure fluid supply source to a desired pressure corresponding to the fluid pressure device connected to the secondary side.

Recently, in a fluid pressure device such as a pressure reducing valve, there is a demand to reduce the consumption of pressure fluid in terms of both energy consumption reduction and cost reduction.

It is a general object of the present invention to provide a deceleration structure for use in a fluid pressure device which can reduce the consumption of the pressure fluid while preventing the blockage when the pressure fluid is circulated inside.

In the fluid pressure device having a body having a port to which the pressure fluid is supplied, the deceleration structure used to perform pressure control of the pressure fluid, the deceleration structure is an introduction chamber into which the pressure fluid is introduced, and A reduction mechanism for reducing the flow rate of the pressure fluid, having a communication path communicating between the introduction chamber and the port, and a plurality of flow paths provided in the communication path, the diameter smaller than the communication path, and through which the pressure fluid flows. And a plurality of flow paths are provided at predetermined intervals adjacent to each other along the flow direction of the pressure fluid.

The above and other objects, features and effects of the present invention will become more apparent from the following description taken in conjunction with the accompanying drawings showing preferred embodiments of the present invention by way of illustration.

According to the present invention, it is possible to provide a deceleration structure for use in a fluid pressure device capable of reducing the consumption of the pressure fluid while preventing clogging when the pressure fluid is flowed into the inside.

In Fig. 1, reference numeral 10 denotes a pressure reducing valve 10 to which a deceleration structure for use in a fluid pressure device according to the present invention is applied.

As shown in FIGS. 1 to 4, the pressure reducing valve 10 is connected to a body 12, a cover member 14 connected to a lower portion of the body 12, and an upper portion of the body 12. Bonnet 16, and the operating member 18 is installed to be rotatable on top of the bonnet (16).

The cover member 14 is a valve guide 22 for sealing and blocking the hole formed in the lower portion of the body 12 by the O-ring 20, and the hole formed in the upper portion of the valve guide 22 A valve body 24 fixed and supported by the valve body, a damper 26 coupled to and supported by a groove formed in the upper portion of the valve guide 22 and fixed to the valve body 24 to the outside, and the damper 26. ) And a washer 28 that is fixed outwardly to the valve body 24 at the top, and an elastic seal 30 that is fixed outwardly to the valve body 24 at the top of the washer 28. The valve body 24 is provided so as to be displaceable along the axial direction (arrows A1 and A2 directions) under the elastic action of the damper 26 made of an elastic material such as rubber or the like.

The body 12 includes a first body portion 32 coupled to the cover member 14, a second body portion 34 disposed on the first body portion 32, and the second body portion 32. It consists of a third body portion 36 which is disposed on another upper portion of the body portion (34). The first body portion 32, the second body portion 34 and the third body portion 36 are integrally assembled together by screws (not shown).

On both sides of the first body portion 32, primary side ports (ports) 38 connected to a pressure fluid supply source (not shown) and secondary side ports 40 connected to a fluid pressure device (not shown) are formed, respectively. do. A communication path 42 for communicating these is formed between the primary side port 38 and the secondary side port 40.

In addition, a sheet 44 is formed inside the first body portion 32 so as to face the communication path 42. The valve body 24 is seated by the seal 30 with respect to the seat 44, whereby the communication state between the primary side port 38 and the secondary side port 40 is interrupted.

On the other hand, the primary side port 38 and the secondary side port 40 are in communication with each other by the displacement in the direction in which the valve body 24 is separated from the seat 44 (arrow A2 direction).

The second body part 34 is provided with an exhaust port 46 opened to one side thereof, and the third body part 36 is opened to one side thereof so as to communicate with the outside of the third diaphragm chamber 80. The bleed port 50 is formed.

The first diaphragm 54 is sandwiched between the first body portion 32 and the second body portion 34 by the first holding member 52. In addition, the second diaphragm 58 is sandwiched between the second body 34 and the third body 36 by the second holding member 56.

In addition, a first diaphragm chamber 48 communicating with the secondary side port 40 is provided below the first diaphragm 54, and between the first diaphragm 54 and the second diaphragm 58. The second diaphragm chamber 60 is installed in communication with the exhaust port 46.

In addition, a first holding member 52 which is coupled to the edge of the valve body 24 is provided at the center of the first diaphragm 54. The first holding member 52 is formed with a through hole 62 for communicating the first diaphragm chamber 48 and the second diaphragm chamber 60.

In addition, a stopper member 64 facing the first diaphragm chamber 48 and protruding from the central portion of the first body portion 32 is formed on the same axis as the seat 44 of the first holding member 52. It acts to regulate displacement.

Between the third body portion 36 and the bonnet 16, the third diaphragm 72 and the fourth diaphragm, which are held at predetermined intervals by the disk member 68 and the pressing member 70, are held. A diaphragm pressing member 66 is installed together with 74). In this case, a first spring 76 is disposed on one end surface of the disk member 68, and the third diaphragm 72 and the fourth diaphragm 74 are formed of the first spring 76. It is pressed downward (in the direction of arrow A2) by the elastic force.

Between the second body portion 34 and the third body portion 36, a nozzle back pressure chamber (introduction chamber) 78 defined by the second diaphragm 58 and the third body portion 36. ) Is installed. The third diaphragm chamber 80 is installed at the center of the third body portion 36.

Further, below the third diaphragm chamber 80, a nozzle 86 having a nozzle hole 84 is disposed in the boss portion 82 protruding in a cylindrical shape. The nozzle back pressure chamber 78 and the third diaphragm chamber 80 communicate with each other through the hole penetrating through the lower portion of the third body portion 36 and the nozzle hole 84.

In addition, a flapper mechanism 88 is provided above the nozzle 86 in the third diaphragm chamber 80. The flapper mechanism 88 is provided with a ball 90, a retaining ring 92 for holding the ball 90 in the boss portion 82, and an agent fitted between the ball 90 and the nozzle 86. And two springs 94. The second spring 94 biases the ball 90 toward the fixing ring 92 under its action. As a result, the ball 90 is maintained in contact with the fixing ring 92.

The flapper mechanism 88 includes a pressing member 70 and a hydraulic member 96. The pressing member 70 includes a recessed portion at a lower end thereof, and the hydraulic member 96 is embedded in the recessed portion. The hydraulic member 96 is in point contact with the ball 90 and is formed of a material (eg, steel) having the same hardness or greater hardness as the ball 90 made of steel balls.

In the state where the ball 90 is maintained in the boss portion 82, the pressing member 70 is pressed downward and moved by the elastic force of the first spring 76 (arrow A2 direction). The ball 90 is displaced toward the nozzle 86 while compressing the second spring 94, and as a result, the nozzle hole 84 of the nozzle 86 is closed. On the other hand, when the pressing state of the pressing member 70 by the first spring 76 is released, the pressing member 70 is moved upward by the elastic action by the second spring 94 to the ball ( 90 is spaced apart from the nozzle 86.

As shown in FIG. 3, the nozzle back pressure chamber 78 communicates with the primary side port 38 through the nozzle passage (communication passage) 98. The nozzle passage 98 is in contact with the outer circumferential side of the primary side port 38 and extends along the axial direction (arrow A1 and A2 directions) of the second and third bodies 34 and 36, and It is connected to the communication hole (opening part) 100 which is bent in the radial direction within the three body parts 36 and communicates with the nozzle back pressure chamber 78. The nozzle passage 98 includes a plurality of (for example, four) orifice plates 104a to 104d, and the flow rate of the pressure fluid circulating through the nozzle passage 98 can be adjusted to a predetermined flow rate. Speed reduction mechanism 106 is provided.

The orifice plates 104a to 104d constituting the reduction mechanism 106 include openings (euro) 102 having a diameter smaller than the communication path at the center portion thereof, and are formed in a thin disk shape, and the circumference thereof It is fixed to the second body portion 34 by an annular seal member 108. The orifice plates 104a to 104d are provided on the same axis in the nozzle passage 98 while being spaced apart from each other at predetermined intervals. That is, the orifice plates 104a to 104d are arranged in a multistage fashion along the extending direction of the nozzle passage 98.

Then, the pressure fluid supplied from the primary side port 38 to the nozzle passage 98 flows through the openings 102 formed in the orifice plates 104a to 104d, and the nozzle back pressure chamber ( 78).

On the other hand, a feedback passage 112 is provided between the fourth diaphragm chamber 110 and the secondary side port 40 formed between the third diaphragm 72 and the fourth diaphragm 74, The fourth diaphragm chamber 110 and the secondary side port 40 may communicate with each other. The feedback passage 112 is provided on the opposite side from the nozzle passage 98 centering on the valve body 24.

The operation member 18 includes a handle 114 freely rotatable on the bonnet 16, a shaft 116 rotatably supporting the handle 114, and the handle 114 and the shaft ( Lock nut 118 for fixing the position of the 116, and nut 120 and washer 122 for sandwiching a bracket (not shown). At one end of the handle 114, a receiving member 124 is coupled to the first spring 76 and presses the first spring 76 in the direction of arrow A2. The receiving member 124 is pressed toward the body 12 by the axial displacement of the shaft 116 in accordance with the rotation of the handle 114.

The pressure reduction valve 10 to which the deceleration structure used for the fluid pressure device in this invention is applied is comprised basically as mentioned above. Next, the operation and the effect will be described.

First, a pressure fluid supply source (not shown) is connected to the primary side port 38 by a tube (not shown), etc., while driving to the secondary side port 40 under the action of supplying a pressure fluid such as a cylinder. Connect a fluid pressure device.

After the preparation work is completed, the gap between the ball 90 and the nozzle 86 constituting the flapper mechanism 88 is set without rotation of the handle 114. That is, the elastic force of the first spring 76 is not acted, while the elastic force of the second spring 94 is acted on the ball 90, so that a predetermined distance between the nozzle 86 and the ball 90 is applied. Is maintained (see FIG. 2).

In this case, the pressure fluid supplied to the primary side port 38 flows to the communication hole 100 through the openings 102 of the orifice plates 104a to 104d provided in plural from the nozzle passage 98. The pressure fluid is introduced into the nozzle back pressure chamber 78 and is introduced into the third diaphragm chamber 80 through a gap between the nozzle 86 and the ball 90. In addition, the pressure fluid introduced into the third diaphragm chamber 80 is discharged from the bleed port 50 into the atmosphere.

In detail, the pressure fluid flowing through the nozzle passage 98 passes through the opening 102 of the orifice plate 104a provided on the most upstream side, and flows to the adjacent orifice plate 104b. At this time, since the diameter (D) of the opening 102 is smaller than the diameter of the passage of the nozzle passage 98, a pressure loss occurs when the pressure fluid flows to reduce the flow rate of the pressure fluid. do. Then, the pressure fluid having the reduced flow rate flows in the order of the orifice plate 104b, the orifice plate 104c, and the orifice plate 104d toward the downstream side, whereby the effective cross-sectional area is further reduced and the pressure fluid is reduced. Is supplied to the nozzle back pressure chamber 78.

As a result, the deceleration mechanism 106 comprising the plurality of orifice plates 104a to 104d is provided, and the pressure fluid is supplied to the nozzle back pressure chamber 78 through the orifice plates 104a to 104d. The flow rate can be reduced as compared with a conventional fluid pressure device that does not include the reduction mechanism 106.

During the bleeding state as described above, the handle 114 is rotated in a predetermined direction, and the pressing member 70 moves downward through the disk member 68 by the elastic force of the first spring 76 (arrow). In the direction of A2). As a result, the ball 90 is displaced in the direction away from the fixing ring 92 (arrow A2 direction) against the elastic force of the second spring 94, so that the ball 90 is the nozzle The nozzle hole 84 is closed by contacting the nozzle hole 84 of 86 (see Fig. 4).

As a result, the pressure (nozzle back pressure) of the nozzle back pressure chamber 78 rises, and the second diaphragm 58 is pressed in the direction of arrow A2 under the action of back pressure from the nozzle 86. The second diaphragm 58, the first diaphragm 54, and the valve body 24 are integrally displaced in the direction of the arrow A2, so that the valve body 24 is spaced apart from the seat 44.

As a result, the communication path 42 is opened, and the primary side port 38 and the secondary side port 40 communicate with each other, and the pressure of the pressure fluid in the secondary side port 40 increases.

On the other hand, when the pressure of the pressure fluid in the secondary side port 40 rises above the set pressure value, the pressure fluid in which the pressure rises presses the first diaphragm 54 upward (in the direction of arrow A1), It is introduced into the fourth diaphragm chamber 110 by the feedback passage 112. As a result, the fourth diaphragm 74 is pressed in the direction of arrow A1 against the elastic force of the first spring 76 by the pressure of the pressure fluid, and thus, the disk member 68 and the pressing member ( 70) displaces in the direction of arrow A1.

At this time, since the ball 90 is displaced in the direction of arrow A1 by the elastic force of the second spring 94, the ball 90 constituting the flapper mechanism 88 is spaced apart from the nozzle 86 ( 2). As a result, the pressure fluid in the nozzle back pressure chamber 78 passes through the gap between the nozzle 86 and the ball 90, and passes through the bleed port 50 and is released into the atmosphere. As a result, the nozzle back pressure in the said nozzle back pressure chamber 78 falls very quickly.

In this manner, the first diaphragm 54 and the second diaphragm 58 rise in the direction of the arrow A1 due to the rapid decrease in the back pressure of the nozzle 86, and the end of the valve body 24. Is spaced apart from the first holding member (52). The valve body 24 is displaced in the direction of the arrow A1 by the elastic force of the damper 26 to seat the seat 44. Therefore, the through-hole 62 of the first holding member 52, which has been blocked by the valve body 24, is opened, and the pressure fluid whose pressure rises in the secondary side port 40 passes through the through-hole. The hole 62 is introduced into the second diaphragm chamber 60. Thereafter, the pressure fluid is discharged from the exhaust port 46 to the outside.

Subsequently, the mutual separation distance L of the orifice plates 104a to 104d constituting the reduction mechanism 106 and the flow rate of the pressure fluid that the orifice plates 104a to 104d flow through the openings 102 and The relationship between the following will be briefly described with reference to FIG.

As can be understood from Fig. 5, the effective cross-sectional area can be gradually reduced as the relative separation distance L of the adjacent orifice plates 104a to 104d is set larger. After the separation distance L reaches a predetermined range, the decrease in the flow rate stops and remains substantially constant. That is, for example, when the separation distance L between the orifice plate 104a and the orifice plate 104b is small, the pressure fluid decelerated by the opening 102 of the orifice plate 104a on the upstream side. Is continuously introduced into the opening 102 of the orifice plate 104b without expanding to the passage diameter of the nozzle passage 98. Therefore, sufficient deceleration effect by the orifice plate 104b is not obtained.

On the contrary, when the distance L between the orifice plate 104a and the orifice plate 104b is largely secured, the pressure fluid decelerated by the opening 102 of the orifice plate 104a is once Since it expands to the passage diameter of the nozzle passage 98 and flows again through the opening 102 of the orifice plate 104b, the synthetic effective cross section is appropriately reduced.

Subsequently, the distance diameter ratio L / D between the mutual separation distance L of the orifice plates 104a to 104d constituting the reduction mechanism 106 and the diameter D of the opening 102 is reduced, The relationship with the reduced flow rate (ΔQ) of the pressure fluid in the case where the mechanism is not provided will be briefly described with reference to FIG.

As can be understood from FIG. 6, by setting the above-mentioned distance diameter ratio L / D large, it is possible to gradually decrease the flow rate of the pressure fluid and increase the decrease flow rate ΔQ. Specifically, by setting the relation between the separation distance L and the opening diameter D so that (L / D) is about 20 or more, the reduction flow rate ΔQ of the pressure fluid can be maximized. have.

In the above-described manner, according to the present embodiment, the nozzle passage 98 communicating the primary side port 38 and the nozzle back pressure chamber 78 includes the plurality of orifice plates 104a to 104d. The reduction mechanism 106 is provided. The orifice plates 104a to 104d are disposed in a straight line along the nozzle passage 98, and a pressure fluid is passed through the openings 102 formed in the central portions of the orifice plates 104a to 104d. Thereby, the pressure fluid flowing through the nozzle passage 98 flows in sequence through the openings 102 of the orifice plates 104a to 104d spaced apart from each other at predetermined intervals, thereby allowing the nozzle passage 98 to flow. It is possible to reduce the effective cross-sectional area between a). As a result, the consumption of pressure fluid is preferably reduced, and energy saving can be promoted, and at the same time, the operating cost of the fluid pressure device can be reduced.

In general, in the case of reducing the consumption amount of the pressure fluid used in the prior art fluid pressure device including a pressure reducing valve having a single control plate, the diameter of the control plate is made smaller, thereby reducing the flow rate of the pressure fluid. It can be imagined. However, when the diameter of the control plate is made small, there is a fear that clogging may occur due to dust or the like contained in the pressure fluid.

In contrast, in the present embodiment, a plurality of orifice plates 104a to 104d constituting the reduction mechanism 106 are provided in the nozzle passage 98 on the same axis, and the pressure fluid is passed through the opening 102. The flow rate of the pressure fluid can be reduced step by step by passing through one by one. Therefore, the diameter D of the opening 102 can be set larger as compared with the case where the diameter of the single control plate is small. As a result, clogging of the opening 102 is suppressed by dust or the like contained in the pressure fluid, and the holding cycle of the pressure reducing valve 10 (fluid pressure device) having the reduction mechanism 106 can be extended. In addition, it is possible to reduce the maintenance work required for the fluid pressure device. In other words, it is possible to improve the maintenance characteristics of the pressure reducing valve 10.

In the pressure reducing valve 10 described above, the case where the orifice plates 104a to 104d are arranged in the nozzle passage 98 at a predetermined interval on the same axis has been described. However, the present invention is not limited to such a feature.

For example, as shown in FIG. 7A, a plurality of speed reduction holes 130a to 130d may be directly provided in the nozzle passage 98. In this case, the deceleration holes 130a to 130d are disposed on the axis line of the nozzle passage 98, respectively, and are formed in the center of the wall portion 132 spaced apart from each other at predetermined intervals along the axis direction. In this way, by directly installing the plurality of reduction holes 130a to 130d with respect to the nozzle passage 98, the reduction mechanism is configured as compared with the case where the orifice plates 104a to 104d are provided. The number of parts can be reduced, and the number of installation steps can be reduced. As shown in FIG. 7B, the plurality of speed reduction holes 140a to 140d provided in the nozzle passage 98 can be arranged so as to be offset from each other so as to be perpendicular to the axis line of the nozzle passage 98. Incidentally, when the deceleration holes 140a to 140d are offset (eccentric) from each other in this manner, the deceleration holes 140a to 140d do not need to be spaced apart from each other along the axial direction.

For example, as shown in FIG. 8, the deceleration mechanism 156 in a 1st modification can be applied instead of the deceleration mechanism 106 in this embodiment mentioned above. In the first modification, a single orifice plate 104a is provided in the nozzle passage 98 in the second body portion 34 and extends in the radially inward direction from the third body portion 36. In the nozzle passage 98, a plurality of orifice blocks 152a to 152c having a reduction hole 150 are provided in the center thereof, and the orifice blocks 152a to 152c are biased toward the communication hole 100 side. Has a third spring 154.

The reduction mechanism 156 includes a plurality (for example, three) of orifice blocks 152a to 152c. The orifice blocks 152a to 152c are formed in a cylindrical shape having an outer diameter corresponding to the inner diameter of the nozzle passage 98. The deceleration hole 150 whose one end side has a small diameter is opened in each of the orifice blocks 152a to 152c. In the orifice blocks 152a to 152c, the portions having the small diameter of the deceleration hole 150 are the same as the communication hole 100 side, that is, the downstream side of the pressure fluid flowing through the nozzle passage 98. An orifice block 152a disposed on an axis and positioned upstream from the communication hole 100 and positioned upstream, and a plug 158 mounted at an opening end of the nozzle passage 98; The three springs 154 are fitted. As a result, the plurality of orifice blocks 152a to 152c are always kept pressed against the communication hole 100 side by the elastic action of the third spring 154.

Then, the pressure fluid supplied to the nozzle passage 98 flows through the opening 102 of the orifice plate 104a, and then from the deceleration hole 150 of the orifice block 152a disposed on the most upstream side. It is supplied from the communication hole 100 to the nozzle back pressure chamber 78 via the deceleration hole 150 of each orifice block 152b and 152c.

9, the deceleration mechanism 200 in 2nd modification can be applied instead of the deceleration mechanism 106 in this embodiment mentioned above. The deceleration mechanism 200 is a plug in which the plug 158 and the orifice block 152a are integrated into one unit instead of the third spring 154 constituting the deceleration mechanism 156 according to the first modification. It is different in that 202 is provided.

As described above, the plurality of orifice plates 104a to 104d and the orifice blocks 152a to 152c are not limited to the case where the reduction mechanisms 106 and 156 are configured in multiple stages. As shown in FIG. 10A, a small diameter and constant diameter reduction passage 210 is provided in the middle of the nozzle passage 98 so as to communicate with the nozzle passage 98 from the nozzle passage 98. The effective cross-sectional area between 100 can be reduced. As shown in FIG. 10B, the diameter of the deceleration passage 212 may be gradually enlarged toward the downstream side of the nozzle passage 98.

In addition, the deceleration structure used for the fluid pressure device in this invention is not limited to the above-mentioned embodiment. It goes without saying that various configurations and modifications may be employed without departing from the spirit of the invention as set forth in the appended claims.

1 is an overall configuration diagram of a pressure reducing valve to which a deceleration structure used in a fluid pressure device according to the present invention is applied.

FIG. 2 is an enlarged cross-sectional view showing the vicinity of the flapper mechanism in the pressure reducing valve of FIG. 1.

3 is an enlarged cross-sectional view illustrating the vicinity of a nozzle passage provided in the pressure reducing valve of FIG. 1.

4 is an enlarged cross-sectional view illustrating a state where a ball seats on a nozzle in the pressure reducing valve of FIG. 2.

Fig. 5 shows a characteristic curve showing the relationship between the separation distance of the orifice plate constituting the reduction mechanism and the flow rate of the pressure fluid flowing through the opening of the orifice plate.

Fig. 6 shows a characteristic curve showing the relationship between the distance diameter ratio formed by the separation distance of the orifice plate and the diameter of the opening and the reduction flow rate of the pressure fluid when the reduction mechanism is not provided.

FIG. 7A shows a modification showing the case where a plurality of speed reduction holes are formed on the same axis in the nozzle passage.

FIG. 7B shows yet another modification showing a case where the plurality of speed reduction holes are offset in the direction orthogonal to the axis line of the nozzle passage.

8 is an enlarged cross-sectional view illustrating the reduction mechanism in the first modification.

9 is an enlarged cross-sectional view illustrating the reduction mechanism in the second modification.

10A is a conceptual diagram showing a reduction mechanism having a deceleration passage of approximately constant diameter.

Fig. 10B is a conceptual diagram showing a deceleration mechanism having a deceleration passage that gradually expands toward the communication hole side.

Claims (7)

In a fluid pressure device having a body having a port through which a pressure fluid is supplied, in a deceleration structure used to perform pressure control of the pressure fluid, An introduction chamber (78) into which the pressure fluid is introduced; A communication path (98) communicating between the introduction chamber (78) and the port; And It is provided in the communication path 98, has a diameter smaller than the communication path 98, has a plurality of flow paths 102 through which the pressure fluid flows, and has a deceleration mechanism for reducing the flow rate of the pressure fluid; , The plurality of flow paths 102 are provided at predetermined intervals adjacent to each other along the flow direction of the pressure fluid, The plurality of flow paths 102 are arranged to be spaced apart from each other in the extending direction of the communication path 98 in parallel with the flow direction of the pressure fluid, and the plurality of flow paths 102 are connected to the communication path. A deceleration structure, characterized by being installed eccentrically with each other in a direction orthogonal to the extension direction of (98). delete The method of claim 1, The plurality of flow passage (102) is a deceleration structure, characterized in that arranged in the communication path (98) coaxially along a straight line. delete The method of claim 3, A deceleration structure, characterized in that the flow rate of the pressure fluid is changed by changing the distance (L) between two adjacent flow paths between the plurality of flow paths (102). The method of claim 5, A deceleration structure, characterized in that between the plurality of flow paths (102), the distance between two adjacent flow paths (L) is set at least 20 times the diameter (D) of the flow path. The method of claim 1, The fluid pressure device includes a diaphragm chamber (80) in communication with the introduction chamber (78) through a nozzle (86); And Of the pressure fluid installed in the diaphragm chamber 80 and introduced into the diaphragm chamber 80 from the introduction chamber 78 via the nozzle 86 by a separation and blocking operation with respect to the nozzle 86. Further comprises a flapper 88 for controlling the flow, The fluid pressure device includes a pressure reducing valve (10) for reducing the pressure fluid supplied from one port to a desired pressure to lead to another port.

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