KR101103261B1 - Heating jacket and manufacturing method of the same - Google Patents

Abstract

The present invention wraps a pipe installed in a production line of a semiconductor-related industrial field such as a semiconductor, LCD, LED, solar cell, heating heating for heating the pipe, the heating wire is arranged in a predetermined pattern A heat wire fixing member for transferring the generated heat to the pipe; An outer shell member disposed outside the hot wire fixing member; And a heat insulation member disposed between the heat wire fixing member and the outer shell member to insulate the heat generated from the hot wire, wherein the hot wire disposed on the hot wire fixing member is sewn and fixed to the hot wire fixing member. .

As a result, the same arrangement may be realized within a preset pattern and a processing error range by sewing and fixing the heating wire disposed on the heating wire fixing member, and may evenly distribute the heat transferred to the pipe to realize an increase in semiconductor production yield. In addition, by automating the process of fixing the hot wire fixing member and the hot wire, it is possible to increase the production yield of the heating jacket, to exclude the worker from the dust generated in the fabric to improve the working environment of the worker.

Heating jacket, heating wire, sewing

Description

Manufacturing method of heating jacket and heating jacket {HEATING JACKET AND MANUFACTURING METHOD OF THE SAME}

The present invention relates to a heating jacket and a method of manufacturing a heating jacket, and more particularly, by sewing and fixing a heating wire disposed on the heating wire fixing member by an automated manufacturing apparatus, while simultaneously fixing the heating wire accurately according to a predetermined pattern. The present invention relates to a heating jacket and a method of manufacturing a heating jacket that can stably fix a heating wire by excluding manual work in fixing the heating wire and improve productivity of the product according to the automation of the process.

In general, processing processes of a semiconductor substrate for manufacturing a semiconductor device use various process gases.

For example, gases such as phosphine (PH3), silane (SiH4), dichloro silane (SiH2Cl2), ammonia (NH3) and nitrogen oxides (N2O) may be removed in a chemical vapor deposition (CVD) or dry etching process. use.

In the case of the semiconductor processing process as described above, when the process is completed, reaction by-products such as ammonia chloride gas (NH 4 Cl) are discharged from the process chamber through the exhaust line.

In this case, when the exhaust line for transporting the reaction by-products is maintained at room temperature, the ammonia chloride gas may solidify and precipitate and adhere to the wall surface of the exhaust line to precipitate and adhere the powder.

The powder deposition on the inner wall may block the whole or part of the inner wall of the pipe or tube, which may cause an accident such as deterioration of the production process and explosion.

Therefore, in order to keep the temperature of the pipe or tube constant and to prevent the inner wall of the pipe or tube from being blocked, a heating jacket is used to surround the outer surface of the exhaust line.

1 is a state diagram of a heating jacket according to the prior art.

Referring to FIG. 1, the heating jacket according to the related art includes a heat ray fixing member 100 in which a heat ray 120 is disposed, an outer shell member 200 disposed outside the heat ray fixing member 100, and the heat ray fixing member. It includes a heat insulating member 300 disposed between the 100 and the outer shell member 200, the heat-wire fixing member 100 and the heat insulating member 300 and the outer shell member 200 are sequentially stacked and wound to produce a semiconductor It is provided to surround the pipe (P) installed in the process.

Here, in the fixing method of the hot wire fixing member 100 and the hot wire 120, by using a simple jig (jig) in accordance with the pre-designed pattern by bending the hot wire 120 by hand, the banded hot wire 120 And, as shown in Figure 1, after inserting the fixing strip 140, the hot wire 120 is formed in the portion of the fixing strip 140 fixed to the sewing portion 150 to the hot wire fixing member 100 It was made by sewing.

Here, the heating jacket according to the prior art, the heating wire 120 is limited to a portion (fixing band portion) is fixed, the sewing portion 150 of the fixing band 140 is the hot wire fixing member ( By sewing fixed to 100, when the winding with the heat insulating member 300 and the shell member 200, there was a problem that the heating wire 120 is not accurately arranged according to the designed pattern.

In addition, the heating wire 120 is provided in the form of being inserted into the fixing band 140, there was a problem that the disturbance occurs in the heating wire patterned by the external force during the winding.

Therefore, when the arrangement of the heating wire 120 is not correctly disposed, and the disturbance occurs, the heat transmitted to the pipe P is not evenly distributed so that a constant temperature cannot be transmitted to the entire area of the pipe P, This imbalance in heat distribution has a problem that leads to a decrease in semiconductor production yield.

In addition, as the fixing of the hot wire fixing member 100 and the hot wire 120 is performed manually, the production yield of the heating jacket is lowered, and dust generated from a fabric such as silica, which is a main raw material of the heating jacket, is generated. There was a problem that can be delivered to the worker can act as a hazard to the worker.

The present invention was created to solve the above problems, an object of the present invention, the heating jacket and the heating is implemented in the same pattern within the preset pattern and processing error range by sewing and fixing the heating wire disposed on the heating wire fixing member It is to provide a method of manufacturing a jacket.

Still another object of the present invention is to provide a heating jacket and a method of manufacturing a heating jacket in which a heating wire fixed to a heating wire fixing member can be stably fixed.

Still another object of the present invention is to provide a heating jacket and a method of manufacturing a heating jacket which can realize an increase in semiconductor production yield by uniformly distributing heat transferred to a pipe.

Another object of the present invention is to increase the production yield of the heating jacket by automating the fixing process of the heating wire fixing member and the heating wire, and heating jacket that can improve the working environment of the operator by excluding the operator from dust generated in the fabric And it provides a method for producing a heating jacket.

The object is, according to the present invention, a heating jacket that wraps the pipe installed in the production line of the semiconductor-related industries such as semiconductor, LCD, LED, solar cell, and is responsible for the heat supply for heating the pipe, A heat wire fixing member configured to transfer heat generated and disposed in a predetermined pattern to the pipe; An outer shell member disposed outside the hot wire fixing member; And a heat insulation member disposed between the heat wire fixing member and the outer shell member to insulate the heat generated from the hot wire, wherein the hot wire disposed on the hot wire fixing member is sewn and fixed to the hot wire fixing member. Can be achieved.

Here, the heating jacket may be wound on the pipe after the hot wire fixing member, the heat insulating member and the outer shell member are stacked.

In addition, the inner surface of the outer shell member and one side of the outer surface corresponding thereto may be formed to be coupled to each other by Velcro.

On the other hand, the hot wire is sewn and fixed to the hot wire fixing member, the sewing portion that crosses the longitudinal direction of the hot wire pattern may be provided at a predetermined interval to fix the hot wire.

Here, the hot wire fixing member may be provided with any one of glass fiber, silicon glass fiber, or synthetic resin fiber containing silica.

On the other hand, the object is, according to the invention, the step of manufacturing a hot wire fixing member (S100); A method of manufacturing a heating jacket comprising a step (S200) of manufacturing a heating jacket by coupling the manufactured heat ray fixing member to a heat insulating member and an outer shell member. Mounting the fabric member to be placed and fixed to the work table of the hot wire fixing device (S110); Receiving a heating wire from the heating wire supply means and disposing the heating wire on the upper surface of the fabric member according to a predetermined pattern (S120); It may be achieved by a method of manufacturing a heating jacket consisting of; step (S130) of sewing the heat wire arranged by sewing means.

Here, the step (S110) of mounting the fabric member on the work table of the hot wire fixing apparatus is a step of fixing the fabric member to the conveyance to the y-axis.

In addition, in step S120, the hot wire supply means supplies the hot wire via the sewing means, and the hot wire may be disposed on the top surface of the fabric member by the sewing means.

Here, step S120 and step S130 may be a step in which the hot wire is sewn at the same time as the hot wire is disposed by the sewing means.

In addition, the sewing means is coupled to the drive unit of the hot wire fixing device, the drive unit may be provided to transfer the sewing means to the x-axis under the control of the control unit.

According to the present invention, the same arrangement may be realized within a preset pattern and a processing error range by sewing and fixing a heating wire disposed on the heating wire fixing member.

In addition, the hot wire fixed to the hot wire fixing member may be stably fixed.

In addition, it is possible to implement an increase in semiconductor production yield by evenly distributing the heat transferred to the pipe.

In addition, by automating the process of fixing the hot wire fixing member and the hot wire, it is possible to increase the production yield of the heating jacket, to exclude the worker from the dust generated in the fabric to improve the working environment of the worker.

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, terms used in the present specification and claims should not be construed in a dictionary meaning, and the inventors may properly define the concept of terms in order to explain their invention in the best way. It should be construed as meaning and concept consistent with the technical spirit of the present invention.

Therefore, the embodiments shown in the present specification and the drawings are only exemplary embodiments of the present invention, and not all of the technical ideas of the present invention are presented. Therefore, various equivalents It should be understood that water and variations may exist.

In addition, the heating jacket according to the present invention includes a configuration of a power supply unit electrically connected to the heating wire and supplying power to the heating wire, and a control means for adjusting the supplied voltage. Due to the lack of correlation) and will not be described below.

Figure 2 is a state diagram of the heating jacket according to the present invention, Figure 3 is a plan view of a hot wire fixing member is fixed to the hot wire according to the present invention, Figure 4 is a perspective view of a hot wire fixing device according to the present invention.

2 to 4, the heating jacket according to the present invention surrounds a pipe P installed in a production line in a semiconductor related industry such as a semiconductor, LCD, LED, solar cell, and the like. A heating jacket in charge of supplying heat for heating, comprising: a heating wire fixing member (10) configured to transfer heat generated by heating wires (12) in a predetermined pattern to the pipe (P); An outer shell member 20 disposed outside the hot wire fixing member 10; It is disposed between the hot wire fixing member 10 and the outer shell member 20, the heat insulating member 30 for insulating the heat generated from the hot wire 12; includes, disposed on the hot wire fixing member 10 The heating wire 12 is sewn and fixed to the heating wire fixing member 10.

Here, the heating jacket according to the present invention, as shown in Figure 2, the hot wire fixing member 10, the heat insulating member 30 and the outer shell member 20 is fixed to the heating wire 12 is sewn in order to be provided It may be wound and coupled to the pipe (P) is installed in the semiconductor production line serves to maintain a constant temperature of the pipe (P).

Here, the hot wire fixing member 10 is a component provided with a flexible fabric having excellent thermal conductivity and heat resistance, and the hot wire 12 is disposed in a predetermined pattern on one surface and heat generated by the hot wire 12 is obtained. It serves to deliver to the pipe (P).

In addition, the hot wire fixing member 10 may be made of glass fiber material or silicon glass fiber, and the like, and the hot wire 12 is fixed by the sewing unit 15 by the hot wire fixing device 50 which will be described later. Can be.

On the other hand, the heat insulating member 30 is a component provided with an elastic material having a low thermal conductivity, and is disposed between the hot wire fixing member 10 and the outer shell member 20 to be described later, the heat wire fixing member 10 It serves to prevent the heat generated from the hot wire 12 is released to the outside.

Here, the heat insulating member 30 may be made of silicone resin, glass fiber, asbestos, or the like, and may be made of various materials that effectively block heat generated from the heating wire 12.

On the other hand, the outer shell member 20 is a component provided in the outermost portion of the heating jacket according to the present invention, serves to further prevent the heat passing through the heat insulating member 30 to be emitted to the outside.

Here, the shell member 20 may be made of a material having a low thermal conductivity, such as the heat insulating member 30, and preferably may be made of silicone resin or glass fiber.

In addition, the shell member 20 may include a coupling means for coupling the heating jacket according to the present invention to the pipe (P).

Here, the coupling means, as shown in Figure 2, may be provided with a velcro 22 formed on one side of the inner surface and the outer surface corresponding to the outer shell member 20 can be coupled to each other.

In addition, the coupling means may be provided as a coupling means such as a zipper in addition to the Velcro 22, may be provided with various coupling means for coupling one side and the other side of the wound outer shell member 20.

On the other hand, the heating wire fixing member 10 is arranged the heating wire 12, as shown in Figure 4, the heating wire supply means for supplying the heating wire 12; A sewing water stage (54) for receiving the heating wire (12) from the heating wire supply means (52) to arrange and secure the heating wire (12) at the same time; A drive unit 56 for driving the sewing means 54 on the x-axis; A transfer unit 58 for transferring the distal member to the y-axis; A control unit (not shown) for controlling the sewing means 54, the driving unit 56 and the conveying unit 58 may be manufactured by a hot wire fixing device 50 including a.

Here, the hot wire fixing device 50 includes components such as a hot wire supply means 52, a sewing means 54, a drive unit 56, a transfer unit 58, a control unit, and the like by the operation of the components It serves to arrange and sew the hot wire 12 on the fabric member.

Here, the hot wire supply means 52 is a component for supplying the hot wire 12 disposed on the hot wire fixing member 10 to the sewing means 54 to be described later, the pulley on which the hot wire 12 is mounted It may be provided in the form.

In addition, the sewing means 54 is configured to sew on the hot wire fixing member 10 a sewing unit 15 for fixing the hot wire 12 and the hot wire 12 supplied from the hot wire supply means 52. Element.

Here, the sewing means 54 is fixed to the drive unit 56 to be described later may be provided to perform the sewing at a predetermined interval under the control of the controller.

On the other hand, the pattern of the heating wire 12 disposed on the heating wire fixing member 10 may be implemented by the operation of the drive unit 56 and the transfer unit 58.

Here, the drive unit 56 is a component for reciprocating the sewing means 54 on the x-axis, as shown in Figure 4, it may be provided to be fixed to the frame to drive the left and right sliding.

In addition, the transfer unit 58 is a component for transferring the distal end member to the y-axis, and may be provided to transfer the distal end member by being engaged with one side of the distal end member.

That is, the x-axis movement of the drive unit 56 and the y-axis movement of the transfer unit 58 and the sewing of the sewing means 54 are arranged on the hot wire fixing member 10 and sewn on the hot wire fixing member 10. A pattern may be formed, and the hot wire 12 may be precisely disposed and fixed to the hot wire fixing member 10 by the formed sewing unit 15.

Therefore, the hot wire 12 is sewn and fixed to the hot wire fixing member 10, as shown in Figure 3, the sewing unit 15 is formed at regular intervals across the longitudinal direction of the hot wire pattern to form the hot wire 12 It may be provided to be fixed stably.

In addition, although the heating wire 12 is illustrated as being arranged in a zigzag pattern in FIGS. 2 to 4, the pattern of the heating wire 12 is not limited thereto and may be formed in various types of patterns designed in advance.

Hereinafter, a method of manufacturing a heating jacket according to the present invention will be described in detail.

Method for manufacturing a heating jacket according to the invention, the step of manufacturing a hot wire fixing member (S100); A method of manufacturing a heating jacket comprising a step (S200) of manufacturing a heating jacket by coupling the manufactured heat ray fixing member to a heat insulating member and an outer shell member. Mounting the fabric member to be placed and fixed to the work table of the hot wire fixing device (S110); Receiving a heating wire from the heating wire supply means and disposing the heating wire on the upper surface of the fabric member according to a predetermined pattern (S120); It may comprise a; step of fixing the hot wire arranged by the sewing means (S130).

First, the fabric member is mounted on a work table. (S110)

Here, the step of mounting the fabric member on the work table of the hot wire fixing device, the step of fixing the fabric member to the conveyance to the y-axis.

In addition, the transfer unit transfers the distal end member to the y-axis, and the driving unit to be described later transfers the sewing means to the x-axis to sew and fix the hot wire pattern of various patterns (shapes) preset on the distal end.

Next, the heating wire is received from the heating wire supply means and placed on the upper surface of the fabric member.

Here, in step S120, the hot wire supply means supplies the hot wire via the sewing means, and the hot wire may be disposed on the upper surface of the fabric member by the sewing means.

Next, the arranged heating wire is sewn and fixed by sewing means. (S130)

Here, step S120 and step S130 may be a step in which the hot wire is sewn at the same time as the hot wire is disposed by the sewing means.

In addition, the sewing means is coupled to the drive unit of the hot wire fixing device, the drive unit may be provided to transfer the sewing means to the x-axis under the control of the control unit.

That is, the controller may control the above-described driving unit (x-axis feed of the sewing means) and the transfer unit (y-axis feed of the fabric member) to form a hot wire pattern of various patterns on the fabric member.

The heating wire fixing member (heat wire is disposed and sewn fixed) manufactured in the above-described step is combined with the heat insulating member and the shell member, the heating jacket according to the present invention can be produced.

As described above, in the heating jacket according to the present invention, the same arrangement may be realized within a preset pattern and a processing error range by sewing and fixing a heating wire disposed on the heating wire fixing member, and evenly distributes heat transferred to the pipe. Increase the production yield of semiconductor, and automate the fixing process of the heating wire fixing member and the heating wire to increase the production yield of the heating jacket and improve the working environment of the worker by excluding the worker from the dust generated from the fabric. Can be.

As mentioned above, although the present invention has been described by way of limited embodiments and drawings, the technical idea of the present invention is not limited thereto, and it should be understood by those skilled in the art to which the present invention pertains. Various modifications and variations may be made without departing from the scope of the appended claims.

Since the accompanying drawings are for understanding the technical spirit of the present invention together with the detailed description of the above-described invention, the present invention should not be construed as limited to the matters shown in the following drawings.

1 is a state diagram of a heating jacket according to the prior art,

2 is a state diagram of a heating jacket according to the present invention,

3 is a plan view of a hot wire fixing member in which a hot wire is sewn and fixed according to the present invention;

4 is a perspective view of a heat ray fixing device according to the present invention.

* Description of the symbols for the main parts of the drawings *

10: hot wire fixing member 12: hot wire

20: outer shell member 22: Velcro

30: insulation member 50: heat wire fixing device

52: hot wire supply means 54: sewing means

56 drive unit 58 transfer unit

P: Piping

Claims (10)

As a heating jacket that wraps a pipe installed in a semiconductor production line and is responsible for supplying heat for heating the pipe, A heat wire fixing member configured to transfer heat generated by heating wires arranged in a predetermined pattern to the pipe; An outer shell member disposed outside the hot wire fixing member; And a heat insulation member disposed between the heat wire fixing member and the outer shell member to insulate the heat generated from the hot wire. The hot wire disposed on the hot wire fixing member is sewn and fixed to the hot wire fixing member, A heating jacket, characterized in that the Velcro is formed on each side of the inner surface of the outer shell member and the outer surface corresponding to the outer shell member to be coupled to each other. The method of claim 1, The heating jacket is a heating jacket, characterized in that the heating wire fixing member, the heat insulating member and the outer shell member is laminated, and then wound in the pipe. delete The method of claim 1, The heating wire that is sewn and fixed to the heating wire fixing member, the heating jacket is characterized in that the sewing portion crossing the longitudinal direction of the heating wire pattern is formed at a predetermined interval to fix the heating wire. The method of claim 1, The heating wire fixing member is a heating jacket, characterized in that provided with any one of glass fibers, silicon glass fibers or synthetic resin fibers containing silica (Silica). Manufacturing a hot wire fixing member (S100); As a method of manufacturing a heating jacket comprising; (S200) to produce a heating jacket by coupling the manufactured heat ray fixing member to the heat insulating member and the outer shell member; The step of manufacturing the hot wire fixing member (S100), Mounting the fabric member on which the heating wire is to be disposed and fixed to the work table of the heating wire fixing device (S110); Receiving a heating wire from the heating wire supply means and disposing the heating wire on the upper surface of the fabric member according to a predetermined pattern (S120); And sewing the fixed heating wire by sewing means (S130); and The sewing means is coupled to the drive unit of the hot wire fixing device, the drive unit manufacturing method of the heating jacket, characterized in that for transferring the sewing means to the x-axis under the control of the control unit. The method of claim 6, Mounting the fabric member on the work table of the hot wire fixing device (S110), the manufacturing method of the heating jacket comprising the step of fixing to the transfer unit for transferring the fabric member to the y-axis. The method of claim 6, In the step S120, the heating wire supply means supplies a heating wire via the sewing means, the heating wire manufacturing method of the heating jacket, characterized in that arranged on the upper surface of the fabric member by the sewing means. The method of claim 6, Step S120 and step S130 is a heating jacket manufacturing method characterized in that the heating wire is disposed by the sewing means and at the same time the sewing of the heating wire. delete

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