KR101101884B1 - Actuator, magnetic bearing and magnetic levitation apparatus - Google Patents

Abstract

PURPOSE: An actuator, a magnetic bearing, and a magnetic levitation apparatus are provided to reduce the number of a magnetic bearing by replacing one magnetic bearing with three magnetic bearings. CONSTITUTION: A core member(311a) comprises three poles which are protruded to three directions. Windings(311b, 311c) surround two poles to be fixed. A permanent magnet(311d) is arranged in the end of the other pole. . The permanent magnet is arranged to have a line of magnetic force which is parallel with the pole. Three poles are protruded from a coplanar.

Description

Actuator for magnetic levitation and magnetic bearing and magnetic levitation apparatus using the same {Actuator, Magnetic bearing and Magnetic levitation apparatus}

The present invention relates to a magnetic levitation actuator which can be installed in a magnetic levitation device manufactured to move along a rail, which can reduce the size of the magnetic levitation device and improve operational efficiency, and a magnetic bearing and magnetic levitation device using the same.

In order to precisely process the workpiece, it is necessary to minimize the friction that may occur during the movement of the workpiece to ensure a certain mobility, and also to minimize the heat caused by the friction generated during the movement. In particular, semiconductor manufacturing equipment that uses semiconductors that are microminiature and require detailed processing, and equipment that requires absolute transfer accuracy of the workpiece, such as light or ion beam processing, must have means for minimizing the friction. Required.

The means for reducing friction is bearings.

The bearing is a mechanical type that is mainly applied to machine tools such as boring machines or milling machines, and a fluid or a gas is applied at a high pressure to force a gap between a workpiece and a seating surface. There are a fluid type and a gas type of the discharge method.

However, the conventional bearings of the above-described method have limitations that cannot be used when the processing environment of the workpiece requires a specific condition such as maintaining a vacuum state or a specific gas must remain at a constant pressure.

In order to solve the above problem, a magnetic bearing has been proposed.

The conventional magnetic bearing is to minimize the friction between the workpiece and the contact surface according to the contact by separating the workpiece from the contact surface by using a magnetic force, it was known and used through the Republic of Korea Patent No. 0165371, and is currently applied in various forms It is widely used.

The magnetic levitation device (linear motion device) which applied the conventional magnetic bearing is demonstrated.

1 is a perspective view showing a state of a conventional actuator, Figure 2 is a perspective view showing a magnetic levitation device equipped with a conventional magnetic bearing, Figure 3 is a perspective view showing a mounting state of a conventional magnetic bearing.

Conventional magnetic bearing 11 is composed of an actuator (11a) and the distance sensor (11b), is installed at each point of the magnetic levitation device 10 facing the rail 20, the magnetic levitation so as to be spaced apart from the rail (20) Float the device 10. The actuator 11a of the conventional magnetic bearing 11 includes a core body 111 formed of three poles 111a, 111b, and 111c parallel to each other by stacking a plurality of insulating steel sheets pressed in an 'E' shape, and the It consists of a winding body 112 surrounding the pole 111b located in the middle of the poles (111a, 111b, 111c), so that when electricity is applied to the winding body 112, it is magnetically induced by the electromagnetic induction phenomenon.

Here, since the magnetic force of the actuator 11a acts only on the rail 20, the main body 12 faces each other while facing the rail 20 in order to maintain a continuous magnetic levitation state without contact with the rail 20. An actuator 11a should be mounted on each side of the opposing body 12, and the actuator 11a thus mounted should be applied with a process of adding and subtracting to the reference manpower to generate bearing force in both directions. Therefore, a deflection magnetic field or a reference flux (Bias Flux) is required for the generation of the reference attraction force, and thus a constant current is required.

In the rail 20, a pair of bars BARs are generally arranged in parallel with each other for balanced magnetic levitation and movement of the magnetic levitation device 10. It includes the main body 12 is produced in a shape surrounding the pair of rails (20). To this end, the conventional body 12 is fixed to the lower panel 121, the connecting body 122 is formed to protrude in the center of the lower panel 121, and parallel to the lower panel 121 via the connecting body 122. The upper panel 123 is formed.

Subsequently, the conventional main body 12 has a cross-sectional structure of an 'H' shape as mentioned above, and as shown, a lower panel 121, a connecting body 122, and an upper panel (facing the rail 20). In each of the 123, an independent magnetic bearing 11 is disposed.

The distance sensor 11b detects a gap between the main body 12 and the rail 20 to adjust the magnetic force of the actuator 11a. Here, since the distance sensor 11b collects information (gap between the main body and the rail) for determining whether each of the actuators 11a is operated, the distance sensor 11b is paired with the actuator 11a mounted on the magnetic levitation device 10. The magnetic bearing 11 is comprised.

As described above, in the conventional magnetic levitation device 10, the magnetic bearing 11 may be mounted on both front and rear ends of the lower panel 121 and the upper panel 123 so that the magnetic levitation may occur along the pair of rails 20. It is arrange | positioned, respectively, and arrange | positions also before and after both sides of the connection body 122, respectively. As a result, in the conventional magnetic levitation device 10, 12 independent magnetic bearings 11 are to be assembled and operated individually.

However, the conventional magnetic levitation device 10 having the above-described structure has the following problems.

First, there is a hassle of having to assemble 12 magnetic bearings 11 to the body 12 independently.

Second, as the 12 magnetic bearings 11 are operated separately, there is a labor of having to manage 12 sets in case of emergency.

Third, since the magnetic bearing 11 is individually disposed occupying a predetermined space in the main body 12, there is a burden of increasing the size of the main body 12 corresponding to the occupied space, and the number of wirings to the independent magnetic bearing 11 In addition, there is a disadvantage that the overall size of the conventional magnetic levitation device 10 is relatively large.

Fourth, since the magnetic bearing 11 for posture control is inevitable as the length of the magnetic levitation device 10 becomes longer, the weight of the magnetic levitation device 10 itself increases and the production cost increases.

On the other hand, the magnetic bearing 11 mounted on the conventional magnetic levitation device 10 requires continuous electrical application to magnetic levitation of the magnetic levitation device 10 from the rail 20. However, uninterrupted application of electricity to the magnetic bearing 11 causes a considerable power consumption to drive the conventional magnetic levitation device 10, and the resistance of the winding body 112 in the actuator 11a by the continuous application of electricity. The heat may disrupt the wound state of the winding body 112 and thus may affect the precise magnetic force generation. In particular, even if the thermal deformation due to heat generated by continuous electrical application is very small, the conventional high precision machining equipment to which the magnetic bearing 11 is applied can have a huge impact on the processing precision of the workpiece, this was also an urgent problem to be solved.

Accordingly, the present invention has been invented to solve the above problems, magnetic levitation actuator and magnetic using the same to improve the manufacturing and management efficiency, to minimize the power consumption required for magnetic levitation and economical operation The technical problem to provide a bearing and a magnetic levitation device using the same.

According to an aspect of the present invention,

An actuator comprising: a core body having three poles each protruding in three directions, a winding body which is respectively wrapped around two poles of the poles, and a permanent magnet disposed at a tip of the remaining pole.

In addition, the permanent magnet of the present invention

It is arranged to have a line of magnetic force in the direction parallel to the protruding direction of the pole for fixing the permanent magnet.

In addition, the three poles are formed to protrude in the same plane.

In addition, the two poles are arranged in the same straight line, the remaining one pole is projected perpendicular to the center of the two poles, so that the core body has a 'T' shape.

According to an aspect of the present invention,

In the magnetic bearings used for rails having a cross-section 'c',

A core body having three poles movably inserted into the rail and protruding to face the inner surface of the rail, a winding body which is respectively wrapped around two poles of the poles, and is disposed at one of the remaining pole ends Actuators with permanent magnets; And

A distance sensor disposed in the actuator to sense a distance between the rail and the pole and to transmit it to a controller that controls the supply of electricity to the winding body;

Magnetic bearing comprising a.

According to an aspect of the present invention,

A pair of rails having a cross-sectional shape of 'c',

A core body having three poles movably inserted into the rail and protruding to face the inner surface of the rail, a winding body which is respectively wrapped around two poles of the poles, and is disposed at one of the remaining pole ends Actuators with permanent magnets; And a distance sensor disposed on the actuator to sense a distance between the rail and the pole and to transmit it to a controller that controls the supply of electricity to the winding body.

A support frame connecting the pair of magnetic bearings;

Magnetic levitation device comprising a.

According to the present invention, since the magnetic force in three directions are all generated through one actuator, the magnetic bearing mounted with the actuator can replace three magnetic bearings, and the magnetic object to be controlled and managed individually. Since the number of bearings can be drastically reduced, the manufacturing and operation of the magnetic levitation device is relatively easy.

In addition, the permanent magnet is provided in place of the winding body to reduce the power consumption required to drive the magnetic levitation device, thereby significantly reducing the operation and management costs of the magnetic levitation device.

1 is a perspective view showing a state of a conventional actuator,
2 is a perspective view showing a magnetic levitation device equipped with a conventional magnetic bearing,
3 is a perspective view showing a mounting state of a conventional magnetic bearing,
Figure 4 is an exploded perspective view showing a state of the magnetic levitation apparatus according to the present invention,
5 is an exploded perspective view showing another embodiment of the magnetic bearing according to the present invention;
6 and 7 are views schematically showing the operation of the magnetic bearing,
8 is a view schematically showing another embodiment of the magnetic bearing in the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Figure 4 is an exploded perspective view showing the appearance of the magnetic levitation device according to the present invention, will be described with reference to this.

The actuator 311 according to the present invention includes a core body 311a having first, second and third poles each having a plurality of insulating steel sheets stacked in a 'T' shape and protruding in three directions, respectively, and the first and second poles. First and second windings 311b and 311c surrounding the first and second poles among the three poles, respectively, and a permanent magnet 311d installed at one end of the third pole.

The core body 311a has at least three first, second and third poles protruding in a row, which means that each inner surface of the rail 20 having a tip of each of the first, second and third poles has a 'c' shape. It is to be able to face. Here, the line is not limited to the first, second, third poles are formed on the same plane along the main body of the actuator 311. That is, even if the three first, second, and third poles are located on different planes, the first, second, and third poles may face the inner surface of the '20'-shaped rail 20' and the first, second, and third poles, respectively. , 3 poles are located in a line.

The first and second winding bodies 311b and 311c are installed on the first and second poles facing the upper and lower portions of the rails 20 'among the first, second and third poles, so that the actuator 311 is magnetically injured. It is possible to actively respond to changes in the weight and balance of the device (30).

The permanent magnets 311d are installed in the third pole facing the side of the rail 20 ', and the N pole and the S pole of the permanent magnet 311d are arranged in line with the side and the third pole. Accordingly, while the direction of the magnetic force line induced by the energization of the first and second winding bodies 311b and 311c and the direction of the magnetic force line of the permanent magnet 311d are perpendicular to each other, the induced magnetic force line is permanent as shown in FIG. 6. The magnetic field lines of the magnet 311d can be circulated.

In addition, the permanent magnet 311d may be disposed on the third pole so that the direction of the magnetic force line is directed toward the first and second poles (perpendicular to the protruding direction of the third pole). To this end, both ends of the cross section are inclined in a rail 20b (see FIG. 8 (b)) having a cross-section 'c', and correspondingly, the first and second poles are formed to be inclined toward the both ends, respectively. Accordingly, the magnetic force lines guiding and circulating from the first and second winding bodies 311b and 311c surrounding the first and second poles and the magnetic lines of the permanent magnets 311d may be parallel to each other. As a result, the magnetic bearing 31b including the core body 311a 'having the first, second and third poles, the first and second winding bodies 311b and 311c, the permanent magnet 311d and the distance sensor is provided. Connected to both ends of the support frame 32, respectively, the completed magnetic levitation device can maintain the state stably without tilting the left and right balance in the pair of the rail (20b).

For reference, in the first, second and third poles and the first and second windings 311b and 311c, the notations “first, second, third” and “first, second” refer to an embodiment according to the present invention. Since it is only divided so that it can be easily understood with reference to the drawings, in the claims below, the description of "first, second, third" and "first, second" is omitted, and according to the present invention Make the technical idea clear.

The magnetic bearing 31 according to the present invention is composed of an actuator 311 and a distance sensor 312.

Since the structure of the actuator 311 was mentioned above, the description is abbreviate | omitted here.

The distance sensor 312 senses the distance between the actuator 311 inserted into the rail 20 'and the inner three sides of the rail 20', respectively, and is applied to the first and second windings 311b and 311c. It is to be able to adjust the direction and intensity of, which will be described in detail below with reference to FIGS. 6 and 7.

In the embodiment according to the present invention, the distance sensor 312 is assumed to be mounted on the support frame 32, but the distance sensor 312 is a position that can detect the distance between the actuator 311 and the inner surface of the rail 20 ' It is not limited to a specific position.

For reference, as shown in FIG. 5 (a perspective view illustrating an exploded view of another embodiment of the magnetic bearing according to the present invention), the distance sensor 312 'may be installed directly on the actuator 311, and the distance sensor 312' ) Will be sufficient if it has a function to detect the vertical or horizontal movement direction of the actuator (311). However, in order to precisely detect the distance between the inner surface of the first and second poles and the rail 20 'and the distance between the inner surface of the permanent magnet 311d and the rail 20' for precise operation control of the actuator 311, Of course, a plurality of distance sensors corresponding to the object to be detected in real time may be separated and positioned.

Here, a conventional optical sensor, an electrostatic capacitance type sensor, an inductance type displacement sensor, or a magnetic sensor for distance measurement may be applied to the distance sensor 11b. The operation principle and structure of the distance sensor 11b itself are well known. Since it is a common technique, detailed description of the distance sensor 11b is omitted here.

The magnetic levitation device 30 further includes a support frame 32 for fixing the plurality of magnetic bearings 31 according to the present invention.

The magnetic levitation device 30 has a plurality of magnetic bearings 31 in order to maintain a stable magnetic levitation balance from the rail 20 ', and the support frame 32 has connecting means for fixing the magnetic bearings 31 ( 321 and the fixing means (322). The connecting means 321 may be applied to various shapes and structures to fix the magnetic bearing 31, in the embodiment according to the present invention proposes a shape that can be wrapped around the actuator 311 of the magnetic bearing 31 do. Fixing means 322 is to accommodate the components to be installed in the magnetic levitation device 30 while connecting the connecting means 321, in the embodiment according to the present invention to form a flat shape, but is not limited to this shape Various modifications may be made.

Here, although not drawn out, a fixing groove is formed in the connecting means 321 of the magnetic bearing 31, and a fixing groove corresponding to the fixing groove is formed in the core body 311a of the actuator 311, thereby providing a pin, The connecting means 321 and the magnetic bearing 31 may be tightly fastened by a well-known and common fastening method such as bolts, pins, bolts, and the like. The bearing 31 may be fastened.

The support frame 32 may fix at least two magnetic bearings 31 respectively disposed on the pair of rails 20 '.

6 and 7 are views schematically showing the operation of the magnetic bearing, which will be described with reference to the drawings.

The first, second, and third poles of the actuator 311 according to the present invention face each of the three surfaces of the rail 20 ', and maintain the spaced apart from the three surfaces. In other words, when the first and second windings 311b and 311c are energized in the illustrated state, the magnetic forces F2 and F3 are induced, and the permanent magnet 311d generates the magnetic force F1. 11a) is self-injured in the balance of power. Here, the electricity applied to the actuator 311 of the magnetic bearing 31 is made of feedback control according to the distance between the rail 20 'and the actuator 311 detected by the distance sensor 312. Therefore, the distance sensor 312 detects the distance between the magnetic bearing 31 and the rail 20 'in real time, and when the distance is detected below the reference value, the electric power applied to the actuator 11a can be adjusted.

On the other hand, due to the imbalance of the magnetic levitation device 30, when the magnetic bearing 31 on the left side does not win the weight and moves downward, the magnetic force F3 of the second winding body 311c located at the lower portion of the first magnetic bearing 31 is located at the upper portion thereof. It is necessary to make it weaker than the magnetic force F2 of the winding body 311b. To this end, more electricity is applied to the first winding 311b to increase the magnetic force F2 of the first winding 311b (first proposal), or reduce the applied electricity to the second winding 311c. It is also possible to reduce the magnetic force F3 (second proposal). In addition, as shown in FIG. 7, the direction of electricity applied to the second winding 311c is changed, and the magnetic force F3 ′ induced by the direction of the magnetic force F1 of the permanent magnet 311d and the second winding 311c is obtained. The direction is reversed, thereby allowing the magnetic force of the actuator 311 applied to the rail 20 'to be concentrated upward while magnetic fields are in conflict with each other (3rd proposal). However, in the third case, the magnetic force between the permanent magnet 311d and the rail 20 'also affects the first, second, and third eyes, so that the magnetic levitation device 30 with the magnetic bearing 31 is biased. Depending on the various choices can be applied.

Although not shown, a separate controller receives a signal transmitted from the distance sensor 312 and adjusts it in real time according to the set data, although power control and direction control of the electric power applied to the actuator 311 is not shown.

8 is a view schematically showing another embodiment of the magnetic bearing in the present invention, which will be described with reference to the drawing.

Magnetic bearings (31a, 31b, 31c) according to the present invention can be variously modified according to the shape as shown.

The magnetic bearing 31a shown in FIG. 8A adjusts the positions of the first and second winding bodies 311b and 311c provided in the core body 311a. In this embodiment, the magnetic bearing 31a is In consideration of the fact that it is naturally forced downward by weight, the permanent magnet 311d is fixed to the tip of the pole protruding downward among the three poles of the core body 311a. As a result, when there is no object to be mounted in the magnetic levitation device having the magnetic bearing 31a, a small amount of electricity is energized through the first and second windings 311b and 311c respectively disposed on the poles facing upward and lateral. The state may be maintained, and when the object to be mounted is mounted, a large amount of electricity may be supplied to the first and second winding bodies 311b and 311c to maintain the magnetic levitation state.

Since the magnetic bearing 31b shown in Fig. 8B has been mentioned above, its description is omitted here.

In the magnetic bearing 31c illustrated in FIG. 8C, a core body 311a ″ having a 'Y' shape cross section is formed on the rail 20c having a 'U' shape cross section, and the core body 311a is formed. The permanent magnets 311d are fixed to the poles protruding from the bottom to "), and the first and the second winding bodies 311b and 311c are positioned at the poles protruding from the core body 311a to the top and left. Since the poles protruding from the left and right to the upper side are inclined upwardly symmetrically to each other, a stable magnetic levitation state can be maintained by adjusting the magnetic force according to the electric application of the first and second winding bodies 311b and 311c.

For reference, the magnetic bearing 31c and the rail 20c shown in FIG. 8 (c) may be utilized in a form rotated by 90 degrees. In this case, the rail 20c may have a cross-section of a 'c' shape. Will achieve.

10, 30; Magnetic levitation devices 11, 31; Magnetic bearing
12; Main body 20, 20 '; rail
311; Actuator 311a; Core body
311b, 311c; Secondary winding 211d; Permanent magnet
312, 312 '; Distance sensor 32; Support frame
321; Connection

Claims (6)

An actuator comprising a core body having three poles each protruding in three directions, a winding body which is respectively wrapped around two poles of the poles, and a permanent magnet disposed at the remaining one pole end. The method of claim 1, wherein the permanent magnet
Actuator, characterized in that arranged to have a line of magnetic force in parallel with the pole for fixing the permanent magnet. The method according to claim 1 or 2,
And the three poles are formed to protrude in the same plane. The method of claim 3, wherein
The two poles protrude in the same straight line, and the remaining one pole protrudes perpendicular to the two poles, the actuator characterized in that the core body to form a 'T' shape. In the magnetic bearings used for rails having a cross-section 'c',
A core body having three poles movably inserted into the rail and protruding to face the inner surface of the rail, a winding body which is respectively wrapped around two poles of the poles, and is disposed at one of the remaining pole ends Actuators with permanent magnets; And
A distance sensor disposed in the actuator to sense a distance between the rail and the pole and to transmit it to a controller that controls the supply of electricity to the winding body;
Magnetic bearing comprising a. A pair of rails having a cross-sectional shape of 'c',
A core body having three poles movably inserted into the rail and protruding to face the inner surface of the rail, a winding body which is respectively wrapped around two poles of the poles, and is disposed at one of the remaining pole ends Actuators with permanent magnets; And a distance sensor disposed in the actuator to sense a distance between the rail and the pole and transmit the sensing signal to a controller for controlling an electric supply to the winding body.
A support frame connecting the pair of magnetic bearings
Magnetic levitation device comprising a.

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