KR101091771B1 - Multichannel brightness detecting device of LED chip and method thereof - Google Patents

Abstract

The present invention relates to a multi-channel LED chip brightness measuring apparatus and method for measuring the brightness of the LED chip using the multi-channel, but does not require a separate inter-channel deviation correction. The multi-channel LED chip brightness measuring apparatus according to the present invention includes a luminance measuring unit for measuring the brightness of the LED chip through a plurality of channels that can measure the brightness of the plurality of LED chips together to obtain the measured brightness data of each LED chip; A reference luminance data determination unit for determining the reference luminance data of each LED chip based on the measured luminance data; and calculating a luminance correction value of each LED chip from the measured luminance data and the reference luminance data, And a luminance value calculator for calculating a corrected luminance value of each LED chip by applying a correction value for each channel to the measured luminance data.

Description

Multichannel brightness detecting device of LED chip and method

The present invention relates to an apparatus and a method for measuring the brightness of an LED chip, and more particularly, to measure the brightness of an LED chip using multiple channels, but does not require a separate channel-to-channel deviation correction. An apparatus and method are provided.

In order to measure the brightness of a plurality of LED (lignt emitting diode) chips formed on a wafer at a higher speed, a multi-channel luminance measuring device capable of measuring the luminance of several LED chips at a time is provided. It is used. Each channel has a probe pin for measuring the brightness of the LED chip, so that one channel can measure the brightness of one LED chip.

The multi-channel luminance measuring device has the advantage of measuring the luminance of several LED chips at the same time. However, since the measurement sensitivity is different for each channel, a correction value for each channel must be obtained before the measurement. To this end, after measuring the luminance value through each channel of the same LED chip before the measurement, the correction value for each channel is calculated so that the luminance values of each channel are the same. The correction value for each channel is generally calculated in the following way.

For example, when the multi-channel luminance measuring device has four channels, the same LED chip is measured with four channels. An example of the results of measuring the brightness of four channels using the same LED chip is shown in Table 1 below.

TABLE 1

division Channel 1 Channel 2 Channel 3 Channel 4 Luminance value 10 11 11.5 12

At this time, the correction value of each channel can be obtained by calculating the ratio of the measured luminance value of each channel to the luminance value of the channel 1 using the channel 1 as the reference channel. Examples of correction values for each channel are shown in Table 2 below.

TABLE 2

Channel 1 correction value Channel 2 correction value Channel 3 correction value Channel 4 correction value One 10/11 = 0.909 10 / 11.5 = 0.870 10/12 = 0.833

In this way, before measuring the luminance of the LED chip, the correction value for each channel is calculated, and then the correction value for each channel is multiplied by the actually measured luminance value to obtain a more accurate luminance value with the measured sensitivity of each channel corrected. It becomes possible. Table 3 below shows examples of luminance values actually measured by each channel and luminance values corrected by channel-specific correction values.

[Table 3]

division Channel 1 Channel 2 Channel 3 Channel 4 Measured luminance value 11 12 12.5 13 Channel correction value One 0.909 0.870 0.833 Corrected luminance value 11 × 1 =
11 12 × 0.909 = 10.91 12.5 × 0.870 = 10.86 13 × 0.833 = 10.83

As a result, as described above, if the channel-specific correction value is calculated first and then the method of applying the same to the measured luminance value is repeated, the luminance value of each channel measured sensitivity is obtained for the LED chip of the entire wafer. Can be.

However, since the light emitting characteristics of the LED chip may vary slightly from wafer to wafer, the above-described method requires calculating channel-specific correction values for each wafer. Therefore, there is a disadvantage that it takes a long time to measure the brightness. Since only one or a few LED chips are used to calculate the correction value for each channel, the characteristics of the entire wafer are not taken into account, so that the accuracy of the correction value for each channel is lowered, which is not suitable for measuring the brightness of an accurate LED chip. There is a problem.

SUMMARY The present invention has been made in an effort to provide a multi-channel LED chip luminance measuring apparatus and method that does not require deviation correction between channels when measuring the luminance of an LED chip using multiple channels.

Another technical problem to be solved by the present invention is to provide a computer-readable recording medium that records a program for executing a multi-channel LED chip brightness measurement method in a computer that does not require a separate inter-channel deviation correction.

In order to solve the above technical problem, the multi-channel LED chip brightness measuring apparatus according to the present invention measures the brightness of the LED chip through a plurality of channels that can measure the brightness of the plurality of LED chips to measure each LED chip A luminance measuring unit obtaining luminance data; A reference luminance data determiner which determines reference luminance data of each LED chip based on the measured luminance data; A correction value calculating unit calculating a luminance correction value of each LED chip from the measured luminance data and the reference luminance data, and calculating a correction value for each channel of each channel from each luminance correction value; And a luminance value calculating unit configured to calculate the corrected luminance value of each LED chip by applying the correction value for each channel to the measured luminance data.

In the multi-channel LED chip brightness measuring apparatus according to the present invention, the reference brightness data determining unit may determine the reference brightness data of the LED chip measured together through the plurality of channels to the same value. In addition, any one of measurement luminance data of the LED chip measured together through the plurality of channels may be determined as reference luminance data of the LED chip measured together.

In the multi-channel LED chip brightness measuring apparatus according to the present invention, the plurality of channels are arranged to measure the brightness of the plurality of LED chips arranged side by side, wherein the reference brightness data determination unit, The reference luminance data of the LED chips measured together may be determined to have a value that sequentially increases or decreases along the arrangement direction of the LED chips measured together. The reference luminance data determination unit determines that the reference luminance data of the LED chip measured by the reference channel is the same as the measured luminance data by using a channel disposed on one side of the plurality of channels as the reference channel. The reference luminance data of the LED chips measured by channels other than the channel can be determined to have a value between the measured luminance data of the LED chips measured by two adjacent reference channels arranged in the same column.

In the multi-channel LED chip brightness measuring apparatus according to the present invention, the correction value calculating unit calculates the brightness correction value by the ratio of the reference brightness data to the measured brightness data of each LED chip, and the LED chip measured by the same channel The correction value for each channel can be calculated from the average value of the luminance correction values. The luminance value calculator may calculate the corrected luminance value of each LED chip from the product of the measured luminance data of each LED chip and the correction value for each channel.

In order to solve the technical problem according to the present invention, the multi-channel LED chip brightness measuring method according to the present invention by measuring the brightness of the LED chip through a plurality of channels that can measure the brightness of the plurality of LED chips, each LED Obtaining measured luminance data of the chip; Determining reference luminance data of each LED chip based on the measured luminance data; Calculating a luminance correction value of each LED chip from the measured luminance data and the reference luminance data; Calculating a channel-specific correction value of each channel from the luminance correction value of each LED chip; And calculating the corrected luminance value of each LED chip by applying the correction value for each channel to the measured luminance data.

In the multi-channel LED chip brightness measurement method according to the invention, the reference luminance data of the LED chip measured together through the plurality of channels may be the same. The reference luminance data may be any one of measurement luminance data of the LED chip measured together through the plurality of channels.

In the multi-channel LED chip brightness measuring method according to the present invention, the plurality of channels are arranged to measure the brightness of the plurality of LED chips arranged side by side, and the LED chip measured together through the plurality of channels The reference luminance data may be sequentially increased or decreased along the arrangement direction of the LED chip to be measured together. The reference luminance data of the LED chip measured by the reference channel is the same as the measurement luminance data, using a channel disposed on one side of the plurality of channels as the reference channel, and the LED chip measured by a channel other than the reference channel. The reference luminance data of may have a value between the measured luminance data of the LED chip measured by two adjacent reference channels arranged in the same column.

In the multi-channel LED chip brightness measurement method according to the invention, the luminance correction value of each LED chip may be a ratio of the reference luminance data to the measurement luminance data of each LED chip, the correction value for each channel, It may be an average value of luminance correction values of the LED chip measured by the same channel. The corrected luminance value of each LED chip may be a product of the measured luminance data of each LED chip and the correction value for each channel.

According to the multi-channel LED chip brightness measuring apparatus and method according to the present invention, while measuring the brightness of the LED chip using the multi-channel, it is not necessary to correct the deviation between the separate channels, it is possible to reduce the measurement time simply do. Since the channel-to-channel correction value is calculated from the data measured for each wafer, the luminance of the LED chip can be measured more accurately.

Hereinafter, exemplary embodiments of a multi-channel LED chip brightness measuring apparatus and method according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention and to those skilled in the art to fully understand the scope of the invention. It is provided to inform you.

1 is a block diagram showing the configuration of a preferred embodiment of a multi-channel LED chip brightness measuring apparatus according to the present invention.

Referring to FIG. 1, the multi-channel LED chip luminance measuring apparatus 100 according to the present invention includes a luminance measuring unit 110, a reference luminance data determining unit 120, a correction value calculating unit 130, and a luminance value calculating unit ( 140).

 The luminance measuring unit 110 obtains measurement luminance data of each LED chip by measuring the luminance of the LED chip through a plurality of channels capable of measuring the luminance of the plurality of LED chips together. The luminance measuring unit 110 includes a plurality of channels having probe pins for measuring the luminance of the LED chip, and thus the luminance of the plurality of LED chips can be measured at one time through the plurality of channels. Therefore, the brightness of the LED chip formed on the wafer can be measured at high speed. For example, if the luminance measuring unit 110 having four channels is to measure all the luminance of the LED chip in the wafer on which 1000 LED chips are formed, a total of 250 measurements are performed. Measurement luminance data can be obtained. In this case, the plurality of channels may be arranged to measure the luminance of the plurality of LED chips arranged side by side. That is, N channels may be arranged so that N channels simultaneously measure the brightness of N (N is a natural number of 2 or more) LED chips arranged in a row. In addition, the luminance measuring unit 110 obtains measurement luminance data of each LED chip measured through a plurality of channels.

The reference luminance data determiner 120 determines reference luminance data of each LED chip. The reference luminance data of each LED chip is determined based on the measured luminance data of each LED chip obtained through the luminance measuring unit 110.

In this case, the reference luminance data determiner 120 may determine the reference luminance data of the LED chip measured together through the plurality of channels to the same value. That is, the reference luminance data may be determined assuming that the reference luminance data of the LED chips measured all at once have the same luminance value. In particular, one of the measured luminance data of the LED chip measured together through the plurality of channels may be determined as the reference luminance data of the LED chip measured together. When the luminance measuring unit 110 has four channels, the luminance of four LED chips is measured at one time through four channels, and the reference luminance data of the four LED chips measured together is determined by which of the four channels. The same may be determined as the luminance value measured by one (e.g., channel 1).

For example, measurement luminance data of four LED chips obtained through the luminance measuring unit 110 having four channels is shown in Table 4 below. Here, the first to fourth LED chips are measured together in four channels, and the first LED chip, the second LED chip, the third LED chip, and the fourth LED chip are channel 1, channel 2, channel 3, and channel 4, respectively. It is measured by.

[Table 4]

division First LED chip 2nd LED chip 3rd LED chip 4th LED chip Measurement luminance data 18.34 18.33 18.20 18.00

In this case, as shown in Table 5 below, the reference luminance data of the first to fourth LED chips may be determined as 18.34, which is the measured luminance data measured by the channel 1.

TABLE 5

division First LED chip 2nd LED chip 3rd LED chip 4th LED chip Reference luminance data 18.34 18.34 18.34 18.34

In addition, the reference luminance data determiner 120 may determine that the reference luminance data of the LED chip measured together through the plurality of channels has a value that sequentially increases or decreases along the arrangement direction of the LED chip measured together. That is, the reference luminance data of the LED chip measured at one time may be determined to have a luminance value that sequentially increases or decreases. To this end, the plurality of channels may be arranged to measure the luminance of the plurality of LED chips arranged side by side as described above. In this case, the reference luminance data of the LED chip measured by the reference channel may be determined to be the same as the measured luminance data by using the channel disposed on one side of the plurality of channels as the reference channel. The reference luminance data of the LED chip measured by channels other than the reference channel may be determined to have a value between the measured luminance data of the LED chips measured by two adjacent reference channels arranged in the same column. That is, it is assumed that the reference luminance data of the LED chips measured at once are gradually changed to the measured luminance data of the adjacent LED chips, so that the reference luminance data can be determined.

For example, Table 6 shows measurement luminance data of five LED chips arranged in a row obtained through the luminance measuring unit 110 having four channels. Wherein the first to fourth LED chips are measured together in four channels, the first and fifth LED chips are measured in channel 1, and the second, third and fourth LED chips are respectively channels. 2, channel 3 and channel 4.

TABLE 6

division First LED chip 2nd LED chip 3rd LED chip 4th LED chip 5th LED chip Measurement luminance data 18.34 18.33 18.20 18.00 18.40

Herein, when the reference channel is referred to as channel 1, reference luminance data of the first LED chip and the fifth LED chip may be determined to be 18.34 and 18.40, respectively, to be the same as the measured luminance data. The reference luminance data of the second, third and fourth LED chips may be determined to change gradually from 18.34 to 18.40. These results are shown in Table 7.

TABLE 7

division First LED chip 2nd LED chip 3rd LED chip 4th LED chip 5th LED chip Reference luminance data 18.34 18.36 18.39 18.40 18.40

As a result, the reference luminance data determiner 120 determines the reference luminance data based on the measured luminance data acquired through the luminance measurer 110 as described above.

The correction value calculator 130 calculates a luminance correction value of each LED chip and a correction value for each channel of each channel. The luminance correction value of each LED chip is calculated from the measured luminance data obtained through the luminance measuring unit 110 and the reference luminance data determined through the reference luminance data determining unit 120. Preferably, as shown in following formula (1), it calculates as ratio of the reference luminance data with respect to the measurement luminance data of each LED chip.

(1)

(One)

The correction value for each channel is calculated from the average value of the luminance correction values for each channel. That is, the correction value for each channel is calculated by averaging the brightness correction values of various LED chips measured by the same channel.

The luminance value calculator 140 calculates the corrected luminance value of each LED chip whose measurement sensitivity of each channel is corrected. As shown in Equation (2) below, the corrected luminance value of each LED chip is calculated using the measured luminance data and the correction value calculator 130 of each LED chip obtained through the luminance measuring unit 110. It is calculated by multiplying the channel-specific correction value of the channel.

(Corrected luminance value) = (measured luminance data) × (correction value for each channel) (2)

The corrected luminance value calculated by the above method is corrected for the measurement sensitivity of each channel, which is accurate with the luminance of the actual LED chip. Since only a few samples are selected and the measurement sensitivity for each channel is not corrected, and all the LED chips in the entire wafer are used for the calibration, the characteristics in the entire wafer are taken into account and the accuracy is higher. As a result, when the brightness of the LED chip is measured using the multi-channel LED chip brightness measuring apparatus 100 described above, the brightness accuracy is increased while reducing the measurement time by measuring the brightness using the multi-channel.

2 is a flowchart illustrating a process of performing a preferred embodiment of the multi-channel LED chip brightness measurement method according to the present invention. The multi-channel LED chip brightness measuring method illustrated in FIG. 2 may be performed using the multi-channel LED chip brightness measuring apparatus 100 of FIG. 1.

Referring to FIG. 2 together with FIG. 1, in the multi-channel LED chip luminance measuring method according to the present invention, first, the luminance of an LED chip formed on a wafer is measured to obtain measurement luminance data of each LED chip (S210). . Measurement luminance data of each LED chip may be obtained through the luminance measuring unit 110 of FIG. 1. That is, the luminance of the LED chip on the wafer is measured through a plurality of channels capable of measuring the luminance of the plurality of LED chips at once, thereby obtaining measurement luminance data of each LED chip.

Next, the reference luminance data of each LED chip is determined based on the measured luminance data acquired in step S210 (S220). Reference luminance data of each LED chip may be determined through the reference luminance data determiner 120 of FIG. 1. The reference luminance data can be determined in two ways. One of them assumes that the reference luminance data of the LED chips measured all at once have the same luminance value, so that all of the reference luminance data of the LED chips measured at the same time can be determined to be the same. In particular, one of the measured luminance data of the LED chip measured together through the plurality of channels may be determined as the reference luminance data of the LED chip measured together. Examples of obtaining reference luminance data by this method have been described in detail in Tables 4 and 5.

On the other hand, the reference luminance data of the LED chip measured at one time may be determined to have a luminance value that sequentially increases or decreases. To this end, the plurality of channels may be arranged to measure the luminance of the plurality of LED chips arranged side by side as described above. In this case, the reference luminance data of the LED chip measured by the reference channel may be determined to be the same as the measured luminance data by using the channel disposed on one side of the plurality of channels as the reference channel. The reference luminance data of the LED chip measured by channels other than the reference channel may be determined to have a value between the measured luminance data of the LED chips measured by two adjacent reference channels arranged in the same column. That is, it is assumed that the reference luminance data of the LED chips measured at once are gradually changed to the measured luminance data of the adjacent LED chips, so that the reference luminance data can be determined. An example of obtaining reference luminance data by this method has been described in detail in Tables 6 and 7.

Next, the luminance correction value of each LED chip is calculated from the measured luminance data obtained through the step S210 and the reference luminance data determined through the step S220 (S230). The luminance correction value of each LED chip may be calculated through the correction value calculator 130 of FIG. 1. That is, the luminance correction value of each LED chip is calculated as the ratio of the reference luminance data to the measured luminance data of each LED chip as shown in the above formula (1).

Next, a channel-specific correction value of each channel is calculated from the luminance correction value of each LED chip calculated through the step S230 (S240). The correction value for each channel of each channel may be calculated through the correction value calculator 130 of FIG. 1. That is, the channel-specific correction value of each channel is calculated by averaging the luminance correction values of various LED chips measured by the same channel.

Next, the corrected luminance value of each LED chip is calculated by applying the channel-specific correction value of each channel calculated in step S240 to the measured luminance data obtained in step S210 (S250). The corrected luminance value of each LED chip may be calculated through the luminance value calculator 140 of FIG. 1. The corrected luminance value of each LED chip is calculated by multiplying the measured luminance data of each LED chip by the channel-specific correction value of each channel, as shown in Equation (2) above.

3 to 5 show the results of measuring the luminance of the LED chip formed on the wafer in various ways. 3 is a view showing the results of measuring the brightness of the LED chip on the wafer by using the LED chip brightness measuring device having one channel, Figure 4 is used for the LED chip brightness measuring device having four channels, for each channel The result of measuring the brightness of the LED chip on a wafer without correction. 5 is a view showing a result of measuring the brightness of the LED chip on the wafer by using the multi-channel LED chip brightness measuring apparatus according to the present invention.

3 to 5, the measurement of the brightness of the LED chip in one channel (FIG. 3) is more accurate than the measurement of the brightness of the LED chip in four channels (FIGS. 4 and 5). (Because there is no difference in measurement sensitivity for each channel). However, measuring the brightness of the LED chip over the entire wafer area in one channel is time-consuming. Thus, when measuring the brightness of the LED chip in four channels (Figs. 4 and 5), the measurement time is significantly shortened, but accuracy is a problem due to the difference in the measurement sensitivity for each channel. As shown in FIG. 4, when the luminance of the LED chip is measured without correction for each channel, the difference between the luminance distribution and the luminance shown in FIG. 3 becomes large. In particular, there is a problem in that a specific channel periodically becomes smaller or larger than other channel measurements due to the difference in characteristics of each channel.

On the contrary, as shown in FIG. 5, when the luminance of the LED chip is measured through the method according to the present invention, a difference from the luminance distribution shown in FIG. 3 is not large. In particular, the correction is performed by the difference in the measurement sensitivity for each channel, so that the problem that the specific channel is smaller or larger than other channel measurement values as shown in FIG. 4 does not occur periodically. Therefore, if the brightness of the LED chip is measured using the method according to the present invention, the measurement time is shortened without a large difference from the result of measuring the brightness of the LED chip using one channel.

Hereinafter, two embodiments of a multi-channel LED chip brightness measuring method according to the present invention will be described.

First Example : Measured all at once LED  When all the reference luminance data of the chip is the same

6 is a diagram for explaining a first embodiment. In the first embodiment, four channels are provided. The four channels are arranged so that the luminance of four LED chips arranged in a row can be measured at once. In the first embodiment, the measurement target LED chip 610 is 24 LED chips arranged in 3x8 as shown at the top of FIG.

Referring to FIG. 6, the first embodiment measures luminance from four LED chips arranged on the left side of the first row of the LEDs 610 to be measured, and moves a channel or a wafer to measure the LEDs 610 to be measured. Measure all of the luminance. Since the LEDs 610 to be measured are arranged in 3 × 8, the luminance is measured six times in total. Then, measurement luminance data as shown in Fig. 6A is obtained from the luminance measurement result.

Next, reference luminance data is determined from the measured luminance data in FIG. At this time, from the assumption that the luminance of the LED chip in the wafer does not change rapidly, the reference luminance data is determined so that the reference luminance data of the LED chip measured simultaneously through the four channels is the same as the measurement luminance data of the channel 1. The results are shown in FIG. 6 (b). The reference luminance data of the LED chips 631 to 636 measured at the same time are the same. For example, the reference luminance data of the LED chips 631 in which (x, y) is located at (1,1), (2,1), (3,1), and (4,1) is all equal to (x, y). 18.34 is measured luminance data of LED chip located at (1,1).

Next, the luminance correction value is calculated from the ratio of the reference luminance data (Fig. 6 (b)) to the respective measured luminance data (Fig. 6 (a)). The results are shown in Figure 6 (c). LED chips measured by channel 1 ((x, y) = (1,1), (1,2), (1,3), (5,1), (5,2), (5,3) ), The luminance correction value is 1 because the measured luminance data and the reference luminance data are the same. And other LED chips have various luminance correction values. For example, an LED chip in which (x, y) is located at (2,1) has a measurement luminance data of 18.33 and reference luminance data of 18.34, so that the luminance correction value is 18.34 / 18.33 = 1.001. In the LED chip where (x, y) is located at (6,1), the luminance correction value is 18.40 / 18.46 = 0.997 because the measurement luminance data is 18.46 and the reference luminance data is 18.40.

Next, the average of the luminance correction values (Fig. 6 (c)) of each channel is calculated to calculate the correction values for each channel. In the case of channel 1, since the luminance correction values are all 1, the correction value for each channel is also 1. And for channel 2, the LEDs where (x, y) are located at (2,1), (2,2), (2,3), (6,1), (6,2), (6,3) The average of the luminance correction values of the chips yields a correction value of channel 2 of 1.002. For channel 3, the LED chip where (x, y) is located at (3,1), (3,2), (3,3), (7,1), (7,2), (7,3) The average of the luminance correction values of the three channels is calculated as the correction value of channel 3 of 1.005.In the case of channel 4, (x, y) is (4,1), (4,2), (4,3), (8 The correction value of channel 4 of 1.015 is calculated from the average of the brightness correction values of the LED chips located at (1), (8, 2), and (8, 3). This is shown in Figure 6 (d).

Next, the corrected luminance value is calculated by multiplying each channel-corrected value (Fig. 6 (d)) by the measured luminance data (Fig. 6 (a)). For example, an LED chip (measured with channel 2) where (x, y) is located at (2,1) has a measured luminance data of 18.33 and a correction value of channel 2 of 1.002, so that the corrected luminance value is 18.33 × 1.002 = 18.36. . The LED chip (measured with channel 4) where (x, y) is located at (8,2) has a measured luminance data of 18.22 and a correction value of channel 4 of 1.015, so that the corrected luminance value is 18.22 × 1.015 = 18.49. Other LED chips can calculate the corrected luminance value through the same method, and the results are shown in FIG.

Through this method, the luminance value (Fig. 6 (e)) in which the measurement sensitivity for each channel is corrected can be calculated.

2nd Example : Measured all at once LED  When the reference luminance data of the chip is gradually changed to the adjacent reference luminance data

7 is a diagram for explaining a second embodiment. The second embodiment is a case where four channels are provided, and four channels are arranged to measure luminance of four LED chips arranged in a row at once. In the second embodiment, the measurement target LED chip 710 is 24 LED chips arranged in 3x8 as shown at the top of FIG. 7, and one LED chip in each row to determine the reference luminance data. The luminance of 720 is further measured by channel 1.

Referring to FIG. 7, the second embodiment measures luminance from four LED chips arranged on the left side of the first row of the LEDs 710 to be measured, and moves a channel or a wafer to measure the LEDs 610 to be measured. Measure all of the luminance. The measurement target LED chip 610 is arranged in a 3x8, including up to one LED chip 720 in each row, a total of nine times to measure the luminance. Then, measurement luminance data as shown in Fig. 7A is obtained from the luminance measurement result.

Next, reference luminance data is determined from the measured luminance data in FIG. At this time, from the assumption that the brightness of the LED chip in the wafer does not change rapidly, the reference brightness data of the LED chip measured at once through the four channels and the reference brightness data of the adjacent LED chip are determined to change gradually. . That is, the reference luminance data of the LED chip measured by the channel 1 is the same as the measured luminance data, with the channel 1 as the reference channel, and the reference luminance data of the LED chip measured by the channels 2, 3, and 4 is transferred to the channel 1 of both sides. It is determined to increase or decrease sequentially while having a value between the reference luminance data of the measured LED chip.

For example, (x, y) measured at once through four channels is adjacent to the reference luminance data of the LED chips located at (1,1), (2,1), (3,1), and (4,1). The reference luminance data of the LED chip where (x, y) is located at (5, 1) is determined so that the reference luminance data gradually changes. That is, the measurement luminance data of the LED chip where (x, y) is located at (1,1) is 18.34, and the measurement luminance data of the LED chip where (x, y) is located at (5,1) is 18.40, so that (x The reference luminance data of the LED chip where, y) is located at (1,1) is 18.34, and the reference luminance data of the LED chip where (x, y) is located at (5,1) is 18.40. Each reference luminance data is 18.36, so that (x, y) gradually changes the reference luminance data of the LED chips at (2,1), (3,1), and (4,1) from 18.34 to 18.40. Decide to be 18.37, 18.39. In the same way, the measured luminance data of the LED chip where (x, y) is located at (5,2) is 18.40, and the measured luminance data of the LED chip where (x, y) is located at (9,2) is 18.43. The reference luminance data of the LED chips where x, y) is located at (5,2), (6,2), (7,2), and (8,2) gradually changes from 18.40 to 18.43, respectively. The data is determined to be 18.40, 18.41, 18.42, 18.43. Reference luminance data of other LED chips can also be determined in this manner, and the results are shown in FIG.

Next, the luminance correction value is calculated from the ratio of the reference luminance data (Fig. 7 (b)) to the respective measurement luminance data (Fig. 7 (a)). The results are shown in Figure 7 (c). LED chips measured by channel 1 ((x, y) = (1,1), (1,2), (1,3), (5,1), (5,2), (5,3) ), The luminance correction value is 1 because the measured luminance data and the reference luminance data are the same. And other LED chips have various luminance correction values. For example, an LED chip in which (x, y) is located at (2,1) has a luminance measurement value of 18.33 and reference luminance data of 18.36, so that the luminance correction value is 18.36 / 18.33 = 1.001. The LED chip having (x, y) at (4,3) has a measured luminance data of 18.01 and reference luminance data of 18.41, so that the luminance correction value is 18.41 / 18.01 = 1.022.

Next, the average of the luminance correction values (Fig. 7 (c)) of each channel is calculated to calculate the correction values for each channel. In the case of channel 1, since the luminance correction values are all 1, the correction value for each channel is also 1. And for channel 2, the LEDs where (x, y) are located at (2,1), (2,2), (2,3), (6,1), (6,2), (6,3) When the average of the luminance correction values of the chips is obtained, the correction value of channel 2, which is 1.003, is calculated. For channel 3, the LED chip where (x, y) is located at (3,1), (3,2), (3,3), (7,1), (7,2), (7,3) The average value of the luminance correction values of these channels is calculated as the correction value of channel 3 of 1.007, and for channel 4, (x, y) is (4,1), (4,2), (4,3), (8 The correction value of channel 4 of 1.019 is calculated from the average of the luminance correction values of the LED chips located at (1), (8, 2), and (8, 3). This is shown in Figure 7 (d).

Next, the corrected luminance value is calculated by multiplying each channel-corrected value (Fig. 7 (d)) by the measured luminance data (Fig. 7 (a)). For example, an LED chip (measured with channel 3) where (x, y) is located at (3,1) has a measured luminance data of 18.20 and a correction value of channel 3 of 1.007, so that the corrected luminance value is 18.20 × 1.007 = 18.33. . The LED chip (measured with channel 2) where (x, y) is located at (6, 2) has a measured luminance data of 18.40 and a correction value of channel 2 of 1.003, so that the corrected luminance value is 18.40 × 1.003 = 18.46. Other LED chips can calculate the corrected luminance value through the same method, and the result is shown in FIG.

Through this method, the luminance value (Fig. 7 (e)) in which the measurement sensitivity for each channel is corrected can be calculated.

The multi-channel LED chip brightness measuring method of the present invention can also be embodied as computer readable codes on a computer readable recording medium. For example, it is possible to program the multi-channel LED chip brightness measurement method shown in FIG. 2 to a computer-readable recording medium. Such a program may be controlled to obtain the measured luminance data of each LED chip by transmitting the LED chip luminance measurement start command to the luminance measurement unit 110 shown in FIG. 1 (S210). The program may control a command to the reference luminance data determiner 120 to determine reference luminance data of each LED chip based on the measured luminance data (S220). The program calculates a luminance correction value of each LED chip from the measured luminance data and the reference luminance data in the correction value calculator 130 (S230), and calculates a correction value for each channel of each channel from the luminance correction value of each LED chip. The command may be controlled to calculate (S240). The program may control the command to the luminance value calculator 140 to calculate the corrected luminance value of each LED chip by applying the correction value for each channel to the measured luminance data (S250). An example of such a program is shown in FIG. 8.

The computer-readable recording medium includes all kinds of recording devices in which data that can be read by a computer system is stored. Examples of the computer-readable recording medium include a ROM, a RAM, a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like, and may be implemented in the form of a carrier wave (for example, transmission via the Internet) . The computer readable recording medium can also be distributed over network coupled computer systems so that the computer readable code is stored and executed in a distributed fashion. Such a recording medium may be mounted on a computer and operated in the multi-channel LED chip brightness measuring apparatus of FIG. 1.

Although the preferred embodiments of the present invention have been shown and described above, the present invention is not limited to the specific preferred embodiments described above, and the present invention belongs to the present invention without departing from the gist of the present invention as claimed in the claims. Various modifications can be made by those skilled in the art, and such changes are within the scope of the claims.

1 is a block diagram showing the configuration of a preferred embodiment of a multi-channel LED chip brightness measuring apparatus according to the present invention.

2 is a flowchart illustrating a process of performing a preferred embodiment of the multi-channel LED chip brightness measurement method according to the present invention.

3 is a view showing the results of measuring the brightness of the LED chip on the wafer using an LED chip brightness measuring device having one channel.

4 is a view showing the results of measuring the brightness of the LED chip on the wafer using the LED chip brightness measuring apparatus having four channels, without channel-by-channel correction.

5 is a view showing a result of measuring the brightness of the LED chip on the wafer by using the multi-channel LED chip brightness measuring apparatus according to the present invention.

6 is a view for explaining a first embodiment of a multi-channel LED chip brightness measuring method according to the present invention.

7 is a view for explaining a second embodiment of a multi-channel LED chip brightness measurement method according to the present invention.

8 is an example embodied as computer readable codes on a computer readable recording medium of the multi-channel LED chip brightness measuring method according to the present invention.

Claims (16)

delete delete delete A luminance measuring unit for measuring the luminance of the LED chip through a plurality of channels capable of measuring the luminance of the plurality of LED chips together to obtain measurement luminance data of each LED chip; A reference luminance data determiner which determines reference luminance data of each LED chip based on the measured luminance data; A correction value calculating unit calculating a luminance correction value of each LED chip from the measured luminance data and the reference luminance data, and calculating a correction value for each channel of each channel from each luminance correction value; And And a luminance value calculator which applies a correction value for each channel to the measured luminance data to calculate a corrected luminance value of each LED chip. The plurality of channels are arranged to measure the luminance of the plurality of LED chips arranged side by side, The reference luminance data determination unit, And determining the reference luminance data of the LED chip measured together through the plurality of channels to have a value that sequentially increases or decreases along the arrangement direction of the LED chip measured together. 5. The method of claim 4, A channel disposed on one side of the plurality of channels as a reference channel, The reference luminance data determination unit, The reference luminance data of the LED chip measured by the reference channel is determined to be the same as the measurement luminance data, The reference luminance data of the LED chip measured by a channel other than the reference channel is determined to have a value between the measured luminance data of the LED chip measured by two adjacent reference channels arranged in the same column. Luminance measuring device. The method according to claim 4 or 5, The correction value calculation unit, The luminance correction value is calculated from the ratio of the reference luminance data to the measured luminance data of each LED chip, A multi-channel LED chip brightness measuring device, characterized in that for calculating the correction value for each channel from the average value of the brightness correction value of the LED chip measured by the same channel. The method of claim 6, The luminance value calculation unit, And a corrected luminance value of each LED chip is calculated from a product of measured luminance data of each LED chip and the correction value for each channel. delete delete delete Measuring the luminance of the LED chip through a plurality of channels capable of measuring the luminance of the plurality of LED chips together to obtain measurement luminance data of each LED chip; Determining reference luminance data of each LED chip based on the measured luminance data; Calculating a luminance correction value of each LED chip from the measured luminance data and the reference luminance data; Calculating a channel-specific correction value of each channel from the luminance correction value of each LED chip; And Calculating the corrected luminance value of each LED chip by applying the correction value for each channel to the measured luminance data; The plurality of channels are arranged to measure the luminance of the plurality of LED chips arranged side by side, The reference luminance data of the LED chip measured together through the plurality of channels is a multi-channel LED chip brightness measurement method characterized in that sequentially increases or decreases along the arrangement direction of the LED chip to be measured together. The method of claim 11, A channel disposed on one side of the plurality of channels as a reference channel, The reference luminance data of the LED chip measured by the reference channel is the same as the measurement luminance data, The reference luminance data of the LED chip measured by a channel other than the reference channel has a value between the measured luminance data of the LED chip measured by two adjacent reference channels arranged in the same column. Way. 13. The method according to claim 11 or 12, The luminance correction value of each LED chip, And a ratio of the reference luminance data to the measured luminance data of each LED chip. The method of claim 13, The correction value for each channel is A multi-channel LED chip brightness measurement method, characterized in that the average value of the brightness correction value of the LED chip measured by the same channel. The method of claim 14, The corrected luminance value of each LED chip, The multi-channel LED chip brightness measurement method, characterized in that the product of the measured luminance data of each LED chip and the correction value for each channel. A computer-readable recording medium having recorded thereon a program for executing the multichannel LED chip brightness measurement method according to claim 15 on a computer.

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