KR101083777B1 - Temperature controlling apparatus and chemical coating apparatus with it - Google Patents

Abstract

The present invention relates to a temperature control device for controlling the temperature of the chemical liquid by using a thermoelectric element and a chemical liquid applying apparatus having the same. The temperature control device includes a head having a nozzle surface for providing a plurality of nozzles for discharging the chemical liquid to the surface of the substrate, a body coupled with the other side of the nozzle surface of the head, and provided in the body to store the chemical liquid, It includes a reservoir for supplying to the nozzles, and a thermoelectric element which is installed outside the one side wall of the reservoir and heats or cools the chemical liquid stored in the reservoir in correspondence to the application direction of the power source. According to the present invention, by using one thermoelectric element to adjust the temperature of the chemical liquid of the inkjet head, the chemical liquid can be heated and cooled, the configuration for adjusting the chemical liquid temperature of the inkjet head is simple, and temperature control is easy. Do.

Chemical coating device, inkjet printing unit, reservoir, thermostat, thermoelectric element

Description

TEMPERATURE CONTROLLING APPARATUS AND CHEMICAL COATING APPARATUS WITH IT

The present invention relates to a chemical liquid applying device, and more particularly, to an inkjet head for applying an ink jet type chemical liquid, and a temperature adjusting device for controlling the temperature of the chemical liquid using a thermoelectric element, and a chemical liquid applying device having the same.

In general, liquid crystal displays display full color, for example, by passing light modulated by the liquid crystal layer through a color filter. The color filter is formed by, for example, arranging filter elements of each color on the R (red), G (green), and B (blue) dots on the surface of the glass substrate in a stripe arrangement, a delta arrangement, or a mosaic arrangement. do.

In the manufacturing process of a liquid crystal display device, in order to manufacture a color filter, an oriented film, etc., a chemical | medical solution is supplied and apply | coated to the surface of a glass substrate. As a chemical liquid applying device for applying such a chemical liquid, there is an ink jet type chemical liquid applying device for discharging and applying the chemical liquid to the surface of a substrate. This chemical liquid applying apparatus applies the chemical liquid by inkjet printing using a plurality of inkjet heads. The inkjet head includes a head having a plurality of nozzles which move in various directions with respect to a substrate to supply a chemical liquid. The head receives the chemical liquid from a reservoir for temporarily storing the chemical liquid on the top and discharges the chemical liquid to the surface of the substrate by the nozzles, respectively.

The reservoir is a chemical solution of R, G or B color, and contains a strong solvent component and stores a highly viscous chemical liquid. The reservoir controls the temperature of the chemical liquid and supplies the chemical liquid to the respective nozzles. For example, an inkjet head discharges a chemical liquid using a piezoelectric piezoelectric element, at which time the reservoir heats the chemical liquid to supply the liquid with low viscosity. To this end, a highly viscous chemical should be applied with a higher piezoelectric element voltage than a less viscous chemical. In general, a heater is provided in the reservoir to heat the chemical liquid. The reservoir has a narrow inner space and includes a rod-shaped heater. In order to control such a heater, it is necessary to configure a temperature control device, a temperature sensing sensor, an overheat prevention sensor, and the like, and the configuration for controlling these devices is complicated. In addition, because the reservoir has a small internal space, it is difficult to install a cooling line. Therefore, such an air-cooled reservoir cannot precisely control the cooling temperature of the chemical liquid.

An object of the present invention is to provide a temperature control device for controlling the temperature of the chemical liquid of the inkjet head and a chemical liquid applying apparatus having the same.

Another object of the present invention is to provide a temperature control device having a simple configuration and easy control for adjusting the temperature of a chemical liquid of an inkjet head, and a chemical liquid applying apparatus having the same.

Still another object of the present invention is to provide a temperature control device for adjusting a chemical liquid temperature of an inkjet head using a thermoelectric element, and a chemical liquid applying device having the same.

In order to achieve the above objects, the temperature regulating device of the present invention is characterized by using a thermoelectric element to adjust the temperature of the chemical liquid of the inkjet head. Such a temperature control device is capable of heating and cooling the chemical liquid with one thermoelectric element.

According to an aspect of the present invention, a temperature control device includes a head having a nozzle surface that provides a plurality of nozzles for discharging a chemical liquid to an upper surface of the object; A body coupled to the other side of the nozzle face of the head; A reservoir provided in the body to store the chemical liquid and supply the chemical liquid to the nozzles; It is installed outside the one side wall of the reservoir, and includes a thermoelectric element for heating or cooling the chemical liquid stored in the reservoir in accordance with the direction of the power applied.

In one embodiment, the reservoir is provided with a groove in which the thermoelectric element is inserted and separated outside the one side wall.

In another embodiment, the temperature control device; And a plurality of fixing members coupled to the outside of the one side wall of the reservoir so that the thermoelectric element is inserted into and fixed to the groove.

In another embodiment, the temperature control device further includes a switching member for switching the application direction of the power supplied to the thermoelectric element.

In another embodiment, the temperature control device; A temperature sensor for sensing a temperature of the chemical liquid of the reservoir; The controller may further include a controller configured to control the switching member to heat or cool the chemical liquid by receiving a feedback signal sensed by the temperature sensor.

According to another feature of the present invention, there is provided a chemical liquid applying device including a temperature control device using a thermoelectric element. Such a chemical liquid applying apparatus of the present invention can easily control the temperature of the chemical liquid supplied from the nozzles of the inkjet head to the substrate surface.

The chemical | medical solution coating apparatus of this characteristic is a stage; A chuck installed on an upper part of the stage to seat an object; A head assembly for discharging the chemical liquid to the upper surface of the object; And a drive unit coupled to the head assembly to move the head assembly in at least one direction above the object. Wherein the head assembly; A plurality of heads having a nozzle surface for providing a plurality of nozzles for ejecting a chemical liquid to an upper surface of the object; A body coupled to the other side of the nozzle face of each of the heads; A reservoir provided in the body to store the chemical liquid and supply the chemical liquid to the nozzles; A temperature sensor installed inside the reservoir to sense a temperature of the chemical liquid of the reservoir; It is installed outside the one side wall of the reservoir, and includes a temperature control device for heating or cooling the chemical liquid stored in the reservoir corresponding to the application direction of the power.

In one embodiment, the temperature control device is provided with one thermoelectric element.

In another embodiment, the reservoir is provided with a groove in which the thermoelectric element is inserted and separated outside the one side wall.

In another embodiment, the chemical applying device; And a plurality of fixing members coupled to the outside of the one side wall of the reservoir so that the thermoelectric element is inserted into and fixed to the groove.

In another embodiment, the chemical applying device; A switching member which switches the application direction of power supplied to the thermoelectric element; A temperature sensor for sensing a temperature of the chemical liquid of the reservoir; The controller may further include a controller configured to control the switching member to heat or cool the chemical liquid by receiving a feedback signal sensed by the temperature sensor.

As described above, the temperature control device of the present invention is capable of heating and cooling the chemical liquid with one thermoelectric element by using a thermoelectric element to adjust the temperature of the chemical liquid of the inkjet head. Therefore, the configuration for adjusting the chemical liquid temperature of the inkjet head is simple, and the temperature control is easy.

In addition, the thermostat device of the present invention is installed on the outer wall of the reservoir by using a middle partition wall so that one thermoelectric element is separated from the chemical liquid in the reservoir, so that the thermoelectric element can be easily maintained without replacing the inkjet head. Do.

In addition, the temperature control device of the present invention is capable of controlling the temperature regardless of the level of the chemical liquid stored in the reservoir by heating and cooling the chemical liquid using one thermoelectric element.

The embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be interpreted as being limited by the embodiments described below. This embodiment is provided to more completely explain the present invention to those skilled in the art. Therefore, the shapes and the like of the components in the drawings are exaggerated in order to emphasize a clearer explanation.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to FIGS. 1 to 8.

1 is a view showing a schematic configuration of a chemical liquid applying apparatus according to the present invention.

Referring to FIG. 1, a chemical liquid applying apparatus 100 is a facility for applying a chemical liquid to an upper surface of an object by an inkjet method, and includes an inkjet printing unit 110 according to the present invention. The object may be a rectangular flat plate, for example, a glass substrate for manufacturing a color filter, an alignment film, or the like of a liquid crystal display panel, a printed circuit board for forming a metal thin film on a circuit pattern, and And a plate for printing the chemical liquid by an inkjet method. In the embodiment of the present invention will be described in detail using a glass substrate (S) for producing a color filter as an object.

The chemical liquid applying apparatus 100 draws a substrate from an inkjet printing unit 110 that prints a substrate surface by an inkjet method, a loader 102 on which a plurality of substrates are loaded, and the loader 102 and inkjet printing. An index 106 for supplying the unit 110, a baker and oven 108 for receiving and baking a substrate coated with a chemical liquid from the index 106, and an unloader for loading the baked substrate. (unloader) 104. The index 106 is equipped with a transfer robot (not shown) for transferring the substrate between the loader 102, the inkjet printing unit 110, the baking unit 108, and the unloader 104. The chemical liquid applying apparatus 100 includes a chemical liquid supply unit 105 for supplying a chemical liquid to the inkjet printing unit 110. Moreover, the chemical | medical agent application apparatus 100 is a full-length control part, and is equipped with the main control part 101 which controls the general operation | movement of the chemical | medical solution application apparatus 100. As shown in FIG.

Specifically, FIGS. 2 and 3 are diagrams showing the configuration of the inkjet printing unit.

2 and 3, the inkjet printing unit 110 is an apparatus for applying a chemical liquid to the surface of the substrate S by an inkjet method, and includes a steel base 116 and a stage disposed on the base 116. And a head assembly 200 having a plurality of inkjet heads 210 disposed on the stage 112 and applying a chemical to a surface of the substrate S seated on the stage 112. And a gantry 114 supporting 200. In addition, the inkjet printing unit 110 includes a plurality of dustproof members 113 for blocking vibration between the base 116 and the stage 112.

The head assambly 200 is provided as a multi head array (MHA) unit. The head assembly 200 is coupled to a plurality of inkjet heads 210 (210a to 210c) for ejecting a chemical liquid by an inkjet method, a bracket 202 on which the inkjet heads 210 are installed, and a bracket 202 to be combined with the head assembly. And a drive unit 204 for moving the 200 in at least one direction.

For example, a plurality of inkjet heads 210 are provided in two rows on the front and rear surfaces of the bracket 202. That is, a plurality of inkjet heads 210 are arranged side by side on both front and rear sides of the bracket 202 in the Y-axis direction. Each of the inkjet heads 210 may be connected to a chemical liquid supply part 105 of FIG. 1 to receive chemical liquids. Each of the inkjet heads 210 may be supplied with the same or different chemicals.

The inkjet head 210 is a device for discharging the chemical liquid to the surface of the substrate (S), each of the inkjet head 210 is provided by the head (214 in Figure 4) at the lower end. The head 214 has a nozzle surface provided with a plurality of nozzles (not shown) for supplying a chemical liquid to the substrate S on a lower surface opposite to the substrate S surface. Each nozzle discharges the chemical liquid to the substrate S individually.

When the object is a substrate for a color filter, the inkjet heads 210 respectively supply one of R, G, and B color chemicals. At this time, the chemical liquids are inks of R color, G color, and B color. The inkjet heads 210 respectively supplying the R, G, and B color chemicals are disposed adjacent to each other.

The driving unit 204 is coupled to the bracket 202 in which the inkjet heads 210 are installed, and the first guide members 150 and 152 and the head assembly 200 which move the head assembly 200 in the first direction. A second guide member 206 for moving in the second direction, and a drive unit (not shown). The drive unit 204 is moved along the support 114 in a first direction (ie, Y axis) or in a second direction (ie, X axis). The drive unit 204 also moves the head assembly 204 in a third direction (ie, Z axis). In addition, the driving unit 204 rotates about the central axis of each of the inkjet heads 210.

The stage 112 is provided with a stone plate and is disposed on one side of the upper side, and a chucking unit 120 for chucking the substrate S, and a washing unit disposed on the other side of the top to clean the head assembly 200 ( 130, 140). The chucking unit 120 linearly moves toward the index 106 to receive the substrate S. When the substrate S is seated, the chucking unit 120 chucks to move to the opposite side of the index 106, that is, to a position to apply the chemical to the substrate S. It includes a chuck 124, a chuck driver 126 for moving or rotating the chuck 124 in at least one linear direction, and a third guide member 122 for guiding the chuck 124 in a linear movement. The chuck 124 has a lower portion coupled to the chuck driver 126 and linearly moved along the third guide member 122 in the Y axis direction.

In addition, the stage 112 is provided with first guide members 150 and 152 corresponding to both ends of the support 114. The first guide members 150 and 152 extend along the Y axis direction to have the same width as the stage 112. The first guide members 150 and 152 are elongated at the upper ends of the stage 112 along the Y axis direction to linearly move the support 114 in the Y axis direction.

Support 114 is coupled to the drive unit 204 on one side and the slider 154 is coupled to the lower side of both sides, to move the head assembly 200 in the Y-axis or X-axis direction. To this end, the support 114 drives the second guide member 206 and the driving unit 204 to move along the second guide member 206 so that the head assembly 200 is linearly moved in the X axis direction. (Not shown) (for example, a motor, a gear, a pulley, a belt, a ball screw, a linear motor) and the like. An upper side of the support 114 is provided with a piezoelectric control unit 118 for controlling operations of the inkjet printing unit 110, for example, pressure control, chemical liquid supply and discharge, and the like. The support 114 has the same width as the stage 112 in the X axis direction. That is, the support 114 is coupled to the slider 154 at both ends thereof, and the slider 154 is provided to be movable in the Y axis direction along the first guide members 150 and 152. The support 114 also linearly moves the drive unit 204 in the X-axis direction so that the head assembly 200 can be moved in the X-axis direction.

The chemical liquid applying apparatus 100 moves the head assembly 200 to a position 200a corresponding to the cleaning portion in order to clean the inkjet head 210.

That is, the cleaning zone (maintenance zone) is provided with the chemical cleaning device (130 ~ 140).

The chemical cleaning apparatuses 130 to 140 may include a first cleaning unit 130 for first cleaning the plurality of inkjet heads 210 and a second cleaning second nozzle surface for discharging the chemical liquids of the inkjet heads 210. The cleaning unit 140 is included.

The first cleaning unit 130 includes a plurality of blades (132 in FIG. 3) for removing the chemical liquid remaining on the nozzle surface of the head in a non-contact manner, and the chemical liquid removed by the blades 132, respectively. A purge tank 134 to collect. In addition, the purge tank 134 is located in the upper portion of the first cleaning unit 130, the inkjet head 210, in order to prevent the nozzles are clogged by the chemical liquid, by pressing the internal pressure of the inkjet head 210 When the remaining chemical liquids are spitting, the discharged chemical liquids are collected. The blades 132 are installed on top of the purge tank 134. The blades 132 are provided in plurality in correspondence with the inkjet head 210. The blade 132 removes the chemical liquid in a non-contact manner with the nozzle surface in order to remove the chemical liquid formed on the nozzle surface of the inkjet head 210.

The second cleaning unit 140 cleans the nozzle surface from which the chemical liquid is removed from the first cleaning unit 130 by using a roll type wiper 142. In cleaning, the wiper 142 is in contact with the nozzle face.

When the head assembly 200 is moved in the X axis direction by the drive unit 204 and moved to the other side of the stage 112, the chemical cleaning apparatus 130 to 140 may first be placed on the upper portion of the first cleaning unit 130. The inkjet head 210 is moved in the Y axis direction to be positioned. The inkjet head 210 is linearly moved while maintaining a predetermined distance from the upper portion of the blade 132, thereby scraping and removing the chemical liquid on the nozzle surface by the blade 132. At this time, the chemical liquid removed from the nozzle surface is collected in the purge tank 134. Subsequently, the inkjet head 210 is moved in the Y axis direction and positioned above the second cleaning unit 140. The wiper 142 of the second cleaning unit 140 is brought into contact with the nozzle face of the inkjet head 210, and the wiper 142 is rotated to clean the nozzle face.

In addition, the pressure controller 118 may include a Pressure Control (MPC) unit for adjusting the internal pressure of the inkjet head 210. The pressure controller 118 adjusts the internal pressure of the inkjet head 210 to a negative pressure, and controls the plurality of piezoelectric elements (not shown) individually to supply the chemical liquid to uniformly discharge the chemical liquid from each nozzle. do.

4 and 5 are diagrams showing the configuration of an inkjet head according to an embodiment of the present invention.

4 and 5, the inkjet head 210 includes a body 212, a reservoir (reservoir or buffer tank) 216 for storing a chemical liquid in the body 212, and a reservoir 216. Head (214) for receiving the chemical liquid to discharge the chemical on the surface of the substrate, and is provided on the upper coupling member 211 for coupling the body 212 to one side of the bracket (202 of Figure 1). The inkjet head 210 includes at least one sensor 220 (222, 224) for detecting the level of the chemical liquid stored in the reservoir 216. In addition, the inkjet head 210 is equipped with one thermoelectric element 230 outside the one side 212a of the body 212.

The head 240 is provided with a plurality of nozzles (not shown) for discharging the chemical liquid to the lower surface, that is, the nozzle surface, facing the substrate surface seated on the chuck 124.

Body 212 is a head 240 is disposed on the lower surface, is coupled to the bracket 202 to be movable in at least one direction. Body 212 is provided with a reservoir 216 at the bottom inside.

The reservoir 216 serves as a buffer tank of the chemical liquid. That is, the reservoir 216 is formed in the body 212 to receive and store the chemical liquid from the chemical liquid supply unit 105 and supply the chemical liquid to the nozzles. The reservoir 216 penetrates the sensors 220 at one side of the upper wall to sense the temperature of the chemical liquid stored therein.

Referring to FIG. 5, a cover 213 made of a transparent material may be coupled to and sealed on the front surface of the reservoir 216 to monitor the inside thereof. In addition, the rear surface of the reservoir 216 has a plurality of piezoelectric piezoelectric elements (not shown) for controlling the flow rate of the chemical liquid discharged from the nozzles of the head 240 and a pressure control unit (not shown) to interface them with the nozzles. Are combined). The pressure regulator is electrically connected to the pressure controller 118 installed at the upper end of the support (114).

The lower surface of the reservoir 216 includes first and second outlets for supplying the chemical liquid to the nozzles on both sides, and a flow path formed inside the lower surface to connect the nozzles and the first and second outlets. Therefore, the nozzles are supplied with the chemical liquid from the reservoir 216 through the flow path. In addition, the lower surface of the reservoir 216 is provided with a step so that the first and second outlets have different heights. This is to easily remove bubbles contained in the chemical liquid stored in the reservoir 216 by using the pressure difference between the first and second outlets.

The reservoir 216 is applied with a meniscus sound pressure at the pressure control unit 118 to control the internal pressure to be kept constant.

The sensors 220 detect the temperature of the chemical liquid and the level of the chemical liquid stored in the reservoir 216. The sensors 220 are provided with first and second temperature sensors 222, 224. The first temperature sensor 222 detects the water level for stopping supply of the chemical liquid, and the second temperature sensor 224 detects the water level for supplying the chemical liquid of the reservoir 216. For example, the first and second temperature sensors 222 and 224 measure the temperature of the chemical liquid to detect the chemical liquid level inside the reservoir 216. The first and second temperature sensors 222, 224 are provided with terminals outside the upper wall of the reservoir 216, and are electrically connected to the pressure controller 118 through the terminals. Therefore, each of the first and second temperature sensors 222 and 224 transmits an electrical signal about the temperature of the chemical liquid of the reservoir 216 to the pressure controller 118.

5, the thermoelectric element 230 is installed outside one side wall 212a of the reservoir 216, and heats or stores the chemical liquid stored in the reservoir 216 corresponding to the direction in which power is applied. Cool.

An insertion groove 212b through which the thermoelectric element 230 is inserted and separated is provided outside the one side wall 212a of the reservoir 216. The thermoelectric element 230 is coupled to the plurality of fixing members 218 to insert and fix the thermoelectric element 230 in the insertion groove 212b, so that the thermoelectric element 230 is fixedly installed outside the one side wall 212a of the reservoir 216. do.

The thermoelectric element 230 is electrically connected to the switching member 240 for switching the application direction of the power supplied. Therefore, the pressure controller 118 controls the switching member 240 to heat or cool the chemical liquid by receiving the electrical signals sensed from the first and second temperature sensors 222 and 224.

6 to 8, the operation of the thermoelectric element will be described.

That is, FIGS. 6 to 8 are views illustrating the configuration of the thermoelectric elements illustrated in FIGS. 4 and 5.

6 to 8, the thermoelectric element 230 heats and stores the chemical liquid stored in the reservoir 216 using a Peltier effect that is switched to endotherm and generate heat according to the direction of the applied power source 242. Cool. That is, when the thermoelectric element 230 connects two different metal plates 232 and 234 to flow current in one direction, heat generation or endothermic phenomenon occurs at the junction of the two metal plates 232 and 234. At this time, if the direction of the current is reversed, endotherms or heat generations are reversed at the junctions of the two metal plates 232 and 234. A plurality of P-type and N-type semiconductor elements 236 and 238 are arranged side by side adjacent to each other between the two metal plates 232 and 234.

In addition, as illustrated in FIG. 7, the thermoelectric element 230 is provided with intermediate partitions 232a and 234a on the outer sides of the two metal plates 232 and 234 to be in surface contact with the metal plates 232 and 234. The intermediate partitions 232a and 234a are provided with a ceramic plate, for example. The middle partition walls 232a and 234a may be replaced with inner wall portions corresponding to the insertion grooves 212b formed outside the one side wall 212a of the reservoir 216. Accordingly, the thermoelectric element 230 is in surface contact with the inner sidewalls of the intermediate sidewalls 232a and 234a or the insertion grooves 212b to heat or cool the chemical liquid stored in the reservoir 216.

In the above, the configuration and operation of the temperature control device according to the present invention and the chemical liquid applying device having the same are shown in accordance with the detailed description and drawings, which are merely described by way of example, and do not depart from the spirit of the present invention. Various changes and modifications are possible within the scope.

1 is a view showing a schematic configuration of a chemical liquid applying apparatus according to the present invention;

FIG. 2 is a perspective view showing the configuration of the inkjet printing unit shown in FIG. 1; FIG.

3 is a plan view of the inkjet printing unit shown in FIG. 2;

4 and 5 are diagrams showing the configuration of the inkjet head according to an embodiment of the present invention; And

6 to 8 are diagrams illustrating the configuration of the thermoelectric elements illustrated in FIGS. 4 and 5.

Description of the Related Art [0002]

100: chemical liquid applying device

110: inkjet printing unit

210: inkjet head

216: Reservoir

220: temperature sensor

230: thermoelectric element

Claims (10)

In the thermostat: A head having a nozzle surface for providing a plurality of nozzles for ejecting the chemical liquid to the upper surface of the object; A body coupled to the other side of the nozzle face of the head; A reservoir provided in the body to store the chemical liquid and supply the chemical liquid to the nozzles; A thermoelectric element installed outside one side wall of the reservoir and configured to heat or cool the chemical liquid stored in the reservoir in correspondence to an application direction of power; The reservoir is a temperature control device, characterized in that the groove is provided in the outer side of the thermoelectric element is inserted, separated. delete The method of claim 1, The temperature control device; And a plurality of fixing members coupled to the outside of the one side wall of the reservoir to insert and fix the thermoelectric element in the groove. The method according to claim 1 or 3, The temperature control device further comprises a switching member for switching the application direction of the power supplied to the thermoelectric element. The method of claim 4, wherein The temperature control device; A temperature sensor for sensing a temperature of the chemical liquid of the reservoir; And a control unit for controlling the switching member to heat or cool the chemical liquid by receiving a signal sensed from the temperature sensor. In the chemical liquid applying device: A stage; A chuck installed on an upper part of the stage to seat an object; A head assembly for discharging the chemical liquid to the upper surface of the object; A drive unit coupled to the head assembly and moving the head assembly in at least one direction above the object; The head assembly; A plurality of heads having a nozzle surface for providing a plurality of nozzles for ejecting a chemical liquid to an upper surface of the object; A body coupled to the other side of the nozzle face of each of the heads; A reservoir provided in the body to store the chemical liquid and supply the chemical liquid to the nozzles; A temperature sensor installed inside the reservoir to sense a temperature of the chemical liquid of the reservoir; A temperature control device installed outside one side wall of the reservoir and configured to heat or cool the chemical liquid stored in the reservoir in correspondence to an application direction of power; The temperature control device is provided with one thermoelectric element, The reservoir is a chemical liquid applying device, characterized in that the groove is provided in the outer side of the thermoelectric element is inserted, separated. delete delete The method of claim 6, The chemical liquid applying apparatus; And a plurality of fixing members coupled to the outside of the one side wall of the reservoir so that the thermoelectric element is inserted into and fixed to the groove. The method of claim 9, The chemical liquid applying apparatus; A switching member which switches the application direction of power supplied to the thermoelectric element; A temperature sensor for sensing a temperature of the chemical liquid of the reservoir; And a control unit for controlling the switching member to heat or cool the chemical liquid by receiving the signal sensed from the temperature sensor.

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