KR101053655B1 - Cantilever sensor and manufacturing method thereof, biomaterial sensing device using same and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a cantilever sensor capable of accurately and quantitatively analyzing a biomaterial adsorbed on a cantilever, a method for manufacturing the same, and an apparatus for detecting the biomaterial using the same, and a method for manufacturing the biomaterial according to the present invention. The cantilever sensor is divided into a front end part and a rear end part, and the lower electrode, the insulating film, and the upper electrode are sequentially formed at the front end of the cantilever sensor facing the reference electrode body. A stacked capacitance measuring electrode body is provided, and a rear end portion of the cantilever sensor has a structure in which a lower electrode, a piezoelectric film, and an upper electrode are sequentially stacked. The reference electrode body includes a reference lower electrode, an insulating film, and a reference upper electrode. Including a sequentially stacked structure, the capacitance measuring electrode The upper electrode is characterized in that the break in the piezoelectric layer and electrically.

Cantilever, electrical measurement, biomaterials, capacitance

Description

Cantilever sensor and its manufacturing method and biomaterial sensing device using same and manufacturing method therefor {Cantilever sensor and method for fabricating the cantilever sensor and Apparatus for detecting bio-element and method for fabricating the same}

The present invention relates to a cantilever sensor, a method for manufacturing the same, and a biomaterial sensing device using the same, and a method for manufacturing the same, and more particularly, a cantilever sensor and a method for manufacturing the same, which can accurately and quantitatively analyze a biological material adsorbed on the cantilever, and It relates to a biological material detection apparatus and a method of manufacturing the same.

Recently, many studies have been actively conducted on the development of cantilever-based sensors manufactured through a micro electro mechanical system (MEMS) process to detect physical phenomena or chemical reactions.

The cantilever-based sensors currently being studied are largely classified into a method using a change in resonant frequency and a method of measuring static deflection due to a change in the surface of the cantilever by using an optical system.

In the study of the microcantilever sensor using the resonant frequency variation, Thundat et al. (Spring constants by adsorption of sodium ions (Na ⁺ ) on the surface of the microcantilever by measuring the resonant frequency in Applied Physics Letters 80, 2219-2221 (2002)). The spring constant has been shown to be measurable, and several researchers, including IBM's Swiss Zurich Institute, have reported that it is possible to detect specific gases in the air using the resonant frequency measurement method. As a specific example, US Patent No. US 5,719,324 discloses a cantilever sensor using a reaction on a cantilever of a chemical, characterized by using a change in resonant frequency for analysis of a target chemical. As another example, US Pat. No. 6,212,939 and US Pat. No. 6,289,717 disclose an invention relating to a sensor that detects after combining a chemical sensor by adsorption on a silicon cantilever and a binding partner of the substance to be detected on the cantilever. However, the method using the change of the resonance frequency has a problem in that the experimental error is large due to the change in the resonance frequency due to the change in viscosity and the low sensitivity due to damping is required.

Next, in the case of measuring the static deflection of the cantilever by using an optical system, the protein by biological reaction occurring on the surface of the microcantilever in Nature Biotechnology 19, 856-860 (2001) and Science 288, 316-318 (2000). And gene detection methods are introduced. The sensing method by the static bending is conducted by detecting the presence of a protein or gene by irradiating a cantilever surface with a light source such as a laser and condensing with a sensing position diode.

However, the method of measuring the deformation of the cantilever by using a light source has a limitation in achieving miniaturization and high integration as a certain space is required for installing the optical system. In order to solve this problem, an electrical measurement method has been proposed as a method of measuring the deformation of the cantilever. Specifically, when the cantilever is deformed by adsorption of the biomaterial, an electrical signal is applied to the piezoelectric film provided in the cantilever so that the deformation is restored to its original state, and at this time, the electric force applied to the piezoelectric film is measured to measure the adsorbed biomaterial. It is a quantitative measure.

The present invention relates to an electrical measurement of the deformation of the cantilever, and more particularly, to provide a cantilever sensor and a method for manufacturing the same, and a method for detecting the biomaterial using the same, and a method for manufacturing the same. The purpose is.

The cantilever sensor according to the present invention for achieving the above object is a cantilever sensor provided to face the reference electrode body, the cantilever sensor is divided into a front end and a rear end, the front end of the cantilever sensor facing the reference electrode body The lower electrode, the insulating film and the upper electrode is provided with a capacitance measuring electrode body sequentially stacked, the rear end of the cantilever sensor is provided with a structure in which the lower electrode, the piezoelectric film and the upper electrode is sequentially stacked, The upper electrode of the electrode body for capacitance measurement is electrically disconnected from the piezoelectric film.

The biomaterial sensing device according to the present invention comprises a combination of a cantilever sensor and a reference electrode body spaced apart from each other by a predetermined distance, and the cantilever sensor is divided into a front end portion and a rear end portion, and the front end of the cantilever sensor facing the reference electrode body. The lower electrode, the insulating film and the upper electrode is provided with a capacitance measurement electrode body sequentially stacked, the rear end of the cantilever sensor has a structure in which the lower electrode, the piezoelectric film and the upper electrode is sequentially stacked, the reference electrode The sieve includes a structure in which the reference lower electrode, the insulating film, and the reference upper electrode are sequentially stacked, and the upper electrode of the capacitance measuring electrode body is electrically disconnected from the piezoelectric film.

The lower electrode, the insulating film, and the upper electrode of the capacitance measuring electrode body may be provided at positions opposite to the reference lower electrode, the insulating film, and the reference upper electrode of the reference electrode body, respectively. In addition, a support plate may be further provided on the rear surface of the lower electrode of the cantilever sensor, and a molecular recognition layer may be further provided on the rear surface or the protective film of the support plate. In this case, the molecular recognition layer may be composed of a monoatomic layer provided on the sensing layer and the sensing layer to collect a biological material.

In addition, a protective film may be further provided on the front surface including the upper electrode of the rear end of the cantilever sensor and the upper electrode of the electrode body for capacitance measurement.

In the method for manufacturing a cantilever sensor according to the present invention, the method for manufacturing a cantilever sensor provided opposite to a reference electrode body includes: laminating a support plate on the front surface of the substrate; Laminating and forming sequentially, laminating and selectively patterning an insulating film on the front surface of the substrate, and laminating and selectively patterning an upper electrode material on the front surface of the substrate, the opposite direction of the reference electrode body The electrode body for capacitance measurement in which the lower electrode, the insulating film and the upper electrode are sequentially stacked on the front end of the cantilever sensor is completed, and the lower electrode, the piezoelectric film and the upper electrode are sequentially stacked on the rear end of the cantilever sensor. Characterized in that it comprises a step of completing.

A method of manufacturing a biomaterial sensing apparatus according to the present invention includes preparing a substrate in which a cantilever sensor region and a reference electrode body region are separated, stacking a support plate on the front surface of the substrate, and lowering the surface on the support plate front surface. Sequentially stacking an electrode material and a piezoelectric film material, selectively patterning a lower electrode material and a piezoelectric film material of the cantilever sensor region to form a lower electrode and a piezoelectric film, and removing the piezoelectric film material of the reference electrode body region Forming a reference lower electrode, stacking and selectively patterning an insulating film on the front surface of the substrate, and stacking and selectively patterning an upper electrode material on the front surface of the substrate to form a lower portion at the front end of the cantilever sensor region. The structure of the electrode body for capacitance measurement, in which electrodes, insulating films, and upper electrodes are sequentially stacked The lower electrode, the piezoelectric film, and the upper electrode are sequentially stacked on the rear end of the cantilever sensor, and the reference lower electrode, the insulating film, and the reference upper electrode are sequentially stacked on the reference electrode body region. Comprising the step of completing the structure of the reference electrode body.

When the upper electrode material is patterned, the upper electrode of the capacitance measuring electrode body and the piezoelectric film are patterned so as not to be shorted. The method may further include stacking a protective film on the entire surface of the substrate after completion of the capacitance measuring electrode body and the reference electrode body.

In addition, after the protective layer is laminated, separating the substrate into a cantilever sensor region and a reference electrode body region, etching and removing the substrate of each region, and a backing layer or a protective film on the support plate of the cantilever sensor region. The method may further include forming a molecular recognition layer on the substrate.

The cantilever sensor according to the present invention, a manufacturing method thereof, and a biomaterial sensing device using the same and a manufacturing method thereof have the following effects.

By providing an electrode body for capacitance measurement in the cantilever sensor and providing a reference electrode body in a position opposite thereto, the biomaterial adsorbed to the cantilever sensor can be measured quantitatively and accurately by comparing the measured capacitance value with the reference capacitance value. It becomes possible.

Hereinafter, a cantilever sensor according to an embodiment of the present invention, a manufacturing method thereof, a biomaterial sensing device using the same, and a manufacturing method thereof will be described in detail with reference to the accompanying drawings. 1 is a perspective view of a biomaterial sensing device according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of a biomaterial sensing device according to an embodiment of the present invention, and FIG. 3 is a plan view of the biomaterial sensing device, and FIG. 3B is a side cross-sectional view taken along line AA ′ of FIG. 3A.

The biomaterial sensing apparatus according to the exemplary embodiment of the present invention is largely composed of a combination of the cantilever sensor 110 and the reference electrode body 120. The cantilever sensor 110 may be restored by physical deformation and electrical signal application by adsorption of a biological material, and the reference electrode body 120 is provided at a position spaced apart from the cantilever sensor 110 by a predetermined distance. The cantilever sensor 110 serves as a reference of a restoring position when restoring the cantilever sensor 110.

The cantilever sensor 110 has a structure in which the molecular recognition layer 114, the support plate 102, the lower electrode 111, the piezoelectric film 112, and the upper electrode 113a are sequentially stacked in detail. The molecular recognition layer 114 serves to collect a biological material, and the support plate 102 is composed of a lower electrode 111, a piezoelectric film 112, and an upper electrode 113a provided thereon. It serves to support the cantilever sensor structure, and the upper electrode 113a and the lower electrode 111 provided on the upper and lower portions of the piezoelectric film 112 respectively apply an external electrical signal to the piezoelectric film 112. The piezoelectric film 112 serves to mechanically deform in response to an electrical signal applied through the upper electrode 113a and the lower electrode 111. Here, although the molecular recognition layer 114 is provided on the back surface of the support plate, it may be provided on the protective film 104 to be described later.

In addition, referring to the structure of the cantilever sensor 110 based on the front end of the cantilever sensor 110 facing the reference electrode body 120, the molecular recognition layer 114, the support plate 102, and the lower electrode ( 111 has a structure in which the insulating film 103, the upper electrode 113b, and the protective film 104 are sequentially stacked. In this case, the structure consisting of the lower electrode 111, the insulating film 103, and the upper electrode 113b (hereinafter, referred to as a 'capacitance measuring electrode body M' for convenience of description) is the cantilever sensor 110. And to calculate the capacitance C between the reference electrode body 120. The calculation of the capacitance between the cantilever sensor 110 and the reference electrode body 120 will be described later.

Meanwhile, the reference electrode body 120 is provided at a position spaced apart from the cantilever sensor 110 by a predetermined distance, and in detail, the support plate 102, the reference lower electrode 121, the insulating film 103, and the reference upper electrode 123. ) And the protective film 104 are sequentially stacked.

Each of the reference lower electrode 121, the insulating layer 103, and the reference upper electrode 123 is a lower electrode 111, an insulating layer 103, and an upper electrode 113a constituting the capacitance-measuring electrode body M. It is preferable to be provided at a position opposite to. This is to accurately calculate the capacitance between the capacitance measuring electrode body M and the reference electrode body 120.

Specifically, as can be seen in Equation 1 below, the capacitance C is maximized at the point where the distance d between the conductor is the minimum. Therefore, in order to minimize the distance d between the conductor and the conductor, the distance between the capacitance measuring electrode body M and the reference electrode body 120, that is, the lower electrode 111 and the reference lower electrode 121. ) And the distance between the upper electrode 113b and the reference upper electrode 123 of the capacitance measuring electrode body M should be minimized. For this purpose, the lower electrode 111 and the reference lower electrode 121 must be minimized. The upper electrode 113b and the reference upper electrode 123 should be provided at positions facing each other.

[Equation 1]

C = εS / d

Here, C is the capacitance, d is the distance between the upper electrode 113b of the capacitance measuring electrode body M and the reference upper electrode 123 of the reference electrode body 120, ε is the electrode body for capacitance measurement The dielectric constant of the dielectric interposed between the upper electrode 113b of (M) and the reference upper electrode 123 of the reference electrode body 120, S is the cross-sectional area of the upper electrode 113b of the electrode body M for capacitance measurement. to be.

The configuration of the biomaterial sensing device according to an embodiment of the present invention has been described above. Hereinafter, the operation of the biomaterial sensing device according to an embodiment of the present invention having such a configuration will be described. 4 is a flow chart for explaining the operation of the biological material detection apparatus according to an embodiment of the present invention.

First, the reference capacitance between the cantilever sensor 110 and the reference electrode body 120 in a state in which the cantilever sensor 110 and the reference electrode body 120 are opposed to each other and the biological material is not collected in the cantilever sensor 110. The value is measured (S301). Then, the biological material is adsorbed to the molecular recognition layer 114 (S302). Accordingly, the cantilever sensor 110 is bent downward by the weight of the adsorbed biomaterial (S303).

In this state, when power is applied to the upper electrode 113a and the lower electrode 111 of the cantilever sensor 110, the piezoelectric film 112 interposed between the upper electrode 113a and the lower electrode 111. Is mechanically deformed in response to the corresponding electrical signal (S304). That is, the piezoelectric film 112 bent downward is gradually spread upward by the electrical signal applied from the upper electrode 113a and the lower electrode 111. At this time, the capacitance between the cantilever sensor 110 and the reference electrode body 120 is checked, and it is checked whether the measured capacitance value is equal to the reference capacitance value (S305) (S306).

If the measured capacitance value and the reference capacitance value are not the same, it means that the bent cantilever sensor 110 is not completely restored. Therefore, a larger power source should be applied to the piezoelectric film 112. When the measured capacitance value and the reference capacitance value are the same, it means that the cantilever sensor 110 bent by biomaterial adsorption is completely restored. In addition, the biomaterial collected in the cantilever sensor 110 may be quantitatively measured through the power values applied to the upper electrode 113a and the lower electrode 111 at the restored time point (S307).

In the above, the configuration and operation of the biological material sensing apparatus according to an embodiment of the present invention have been described. Hereinafter, a method of manufacturing a biomaterial sensing apparatus according to an embodiment of the present invention will be described. 5A to 5F are cross-sectional views illustrating a method of manufacturing a biomaterial sensing apparatus according to an exemplary embodiment of the present invention.

First, as shown in FIG. 5A, a substrate 101 in which a cantilever sensor 110 region and a reference electrode body 120 region are defined is prepared, and a support plate material 102 and a lower electrode on the substrate 101 are prepared. The material 111 and the piezoelectric film material 112 are sequentially stacked. In this case, a silicon substrate may be used as the substrate 101, a silicon nitride film or a silicon oxide film may be used as the support plate material, and the lower electrode material may be formed of platinum (Pt) or the like. In addition, as the piezoelectric material, a material having excellent piezoelectric properties such as PZT (Pb [ZrxTi1-x] O3 0 <x <1) series or ZnO may be used.

In this state, as shown in FIG. 5B, in the case of the cantilever sensor region, the piezoelectric film material may be selectively patterned so that the piezoelectric film 112 is provided only in the piezoelectric film forming area, and then the lower electrode material is also required. The lower electrode 111 is formed by selectively patterning the electrode according to the region. On the other hand, in the reference electrode body region, the entire piezoelectric film 112 stacked on the lower electrode 111 is etched and removed.

Then, as illustrated in FIG. 5C, an insulating film 103 is laminated on the entire surface of the substrate 101 including the piezoelectric film 112. Subsequently, in the case of the cantilever sensor region, the insulating layer 103 is selectively patterned so that the insulating layer 103 is positioned only on the lower electrode 111 or the support plate 102, and in the case of the reference electrode body region. No separate etching process is applied or patterned to an appropriate size.

In the cantilever sensor region, the insulating film 103 is an electrical short between the upper electrode 113b and the lower electrode 111 of the capacitance measuring electrode body M, the piezoelectric film 112 and the capacitance measurement. It serves to prevent an electrical short between the upper electrode 113b of the electrode body (M). In addition, in the reference electrode body region, the insulating layer 103 serves to prevent an electrical short between the reference upper electrode 123 and the reference lower electrode 121.

In this state, as shown in FIG. 5D, the upper electrode material is stacked on the entire surface of the substrate 101 and then selectively patterned. The lower electrode 111, the piezoelectric film 112, and the rear end of the cantilever sensor region are selectively patterned. A structure in which the upper electrodes 113a are sequentially stacked, and at the front end of the cantilever sensor region, an electrode body M structure for capacitance measurement including the lower electrode 111, the insulating film 103, and the upper electrode 113b. To complete. At this time, as described above, the piezoelectric film 112 and the upper electrode 113b of the capacitance measuring electrode body M are electrically shorted. In addition, the reference electrode body structure R including the reference lower electrode 121, the insulating layer 103, and the reference upper electrode 123 is completed in the reference electrode body region by stacking the upper electrode 113a. Here, the upper electrode material may be made of platinum (Pt) or the like as the lower electrode 111.

In the state where the capacitance measuring electrode body M and the reference electrode body structure R are completed, the protective film 104 is laminated on the entire surface of the substrate 101 as shown in FIG. 5E. The protective film 104 serves to protect various structures provided under the protective film 104 from an external environment.

Next, as shown in FIG. 5F, the substrate 101 is separated into a cantilever sensor region and a reference electrode body region, and the substrate 101 in each region is etched and removed. Then, when the molecular recognition layer 114 is formed on the back surface of the support plate 102 or the protective film 104 of the cantilever sensor region, the method of manufacturing a biomaterial sensing device according to an embodiment of the present invention is completed. do. Here, the molecular recognition layer 114 may be composed of a sensing film of a conductive material such as gold (Au) and a self-embedded monolayer provided on the sensing film to substantially collect biological materials. have.

1 is a perspective view of a biomaterial sensing apparatus according to an embodiment of the present invention.

Figure 2 is an exploded perspective view of the biological material detection apparatus according to an embodiment of the present invention.

Figure 3a is a plan view of a biomaterial sensing apparatus according to an embodiment of the present invention.

Figure 3b is a side cross-sectional view taken along the line AA 'of Figure 2a.

Figure 4 is a flow chart for explaining the operation of the biological material detection apparatus according to an embodiment of the present invention.

5A to 5F are cross-sectional views illustrating a method of manufacturing a biomaterial sensing apparatus according to an exemplary embodiment of the present invention.

Description of the main parts of the drawing

101 substrate 102 support plate

103: insulating film 104: protective film

110: cantilever sensor 111: lower electrode

112: piezoelectric film 113a: upper electrode

113b: upper electrode of the electrode body for capacitance measurement

114: molecular recognition layer

120: reference electrode body 121: reference lower electrode

123: reference upper electrode

Claims (19)

In the cantilever sensor provided to face the reference electrode body, The cantilever sensor is divided into a front end and a rear end, The front end of the cantilever sensor facing the reference electrode body is provided with an electrode body for capacitance measurement in which a lower electrode, an insulating film, and an upper electrode are sequentially stacked, and a lower electrode, a piezoelectric film, and an upper electrode are formed at a rear end of the cantilever sensor. The stacked structure is provided sequentially, The upper electrode of the electrode for measuring capacitance is electrically disconnected from the piezoelectric film, The reference electrode body includes a reference upper electrode at a position corresponding to the upper electrode of the electrode for capacitance measurement, <Upper electrode of the capacitance measuring electrode body>, <reference upper electrode of the reference electrode body> and <dielectric interposed between the upper electrode of the capacitance measuring electrode body and the reference upper electrode of the reference electrode body> Cantilever sensor, characterized in that the capacitance value can be measured using. According to claim 1, A protective film is further provided on the front surface including the upper electrode, A support plate is further provided on the back of the lower electrode, Molecular recognition layer on the protective film or on the back of the support plate Cantilever sensor, characterized in that it is further provided. The cantilever sensor of claim 2, wherein the molecular recognition layer comprises a sensing layer and a monoatomic layer provided on the sensing layer to collect a biological material. The cantilever sensor of claim 1, further comprising a protective film on a front surface of the rear end of the cantilever sensor and an upper electrode of the electrode body for measuring capacitance. It is made of a combination of the cantilever sensor and the reference electrode body spaced apart a certain distance, The cantilever sensor is divided into a front end and a rear end, The front end of the cantilever sensor facing the reference electrode body is provided with an electrode body for capacitance measurement in which a lower electrode, an insulating film, and an upper electrode are sequentially stacked, and a lower electrode, a piezoelectric film, and an upper electrode are formed at a rear end of the cantilever sensor. The stacked structure is provided sequentially, The reference electrode body includes a structure in which a reference lower electrode, an insulating layer, and a reference upper electrode are sequentially stacked. The upper electrode of the electrode for measuring capacitance is electrically disconnected from the piezoelectric film, The reference electrode body includes a reference upper electrode at a position corresponding to the upper electrode of the electrode for capacitance measurement, <Upper electrode of the capacitance measuring electrode body>, <reference upper electrode of the reference electrode body> and <dielectric interposed between the upper electrode of the capacitance measuring electrode body and the reference upper electrode of the reference electrode body> Biological material detection device characterized in that the capacitance value can be measured using. The biomaterial of claim 5, wherein the lower electrode, the insulating film, and the upper electrode of the capacitance measuring electrode body are disposed at positions facing the reference lower electrode, the insulating film, and the reference upper electrode of the reference electrode body, respectively. Sensing device. The method of claim 5, further comprising a protective film on the front surface including the upper electrode, a support plate is further provided on the back of the lower electrode, the molecular recognition layer on the protective film or on the back of the support plate Biological material detection device further comprising. The biomaterial sensing apparatus of claim 7, wherein the molecular recognition layer comprises a sensing layer and a monoatomic layer provided on the sensing layer and collecting the biomaterial. The biomaterial sensing apparatus according to claim 5, further comprising a protective film on a front surface including an upper electrode of the rear end of the cantilever sensor and an upper electrode of the electrode body for capacitance measurement. In the manufacturing method of the cantilever sensor provided to face the reference electrode body, Stacking a support plate on the front of the substrate; Sequentially stacking a lower electrode and a piezoelectric film on the entire support plate; Stacking and selectively patterning an insulating film on the entire surface of the substrate; Depositing and selectively patterning an upper electrode material on the front surface of the substrate, An electrode structure for capacitive measurement, in which a lower electrode, an insulating film, and an upper electrode are sequentially stacked on the front end of the cantilever sensor in a direction opposite to the reference electrode body, is completed, and the lower electrode, the piezoelectric film, and the rear end of the cantilever sensor It comprises a step of completing a structure in which the upper electrode is sequentially stacked, The reference electrode body includes a reference upper electrode at a position corresponding to the upper electrode of the electrode for capacitance measurement, <Upper electrode of the capacitance measuring electrode body>, <reference upper electrode of the reference electrode body> and <dielectric interposed between the upper electrode of the capacitance measuring electrode body and the reference upper electrode of the reference electrode body> Method for producing a cantilever sensor, characterized in that the capacitance value can be measured using. The method of claim 10, wherein the patterning of the upper electrode material comprises patterning the upper electrode of the capacitance measuring electrode body and the piezoelectric layer so as not to short-circuit. The method of claim 10, wherein, after completion of the capacitance measuring electrode body, A method of manufacturing a cantilever sensor, characterized in that it further comprises the step of laminating a protective film on the entire surface of the substrate. The method of claim 12, wherein after the protective film is laminated, Etching and removing the substrate; And Forming a molecular recognition layer on the back surface of the support plate or on the protective film, the method of manufacturing a cantilever sensor characterized in that it further comprises. The method of claim 13, wherein the molecular recognition layer includes a sensing layer and a monoatomic layer provided on the sensing layer to collect a biological material. Preparing a substrate in which the cantilever sensor region and the reference electrode body region are separated; Stacking a support plate on the front surface of the substrate; Sequentially depositing a lower electrode material and a piezoelectric film material on the entire surface of the support plate; Selectively patterning a lower electrode material and a piezoelectric film material of the cantilever sensor region to form a lower electrode and a piezoelectric film, and removing the piezoelectric film material of the reference electrode body region to form a reference lower electrode; Stacking and selectively patterning an insulating film on the entire surface of the substrate; Depositing and selectively patterning an upper electrode material on the front surface of the substrate, The electrode body for capacitance measurement, in which the lower electrode, the insulating film, and the upper electrode are sequentially stacked on the front end of the cantilever sensor region, is completed, and the lower electrode, the piezoelectric film, and the upper electrode are sequentially stacked on the rear end of the cantilever sensor. Comprising the completed structure, the reference electrode body region comprises a step of completing a reference electrode body structure in which the reference lower electrode, the insulating film and the reference upper electrode is sequentially stacked, The reference electrode body includes a reference upper electrode at a position corresponding to the upper electrode of the electrode for capacitance measurement, <Upper electrode of the capacitance measuring electrode body>, <reference upper electrode of the reference electrode body> and <dielectric interposed between the upper electrode of the capacitance measuring electrode body and the reference upper electrode of the reference electrode body> Method for producing a biomaterial sensing device, characterized in that the capacitance value can be measured using. The method of claim 15, wherein the patterning of the upper electrode material comprises patterning the upper electrode of the capacitance measuring electrode body and the piezoelectric layer so as not to short-circuit. The method of claim 15, wherein after completion of the capacitance measuring electrode body and the reference electrode body, And stacking a protective film on the entire surface of the substrate. The method of claim 17, wherein after the protective film is laminated, Separating the substrate into a cantilever sensor region and a reference electrode body region; Etching and removing the substrate in each region; And And forming a molecular recognition layer on the back surface of the support plate of the cantilever sensor region or on the protective film. The method of claim 18, wherein the molecular recognition layer comprises a sensing layer and a monoatomic layer provided on the sensing layer to collect a biological material.

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