KR101045366B1 - A Driving Device for Aligning A Work Piece or A Tool and An Alignemnt System Having the Same, and An Aligning Method - Google Patents

Abstract

A drive device for aligning a workpiece or a tool according to the present invention comprises: a schematic control device for roughly controlling the alignment operation of the workpiece or the tool until reaching a first predetermined alignment accuracy; And a fine control device connected in series with the schematic control device and finely controlling the alignment operation of the workpiece or the tool until reaching a second predetermined alignment accuracy.

Workpiece, Alignment, Drive, Fine Adjustment Actuator

Description

A Driving Device for Aligning A Work Piece or A Tool and An Alignemnt System Having the Same, and An Aligning Method}

The present invention relates to a drive for aligning a workpiece or a tool, an alignment system having the same, and an alignment method. More specifically, the present invention relates to a work piece such as a glass substrate (eg glass substrate, TPC or FPC film, etc.) and a tool (eg nozzle) to perform a specific action on such a work piece. 2, including primary control (or coarse control) and secondary control (or fine control) of the workpiece or tool to align the device, bonding device, exposure device, pattern printing device, etc.). By using two-step control to quickly and precisely control the alignment operation, the overall manufacturing process time of the final product (e.g. PDP or LCD panel) is significantly shortened and defects are generated. A drive system for aligning a workpiece or a tool that can significantly reduce the possibility to greatly improve productivity, an alignment system having the same, and an alignment method.

For example, to manufacture a PDP or LCD panel, a work piece (hereinafter referred to as a "work piece"), such as a glass substrate, must be placed on a stage (or suction table). Thereafter, various processes such as a coating process, a fixed pattern formation fixing, an exposure process, an etching process, or an adhesive application and bonding process are performed, for example, on the workpiece positioned on the stage.

1A schematically illustrates a coating apparatus for manufacturing a PDP or LCD panel of the prior art.

More specifically, in the table coater 100 used to manufacture the PDP or LCD panel schematically illustrated in FIG. 1A, the glass substrate 110, which is the workpiece to be coated, is placed on the stage 120. A method of applying the coating liquid required on the glass substrate 110 while moving the nozzle device 130 attached to the gantry 125 in the horizontal direction is used.

As described above, in order to perform a coating process on the glass substrate 110 using, for example, the coating apparatus 100 according to the prior art, the glass substrate 110 must be positioned on the stage 120. Then, for example, an alignment camera (not shown) attached to the gantry 125 and an alignment mark on the glass substrate before performing the coating process of the glass substrate 110 positioned on the stage 120. The alignment process should be done using (align marks) (not shown). This alignment process is accomplished by controlling the rotational movement and linear movement of the stage 120 or gantry 125.

1B is a plan view of an align system of a workpiece including a stage and a drive according to the prior art.

Referring to Figure 1b, the stage 120 used in the alignment system of the workpiece according to the prior art is located on the upper surface of the glass substrate 110, the lower surface is a plurality of alignment driving devices ( 170 and a plurality of idle driving devices 170a are located. The stage 120 is supported by the plurality of alignment driving devices 170 and the plurality of idle driving devices 170a. In addition, the plurality of alignment driving devices 170 may control the rotational movement and the linear movement of the stage 120, respectively. To this end, the driving members 180 used in each of the plurality of alignment driving apparatuses 170 are attached to the respective alignment driving apparatuses 170 in different directions. Each of the plurality of idle driving units 170a is supported such that, for example, the glass substrate 110 on the stage 120 is not bent, that is, maintains the flatness and stiffness of the glass substrate 110. do. In FIG. 1B, four alignment driving devices 170 and two idle driving devices 170a are shown as an example, but those skilled in the art will appreciate, for example, alignment driving devices 170 according to the size of the glass substrate 110. And the number of idle drives 170a may be increased or decreased. More specifically, for example, when the size of the glass substrate 110 shown in FIG. 1B is smaller, only four alignment drivers 170 may be used, and when the size of the glass substrate 110 is larger, four Alignment drive unit 170 and four idle drive unit (170a) can be used. In addition, the plurality of alignment driving apparatuses 170 and the plurality of idle driving apparatuses 170a illustrated in FIG. 1B may have the same configuration or different configurations. In the case of having the same configuration, the plurality of idle driving units 170a functions as the alignment driving unit 170 when the stage 120 and the glass substrate 110 participate in the control of the rotational movement and the linear movement. If it does not participate in the control of the rotational movement and the linear movement of the 120 and the glass substrate 110, it functions as an idle driving device (170a). When the plurality of alignment driving devices 170 and the plurality of idle driving devices 170a have different configurations from each other, the plurality of idle driving devices 170a are generally, for example, the ball screw 175 and the drive described later. It does not have a member 180 (see FIGS. 1C and 1D).

Although the prior art shown in FIG. 1B exemplarily illustrates an alignment system of a workpiece, those skilled in the art will appreciate that the prior art alignment system shown in FIG. 1B may perform a tool-specific operation on the workpiece instead of the workpiece. For example, it will be fully understood that the same can be used for the nozzle apparatus, the exposure apparatus or the pattern printing apparatus. In addition, in the prior art illustrated in FIG. 1B, the glass substrate 110, which is a workpiece, is illustrated as being positioned on the stage 120. However, if the workpiece is an FPC film, for example, this FPC film may be placed on the glass substrate 110. Therefore, hereinafter, the stage 120 or the glass substrate 110 on which the workpiece is located will be collectively referred to as a workpiece support member.

FIG. 1C is a detailed perspective view of the alignment device for the workpiece shown in FIG. 1B, and FIG. 1D is a detailed side cross-sectional view of the alignment device for the workpiece shown in FIG. 1B.

1C and 1D, the alignment device 170 according to the related art includes an upper table 172 having a rotating member 176 at a central portion thereof; A pair of first and second support members 173a and 173b and a pair of third and fourth support members 173c and 173d for movably supporting the upper table 172; First and second moving members 177a and 177b to which the first and second support members 173a and 173b and the third and fourth support members 173c and 173d are mounted and moved, respectively; A lower table 174 on which the first moving member 177a and the second moving member 177b are fixed; A ball screw (175) whose one end is rotatably fixed to the first support member (173a) and the middle portion is screwed to the second support member (173b); And a driving member 180 connected to the other end of the ball screw.

Referring back to FIGS. 1C and 1D, in the alignment driving device 170 according to the related art, when the driving member 180 applies a rotational force to the ball screw 175, the ball screw 175 rotates. Each time the ball screw 175 rotates once, the first and second support members 173a and 173b and the upper table 172 thereon are moved by the pitch of the ball screw 175 to the first moving member 177a. To move forward or backward). In the alignment driving apparatus 170 according to the related art of FIGS. 1C and 1D, the driving member 180 may be implemented as a server motor, and the first moving member 177a and the second moving member ( Each of 177b may be implemented as a linear motion guide (LM guide). In addition, the ball screw 175 is connected to the first support member 173a and the driving member 180, and the middle portion of the ball screw 175 is illustratively shown as being screwed with the second support member 173b. Although those skilled in the art will appreciate that the ball screw 175 may be connected to the third support member 173c and the driving member 180, and the middle portion of the ball screw 175 may be screwed to the fourth support member 173d. You will understand enough.

The alignment driving device 170 according to the related art described above is, for example, an alignment mark of the glass substrate 110 on the stage 120 positioned thereon using a solid state imaging device or a vision camera or the like (not shown). The upper table 172 is linearly moved by rotating the rotating member 176 or by using the ball screw 175 to coincide with (not shown). In addition, the alignment driving device 170 according to the related art described above is mounted on or under the bonding device (not shown) having, for example, a solid-state image pickup device or a vision camera (not shown), and the glass substrate 110. The bonding device is rotated to linearly align with an alignment mark (not shown) on a TCP or FPC film (not shown) attached to the device or linearly moved using the ball screw 175. That is, the alignment driving device 170 according to the prior art aligns the support member (eg, the stage) on which the workpiece or the workpiece is positioned with respect to the tool while the tool for performing a specific operation on the workpiece is stopped. Or a tool that performs a specific action on the workpiece while the workpiece is stationary.

The alignment driving device 170 according to the related art described above, for example, when performing alignment of the stage 120 using the driving member 180 which may be implemented as a servo motor, the alignment precision of the workpiece or Tolerance is approximately ± 3 μm at the current state of the art.

However, PDPs and LCD panels require large-area pixels and high definition pixels such as full high definition (FHD), so that requirements for alignment accuracy of the workpiece (for example, glass substrate 110) are required. This is getting higher and higher.

Therefore, the alignment drive device 170 according to the prior art using the drive member 180 implemented as a servo motor does not satisfy this requirement.

More specifically, in the prior art using the driving member 180 and the ball screw 175 implemented as a servo motor, the play of the ball screw (including backlash) occurs due to the characteristics of the servo motor and the ball screw 175. Problem, or the flow of the thermo motor (vibration while the servo is constantly performing position tracking) occurs, the stepping motor has the disadvantage of low thrust and the ability to perform only a constant step motion operation to achieve high resolution Occurs. As a result, in the prior art, a problem arises that precise position control of the workpiece, that is, securing precise alignment is difficult.

On the other hand, when the alignment driving device 170 according to the related art is used in the manufacture of a future PDP and LCD panel requiring high-definition pixels, the alignment of the stage 120 and the glass substrate 110 positioned thereon is performed. The precision is lowered. As a result, the likelihood of defects in the final products (PDP and LCD panel) is increased and productivity is lowered.

Accordingly, there is a need for a drive system, an alignment system having the same, and an alignment method for aligning a new workpiece or tool for solving the above problems.

SUMMARY OF THE INVENTION The present invention is directed to solving the problems of the prior art described above, by using two-step control including coarse and fine control of the alignment operation of a workpiece or tool. Fast and precise control of phosphorus operation can significantly shorten the overall tact time of the final product (eg PDP or LCD panel) manufacturing and significantly reduce the likelihood of defects, greatly improving productivity. To provide a drive system for aligning a workpiece or a tool, an alignment system having the same, and an alignment method.

According to a first aspect of the invention, there is provided a drive device for aligning a workpiece or a tool, wherein the aligning operation of the workpiece or the tool is controlled roughly until a predetermined first alignment precision is reached. Schematic control device; And a fine control device connected in series with the schematic control device and finely controlling the alignment operation of the workpiece or the tool until reaching a second predetermined alignment accuracy. It is to.

According to a second aspect of the present invention, there is provided a driving device for aligning a workpiece or a tool, comprising: an upper table having a rotating member at a central portion thereof; A first support member and a pair of third and fourth support members for movably supporting the upper table; A fine control device movably connected to the first support member; A second support member fixedly connected to the fine control device; A first moving member to which the first and second supporting members are mounted and move; A second moving member to which the third and fourth supporting members are mounted and move; A lower table on which the first moving member and the second moving member are fixedly mounted; And a coarse control device connected to the second support member, wherein the coarse control device controls the alignment operation of the workpiece or the tool until it reaches a first predetermined alignment accuracy, and The fine control device is for providing an alignment driving device for finely controlling the alignment operation of the workpiece or the tool having reached the first predetermined alignment precision until the second predetermined alignment accuracy is reached. will be.

According to a third aspect of the present invention, there is provided an alignment system of a workpiece, comprising: a workpiece support member on which a workpiece is positioned; A plurality of alignment driving devices positioned below the workpiece supporting member, for aligning the workpiece supporting member; And a plurality of idle driving devices positioned below the workpiece supporting member, the idle driving devices supporting the workpiece supporting member, wherein the plurality of alignment driving devices each perform an alignment operation of the workpiece. A schematic control device for controlling schematically until reaching a first predetermined alignment accuracy; And a fine control device connected in series with the coarse control device and finely controlling the alignment operation of the workpiece until a predetermined second alignment accuracy is reached, wherein each of the plurality of idle driving devices includes: An object of the present invention is to provide an alignment system of a workpiece having the same configuration as that of each of the plurality of alignment drive devices.

According to a fourth aspect of the present invention, an alignment system of a tool, comprising: a plurality of alignment driving apparatuses attached to the tool, for aligning the tool, wherein each of the plurality of alignment driving apparatuses is configured as described above. A schematic control device for roughly controlling the alignment operation of the workpiece until reaching a first predetermined alignment accuracy; And a fine control device connected in series with the schematic control device, the fine control device finely controlling the alignment operation of the workpiece until reaching a second predetermined alignment accuracy. .

According to a fifth aspect of the present invention, there is provided an alignment system of a workpiece, comprising: a workpiece support member on which a workpiece is positioned; And a plurality of alignment driving devices positioned below the workpiece supporting member, the plurality of alignment driving apparatuses for aligning the workpiece supporting members, each of the plurality of alignment driving apparatuses each having a rotating member at a central portion thereof. table; A first support member and a pair of third and fourth support members for movably supporting the upper table; A fine control device movably connected to the first support member; A second support member fixedly connected to the fine control device; A first moving member to which the first and second supporting members are mounted and move; A second moving member to which the third and fourth supporting members are mounted and move; A lower table on which the first moving member and the second moving member are fixedly mounted; And a coarse control device connected to the second support member, wherein the coarse control device controls the alignment operation of the workpiece until it reaches a first predetermined alignment accuracy, and the fine control device It is an object of the present invention to provide an alignment system of a workpiece for finely controlling the alignment operation of the workpiece having reached the first predetermined alignment precision until the second predetermined alignment accuracy is reached.

According to a sixth aspect of the present invention, an alignment system of a tool, comprising: a plurality of alignment driving devices attached to the tool, for aligning the tool, wherein each of the plurality of alignment driving devices is centered. An upper table having a rotating member at a portion thereof; A first support member and a pair of third and fourth support members for movably supporting the upper table; A fine control device movably connected to the first support member; A second support member fixedly connected to the fine control device; A first moving member to which the first and second supporting members are mounted and move; A second moving member to which the third and fourth supporting members are mounted and move; A lower table on which the first moving member and the second moving member are fixedly mounted; And a coarse control device connected with the second support member, wherein the coarse control device controls the alignment operation of the tool roughly until a first predetermined alignment accuracy is reached, and the fine control device is It is an object of the present invention to provide an alignment system of a tool for finely controlling the alignment operation of the tool having reached the first predetermined alignment accuracy until reaching the second predetermined alignment accuracy.

According to a seventh aspect of the present invention, there is provided a method of aligning a workpiece or a tool, the method comprising: a) roughly controlling the alignment operation of the workpiece or the tool until reaching a first predetermined alignment accuracy; ; And b) finely controlling the alignment motion of the workpiece or tool until a second predetermined alignment accuracy is reached, wherein the first alignment precision is approximately ± 3 μm from the alignment reference point. And the second alignment precision is to provide a method of aligning a workpiece or tool that is approximately ± 0.5 μm from the alignment reference point.

In the present invention, the following advantages are achieved.

1. By controlling the alignment of the workpiece or tool in two stages (coarse and fine control), the alignment of the workpiece or tool can be precisely and quickly controlled.

2. The overall tact time of manufacture of the final product (eg PDP or LCD panel) is significantly shortened.

3. The likelihood of failure of the final product (eg PDP or LCD panel) is significantly reduced.

4. The productivity of the final product (eg PDP or LCD panel) is greatly improved.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings of the present invention.

Figure 2a is a view showing a detailed side cross-sectional view of the alignment device for driving in accordance with the present invention. Figure 2b is a detailed side cross-sectional view showing the alignment operation of the workpiece using the drive device for alignment according to the present invention shown in Figure 2a.

2A and 2B, the alignment drive device 270 according to the present invention has a first alignment precision in which a workpiece 210 or a tool (not shown) positioned on the stage 220 is predetermined. A schematic control device for roughly controlling the alignment operation of the workpiece or tool until reaching; And finely connected in series with the schematic control device and finely controlling the alignment operation of the workpiece 210 or the tool until the workpiece 220 or the tool reaches a second predetermined alignment accuracy. It includes a control unit. Here, the schematic control device according to the present invention may be implemented with a ball screw 275 and a drive member 280. In addition, the fine control device may be implemented with a fine adjustment actuator 290.

As described above, the alignment drive device 270 according to the present invention including the coarse control device and the fine control device specifically includes: an upper table 272 having a rotating member 276 at a central portion thereof; A first support member (273a) for movably supporting the upper table (272), and a pair of third and fourth support members (273c, 273d); A fine adjustment actuator 290 movably connected to the first support member 273a; A second support member 273b fixedly connected to the fine adjustment actuator 290; First and second moving members 277a and 277b mounted and moving with the first and second supporting members 273a and 273b and the third and fourth supporting members 273c and 273d, respectively; A lower table 274 to which the first moving member 277a and the second moving member 277b are fixedly mounted, respectively; A ball screw 275 screwed to the second support member 273b; And a driving member 280 connected to one end of the ball screw 275.

In addition, the alignment drive device 270 according to the present invention is fixedly mounted on one side of the first support member 273a and includes an accommodation space 293 for receiving the other end of the ball screw 275. It may further include a receiving member (292). The alignment drive device 270 according to the present invention is, for example, an alignment mark of the glass substrate 210 on the stage 220 which is positioned thereon by using a solid state imaging device or a vision camera or the like (not shown). The upper table 272 is linearly moved by rotating the rotating member 276 or by using the ball screw 275 to coincide with (not shown).

Alignment drive device 270 of the present invention having the above-described configuration using the ball screw 275 and the drive member 280 to coarse control the alignment operation of the workpiece or tool (coarse control), and then It is characterized by using a two-step control to fine control the alignment operation of the workpiece or tool using the fine adjustment actuator 290. Hereinafter, the configuration and operation of the alignment device 270 according to the present invention will be described in detail.

2A and 2B, the alignment driving device 270 according to the present invention first performs an outline control of the alignment operation of the glass substrate 210. More specifically, when the driving member 280 applies a rotational force to the ball screw 275, the ball screw 275 rotates. Each time the ball screw 275 rotates, the second support member 273b is moved by the pitch of the ball screw 275. As a result, the first movable member 273a and the upper table 272 supported by the first supporting member 273a are connected to the second supporting member 273b through the fine adjustment actuator 290. Move forward or backward on 277a). Accordingly, the stage 220 and the glass substrate 210 positioned on the upper table 272 also move forward or backward on the first moving member 277a. In this way, the schematic control of the alignment operation of the glass substrate 210 is performed. This coarse control is performed until a predetermined first alignment precision (for example, approximately ± 3 μm range from the reference position of the alignment) is reached (see FIG. 3B to be described later). Here, it should be noted that the term "coarse control" refers to a control whose precision is lower than that of fine control and does not mean "coarse control" or "wide control range."

On the other hand, when schematic control of the alignment operation of the glass substrate 210 by the driving member 280 and the ball screw 275 is completed, the operation of the ball screw 275 and the driving member 280 is stopped. Thus, the second support member 273b screwed with the ball screw 275 also remains stationary. After that, fine control of the alignment operation of the glass substrate 210 is started. Fine control of the alignment operation of the glass substrate 210 is performed by the fine adjustment actuator 290. When the fine adjustment actuator 290 is operated, only the first support member 273a movably connected to the fine adjustment actuator 290 is moved, and the second support member 273b maintains a stopped state. Therefore, the upper table 272 and the glass substrate 210 supported by the first support member 273a are finely moved forward or backward on the first moving member 277a based on the position where the control is completed. In this manner, fine control of the alignment operation of the glass substrate 210 is performed. This fine control is quickly performed until a predetermined second alignment precision (for example, approximately ± 0.5 μm range from the reference position of the alignment) is reached (see FIG. 3B to be described later).

In the above-described embodiment of the present invention, the alignment driving device 270 is exemplarily described as performing the alignment operation through the schematic control and the fine control of the glass substrate 210 as the workpiece. However, those skilled in the art will fully understand that the alignment driving device 270 may perform the alignment operation through coarse and fine control of a tool (not shown) for performing a specific operation on the workpiece.

Meanwhile, the fine adjustment actuator 290 used in the alignment driving device 270 of the present invention may be implemented as, for example, a piezo actuator. Piezo actuators are solid state actuators with ceramics of Pb (Zr, TiO3) components with piezoelectric properties, which convert electrical energy directly into mechanical energy and enable high precision movement. More specifically, piezo actuators enable precise control in the nanometer (nm) range. Types and configurations of such piezo actuators are described in detail on the Internet website http://www.pi.ws and are currently used in the field of fine precision machining. In the case of a ball screw used as a prior art actuator, the control accuracy is low. Therefore, when performing the alignment operation using the ball screw, the desired alignment position is found through several corrective motions including feedback of the movement amount according to the movement command in order to find the correct alignment position. On the other hand, when the piezo actuator is used as in the present invention, since the resolution is very high, the desired alignment position can be found through a small number of correction motions. Using a fine adjustment actuator 290, such as the piezo actuator described above, allows the glass substrate 210 or tool (not shown) to be quickly and precisely positioned at a desired alignment position (e.g., positioned on stage 220). It is possible to move to the alignment mark displayed on the glass substrate 210.

In addition, in the alignment driving device 270 according to the present invention illustrated in FIGS. 2A and 2B, the driving member 280 may be implemented as a server motor, and the first moving member 277a and Each of the second moving members 277b may be implemented as an LM guide.

2A and 2B, one end of the ball screw 275 is connected to the driving member 280, and the middle portion of the ball screw 175 is the second support member 273b. Although illustrated as being screwed to the exemplary embodiment, one skilled in the art is connected to the driving member 280, one end of the ball screw 275, the middle portion of the ball screw 275 and the fourth support member (273d) It will be appreciated that it can be screwed together.

In addition, in the embodiment of the present invention shown in Figs. 2A and 2B, it is described that the first to fourth supporting members 273a, 273b, 273c, and 273d are provided as independent elements, respectively. Although those skilled in the art will appreciate that the first support member and the second support member 273a, 273b are provided as a first integral support member formed of one member, and the third support member and the fourth support member 273c, 273d are provided. It will be appreciated that it can be provided as a second integral support member formed from another member.

Further, in the embodiment of the present invention shown in FIGS. 2A and 2B, the fine adjustment actuator 290 is described as movably connected with the first support member 273a, but those skilled in the art will appreciate the fine adjustment actuator 290. It will be appreciated that can be movably connected with the second support member 273b or the first support member as described above or the first integral support member as described above.

In addition, the predetermined values used in the primary control (or coarse control) and the secondary control (or fine control) of the present invention represent the degree of alignment of the workpiece or the tool relative to each other. It is not limited to ± 3 micrometer which is 1 alignment precision value, and ± 0.5 micrometer which is 2nd alignment precision value.

In addition, when the alignment drive device 270 according to the present invention shown in Figures 2a and 2b is used in place of the plurality of alignment drive device 170 shown in Figure 1b, of the prior art shown in Figure 1b The alignment system is the alignment system according to the present invention. In this case, the plurality of idle driving devices 170a illustrated in FIG. 1B may have the same configuration or different configurations from those of the alignment driving device 270 according to the present invention illustrated in FIGS. 2A and 2B. . In the case of having the same configuration, the plurality of idle driving units 170a functions as the alignment driving unit 270 when the stage 220 or the tool (not shown) participates in the control of the rotational movement and the linear movement. ) Or does not participate in the control of the rotational movement and linear movement of the tool (not shown). When having a different configuration, the plurality of idle drives 170a generally do not have a fine adjustment actuator 290 and a ball screw 275, for example.

3A is a flowchart illustrating a method of aligning a workpiece or a tool according to the present invention, and FIG. 3B is a schematic of an alignment operation of the workpiece or tool used in the method of aligning a workpiece or a tool according to the present invention. 2 is a diagram specifically illustrating two-step control including control and fine control.

Referring to FIGS. 3A and 3B in conjunction with FIGS. 2A and 2B, the alignment method in accordance with the present invention achieves a first predetermined alignment accuracy for the alignment operation of the workpiece 210 or tool (not shown). Control step 310 until rough. The step 310 of controlling the alignment operation of such a workpiece 210 or tool is performed using the ball screw 275 and drive member 280 shown in FIGS. 2A and 2B. In addition, the first predetermined alignment accuracy required for coarse control of the alignment operation of the workpiece 210 or the tool may be, for example, approximately ± 3 μm. Thereafter, the alignment method of the workpiece or the tool according to the present invention includes the step of finely controlling 320 the alignment operation of the workpiece 210 or the tool until a predetermined second alignment precision is reached. do. Finely controlling 320 the alignment of such a workpiece 210 or tool is performed using the fine adjustment actuator 290 shown in FIGS. 2A and 2B. In addition, the second predetermined alignment accuracy required for fine control of the alignment operation of the workpiece 210 or the tool may be, for example, within approximately ± 0.5 μm.

Referring again to FIG. 3B, in the alignment method of the workpiece or the tool according to the present invention, the position A of the workpiece 210 or the tool described above is a target alignment point of the workpiece 210 or the tool (which is a reference point. From 0) approximately ± 0.25 mm. Then, in step 310 the alignment movement of the workpiece 210 or the tool is controlled schematically, so that the position B of the workpiece 210 or the tool is, for example, the first from the target alignment point. It is located at a predetermined ± 3 mu m as an alignment precision value. Then, in step 320 the alignment movement of the workpiece 210 or the tool is finely controlled, so that the position C of the workpiece 210 or the tool is, for example, second from the target alignment point. It is located within a predetermined ± 0.5 μm with an alignment precision value.

As described above, using the alignment drive device 270 according to the present invention, the alignment operation of the workpiece 210 or the tool can be controlled quickly and accurately.

Although the workpiece used in the alignment drive device 270 and the method according to the present invention described above is exemplarily described as a glass substrate for a PDP or LCD panel, those skilled in the art will appreciate the alignment drive device 270 and the present invention. It will be appreciated that the method can be applied to any workpiece for which alignment is required.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

1A schematically illustrates a coating apparatus for manufacturing a PDP or LCD panel of the prior art.

1b shows a plan view of an alignment system of a workpiece comprising a stage and a drive according to the prior art.

FIG. 1C is a detailed perspective view of the driving device for aligning the workpiece shown in FIG. 1B.

FIG. 1D is a detailed side cross-sectional view of the drive device for aligning the workpiece shown in FIG. 1B.

Figure 2a is a view showing a detailed side cross-sectional view of the alignment device for driving in accordance with the present invention.

Figure 2b is a detailed side cross-sectional view showing the alignment operation of the workpiece using the drive device for alignment according to the present invention shown in Figure 2a.

3A is a flowchart illustrating a method of aligning a workpiece or tool in accordance with the present invention.

FIG. 3B is a diagram specifically illustrating two-stage control including coarse control and fine control of the alignment operation of the workpiece or tool used in the alignment method of the workpiece or the tool according to the present invention.

Claims (35)

delete delete delete In a drive for aligning a workpiece or a tool, An upper table having a rotating member in a central portion thereof; A first support member and a pair of third and fourth support members for movably supporting the upper table; A fine control device movably connected to the first support member; A second support member fixedly connected to the fine control device; A first moving member to which the first and second supporting members are mounted and move; A second moving member to which the third and fourth supporting members are mounted and move; A lower table on which the first moving member and the second moving member are fixedly mounted; And A schematic control device connected with the second support member Including, The coarse control device controls the alignment operation of the workpiece or the tool until it reaches a first predetermined alignment accuracy, The fine control device finely controls the alignment operation of the workpiece or the tool having reached the first predetermined alignment precision until the second predetermined alignment accuracy is reached. Drive for alignment. The method of claim 4, wherein The fine control device is implemented as a piezo actuator, The schematic control device is implemented as a ball screw screwed with the second support member (ball screw), and a drive member connected to one end of the ball screw, The first moving member and the second moving member are each implemented with an LM guide Drive for alignment. The method of claim 5, The drive device for aligning the ball screw is screwed with the fourth support member. The method of claim 4, wherein The first support member and the second support member are provided as a first integral support member formed of one member, The third support member and the fourth support member are provided as a second integral support member formed by another member. Drive for alignment. The method of claim 7, wherein The fine control device is a drive device for alignment that is movably connected with the second support member. The method of claim 7, wherein The fine control device is an alignment drive device movably connected with the first integrated support member. The method according to claim 5 or 6, The drive device is an alignment drive device that is fixedly mounted to one side of the first support member or the first integrated support member, and further comprising a receiving member having a receiving space for receiving the other end of the ball screw. . The method according to any one of claims 4 to 9, The first alignment accuracy is ± 3㎛ from the alignment reference point, The second alignment precision is ± 0.5 μm from the alignment reference point Drive for alignment. In the alignment system of the workpiece, A workpiece support member on which the workpiece is positioned; A plurality of alignment driving devices positioned below the workpiece supporting member, for aligning the workpiece supporting member; And A plurality of idle driving devices positioned below the workpiece support member and supporting the workpiece support member; Including, Each of the plurality of alignment drives A schematic control device for roughly controlling the alignment operation of the workpiece until reaching a first predetermined alignment accuracy; And A fine control device connected in series with the coarse control device and finely controlling the alignment operation of the workpiece until reaching a second predetermined alignment accuracy; Including; Each of the plurality of idle driving devices has the same configuration as that of each of the plurality of alignment driving devices. Alignment system of the workpiece. The method of claim 12, The schematic control device is implemented with a ball screw and a drive member, The fine control device is implemented with a fine adjustment actuator Alignment system of the workpiece. delete delete The method according to claim 12 or 13, Each of the plurality of idle driving devices A second upper table having a second rotating member in a central portion thereof; Fifth and sixth support members and a pair of seventh and eighth support members for movably supporting the second upper table; A third moving member to which the fifth and sixth supporting members are mounted and move; A fourth moving member to which the seventh and eighth support members are mounted and move; And A second lower table on which the third moving member and the fourth moving member are fixed; Containing Alignment system of the workpiece. delete delete delete In the alignment system of the workpiece, A workpiece support member on which the workpiece is positioned; And A plurality of alignment drives for aligning the workpiece support member, which are located below the workpiece support member; Including, Each of the plurality of alignment drives An upper table having a rotating member in a central portion thereof; A first support member and a pair of third and fourth support members for movably supporting the upper table; A fine control device movably connected to the first support member; A second support member fixedly connected to the fine control device; A first moving member to which the first and second supporting members are mounted and move; A second moving member to which the third and fourth supporting members are mounted and move; A lower table on which the first moving member and the second moving member are fixedly mounted; And A schematic control device connected with the second support member Including; The coarse control device is configured to roughly control the alignment operation of the workpiece until it reaches a first predetermined alignment accuracy, The fine control device finely controls the alignment operation of the workpiece having reached the first predetermined alignment precision until the second predetermined alignment accuracy is reached. Alignment system of the workpiece. The method of claim 20, The fine control device is implemented as a piezo actuator, The schematic control device is implemented as a ball screw screwed with the second support member (ball screw), and a drive member connected to one end of the ball screw, The first moving member and the second moving member are each implemented with an LM guide Alignment system of the workpiece. The method of claim 21, And the ball screw is screwed with the fourth support member. The method of claim 20, The first support member and the second support member are provided as a first integral support member formed of one member, The third support member and the fourth support member are provided as a second integral support member formed by another member. Alignment system of the workpiece. 24. The method of claim 23, And the fine control device is movably connected with the second support member. 24. The method of claim 23, And the fine control device is movably connected with the first integral support member. The method of claim 21 or 22, The driving device is fixed to one side of the first support member or the first integral support member, the alignment of the workpiece further includes a receiving member having a receiving space for receiving the other end of the ball screw system. The method according to any one of claims 20 to 25, The first alignment accuracy is ± 3㎛ from the alignment reference point, The second alignment precision is ± 0.5 μm from the alignment reference point Alignment system of the workpiece. The method according to any one of claims 20 to 25, The alignment system of the workpiece further includes a plurality of idle driving devices positioned below the workpiece support member, the idle driving devices supporting the workpiece support member, Each of the plurality of idle driving devices has the same configuration as that of each of the plurality of alignment driving devices. Alignment system of the workpiece. The method according to any one of claims 20 to 25, The alignment system of the workpiece further includes a plurality of idle driving devices positioned below the workpiece support member, the idle driving devices supporting the workpiece support member, Each of the plurality of idle driving devices A second upper table having a second rotating member in a central portion thereof; Fifth and sixth support members and a pair of seventh and eighth support members for movably supporting the second upper table; A third moving member to which the fifth and sixth supporting members are mounted and move; A fourth moving member to which the seventh and eighth support members are mounted and move; And A second lower table on which the third moving member and the fourth moving member are fixed; Containing Alignment system of the workpiece. In the alignment system of the tool, A plurality of alignment drives attached to the tool for aligning the tool Including, Each of the plurality of alignment drives An upper table having a rotating member in a central portion thereof; A first support member and a pair of third and fourth support members for movably supporting the upper table; A fine control device movably connected to the first support member; A second support member fixedly connected to the fine control device; A first moving member to which the first and second supporting members are mounted and move; A second moving member to which the third and fourth supporting members are mounted and move; A lower table on which the first moving member and the second moving member are fixedly mounted; And A schematic control device connected with the second support member Including; The coarse control device controls roughly the alignment operation of the tool until it reaches a first predetermined alignment accuracy, The fine control device finely controls the alignment operation of the tool reaching the predetermined first alignment precision until reaching the second predetermined alignment accuracy. Tool alignment system. 31. The method of claim 30, The schematic control device is implemented with a ball screw screwed with the second support member (ball screw), and a drive member connected to one end of the ball screw, The fine control device is implemented as a piezo actuator Tool alignment system. In the alignment method of the workpiece or tool, a) roughly controlling the alignment movement of the workpiece or the tool until reaching a first predetermined alignment accuracy; And b) finely controlling the alignment motion of the workpiece or tool until a second predetermined alignment accuracy is reached Including, The first alignment accuracy is ± 3㎛ from the alignment reference point, The second alignment precision is ± 0.5 μm from the alignment reference point How to align a workpiece or tool. delete 33. The method of claim 32, Finely controlling the alignment operation of the workpiece or tool is performed by a fine adjustment actuator. delete

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