KR101019637B1 - Manufacturing apparatus and Method for Metal Membrane Filter with Nano-structured Porous Layer - Google Patents

Abstract

The present invention relates to a metal membrane filter manufacturing apparatus and a manufacturing method having a nano-structured pore layer, and more particularly, by sintering the metal nanoparticles synthesized by laser ablation on a low-grade conventional micron metal fiber filter nano The present invention relates to a nanostructured pore layer metal membrane filter manufacturing apparatus and a method of manufacturing a coated sintered nanoparticle aggregate having a high filtration efficiency at low differential pressure conditions by forming a structural pore layer.

In the present invention, the nanostructured pore layer membrane filter was prepared by coating one side with sintered nanoparticle aggregates obtained by sintering agglomerates of metal nanoparticles produced by laser ablation. Aggregates of nanoparticles synthesized by laser ablation have branched structural shapes with low fractal dimensions. The sintered nanoparticle aggregates sintered on the aerosol are deposited on a micron metal fiber filter and heat treated to provide higher filtration performance than conventional metal membrane filters. In addition, as the sintering temperature on the aerosol increases, the size of the branched nanostructures decreases due to the interparticle shrinkage of the nanoparticle aggregates. As a result, the shrinked nanoparticle aggregates are deposited on a micron metal fiber filter and heat treated. The pore size of the structural pore layer is reduced, and thus the nanostructured pore layer membrane filter coated with the sintered nanoparticle aggregates has an effect of increasing differential pressure and filtration efficiency.

Filters, Nanostructures, Pore Layers, Nanoparticles, Aggregates, Sintered

Description

Manufacturing apparatus and method for Metal Membrane Filter with Nano-structured Porous Layer

The present invention relates to a metal membrane filter manufacturing apparatus and a manufacturing method having a nano-structured pore layer, and more particularly, by sintering the metal nanoparticles synthesized by laser ablation on a low-grade conventional micron metal fiber filter nano The present invention relates to a nanostructured pore layer metal membrane filter manufacturing apparatus and a method of manufacturing a coated sintered nanoparticle aggregate having a high filtration efficiency at low differential pressure conditions by forming a structural pore layer.

Recently, with increasing interest in nanoparticles, studies on the preparation of various metal nanoparticles have been actively conducted. From the material point of view, nanotechnology, a technology that handles a billionth of a meter of materials or devices, corresponds to a technology that deals with materials consisting of hundreds or hundreds of atoms or molecules. Such nanomaterial technology can be obtained with conventional materials. It is a cutting-edge integrated technology of modern science that can be applied to various fields and industries because it can exhibit new functions and characteristics.

On the other hand, among nanotechnology, nanomaterials can be subdivided into various fields such as metals, ceramics, and polymers. Applications of such nanomaterials are powder, tubes, whiskers, thin films, and the like. It can be in various forms such as bulk.

Among them, nano powder materials have a wide range of applications as they are diverse, and have very unique properties that do not appear in micro-sized particles. In other words, as the particle size decreases, the bulk property decreases and the surface property becomes prominent.

Specific physical, chemical, electrical, mechanical, optical, and magnetic properties of nanoparticles include catalysts, sensors, information recording media, abrasives, antimicrobial / disinfectants, photoresists for photographic films, paints, inks, textile dyes, cosmetics, ceramics, electromagnetic shielding It is expected to be newly applied to various industries such as film, electromagnetic wave shielding TV / computer monitor coating, and display field. Currently, various studies on nanoparticle manufacturing and nanoparticle agglomeration control have been conducted. However, research on applying nanoparticles or their aggregates onto arbitrary substrates and applying them to nanostructured materials, particularly nanoporous bodies, has been very insignificant.

Houriet et al. Synthesized carbon nano-curl using a laser spark atomizer, and then coated the carbon nano-layers with three-dimensional mesopores to form a carbon film. . They also reported the results of nano-porous films made by attaching nanoparticles made using laser ablation (LA) directly onto an alumina membrane filter. During nanoparticle synthesis, high concentrations of nanoparticles form nanoparticle-agglomerates due to coagulation and coalescence, and their shape is known to be controlled by the mutual control of the collision rate and the fusion rate. . When the collision speed is larger than the fusion speed, the particle aggregates have a dendrite shape. However, when the collision speed is larger than the collision speed, the aggregated particles are fused again and the final aggregate shape is close to the spherical shape.

The laser ablation technique is a representative physical nanoparticle synthesis process, and since the collision speed is larger than the fusion speed between nanoparticles, branched nanoparticle aggregates can be easily produced.

The produced nanoparticles or aggregates may be attached on any substrate installed inside the reactor to prepare nanoporous bodies, which are nanostructured bulk materials, and microfilters may be installed at the outlet of the reactor to form nanoparticles on the filter. A pore layer can also be formed.

In the case of forming a nanostructured material on a support plate installed inside the reactor, the shape of nanoparticles or aggregates at the attachment surface is controlled by deposition rate and deposition by controlling body forces such as flow field, temperature field or electric field around the attachment surface. You can control the state. Alternatively, when the nanostructured material is formed on the micro filter installed at the outlet of the reactor, the pore structure of the nanoporous layer formed may include the size of the synthesized nanoparticles, the size of the nanoaggregates, the shape of the nanoaggregates (the number of fractal dimensions), and the transport. The flow rate and composition of the gas, the external force field and the like can be controlled.

Therefore, the disadvantages of the conventional metal fiber sintered filter having the advantages of low differential pressure but low filtration efficiency by controlling the above conditions, and the conventional metal powder sintered filter having the disadvantage of high differential pressure while having the advantage of high filtration efficiency. It is necessary to study a new filter manufacturing method which has high filtration efficiency at low differential pressure condition that can secure each other.

Metal membrane filter manufacturing apparatus having a nano-structured pore layer of the present invention for solving the above problems,

In the manufacturing apparatus for forming a nano-structured pore layer on the metal membrane filter, a transfer gas inlet is formed on the upper side, a laser irradiation part consisting of a laser and an optical lens is formed on one side, the metal specimen on the side facing the laser irradiation part The fixed specimen fixing part is formed to generate nanoparticles by irradiating a laser beam on the metal specimen mounted on the specimen fixing part, and the generated nanoparticles are aggregated to form a nanoparticle aggregate and transported by a transfer gas. Wow; A heating chamber for sintering by applying heat to the nanoparticle aggregates introduced from the ablation chamber; The inlet is formed in the upper portion of the chamber formed with a hollow portion communicating with the heating chamber and the conveying pipe is supplied with the sintered nanoparticle aggregate from the heating chamber, the metal filter is mounted inside the hollow portion to be orthogonal to the inflow direction of the sintered nano aggregate. And a deposition chamber in which a discharge port for discharging the transport gas is formed in a lower portion opposite to the inlet.

In addition, the method of manufacturing a metal membrane filter having a nano structure pore layer,

In a method of manufacturing a metal membrane filter in which nanoparticles are generated by irradiating a laser beam onto a metal specimen and the nanoparticles are fixed to a metal filter to form a nanostructure pore layer, the metal nanoparticles are irradiated with a laser beam on a rotating metal plate. Nanoparticle generation step of generating; A nanoparticle aggregation step of transferring the generated nanoparticles through a transfer gas and agglomerating with adjacent nanoparticles in a transfer process; An aggregate sintering step of applying a high temperature heat to the aggregated nanoparticle aggregates in such a step to shrink the nanoparticle aggregates to change shape; Depositing a sintered nanoparticle aggregate on the surface of the micron metal fiber filter to form a nanostructured pore layer; And sintering the aggregates forming the nanostructured pore layer with each other and heat-treating the nanostructured pore layer to adhere to the surface of the metal fiber filter.

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As described in detail above, an apparatus and a manufacturing method of a metal membrane filter having a nanostructured porous layer of the present invention,

A nanostructured pore layer membrane filter was prepared by coating one side with sintered nanoparticle aggregates sintered to aggregates of metal nanoparticles produced by laser ablation. Aggregates of nanoparticles synthesized by laser ablation have branched structural shapes with low fractal dimensions. The sintered nanoparticle aggregates sintered on the aerosol are deposited on a micron metal fiber filter and heat treated to provide higher filtration performance than conventional metal membrane filters. In addition, as the sintering temperature on the aerosol increases, the size of the branched nanostructures decreases due to the interparticle shrinkage of the nanoparticle aggregates. As a result, the shrinked nanoparticle aggregates are deposited on a micron metal fiber filter and heat treated. The pore size of the structural pore layer is reduced, and thus the nanostructured pore layer membrane filter coated with the sintered nanoparticle aggregates has an effect of increasing differential pressure and filtration efficiency.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

Figure 1 schematically shows the configuration of a metal membrane filter manufacturing apparatus having a nanostructured pore layer according to the present invention.

As described above, in the filter manufacturing apparatus 10 of the present invention, the ablation chamber 20, the heating chamber 30, and the deposition chamber 40 communicate with each other by a transfer tube.

The ablation chamber 20 has a conveying gas inlet formed at an upper portion thereof, and a conveying gas is introduced therein, and a laser irradiating part 21 composed of a laser 211 and an optical lens 212 is formed at one side thereof. On the opposite side, a specimen fixing part 22 to which the metal specimen 23 is fixed is formed. Here, nitrogen gas was used as the transport gas, and the gas flow rate was controlled by a mass flow meter.

In addition, the metal specimen 23 is formed of a disc to control the desired number of revolutions by the drive motor 24 outside the chamber, the laser irradiation focus is to be formed in a portion spaced from the center of the disc to the outside. In addition, although various metals may be used as the material of the metal specimen 23, it is preferable to use stainless steel or nickel. In the ablation chamber having the above structure, a laser beam is irradiated to the metal specimen mounted on the specimen fixing part. Since the collision speed between the generated nanoparticles is larger than the fusion rate, the generated nanoparticles are aggregated into branches and these nanoparticle aggregates are aggregated. Is conveyed by the conveying gas.

The heating chamber 30 that receives the nanoparticle aggregates in which the aerosol-shaped nanoparticles are agglomerated from the ablation chamber sinters the nanoparticle aggregates by applying high temperature heat, and in this process, the nanoparticle aggregates have a shape deformation due to shrinkage. Is done. The heating chamber may be applied to various heating means such as an electric furnace or an infrared electric furnace having a heating plate.

The sintered nanoparticle aggregates sintered in the heating chamber are supplied to the deposition chamber 40. The deposition chamber is formed of a hollow portion, the upper portion is communicated through the heating chamber and the transfer pipe is supplied with the sintered nanoparticle aggregate, and the lower portion is formed with a discharge port for discharging the transfer gas. In addition, the micron metal fiber filter 41 is mounted in the direction perpendicular to the inlet of the sintered nanoparticle aggregate. That is, the hollow portion of the deposition chamber is partitioned by the filter 41, and sealed to discharge only through the filter. In addition, the deposition chamber detachably detaches the micron metal fiber filter so that the sintered nanoparticle aggregates introduced into the filter are deposited until a predetermined differential pressure is generated, and the replacement of the other filter is easy.

The sintered nanoparticle agglomerates are deposited on one side to form a nano-structured pore layer, and the filter is removed from the deposition chamber and heat-treated in an electric furnace (not shown) to attach the nano-structured pore layer to the filter to manufacture a nano-structured pore layer membrane filter. do.

Figure 2 is a block diagram illustrating a method for manufacturing a metal membrane filter having a nanostructured pore layer of the present invention.

First, the present invention is a nanoparticle generation step (S1) of generating a metal nanoparticles by irradiating a laser beam on a rotating metal plate.

The nanoparticles produced in the above step are aggregated with each other immediately after production. Since the nanoparticles of the present invention are generated by laser ablation, the nanoparticles produced by the technical characteristics are agglomerated in a branch shape, and the agglomeration is supplied by the transport. Nanoparticle aggregation step (S2) is carried out while being carried by the gas is performed.

The aggregated nanoparticle aggregate in this step is supplied to the heating chamber is subjected to heat shrinkage by applying a heat of 300 ~ 900 ℃ aggregate sintering step (S3) is performed. The heating temperature is difficult to achieve the shrinkage effect of the nanoparticle aggregate when the nanoparticle aggregate is sintered while being transported by the carrier gas, and when the particle temperature is below 300 ° C, the transition temperature is higher than 900 ° C. It is preferable to set within the above range because the aggregate of the phase structure and the aggregate of the cluster structure coexist so that the specific surface area is greatly reduced.

The sintered nanoparticle aggregates sintered in the above step is supplied to the deposition chamber through a transfer tube and deposited on one surface of the micron metal fiber filter mounted on the deposition chamber to form a nano structure pore layer (S4). In this step, the deposition is performed on the surface of the metal fiber filter at a filtration rate of 4.2 cm / s such that the differential pressure is 2 kPa, which is an example, and the range of the differential pressure can be varied according to the change of the filtration rate. Can be set to various sizes of differential pressure.

The aggregates forming the nanostructured pore layer are fixed to each other, and a sintering step (S5) is performed in an argon gas atmosphere to fix the nanostructured pore layer to the surface of the metal fiber filter, thereby forming a metal having the nanostructured pore layer of the present invention. Membrane filters are made. The heat treatment temperature of the sintering step is made for 20 to 40 minutes at 550 ~ 650 ℃. When the heat treatment temperature is applied above the above range, there is a disadvantage in that the metal forming the nanostructured pore layer is melted and the nanostructured pore layer is extinguished, and when applied below the above range, between the nanoparticle aggregates forming the nanostructured pore layer; Since the adhesion between the nanostructured pore layer and the filter surface is not well made, it is preferable that the heat treatment is performed within the above range and time.

The metal membrane filter having the nanostructured pore layer manufactured by the manufacturing apparatus and the manufacturing method is a first sintering process to deposit the shrinkage sintered nanoparticle aggregates, and to sinter it to fix the nanostructured pore layer on one side of the filter Allow this to be coated.

The present invention will be described in detail through the following examples.

Metal membrane filter manufacturing apparatus having a nano-structured pore layer according to the present invention was used.

Nitrogen gas was used as a conveying gas, and the gas flow rate was controlled by the mass flow meter.

The laser used high power Nd: Yag Laser (contiuum, surelite III-10), and the maximum power was 1,000 mJ / pulse at 1,064 nm. In this experiment, the laser energy was converted to 532 nm. Experiments were performed after fixation at 200 mJ / pulse.

The optical lens used a lens having a focal length of 300 mm, and the lens was fixed to the lens holder to maintain a constant distance from the specimen.

The experiment was carried out by fixing the diameter of the focusing area (FA) of the laser beam irradiating the specimen surface to 1 mm.

The ablation chamber consists of 6-way cubes, view ports, reducers, and adapters from Huntington, USA.The stainless steel (SUS316L) metal specimen is attached to the internal specimen fixing part, and then the desired number of revolutions is achieved by a drive motor connected to the outside. Controllable.

The stainless steel metal nanoparticles prepared by laser irradiation on the stainless steel metal specimens were passed through an infrared furnace by a 1 liter (standard liter per minute) transfer gas while being heated by aerosol phase, and then SMPS (scanning). mobility particle sizer (TSI 3080) was used to measure the change in the size and concentration distribution of nanoparticle aggregates.

After passing through the nanoparticles, shrinkage occurs due to heat, and the shape of the nanoparticle aggregates is deformed, and then the filtration rate is applied to the surface of the micron metal fiber filter (BEKAERT, BEKIPORr ST 7CL4) made of stainless steel (SUS316L) installed downstream. The deposition was performed until the differential pressure became 2 kPa at 4.2 cm / s to form a nanostructured pore layer.

In order to adhere the sintered nanoparticle aggregates that form the nanostructured pore layer deposited on the surface of the micron metal fiber filter to each other and to the surface of the metal fiber filter, a filter in which the nanoparticle aggregates are deposited is subjected to an electric furnace in an argon gas atmosphere. ) Was heat treated at 600 ° C. for 30 min.

The nanostructured pore layer fixed after sintering can be observed through SEM (scanning electron microscope; HITACHI S-4700) image, and the pressure difference between front and rear of the filter that forms the nanostructured pore layer after sintering is the differential pressure gauge. It was measured by (testo 445).

If the number concentration of the particles used in the filtration performance test is too high, the test particles easily block the pores of the filter and the test particles interfere with the synergistic effect of the filtration efficiency, making it difficult to accurately analyze the filtration efficiency. Therefore, by using the nano mobility classifier DMA (differential mobility analyzer: TSI 3081), only 100nm particles were classified and the particle concentration of particles before and after the filter where the nanoparticle aggregates were fixed using UCPC (ultrafine condensation particle counter: TSI 3025A). The filtration efficiency of the nanostructured pore layer membrane filter coated with the sintered nanoparticle aggregates was measured by measuring.

Example 1 Measurement of Changes in Nanoparticle Aggregate Size and Water Concentration Distribution

Synthesis from stainless steel metal specimens when the laser beam focusing on the specimen surface installed in the laser ablation chamber is 1 mm in diameter, the flow rate of nitrogen gas, which is the transport gas, is 1 slm, and the laser energy is 200 mJ / pulse. The nanoparticles and their nanoparticle aggregates were measured in the size and water concentration distribution of the nanoparticle aggregates exiting the aerosol phase in an infrared electric furnace at a temperature condition of 200 ~ 800 ℃ and shown in FIG.

As shown in FIG. 3, it can be seen that as the sintering temperature is increased, aggregates formed with low fractal dimension dendrite nanostructures shrink to decrease the average aerodynamic diameter size. there was. As the internal temperature of the infrared electric furnace increases, the collision rate between particles increases, so that the water concentration of the particles decreases.

Example 2 Measurement of Shape of Nanoparticle Aggregates Sintered with Temperature

In order to directly observe the shape change of nanoparticle aggregates by sintering, the nanoparticle aggregates discharged through an infrared electric furnace are collected in an alumina membrane filter having a pore size of 0.2 μm for 20 sec at a filtration rate of 2.2 cm / s. It was. (A) is 20 ° C, (b) is 200 ° C, (c) is 400 ° C, (d) is 600 ° C and (e) is 800 ° C, and the result is shown in FIG. 4. It was.

As can be seen, it was confirmed that the aggregates in the room temperature condition of the infrared electric furnace that were not heated form a branched nanostructure of low fractal dimension consisting of nanoparticles.

However, as the sintering temperature increases, the nanoparticle aggregates shrink rapidly and the branched nanostructures decrease in size. The higher the sintering temperature, the more the shape of the nanoparticle aggregates deforms. It was found that the branched nanostructures were significantly reduced.

Example 3 Shape Measurement of Micron Metal Fiber Filter with Nanoparticle Porous Layer

The nanoparticle aggregates sintered under the conditions of Example 2 were deposited on the micron metal fiber filter to sinter the nanoparticle aggregates at a filtration rate of 4.2 cm / s such that the differential pressure was 2 kPa. The shape change of the nanostructured pore layer after fixing to a micron metal fiber filter at a heat treatment temperature of 600 ° C. is shown in FIG. 5.

As can be seen from the SEM results, it can be seen that as the sintering temperature increases, the nanostructured pore layer having a smaller pore size is formed.

Example 4 Measurement of Differential Pressure Change

A pressure drop change of the nanostructured pore layer metal membrane filter heat-treated under each condition of Example 3 is shown in FIG. 6.

As mentioned, the gas resistivity of the nanostructured pore layer membrane filter coated with the sintered nanoparticle aggregates (pressure difference across the filter when a certain flow rate of gas permeated the filter) increased with increasing sintering temperature. This is because the higher the sintering temperature of the infrared electric furnace, the more the nanoparticle aggregates shrink, and thus the more closely deposited on the micron metal fiber filter, the smaller the pore size of the nanostructured pore layer through the heat treatment process of Example 3, resulting in lower gas resistivity. It can be seen that this is high.

Example 5 Particle Permeability Measurement

Particle transmittance (penetration, meaning '1-filtration efficiency') of the nanostructured pore layer metal membrane filter heat treated under each condition of Example 3 was measured and shown in FIG. 7.

As mentioned, the filtration efficiency of the nanostructured pore layer membrane filter coated with the sintered nanoparticle aggregates was significantly improved compared to the conventional microfilter, and the filtration efficiency increased as the sintering temperature of the nanoparticle aggregates increased. there was. However, when the sintering temperature is 600 ℃, the results are better than that of 800 ℃, even if the nanoparticle aggregates shrink until the sintering temperature of the infrared electric furnace up to 600 ℃, it retains the branched structure aggregate having a low fractal dimension number, This is because the sintering temperature is too high at 800 ° C. so that the fractals have a high number of dimensional fractals, so the branched and clustered aggregates coexist and the specific surface area for filtration is reduced.

Example 6 Comparison of Differential Pressure and Filtration Efficiency

The filtration performance of the nanostructured pore layer membrane filter coated with the prepared sintered nanoparticle aggregates was compared with that of the metal powder sintered membrane filter. Comparison of Differential Pressure and Filtration Efficiency of Nano Structural Layer Metal Membrane Filter Coated with Nanoparticle Aggregate Treated at 600 ° C in Heating Chamber and Metal Powder Sintered Membrane Filter (Mott, Media Grade 2) One result is shown in FIG.

As can be seen, the differential pressure and filtration efficiency of the nanostructured pore layer membrane filter coated with sintered nanoparticle aggregates prepared at 600 ° C were 0.516 kPa, 99.999%, and the differential pressure and filtration of Mott's metal powder sintered membrane filter. The efficiency is 0.546 kPa, 96.6%. The differential pressures were similar but the filtration efficiency was much better for the nanostructured pore layer membrane filter coated with sintered nanoparticle aggregates.

In addition, the above-mentioned example is only an example to demonstrate this invention. Therefore, it is obvious that the ordinary skilled in the art to which the present invention pertains uses the partial change with reference to the detailed description.

1 is a schematic view showing a metal membrane filter manufacturing apparatus having a nano-structured pore layer according to the present invention.

Figure 2 is a block diagram showing a method for manufacturing a metal membrane filter having a nano-structured pore layer according to the present invention.

Figure 3 is a graph showing the change in size and water concentration distribution of the nanoparticle aggregates sintered at different temperatures in the present invention.

Figure 4 is a SEM photograph of the shape of the nanoparticle aggregates sintered at different temperatures in the present invention.

FIG. 5 is a SEM photograph of a micron metal fiber filter shape in which a nanoparticle pore layer is formed by heat treatment after deposition in a manufacturing process of the present invention. FIG.

Figure 6 is a graph showing the differential pressure change of the nanostructured pore layer metal membrane filter heat-treated at different temperatures in the present invention.

Figure 7 is a graph showing the particle transmittance of the nanostructured pore layer metal membrane filter heat treated at different temperatures in the present invention.

8 is a graph comparing the differential pressure and the filtration efficiency of the filter according to the present invention and the existing filter.

<Explanation of symbols for the main parts of the drawings>

10: filter manufacturing apparatus

20: ablation chamber

21: laser irradiation section 22: specimen fixing

23: metal specimen 24: drive motor

211: laser 212: optical lens

30: heating chamber

40: deposition chamber

41: metal filter

S1: nanoparticle generation step S2: nanoparticle aggregation step

S3: Aggregate Sintering Step S4: Deposition Step

S5: Sintering Step

Claims (6)

In the apparatus for manufacturing a metal membrane filter having a nano structure pore layer, A transport gas inlet is formed at an upper portion thereof, and a laser irradiator 21 composed of a laser 211 and an optical lens 212 is formed at one side thereof, and a specimen on which a metal specimen 23 is fixed at a side facing the laser irradiator. The fixing part 22 is formed to generate nanoparticles by irradiating a laser beam on the metal specimen mounted on the specimen fixing part, and the generated nanoparticles are aggregated to form nanoparticle aggregates and transferred by a transfer gas. The metal specimen 23 is formed of a disc and rotated by the driving motor 24 to be irradiated with the laser chamber 20; A heating chamber 30 for sintering by applying heat to the nanoparticle aggregates introduced from the ablation chamber; The inlet is formed in the upper portion of the chamber formed with a hollow portion communicating with the heating chamber and the transfer pipe is supplied with the sintered nanoparticle aggregate from the heating chamber, the metal filter 41 so as to be orthogonal to the inflow direction of the sintered nano aggregate in the hollow portion. Is equipped with a metal membrane filter manufacturing apparatus having a nano-structured pore layer, characterized in that it comprises a; the deposition chamber 40 is formed in the lower portion opposite to the inlet is discharge port for discharging the transport gas. delete In the method of manufacturing a metal membrane filter to irradiate a laser beam on a metal specimen to generate nanoparticles and to fix the generated nanoparticles to a metal filter to form a nanostructure pore layer, Nanoparticle generation step (S1) for generating a metal nanoparticles by irradiating a laser beam to the rotating metal plate; A nanoparticle agglomeration step (S2) of transferring the generated nanoparticles by a transfer gas and agglomerating with adjacent nanoparticles in a transfer process; An aggregate sintering step (S3) in which a shape change is made by shrinking the nanoparticle aggregate by applying heat of 300 to 900 ° C. to the aggregated nanoparticle aggregate; A deposition step (S4) of depositing the sintered nanoparticle aggregates on the surface of the micron metal fiber filter to form a nanostructure pore layer; A sintering step (S5) of adhering the aggregates forming the nanostructured pore layer to each other and heat-treating the mixture at a temperature of 550 to 650 ° C. for 20 to 40 minutes in an argon gas atmosphere to fix the nanostructured pore layer to the surface of the metal fiber filter; Metal membrane filter manufacturing method having a nano-structured pore layer, characterized in that comprises. delete delete delete

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