KR101013501B1 - Micromixer - Google Patents

Abstract

The present invention relates to a micro mixer. More specifically, the present invention relates to a micromixer that simplifies the structure as well as improving the mixing efficiency of the fluid by at least two micropumps performing the intake and discharge of the fluid so that the fluid to be mixed forms a pulsating flow. .

According to the present invention, a first supply line 12 to which a first fluid is supplied, and a first pumping line 14 connected to the first supply line 12 form an acute angle θ with the first supply line 12. And a first pumping part 16 provided upstream of the first pumping line 14 to suck and discharge the first fluid through the first pumping line 14. 10; A second supply line 22 to which a second fluid is supplied, a second pumping line 24 which forms an acute angle θ with the second supply line 22, and is connected to the second supply line 22; The second fluid supply part 20 includes a second pumping part 26 provided upstream of the second pumping line 24 to suck and discharge the second fluid through the second pumping line 24. ; And a fluid mixing line 30 in which the first fluid and the second fluid pumped by the first fluid supply unit 10 and the second fluid supply unit 20 are mixed and transported.

 Micro Mixer, MEMS, Micro Pump, LOC, TAS

Description

Micro Mixer {MICROMIXER}

The present invention relates to a micro mixer. More specifically, the present invention relates to a micromixer that simplifies the structure as well as improving the mixing efficiency of the fluid by at least two micropumps performing the intake and discharge of the fluid so that the fluid to be mixed forms a pulsating flow. .

Typically a mixer refers to a device for mixing two or more different fluids. Among these, the micro mixer is a device capable of mixing a small amount of fluid, and includes a bio-micro electro mechanical system including a micro total analysis system (-TAS), a lab-on-a-chip (LOC), and the like. ) Used in the field.

Micromixers can be broadly divided into passive micromixers and active micromixers. Mixing in a passive micromixer takes place primarily in disordered advection due to molecular diffusion or microscale laminar flow. Unlike the passive micromixer, the active micromixer uses external pressure, temperature, electrokinetic, acoustic, electrohydrodynamics (EMD), magnetic hydrodynamics (MHD), and dielectrophorosis (Dielectrophorosis) to disturb the mixing process.

Active micromixers have better mixing characteristics than passive ones, but are generally complex in structure, require complex processing processes, and require external energy. Many studies have been conducted on the passive micromixer since it does not use external power. However, the passive micromixer has a problem in its utilization because of its low mixing efficiency.

SUMMARY OF THE INVENTION In order to solve the above problems, an object of the present invention is to provide an active micro mixer which is simple in structure and easy to control and which can improve mixing characteristics.

To this end, the present invention forms a first supply line 12 to which a first fluid is supplied, and a first pump connected to the first supply line 12 to form an acute angle θ with the first supply line 12. A line 14 and a first pumping portion 16 provided upstream of the first pumping line 14 to suck and discharge the first fluid through the first pumping line 14. 1 fluid supply section 10; A second supply line 22 to which a second fluid is supplied, a second pumping line 24 which forms an acute angle θ with the second supply line 22, and is connected to the second supply line 22; The second fluid supply part 20 includes a second pumping part 26 provided upstream of the second pumping line 24 to suck and discharge the second fluid through the second pumping line 24. ; And a fluid mixing line 30 in which the first fluid and the second fluid pumped by the first fluid supply unit 10 and the second fluid supply unit 20 are mixed and transported.

Preferably, in the present invention, the suction and discharge operations of the first pumping part 16 and the second pumping part 26 are made to cross each other, and the first fluid and the second fluid are mixed in a pulsating flow. It is characterized in that the efficiency is improved.

Preferably, the first pumping section 16 and the second pumping section 26 consist of a reciprocating diaphragm micropump.

Preferably, a first counter flow downstream of the first supply line 12, in which the first pumping part 16 reduces the back flow of the fluid in the direction of the fluid mixing line 30 when the first pump 16 sucks the first fluid. A prevention jaw 19 is provided, and at the downstream side of the second supply line 22, when the second pumping part 26 inhales the second fluid, the backflow of the fluid in the direction of the fluid mixing line 30 is reduced. The second backflow prevention jaw 29 to be characterized in that it is provided.

In addition, the present invention, the common supply line 70 is supplied with the fluid to be mixed together; A first pumping line 14 which forms an acute angle θ with the common supply line 70 and is connected to one side of the common supply line 70, and is provided upstream of the first pumping line 14 A first fluid supply unit (10) including a first pumping unit (16) for sucking and discharging fluid through the first pumping line (14); A second pumping line 24 which forms an acute angle θ with the common supply line 70 and is connected to the other side of the common supply line 70, and is provided upstream of the second pumping line 24 A second fluid supply unit 20 including a second pumping unit 26 for sucking and discharging fluid through the second pumping line 24; And a fluid mixing line 30 in which the first fluid and the second fluid pumped from the first fluid supply unit 10 and the second fluid supply unit 20 are mixed and conveyed, and the first pumping unit A suction and discharge operation of the 16 and the second pumping part 26 is provided in a crossover manner.

According to the present invention, it is possible to provide a micromixer that is easy to process by simplifying the structure by increasing the mixing efficiency of the fluid supplied to the micro scale by pulsating and supplying the fluid to be mixed.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, in adding reference numerals to the components of each drawing, it should be noted that the same reference numerals are assigned to the same components as much as possible, even if shown on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In addition, the following will describe a preferred embodiment of the present invention, but the technical idea of the present invention is not limited thereto and may be variously modified and modified by those skilled in the art.

1 is a view showing the configuration of a micro mixer according to a preferred embodiment of the present invention.

In the micromixer 1 according to the present invention, since the fluid to be mixed is sequentially pumped by at least two pumping units, the mixing of the fluid is promoted by generating a shear stress at an interface where each fluid flow meets. It is characterized by.

To this end, the micro mixer 1 includes a first fluid supply unit 10 for periodically pumping and supplying a first fluid, a second fluid supply unit 20 for periodically supplying and supplying a second fluid, and a first fluid supply unit. 10 and the fluid supplied from the second fluid supply unit 20 includes a fluid mixing line 30 is mixed and conveyed.

The first fluid supply unit 10 is a first supply line 12 to which the first fluid is supplied, and a first supply line 12 that forms an acute angle θ and is connected to the first supply line 12. It includes a pumping line 14 and a first pumping unit 16 connected to the first pumping line 14. The second fluid supply unit 20 forms a second supply line 22 to which the second fluid is supplied, and a second supply line 22 to the second supply line 22 to form an acute angle θ. It includes a pumping line 24 and a second pumping unit 26 connected to the second pumping line 24.

Since the structure of the 1st fluid supply part 10 and the 2nd fluid supply part 20 is the same, it demonstrates with respect to the structure of the 1st fluid supply part 10. FIG.

The first fluid to be mixed is supplied to the first supply line 12. The first supply line 12 and the first pumping line 14 are connected at an acute angle. The first supply line 12 is operated by the operation of the first pumping unit 16 provided above the first pumping line 14. The fluid supplied to) is pumped in the direction of the fluid mixing line 30. The first confluence 18 is provided below the first supply line 12 and the first pumping line 14. As shown in FIG. 1, the first confluence 18 is preferably formed to form the first backflow prevention jaw 19 with the first supply line 12 and in the extension line direction of the first pumping line 14. It is preferable to be.

The first pumping unit 16 repeatedly performs a function of sucking and discharging the fluid. To this end, the first pumping unit 16 may be formed of a reciprocating diaphragm micropump. Diaphragms are piezoelectric type, electromagnetic type, electrodynamic type, electrostatic type, thermopneumatic type and pneumatic depending on the type of the driving element. The most common form may be a piezoelectric micropump using a piezoelectric element. Meanwhile, in the present invention, the first pumping unit 16 is not limited to the above description and should be understood to include all types of pumps capable of periodically inhaling and discharging the fluid.

When the first pumping unit 16 expands, the first fluid supplied through the first supply line 12 is sucked into the first pumping unit 16 along the first pumping line 14. Thereafter, when the first pumping part 16 is contracted, the first fluid is supplied to the fluid mixing line 30 through the first confluence part 18 along the first pumping line 14.

The first backflow preventer 19 minimizes the flow of the fluid in the direction of the fluid mixing line 30 back to the first pumping part 16 when the first pumping part 16 expands. In the suction operation, the first fluid supplied through the first supply line 12 is mainly introduced into the first pumping part 16.

Each component of the second fluid supply 20 is provided substantially the same as the corresponding component of the first fluid supply 10.

The first pumping part 16 of the first fluid supply part 10 and the second pumping part 26 of the second fluid supply part 20 are operated in reverse order. That is, when the suction operation of the first pumping unit 16 is performed, the second pumping unit 26 is discharged, and when the discharge operation of the first pumping unit 16 is performed, the second pumping unit 26 is suctioned. This is done. Accordingly, the first fluid and the second fluid are supplied to the fluid mixing line 30 alternately.

In addition, as shown in FIG. 1, the first fluid supply unit 10 and the second fluid supply unit 20 respectively supply the first fluid and the second fluid while maintaining a predetermined angle in the direction of the fluid mixing line 30. Therefore, the first fluid and the second fluid are transferred in the state having the rotation momentum (momentum) in the fluid mixing line 30, the mixing efficiency is further improved.

The first fluid supply unit 10 and the second fluid supply unit 20 are generally provided on the same plane and the same plane may be provided in a horizontal direction, but the same plane may have a predetermined angle with a vertical direction or a horizontal direction. It may be provided in the state to hold. When there is a density difference between the first fluid and the second fluid If the first fluid supply unit 10 and the second fluid supply unit 20 supplies the fluid at different heights, the mixing efficiency may be further improved due to the difference in density of the fluid.

2 is an exploded perspective view showing a state in which a micro mixer according to a preferred embodiment of the present invention is implemented using MEMS technology.

The micro mixer 1 consists of a lower substrate 40 and an upper substrate 50.

In the lower substrate 40, supply lines 12 and 22, pumping lines 14 and 24, and a fluid mixing line 30 of the first fluid supply unit 10 and the second fluid supply unit 20 described above are formed. A first pumping chamber 42 and a second pumping chamber 44 for forming the first pumping unit 16 and the second pumping unit 26 are formed.

The upper substrate 50 includes a first inflow hole 60 and a second inflow hole 62 through which the first fluid and the second fluid are supplied to the first supply line 12 and the second supply line 22, respectively. And a mixed fluid discharge hole 64 through which the mixed fluid is discharged through the fluid mixing line 30. In addition, the upper substrate 50 includes a first element accommodating part in which the first pumping element 56 and the second pumping element 58 for constituting the first pumping part 16 and the second pumping part 26 are mounted. 52 and the second element accommodating portion 54 are recessed. Here, the first pumping element 56 and the second pumping element 58 may be piezoelectric elements, and lower surfaces of the first element accommodating part 52 and the second element accommodating part 54 have a thin film form. .

The lower substrate 40 and the upper substrate 50 may be formed using a mechanical processing method, but may also be manufactured as a micro system using a semiconductor device process. As the material of the lower substrate 40 and the upper substrate 50, glass, Pyrex Glass, quartz, silicon, polymer, or the like may be used. The first and second supply lines 12 and 22, the first and second pumping lines 14 and 24, and the fluid mixing line through the photo and etching processes on the plate surfaces of the lower substrate 40 and the upper substrate 50, respectively. 30), the first and second pumping chambers 42 and 44, the first and second element accommodating parts 52 and 54, etc., and the etching process includes a dry etching method such as RIE (Reacitive Ion Etching) or plasma etching. It may be used or wet etching may be used.

The mutual bonding between the lower substrate 40 and the upper substrate 50 may be made using an adhesive member including a UV curing agent, an epoxy, a low temperature polymer adhesive, or the like, or may be formed using a hydrogen bond.

Referring to the operation of the micromixer according to the preferred embodiment of the present invention described above are as follows.

3 is a view for explaining a driving method of the micromixer according to the preferred embodiment of the present invention.

3A illustrates a state in which the first pumping unit 16 discharges the fluid and the second pumping unit 26 inhales the fluid, and (b) the first pumping unit 16 draws the fluid. The suction and the second pumping unit 26 show a state of discharging the fluid.

That is, in the micromixer according to the preferred embodiment of the present invention, the first pumping part 16 and the second pumping part 26 have a process of sucking and discharging the fluid in reverse, so that the first fluid in the fluid mixing line 30 is reversed. And the second fluid intersect with each other to facilitate mixing thereof.

In addition, in the above description, it is assumed that two fluids are mixed, and two fluid supply parts are provided. However, it is also possible to mix three or more fluids. When three or more fluids are supplied, the fluid supply unit may be provided accordingly, and the operation of the pumping unit may be controlled so that each fluid may be sequentially supplied.

Meanwhile, in the above description, the first fluid and the second fluid have been described to be supplied through separate supply lines, but in some cases, the first fluid and the second fluid may be supplied through one supply line. That is, after the first fluid and the second fluid are supplied in a completely unmixed state, the first fluid and the second fluid are supplied to the mixed state through the micromixer.

4 is a diagram showing the configuration of a micro mixer according to another embodiment of the present invention.

In the micromixer according to FIG. 4, the first fluid and the second fluid are supplied together through the common supply line 70, and the first pumping line 14 and the second pumping line 24 are provided at both sides of the common supply line 70. It is provided in a coupled state.

In this case, the first pumping part 16 of the first pumping line 14 and the first pumping line 24 of the first and second pumping lines 14 are supplied together through a common supply line but are not sufficiently mixed. The first fluid and the second fluid are sufficiently mixed while passing through the fluid mixing line 30 by the cross pumping of the pumping part 16.

Even though the first fluid and the second fluid are fed together through a common supply line, they may be slightly mixed by diffusion at the interface, but each forms a different stream line. In this way, the fluid supplied through the common supply line forms a pulsating flow in the fluid mixing line 30 by cross-pumping the first pumping part 16 and the second pumping part 26 to be mixed with each other. Efficiency is maximized.

The above description is merely illustrative of the technical idea of the present invention, and various modifications, changes, and substitutions may be made by those skilled in the art without departing from the essential characteristics of the present invention. will be. Accordingly, the embodiments disclosed in the present invention and the accompanying drawings are not intended to limit the technical spirit of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by the embodiments and the accompanying drawings. . The protection scope of the present invention should be interpreted by the following claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.

1 is a view showing the configuration of a micro mixer according to a preferred embodiment of the present invention,

2 is an exploded perspective view showing a state in which a micro mixer according to a preferred embodiment of the present invention is implemented using MEMS technology;

3 is a view for explaining a driving method of the micromixer according to the preferred embodiment of the present invention;

4 is a diagram showing the configuration of a micro mixer according to another embodiment of the present invention.

<Description of reference numerals for the main parts of the drawings>

10: first fluid supply part 12: first supply line

14: the first pumping line 16: the first pumping unit

18: first joining portion 19: first backflow prevention jaw

20: second fluid supply portion 22: second supply line

24: second pumping line 26: second pumping unit

28: second joining portion 29: second backflow prevention jaw

30: fluid mixing line 40: lower substrate

50: upper substrate 52: first element accommodating portion

54: second element accommodating part 56: first pumping element

58: second pumping element 60: first inlet hole

62: second inlet hole 64: mixed fluid outlet hole

70: common supply line

Claims (7)

A first supply line 12 to which a first fluid is supplied, a first pumping line 14 which forms an acute angle θ with the first supply line 12, and is connected to the first supply line 12; The first fluid supply part 10 includes a first pumping part 16 provided upstream of the first pumping line 14 to suck and discharge the first fluid through the first pumping line 14. ; A second supply line 22 to which a second fluid is supplied, a second pumping line 24 which forms an acute angle θ with the second supply line 22, and is connected to the second supply line 22; The second fluid supply part 20 includes a second pumping part 26 provided upstream of the second pumping line 24 to suck and discharge the second fluid through the second pumping line 24. ; And And a fluid mixing line 30 through which the first fluid and the second fluid pumped from the first fluid supply unit 10 and the second fluid supply unit 20 are mixed and transported. On the downstream side of the first supply line 12, the first pumping part 16 reduces the backflow of the fluid in the direction of the fluid mixing line 30 when the first pumping part 16 sucks the first fluid. And a second counter flow downstream of the second supply line 22 to reduce the back flow of the fluid in the direction of the fluid mixing line 30 when the second pumping part 26 inhales the second fluid. Bump 29 is provided, A micromixer, characterized in that the suction and discharge operations of the first pumping part (16) and the second pumping part (26) are made to cross each other. delete The method of claim 1, The first mixer (16) and the second pumping unit (26), characterized in that the reciprocating diaphragm micro pump. delete The method according to claim 1 or 3, First pumping chamber for the configuration of the first, second supply line (12, 22), the first, second pumping line (14, 24) and the fluid mixing line 30, the first pumping unit (16) 42, a second pumping chamber 44 for forming the second pumping part 26 is formed on the lower substrate 40, A first inlet hole 60 for supplying the first fluid to the first supply line 12, a second inlet hole 62 for supplying the second fluid to the second supply line 22, and The first element accommodating part 52 in which the mixed fluid discharge hole 64 through which the fluid is discharged from the fluid mixing line 30, and the first pumping element 56 constituting the first pumping part 16 are seated. ) And a second element accommodating part 54 on which the second pumping element 58 for constituting the second pumping part 26 is mounted is formed on the upper substrate 50. The lower substrate (40) and the upper substrate (50) is characterized in that the bonding to each other. delete delete

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