KR101006547B1 - Method for fabricating nano-structure form - Google Patents

Abstract

The present invention relates to a technique for producing a nano hair structure having a constant slope through the irradiation of energy, to manufacture a vertical nanostructure using an electron beam lithography method or carbon nanotubes or to use a tilted exposure process of the microstructure Unlike the conventional method of manufacturing a dry adhesive, a vertical polymer nano hair structure is formed on a substrate using a master mold having a hole pattern, and energy is applied at a predetermined angle with respect to the polymer nano hair structure to have a constant slope. By transforming it into an inclined nano hair structure, it enables uniform contact regardless of the surface roughness of the object to be bonded, and at the same time, it can realize strong adhesive force according to intermolecular attraction, and can be repeatedly used without damaging the nano hair structure. Produce Dry Glue That would be.

In addition, the present invention by modifying the irradiation angle in applying the energy to the nano-hair structure, can be manufactured in the shape of a hook, which can be used as a removable adhesive such as Velcro.

Description

Method of manufacturing nanostructures {METHOD FOR FABRICATING NANO-STRUCTURE FORM}

The present invention relates to a technique for manufacturing a nanostructure, and more particularly to a nanostructure manufacturing method suitable for producing a nano hair structure having a constant slope (tilt) through energy irradiation.

When classifying general adhesives into several types, they can be divided mainly by the way the adhesive is applied and hardened in the liquid state.

First, the most commonly encountered glue or woodworking adhesives, multipurpose adhesives (collectively, "pig bonds"), phenolic adhesives, or solvent evaporative adhesives where solvents evaporate. In other words, a sticky solution or emulsion is an adhesive that dries and hardens.

Secondly, pressure sensitive adhesives, which are rare for adhesives, are often applied to cellophane tape. These adhesives are in such a way that the surface is kept sticky like mucus and the adhesive state is maintained according to its viscosity. There is also a heat-sensitive adhesive that melts after heat and hardens, such as a glue gun.

Third, there are chemically reactive adhesives that differ in state before and after use.

However, all of the conventional adhesives mentioned above have the disadvantage that easy detachment and detachment are not possible, and also have the disadvantage of contaminating another surface (the surface of the object to which the adhesive is adhered) after detachment.

Therefore, although an adhesive for easy desorption may be considered, such an adhesive has a problem in that its applicability is significantly lowered because its adhesive ability is also lowered in proportion to easy desorption.

Research into the tilted nanostructures inspired by gecko lizards can be used as dry glue for the same reason as described above is being conducted around the world.

That is, in 2003, researchers at the University of Manchester, UK produced vertical nano cilia of polyimide with a diameter of 500 nm and a height of 2 μm by e-beam lithography. California researchers reported using carbon nanotubes (CNTs) to obtain high aspect ratio structures of 4 µm in height and 20 nm in diameter, which showed 11 N / cm 2 adhesion.

In addition, researchers at Carnegie Mellon University in the United States announced that in 2007, the exposure process was inclined at an angle to obtain an inclined structure having a height of 100 µm and a diameter of 25 µm.

However, in the case of the conventional dry adhesive, except for the CNT is made of micro-sized cilia, the adhesive ability is remarkably inferior, and another problem that it is difficult to repeatedly use due to the entanglement between the structures There is this.

In addition, the conventional adhesive made of CNTs has a fundamental disadvantage that large-area synthesis is impossible.

According to an aspect of the present invention, a method of manufacturing a nanostructure includes forming a nano hair structure on a substrate, and applying the energy at a predetermined angle to the nano hair structure to transform it into an inclined nano hair structure. To provide.

According to another aspect of the present invention, a process of forming a plurality of lower pattern structures on a substrate by performing a patterning process, forming a nano hair structure of a polymer on each of the plurality of lower pattern structures, and the nano The present invention provides a method of manufacturing a nanostructure, including a process of transforming the hair structure into an inclined nano hair structure by applying energy at a predetermined angle.

The present invention provides a dry adhesive by applying energy to the nano-hair structure made of a polymer so that the nano-hair structure is inclined in a constant direction of the irradiation of energy, thereby making uniform contact regardless of the surface roughness of the object to be bonded, At the same time, strong adhesion can be realized depending on the intermolecular attraction.

In addition, the present invention by tilting the nano-hair structure that functions as an adhesive surface of the dry adhesive, by applying a force in the opposite direction of the inclined structure, it is possible to detach the surface of the adhesive object even with a relatively weak force without contamination Dry adhesives can be realized, thereby providing a dry adhesive that can be used repeatedly without damaging the nano-hair structure.

The technical aspect of the present invention is different from the conventional method of manufacturing a vertical nanostructure using an electron beam lithography method or carbon nanotube or a dry adhesive of a microstructure using a tilted exposure process, and having a hole pattern. A master mold is used to form a vertical polymeric nano hair structure on a substrate, which is transformed into an inclined nano hair structure having a constant (or uniform) slope (tilting) by applying energy at a constant angle to the polymeric nano hair structure. By this means, the present invention can effectively improve the problems in the prior art through such technical means.

Here, the polymer nano hair structure may be formed through a solution process, a vacuum deposition process, a capillary force patterning process, and the like, and as energy, for example, beam energy, light energy, heat energy, or the like may be used. In the case of beam energy, for example, electron beams (excimer lasers, extreme ultraviolet rays, X-rays, etc.), ion beams, etc. may be used, and in the case of light energy, for example, infrared (IR) rays, ultraviolet rays (UV), visible light, and the like may be used, and in the case of thermal energy, for example, thermal energy through convection, thermal energy through conduction, infrared energy through an infrared (IR) lamp, and the like may be used.

In addition, the present invention can form a nano hair structure on the substrate using a nano imprint process, a capillary force patterning process, a transfer process, etc. without using a master mold, in this way inclined nano-pattern in a high step pattern Dry adhesives having a hair structure can be produced.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

Example 1

1A to 1D are process flowcharts illustrating a process of manufacturing a nanostructure that can be used as a dry adhesive according to a first embodiment of the present invention.

Referring to FIG. 1A, a master mold 102 having a hole pattern 104, such as a SAM treated master mold, is prepared, wherein the hole pattern 104 of the master mold 102 is photolithography well known in the art. It can form through a process. Here, the master mold may be replaced with, for example, an anodic aluminum oxide (AAO) substrate, a copolymer polymer, or the like.

Subsequently, a surface treatment may optionally be performed so that the substrate having the inclined nano hair structure to be formed on the master mold can be easily removed from the master mold through a subsequent process, such surface treatment being performed, for example, of the master mold. In order to lower the surface energy, the surface may be treated by self-assembled monomolecular treatment containing fluorine or hydrocarbon functional groups or by Teflon treatment.

Here, the master mold 102 may be made of a relatively hard material or a relatively flexible material, when the substrate having the inclined nano hair structure to be formed on the master mold through a subsequent process is a relatively flexible material The master mold may be made of a relatively hard material, and when the substrate having the inclined nano hair structure is a relatively hard material, the master mold may be made of a relatively flexible material. That is, in the present invention, one of the master mold and the substrate is made of a relatively flexible material, thereby inducing easy detachment from each other.

Next, as an example, as shown in FIG. 1B, the polymer 106 is formed on the master mold 102 on which the hole pattern 104 is formed (that is, in a form in which the polymer fills the inside of the hole pattern 104). These polymers include, for example, soft PUA (poly urethane acrylate), hard PUA, amorphosphrone (AF teflon), perfluoropolyethers (PFPE), polystyrene (PS: polystylene). All organic substances containing polymers, such as), can be used. Here, the formation of the polymer can be realized using a solution process (solvent + polymer), or through a vacuum deposition process or a capillary patterning process (solid state polymer).

In the solution process, a pressurization process or a spin coating process is used. In the pressurization process, a solution of a solvent and a polymer is formed on a master mold, and a predetermined pressure condition (for example, 1 bar) using a pressure member such as a roller is used. To 2 bar or the like) to embed the solution in the hole pattern, and remove the solvent contained in the solution, it can be realized by removing the substrate on which the nano-hair structure is formed from the master mold. Here, the removal of the solvent can be realized through a UV exposure process or an annealing process.

In addition, in the spin coating process, for example, dip coating, dry casting, and the like are embedded to embed a solution of a solvent and a polymer in the hole pattern formed in the master mold, and the solvent contained in the solution. After the removal, the substrate may be realized by removing the substrate on which the nano-hair structure is formed from the master mold, and solvent removal may also be realized through a UV exposure process or an annealing process.

Subsequently, when the substrate is removed from the master mold 102, as shown in FIG. 1C, the substrate 108 having the vertical nano hair structure 110a formed thereon is completed.

Next, a surface modified material of a thin film is formed on the nano hair structure 110a. The reason for forming the surface modified material is that electrons are diffused when the electron beam is irradiated to the nano hair structure in a subsequent process. Not only does this make it smooth, but it also prevents the charge of electrons when measuring in SEM. In addition, the surface modification material serves to prevent the collapsing of the nano hairs and to enable the repeated use of the substrate.

Herein, a metal material or an organic material may be used as the surface modifying material. For the metal material, for example, platinum, iron, aluminum, copper, nickel, titanium, silver, molybdenum, cobalt, tungsten, or gold may be used. In the case of, for example, silane-based and thiol-based self-assembled molecules, modulus (modulus) may be a relatively large polymer (PS, PMMA, Teflon) and low molecules (Pentacene), a relatively strong adhesive strength.

Subsequently, when energy is applied toward the nano-hair structure 110a at a predetermined angle, the polymer is subjected to stress due to shrinkage of the polymer. As a result, as shown in FIG. 1D, the nano-hair structure is applied with energy. It is deformed into the inclined nano hair structure 110 by inclining in a constant direction.

Here, as the energy applied to the nano-hair structure, for example, beam energy, light energy, heat energy and the like can be used. In the case of beam energy, for example, an electron beam (excimer laser, extreme ultraviolet light, X Rays, ion beams, etc. may be used, and in the case of light energy, for example, infrared (IR), ultraviolet (UV), visible light, etc. may be used, and in the case of thermal energy, for example, heat through convection Energy, thermal energy through conduction, infrared energy through infrared (IR) lamps, and the like can be used. In this case, the inclination angle (tilt degree) of the inclined nano hair structure 110 is determined by the acceleration voltage and the irradiation time of the energy or by the irradiation angle of the energy.

The slanted nano-hair structures of the polymer inclined in one direction manufactured according to this embodiment have a lower modulus because they are easier to deform than the vertical structures when pressure is applied, resulting in a roughness of the surface. It is possible to realize uniform contact irrespective of each other and to have a strong adhesive effect due to intermolecular attraction between them. That is, the adhesive surface made of the inclined nano hair structure can realize a strong adhesion not only on the smooth surface but also on the rough surface, and thus can be utilized as a dry adhesive in various applications and various environments.

Furthermore, applying force in the opposite direction of the inclined nano hair structure allows easy detachment without contamination of the surface (surface of the adhesive object) even with relatively weak force, thus allowing repeated use without damaging the nano hair structure. It is possible to maintain a clean surface by the superhydrophobic effect of the hair structure.

Meanwhile, in the present embodiment, the nano hair structure is irradiated with energy to be transformed into an inclined nano hair structure having an arbitrary inclination angle. However, in contrast, the tip of the nano hair structure is hooked with a relatively large irradiation angle. Of course, it can be manufactured in a hook) shape.

That is, as an example, as shown in Figure 2a, by irradiating energy to the nano-hair structure formed on the substrate, for example, at an irradiation angle, such as 80 degrees, as shown in Figure 2b, the tip portion of each nano-hair structure Can be produced in a hook shape.

The hook-shaped nano hair structure (or nano velcro structure) can be applied to a detachable adhesive such as velcro (removable free band, also known as "sticky"), which is widely used in shoes, clothes, bags, and the like. .

[Example 2]

3A to 3C are flowcharts illustrating a process of manufacturing a nanostructure that can be used as a dry adhesive according to a second embodiment of the present invention.

Referring to FIG. 3A, a plurality of lower pattern structures 304 having a desired pattern on a substrate 302 may be subjected to patterning processes, such as the exposure process, the imprint process, the capillary patterning process, and the like, which are well known in the art. To form. At this time, the lower pattern structure 304 is preferably maintained in a state having some fluidity through a solvent or partial curing.

Next, by performing a patterning process such as a nano imprint process, a capillary force patterning process, a transfer process, and the like on the substrate 302 on which the lower pattern structure 304 is formed, as shown in FIG. A polymer nano hair structure 306a of a polymer having a relatively small width is formed on the pattern structure 304.

Again, when energy is applied toward the nano-hair structure 306a at a predetermined angle, the polymer is subjected to stress due to shrinkage of the polymer. As a result, as shown in FIG. 3C, the vertical nano-hair structure ( 306a is deformed into the inclined nano hair structure 306 by being inclined constantly in the direction of the energy irradiation.

In this case, as the energy applied to the nano-hair structure, for example, beam energy, light energy, heat energy and the like can be used. In the case of beam energy, for example, an electron beam (excimer laser, extreme ultraviolet light, X- Rays, ion beams, etc. may be used, and in the case of light energy, for example, infrared (IR), ultraviolet (UV), visible light, etc. may be used, and in the case of thermal energy, for example, thermal energy through convection, Thermal energy through conduction, infrared energy through infrared (IR) lamps, and the like may be used. Here, the inclination angle (tilt degree) of the inclined nano hair structure 306 is determined by the acceleration voltage and irradiation time of energy or the irradiation angle of energy.

Therefore, the inclined nano-hair structure of the two-step pattern manufactured according to the present embodiment can not only realize the same effect realized in the inclined nano-hair structure manufactured according to the above-described embodiment 1, but also have a step Because the pattern is implemented, another effect can be obtained to further expand the application range according to the need or use.

On the other hand, in the present embodiment has been described as manufacturing the inclined nano-hair structure in a two-step pattern, the present invention is not necessarily limited to this, by repeating the patterning process if necessary, to a high step pattern of two or more steps Of course, it can be manufactured.

On the other hand, in the present embodiment was described as to transform the nano-hair structure into an inclined nano-hair structure having an arbitrary inclination angle by applying energy, but in the same manner as in Example 1, the irradiation angle is relatively large Needless to say, the tip portion of the nano-hair structure can be manufactured in a hook shape.

That is, as an example, as shown in FIG. 4A, by irradiating energy onto the nano-hair structure on each lower pattern structure, for example, at an irradiation angle such as 80 degrees, each nano-hair structure as shown in FIG. 4B. The tip portion of can be manufactured in the shape of a hook.

Such a hook-shaped nano hair structure (or nano velcro structure) can be applied to a detachable adhesive such as Velcro, which is widely used in shoes, clothes, bags, and the like (removable free band, also known as "sticky").

Experimental Example

The inventors of the present invention conducted an experiment for producing a slanted nanostructure that can be used as a dry adhesive using a master mold, and the results of the experiment will be described below.

5A to 5D are perspective views showing results of experiments in which a dry adhesive having a nanostructure shape was manufactured using a PUA pattern according to the present invention.

5A and 5B, a master mold 502 having a hole pattern 504 is prepared, and the hole pattern 504 is completely filled with a PUA 506 capable of UV curing on the master mold 502. Formed in the form.

Then, by removing the PUA 506 from the master mold 502, as shown in Figure 5c, to complete the PUA substrate 508 is formed a vertical nano hair structure 510a, sputtering process using a sputter And deposited platinum (Pt) to approximately 4 nm thick on the nano hair structure.

Again, when the electron beam (energy) was irradiated at an angle inclined to about 30 degrees, as shown in Figure 3d, the nano hair structures are constantly inclined in the direction of the irradiation of the electron beam to be deformed to the inclined nano hair structure.

Here, platinum, which functions as a surface modifying material, not only facilitates electron diffusion when irradiating an electron beam, but also prevents charge of electrons when measured in SEM, and also prevents This prevents collapse and allows for repeated use of the substrate.

Figure 6a is a cross-sectional SEM picture of the master mold used in this experiment, Figure 6b is a SEM picture of the nano hair structure arranged vertically, Figure 6c is a SEM picture of the inclined nano hair structure tilted by electron beam irradiation, FIG. 6D is a SEM photograph showing the difference when the electron beam is partially irradiated, and FIG. 6E is a SEM photograph of the inclined nano hair structure array formed in a large area of 3 cm × 7 cm.

Therefore, the present inventors clearly showed that through this experiment, an inclined nano hair structure which can be used as a dry adhesive through electron beam irradiation can be produced.

In addition, the present inventors conducted an experiment to verify how the inclination angle of the nano-hair structure is changed according to the acceleration voltage and the irradiation time of the irradiated electron beam, and the experimental results are shown in FIG. 7.

7A is a SEM photograph of an experimental result obtained by irradiating an electron beam for 15 seconds with an acceleration voltage of 15 kV, and FIG. 7B is an SEM photograph of an experimental result obtained by irradiating an electron beam for 3 seconds with an acceleration voltage of 15 mA, and FIG. SEM image of the experimental results of the irradiation of the electron beam for 5 seconds, Figure 7d is a SEM image of the experimental results of the irradiation of the electron beam for 7 seconds with an acceleration voltage of 15 kHz, respectively, the longer the irradiation time of the electron beam is the tilt of the nano-hair structure Obviously, it grew gradually.

8 is a graph showing the results of experiments with different acceleration voltages and irradiation times of the electron beam. As the acceleration voltages (5 kV, 10 kV, 15 kV) are increased, the degree of inclination of the nano-hair structure is increased, and the irradiation time is increased. It can be clearly seen that the larger the increase of the degree of tilt of the nano hair structure. In Figure 8, "Template collapsed" is a phenomenon that appears when the nano hair structure is tilted to "60 degrees or less", the bottom portion of the nano hair structure also shows a shrinkage phenomenon, the nano hair structure is no longer tilted. And it was found.

Next, an experiment was conducted to measure the adhesion of the nano-hair structure with a silicon AFM cantilever on the slanted nano-hair structure, i.e., the inclined 80 degree angle and 70 degrees for the soft PUA, hard PUA, amorphous (AF) Teflon 2400 respectively. Adhesion was measured at an angle, and the measurement results are shown in the table below.

[table]

Soft PUA Hard PUA AF 2400 Vertical (90 degrees) 23 nN 22 nN 7 nN 80 degrees 26 nN 24 nN 13 nN 70 degrees 39 nN 31 nN 16 nN

That is, as can be seen from the above table, when the polymer nano hair structure is inclined at 70 degrees compared to the adhesive force in the vertical form, depending on the material, approximately 70% (soft PUA), 41% (hard PUA), 129 It can be clearly seen that the adhesion increases with% (AF Teflon).

A graph of these experimental results is shown in FIG. 9, FIG. 9A is an ideal adhesion graph, FIG. 9B is an adhesion graph according to an inclined angle measured using a soft PUA, and FIG. 9C is measured using a hard PUA. Adhesion graphs according to tilted angles, FIG. 9D shows graphs of adhesion according to tilted angles measured using AF 2400 Teflon, respectively.

In addition, the present inventors carried out the friction force measurement experiment on the inclined nano-hair structure, the experimental results are as shown in FIG.

That is, Figure 10a is a friction force graph according to the structure and the pulling direction, Figure 10b is a graph of the ideal value of the modulus according to the inclination angle and the material, Figure 10c is a 100 times repeated dry adhesive with a slanted nano hair structure The graph of adhesion force distribution by detachment is shown, respectively.

Referring to FIG. 10A, the dry adhesive of the inclined nano hair structure used in the present experiment has an adhesive force of 10.5 N / cm 2, which is larger than 10 N / cm 2 of the gecko lizard's adhesive ability, on the other hand, and also the opposite of the inclination. It turns out that it has an adhesive force of 2 N / cm <2> in a direction. That is, it can be seen that it can be easily attached with strong adhesive force in the inclined direction, and induces easy detachment in the opposite direction.

Referring again to FIG. 10B, it can be clearly seen that the change in modulus occurs according to the angle at which the nano-hair structure is inclined to have a stronger adhesive force.

In addition, referring to Figure 10c, since the deposition of 4 nm of platinum as a surface-modifying material on the nano-hair structure reduces the adhesion of the polymers to each other to maintain a uniform adhesion of approximately 10.5 N / ㎠ even if repeatedly detached 100 times I could see clearly.

FIG. 11A illustrates an example in which the inclined nano hair structure can be used as a dry adhesive, and a 38 cm x 46 cm ITO deposited glass is held in a 1.0 cm x 0.7 cm film made of the inclined nano hair. It is a photograph photographed, and FIG. 11B is a photograph photographing the state which supports a 1 kg dumbbell with the 1.0 cm x 1.0 cm film made from the inclined nano hair. As a result of the experiment, it can be clearly seen that the inclined nano hair structure has excellent adhesion.

In the above description has been described by presenting a preferred embodiment of the present invention, but the present invention is not necessarily limited to this, and those skilled in the art to which the present invention pertains within a range without departing from the technical spirit of the present invention It will be readily appreciated that branch substitutions, modifications and variations are possible.

1A to 1D are process flowcharts illustrating a process of manufacturing a nanostructure that can be used as a dry adhesive according to a first embodiment of the present invention;

2a and 2b is a process flow diagram showing the main process of manufacturing a nano velcro structure according to a modified embodiment of the first embodiment of the present invention,

3A to 3C are process flowcharts illustrating a process of manufacturing a nanostructure that can be used as a dry adhesive according to a second embodiment of the present invention;

Figures 4a and 4b is a process flow diagram showing the main process of manufacturing a nano Velcro structure according to a modified embodiment of the second embodiment of the present invention,

5a to 5d is a perspective view of the results showing the experimental results of manufacturing a dry adhesive of the nanostructure shape using the PUA pattern according to the present invention,

Figure 6a is a cross-sectional SEM picture of the master mold used in the experiment of the present invention, Figure 6b is a SEM picture of the nano hair structure arranged vertically, Figure 6c is a SEM picture of the inclined nano hair structure tilted by electron beam irradiation 6D is a SEM photograph showing the difference when partially irradiated with an electron beam, and FIG. 6E is a SEM photograph of an inclined nano hair structure array formed with a large area of 3 cm × 7 cm,

7A is a SEM photograph of the experimental result of irradiation of the electron beam for 0 seconds, FIG. 7B is a SEM photograph of the experimental result of irradiation of the electron beam for 3 seconds, FIG. 7C is a SEM photograph of the experimental result of irradiation of the electron beam for 5 seconds, and FIG. 7D is of an electron beam. SEM image of the experimental results irradiated for 7 seconds,

8 is a graph showing the results of experiments performed by varying the acceleration voltage and the irradiation time of the electron beam,

FIG. 9A is an ideal adhesion graph, FIG. 9B is an adhesion graph according to an inclined angle measured using a soft PUA, FIG. 9C is an adhesion graph according to an inclined angle measured using a hard PUA, and FIG. 9D is an AF Graph of adhesion versus tilted angle measured using 2400 teflon,

Figure 10a is a graph of the friction force according to the structure and the pulling direction, Figure 10b is a graph of the ideal value of the modulus according to the inclination angle and material, Figure 10c is a detachable repeated 100 times the dry adhesive with a slanted nano hair structure. Adhesion force distribution graph,

FIG. 11A is a photograph of a 38cm × 46cm ITO deposited glass holding a 1.0cm × 0.7cm film made of an inclined nanohair. FIG. 11B is a 1.0cm × made of an inclined nanohair. Photograph which captured 1 kg of dumbbell with 1.0cm of film.

Description of the Related Art

102: master mold 104: hole pattern

106: polymer 108, 302: substrate

110a, 306a: Nano Hair Structures 110, 306: Inclined Nano Hair Structures

304: lower pattern structure

Claims (42)

Forming a nano hair structure on the substrate, A process of transforming the nano hair structure into an inclined nano hair structure by applying energy at a predetermined angle. Nanostructure manufacturing method comprising a. The method of claim 1, The slanted nano-hair structure is a nanostructure manufacturing method, characterized in that used as the adhesive surface of the dry adhesive. The method of claim 2, The inclined nano-hair structure is a nanostructure manufacturing method, characterized in that the structure having a slope in the direction of applying the energy. The method of claim 1, The nano hair structure is a nano-structure manufacturing method, characterized in that formed using a solution process. The method of claim 4, wherein The solution process, Forming a solution of a solvent and a polymer on a master mold having a hole pattern, Embedding the solution in the hole pattern by performing a pressing process; Removing the solvent contained in the solution, Removing the substrate on which the nano-hair structure is formed from the master mold Nanostructures manufacturing method comprising a. The method of claim 5, The method, Process of self-assembled monomolecular treatment including fluorine or hydrocarbon functional groups on the surface of the master mold before the solution is formed Nanostructure manufacturing method characterized in that it further comprises. The method of claim 5, The method, Process of performing Teflon treatment on the surface of the master mold before the formation of the solution Nanostructure manufacturing method characterized in that it further comprises. The method of claim 5, The polymer is a method of manufacturing a nanostructure, characterized in that the organic material containing any one of a soft PUA, hard PUA, amorphosphrone, perfluoropolymer (PFPE), polystyrene (PS). The method of claim 5, The solvent removal, nanostructure manufacturing method characterized in that it is carried out through a UV process or an annealing process. The method of claim 4, wherein The solution process, Performing a spin coating process to bury a solvent and a polymer solution in the hole pattern formed on the master mold; Removing the solvent contained in the solution, Removing the substrate on which the nano-hair structure is formed from the master mold Nanostructures manufacturing method comprising a. The method of claim 10, The method, Process of self-assembled monomolecular treatment including fluorine or hydrocarbon functional groups on the surface of the master mold before the solution is formed Nanostructure manufacturing method characterized in that it further comprises. The method of claim 10, The method, Process of performing Teflon treatment on the surface of the master mold before the formation of the solution Nanostructure manufacturing method characterized in that it further comprises. The method of claim 10, The polymer is a nanostructure manufacturing method, characterized in that the polymer is soft PUA, hard PUA, amorphousphron, perfluoropolyiser (PFPE), an organic material containing any one of polystyrene (PS). The method of claim 10, The spin coating is a nanostructure manufacturing method characterized in that the dip coating or dry casting. The method of claim 10, The solvent removal, nanostructure manufacturing method characterized in that it is carried out through a UV process or an annealing process. The method of claim 1, The nano hair structure is a nanostructure manufacturing method, characterized in that formed using a vacuum deposition process or capillary force patterning process. The method of claim 1, The method, Forming a surface modification material of a thin film on the nano-hair structure before the electron beam is irradiated Nanostructure manufacturing method characterized in that it further comprises. The method of claim 17, The surface modification material is a nanostructure manufacturing method, characterized in that the metal material. The method of claim 18, The metal material is platinum, iron, aluminum, copper, nickel, titanium, silver, molybdenum, cobalt, tungsten, gold nano-structure manufacturing method characterized in that any one of. The method of claim 17, The surface modification material is a nanostructure manufacturing method, characterized in that the organic material. The method of claim 20, The organic material is a nanostructure manufacturing method, characterized in that any one of a silane-based and thiol-based self-assembled molecule, a polymer with a relatively high modulus (modulus), a polymer having a relatively strong adhesion. The method of claim 1, The energy is a nanostructure manufacturing method, characterized in that any one of beam energy, light energy, heat energy. The method of claim 22, The beam energy is a nano-structure manufacturing method, characterized in that the electron beam energy or ion beam energy. The method of claim 23, The electron beam energy is a nanostructure manufacturing method, characterized in that any one of excimer laser, extreme ultraviolet light, X-rays. The method of claim 22, The light energy is a nanostructure manufacturing method, characterized in that any one of infrared rays, ultraviolet rays, visible light. The method of claim 22, The thermal energy is a nanostructure manufacturing method, characterized in that any one of thermal energy through convection, thermal energy through conduction, infrared energy through the infrared (IR) lamp. The method of claim 1, The inclination angle of the inclined nano-hair structure is a nanostructure manufacturing method characterized in that determined by the acceleration voltage and the irradiation time of the energy. The method of claim 1, The inclination angle of the inclined nano-hair structure is a nanostructure manufacturing method, characterized in that determined by the irradiation angle of the energy. 29. The method of claim 28, The slanted nano-hair structure is a nano-velcro structure, characterized in that the front end portion is a nano Velcro structure having a hook shape. Forming a plurality of lower pattern structures on the substrate by performing a patterning process; Forming a nano hair structure of a polymer on each of the plurality of lower pattern structures; A process of transforming the nano hair structure into an inclined nano hair structure by applying energy at a predetermined angle. Nanostructure manufacturing method comprising a. 31. The method of claim 30, The slanted nano-hair structure is a nanostructure manufacturing method, characterized in that used as the adhesive surface of the dry adhesive. The method of claim 31, wherein The inclined nano-hair structure is a nanostructure manufacturing method, characterized in that the structure having a slope in the direction of applying the energy. 31. The method of claim 30, The plurality of lower pattern structures are formed using any one of an exposure process, an imprint process, a capillary force patterning process. 31. The method of claim 30, The nano hair structure is a nanostructure manufacturing method, characterized in that formed using any one of a nanoimprint process, capillary force patterning process, transfer process. The method according to any one of claims 30 to 34, wherein The energy is a nanostructure manufacturing method, characterized in that any one of beam energy, light energy, heat energy. 36. The method of claim 35, The beam energy is a nano-structure manufacturing method, characterized in that the electron beam energy or ion beam energy. 37. The method of claim 36, The electron beam energy is a nanostructure manufacturing method, characterized in that any one of excimer laser, extreme ultraviolet light, X-rays. 36. The method of claim 35, The light energy is a nanostructure manufacturing method, characterized in that any one of infrared rays, ultraviolet rays, visible light. 36. The method of claim 35, The thermal energy is a nanostructure manufacturing method, characterized in that any one of thermal energy through convection, thermal energy through conduction, infrared energy through the infrared (IR) lamp. The method according to any one of claims 30 to 34, wherein The inclination angle of the inclined nano-hair structure is a nanostructure manufacturing method characterized in that determined by the acceleration voltage and the irradiation time of the energy. The method according to any one of claims 30 to 34, wherein The inclination angle of the inclined nano-hair structure is a nanostructure manufacturing method, characterized in that determined by the irradiation angle of the energy. 42. The method of claim 41 wherein The slanted nano-hair structure is a nano-velcro structure, characterized in that the front end portion is a nano Velcro structure having a hook shape.

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