KR100975803B1 - An MTJ MRAM cell, an array of MTJ MRAM cells, and a method of forming an MTJ MRAM cell - Google Patents

Abstract

A magnetic tunnel junction magnetic random access memory cell (MTJ MRAM) cell is formed between ultra thin orthogonal word and bit lines of a highly conductive material of less than 100 nm in thickness. Lines of this thickness generate switching magnetic fields in the cell free layer that are enhanced by approximately two factors for a given current. The manufacture of a cell with such thin lines is actually simpler with thinner depositions, since this manufacturing process eliminates the need to remove material by CMP during patterning and polishing, thereby creating lines and cell free layers. Generate even intervals in the liver.

Word Line, Bit Line, Cell Free Layer, Patterning, Polishing

Description

An MTJ MRAM cell, an array of MTJ MRAM cells, and a method of forming an MTJ MRAM cell} MRTM MRAM cells, arrays of MTV MRMAM cells, and an MJMRAM cell

The present invention relates to document number HT03-044, filed and assigned to the same assignee as the present application.

FIELD OF THE INVENTION The present invention relates to the design and manufacture of magnetic tunnel junctions (MTJ) as memory storage devices, in particular word and bit lines being extremely thin resulting in higher magnetic flux in the MTJ free layer for a given write current. It is about designing to make.

 Magnetic tunnel junction (MTJ) essentially comprises two electrodes, which are layers of magnetized ferromagnetic material separated by a tunnel barrier layer. The tunnel barrier layer is thin enough to allow charge carriers (typically electrons) to cross the layer by quantum mechanical tunneling. However, the tunneling possibility is spin dependent because it depends on the utilization of tunneling states that accept electrons with different spin directions. Therefore, the total tunneling current depends on the number of spin-up versus spin-down electrons, and then on the direction of electron spin relative to the magnetization direction of the ferromagnetic layers. Thus, if the magnetization directions relative to a given applied voltage change, the tunneling current will also change. Depending on the action of this MTJ, sensing the change in tunneling current for a fixed voltage can determine the relative magnetization directions of the two ferromagnetic layers containing it.

To use MTJ as information storage devices, the magnetization of at least one of the ferromagnetic layers must be able to change with respect to the other layer and also require sensing of changes in tunneling current or equivalent junction resistance. In its simplest form as a two-state memory storage device, the MTJ only needs to organize the magnetizations in parallel (low resistance) or antiparallel (high resistance) when writing the data and the tunneling current when reading the data. It may be necessary to implement a change or resistance change.

Indeed, the free ferromagnetic layer of the MTJ can be modeled as having magnetization that is free to rotate but is actively aligned in both directions (the direction of magnetic crystal anisotropy) along the easy axis of magnetization. The magnetization of the fixed layer can be regarded as being permanently aligned in its magnetizing axis. When the free layer is misaligned with the fixed layer, this junction has its maximum resistance and when the free layer is aligned with the fixed layer, a minimum resistance is provided. In a typical MRAM circuit, MTJ devices are located at the intersection of orthogonal current carrying lines called word lines and bit lines. When two lines carry current, the device is written by changing the magnetization direction of its free layer. When only one line carries current, the resistance of the device is sensed, allowing the device to be read efficiently. Additional current carrying lines are provided for certain device configurations to sense the resistance of the device, but most simply the device acts as described above. This MTJ device is provided by Gallagher et al. (US Pat. No. 5,650,958), which rotates with respect to the magnetization of a pinned layer with a pinned ferromagnetic layer where the magnetization is in the plane of the layer but is not free to rotate. Disclosed is an MTJ device having a free magnetic layer that is freed.

In order for MTJ MRAM devices to be competitive in terms of other types of DRAM and power consumption and device density, MTJ typically needs to be made very small in sub-micron dimensions. Parkin et al. (US Pat. No. 6,166,948) form an MTJ MRAM cell in which the free layer consists of two antiparallel magnetized layers separated by a spacer layer selected to prevent exchange coupling between layers but allow direct dipole bonding. Initiate. Due to this, the free layer has closed plus loops, and the two layers switch their magnetizations simultaneously during the switching operations. Parkin noted that sub-micron dimensions need to be competitive with DRAM memories in the range of 10-100 Mbit capacities. Parkin also noted that these small sizes are associated with significant problems, especially superparamagnetisms, which are too small to have sufficient magnetic anisotropy (a measure of the properties of the sample to maintain the direction of the magnetization). Spontaneous thermal variation of magnetization in samples of material. To overcome undesirable spontaneous thermal fluctuations in MARM cells with very small cross-sectional areas, it is necessary to thicken the magnetic layers. Unfortunately, the size of the switching field required increases with the layer thickness, thereby paying the cost of thermally stabilizing the cell by consuming a large amount of current to change the magnetic orientation of the free layer of the cell.

Some anisotropy is required to allow the MTJ cell to maintain the magnetization direction so that data can be efficiently stored even when the write currents are zero. Because cell sizes are continually reduced, this technique inherently determines by providing some degree of magnetic anisotropy by forming cells of a wide variety of shapes (eg, rectangles, diamonds, ellipses, etc.). Lack of anisotropy is incompatible with shape anisotropy. However, this form of anisotropy has its own problems. Particularly cumbersome shape-related problems in MTJ devices result in uneven and uncontrollable edge-fields caused by shape anisotropy (characteristic of non-circular samples). As the cell size is reduced, these edge fields become relatively more important than the magnetization of the body of the cell and adversely affect data storage and reading. Such shape anisotropy reduces the adverse effects of superparamagnetism when large enough, but they have the side effect of requiring high currents to change the magnetization direction of the MTJ for storing data.

One way to deal with the problem of high currents required to change the magnetization direction of the free layer when shape anisotropy is high is to provide a mechanism to focus the fields generated by low current values. This method is done by Durlam et al. (US Pat. No. 6,211,090 B1), which discloses forming a flux concentrator, a layer of soft magnetic (NiFe) formed around a copper damascene current transport line. This layer is formed around the three sides of the copper line forming a digit line at the bottom side of the MRAM cell.

Two additional methods are provided by magnetic shielding to form a pinned layer of material in one embodiment that generates high percentages of spin deflected electrons in the current and in another embodiment to assist in generating field inversions in the cell element. Nakao (US Pat. No. 6,509,621 B2), which discloses the application of the generated offset magnetic field.

Another method is also performed by Sekiguchi et al. (US Pat. No. 6,611,455 B2), which discloses forming free layers with a magnetizing axis perpendicular to the layer plane and then forming word and bit lines in the same plane.

The present invention also addresses the problem of reducing the high current required to redirect the magnetization of the free layer in ultra-small MRAM cells, where the superparamagnetism requires thick free layers. Increasing the switching field in the free layer by two factors by forming significant thin word and / or bit lines, especially at less than 100 nm, compared to conventional thicknesses of approximately 300 nm. An additional advantage of these thin lines is that they facilitate their manufacture. The patterning process for these formations requires less material removal and eliminates the need for chemical mechanical polishing (CMP), which can result in uncontrollable changes in line thickness. Finally, these ultra thin lines can be easily formed in various forms with respect to their positions with respect to the MTJ cell. In the present invention, a cell is located between word and bit lines. In the following description, the general method of forming the lines will be described with an example of their arrangement for the cell.

It is a first object of the present invention to provide an MTJ MRAM cell that makes more efficient use of word and bit line switching currents, whereby these lines generate magnetic fields of sufficient intensity for switching while lowering currents.

It is a second object of the present invention to provide such a cell that simplifies the manufacturing process and a method of manufacturing the words and bits of the cell, in particular the uncontrolled changes associated with the process of chemical-mechanical polishing (CMP). To remove it.

It is a third object of the present invention to provide such cells and arrays of such cells.

These objects will be achieved by an MRAM cell design and fabrication method that forms word and / or bit lines from highly conductive materials with significant thinness of less than 100 nm. The conductive material may be a high conductive material such as Al, Cu, Au, Ru, Ta, CuAu, CuAg, NiCr, Rh and may be multilayers of these materials, such as multiple laminations of (NiCr / Cu).

In word and bit lines of the prior art, the aspect ratio (ratio of thickness t to width w) of word / bit lines is close to one. Applying simple physics (ampere's law) shows that the magnetic field (H _S ) at the surface of the prior art lines of thickness (t) and width (w), the carrying current (I), can be compared as: . H _S = πI / w.

For the proposed ultra-thin word / bit line design, where w >> t, the magnetic field follows the relationship: H _S = 2πI / w. Thus, the magnetic field is improved at the wire surface by two factors. Since the MRAM cell is located at a small distance from the line surface, the benefit will be somewhat reduced, but will still be significant, especially because the manufacturing method keeps the distance between the line and the cell uniformly small.

Figure 1a shows a vertical cross-sectional view of the MTJ MRAM of the present invention. The multi-layered cell element having a substantially circular horizontal cross section includes an ultra-thin write word line 10 and an x-axis extending in length along the z-axis of the illustrated axes (width in the x-direction and thickness in the y-direction). Width in the z-direction and thickness in the y-direction) and at the vertically separated intersection of the ultra-thin bit line 20 extending vertically below the word line. The write word line and the bit lines are separated by the insulating layer 15 and are also partially surrounded by the insulator. The write word and bit lines have thicknesses t _w and t _b , respectively, which are substantially smaller than their widths w _w and w _b (not shown) according to the purposes of the present invention, where t _w And t _b Both are less than approximately 100 nm and their widths are approximately 300-500 nm. Again it should be noted that the word and bit lines of the prior art are formed in comparable widths and thicknesses, both of which are approximately 300-500 nm. The description of the ultra thin write word or bit line fabrication process will be described in more detail below.

MTJ MRAM cell element 50, having a thickness of approximately 200-400 ohms strong and lateral dimensions of approximately 0.3-0.7 microns, is shown positioned between the intersection of word 20 and bit lines 10. This cell element comprises a seed layer 51, an antiferromagnetic pinning layer 52, a second (53) and a first (55) ferromagnetic layer separated by a bonding layer 54 formed on the bit line. It is a horizontal multilayer fabrication comprising a ferromagnetic pinned layer, a tunneling barrier layer 56, a free layer 57, which may be a laminated structure, and a capping layer 58 below the bit line. An additional conductive electrode called read word line 59 used for read operations is formed on the top surface of the cell. This word line is separated by an insulator 15 from the conductive electrode. The electrode can be removed and the word line can be in electrical contact with the upper cell surface. Details of the materials and dimensions used in the cell and manufacturing process will be described later within the description of the preferred embodiment.

The effect of the present invention is to provide an MTJ MRAM cell that makes more efficient use of word and bit line switching currents, such that these lines generate magnetic fields of sufficient intensity for switching while lowering currents, the word and bit lines being extremely It becomes thinner, producing higher magnetic flux in the MTJ free layer for a given write current.

A preferred embodiment of the present invention forms an MTJ MRAM cell at the intersection of ultra thin word and bit lines, in particular between these lines, so that smaller currents generate appropriate switching fields at the location of the cell free layer.

1A, a multi-layered MTJ cell element 50 formed between orthogonally oriented vertically separated ultra-thin word 10 and bit 20 lines is shown. The two lines extend in vertically separated horizontal planes that intersect with each other but are insulated from each other, thereby forming an intersection where the cell is located. In the following, the term “intersection” means that the lines are vertically separated by crossing the lines. The word line is oriented vertically in the plane of the drawing, and the bit line is in the plane of the drawing. An additional conductive electrode (alternatively indicated in the read word line) used for read operations 59 is formed on the top surface of the cell. During operation of the cell, the conductive electrode will typically be connected to an access transistor that is used to determine the logic state of the MRAM cell. This electrode is insulated and separated from the word line, but it is clear that this separation should be kept small enough to maintain the field strength of the word line in the free layer of the cell. The bit line 20 is a single layer of high conductive material such as Al, Cu, Au, Ru, Ta, CuAu, CuAg, NiCr, Rh formed in a thickness of about 100 nm or less and a width of about 300 to 5000 nm and (NiCr / Cu It can be multiple layers of these materials, such as multiple laminations of n). As described above, an additional conductive electrode 59, such as a read word line extending along the x-direction, is formed in contact with the top surface of the cell and used in conjunction with the bit line 20 for read operations. Connection line 60 runs from electrode 59 to a terminal of an access transistor (not shown), which is part of the circuit used to determine the logic state (ie, resistance) of the MRAM cell. In the particular configuration shown in FIG. 1A, a single MRAM cell is connected to a single transistor. The partial array of two such cells forms part of a particular MRAM array design, each example of which is shown in FIG. 1D, each formed between vertically separated intersecting word lines and bit lines and each having its own transistor. Is accessed.

Referring back to cell element 50, seed layer 51 is formed on bit line 20 and promotes high quality formation of the next formed layers of the cell. The seed layer may be a layer of NiCr or NiFe formed to a thickness of approximately 5 to 100 ohms strong. A single pinned layer or as in this embodiment, a synthetic ferromagnetic pinned layer is formed on the seed layer. The composite layer includes an antiferromagnetic pinning layer 52, a second ferromagnetic layer 53, a bonding layer 54, and a first ferromagnetic layer 55. The antiferromagnetic layer pins the magnetization of the second ferromagnetic layer in an omnidirectional manner and the first ferromagnetic layer is magnetized in an antiparallel direction to the direction of the first layer. The first and second ferromagnetic layers are formed to a thickness of approximately 5 to 100 ohms strong to form matching layers of CoFe, such that the net magnetic moment of this configuration is substantially zero. The bonding layer is a layer of Rh, Ru, Cr or Cu of appropriate thickness to maintain strong antiparallel bonding between the magnetic moments. The antiferromagnetic pinning layer 52 may be a layer of PtMn, NiMn, OsMn, IrMn, PtPdMn, PtCrMn, or FeMn of approximately 10 to 100 ohms thick.

The tunneling barrier layer 56 is formed on the first ferromagnetic layer 55 of the pinned layer. This layer is an insulating material layer, such as oxidized Al or oxidized Al-Hf bilayer, and is formed to a thickness of approximately 7 to 15 ohms. Ferromagnetic free layer 57 is formed on the barrier layer. The free layer may be a single layer of ferromagnetic material, such as a layer of CoFe or NiFe, formed to a thickness of approximately 5 to 100 ohms strong, or may be the first and second ferromagnetics magnetized in antiparallel directions and separated by a nonmagnetic spacer layer. It may be a multilayer comprising layers but comprising a conductive material such as Rh, Ru, Cr or Cu, which is of appropriate thickness to maintain a strong antiparallel bond between the two ferromagnetic layers. During the formation of the cell, it is useful to set the magnetic anisotropy direction of the ferromagnetic layers perpendicular or parallel to the bit line. Capping layer 58 is formed on the free layer and completes cell element 50. The capping layer may be a layer of Ru or Ta or a multilayer of Ru / Ta formed to a thickness of approximately 5 to 100 ohms strong. The read word line 59 is formed on the capping layer 58 of the cell element 50. A layer of insulating material 15 surrounds the cell and separates the write word line 10 from the bit line 20 and the read word line 59 from the word line 10. The write word line 10, such as the bit line, is an ultra thin layer of conductive material smaller than 100 nm in thickness formed according to the method of the present invention. Note also that the separation between read and write word lines is kept as small as possible to maintain the strength of the write word line magnetic field in the cell element free layer. Separation not larger than the thickness of the ultra thin lines is preferred.

Referring to FIG. 1B, the present invention uses the ultra-thin word 10 and bit 20 lines but lacks a read word line (59 in FIG. 1A) and instead writes a word line 10 of the cell element 50. An MTJ MRAM design is shown that differs from the design of FIG. 1A in that it is formed in contact with the top surface. The cell element is the same as the cell element of FIG. 1A and is not shown in detail. In this configuration, the logic state of the cell is determined using only write word lines and bit lines.

Referring to FIG. 1C, an MRAM in which a plurality of cell elements 50 (two shown), each identical to the cell element of FIG. 1A, is formed between the common word line 10 and the individual bit line 20 in the configuration of FIG. 1B. An array of cells is shown schematically. The word line is then connected to a single access transistor (not shown) by the connection conductor 60. Only two are shown for the sake of brevity, both of which are denoted by (50), and each cell is formed in contact with a separate bit line 20, which is directed out of the plane of the drawing. In this configuration the top surface of the cell element, which is the seed layer 51, is in contact with the bottom surface of the bit line 20, and the bottom surface of the cell element, which is the capping layer 58, is in contact with the top surface of the word line 10. . There is no separation layer 58 as indicated by 59 in FIG. 1A. The word line 10 and the bit lines 20 are formed in accordance with the method of the present invention which will be described later with reference to FIGS. 2A-D. In this configuration, all the cells in contact with the common word line are accessed by a single transistor. This array can be inverted so that the word line is overlying the bit lines, the cell element has inverted layers and the access transistor is overlying the word line.

Referring to FIG. 1D, there is shown an array of two MTJ MRAM cells, each of which is the configuration of FIG. 1A, where each cell element 50 is an intersecting word 10 and a bit 20 formed using the method of the present invention. ), The same bit line 20 is common to each cell, but each word line is on a separate cell element. Electrode 59 is formed in contact with the top surface of each cell on capping layer 58 and is insulated from the word line 15, and each electrode is connected to an access transistor (not shown) by connection line 60. do. In this array configuration, there is one transistor for each cell. Note that the overall configuration is reversed so that the bit lines are placed vertically above the cell and the cell layer structure is reversed as shown in FIG. 1A.

Referring now to Figures 2A-E, the various steps involved in manufacturing the bit or word lines of the present invention are schematically illustrated. The ultra-thinness of the lines not only achieves the object of the present invention to provide a smaller current to the appropriate switching field, but also can be manufactured in an easier manner than conventional thick lines because less ion beam etch (IBE) trimming and CMP polishing are required. have.

Referring first to FIG. 2A, a first step of the process steps required to form the ultra-thin word or bit lines of the present invention is shown. First, a thin conductive layer 100 is deposited over a substrate 90 having a substantially smooth top surface, which is subjected to a process of sputtering, ion beam deposition (IBD) or chemical vapor deposition (CVD). By the desired thickness of the word or bit line. Note that this substrate may be a dielectric layer comprising MTJ MRAM cell elements whose top surfaces are co-smooth with the top surface of the dielectric layer. Alternatively, the substrate may be a dielectric layer formed over a conductive electrode, such as 59 in FIG. 1A. Here, this substrate is not shown in detail. Thereafter, the photoresist layer 200 is formed on the conductive layer.

Referring to FIG. 2B, a photoresist layer 210 is currently shown patterned by a photolithographic process as is well known in the art. This patterning produces a line width to be formed and a strip extending in the appropriate line direction (or a plurality of strips when one or more lines are formed).

Referring to FIG. 2C, patterning is used as a mask for ion beam etch (IBE) or reactive ion etch (RIE) to remove peripheral portions of the conductive layer leaving a desired word / bit line 150 under the photoresist pattern. Photoresist 210 is shown. The photoresist is then removed (not shown) leaving only the word / bit lines 150 properly arranged over the substrate 90.

Referring to FIG. 2D, the formation of FIG. 2C is shown, where an insulating refill layer 250 is deposited to fill the spaces between the formed word / bit lines and between others (not shown). In this form, MTJ cells may be formed over word / bit lines, or orthogonal set of word lines may be formed over these lines if they are bit lines. If the just formed lines 150 are bit lines (run orthogonal to the plane in the figure), the orthogonal lines formed over them will be word lines (run in plane in the figure).

Finally, referring to FIG. 2E, a substrate 90 including an MTJ MRAM cell 50 is shown by way of example only such that the ultra-thin word line 150 formed in accordance with FIGS. 2A-D is located on the top surface of the cell. . It is apparent to those skilled in the art how other ultra thin cross word / bit line configurations are formed at the location of the cell elements.

For simplicity and reproducibility, the surfaces of the bit or word lines 150 need to be not flattened or reduced in thickness by chemical mechanical polishing (CMP). Such polishing results in undesirable thickness variations in the lines, which then adversely affects maintaining a sufficiently small and uniform distance between the lines and free layer in the MTJ cell. The difficulty in controlling the CMP lapping process to obtain accurate breakpoints results in thickness variations. Because of this, because CMP is excluded, the bit lines cannot be made thick, which makes it impossible to avoid thick deposits that produce a high non-smooth top surface, which would result in inaccurate photoresist patterning, poor line persistence if CMP is not done. And electron transfer. Thus, the thin deposition of the present invention eliminates the undesirable CMP process requirements while at the same time providing the increasing magnetic fields needed.

As will be appreciated by those skilled in the art, the preferred embodiments of the present invention are illustrative of the invention rather than limiting of the invention. Amendments and modifications to the methods, processes, materials, structures and dimensions can be made, thereby forming and providing an MTJ MRAM cell comprising a cell element between the ultra thin bit line and the ultra thin word line. An MRAM cell is formed and provided in accordance with the present invention as defined by one claim.

1A is a schematic vertical cross-sectional view of an MTJ MRAM cell with cell elements formed between ultra-thin word and bit lines of the present invention.

1B is a vertical cross-sectional view schematically illustrating the MTJ MRAM cell of the present invention in an alternative configuration to that of FIG. 1A;

1C is a schematic diagram of an array of MTJ MRAM cells (two shown) formed between ultra thin word and bit lines.

1D schematically illustrates an array of two cells of the type of FIG. 1A.

2A-E illustrate in more detail the formation of ultra-thin words or bit lines showing how the thickness of word and bit lines makes the formation simpler.

* Description of the symbols for the main parts of the drawings *

10: Ultra Thin Word Line

20: ultra thin bit line

50: MTJ Cell Element

59: conductive electrode

60: connection line

Claims (12)

In an MTJ MRAM cell formed at the intersection of ultra-thin word and bit lines: An ultra-thin bit line having a top surface and a bottom surface, formed of an electrically conductive material, extending in the first direction within the first horizontal plane and having a thickness t _b less than 100 nm; An ultra thin write word line having an upper surface and a lower surface and formed of an electrically conductive material, the ultra thin write word line extending in a direction orthogonal to the first direction in a second horizontal plane that is vertically separated from the first horizontal plane; The ultra thin write word line passing vertically over the ultra thin bit line to form an intersection perpendicularly separated from the ultra thin word line having a thickness t _w less than 100 nm; And And a horizontally multilayered magnetic tunnel junction (MTJ) cell element having a top surface and a bottom surface and including a magnetic free layer and formed at the intersection of the ultra thin word line and the ultra thin bit line. The method of claim 1, The MTJ cell element is formed at the intersection between the ultra thin word and bit lines, the top surface of the MTJ cell element is in electrical contact with the bottom surface of the ultra thin word line and the bottom surface of the MTJ cell element is the ultra thin bit line MTJ MRAM cell in electrical contact with an upper surface of the cell. The method of claim 1, And the MTJ cell element comprises a conductive electrode formed on the top surface. The method of claim 3, wherein The MTJ cell element is formed at the intersection between the ultra thin word and bit lines, the bottom surface of the MTJ cell element is in contact with the top surface of the ultra thin bit line and the bottom surface of the ultra thin word line is perpendicular above the conductive electrode. MTJ MRAM cell laid down and separated from the conductive electrode by an insulating layer. The method of claim 1, Wherein the electrically conductive material is Cu, Au, Al, Ag, CuAg, Ta, Cr, NiCr, NiFeCr, Ru, Rh or multiple stacked layers of the materials. The method of claim 1, The MTJ cell element is, A seed layer formed on an upper surface of the ultra thin bit line; An antiferromagnetic pinning layer formed on the seed layer; A synthetic ferromagnetic pinning layer formed on the antiferromagnetic pinning layer, the synthetic ferromagnetic pinning layer comprising first and second ferromagnetic layers of the same and opposite magnetic moments separated by a first bonding layer; A tunneling barrier layer formed on the synthetic ferromagnetic pinning layer; A ferromagnetic free layer formed on said tunneling barrier layer; A capping layer formed on the ferromagnetic free layer, The magnetic anisotropy of the ferromagnetic layers is set in parallel or perpendicular to the ultra thin bit line. The method of claim 6, The ferromagnetic free layer is the third and fourth ferromagnetic layers of the same and opposite magnetic moments separated by a second coupling layer of Ru, Rh, Cu or Cr to maintain antiparallel coupling of the magnetic moments. An MTJ MRAM cell, which is a synthetic ferromagnetic layer comprising. The method of claim 6, The antiferromagnetic pinning layer is a layer of PtMn, NiMn, OsMn, IrMn, PtPdMn, PtCrMn or FeMn with a thickness of 10 to 500 ohms strong, and the ferromagnetic layers are layers of CoFe or NiFe formed to a thickness of 5 to 100 ohms strong. And wherein said bonding layer is a layer of Rh, Ru, Cu or Cr. An array of MTJ MRAM cells formed between intersections of ultra thin word and bit lines, wherein the ultra thin word and bit lines are formed with a thickness less than 100 nm of an electrically conductive material: At least one ultra thin word line having a top surface and a bottom surface and formed in a first direction; A plurality of identical MTJ cell elements formed uniformly spaced apart on the top surface of the ultra thin word line, the bottom surface of each MTJ cell element being in electrical contact with the top surface of the ultra thin word line Elements; A plurality of parallel ultra thin bit lines, each of the ultra thin bit lines having a top and bottom surface, the bottom surface in electrical contact with a top surface of one of the MTJ cell elements, each of the ultra thin bit lines The plurality of parallel ultra thin bit lines formed in a second direction orthogonal to a first direction; And And an electrically conductive connection formed between the ultra thin word line and a single access transistor. The method of claim 9, Each said MTJ cell element is: A seed layer formed on the lower surface of the ultra thin bit line; An antiferromagnetic pinning layer formed on the seed layer; A synthetic ferromagnetic pinning layer formed on the antiferromagnetic pinning layer, the synthetic ferromagnetic pinning layer comprising first and second ferromagnetic layers of the same and opposite magnetic moments separated by a first bonding layer; A tunneling barrier layer formed on the synthetic ferromagnetic pinning layer; A ferromagnetic free layer formed on said tunneling barrier layer; A capping layer formed on the ferromagnetic free layer and in contact with the upper surface of the ultra thin word line, Magnetic anisotropy of the ferromagnetic layers is set in parallel or perpendicular to the ultra-thin bit line. An array of MTJ MRAM cells formed between intersections of ultra thin word and bit lines, wherein the ultra thin word and bit lines are formed with a thickness of less than 100 nm and a width of 300 nm to 500 nm of an electrically conductive material. : At least one ultrathin bit line having a top and a bottom surface formed in a first direction in a first plane; A plurality of parallel ultra-thin word lines, each having an upper and a lower surface, formed in a second direction perpendicular to the first direction in a second plane parallel to the first plane and vertically separated above the first plane The plurality of parallel ultra-thin word lines; A plurality of identical MTJ cell elements formed on the ultra thin bit line between each of the ultra thin bit lines and each intersection of the ultra thin word lines, each MTJ cell element having a top and a bottom surface, each of the MTJ cell elements A bottom surface comprising the plurality of identical MTJ cell elements in electrical contact with the top surface of the ultra thin bit line; And A conductive electrode formed in contact with an upper surface of each MTJ cell element, the conductive electrode being below the lower surface of the ultra thin word line and insulated from the ultra thin word line and electrically connected to an access transistor. Array of cells. The method of claim 11, Each of the MTJ cell elements is: A seed layer formed on an upper surface of the ultra thin bit line; An antiferromagnetic pinning layer formed on the seed layer; A synthetic ferromagnetic pinning layer formed on the antiferromagnetic pinning layer, the synthetic ferromagnetic pinning layer comprising first and second ferromagnetic layers of the same and opposite magnetic moments separated by a first bonding layer; A tunneling barrier layer formed on the synthetic ferromagnetic pinning layer; A ferromagnetic free layer formed on said tunneling barrier layer; A capping layer formed on the ferromagnetic free layer, Magnetic anisotropy of the ferromagnetic layers is set in parallel or perpendicular to the ultra-thin bit line.

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