KR100968850B1 - Micro injecting device - Google Patents

Abstract

The present invention relates to a micro-injection device, and in the present invention, the shape (position) of the piezoelectric body and the diaphragm is significantly improved in a cantilever shape with relatively excellent shear deformation displacement efficiency compared to the same applied voltage. A chamber blocker / capable of smoothly transferring the shear deformation of the droplet ejection drive body (piezoelectric, diaphragm) to the chamber side between the droplet flow path body and the droplet ejection drive body with the chamber sealed. By additionally arranging the combined strain transfer layer, the shear strain size of the piezoelectric body and the diaphragm, the volume change of the chamber, etc. are optimally maximized even when the voltages applied to the upper electrode and the lower electrode are kept to a minimum. By guiding, the final sprayed liquid can maintain the optimum spraying quality without unnecessary consumption of driving voltage. It can be derived.

Description

Micro injecting device

The present invention relates to a micro-injection device, and more particularly, to significantly improve the shape (position) of the piezoelectric body and the diaphragm into a cantilever shape, which is relatively excellent in shear deformation displacement efficiency with respect to the same applied voltage. In the state in which the chamber is sealed between the droplet flow path body and the droplet ejection drive body, a series of shear deformations occur, so that the chamber deformation can be smoothly transmitted to the chamber side of the droplet ejection drive body (piezoelectric, diaphragm). By additionally arranging the combined strain transfer layer, the shear strain of the piezoelectric body and the diaphragm and the volume change of the chamber can be optimally maintained even when the voltage applied to the upper electrode and the lower electrode is kept to a minimum. By maximizing the guide, the final sprayed liquid can maintain optimum spraying quality without unnecessary consumption of drive voltage. It relates to a micro device that is capable of inducing jekting rock.

In general, micro-injecting devices refer to devices designed to supply a small amount of a series of jetting liquids such as ink, injection liquid, gasoline, etc. to a specific object such as printing paper, human body, automobile, and the like.

Recently, thanks to the rapid development of electric and electronic technology, such micro injecting devices are also rapidly developing, and continue to expand their functions throughout the daily life. As a representative example where such a micro injecting device is applied to real life, an inkjet printer head can be illustrated.

In general, the micro-injection device 20 according to the related art has a droplet flow path body 15 which provides a path for storing and ejecting the injection liquid, as shown in FIG. While being stacked and arranged on the upper side, through a series of shear deformations, the droplet ejection driving body 14 which guides the ejection liquid stored in the droplet flow path body 15 to be ejected to the outside is integrated. Done.

At this time, the droplet flow path body 15 is stacked on top of the nozzle plate 10 while being provided with a nozzle plate 10 on which a jet liquid ejection nozzle 13 is formed, and a reservoir liquid reservoir 11 (Reservoir). Injection of the structure which communicates with the flow path plate 8 laminated | stacked and arrange | positioned on the reservoir plate 9, and equipped with the reservoir plate 9 arrange | positioned, the injection liquid flow path 11a, and the flow path 11a. The list is provided with a restrictor (7: Restricter) for adjusting the liquid ejection speed, and is provided with a restrictor plate (7) laminated and arranged on the upper part of the flow path plate (8), and a chamber (12: Chamber) for spraying liquid storage. The chamber plate 5 and the like laminated and arranged on the upper portion of the lite plate 7 have a structure in which they are stacked and combined closely.

In addition, the droplet ejection driver 14 includes upper and lower electrodes 1 and 3 which form a series of electric fields by voltages applied from the outside, and upper and lower electrodes 1 and 3 on their front and rear surfaces. And a voltage is applied to the upper and lower electrodes 1, 3, and when the series of electric fields is formed by the voltages, the piezoelectric element 2 causes a series of shear deformations corresponding to the electric field formation. When the piezoelectric body 2 causes shear deformation while supporting the piezoelectric body 2 in a state of being positioned above the chamber plate 5 including the chamber 12 described above, a series of shear deformations are also performed. Thus, the diaphragm 4 or the like which leads the chamber 12 on the lower side of the chamber plate 5 to cause a series of volume reductions has a structure in which the chamber plate 5 is closely combined and laminated.

In this case, as shown in FIG. 2, the piezoelectric element 2 belonging to the droplet ejection driving body 14 is a series of rectangles which collectively cover the entire area of the chamber 12 belonging to the droplet flow path 15. The diaphragm 4 belonging to the droplet ejection driving body 14 is also formed in a rectangular shape, and the entire region of the chamber 12 / chamber plate 5 belonging to the droplet flow path 15 is collectively formed. It forms a series of rectangular structures that cover (see FIG. 1).

Under the conventional micro-injection device system which takes this structure, the injection liquid (for example, ink, injection liquid, gasoline, etc.) supplied from the injection liquid supply container (not shown) is stored in the reservoir 11, and the flow path 11a ), Through the restrictor 6, etc., undergoes a procedure that flows into the chamber 12. In this case, the restrictor 6 serves to maintain a constant inflow rate of the injection liquid introduced into the chamber 12.

In this situation, when a series of voltages are applied to the upper electrode 1 and the lower electrode 3 of the droplet ejection driving body 14 from the outside, due to the applied voltage, for example, the polling direction of the piezoelectric body 2 (Poling) direction: That is, a series of electric fields are naturally formed in a direction perpendicular to the direction in which the piezoelectric domains are aligned, and due to the influence of the electric fields thus formed, the piezoelectric element 2 performs a series of contraction and expansion operations (i.e., liquid actuation). And shearing deformation), and eventually, the diaphragm 4 supporting it also continuously generates a series of contraction and expansion operations (i.e., actuating or shearing deformation).

Of course, if the actuation (shear deformation) of the diaphragm 4 affects the chamber 12 below the diaphragm 4, the chamber 12 also faces a situation in which its volume decreases momentarily. As a result, under such an instantaneous volume reduction situation of the chamber 12, the injection liquid (ink, injection liquid, gasoline, etc.) in the chamber 12 is ejected through the nozzle 13 formed in the nozzle plate 10, It is possible to flexibly perform the operation of supplying a small amount to an external specific object such as a printing paper, a human body, a car, and the like.

Under such a conventional micro-injection device 20 system, the operation of adjusting the droplet size of the injection liquid finally injected to a specific external object through the nozzle 13 is performed in such a manner that the injection quality of the injection liquid, for example, ink. Is a very important variable in determining the print quality.

Of course, in order to maximize the droplet size of the injection liquid finally injected to a specific object, the operation of maximizing the injection power of the injection liquid must be preceded, and in order to maximize the injection power, the volume change amount of the chamber 12 is maximized. The work of making maximally large must be preceded.

However, as described above, the volume change amount of the chamber 12 depends entirely on the shear deformation of the piezoelectric body 2 and the diaphragm 4, and the shear deformation of the piezoelectric body 2 and the diaphragm 4 also includes the upper electrode ( 1) and the magnitude of the voltage applied to the lower electrode 2, the magnitude of the voltage applied to the upper electrode 1 and the lower electrode 2 in order to maximize the volume change of the chamber 12, Increasing work is inevitably preceded, and, consequently, under the conventional system, the micro injecting device 20 cannot easily achieve a wide improvement in self quality unless it consumes a huge amount of driving voltage. .

Accordingly, an object of the present invention is to drastically improve the shape (position) of the piezoelectric body and the diaphragm into a cantilever shape which is relatively excellent in shear deformation displacement efficiency with respect to the same applied voltage, and also operates a droplet flow path and droplet ejection drive. Between the sieves, with the chamber sealed, a chamber blocking / strain transfer layer is additionally arranged that can generate a series of shear deformations and can smoothly transfer the shear deformations of the droplet ejection drive body (piezoelectric and diaphragm) to the chamber side. By doing so, even when the magnitudes of voltages applied to the upper and lower electrodes are kept to a minimum, the shear strain of the piezoelectric body, the volume change of the chamber, and the like are guided to be maximized in an optimal state. The injection liquid is induced to maintain the optimum injection quality without unnecessary consumption of the driving voltage.

Other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

In order to achieve the above object, the present invention includes a droplet flow path body having a chamber for storing the injection liquid, and providing a jet path of the injection liquid; The liquid crystal driving device includes a droplet ejection driving body configured to cause the shear deformation of the piezoelectric body and the diaphragm by the voltage applied from the outside while stacking and arranging the upper portion of the droplet flow path body to cause external ejection of the injection liquid stored in the chamber. The piezoelectric body and the diaphragm have a cantilever shape in which one end thereof forms a fixed end region fixed by the droplet ejection driving body and the other end thereof forms a free end region extending and protruding to the upper portion of the chamber. and the piezoelectric body and the diaphragm are shear deformation between the droplet flow path body and the droplet ejection driving body to cover the front surface of the droplet flow path body so that the chamber is blocked to block external leakage of the injection liquid. In this case, the shear strain corresponding to the shear strain is generated, and the shear strain of the piezoelectric body and the diaphragm is transferred to the chamber side. Discloses a micro injecting device characterized in that a chamber blocking / strain transfer layer is formed.

In the present invention, the shape (position) of the piezoelectric body and the diaphragm is greatly improved to a cantilever shape with relatively excellent shear deformation displacement efficiency compared to the same applied voltage, and between the droplet flow path body and the droplet ejection driving body, In the sealed state of the chamber, a series of shear deformations are generated, and the chamber blocking / strain transfer combined layer is further disposed to smoothly transfer the shear deformation of the droplet ejection driving body (piezoelectric and diaphragm) to the chamber side. Under the implementation environment of the present invention, the size of the shear deformation of the piezoelectric body and the diaphragm, the volume change amount of the chamber, etc. can be maximized to the optimum state even in the state where the voltage applied to the upper electrode and the lower electrode is kept to a minimum. The final injection liquid can maintain the optimum injection quality even without unnecessary consumption of the driving voltage.

Hereinafter, with reference to the accompanying drawings, a micro injecting device according to the present invention will be described in more detail.

As shown in Fig. 3, the micro-injection device 50 according to the present invention comprises a droplet flow path body 45 which provides a path for storing and ejecting the injection liquid, and is stacked on top of the droplet flow path body 45. In the arrangement, through the series of shear deformations, the droplet ejection driving body 44 which guides the ejection liquid stored in the droplet flow path body 45 to be ejected to the outside is integrated.

At this time, the droplet flow path body 45 is provided with a nozzle plate 40 on which a jet liquid ejecting nozzle 43 and a jet liquid storage reservoir 41 are stacked and arranged on the nozzle plate 40. Injection liquid jet of the structure which communicated with the flow path board 38 laminated | stacked and arrange | positioned on the reservoir plate 39, and provided with the reservoir plate 39, the injection liquid flow path 41a, and the flow path 41a. The restrictor plate 37 is provided with the restrictor 36 for speed regulation, and is provided with the restrictor plate 37 laminated | stacked and arrange | positioned on the upper part of the flow path board 38, and the chamber 42 for injection liquid storage. The chamber plate 35 and the like laminated and arranged on the upper portion of the panel 1) have a structure in which the stacked and arranged closely.

In addition, the droplet ejection driving body 44 includes the upper and lower electrodes 31 and 33 which form a series of electric fields by a voltage applied from the outside, and the upper and lower electrodes 31 and 33 on the front and rear surfaces thereof. And a voltage is applied to the upper and lower electrodes 31 and 33, and when the series of electric fields is formed by the voltages, the piezoelectric element 32 causes a series of shear deformations corresponding to the electric field formation. And, when the piezoelectric body 32 causes shear deformation while supporting the piezoelectric body 32 in the state of being located above the chamber 42, it also causes a series of shear deformations, and thus the chamber plate (below) 35. The diaphragm 34 and the like that induce the side chamber 42 to cause a series of volume reductions are closely combined and laminated (in this case, the diaphragm 34 has an upper electrode ( Position can be changed to the upper surface of 31).

Under the micro-injection device system of the present invention having such a structure, the injection liquid (e.g. ink, injection liquid, gasoline, etc.) supplied from the injection liquid supply container (not shown) is stored in the reservoir 41, and the flow path ( 41a), via the restrictor 36, etc., undergoes a procedure to flow into the chamber 42. In this case, the restrictor 36 plays a role of maintaining a constant inflow rate of the injection liquid introduced into the chamber 42.

In this situation, when a series of voltages are applied to the upper electrode 31 and the lower electrode 33 of the droplet ejection driving body 44 from the outside, due to the applied voltage, for example, the polling direction of the piezoelectric body 32 (Poling) direction: That is, a series of electric fields are naturally formed in a direction perpendicular to the direction in which the piezoelectric domains are aligned, and due to the influence of the electric fields thus formed, the piezoelectric element 32 undergoes a series of contraction and expansion operations (i.e., liquid actuation). And shearing deformation), and eventually, the diaphragm 34 supporting it also continuously generates a series of contraction and expansion operations (i.e., actuating or shearing deformation).

Of course, if the actuation (shear deformation) of the diaphragm 34 affects the chamber 42 below the diaphragm 34, the chamber 42 also faces a situation where its volume decreases momentarily. As a result, under such an instantaneous volume reduction situation of the chamber 42, the injection liquid (ink, injection liquid, gasoline, etc.) in the chamber 42 is ejected through the nozzle 43 formed in the nozzle plate 40, It is possible to flexibly perform the operation of supplying a small amount to an external specific object such as a printing paper, a human body, a car, and the like.

Under the system of the micro-injection device 50 of the present invention, as described above, the operation of adjusting the droplet size of the injection liquid finally injected to the external specific object through the nozzle 43 is as much as possible. Is a very important parameter in determining the injection quality of, for example, the printing quality of the ink.

Of course, as described above, in order to maximize the droplet size of the jetting liquid finally injected to a specific object, the operation of maximizing the jetting power of the jetting liquid must be preceded, and in order to maximize the jetting power, the volume of the chamber 42 is maximized. The task of making the change as large as possible should be preceded.

However, the volume change amount of the chamber 42 depends entirely on the shear deformation of the piezoelectric body 32 and the diaphragm 34, and the shear deformation of the piezoelectric body 32 and the diaphragm 34 is also the upper electrode 31 and the lower electrode. Since it is totally dependent on the magnitude of the voltage applied to the (32), unless the action is taken, in order to maximize the volume change of the chamber 42 is applied to the upper electrode 31 and the lower electrode 32 Increasing the magnitude of the voltage is inevitably preceded.

In such a sensitive situation, as shown in FIG. 4, in the present invention, the piezoelectric body 32 and the diaphragm 34 are supported and fixed by one of the droplet flow path bodies 45, so that a series of fixed end regions ( 32a and 34a, and the other one of them extends and protrudes above the chamber 42 to form a series of free end regions 32b and 34b (as described above, the conventional system). Below, the piezoelectric body and the diaphragm take a series of rectangular structures collectively covering the entire area of the chamber.

Of course, in this situation, the piezoelectric body 32 and the diaphragm 34 of the present invention will naturally form a series of cantilever shapes that are fixed to one side and the other as if floating in the air. .

At this time, the fixed end regions 32a and 34a of the piezoelectric body 32 and the diaphragm 34 are supported and bound by the lower droplet flow path body 45, and the displacement freedom is zero, so that the upper electrode 31 And a series of voltages are applied to the lower electrode 33 so that a series of shear strains are not generated even when an electric field is formed. In contrast, the free end regions 32b and 34b of the piezoelectric member 32 and the diaphragm 34 are Since a corresponding degree of freedom of displacement can be ensured by being disposed on the upper portion of the chamber 42, a series of voltages are applied to the upper electrode 31 and the lower electrode 33, so that the polling direction of the piezoelectric element 32 is reduced. direction: That is, when a series of electric fields are formed in a direction perpendicular to the direction in which the piezoelectric domains are aligned), very flexible shear deformation can be caused.

Here, in order to theoretically examine how the piezoelectric body 32 and the diaphragm 34 of the present invention having the above-described cantilever shape can exhibit a shear deformation range superior to the piezoelectric body and the diaphragm according to the conventional technology> 5A to 5C, four end fixed rectangular plates (P1: corresponds to the conventional case), and two end fixed beam shaped plates (P2: conventional and intermediate of the present invention) Case), and furthermore, it is assumed that a cantilever-shaped plate (P3: corresponding to the present invention) having one end fixed.

(여기서,

는 플레이트의 최대 변위,

는 플레이트에 가해지는 하중,

은 플레이트의 폭,

는 영률,

는 플레이트의 두께)(포아송비가 0.3이라고 가정함) 정도의 최대 변위를 나타낼 수 있게 되며, 두 개의 끝단이 고정된 빔 형상을 취하는 플레이트(P2)는,

정도의 최대 변위를 나타낼 수 있게 되고, 나아가, 한개의 끝단이 고정된 캔틸레버 형상을 취하는 플레이트(P3)는,

정도의 최대 변위를 나타낼 수 있게 된다.Here, for example, the plate P1, which takes a quadrangular shape with four ends fixed, is described in books <Michael Koch, Alan Evans. As detailed in Arthur Brunnschweiler's "Mechanical Aspects of Microfluidic Devices" section (pages 22-35) of "Microfluidic Technology and applications"> (RESEARCH STUDIES PRESS LTD, 2000, Jan. 12, 1st edition) , For example,

(here,

Is the maximum displacement of the plate,

Is the load on the plate,

The width of the silver plate,

Is the Young's modulus,

Is the thickness of the plate) (assuming that the Poisson's ratio is 0.3), and the plate P2 having a beam shape having two ends fixed thereto,

The maximum displacement of the degree can be exhibited, and furthermore, the plate P3 taking the cantilever shape in which one end is fixed,

The maximum displacement of the degree can be represented.

That is, when the corresponding <cantilever-shaped plate P3 with one end fixed in the case of the present invention indicates the maximum displacement of 30, the other <square plate P1 with the four ends fixed >> ( In the conventional case), < beam plate (P3) having two ends fixed to each other &quot;

Of course, this fact is that under the condition that the same load is applied, the corresponding < cantilever-shaped plate P3 having one end fixed thereto &quot; is significantly superior to other plates P1 and P2. It means that it is possible to exhibit an excellent maximum displacement, and as a result, the piezoelectric element 32 and the diaphragm 34 of the present invention taking the cantilever shape under the premise that a voltage of the same value is applied are taken in a rectangular shape. It is theoretically supported that the maximum displacement range superior to the piezoelectric element can be obtained.

As a result, under the implementation environment of the present invention in which the shape (position) of the piezoelectric member 32 and the diaphragm 34 is significantly improved in the form of a cantilever, which is relatively excellent in shear deformation displacement efficiency compared to the same applied voltage, the micro injecting device 50 ) Is the optimal state of the shear deformation size of the piezoelectric body 32 and the diaphragm 34, the volume change amount of the chamber, etc., even when the magnitude of the voltage applied to the upper electrode 31 and the lower electrode 33 is kept to a minimum. As a result, it is possible to adjust the droplet size of the final injection liquid as large as possible without unnecessary consumption of the driving voltage, thereby naturally maintaining the optimum injection quality corresponding to the user's requirements. .

이상만큼, 좀더 바람직하게, 챔버(42) 폭의

만큼 연장·돌출되도록 하는 조치를 강구하게 된다(이 경우, 압전체(32) 및 진동판(34)의 자유단 영역(32b,34b)은 이를테면,

정도의 연장·돌출 규모를 유지할 수 있게 된다).In this case, as shown in FIG. 4, in the present invention, the free end regions 32b and 34b of the piezoelectric body 32 and the diaphragm 34 have a width L of the chamber 42.

By the above, more preferably, the width of the chamber 42

Measures are taken to extend and protrude as much as possible (in this case, the free end regions 32b and 34b of the piezoelectric body 32 and the diaphragm 34 are, for example,

To maintain the extent of extension and protrusion).

보다 적게 연장·돌출될 경우, 압전체(32) 및 진동판(34)의 최대변위범위가 상술한 <두 개의 끝단이 고정된 빔 형상의 플레이트(P2)>와 유사한 수준으로 크게 떨어질 수도 있다는 사실이 발견되었기 때문이다.The reason for taking such measures is that, as a result of the repetitive experiments of the applicant, if the free end regions 32b and 34b of the piezoelectric body 32 and the diaphragm 34 have the width L of the chamber 42

When less protruded and protruded, it is found that the maximum displacement range of the piezoelectric body 32 and the diaphragm 34 may drop significantly to a level similar to the above-described beam plate P2 having two ends fixed thereto. Because

이상만큼, 좀더 바람직하게, 챔버(42) 폭 L의

만큼 효과적으로 연장·돌출시킨 상황 하에서, 압전체(32) 및 진동판(34)은 좀더 우수한 최대 변위범위를 나타낼 수 있게 되며, 그 결과, 마이크로 인젝팅 디바이스(50)는 좀더 향상된 분사품질을 자연스럽게 보일 수 있게 된다.As a result, under the above-described measures, its free end regions 32b and 34b may be

By the above, more preferably, the width of the chamber 42 width L

In a situation where it is effectively extended and protruded, the piezoelectric body 32 and the diaphragm 34 can exhibit a better maximum displacement range, and as a result, the micro injecting device 50 can naturally show more improved injection quality. do.

On the other hand, as described above, since the piezoelectric body and the diaphragm collectively covered the entire area of the chamber under the conventional system, the inside of the chamber could be naturally blocked (covered) by the piezoelectric body and the diaphragm. Accordingly, the injection liquid stored inside the chamber did not cause a problem such as leakage to the outside.

However, under the framework of the present invention, the piezoelectric body 32 and the diaphragm 34, as mentioned above, generally take <a series of cantilever shapes in which only one side is fixed and the other as if floating in the air>. , If no further measures are taken, problems such as the injection liquid stored in the chamber 42 leaking to the outside may occur.

In this situation, in the present invention, as shown in FIG. 3 and FIG. 4, the droplet passage body 45 so that the chamber 42 is blocked between the droplet passage body 45 and the droplet ejection driving body 44. Measures to further form a chamber blocking / deformation transfer combined layer 46 covering the front of the panel).

Of course, in the arrangement of the chamber blocking / deformation transfer layer 46, the interior of the chamber 42 can be naturally blocked (covered) by the chamber blocking / deformation transfer layer 46, and eventually, the chamber (42) The spraying liquid stored therein does not cause any problems such as leakage to the outside even in a situation where the piezoelectric body 32 and the diaphragm 34 have a cantilever shape.

At this time, the chamber blocking / deforming transfer layer 46 is interposed on a series of shear deformation transfer paths including a piezoelectric element 32, a vibration plate 34, a chamber 42, and the like, and thus directly changes in volume of the chamber 42. Because of the influence, the chamber blocking / deformation transfer layer 46 exhibits a smooth movement corresponding to the movement of the piezoelectric member 32 and the diaphragm 34, thereby preventing the movement of the piezoelectric member 32, the diaphragm 34, and the like. The question of whether it can be flexibly delivered to the chamber 42 side will greatly affect the implementation of the present invention.

In this situation, in the present invention, the material of the chamber blocking / deformation transfer layer 46 may have different characteristics from those of the piezoelectric member 32 and the diaphragm 34, for example, while the piezoelectric member, the diaphragm, and the like have hard characteristics. , Polyimide has softness, but has excellent physical and chemical stability, such as polyimide (PE), PEEK (polyetheretherketon), PES (polyethersulfone), PEI (polyetherimide), PC (polycarbonate), PEN (polyethylenenaphthalate), It is selected from polyethylene terephtalate (PET), polymethylmethacrylate (PMMA), polyvinylalcohol (PVA), etc., and the thickness thereof is maintained at about 0.5 µm to 1.5 µm, so that the piezoelectric member 32 and the diaphragm 34 perform a series of contraction and expansion operations (i.e., Actuating or shear deformation), the barrier / strain transfer layer 46 also acts to induce a series of contracting and expanding operations (i.e. actuating or shear deformation) in a strong and flexible manner. To find ( At this time, the chamber blocking / deformation transfer layer 46 may be made of any one material selected from the above-mentioned materials, and may be made of a composite material in which two or more materials selected from them are combined according to circumstances.) .

Of course, the chamber blocking / deformation transfer layer 46 may have a thickness of about 0.5 μm to 1.5 μm, such as PI (polyimide), PEEK (polyetheretherketon), PES (polyethersulfone), PEI (polyetherimide), PC (polycarbonate), PEN (polyethylenenaphthalate), PET (polyethyleneterephtalate), PMMA (polymethylmethacrylate), PVA (polyvinylalcohol), etc., material, such as shrinkage and expansion of the piezoelectric member 32 and the diaphragm 34 (i.e. actuating or shear deformation) When the same series of contraction / expansion operations (i.e., actuating or shearing deformation) can be generated in a strong and flexible manner, the bottom of the piezoelectric element 32, the diaphragm 34, etc., is provided on the chamber 42 side. Even under difficult conditions in which the chamber blocking / deformation transfer layer 46 is interposed, almost 100% of the shear deformation effects of the piezoelectric element 32 and the diaphragm 34 can be transmitted, resulting in injection in the chamber 42. Liquids (inks, injectables, gasoline, etc.) have no problem It is possible to successfully undergo a procedure ejected through nozzle 43 formed in (40).

On the other hand, as shown in Figs. 6 and 7, in the present invention, the piezoelectric body and the diaphragm of the micro injecting device (51, 52) are respectively the piezoelectric elements (32, 62, 72, 82) and the diaphragm (34, 64). As shown in (74,84), a number of deformation measures are arranged to be arranged on the upper part of the chamber 42 (of course, since the conventional piezoelectric body and the diaphragm have a structure which covers the upper part of the chamber as a whole, Under such a framework, these modifications are not conceivable.

Of course, the droplet ejection driving body 44 from the outside under the situation that each of the piezoelectric members 32, 62, 72, 82 and the diaphragms 34, 64, 74, 84 are arranged in the upper part of the chamber 42 is of course. When a voltage is applied to the upper electrode 31 and the lower electrode 33 of, and a series of electric fields is formed, due to the influence of the electric field, each piezoelectric element 32, 62, 72, 82 is a series of Of the diaphragm 34, 64, 74, 84, which also supported the contraction and expansion of the actuator (i.e., actuating or shearing deformation) at the same time. Or shear deformation) continuously.

Of course, if such a powerful actuation (shear deformation) of the diaphragm 34, 64, 74, 84 affects the chamber 42 below the diaphragm 34, 64, 74, 84, the chamber 42 Again, they face a situation where their volume is significantly reduced, and, consequently, under such an instantaneous massive volume reduction of the chamber 42, the injection liquid (ink, injection liquid, gasoline, etc.) in the chamber 42 is nozzle plate. Strongly ejected through the nozzle 43 formed in the 40, it is possible to flexibly perform the operation of supplying a small amount to an external specific object, such as printing paper, human body, automobile, etc., and eventually, the other of the present invention Under the embodiment system, the micro injecting device can adjust the droplet size of the final injection liquid to be larger, thereby naturally showing the improved injection quality.

The present invention described above exhibits an overall useful effect in various types of electronic / electrical devices requiring micro injecting devices.

And, in the foregoing, specific embodiments of the present invention have been described and illustrated, but it is obvious that the present invention may be variously modified and implemented by those skilled in the art. Such modified embodiments should not be understood individually from the technical spirit or point of view of the present invention and such modified embodiments should fall within the scope of the appended claims of the present invention.

1 and 2 conceptually illustrate a micro injecting device according to the prior art.

3 and 4 conceptually illustrate a micro injecting device according to the invention.

5a to 5c is a conceptual diagram for explaining the functional history of the present invention.

6 and 7 conceptually illustrate a micro injecting device according to another embodiment of the invention.

Claims (5)

A droplet flow path body having a chamber for storing the injection liquid and providing a jet path of the injection liquid; The liquid crystal driving device includes a droplet ejection driving body configured to cause the shear deformation of the piezoelectric body and the diaphragm by the voltage applied from the outside while stacking and arranging the upper portion of the droplet flow path body to cause external ejection of the injection liquid stored in the chamber. , The piezoelectric body and the diaphragm have a cantilever shape in which one end thereof forms a fixed end region fixed by the droplet ejection driving body, and the other end thereof forms a free end region extending and protruding to the upper portion of the chamber. Taking When the piezoelectric body and the diaphragm cause shear deformation while covering the front surface of the droplet flow path body so that the chamber is blocked between the droplet flow path body and the droplet ejection driving body to block the external leakage of the injection liquid, the corresponding shear And a chamber blocking / strain transfer layer for forming the shear deformation corresponding to the deformation to transfer the shear deformation of the piezoelectric body and the diaphragm to the chamber side. The free end region of the piezoelectric body and the diaphragm is formed in the chamber width.

It extends and protrudes as mentioned above, The micro injecting device characterized by the above-mentioned. 3. The free end region of claim 2, wherein the free end regions of the piezoelectric body and the diaphragm have a width of the chamber.

Micro injecting device, characterized in that extends and protrudes. The micro-injection device according to claim 1, wherein a plurality of the piezoelectric body and the diaphragm are arranged at the top of the chamber. The method of claim 1, wherein the chamber blocking / modifying transfer layer is polyimide (PI), polyetheretherketon (PEEK), polyethersulfone (PES), polyetherimide (PEI), polycarbonate (PC), polyethylenenaphthalate (PEN), polyethyleneterephtalate (PET), A micro injecting device comprising any one selected from polymethylmethacrylate (PMMA) and polyvinylalcohol (PVA), or two or more composite materials.

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