KR100924533B1 - Complicated bio signal sensor - Google Patents

Complicated bio signal sensor Download PDF

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KR100924533B1
KR100924533B1 KR1020070095464A KR20070095464A KR100924533B1 KR 100924533 B1 KR100924533 B1 KR 100924533B1 KR 1020070095464 A KR1020070095464 A KR 1020070095464A KR 20070095464 A KR20070095464 A KR 20070095464A KR 100924533 B1 KR100924533 B1 KR 100924533B1
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sensor
opening
semiconductor pressure
pressure sensor
substrate
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KR20090030122A (en
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김은근
영 허
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한국전기연구원
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/01—Measuring temperature of body parts ; Diagnostic temperature sensing, e.g. for malignant or inflamed tissue
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/024—Detecting, measuring or recording pulse rate or heart rate
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
    • A61B5/11—Measuring movement of the entire body or parts thereof, e.g. head or hand tremor, mobility of a limb
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316—Modalities, i.e. specific diagnostic methods
    • A61B5/318—Heart-related electrical modalities, e.g. electrocardiography [ECG]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0219—Inertial sensors, e.g. accelerometers, gyroscopes, tilt switches
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/16—Details of sensor housings or probes; Details of structural supports for sensors

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  • Surgery (AREA)
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  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
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  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)

Abstract

복합 생체신호 센서에 관한 것으로, 복합생체 신호센서에 있어서, 일면에 개구부를 가진 기판, 상기 센서를 고정하기 위한 기판의 일면에 형성되는 하나 이상의 독립된 개구부, 상기 센서유지기판의 제1 개구부상에 고정되어 인체의 맥파신호를 측정하는 반도체 압력센서, 상기 반도체 압력센서를 감싸고 심전도 신호전달을 하는 제1 개구부에 충진되는 전도성 실리콘, 상기 반도체 압력센서와 센서유지기판을 중심으로 대향되게 설치되어 움직임을 보정하는 가속도센서로 구성되는 것을 특징으로 한다.A composite biosignal sensor, comprising: a substrate having an opening on one surface thereof, at least one independent opening formed on one surface of a substrate for fixing the sensor, and fixed on a first opening of the sensor holding substrate Semiconductor pressure sensor for measuring the pulse wave signal of the human body, conductive silicon filled in the first opening that surrounds the semiconductor pressure sensor and transmits an electrocardiogram signal, and is installed to face the semiconductor pressure sensor and the sensor holding plate to compensate for movement. It is characterized by consisting of an acceleration sensor.

상기와 같은 복합 생체신호 센서를 이용하는 것에 의해, 인체의 중요 생체정보인 맥파, 심전도, 체온을 동시에 측정하여 진단시간을 단축할 수 있다.By using the complex biosignal sensor as described above, the diagnosis time can be shortened by simultaneously measuring pulse wave, electrocardiogram, and body temperature which are important biometric information of the human body.

생체신호, 센서, 반도체, 가속도, 적외선 Bio signals, sensors, semiconductors, acceleration, infrared

Description

복합 생체신호 센서{Complicated bio signal sensor}Complex bio signal sensor

본 발명은 복합 생체신호 센서에 관한 것으로, 특히 인체의 맥파, 심전도, 체온을 동시에 측정하기 위한 복합센서 모듈에 관한 것이다. The present invention relates to a complex biosignal sensor, and more particularly, to a complex sensor module for simultaneously measuring the pulse wave, electrocardiogram, body temperature of the human body.

일반적으로 생체측정계를 구비하는 휴대기기에 관한 것으로 심전도 내지 체지방이나 맥파신호를 측정할 수 있는 측정기기를 휴대기기에 결합시킴으로써 중첩되는 구성들을 제거하여 구성을 간단하게 할 수 있을 뿐만 아니라, 상시에 생체건강정보뿐만 아니라, 그 분석, 진단, 처방정보도 얻을 수 있어, 항상 건강상태를 파악할 수 있고, 긴급한 위험상황에도 대처할 수 있는 생체측정계를 구비하는 휴대기기에 관한 것이다.In general, the present invention relates to a portable device having a biometric system. By combining a measuring device capable of measuring electrocardiogram, body fat, or pulse wave signal with the portable device, the overlapping components can be eliminated, and the configuration can be simplified. The present invention relates to a mobile device having a biometric system capable of obtaining not only health information but also analysis, diagnosis, and prescription information, which can always grasp a state of health and cope with an urgent danger situation.

종래에는 기계식이 사용되고 있었으나, 최근 반도체를 사용한 변형게이지식 또는 정전용량형으로 치환되고 있고, 소형화, 고성능화, 저가격성, 고신뢰성이 기대된다.Conventionally, the mechanical type has been used, but in recent years, it has been replaced by a strain gage type or a capacitive type using a semiconductor, and miniaturization, high performance, low cost and high reliability are expected.

반도체식의 가속도센서는 반도체 기술 및 마이크로머시닝기술을 사용해서 제조된다.Semiconductor type acceleration sensors are manufactured using semiconductor technology and micromachining technology.

한편, 적외선 센서는 유전체박막을 응용한 열형 적외선센서이고, 상온동작이 가능한 점이나 감도의 파장 의존성이 작은 점 등의 특징을 가진 열형센서 중에서는 고감도의 센서중 하나이다.On the other hand, the infrared sensor is a thermal infrared sensor using a dielectric thin film, and one of the high sensitivity among the thermal sensor having the characteristics such as the room temperature operation and the small sensitivity of the wavelength dependence.

이 적외선센서는 유전체재료인 티탄산란탄납(이하, PLT라고 칭함)이 큰 초전특성을 표시하는 것을 이용하고, 통상 가장 높은 초전계수를 표시한 결정축인 c축에 결정배향한 PLT막을 사용해서 제조된다.This infrared sensor is manufactured by using a pyroelectric characteristic of lanthanum lead titanate (hereinafter referred to as PLT) as a dielectric material, and using a PLT film crystal-oriented on the c-axis, which is a crystal axis displaying the highest pyroelectric coefficient. .

또한 이러한 일 예가 대한민국 등록특허공보 0262137호(2000년04월27일) 등에 개시되어 있다.In addition, such an example is disclosed in Republic of Korea Patent Publication No. 0262137 (April 27, 2000) and the like.

즉, 상기 문헌에 있어서 도 1에 도시된 바와 같이, 가속도센서 소자(11)는 양표면에 가속도 검출용 인출전극막(3,5)이 형성된 PZT막(4)을 MgO막(2)의 위에 배치한 다층구조막이 중앙부 근처에 대략 직사각형단면의 1mm2 의 개구부를 가지고 크기가 5mm2이고 1mm두께인 알루미나(Al2O3)제 세라믹의 센서유지기판(7)의 상기 개구부에 접착된 구조를 가진다.That is, in the above document, as shown in FIG. 1, the acceleration sensor element 11 has a PZT film 4 having the acceleration detection lead-out electrode films 3 and 5 formed on both surfaces of the MgO film 2. Arranged multilayer structure film is approximately 1mm of rectangular section near center part2 Have an opening of 5mm in size2And 1mm thick alumina (Al2O3And a structure bonded to the opening of the sensor holding plate 7 made of ceramic.

여기서 도면번호 6은 도전성 접착제, 도면번호 8,9는 접속전극, 도면번호 10은 접착제를 나타낸다.Here, reference numeral 6 denotes a conductive adhesive, reference numerals 8 and 9 denote connection electrodes, and reference numeral 10 denotes an adhesive.

그러나, 상술한 대한민국 등록특허공보 0262137호에 개시된 기술에 있어서, 하나의 기판에 가속도센서와 적외선센서만을 구비함으로 맥박측정에 대한 동적인 움직임을 보상할 수 없다는 문제가 있었다.However, in the technology disclosed in the above-mentioned Republic of Korea Patent Publication No. 0262137, there is a problem that it is not possible to compensate for the dynamic movement of the pulse measurement by providing only the acceleration sensor and the infrared sensor on one substrate.

본 발명의 목적은 상술한 바와 같은 문제점을 해결하기 위해 이루어진 것으로서, 인체의 맥파, 심전도, 체온을 동시에 측정하는 복합 생체신호 센서를 제공하는 것이다.An object of the present invention is to solve the problems as described above, to provide a complex bio-signal sensor for simultaneously measuring the pulse wave, electrocardiogram, body temperature of the human body.

본 발명의 다른 목적은 사람의 움직임을 보정한 정확한 인체의 맥파를 측정하는 복합 생체신호 센서를 제공하는 것이다.Another object of the present invention is to provide a complex biosignal sensor that measures the pulse wave of the human body with corrected human motion.

본 발명에 따른 복합 생체신호 센서에 의하면, 인체의 중요생체정보인 맥파, 심전도, 체온을 동시에 측정하여 진단시간을 단축할 수 있다는 효과가 얻어진다.According to the composite biosignal sensor according to the present invention, an effect of shortening the diagnosis time by simultaneously measuring pulse wave, electrocardiogram, and body temperature, which are important biological information of the human body, is obtained.

또, 본 발명에 따른 복합 생체신호 센서에 의하면, 세 종류의 센서를 하나의 모듈에 제작함으로 제조원가를 낮출 수 있다는 효과가 얻어진다.In addition, according to the composite biosignal sensor according to the present invention, the manufacturing cost can be reduced by manufacturing three types of sensors in one module.

상기 목적을 달성하기 위해 본 발명에 따른 시스템은 복합생체 신호센서에 있어서, 일면에 개구부를 가진 기판, 상기 센서를 고정하기 위한 기판의 일면에 형성되는 하나 이상의 독립된 개구부, 상기 센서유지기판의 제1 개구부상에 고정되어 인체의 맥파신호를 측정하는 반도체 압력센서, 상기 반도체 압력센서를 감싸고 심전도 신호전달을 하는 제1 개구부에 충진되는 전도성 실리콘, 상기 반도체 압력센서와 센서유지기판을 중심으로 대향되게 설치되어 움직임을 보정하는 가속도센서로 구성되는 것을 특징으로 한다.In order to achieve the above object, a system according to the present invention includes a substrate having an opening on one surface, one or more independent openings formed on one surface of a substrate for fixing the sensor, and a first of the sensor holding plate. A semiconductor pressure sensor fixed on the opening to measure a pulse wave signal of a human body, conductive silicon filled in a first opening surrounding the semiconductor pressure sensor and transmitting an electrocardiogram signal, and installed to face the semiconductor pressure sensor and the sensor holding substrate It is characterized by consisting of an acceleration sensor to correct the movement.

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예에 대하여 설명하 며, 이를 통하여 본 발명의 목적과 특징이 더욱 명확하게 될 것이다.Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention, through which the object and features of the present invention will be more clear.

여기서, 도 2는 본 발명에 따른 복합생체 신호센서의 구성을 표시한 사시도이고, 도 3은 본 발명에 따른 복합생체 신호센서의 시스템 구성도이다. 도 2에 도시된 바와 같이, 복합생체 신호센서(100)는 일면에 2개이상의 독립된 개구부(제1 개구부, 제2 개구부)를 갖고 센서를 유지, 부착하는 기판(140), 상기 (140)기판의 하부에 위치하고 인체의 진동을 감지하는 반도체 압력센서(110), 상기 반도체 압력센서(110)의 상부에 위치하고 인체의 움직임을 감지하는 가속도센서(120), 상기 반도체 압력센서(110)를 몰딩하고 인체에 접촉하여 심전도를 감지하는 전도성 실리콘(160), 상기 전도성 실리콘(160)을 이용한 심전도를 전지적인 신호로 전달하는 심전도 리드선(150), 상기 반도체 압력센서(110)에 나란히 위치하고 인체의 온도를 감지하는 적외선 온도센서(130)로 구성된다.2 is a perspective view showing the configuration of the composite biosignal sensor according to the present invention, and FIG. 3 is a system configuration diagram of the composite biosignal sensor according to the present invention. As shown in FIG. 2, the composite biosignal sensor 100 has two or more independent openings (first openings and second openings) on one surface thereof to hold and attach the sensors 140 and the substrate 140. The semiconductor pressure sensor 110 is located at the bottom of the semiconductor pressure sensor 110 to detect the vibration of the human body, the acceleration sensor 120 is located on the upper portion of the semiconductor pressure sensor 110, and molding the semiconductor pressure sensor 110 and Conductive silicon 160 for sensing an electrocardiogram in contact with a human body, an electrocardiogram lead wire 150 for transmitting an electrocardiogram using the conductive silicon 160 as a battery signal, and are placed side by side on the semiconductor pressure sensor 110 to adjust the temperature of the human body. It consists of an infrared temperature sensor 130 for sensing.

제1 개구부상에 반도체 압력센서(110)가 고정되고, 그 상부에는 PCB기판(140)이 위치하고, 상기 기판(140)위에 가속도 센서(120)가 고정된다.The semiconductor pressure sensor 110 is fixed on the first opening, the PCB substrate 140 is positioned on the upper portion thereof, and the acceleration sensor 120 is fixed on the substrate 140.

가속도센서(120)는 맥파신호 측정시 발생하는 동잡음을 제거하기 위한 것이The acceleration sensor 120 is for removing the dynamic noise generated when measuring the pulse wave signal.

고, 반도체 압력센서(110)는 맥파의 압력을 측정하기 위한 압력센서이며, 적외선 온도센서(130)는 체온을 측정하기 위한 온도센서이다.The semiconductor pressure sensor 110 is a pressure sensor for measuring the pressure of the pulse wave, the infrared temperature sensor 130 is a temperature sensor for measuring the body temperature.

상기 반도체 압력센서(110)와 가속도센서(120)는 기판(140)을 중심으로 대향되게 설치된다.The semiconductor pressure sensor 110 and the acceleration sensor 120 are installed to face the substrate 140.

기판(140)은 독립된 2개의 개구부를 갖고, 상기 제1 개구부에 반도체 압력센서(110)와 적외선 온도센서(130)를 붙이고, 제2 개구부는 적외선 온도센서(130)를 고정한다.The substrate 140 has two independent openings, and the semiconductor pressure sensor 110 and the infrared temperature sensor 130 are attached to the first opening, and the second opening fixes the infrared temperature sensor 130.

그리고, 적외선 온도센서(130) 부근의 빈 공간은 적외선 온도센서와 인체와의 거리를 일정하게 유지하기 위한 것이며, 전도성 실리콘(160)은 이 전극을 통하여 심전도신호를 심전도 리드선(150)에 전달하는 역할을 한다.In addition, the empty space near the infrared temperature sensor 130 is for maintaining a constant distance between the infrared temperature sensor and the human body, and the conductive silicon 160 transmits the ECG signal to the ECG lead wire 150 through the electrode. Play a role.

상기의 센서모듈은 인체의 맥파, 심전도, 체온을 동시에 측정하기 위한 복합센서모듈이고, 여러 생체 신호들을 동시에 측정함으로써 건강진단에 중요한 상기 세가지 요소들에 대한 진단 가능성을 제시하고, 또한 재택건강용 건강진단 시스템에 용이하게 활용하기 위해 제작된다. The sensor module is a complex sensor module for simultaneously measuring the pulse wave, electrocardiogram, and body temperature of the human body, and suggests the possibility of diagnosing the above three factors which are important for health diagnosis by simultaneously measuring several biological signals, and at home health It is designed for easy utilization in diagnostic systems.

본 발명의 복합생체 신호센서(100)는 사용자의 인체에 전도성 고분자소재로 더욱 바람직하게는 전도성 실리콘(160)부분이 접촉되도록 고정되고, 상기 전도성 실리콘(160)을 이용하여 인체의 심전도를 측정하고, 또한 반도체 압력센서(110)를 통하여 맥파의 압력을 검출하고, 그 검출된 압력은 상기 가속도센서(120)에 의해서 보정되는 시스템을 구현한다.The composite bio-signal sensor 100 of the present invention is fixed to the conductive silicon material is more preferably in contact with the conductive polymer material to the user's human body, by measuring the electrocardiogram of the human body using the conductive silicon 160 In addition, the semiconductor pressure sensor 110 detects the pressure of the pulse wave, the detected pressure implements a system that is corrected by the acceleration sensor 120.

그리고 개구부를 통하여 인체의 온도를 상기 적외선 온도센서(130)가 검출한다.The infrared temperature sensor 130 detects the temperature of the human body through the opening.

도 2에 도시된 절연부는 반도체 압력센서(110)가 전도성 실리콘(160)에 의한 단락을 막아주는 역할을 하고, 또 다른 방법으로는 반도체 압력센서(110)의 기판(140) 접촉부의 전극패턴을 변화시키는 것도 있다.The insulating part shown in FIG. 2 serves to prevent the semiconductor pressure sensor 110 from short-circuiting by the conductive silicon 160. In another method, the insulating pattern of the electrode pattern of the contact portion of the substrate 140 of the semiconductor pressure sensor 110 is prevented. Some things change.

도 3에 도시된 바와 같이, 본 발명에 따른 복합생체 신호센서의 시스템 구성도는 가속도센서(120), 반도체 압력센서(110), 심전도 리드선(150), 적외선 온도센 서(130), 보정부(210), 건강진단 시스템(200)으로 구성된다.As shown in FIG. 3, the system configuration diagram of the composite biosignal sensor according to the present invention includes an acceleration sensor 120, a semiconductor pressure sensor 110, an electrocardiogram lead wire 150, an infrared temperature sensor 130, and a correction unit. 210, the health diagnosis system 200.

인체의 맥파 등의 신호는 반도체 압력센서(110)가 검출하고 그 검출한 값과 가속도센서(120)의 출력값을 보정부(210)에서 비교, 연산 및 보정하여 시스템으로 출력한다.A signal such as a pulse wave of a human body is detected by the semiconductor pressure sensor 110, and the correction value 210 compares, calculates, and corrects the detected value and the output value of the acceleration sensor 120 to the system.

이상 본 발명자에 의해서 이루어진 발명을 상기 실시예에 따라 구체적으로 설명하였지만, 본 발명은 상기 실시예에 한정되는 것은 아니고 그 요지를 이탈하지 않는 범위에서 여러가지로 변경가능한 것은 물론이다. As mentioned above, although the invention made by this inventor was demonstrated concretely according to the said Example, this invention is not limited to the said Example and can be variously changed in the range which does not deviate from the summary.

도 1은 종래에 따른 가속도센서 소자의 구성을 표시한 사시도,1 is a perspective view showing the configuration of a conventional acceleration sensor device;

도 2는 본 발명에 따른 복합생체 신호센서의 구성을 표시한 사시도,Figure 2 is a perspective view showing the configuration of the composite bio-signal sensor according to the present invention,

도 3은 본 발명에 따른 복합생체 신호센서의 시스템 구성도이다.3 is a system configuration diagram of a composite biosignal sensor according to the present invention.

*도면의 주요부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *

100 : 복합생체 신호센서100: complex biological signal sensor

110 : 반도체 압력센서110: semiconductor pressure sensor

120 : 가속도센서120: acceleration sensor

Claims (3)

복합생체 신호센서에 있어서,In the composite biosignal sensor, 일면에 개구부를 가진 기판,A substrate having an opening on one side, 상기 센서를 고정하기 위한 기판의 일면에 형성되는 하나 이상의 독립된 개구부,One or more independent openings formed on one surface of the substrate for fixing the sensor; 상기 센서유지기판의 제1 개구부상에 고정되어 인체의 맥파신호를 측정하는 반도체 압력센서,A semiconductor pressure sensor fixed on a first opening of the sensor holding plate to measure a pulse wave signal of a human body; 상기 반도체 압력센서를 감싸고 심전도 신호전달을 하는 제1 개구부에 충진되는 전도성 실리콘,Conductive silicon is filled in the first opening surrounding the semiconductor pressure sensor and the ECG signal, 상기 반도체 압력센서와 센서유지기판을 중심으로 대향되게 설치되어 움직임을 보정하는 가속도센서로 구성되는 것을 특징으로 하는 복합 생체신호 센서.The biosignal sensor of claim 1, wherein the semiconductor pressure sensor and the sensor holding plate are installed to face each other and are configured to include an acceleration sensor to compensate for movement. 제 1항에 있어서,The method of claim 1, 상기 복합 생체신호 센서는 상기 제1 개구부와 분리된 제2 개구부상에 고정되어 인체의 온도를 측정하는 적외선 온도센서를 더 포함하는 것을 특징으로 하는 복합 생체신호 센서.The composite biosignal sensor further comprises an infrared temperature sensor fixed on a second opening separated from the first opening to measure a temperature of a human body. 제 1항에 있어서,The method of claim 1, 상기 움직임 보정은 반도체 압력센서의 출력값을 보정하는 것을 특징으로 하 는 복합 생체신호 센서.The motion compensation is a complex bio-signal sensor, characterized in that for correcting the output value of the semiconductor pressure sensor.
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