KR100877120B1 - High precision balancingmachine rolling shaft supporter applying air bearing - Google Patents

High precision balancingmachine rolling shaft supporter applying air bearing Download PDF

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Publication number
KR100877120B1
KR100877120B1 KR1020070077287A KR20070077287A KR100877120B1 KR 100877120 B1 KR100877120 B1 KR 100877120B1 KR 1020070077287 A KR1020070077287 A KR 1020070077287A KR 20070077287 A KR20070077287 A KR 20070077287A KR 100877120 B1 KR100877120 B1 KR 100877120B1
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South Korea
Prior art keywords
air bearing
shaft
air
support
balancing
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KR1020070077287A
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Korean (ko)
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이동헌
육인수
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주식회사 알피에스
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/50—Hand tools, workshop equipment or manipulators

Abstract

A rotary shaft support of high accurate balancing machine applying the air bearing is provided that the balancing is accurately corrected. A rotary shaft support of high accurate balancing machine applying the air bearing comprises an air bearing which is placed on the top of two balancing support unit(40) and connected to the outer air bearing supplying hose(11), a rotary shaft(20) which is built in the inside of the air bearing, a shaft drive motor(30) which is connected to one side of shaft. The air bearing includes an air bearing nozzle installed at end of a plurality of air supply paths connected to the air bearing supplying hose, an air bearing outside groove which is inserted into the balancing support stand, a space part in which shaft is built.

Description

에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대{High precision balancingmachine rolling shaft supporter applying air bearing}High precision balancing machine rolling shaft supporter applying air bearing}

본 발명은 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대에 관한 것이다.The present invention relates to a high precision balancing machine rotating shaft support to which the air bearing is applied.

일반적으로 베어링 중에서 미끄럼 베어링은 베어링 면과 운동면이 윤활유로 형성된 미끄럼 막을 사이에 두고 접촉하고 있으므로 윤활유의 종류에 따라 다소 차이가 있기는 하지만 마찰,소음,열 발생 등 두 면이 마찰함으로써 야기되는 어느 정도의 기계적 손실은 피할 수 없게 된다.In general, the sliding bearing in the bearing contact the bearing surface and the moving surface with the sliding film formed by the lubricating oil in between. However, the sliding bearing is somewhat different depending on the type of lubricating oil. A degree of mechanical loss is inevitable.

이러한 기계적 손실을 배제하여 베어링의 성능을 향상시키기 위해 개발된 것이 공압식 베어링이며,이 베어링의 대표적인 예로서 에어 베어링을 들 수 있다.Pneumatic bearings have been developed to exclude such mechanical losses and improve the performance of bearings, and air bearings are a representative example of these bearings.

에어 베어링은 가이드 레일과 슬라이더 사이의 베어링 틈새에 압축공기를 분사시켜 형성되는 공기압에 의해 슬라이더를 부상시켜 하중을 지지하도록 되어 있으며, 슬라이더와 가이드 레일의 형상에 따라 장방형 또는 T자형으로 나눌 수 있다.The air bearing floats the slider by the air pressure formed by injecting compressed air into the bearing gap between the guide rail and the slider to support the load, and may be divided into a rectangular or a T shape according to the shape of the slider and the guide rail.

예를 들면, 국내등록특허공보 등록번호 제10-367987호에는 모타의 일측과 회전자의 일측 연장선상에 형성된 스핀들의 외경면에 소정의 이격공간을 가지며 결합 되어 스핀들의 외경면에 에어를 분사하여 스핀들이 에어와 접동회전토록하는 제1에어노즐을 다수개 마련한 노즐본체와, 상기 제1에어노즐로 에어를 공급하기 위한 제1에어유로가 다수개 형성된 스핀들 하우징을 가지며 스핀들하우징의 타측이 고정캡으로 고정된 에어베어링스핀들의 구조에 있어서, 상기 고정캡의 일측 내측면에 매설되어 회전자의 타측 지지축으로부터 소정의 이격공간을 가지도록 결합되어 상기 지지축의 외측면에 에어를 분사하도록 된 제2에어노즐을 다수개 형성한 보조지지체와, 상기 보조지지체의 제2에어노즐을 통하여 상기 회전자의 지지축에 공기를 공급하기 위하여 상기 고정캡으로 연결되도록 상기 보조지지체에 형성된 제2에어유로와, 상기 제1에어노즐로부터 분사되는 에어와 마찰되는 스핀들의 외경면에 마찰을 방지하도록 코팅 형성된 세라믹층을 포함하여 이루어진 에어베어링 스핀들의 구조가 기재되어있고,For example, Korean Patent Publication No. 10-367987 has a predetermined separation space on the outer diameter surface of the spindle formed on one side of the motor and one extension line of the rotor and is coupled to spray the air on the outer diameter surface of the spindle It has a nozzle body provided with a plurality of first air nozzles for causing the spindle to slide with the air, and a spindle housing formed with a plurality of first air passages for supplying air to the first air nozzles, the other side of the spindle housing is fixed cap In the structure of the fixed air bearing spindles, the second buried in one inner surface of the fixed cap coupled to have a predetermined space from the other support shaft of the rotor to inject air to the outer surface of the support shaft In order to supply air to the support shaft of the rotor through the auxiliary support formed with a plurality of air nozzles and the second air nozzle of the auxiliary support A second air flow path formed in the auxiliary support to be connected to the fixed cap, and an air bearing spindle including a ceramic layer coated to prevent friction on an outer diameter surface of the spindle that is rubbed with air injected from the first air nozzle. The structure is listed,

일본출원번호 제1991-112058호(1991.12.25)에는 회전축과 회전축을 스러스트 방향, 래디얼 방향에 비접촉식으로 지지하는 에어베어링의 구성을 포함하고 에어를 공급하는 에어공급로가 구비되어 에어링의 내부에 다수개의 노즐이 설치되고 노즐을 통해 에어베어링 내부의 회전체를 부상시키는 기술구성이 기재되어 있으며,Japanese Patent Application No. 1991-112058 (1991.12.25) includes a configuration of an air bearing for supporting the rotary shaft and the rotary shaft in a thrust direction and a radial direction in a non-contact manner, and includes an air supply path for supplying air, Two nozzles are installed and the technical configuration for floating the rotor inside the air bearing through the nozzle is described,

국내공개특허공보 공개번호 제10-2006-97389호에는 종방향으로 길게 뻗어 있는 봉형상의 가이드 레일과, 상기 가이드 레일의 둘레 부분에 베어링 틈새만큼 일정한 간격이 유지된 채로 끼워져 있는 슬라이더를 가진 에어 베어링에 있어서, 상 기 슬라이더의 적어도 일측부는, 상기 슬라이더에 고정된 고정 브라켓과, 상기 가이드 레일와 상기 고정 브라켓 사이에 끼워져 조절 부재에 의해 상기 가이드 레일 사이의 틈새가 조절가능케 된 조절판이 결합된 구조로 되어 있는 것을 특징으로 하는 에어 베어링이 기술되어 있고,Korean Laid-Open Patent Publication No. 10-2006-97389 discloses an air bearing having a rod-shaped guide rail extending in the longitudinal direction and a slider which is inserted in the circumferential portion of the guide rail with a constant distance as much as a bearing gap. The at least one side of the slider has a structure in which a fixed bracket fixed to the slider and a control plate fitted between the guide rail and the fixed bracket and adjusted by the adjustment member to adjust the clearance between the guide rails. Air bearings are characterized by

동 공보 공개번호 제10-1997-8787호에는 하우징과 허브간을 반구형 에어베어링으로 지지하는 스핀들 모터에 있어서, 상기 에어 베어링의 반구와 면결합되는 모터축의 외주면 일부를 축방향으로 면가공하여 반구와 면결합되지 않는 측면홀을 형성하고, 모터축의 중심에는 축방향으로 관통되게 수직홀이 형성되며, 상기 수직홀과 상, 하 반구의 사이를 방사상으로 관통되게 하면서 측면홀과 연통되는 수평홀이 형성되도록하여 반구와 반구간 및 반구와 반구집간 갭으로 항상 공기가 유입되면서 일정한 갭이 유지될 수 있도록 하는 에어 베어링 타입의 스핀들 모터가 공개되어 있으나,Korean Patent Publication No. 10-1997-8787 discloses a spindle motor for supporting a hemisphere air bearing between a housing and a hub, wherein a part of the outer circumferential surface of the motor shaft that is surface-engaged with the hemisphere of the air bearing is axially machined. A side hole which is not face-coupled is formed, and a vertical hole is formed in the center of the motor shaft in the axial direction, and a horizontal hole is formed in communication with the side hole while radially penetrating between the vertical hole and the upper and lower hemispheres. The air bearing type spindle motor is disclosed so that a constant gap is maintained while air is always introduced into the gap between the hemisphere and the hemisphere and the hemisphere and the hemisphere.

상기와 같은 종래의 기술들은 회전축 지지대는 "V" 형상의 구조로 접촉식 지지대로 구성되어 접촉되는 부분이 마모되어 불량률이 높은 문제점이 있어 왔다. The prior art as described above has a problem that the rotating shaft support is configured as a contact support in the structure of the "V" shape, the contact portion is worn and the defect rate is high.

본 발명은 상기와 같은 문제점을 해결하고자, 종래의 발란싱머신의 회전축 지지대는 "V" 형상의 구조로 접촉식 지지대로 구성되어 접촉되는 부분이 마모되어 불량률이 높았으나, 본 발명은 비접촉식 에어베어링 타입의 지지대를 사용하여 회전축과 지지대와의 접촉을 없게 하여 마찰이 없어 더욱 정밀한 발란싱교정을 할 수 있는 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대를 제공하는 것이 본 발명이 이루고자 하는 기술적 과제인 것이다.The present invention, in order to solve the above problems, the rotating shaft support of the conventional balancing machine is configured as a contact support in the "V" shape of the contact portion is worn out, but the failure rate is high, the present invention is a non-contact air bearing type It is a technical object of the present invention to provide a high-precision balancing machine rotating shaft support applying an air bearing that can be more precise balancing correction without friction by eliminating contact between the rotating shaft and the support using the support.

상기와 같은 목적을 달성하기 위하여 본 발명은 두 개의 발란싱지지대(40)의 상부에 안치되며 외부의 에어베어링공급호스(11)에 연결된 에어베어링(10)과, 상기 에어베어링(10)의 내측에 내장되어 회전되는 샤프트(20)와, 상기 샤프트(20)의 일측에 연결되어 샤프트(20)를 구동시키는 샤프트구동모터(30)로 구성된 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대에 관한 것이다.In order to achieve the above object, the present invention is placed in the upper portion of the two balancing support 40, the air bearing 10 connected to the external air bearing supply hose 11 and the inside of the air bearing 10 It relates to a high-precision balancing machine rotary shaft support is applied to the built-in rotating shaft 20, the air bearing consisting of a shaft drive motor 30 is connected to one side of the shaft 20 to drive the shaft 20.

상기와 같은 본 발명은 비접촉식 에어베어링 타입의 지지대를 사용하여 회전축과 지지대와의 접촉을 없게 하여 마찰이 없어 더욱 정밀한 발란싱교정을 하기 위하여, 에어가 공급되면 에어베어링의 내부에 노즐이 여러개 설치되며, 상기 노즐을 통해 에어베어링 안에 있는 회전체인 샤프트를 부상시켜 주며, 부상된 샤프트는 외부의 영향을 아주 적게 받음으로서 정확한 후작업(발란싱교정)을 할 수 있는 장점이 있는 것이다.As described above, the present invention uses a non-contact air bearing type support to prevent contact between the rotating shaft and the support so that there is no friction, so that more precise balancing correction is provided. When air is supplied, a plurality of nozzles are installed inside the air bearing. Through the nozzles to float the shaft of the rotating chain in the air bearing, the injured shaft is an advantage that can be accurate post-working (balancing correction) by receiving a very small external influence.

본 발명은 에어가 공급되면 에어베어링의 내부에 노즐이 여러개 설치되며, 상기 노즐을 통해 에어베어링 안에 있는 회전체인 샤프트를 부상시켜 주며, 부상된 샤프트는 외부의 영향을 아주 적게 받음으로서 정확한 후작업(발란싱교정)을 할 수 있으며,According to the present invention, when air is supplied, a plurality of nozzles are installed inside the air bearing, and through the nozzles, the rotating chain in the air bearing is floated, and the injured shaft is influenced by the outside so that accurate post-working is possible. (Balanced Calibration)

샤프트의 일측에 작업하고자 하는 정밀기기 또는 반도체부품을 연결하여 회전정밀작업을 할 수 있도록 하는 장치인 것이다.It is a device to connect the precision equipment or semiconductor parts to work on one side of the shaft to perform the rotation precision work.

샤프트구동모터가 작동되면, 샤프트는 회전력이 전달되어 회전하며, 만약 샤프트가 정밀하지 않다면(발란싱되지 않으면) 회전운동이 정확하게 전달하지 못하여 오차범위가 큰 폭으로 회전운동을 하여 정밀한 작업을 하기 어렵기 때문에 본 발명에서는 우선 샤프트의 발란싱교정을 한후에, 발란싱교정된 샤프트를 이용하여 정밀기기나 반도체 부품의 정밀 작업을 할 수 있도록 하는 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대를 발명한 것이다.When the shaft drive motor is operated, the shaft is rotated by the transmission of rotational force, and if the shaft is not precise (unbalanced), the rotational movement cannot be transmitted accurately and it is difficult to perform precise work by rotating the rotation with a large error range. Therefore, the present invention invented a high-precision balancing machine rotary shaft support to which an air bearing is applied to enable precision work of a precision device or a semiconductor component by first using a balanced calibration shaft.

본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대를 도면을 참고하여 상세히 설명하면 다음과 같다. The high-precision balancing machine rotary shaft support to which the air bearing of the present invention is applied will be described in detail with reference to the accompanying drawings.

도1 본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대 전체도, 도2 본 발명의 에어베어링 상세도, 외부(2A), 내부(2B), 도3 본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대 조립상세도, 도4 본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대 측단면 상세도를 도시한 것이며, 에어베어링(10), 에어베어링공급호스(11), 에어베어링노즐(12), 에어베어링외부홈(15), 샤프트(20), 샤프트구동모터(30), 발란싱지지대(40)를 나타낸 것임을 알 수 있다. 1 is an overall view of a high precision balancing machine rotary shaft support to which the air bearing of the present invention is applied, FIG. 2 is a detailed view of the air bearing of the present invention, external 2A, internal 2B, and FIG. 3 a high precision balancing machine rotary shaft to which the air bearing of the present invention is applied. 4 is a detailed cross-sectional view showing a side surface of the support shaft of the high precision balancing machine to which the air bearing of the present invention is applied. The air bearing 10, the air bearing supply hose 11, the air bearing nozzle 12, and the air are shown in FIG. It can be seen that the bearing outer groove 15, the shaft 20, the shaft drive motor 30, the balancing support 40.

구조를 살펴보면, 도1 내지 도3에 도시된 바와 같이, 두 개의 발란싱지지대(40)의 상부에 안치되며 외부의 에어베어링공급호스(11)에 연결된 에어베어링(10)과, 상기 에어베어링(10)의 내측에 내장되어 회전되는 샤프트(20)와, 상기 샤프트(20)의 일측에 연결되어 샤프트(20)를 구동시키는 샤프트구동모터(30)로 구성되며,Looking at the structure, as shown in Figures 1 to 3, the air bearing 10 is placed on the upper portion of the two balancing support 40 and connected to the external air bearing supply hose 11 and the air bearing 10 It is composed of a shaft 20 is built in the inner rotation and the shaft drive motor 30 is connected to one side of the shaft 20 to drive the shaft 20,

상기 에어베어링(10)은 링형상으로, 외부의 에어베어링공급호스(11)에 연결된, 내부(테두리)에는 상기 에어베어링공급호스(11)와 연결된 다수개의 에어공급통로의 끝단부에 설치된 에어베어링노즐(12)과,The air bearing 10 has a ring shape and is connected to an external air bearing supply hose 11, and an air bearing installed at an end portion of a plurality of air supply passages connected to the air bearing supply hose 11 in an inner (border). The nozzle 12,

외측에 발란싱지지대(40)에 삽입되어 이탈을 방지하도록 일정간격 이격되어 형성된 두 개의 에어베어링외부홈(15)과,Two air bearing outer grooves 15 inserted into the balancing support 40 on the outside and spaced apart from each other to prevent separation;

내부는 샤프트(20)가 내장되는 공간부로 구성된 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대의 구조인 것이다.Inside is a structure of a high precision balancing machine rotating shaft support to which the air bearing consisting of a space portion in which the shaft 20 is built.

조립 및 사용상태를 설명하면, Explain the assembly and use state,

상기 두 개의 발란싱지지대(40) 상부에 일측에 에어베어링(10)을 설치하되, 상기 에어베어링(10)의 에어베어링외부홈(15)에 상기 발란싱지지대(40)의 상부를 삽입 고정하여 외부로 이탈을 방지하고,An air bearing 10 is installed on one side of the two balancing support 40, and the upper portion of the balancing support 40 is inserted into and fixed to the air bearing outer groove 15 of the air bearing 10. Prevent churn,

상기 에어베어링(10)의 내측 공간에 샤프트(20)를 삽입시키되 샤프트(20)의 일측에는 샤프트구동모터(30)를 설치하여 조립을 한 다음,Insert the shaft 20 into the inner space of the air bearing 10, but the shaft drive motor 30 is installed on one side of the shaft 20, then assembled,

상부에 설치된 에어베어링공급호스(11)에 공기를 주입하면, 에어베어링(10) 내의 에어공급통로의 끝단부에 설치된 에어베어링노즐(12)을 따라 에어가 에어베어링(10)내의 전체에 걸쳐 공급되어 에어베어링(10)내에 삽입된 샤프트(20)를 부양시킨 다음,When air is injected into the air bearing supply hose 11 installed at the upper portion, air is supplied throughout the air bearing 10 along the air bearing nozzle 12 installed at the end of the air supply passage in the air bearing 10. To support the shaft 20 inserted into the air bearing 10,

샤프트구동모터(30)를 작동시켜 샤프트(20)를 회전시켜 작업을 하도록 하는 작동방법인 것이다.By operating the shaft drive motor 30 is to operate the operation to rotate the shaft 20.

도1 본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대 전체도1 is an overall view of a high precision balancing machine rotating shaft support to which the air bearing of the present invention is applied

도2 본 발명의 에어베어링 상세도2 is a detailed view of the air bearing of the present invention

외부(2A), 내부(2B)       External (2A), Internal (2B)

도3 본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대 조립상세도3 is a high-precision balancing machine rotary shaft support assembly assembly to which the air bearing of the present invention is applied

도4 본 발명의 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대 측단면 상세도Figure 4 is a side cross-sectional view of the high precision balancing machine rotary shaft support to which the air bearing of the present invention is applied

<도면의 부호설명> <Description of the Drawings>

에어베어링(10), 에어베어링공급호스(11), 에어베어링노즐(12), 에어베어링외부홈(15), 샤프트(20), 샤프트구동모터(30), 발란싱지지대(40).Air bearing (10), air bearing supply hose (11), air bearing nozzle (12), air bearing outer groove (15), shaft (20), shaft drive motor (30), balancing support (40).

Claims (1)

에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대에 있어서,In the high precision balancing machine rotary shaft support with air bearing, 두 개의 발란싱지지대(40)의 상부에 안치되며 외부의 에어베어링공급호스(11)에 연결된 에어베어링(10)과, 상기 에어베어링(10)의 내측에 내장되어 회전되는 샤프트(20)와, 상기 샤프트(20)의 일측에 연결되어 샤프트(20)를 구동시키는 샤프트구동모터(30)로 구성되며, An air bearing 10 which is settled on top of the two balancing supports 40 and connected to an external air bearing supply hose 11, a shaft 20 which is internally rotated inside the air bearing 10, and the Is connected to one side of the shaft 20 is composed of a shaft drive motor 30 for driving the shaft 20, 상기 에어베어링(10)은 링형상으로, 외부의 에어베어링공급호스(11)에 연결된, 에어베어링의 안쪽면(내부)에는 상기 에어베어링공급호스(11)와 연결된 다수개의 에어공급통로의 끝단부에 설치된 에어베어링노즐(12)과,The air bearing 10 has a ring shape, and ends of a plurality of air supply passages connected to the air bearing supply hoses 11 on an inner surface (inside) of the air bearings connected to an external air bearing supply hose 11. An air bearing nozzle (12) installed on the 에어베어링(10)의 외측에 발란싱지지대(40)에 삽입되어 이탈을 방지하도록 일정간격 이격되어 형성된 두 개의 에어베어링외부홈(15)과,Two air bearing outer grooves 15 inserted into the balancing support 40 on the outside of the air bearing 10 and spaced apart from each other to prevent separation; 에어베어링(10)의 내부는 샤프트(20)가 내장되는 공간부를 포함하여 구성되어 있음을 특징으로 하는 에어베어링을 적용한 고정밀 발란싱머신 회전축 지지대.The inside of the air bearing 10 is a high-precision balancing machine rotary shaft support applied to the air bearing, characterized in that it comprises a space portion in which the shaft 20 is built.
KR1020070077287A 2007-08-01 2007-08-01 High precision balancingmachine rolling shaft supporter applying air bearing KR100877120B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298048U (en) 1976-01-21 1977-07-23
KR20060004301A (en) * 2004-07-09 2006-01-12 삼성테크윈 주식회사 Air supplying structure for axial bearing, and axial magnetic bearing with it

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298048U (en) 1976-01-21 1977-07-23
KR20060004301A (en) * 2004-07-09 2006-01-12 삼성테크윈 주식회사 Air supplying structure for axial bearing, and axial magnetic bearing with it

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