KR100860801B1 - A phase-change type micro actuator and temperature control method of actuating chamber in micro actuator and micro pump using this micro actuator - Google Patents

Abstract

The micro driver used in the micro pump according to the present invention includes: a lower substrate having a micro heater which generates heat when a voltage is applied; A working liquid chamber configured to put a working liquid on an upper portion of the lower substrate having the heater therein; And a driving thin film made to expand while the working liquid is vaporized by the heat generated from the heater, and when the voltage is applied, the thin film expands to a pressure generated by evaporating the working liquid filled in the working liquid chamber with the heat generated by the heater, and the heater Breaking the voltage applied to causes the membrane to shrink back into its original form as the vapor condenses.

In addition, the present invention, the temperature sensor for measuring the temperature of the working liquid chamber; And setting a reference temperature of the working liquid chamber to be kept constant, determining whether or not the temperature of the working liquid chamber is the reference temperature, and maintaining the current state if the temperature of the working liquid chamber is the reference temperature. If the temperature of the working fluid chamber is not the reference temperature to control the heater power to maintain a temperature of the working fluid chamber at the reference temperature further comprises a case, the phase change of the working fluid in the working fluid chamber maintained at the reference temperature , Through the fine adjustment of the power applied to the heater is characterized in that to make the phase change of the working fluid as soon as possible.

 Micro actuator, micro pump, electric heater, temperature sensor, phase change

Description

A phase-change type micro actuator and temperature control method of actuating chamber in micro actuator and micro pump using this micro actuator}

1 is a cross-sectional view of a micro driver according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a micro driver in which a contact surface between a lower substrate with a heater and a working liquid in an automatic liquid chamber is formed in an uneven shape to increase the contact surface.

3 is a plan view of a lower substrate of a micro driver according to an embodiment of the present invention.

4 is a cross-sectional view of a micropump configured by bonding an upper substrate including an oil inlet / outlet, a valve, and a pumping liquid chamber to the driver as an application example of a microdriver according to an embodiment of the present invention.

FIG. 5 is an exploded perspective view of a micropump configured by joining an upper substrate including an oil inlet / outlet, a valve, and a pumping liquid chamber to the driver as an application example of a microdriver according to an embodiment of the present invention.

6 is a manufacturing process diagram of a micro driver according to an embodiment of the present invention.

7A is a graph illustrating a method of controlling a temperature of a working liquid chamber in a phase change type micro driver according to an embodiment of the present invention.

7B is a graph for explaining a method of controlling a temperature in a working liquid chamber of a phase change type micro driver according to another exemplary embodiment of the present invention.

8 is a flowchart illustrating a method of controlling a temperature in a working liquid chamber in a phase change type micro driver according to an embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

1: heater 2: temperature sensor

3: lower substrate 4: driving thin film

5: working fluid chamber 6: working fluid inlet

7a: protrusion 7b: groove

11: inlet 12: outlet

13: diffuser 14: upper substrate

15: pumping liquid chamber 21: silicon substrate (= lower substrate)

22: silicon oxide 23: metal layer

24: adhesive side

The present invention relates to a phase change drive type micro driver used in a micro pump and a temperature control method of the operating liquid chamber of the driver, and in particular, to make the phase change of the working liquid as quickly as possible even through fine adjustment of the power applied to the heater. A micro driver and a method for controlling the temperature in a working liquid chamber of the driver.

The micro pump developed so far is designed to be used for the fluid transfer of the analysis system. In this case, the power consumption of the micro pump was not an important issue since the power consumption rate of the micro pump was not large compared to the power consumption of the entire system.

However, in the case of micro pumps that are recently used in micro fuel cells, various portable and wearable IT devices, and bio and medical devices, the power consumption of the micro pump is the biggest factor that affects the one-time charge usage time of the device. Doing. Against this backdrop, the micro-pump used in the ultra-small fuel cell, portable and wearable IT devices, and bio-medical devices has the characteristics of high energy efficiency and low power consumption while performing the original pump function by applying precise control or improved driving principle. It is very important to have.

The present invention relates to a phase change type micro driver for a high energy efficiency, low power consumption micro pump required in the application of micro fuel cell, portable / wearable IT device, and bio / medical device, and a temperature control method in a working liquid chamber in the micro driver. I would like to present.

An object of the present invention is a phase change type micro driver for maintaining a constant temperature in the working liquid chamber in order to make the phase change of the working liquid as fast as possible even through fine adjustment of the power applied to the heater, the working liquid chamber of the driving apparatus. It is to provide a temperature control method and a micro pump applying this driver.

The phase change driven micropump proposed in the present invention can quantitatively supply and control a liquid sample of several nano (10 ^-9 ) liters to several hundred micro (10 ^-6 ) liters per second. The micropump of the present invention is a thermopneumatic micro-driven device that uses a volume expansion phenomenon that occurs when a phase change from liquid to gas.

The phase change driving method can obtain a large driving force at a low voltage. The membrane used in the phase change micro actuator is made of highly elastic silicon rubber which can obtain a large deformation even with a small driving force. The micropump of the present invention has a pair of passive microvalve, which has the function of a check valve to prevent backflow. The micropump of the present invention has a simple structure, can be manufactured by micromachining technology, a simple manufacturing process, and can be integrated.

In order to achieve the above object, the present invention provides a micro driver for a micro pump, comprising: a lower substrate having a micro heater which generates heat when a voltage is applied; A working liquid chamber configured to put a working liquid on an upper portion of the lower substrate having the heater therein; And a driving thin film made to expand while the working liquid is vaporized by the heat generated from the heater, and when the voltage is applied, the thin film expands to a pressure generated by evaporating the working liquid filled in the working liquid chamber with the heat generated by the heater, and the heater When the voltage applied to the power is cut off, the film condenses as the vapor condenses.

A temperature sensor for measuring the temperature of the working liquid chamber; And setting a reference temperature of the working liquid chamber to be kept constant, determining whether or not the temperature of the working liquid chamber is the reference temperature, and maintaining the current state if the temperature of the working liquid chamber is the reference temperature. If the temperature of the working fluid chamber is not the reference temperature to control the heater power to maintain a temperature of the working fluid chamber at the reference temperature further comprises a case, the phase change of the working fluid in the working fluid chamber maintained at the reference temperature , Through the fine adjustment of the power applied to the heater is characterized in that to make the phase change of the working fluid as soon as possible.

The adhesion between the driving thin film and the lower substrate may be performed by coating and patterning a photosensitive film to selectively adhere the driving thin film to the lower substrate, and surface treating the photosensitive film patterned lower substrate with oxygen plasma for a predetermined time period. The driving thin film made of silicon rubber is brought into close contact with the surface of the lower substrate to be treated at a predetermined pressure for a predetermined time, so that the driving thin film is adhered to the lower substrate by a covalent bond occurring on the close surface. .

In the present invention, the micro-pump may further include a fluid space and a flow path at an upper side of the driving thin film and bordered with the driving thin film.

In the present invention, the phase change type micro driver,

A pumping liquid chamber in which a volume is changed by a movement of the driving thin film; An inlet and an outlet connected to the pumping liquid chamber and into and out of the fluid; And an upper substrate including a pair of diffusers designed between the pumping liquid chamber and the inlet port, and between the pumping liquid chamber and the outlet port, to form a micropump.

In addition, the present invention is a temperature control method for maintaining a constant temperature in the working fluid chamber in a phase change micro driver,

Setting a reference temperature of the working liquid chamber to be kept constant; Measuring the temperature of the working fluid chamber; Determining whether or not the temperature of the working liquid chamber is the reference temperature; And maintaining the current state if the temperature of the working liquid chamber is the reference temperature, and controlling the heater power if the temperature of the working liquid chamber is not the reference temperature to maintain the temperature of the working liquid chamber at the reference temperature. ,

When a phase change of the working liquid in the working liquid chamber maintained at the reference temperature is performed, the phase change of the working liquid may be made as quickly as possible by fine adjustment of the power applied to the heater.

In the present invention, the reference temperature of the working liquid chamber to be kept constant may be set to a maximum temperature while being less than the phase change temperature of the working liquid, or may be set to a minimum temperature while exceeding the phase change temperature of the working liquid.

Examples of the heater power control method include a method of controlling the duty ratio of the voltage pulse applied to the heater, or a method of controlling the period of the voltage pulse applied to the heater.

It is preferable to use the RTD sensor to measure the temperature of the working liquid chamber.

In the present invention, the surface of the working fluid chamber is designed to have a concave-convex shape to increase the contact area between the working liquid in the working liquid chamber and the heater attachment surface, so that the working liquid can be vaporized and condensed quickly.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view of a micro driver according to an embodiment of the present invention.

Referring to the drawings, the micro driver according to the present invention includes a lower substrate (3) containing a micro heater (1) for generating heat when a voltage is applied; A working liquid chamber 5 formed to allow the working liquid to be introduced into the upper part of the lower substrate in which the heater 1 is embedded through the working liquid inlet 6; Including a drive thin film (4) made to be expanded by the vapor pressure generated while the working liquid is vaporized by the heat generated by the heater 1, when the voltage is applied to the working liquid chamber (5) by the heat generated by the heater (1) The driving thin film 4 expands with the pressure generated while the filled working liquid is vaporized, and when the voltage is not applied to the heater 1, the thin film 4 is contracted in a circular shape while the vaporized vapor condenses.

In addition, the present invention further includes a temperature sensor 2 and a controller (not shown), wherein the temperature sensor 2 measures the temperature of the working liquid chamber 5.

The control unit sets a reference temperature of the working liquid chamber 5 to be kept constant, determines whether or not the temperature of the working liquid chamber 5 is the reference temperature, and if the temperature of the working liquid chamber is the reference temperature, The state is continuously maintained, and if the temperature of the working liquid chamber 5 is not the reference temperature, the power applied to the heater 1 is controlled to maintain the temperature of the working liquid chamber 5 at the reference temperature.

As will be described in detail with reference to FIG. 7, the reference temperature of the working liquid chamber to be kept constant depends on the type of working liquid in the working liquid chamber and also depends on the phase change method. Here, the phase change method refers to a phase change from a liquid to a gas and a phase change from a gas to a liquid.

As described above, the reason for keeping the temperature of the working liquid chamber constant is to make the phase change of the working liquid in the working liquid chamber easy and quick.

In other words, it is possible to make the phase change of the working liquid as quickly as possible by fine-tuning the power applied to the heater while maintaining the temperature of the working liquid chamber at a constant temperature, thereby enabling quick on / off control of the valve. (See Fig. 7).

The heater power control method may vary, but for example, a method of controlling the duty ratio (%) of the voltage pulse applied to the heater, a method of controlling the period of the voltage pulse applied to the heater, and the like.

The material of the heater 1 is preferably a metal material, and the temperature sensor 2 is preferably a platinum RTD sensor.

FIG. 2 is a cross-sectional view of a micro driver in which a contact surface between a lower substrate on which a heater is attached and a working liquid in a working liquid chamber is formed in an uneven shape to increase the contact surface.

As shown in the figure, in the present invention, in order to increase the contact area of the lower substrate 3 in contact with the working liquid in the working liquid chamber 5, the heater 1 and the temperature sensor 2 of the lower substrate 3 ) The attachment surface was designed to have an uneven shape. Reference numeral 7a denotes a protrusion, and 7b denotes a recess.

In more detail, in the present invention, in the process of vaporizing the working liquid in the working liquid chamber 5 by heating with the heater 1, the heat generated from the heater 1 is lower than the operating liquid has a high electrical conductivity Since the temperature of the substrate 3 is rapidly raised, heat transfer to the working liquid chamber is made not only through the heater 1 but also through the surface of the lower substrate 3. On the contrary, even in the process of cooling and condensing the vaporized working liquid vapor, when the lower substrate 3 is cooled by relatively low outside air, heat is transferred through the contact surface between the lower substrate 3 and the working liquid. .

Therefore, as shown in FIG. 2, if the surface of the lower substrate is designed to have an uneven shape to increase the contact area with the working liquid, the response characteristic of the driver may be improved by vaporizing or condensing a larger amount of the working liquid more quickly.

3 is a plan view of the lower substrate 3 of the micro driver according to the embodiment of the present invention.

The figure shows an example of the arrangement of the concave-convex contact surface and the heater 1 and the temperature sensor 2 designed on the lower substrate 3 described in FIG. 2 so as to make it easier to understand.

4 and 5 are cross-sectional views and exploded perspective views of a micro pump formed by joining an upper substrate including an oil inlet / outlet, a valve, and a pumping liquid chamber to an example of an application of a micro driver according to an embodiment of the present invention.

In the present invention, the pumping liquid chamber 15 is a space that changes the volume by the movement of the drive membrane 5; Inlet 11 and outlet 12 connected to the pumping liquid chamber 15 to enter and exit the fluid; By further bonding an upper substrate 14 comprising a pair of diffusers 13 designed between the pumping liquid chamber 15 and the inlet 11, between the pumping liquid chamber 15 and the outlet 12. As shown in FIG. 3, a micropump may be configured.

6 is a manufacturing process diagram of a micro driver according to an embodiment of the present invention.

As shown in FIG. 6A, silicon oxide 22 was deposited on a P-type silicon substrate 21 using a heating furnace. The silicon oxide 22 serves as a protective film to protect the silicon wafer during the etching process along with the photosensitizer to help fabricate a precisely shaped driver.

Next, as shown in FIG. 6b, the working liquid chamber 5 having a concave-convex shape is formed through a photolithography process using Deep RIE (Reactive Ion Etching) equipment.

Next, to insulate the etching surface, silicon oxide 22 is deposited once again using a chemical vapor deposition (CVD) process as shown in FIG. 6C.

Next, after the photoresist is coated and patterned, the photoresist is selectively applied to the remaining portions except the portion where the heater and the temperature sensor are to be deposited, and then deposited in the order of titanium and platinum using an E-Beam Evaporator. In the case of depositing only platinum, since the adhesion with silicon oxide is not good, there is a risk of dropping resistance after the process, so that titanium with good adhesion to silicon oxide and platinum is first deposited to increase adhesion. After the deposition is finished, the photosensitive agent is melted, so that only the desired portion of the metal layer 23 remains as shown in FIG. 6D to form the heater 1 layer and the temperature sensor 2.

Next, to insulate the upper surface of the metal layer 23, the silicon oxide 22 is deposited once again using a chemical vapor deposition (CVD) process as shown in FIG. 6E.

Next, in order to reduce the heat capacity of the lower substrate, as shown in FIG. 6F, a lower portion of the substrate is etched by using a photolithography process using Deep RIE (Reactive Ion Etching) equipment to make the thickness of the lower substrate in contact with the working liquid chamber 5 thin.

Finally, as a series of steps for adhering the driving thin film 4 to the lower substrate (3) produced by the above process, applying and patterning a photosensitive film to selectively adhere only the adhesive surface (24); Surface-treating the lower substrate patterned with the photoresist with oxygen plasma for a predetermined time; The driving thin film 4 of the silicon rubber material is brought into close contact with the surface of the surface-treated lower substrate at a predetermined pressure for a predetermined time, so that the driving thin film 4 is formed by covalent bonding occurring on the adhered adhesive surface 24. And the lower substrate 3 are bonded in order.

FIG. 7A is a graph illustrating a method of controlling a room temperature in a working liquid in a phase change micro driver according to an embodiment of the present invention, and FIG. 7B is a working liquid in a phase change micro driver according to another embodiment of the present invention. This is a graph for explaining a method of controlling room temperature. 8 is a flowchart illustrating a method of controlling a temperature of a working liquid chamber in a phase change micro driver according to an exemplary embodiment of the present invention.

In FIG. 7A and FIG. 7B, the straight line a shows the phase change temperature of the working liquid in the working liquid chamber, and the straight line b is the reference temperature of the working liquid chamber to be kept constant. The driving wave (c) is a voltage pulse applied to the heater, and the waveform (d) shows the temperature of the working liquid when the same voltage as the waveform (c) is applied to the heater.

The difference between FIG. 7A and FIG. 7B is that the straight line b is located below the straight line a in FIG. 7A, and the straight line b is located above the straight line a in FIG. 7B.

In more detail, in FIG. 7A, a heater or the like is controlled to set the temperature b in the working liquid chamber lower than the phase change temperature a of the working liquid. Then, when the fluid through the phase change is to proceed in the forward direction, the temperature applied to the current heater is raised a little more (Δt or more) to make the working liquid vaporized. Where Δt is the phase change temperature-the temperature in the working fluid chamber. When the working fluid is changed from vaporized to liquefied, lower the temperature in the working fluid chamber and keep it constant at temperature (b).

The gist of the present invention is to minimize the Δt to fine-tune the voltage applied to the heater to achieve a fast phase change. To do this, the temperature in the working fluid chamber is kept constant.

On the other hand, in FIG. 7B, the heater or the like is controlled to set the temperature b in the working liquid chamber higher than the phase change temperature a of the working liquid. Then, when proceeding with the fluid through the phase change in the forward direction, the temperature is currently applied to the heater a little lower (Δt or more) to make the working liquid liquefied. To change the working fluid back to vaporization, increase the temperature in the working fluid chamber and keep it constant at temperature (b).

Accordingly, in the present invention, it is preferable to keep the temperature (b) in the working liquid chamber as close as possible to the phase change temperature (a) of the working liquid. That is, the reference temperature of the working fluid chamber to be kept constant is set to the maximum temperature below the phase change temperature of the working liquid as in the case of FIG. 7A, or the minimum is exceeding the phase change temperature of the working liquid as in the case of FIG. 7B. It is preferable to set the temperature. In other words, it is sufficient that Δt is a value close to '0' rather than '0'.

Referring to FIG. 8, a method of controlling a temperature of a working liquid chamber in a phase change micro driver according to an exemplary embodiment of the present invention is as follows.

First, in the present invention, the reference temperature of the working liquid chamber to be kept constant is set.

The reference temperature depends on the working fluid. This working liquid is preferably a liquid having a low heat of evaporation, a chemically stable liquid and having a boiling point optimized for the use environment.

In addition, although the reference temperature may be set in two cases as shown in FIGS. 7A and 7B, the following description will be limited to the case of FIG. 7A.

As described above, in the present invention, after setting the reference temperature of the working liquid chamber to be kept constant, the temperature of the working liquid chamber is measured.

Steps 101 and 102 may be performed simultaneously, or the order thereof may be changed.

Then, in the present invention, it is determined whether or not the temperature of the working liquid chamber is the reference temperature.

In step 103, if the temperature of the working liquid chamber is equal to the reference temperature set in step 101, the current state (system) is maintained (S104). Otherwise, that is, if the temperature of the working liquid chamber is different from the reference temperature, the heater power is controlled (S105). In step 104, the temperature of the working liquid chamber is maintained at the reference temperature.

As described above, when the operating fluid in the working liquid chamber maintained at the reference temperature is to be phase-changed, the phase change of the working liquid may be made as soon as possible through fine adjustment of the power applied to the heater.

As described above, with reference to the preferred embodiment of the present invention, those skilled in the art will be variously modified and modified within the scope of the present invention without departing from the spirit and scope of the present invention described in the claims below. It will be appreciated that it can be changed.

As described above, the present invention provides a method of controlling the temperature in the working liquid chamber in the phase change type micro driver to control the heater using the RTD sensor feedback, and the following effects occur.

First, efficiency and response characteristics can be improved by minimizing unnecessary temperature changes.

Second, even if the operating environment changes, the temperature of the working liquid chamber can be kept close to the phase change temperature.

Third, the optimum power signal waveform and period can be determined by comparing the phase change temperature and the sensor temperature.

In addition, the phase change type micro actuator according to the present invention as described above is used in a high energy efficiency, low power consumption micro pump required in the application of ultra-small fuel cells, portable and wearable IT equipment and bio-medical devices from a limited energy source By consuming minimal power, it is expected to contribute greatly to improving the efficiency of the system and increasing the use time of the portable / wearing device, thereby enhancing the commercialization of the eco-friendly and future products.

Claims (25)

In the micro driver used for the micro pump, A lower substrate having a micro heater that generates heat when a voltage is applied; A working liquid chamber configured to put a working liquid on an upper portion of the lower substrate having the heater therein; And Including a drive thin film made to expand while the working fluid is evaporated by the heat generated from the heater, When the voltage is applied, the thin film expands with the pressure generated by evaporating the working liquid filled in the working liquid chamber with the heat generated from the heater, and when the voltage applied to the heater is cut off, the thin film is condensed as steam condenses. A temperature sensor for measuring the temperature of the working liquid chamber; And Set a reference temperature of the working liquid chamber to be kept constant, determine whether or not the temperature of the working liquid chamber is the reference temperature, and maintain the current state if the temperature of the working liquid chamber is the reference temperature, If the temperature of the liquid chamber is not the reference temperature further comprises a control unit for controlling the heater power to maintain the temperature of the working liquid chamber at the reference temperature, When the phase change of the working liquid in the working liquid chamber maintained at the reference temperature is made, the phase change of the working liquid is made as soon as possible through fine adjustment of the power applied to the heater. The surface of the working fluid chamber is designed in a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the vaporization and condensation of the working liquid is achieved quickly. The method of claim 1, The adhesion between the driving thin film and the lower substrate, Applying and patterning a photosensitive film to selectively adhere the driving thin film to the lower substrate, After treating the lower substrate patterned photoresist with oxygen plasma for a predetermined time, By adhering the driving thin film made of silicon rubber to a surface treated lower substrate at a predetermined pressure for a predetermined time, adhesion between the driving thin film and the lower substrate is performed by covalent bonding occurring on the close surface. Phase change type micro driver. The method of claim 1, The heater power control method is a phase change type micro driver, characterized in that for controlling the duty ratio (%) of the voltage pulse applied to the heater. The method of claim 1, The heater power control method is a phase change type micro driver, characterized in that for controlling the period of the voltage pulse applied to the heater. The method of claim 1, Temperature measurement of the working fluid chamber is a phase change type micro driver, characterized in that using the RTD sensor. delete The method of claim 2, The heater power control method is a phase change type micro driver, characterized in that for controlling the duty ratio (%) of the voltage pulse applied to the heater. The method of claim 2, The heater power control method is a phase change type micro driver, characterized in that for controlling the period of the voltage pulse applied to the heater. The method of claim 2, Temperature measurement of the working fluid chamber is a phase change type micro driver, characterized in that using the RTD sensor. The method of claim 2, The surface of the working fluid chamber is designed in a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the vaporization and condensation of the working liquid is achieved quickly. The method of claim 3, wherein Temperature measurement of the working fluid chamber is a phase change type micro driver, characterized in that using the RTD sensor. The method of claim 3, wherein The surface of the working fluid chamber is designed in a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the vaporization and condensation of the working liquid is achieved quickly. The method of claim 4, wherein Temperature measurement of the working fluid chamber is a phase change type micro driver, characterized in that using the RTD sensor. The method of claim 4, wherein The surface of the working fluid chamber is designed in a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the vaporization and condensation of the working liquid is achieved quickly. The phase change type micro driver according to any one of claims 1 to 5 and 7 to 14, And a fluid space and a flow path formed on an upper side of the driving thin film and bordering the driving thin film. The phase change type micro driver according to any one of claims 1 to 5 and 7 to 14, A pumping liquid chamber in which a volume is changed by a movement of the driving thin film; An inlet and an outlet connected to the pumping liquid chamber and into and out of the fluid; And And an upper substrate further comprising a pair of diffusers designed between the pumping liquid chamber and the inlet port and between the pumping liquid chamber and the outlet port. In the temperature control method for maintaining a constant temperature in the working liquid chamber in a phase change type micro driver, Setting a reference temperature of the working liquid chamber to be kept constant; Measuring the temperature of the working fluid chamber; Determining whether or not the temperature of the working liquid chamber is the reference temperature; And If the temperature of the working fluid chamber is the reference temperature maintains the current state, and if the temperature of the working liquid chamber is not the reference temperature, controlling the heater power to maintain the temperature of the working liquid chamber at the reference temperature; including, When the phase change of the working fluid in the working fluid chamber maintained at the reference temperature is made, the phase change of the working liquid is made as soon as possible through fine adjustment of the power applied to the heater. The surface of the working fluid chamber is designed to have a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the working liquid can be rapidly vaporized and condensed. Liquid chamber temperature control method. The method of claim 17, A reference temperature of the working liquid chamber to be kept constant is set to a maximum temperature while being less than the phase change temperature of the working liquid, the temperature control method of the working liquid chamber in a phase change type micro-drive. The method of claim 17, A reference temperature of the working liquid chamber to be kept constant is set to a minimum temperature while exceeding the phase change temperature of the working liquid, the method of operating fluid chamber temperature control method in a phase change type micro-drive. The method according to any one of claims 17 to 19, The heater power control method is a temperature control method of the operating liquid chamber in a phase change type micro driver, characterized in that for controlling the duty ratio of the voltage pulse applied to the heater. The method according to any one of claims 17 to 19, The heater power control method is a temperature control method of the working liquid chamber temperature in the phase change type micro driver, characterized in that the method of controlling the period of the voltage pulse applied to the heater. The method according to any one of claims 17 to 19, Temperature measurement of the working liquid chamber is a temperature control method of the working liquid chamber in a phase change type micro driver, characterized in that using the RTD sensor. delete The method of claim 20, The surface of the working fluid chamber is designed to have a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the working liquid can be rapidly vaporized and condensed. Liquid chamber temperature control method. The method of claim 21, The surface of the working fluid chamber is designed to have a concave-convex shape to increase the contact area of the working liquid and the heater attachment surface in the working liquid chamber so that the working liquid can be rapidly vaporized and condensed. Liquid chamber temperature control method.

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