KR100849473B1 - Oled and method for fabricating the same - Google Patents

Abstract

An OLED(Organic Light Emitting Diode) and a method for fabricating the same are provided to extend a lifespan by suppressing penetration of moisture and a gas. An OLED includes a pore barrier layer(60), CNTs(Carbon NanoTubes)(61), a CNT electrode layer(64), organic emission layers(62), and an OLED electrode(63). The pore barrier layer includes pores which are regularly arranged to be separated from each other. The CNTs are formed in the pores to correspond to each of the pores. The CNT electrode layer is positioned outside the CNTs. The organic emission layers are formed in the CNTs. The OLED electrode is connected to the organic emission layers.

Description

Organic light-emitting display device and its manufacturing method {OLED and method for fabricating the same}

1 is a block diagram showing a basic structure of an organic light emitting display device

2 is a configuration diagram showing an operation principle of an organic light emitting display device.

3 is a flowchart showing a manufacturing process sequence of the organic light emitting display device according to the present invention.

Figures 4a to 4h is a cross-sectional view of the process for producing anodized alumina nano template according to the present invention

5A to 5F are cross-sectional views illustrating a process of manufacturing an organic light emitting display device using an AAO template and carbon nanotubes according to the present invention.

6 is a cross-sectional view showing the basic structure of an organic light emitting display device according to the present invention.

7 is a cross-sectional view showing embodiments of the structure of the organic light emitting layer of the organic light emitting display device according to the present invention.

8a to 8c is a block diagram showing a process for the formation of electrodes located on the outside of the carbon nanotubes according to the present invention

Explanation of symbols for the main parts of the drawings

51.AAO Template 52.Vacation

53. Catalytic Metals 54. Carbon Nanotubes

55a.55b.55c. Organic Light Emitting Layer 56. Electrode Layer

The present invention relates to an organic light emitting display device. Specifically, a simplified process using carbon nanotubes improves the light condensing properties to minimize internal reflection, thereby improving light efficiency and suppressing moisture and gas infiltration. The improved high pixel organic light emitting display element and its manufacturing method are related.

As is well known, the importance of display device as a visual information transmission medium in the information society is emphasized, and in order to preoccupy an important position in the future, it will satisfy requirements such as low power consumption, thinning, light weight, and high quality. It is required.

As such a display device, a liquid crystal display (LCD), a plasma display device (PDP), organic light emitting diodes (OLED), and the like have been developed and used.

At present, organic light emitting diodes (OLEDs), which can be made thinner than several mm, are attracting attention as display devices capable of minimizing high luminance, color reproducibility, wide viewing angle, low power consumption, and RC delay characteristics. have.

Hereinafter, a general structure and an operating principle of an OLED will be described with reference to the accompanying drawings.

1 is a block diagram showing the basic structure of the organic light emitting display device, Figure 2 is a block diagram showing the operating principle of the organic light emitting display device.

The basic structure is composed of a cathode (1), an anode (3), and an organic layer (2) for emitting light, and the organic layer (2) is an electron injection layer (EIL) and a transport layer ( Electron Transport Layer (ETL), Hole Injection Layer (HIL), Transport Layer (Hole Transport Layer (HTL)) and electron-hole recombination layer (Emission Layer)

Here, the organic layer 2 is not limited as shown in FIG. 1 and may be formed in a single structure, a double structure, or a multilayer structure.

In the OLED having such a structure, as shown in FIG. 2, electrons and holes are respectively injected from the electrode into the conduction band and the valence band of the organic semiconductor layer, and the injected electrons and holes are diffused into and recombined. This will occur.

As OLEDs rapidly develop in the field of video display, high pixels, ease of manufacturing process, thinning, and flexible characteristics are required.

However, the structure and manufacturing process of the OLED of the prior art have the following problems due to the limitation of the forming material and the limitation of the manufacturing process technology.

First, while the demand for high integration and precision of devices is increasing, it is difficult to implement fine patterns more accurately due to the limitation of the manufacturing process using a mask.

Second, due to the manufacturing process using a mask it is difficult to simplify the process, there is a difficulty in reducing the manufacturing cost and processing time, there is a difficulty in improving the yield.

Third, since the electrode layer is formed on the glass substrate and used, there is a problem of lowering the light efficiency due to total internal reflection by the glass layer.

Fourth, due to the problem of shortening the life of the organic light emitting layer due to the penetration of moisture, an encapsulation process is required.

The present invention is to solve the problems of the structure and manufacturing process of the OLED of the prior art, a simplified process using carbon nanotubes to improve the light collection characteristics to minimize the total internal reflection to improve the light efficiency and moisture penetration and gas penetration It is an object of the present invention to provide a high-pixel organic light-emitting display device and a method of manufacturing the same, which can suppress the efficiency and improve the service life characteristics.

In addition, it is to provide a method for controlling the design of carbon nanotubes, which simplifies the manufacturing process and enables precise control of density and size by skipping the mask manufacturing process and the device manufacturing process using the mask.

Another object of the present invention is to provide a new type of organic light emitting display device using carbon nanotubes and a method of manufacturing the same, which exhibit new physical phenomena and improved material properties in a nanometer-sized ultrafine region using these techniques.

It is also an object of the present invention to provide a method of forming an OLED device inside a carbon nanotube (CNT) and forming an electrode on the CNT to realize smooth movement of electrons and holes to produce a light emitting device.

The organic light emitting display device according to the present invention for achieving the above object is formed in the carbon nanotubes are formed in the carbon nanotubes respectively corresponding to each other in the pores barrier layer having pores arranged regularly separated from each other The organic light emitting layer, the electrodes connected to the organic light emitting layer, characterized in that it comprises an electrode layer of a transparent material on the surface of the carbon nanotubes.

According to another aspect of the present invention, there is provided a method of manufacturing an organic light emitting display device, including: forming an anodized alumina nano template by anodizing an aluminum substrate such that pores are formed thereon; Depositing a catalytic metal in the pores to grow carbon nanotubes; And depositing an organic light emitting layer in the carbon nanotubes and forming electrodes connected to the organic light emitting layer.

Hereinafter, a preferred embodiment of an organic light emitting display device and a method of manufacturing the same according to the present invention will be described in detail.

Features and advantages of the organic light emitting display device and the method of manufacturing the same according to the present invention will become apparent from the detailed description of each embodiment below.

3 is a flowchart showing a manufacturing process sequence of the organic light emitting display device according to the present invention.

The organic light emitting display device according to the present invention is formed of carbon nanotubes formed in the pores of the AAO nano-template including pores separated by a pore barrier layer, and laminated in the carbon nanotubes, respectively, for electron hole recombination. And include organic light emitting layers for emitting light.

The manufacturing process of the organic light emitting display device according to the present invention is a process for producing an anodic aluminum oxide (AAO) nano-template (AAO) as shown in Figure 3, and carbon nanotubes (CNT) in the pores in the AAO nano-template; Carbon nanotubes) and an organic light emitting layer in the grown carbon nanotubes.

The AAO nano-template used in the present invention refers to an aluminum substrate in which pores of nanometer size (10-100 nm) are regularly arranged on anodized aluminum surface. It is used as a framework for creating nanostructures such as nanotubes or nanowires, and the AAO template itself can be used as a nano mask.

Therefore, in the present invention, the AAO template is used to control the size and density of the carbon nanotubes and to secure the straight growth of the carbon nanotubes.

Carbon nanotubes, which have high expectations among nanomaterials, are still difficult to precisely control the size and density of carbon nanotubes. Therefore, when carbon nanotubes are synthesized using the AAO template, the size of the carbon nanotubes can be adjusted in various ways according to the diameter and arrangement of the pores of the AAO, which can be applied to nano devices such as field emitter tip or AFM tip. .

The organic light emitting display device according to the present invention is formed by the following process.

As shown in FIG. 3, the aluminum substrate is anodized to form an anodized aluminum oxide (AAO) nano template having pores at regular intervals (S301).

The AAO template thus prepared is used as a nano mask to grow carbon nanotubes (S302).

That is, a catalyst metal for forming carbon nanotubes is deposited in the pores (S303), and the carbon nanotubes are grown in the pores in the Anodic Aluminum Oxide (AAO) nano template.

The lower portion of the AAO template having the carbon nanotubes in the pores is etched to expose a portion of the carbon nanotubes (S305).

Here, the catalytic metal is located at the bottom in the pores, and the catalyst metal remaining after the carbon nanotube growth process is removed like aluminum in the process of etching the bottom of the AAO template.

The OLED organic light emitting layer is deposited through the exposed portion of the carbon nanotubes (S306), and an OLED electrode layer is formed on one end of the carbon nanotubes having the organic light emitting layer formed therein (S307) (connected to the organic light emitting layer in the following description). The electrode layer formed in the lower region is called an OLED electrode layer.)

The CNT electrode layer is formed on the surface of the carbon nanotubes including the organic light emitting layer therein (S308) (in the following description, the electrode layer formed on the surface of the carbon nanotubes, that is, the upper region, is called a CNT electrode layer).

The OLED electrode layer is used as the cathode electrode of the organic light emitting display element, and the CNT electrode layer is used as the anode electrode.

Each carbon nanotube is in subpixel units, and each subpixel is separated by a void barrier layer.

Hereinafter, a manufacturing process of the organic light emitting display device according to the present invention will be described in detail.

4A to 4H are cross-sectional views for manufacturing anodized alumina nano templates according to the present invention, and FIGS. 5A to 5F are cross-sectional views for manufacturing organic light emitting display devices using AAO templates and carbon nanotubes according to the present invention.

As shown in FIG. 4A, an aluminum substrate 41 is prepared and 1st anodization is performed as in FIG. 4B to be separated by a pore barrier layer 43a made of Al ₂ O ₃ (alumina). The difference voids 42a are formed.

Here, it is preferable to apply an electro-polishing and degreasing process to improve the surface state of the substrate before proceeding with the first anodic oxidation process.

In addition, it is preferable to use a sheet having a purity of 99.999% for the aluminum substrate.

If the etching rate is faster than the rate of anodization, the surface of aluminum is polished. This phenomenon is called electro-polishing, which is important as a pretreatment process for manufacturing anodized alumina nano-templates. Have

This is because the etching of the alumina proceeds perpendicular to the equipotential line, so that the direction of formation of the pores becomes uniform only after anodization starts from the planarized surface.

4C, the pore barrier layer 43a and the primary pores 42a formed by performing a first anodization are removed by an etching process.

Subsequently, as shown in FIG. 4D, the secondary anodic oxidation process is performed to form secondary voids 42b separated by the void barrier layer 43b.

The reason for performing the first and second anodic oxidation processes is as follows.

In the early stage of anodic oxidation, although the pores are formed perpendicular to the surface of the alumina, the arrangement of the pores shows irregular characteristics. However, due to stress as the volume increases as aluminum turns to alumina, over time these pores are aligned by self-ordering in an array that minimizes stress.

Therefore, since the arrangement that can most efficiently use the space given by the secondary anodic oxidation is a hexagonal close-packing structure, the voids are uniformly arranged in a hexagon.

After forming the regularly arranged pores like this, as shown in FIG. 4E, if the depth and spacing of the pores are maintained for the first time, a pore widening process is performed to increase only the diameter of the pores.

The cross-sectional and surface structure of the anodic oxide alumina nano template formed by such a process is as in FIGS. 4F and 4G, and the detailed structure of the pores is as in FIG. 4H.

Using the anodic oxide alumina template formed as described above, the carbon nanotube synthesis process and the OLED formation process are performed as follows.

Carbon nanotubes are single-walled carbon nanotubes (SWNTs), multi-walled carbon nanotubes (MWNTs) with multiple stacks of single-walled nanotubes (MWNTs), and multi-layered nanotubes. Tubes (Nanotube Rope) can be classified, OLED forming process according to the present invention using a single-walled carbon nanotube (SWNT) or multi-walled carbon nanotube (MWNT) Form.

Synthesis of carbon nanotubes using anodized alumina nano-templates can be divided into synthesis using a catalyst and synthesis without a catalyst.

First, when synthesizing carbon nanotubes without using a metal catalyst, the anodized alumina nano template acts as a catalyst itself, and carbon is uniformly deposited on the walls of the anodized alumina nano template pores. The tube is formed.

The carbon nanotubes thus formed generally have low crystallinity and are present only inside the anodized alumina nano template pores. Therefore, in order to increase the crystallinity, it is necessary to synthesize at high temperature, to include excess hydrogen in the reactor during the synthesis, or to heat-treat at high temperature in an inert atmosphere after synthesis.

On the other hand, the synthesis of carbon nanotubes using a metal catalyst shows a different aspect. Generally, a metal catalyst uses transition metals such as cobalt, nickel, and iron, and uses an electroplating method. A metal catalyst is plated on the bottom of the pores of the anodized alumina nano template.

As the growth mechanism of carbon nanotubes, tip growth and root growth are used. In the case of the root growth mechanism, carbon nanotubes growing from the metal catalyst interfere with the diffusion of the reactant to the metal catalyst and thus the nanotube growth is not smooth. Therefore, tip growth is used when synthesizing the carbon nanotubes using the metal catalyst. The mechanism is mainly used.

In an embodiment of the present invention, a method of synthesizing carbon nanotubes using a metal catalyst will be described as an example.

First, as shown in FIG. 5A, any one of Ni, Fe, Co, Y, or an alloy thereof is used as the catalyst metal 53 to deposit into the pores 52 of the anodic oxide alumina nano template 51.

Here, the catalytic metal 53 is located in the lower region in the pores 52 of the anodic oxide alumina nano template 51.

As shown in FIG. 5B, NH ₃ gas is first injected into the pores 52 in the state of depositing the catalytic metal 53 at 30 sccm for 5 minutes, and NH ₂ gas is simultaneously injected for 30 minutes in C ₂ and H ₂ gas at 30 sccm. The implants grow carbon nanotubes 54 as in FIG. 5C.

Here, the formation height (h) of the carbon nanotubes 54 is not necessarily the same as the thickness of the anodized alumina nano template 51, but is formed to a height that can secure a straight shape of the carbon nanotubes. do.

The formation height h of the carbon nanotubes 54 is preferably 300 kPa to 2500 kPa.

Subsequently, as shown in FIG. 5D, a portion of the anodized alumina nano template 51 is removed by an etching process so that one end of the carbon nanotube 54 is exposed.

Here, the catalytic metal 53 used in the carbon nanotube 54 growth process and remaining catalyst metal 53 is anodized alumina at the time of etching a part of the anodized alumina nano template 51 so that one end of the carbon nanotube 54 is exposed. It is removed simultaneously with the aluminum layer under the nano template 51.

The organic light emitting layers 55a, 55b, and 55c are sequentially deposited in the carbon nanotubes 54 where one end is exposed.

Subsequently, in the state in which the organic light emitting layers 55a, 55b, and 55c are formed inside the carbon nanotubes 54, metals such as Al, Ag, and Au are deposited to form the OLED electrode layer 56.

Here, it is natural that the organic light emitting layer laminated on the carbon nanotubes may have various forms as follows.

For example, a hole transport layer (HTL) and an emission layer (EML) are stacked to form organic light emission between the electrodes. Such a form may be deposited inside the carbon nanotube described above. Can be.

In addition, an emission layer (EML) is formed between the electrodes to emit organic light, and such a shape may be formed by depositing inside the carbon nanotube described above.

In addition, a hole injection layer (HIL), an emission layer (EML), and an electron transport layer (ETL) are stacked to form organic light emission between the electrodes. It may be deposited on the inside of the nanotubes.

Also, a hole transport layer (HTL), an emission layer (EML), an exciton block layer (EBL), an electron transport layer (ETL), and an electron inflow for organic light emission between the electrodes A layer (Electron Injection Layer; EIL) is stacked, such a shape may be formed by depositing inside the carbon nanotubes described above.

Also, a hole injection layer (HIL), a hole transport layer (HTL), an emission layer (EML), an exciton block layer (EBL), and an emission layer are used to emit organic light between the electrodes. (Emission Layer: EML), Electron Transport Layer (ETL), Electron Injection Layer (EIL), which are stacked in the form of the carbon nanotubes described above. .

Of course, it is obvious that the present invention may be manufactured in a different form than the laminated form.

Hereinafter, the basic structure of the organic light emitting display device according to the present invention in which the CNT electrode layer is formed on the carbon nanotubes, and the stacked structure and forming method of the organic light emitting layer formed in the carbon nanotubes will be described.

6 is a cross-sectional view showing the basic structure of the organic light emitting display device according to the present invention, Figure 7 is a cross-sectional view showing embodiments of the structure of the organic light emitting layer of the organic light emitting display device according to the present invention.

The basic structure of the organic light emitting display device according to the present invention in which the CNT electrode layer is formed on the carbon nanotubes has a pore barrier layer 60 having pores arranged regularly and separately from each other, as shown in FIG. Carbon nanotubes 61 corresponding to each other, CNT electrode layers 64 formed to be positioned outside the carbon nanotubes 61, and organic light emitting layers formed in the carbon nanotubes 61. 62) and OLED electrodes 63 connected to the organic light emitting layer 62.

And the organic light emitting layer formed in the carbon nanotubes is, as shown in Figure 7, HTL-HIL-EML-EIL-ETL (Fig. 7 (1)), HTL-EML-ETL (Fig. 7 (2)), HTL-EML (FIG. 7 (3)), EML single layer structure (FIG. 7 (4)) may be formed in the same structure.

Of course, the organic light emitting layer can be laminated in other forms in addition to the above embodiment.

The process of forming the organic light emitting layer in the carbon nanotubes includes physical vapor deposition (PVD), plasma enhancement chemical vapor deposition (PECVD), and chemical vapor deposition (CVD). , Langmuir-Brodgette (LB) method, LiTi method and the like can be used.

And the process for forming the CNT electrode layer located on the outside of the carbon nanotubes is as follows.

8a to 8c is a block diagram showing a process for the formation of electrodes located on the outside of the carbon nanotubes according to the present invention.

In order to smoothly supply holes in the carbon nanotubes, a conductive polymer is used to supply power to the OLEDs in the carbon nanotubes. Such a conductive polymer may be prepared by a wetting method, and the conductive polymer layer thus prepared may be cured again and used as an electrode.

At this time, the characteristic of the conductive polymer used is the material that can emit more holes. Polypyrole is 4.22 eV, which is similar to 4.7 eV of ITO, which is used as the anode, and can be stacked instead of ITO.

In addition, a transparent electrode such as ITO may be coated on the top of the CNT to produce an electrode for supplying holes.

To this end, as with the conductive polymer, it is possible to perform wet coating such as spin coating or inkjet and dry by PVD, PECVD, or CVD.

8A illustrates a method for forming a CNT electrode layer on an upper portion of a carbon nanotube, and illustrates a process of pressing the CNT electrode layer forming material using a roller and forming a curing process through UV irradiation.

8B illustrates a method for forming a CNT electrode layer on top of a carbon nanotube, wherein the CNT electrode layer forming material is formed by physical vapor deposition (PVD), plasma enhancement chemical vapor deposition (Plasma enhancement Chemical Vapor Deposition); PECVD), Chemical Vapor Deposition (CVD), Langmuir-Brodgette (LB) method, LiTi method, etc., are used for the deposition process.

8C illustrates a method for forming a CNT electrode layer on an upper portion of a carbon nanotube, and illustrates a process of forming a CNT electrode layer forming material by a spin coating process.

The present invention enables the fabrication of OLEDs capable of low current driving using the high field emission characteristics of carbon nanotubes, and provides a method of forming an OLED device on one carbon nanotube by depositing OLED molecules inside the carbon nanotubes. do.

By such a process, the micro-size of the OLED can be adjusted to achieve high density device integration, and the effect of water vapor and oxygen can be reduced by sealing with a low current and carbon nanotubes, thereby extending the life of the display device.

Therefore, a simplified process using carbon nanotubes in the manufacturing process of the organic light emitting display device enables the implementation of a high pixel organic light emitting display device and a method of manufacturing the same having improved light efficiency and service life characteristics.

In addition, a mask manufacturing process and a device manufacturing process using a mask may be skipped to simplify the manufacturing process and implement a design control method of carbon nanotubes capable of precise control of density and size.

Therefore, it is possible to manufacture a new type of organic light emitting display device using carbon nanotubes, which exhibit new physical phenomena and improved material properties in the nanometer-sized ultrafine region using these techniques.

Those skilled in the art will appreciate that various changes and modifications can be made without departing from the spirit of the present invention.

Therefore, the technical scope of the present invention should not be limited to the contents described in the embodiments, but should be defined by the claims.

Such an organic light emitting display device and a method of manufacturing the same have the following effects.

First, OLEDs capable of low current driving can be fabricated using the high field emission characteristics of carbon nanotubes.

Second, OLED molecules may be deposited inside carbon nanotubes to form an OLED device in one carbon nanotube.

This makes it possible to more accurately implement the fine pattern according to the high integration and precision requirements of the device.

Third, the manufacturing process using the mask can be skipped to simplify the process and reduce the manufacturing cost and processing time.

Fourth, there is an effect of improving the light efficiency of the device by manufacturing an organic light emitting display device using a carbon nanotube having excellent field emission characteristics.

Fifth, the organic light emitting display device (OLED) may be manufactured in a simplified process using water permeation inhibitory and gas barrier properties of the carbon nanotubes, thereby improving light efficiency and service life characteristics.

Claims (22)

A pore barrier layer having pores arranged separately from one another; Carbon nanotubes formed correspondingly in the pores; An electrode formed to be positioned outside the carbon nanotube; An organic light emitting layer formed in the carbon nanotubes and other electrodes connected to the organic light emitting layer. The organic light emitting layer of claim 1, wherein the organic light emitting layer is formed in the carbon nanotubes. One or more of the hole inflow layer (HIL), the hole transport layer (HTL), the emission layer (EML), the excitation block layer (EBL), the electron transport layer (ETL), and the electron inflow layer (EIL) for organic light emission between the electrodes An organic light emitting display device, characterized in that laminated in a combined form. The organic light emitting display device of claim 1, wherein the organic light emitting layer is sealed to block moisture by carbon nanotubes. The organic light emitting display device of claim 1, wherein the formation density and size of the carbon nanotubes are determined by pores. The organic light emitting display device of claim 1, wherein an electrode positioned outside the carbon nanotubes is manufactured by using ITO on the carbon nanotubes. The organic light emitting display device of claim 1, wherein the electrode positioned outside the carbon nanotubes is manufactured by using a conductive polymer on the carbon nanotubes. Anodizing the aluminum substrate to form voids thereon to form anodized alumina nano templates; Depositing a catalytic metal in the pores to grow carbon nanotubes; Depositing an organic light emitting layer in the carbon nanotubes and forming electrodes connected to the organic light emitting layer. 8. A method according to claim 7, wherein the catalytic metal deposited to grow the carbon nanotubes is located below in the pores. The method of claim 7, wherein the lower portion of the anodized alumina nano template is removed by an etching process so that one end of the carbon nanotubes is exposed before the organic light emitting layer is deposited in the carbon nanotubes. . The method of claim 7 or 9, wherein the catalytic metal remaining after the growth process of the carbon nanotubes, A method of manufacturing an organic light emitting display device, characterized in that the bottom of the anodized alumina nano template is removed simultaneously with the bottom aluminum layer of the anodized alumina nano template so that one end of the carbon nanotubes is exposed. The method of claim 7, wherein the electrodes formed by depositing an organic light emitting layer in the carbon nanotubes are formed by An OLED electrode layer connected to the organic light emitting layer in the carbon nanotubes and formed under the carbon nanotubes; A method of manufacturing an organic light emitting display device, characterized in that the CNT electrode layer formed on top of the carbon nanotubes. The CNT electrode layer of claim 11, wherein the CNT electrode layer is formed on the carbon nanotubes. The CNT electrode layer forming material is pressed using a roller and formed a curing process through UV irradiation, CNT electrode layer forming material is deposited using any one of physical vapor deposition (PVD), plasma enhanced chemical vapor deposition (PECVD), chemical vapor deposition (CVD), Langmuir-Brodgette (LB) method, LiTi method, A method of manufacturing an organic light emitting display device, characterized in that the CNT electrode layer forming material is formed by coating a spin coating process. The method for manufacturing an organic light emitting display device according to claim 12, wherein the CNT electrode layer forming material is made of ITO or a conductive polymer material. The method according to claim 7, wherein the organic light emitting layer formed in the carbon nanotubes, Organic luminescence, characterized in that formed using any one of physical vapor deposition (PVD), plasma enhanced chemical vapor deposition (PECVD), chemical vapor deposition (CVD), Langmuir-Brodgette (LB) method, LiTi method Method for manufacturing a display device. The process of claim 7 wherein the process of forming carbon nanotubes in the pores, A method of manufacturing an organic light emitting display device using any one of a method of synthesizing carbon nanotubes using anodized alumina nano template itself or a method of synthesizing using a separate metal catalyst. The method of claim 7, wherein the organic light emitting layer formed in the carbon nanotubes, One or more of the hole inflow layer (HIL), the hole transport layer (HTL), the emission layer (EML), the excitation block layer (EBL), the electron transport layer (ETL), and the electron inflow layer (EIL) for organic light emission between the electrodes A method of manufacturing an organic light emitting display device, characterized in that laminated in a combined form. The method of claim 7, wherein the organic light emitting layer is sealed to block moisture by carbon nanotubes. The method of manufacturing an organic light emitting display device according to claim 7, wherein the formation density and size of the carbon nanotubes are determined by the conditions of the process of anodizing the aluminum substrate. The method of claim 7, wherein the catalytic metal deposited in the pores, The manufacturing method of the organic light emitting display element characterized by using any one of Ni, Fe, Co, and these alloys. The method of manufacturing an organic light emitting display device according to claim 7, wherein an electrode layer is formed by depositing any one of Al, Ag, and Au metals in an organic light emitting layer formed inside the carbon nanotube. The method of claim 7, wherein the carbon nanotubes use single walled carbon nanotubes. The method of claim 7, wherein the carbon nanotubes are made of multiwalled carbon nanotubes.

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