KR100833389B1 - Bio-sensor and method for manufacturing the same - Google Patents

Abstract

The present invention relates to a sensor for detecting a biomaterial and a method of manufacturing the same, by contacting a receptor coating layer adsorbed by an actuator to a signal line and realizing a sensor structure capable of detecting a change in resistance between the signal line and the contact electrode. The silver has an effect of detecting the concentration of the biomaterial by recognizing a change in contact resistance between the signal line and the contact electrode according to the adsorption of the biomaterial on the receptor coating layer.

In addition, the present invention has the effect of reducing the size of the device by manufacturing the device by performing the entire device manufacturing using only a semiconductor process and a micro-electromechanical system process without mechanical coupling between components.

Bio, substance, sensor, resistance, contact, signal line

Description

 Sensor for detecting a biomaterial and a method of manufacturing the same {Bio-sensor and method for manufacturing the same}

1A and 1B are conceptual views for schematically explaining an operation of a biomaterial detection sensor according to the present invention.

2A and 2B are circuit diagrams formed between a contact electrode and a signal line before and after a biomaterial is adsorbed according to the present invention;

3 is a schematic plan view of a biomaterial detection sensor according to the present invention;

4 is a schematic plan view of a biomaterial detection sensor according to a preferred embodiment of the present invention.

5 is a plan view of a biomaterial detection sensor according to the present invention.

6 is another plan view of the biomaterial detection sensor according to the present invention.

7 is a schematic circuit diagram of a biomaterial detection sensor using four piezoelectric actuators according to the present invention.

8 is a view illustrating a signal change of an RF output terminal according to a change in contact resistance between a contact electrode and a signal line according to the present invention.

9A to 9H are cross-sectional views illustrating a manufacturing process of a biomaterial detection sensor according to the present invention.

10 is a cross-sectional view illustrating a state in which piezoelectric capacitors and a contact electrode are formed in the process of FIG. 9B.

<Description of the symbols for the main parts of the drawings>

100: support 110: floating (floating)

111, 115, 116, 117: Connecting parts 112, 114, 118, 119: Hinge

113: contact electrode seating portion 120,220: contact electrode

130,250: Receptor coating layer

150: through hole 171,172,173,174: actuator

171a, 172a, 171c, 172c: electrodes 171b, 172b: piezoelectric films

200,240 signal line 201,203 silicon layer

202, 211, 212: insulation layer 205: SOI substrate

210,220: Ground line 221: Contact electrode

230: sacrificial layer

The present invention relates to a sensor for detecting a biomaterial and a method of manufacturing the same, and more particularly, to detect a biomaterial capable of contacting a receptor coating layer adsorbed by an actuator to a signal line and detecting a change in resistance between the signal line and the contact electrode. It relates to a sensor and a manufacturing method thereof.

The recent entry into an aging society and the growing desire for healthy life expand the market for portable health care systems and provide biosensors that can analyze, measure, diagnose, and search for bioactive and chemical substances. The importance of this is increasing.

Since biosensors use selective reactions between molecules, they should be able to reduce interference by other substances, distinguish sensitive substances with high sensitivity, enable mass production by lowering production costs, and speed up response. It needs to be monitored in real time everywhere.

Until now, biosensor development research has been conducted various research and development efforts as a tool for quantifying or analyzing the concentration of a specific bioactive substance.

The market is already formed in the form of portable measuring instruments that can be used in the medical and environmental industries, such as blood glucose meters, blood ion analyzers, and biological sample research devices, and automated analysis devices for research purposes, and clinical and medical diagnostics and food hygiene. Wide application is expected in the fields of agriculture, agriculture and fine chemicals.

In recent years, as biochip technologies such as DNA chips and protein chips are rapidly being developed as a means of identifying genetic information of humans, diagnosing diseases, preventing medicine, and searching for new drug candidates, the functions of biosensors go beyond simple analysis. Diagnosis and bulk search capabilities are highlighted.

The biomaterials diagnostic methods developed so far are mainly using electrochemical methods, optical methods, and mechanical methods.

The electrochemical method has the disadvantage that the detection process is complicated by using enzyme labeling, and the optical method has the disadvantage that the optical components used for detection are expensive.

The mechanical method has a disadvantage in that the detection accuracy is inferior in the conventional method of detecting the change in the resonance frequency according to the mass change, and the simple detection process and the low manufacturing cost.

In order to solve the above problems, the present invention is a sensor for detecting a biomaterial that can detect the concentration of the biomaterial by recognizing the change in contact resistance between the signal line and the contact electrode in accordance with the adsorption of the biomaterial to the receptor coating layer And a method for producing the same.

Another object of the present invention is to provide a sensor for detecting a bio-material that can reduce the size of the device by manufacturing the device by performing the manufacturing of the whole device using only a semiconductor process and a micro-electromechanical system process without mechanical coupling between components and its It is to provide a manufacturing method.

A preferred aspect for achieving the above objects of the present invention,

A support;

A through hole penetrating the support portion;

A floating part floating in the through hole connected to the support part; An actuator for bending the floating portion upward;

A contact electrode formed on the floating portion;

A receptor coating layer formed on the contact electrode;

A signal line floating from an upper portion of the receptor coating layer, and both ends of which are fixed to the support part;

There is provided a sensor for detecting a biomaterial composed of first and second ground lines spaced apart from both sides of the signal line and floating from an upper portion of the support, and both ends of which are fixed to the support.

Another preferred aspect for achieving the above object of the present invention,

Forming and patterning upper and lower insulating layers over and below the substrate;

Forming a plurality of piezoelectric capacitors including a lower electrode, a piezoelectric film, and an upper electrode on the patterned upper insulating layer, and forming a contact electrode connected to the lower electrode in a patterning region between the piezoelectric capacitors;

Forming a sacrificial layer surrounding the patterned upper insulating layer including the contact electrode and the plurality of piezoelectric capacitors;

Passing a sacrificial layer over the contact electrode, forming a signal line on the substrate and the sacrificial layer, and spaced apart from both sides of the signal line to form first and second ground lines on the substrate and the sacrificial layer;

Removing the sacrificial layer and removing a substrate exposed to the patterned lower insulating layer to lift a portion of the patterned upper insulating layer from below;

There is provided a method of manufacturing a sensor for detecting a bio-material consisting of forming a receptor coating layer on the contact electrode.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

1A and 1B are conceptual views for schematically describing an operation of a biomaterial detection sensor according to the present invention. First, the biomaterial detection sensor of the present invention includes a floating unit 110 connected to a support unit 100. Is floating from the bottom, the contact electrode 120 is formed on the floating portion 110, a receptor coating layer (130) is formed on the contact electrode 120, the receptor coating layer The signal line 200 is positioned to be spaced apart from the upper side of the 130.

In addition, an actuator (not shown) is formed in which the floating part 110 is bent to allow the receptor coating layer 130 to contact the signal line 200.

In the biomaterial detection sensor configured as described above, as shown in FIG. 1A, the actuator is not driven in the initial state in which the biomaterial is not adsorbed onto the receptor coating layer 130, so that the signal line 200 and the receptor coating layer 130 are ' spread out at intervals d '.

When the biomaterial is adsorbed onto the receptor coating layer 130, in order to detect the biomaterial, the actuator 110 is bent to bend the floating unit 110 to detect the biomaterial, as shown in FIG. 1B. (200).

In this case, an RF signal flows through the signal line 200, and a resistance changes due to the biomaterial adsorbed onto the receptor coating layer 130, thereby distorting or disturbing the RF signal flowing through the signal line 200.

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Meanwhile, the present invention can configure a biodetection sensor system with two detection sensor elements, one element is a reference element, and another element is used as a measurement element exposed to a sample to be measured.

2A and 2B are circuit diagrams formed between a contact electrode and a signal line before and after biomaterials are adsorbed according to the present invention, and these circuit diagrams are for explaining the principle for detecting biomaterials.

First, in the state in which the biomaterial is not adsorbed on the receptor coating layer, as shown in FIG. 2A, the resistance component R _SAM of the receptor coating layer, the resistance component R _bypass of the piezoelectric capacitor, and the inductor component of the piezoelectric capacitor are between the signal line and the contact electrode. (L _bypass ) is present.

When the biomaterial is adsorbed to the receptor coating layer, as shown in FIG. 2B, the resistance component R _bio adsorbed to the receptor coating layer is further present between the signal line and the contact electrode.

Therefore, the contact resistance between the signal line and the contact metal changes depending on the presence or absence of the biomaterial to be detected.

3 is a schematic plan view of a biomaterial detection sensor according to the present invention, including a support 100; A through hole 150 passing through the support part 100; A floating part 110 connected to the support part 100 and floating in the through hole 150; Actuators (171, 172) for bending the floating portion (100) upwards; A contact electrode formed on the floating portion 110; A receptor coating layer 130 formed on the contact electrode; A signal line 200 floating from the upper portion of the receptor coating layer 130 and fixed at both ends of the support part 100; The first and second ground lines 210 and 220 are spaced apart from both sides of the signal line 200 and floated from the upper portion of the support part 100, and both ends thereof are fixed to the support part 100.

Here, the actuators 171 and 172 may be piezoelectric capacitors formed on the floating portion 110.

For reference, in FIG. 3, the signal line 200 and the first and second ground lines 210 and 220 show dotted lines.

Meanwhile, the floating unit 110 shown in FIG. 3 includes a first connection unit 111 connected at one side of the through hole 150; A second connection part 115 connected at the other side of the through hole 150; A contact electrode seating portion 113 positioned between the first connecting portion 111 and the second connecting portion 115; The first and second hinges 112 and 114 connect the first connection part 111 and the contact electrode seating part 113 and the second connection part 115 and the contact electrode seating part 113, respectively. .

In this case, it is preferable that the actuators 171 and 172 are formed on the first and second connection portions 111 and 115.

In addition, it is preferable that the contact electrode and the receptor coating layer are sequentially formed on the contact electrode seating portion 113.

In addition, the first and second hinges 112 and 114 have a thin geometrical structure with a small spring constant so that a portion of the receptor coating layer on the contact electrode may contact the signal line in parallel.

Therefore, the floating part 110 is formed in a symmetrical pattern, and the contact electrode seating part 113 is raised by the driving of the actuators 171 and 172 to be in contact with the signal line 200, thereby absorbing the bio-adsorbed onto the receptor coating layer. The concentration of the substance can be known.

4 is a schematic plan view of a biomaterial detection sensor according to a preferred embodiment of the present invention, and this embodiment shows a structure for further improving the sensing accuracy of the biomaterial detection sensor, and the contact of the receptor coating layer to the signal line is shown. This uniformity makes it possible to know a reliable resistance change amount.

That is, as shown in Figure 4, the floating portion and the first to fourth connecting portion (111, 115, 116, 117) connected to the side of the through hole 150 formed in the support portion 100; A contact electrode seating portion 113 positioned between the first to fourth connecting portions 111, 115, 116, and 117; The first to fourth hinges 112, 114, 118, and 119 connect the first and fourth connection parts 111, 115, 116, and 117 to the contact electrode mounting parts 113, respectively.

The actuators 171, 172, 173, and 174 are formed on the upper portions of the first to fourth connecting portions 111, 115, 116, and 117, respectively.

Therefore, since the contact electrode mounting portion 113 is connected to the first to fourth connection portions 111, 115, 116 and 117 in a balanced manner, the contact electrode mounting portion 113 is bent uniformly by the driving of the actuators 171, 172, 173 and 174. The coating layer is brought into uniform contact with the signal line.

Meanwhile, FIGS. 5 and 6 are plan views of the biomaterial detection sensor according to the present invention, and may implement the shape of the floating portion 110 as shown in FIGS. 5 and 6.

7 is a signal line and the contact electrode has four resistance components of the piezoelectric cantilever ((R _bypass) and an inductor component (L _bypass between) a schematic circuit diagram of a bio-material detecting sensor using four piezoelectric actuator according to the invention Each of the 'R _total ' components is a resistive component consisting of the resistive component of the receptor self-aligned monolayer and the resistive component of the biomaterial.

FIG. 8 is a view illustrating a change in signal at an RF output terminal according to a change in contact resistance between a contact electrode and a signal line according to the present invention. The resistance is 0.5 kΩ.

The graphs of the state where the biomaterial is adsorbed are 'B', 'C' and 'D', and the contact resistances are 1.5 kV (B), 2.5 kC (C), and 4 kV (D).

As such, when the biomaterial is adsorbed onto the receptor coating layer, the resistance of the contact electrode contacting the signal line may be changed, and the change of the resistance may determine the concentration of the biomaterial.

9A to 9H are cross-sectional views illustrating a manufacturing process of the biomaterial detection sensor according to the present invention. First, the first silicon layer 201, the insulating layer 202, and the second silicon layer 203 are sequentially formed. Upper and lower insulating layers 212 and 211 are formed and patterned on and under the silicon on insulator (SOI) substrate 205 (FIG. 9A).

The patterned upper insulating layer 212 is for defining a floating portion, and the patterned lower insulating layer 211 is for use as a mask for bulk micromachining of an SOI substrate.

Thereafter, a plurality of piezoelectric capacitors including a lower electrode, a piezoelectric film, and an upper electrode are formed on the patterned upper insulating layer 212, and a contact electrode connected to the lower electrode in a patterning area between the piezoelectric capacitors ( 221) (FIG. 9B).

10 illustrates the piezoelectric capacitors.

Subsequently, a sacrificial layer 230 is formed to surround the patterned upper insulating layer including the contact electrode 221 and the plurality of piezoelectric capacitors (FIG. 9C).

The sacrificial layer 230 is preferably a photosensitive agent.

Subsequently, passing through the sacrificial layer 230 on the contact electrode 221, a signal line 240 is formed on the SOI substrate 205 and the sacrificial layer 230, and is spaced apart from both sides of the signal line 240. Thus, first and second ground lines are formed on the SOI substrate 205 and the sacrificial layer 230 (FIG. 9D).

Here, a seed layer for forming the signal line 240 and the first and second ground lines is formed on the sacrificial layer 230, and the signal line 240 and the first and second ground lines are formed. It is preferable.

Next, the sacrificial layer 230 is removed (FIG. 9E).

Subsequently, the SOI substrate 205 exposed to the patterned lower insulating layer 211 is removed to lift a portion of the patterned upper insulating layer 212 from the bottom (FIG. 9F).

Here, the floating patterned upper insulating layer becomes the floating portion described above.

That is, the floating patterned upper insulating layer comprises: first to fourth connections connected to the unpatterned upper insulating layer; A contact electrode seating portion positioned between the first to fourth connecting portions; It consists of first to fourth hinges connecting the first to fourth connection portions and the contact electrode seating portion.

Finally, a receptor coating layer 250 is formed on the contact electrode 221 (FIG. 9H).

In this case, the receptor coating layer 250 is formed by immersing the structure completed by the process of FIG. 9F in a self-assemble mono-layer (SAM) solution to form a receptor coating layer 250 on the contact electrode 221.

In this case, the receptor coating layer 250 is formed on all exposed metal regions.

As described above, in the present invention, it is preferable to manufacture the biomaterial detection sensor using the SOI substrate, but other substrates may be used.

FIG. 10 is a cross-sectional view illustrating a state in which piezoelectric capacitors and contact electrodes are formed in the process of FIG. 9B. Actuators 171 and 172 formed of the &lt; RTI ID = 0.0 &gt; .

The floating upper insulating layer 212 is the floating portion described above, and the actuators 171 and 172 are piezoelectric capacitors. It comes in contact with the signal line.

Accordingly, the present invention can achieve a miniaturization of a device and a low cost of a process by implementing an integrated biomaterial detection sensor using an existing semiconductor manufacturing process technology.

As described above, the present invention has the effect of detecting the concentration of the biomaterial by recognizing the change in contact resistance between the signal line and the contact electrode according to the adsorption of the biomaterial on the receptor coating layer.

In addition, the present invention has the effect of reducing the size of the device by manufacturing the device by performing the entire device manufacturing using only a semiconductor process and a micro-electromechanical system process without mechanical coupling between components.

Although the invention has been described in detail only with respect to specific examples, it will be apparent to those skilled in the art that various modifications and variations are possible within the spirit of the invention, and such modifications and variations belong to the appended claims.

Claims (10)

A support; A through hole penetrating the support portion; A floating part floating in the through hole connected to the support part; An actuator for bending the floating portion upward; A contact electrode formed on the floating portion; A receptor coating layer formed on the contact electrode; A signal line floating from an upper portion of the receptor coating layer, and both ends of which are fixed to the support part; A sensor for detecting a bio-material consisting of a first and a second ground line, which is spaced apart from both sides of the signal line and floated from an upper portion of the support, and both ends are fixed to the support. The method of claim 1, The floating unit, A first connection part connected at one side of the through hole; A second connection part connected at the other side of the through hole; A contact electrode seating portion positioned between the first connecting portion and the second connecting portion; And a first hinge and a second hinge connecting the first connection part and the contact electrode seating part, and the second connection part and the contact electrode seating part, respectively. The method of claim 1,  The floating unit, First to fourth connecting parts connected to side surfaces of the through holes formed in the support part; A contact electrode seating portion positioned between the first to fourth connecting portions; And a first to fourth hinge for connecting each of the first to fourth connection parts and the contact electrode seating part. The method of claim 2 or 3, The actuator is A sensor for detecting a biomaterial, characterized in that formed on top of each of the connection portion. The method of claim 4, wherein The actuator is A sensor for detecting biomaterial, characterized in that the piezoelectric capacitor. delete delete delete delete delete

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