KR100832646B1 - Open-hole based diffractive optical modulator - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diffractive light modulator, and more particularly, to form one pixel with an element having one ribbon-shaped upper micromirror by forming a lower reflector in the base member and having an open hole in the upper micromirror positioned away from the base member. The present invention relates to an open hole-based diffractive light modulator.

 Light Modulator, Diffraction, Micro Mirror, Micro Mirror Array, Open Hole

Description

Open-hole based diffractive optical modulator

1 illustrates a prior art electrostatic grating light modulator.

2 is a diagram illustrating reflecting incident light in a state where the electrostatic grating light modulator of the prior art is not deformed.

3 shows a diffraction of incident light in a state in which a prior art grating light modulator is deformed by electrostatic force.

4 is a side view of a diffractive thin film piezoelectric micromirror with depressions having a piezoelectric material in the prior art;

5A is a partially cutaway perspective view of an open hole-based diffractive optical modulator according to a first embodiment of the present invention;

5B is a fragmentary perspective view of an open hole-based diffractive optical modulator according to a second embodiment of the present invention;

5C is a fragmentary perspective view of an open hole-based diffractive optical modulator according to a third embodiment of the present invention;

5D is a partially cutaway perspective view of an open hole-based diffractive light modulator according to a fourth embodiment of the present invention.

5E is a fragmentary perspective view of an open hole-based diffractive optical modulator according to a fifth embodiment of the present invention;

5F is a fragmentary perspective view of an open hole-based diffractive optical modulator according to a sixth embodiment of the present invention;

5G is a partially cutaway perspective view of an open hole-based diffractive light modulator according to a seventh embodiment of the present invention;

5H is a partially cutaway perspective view of an open hole-based diffractive optical modulator according to an eighth embodiment of the present invention;

FIG. 5I is a partial cutaway perspective view of an open hole-based diffractive optical modulator according to a ninth embodiment of the present invention; FIG.

5J is a fragmentary perspective view of an open hole-based diffractive optical modulator according to a tenth embodiment of the present invention;

FIG. 6 is a diagram illustrating an element 1D array structure of an open hole-based diffractive optical modulator according to a first embodiment of the present invention. FIG.

FIG. 7 is a diagram illustrating an element 2D array structure of an open hole-based diffractive optical modulator according to a seventh embodiment of the present invention. FIG.

8 is a block diagram of a display system using an open hole-based diffractive light modulator according to an embodiment of the present invention.

9A is a perspective view illustrating a case in which incident light is obliquely illuminated on an upper micro mirror of an element 1D array of an open hole-based diffractive light modulator according to an embodiment of the present invention, and FIG. 9B is an open hole according to an embodiment of the present invention. Perspective illustrating the case where incident light is incident vertically on the upper micromirror of the element 1D array of the diffraction light modulator based.

<Explanation of symbols for the main parts of the drawings>

501a to 501j: base member 502a, 502b, 502d to 502j: insulating layer

503a to 503h, 510i, and 510j: bottom reflector

510a ~ 510f: Element 510g ~ 510j: Upper Micro Mirror

530a ~ 530f: upper micro mirror

531a1 ~ 531a3, 531b1 ~ 531b3, 531c1 ~ 531c3, 531d1, 531d2, 531e1 ~ 531e3, 531f1, 531f2, 511g1 ~ 511g3, 511h1, 511h2, 531i1 ~ 531i3, 531j1, 531j2: Open Hole

540a to 540f: upper reflector 802: display optical system

804: display electromagnetic field 806: light source

808: illumination optical system 810: open hole-based diffraction light modulator

812: filtering optics 816: projection and scanning optics

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a diffractive light modulator, and more particularly, to form one pixel with an element having one ribbon-shaped upper micromirror by forming a lower reflector in the base member and having an open hole in the upper micromirror positioned away from the base member. The present invention relates to an open hole-based diffractive light modulator.

In general, optical signal processing has advantages of high speed, parallel processing capability, and large-capacity information processing, unlike conventional digital information processing, which cannot process a large amount of data and real-time processing, and design a binary phase filter using spatial light modulation theory. Research on fabrication, optical logic gates, optical amplifiers, image processing techniques, optical devices, optical modulators, etc.

The dual spatial optical modulator is used in the fields of optical memory, optical display, printer, optical interconnection, hologram, and the like, and research on the development of a display device using the same is underway.

Such a spatial light modulator is, for example, a reflective deformable grating light modulator 10 as shown in FIG. 1. Such a modulator 10 is disclosed in US Pat. No. 5,311,360 to Bloom et al. The modulator 10 includes a plurality of regularly spaced deformable reflective ribbons 18 having reflective surface portions and suspended above the substrate 16. An insulating layer 11 is deposited on the silicon substrate 16. Next, deposition of the sacrificial silicon dioxide film 12 and the low stress silicon nitride film 14 is followed.

The nitride film 14 is patterned from the ribbon 18 and a portion of the silicon dioxide layer 12 is etched so that the ribbon 18 is retained on the oxide spacer layer 12 by the nitride frame 20.

In order to modulate light having a single wavelength λ _0, the modulator is designed thick with a thickness of the oxide spacers 12 of the ribbon 18 so that the λ _0/4.

The lattice amplitude of this modulator 10, defined by the vertical distance d between the reflective surface 22 on the ribbon 18 and the reflective surface of the substrate 16, is the ribbon 18 (the ribbon 16 serving as the first electrode). Is controlled by applying a voltage between the reflective surface 22 of the substrate 16 and the substrate 16 (the conductive film 24 under the substrate 16 serving as the second electrode).

In the undeformed condition, that is, while no voltage is not applied, the grating amplitude is λ ₀ / equal to 2, the car full path between reflected from the ribbons and the substrate the light like a λ _0, the reinforcing phase such reflected light Let's do it.

Thus, in the undeformed state, the modulator 10 reflects light as a planar mirror. The undeformed state is indicated as 20 in FIG. 2 showing incident light and reflected light.

When a proper voltage is applied between the ribbon 18 and the substrate 16, electrostatic forces deform the ribbon 18 in the down position toward the surface of the substrate 16. In the down position, the grating amplitude is changed like the λ _0/4. The total path difference is half of the wavelength, and the light reflected from the modified ribbon 18 and the light reflected from the substrate 16 have a destructive interference.

As a result of this interference, the modulator diffracts incident light 26. The modified state is indicated by 28 and 30 in FIG. 3, respectively, showing the light diffracted in the +/- diffraction modes (D + 1, D-1).

However, BLUM's optical modulator uses an electrostatic method to control the position of the micromirror, in which case the operating voltage is relatively high (usually around 30V) and the relationship between applied voltage and displacement is not linear. There is a disadvantage that the reliability is not high in controlling the light.

In order to solve this problem, Korean Patent Application No. P2003-077389 discloses a "thin film piezoelectric optical modulator and its manufacturing method."

 4 is a cross-sectional view of a recessed thin film piezoelectric optical modulator according to the related art.

Referring to the drawings, the recessed thin film piezoelectric optical modulator according to the related art includes a silicon substrate 401 and an element 410.

Here, the element 410 has a constant width and a plurality of constant alignment to form a recessed thin film piezoelectric optical modulator. In addition, the elements 410 have different widths and are alternately arranged to form a recessed thin film piezoelectric optical modulator. In addition, the elements 410 may be spaced apart from each other at a predetermined interval (almost the same distance as the width of the element 410), in which case the micromirror layer formed on all of the upper surface of the silicon substrate 401 is incident Reflects and diffracts light.

The silicon substrate 401 has a depression to provide an air space to the element 410, an insulating layer 402 is deposited on the upper surface, and ends of the element 410 are attached to both sides of the depression. .

The element 410 has a rod shape, and the bottom surfaces of both ends are attached to both side regions outside the recessed portion of the silicon substrate 401 so that the center portion is spaced apart from the recessed portion of the silicon substrate 401. The portion located in the depression of the 401 includes a lower support 411 movable up and down.

In addition, the element 410 is stacked on the left end of the lower support 411, and is laminated on the lower electrode layer 412 and the lower electrode layer 412 to provide a piezoelectric voltage, and contraction and A piezoelectric material layer 413 that expands to generate a vertical driving force, and an upper electrode layer 414 that is stacked on the piezoelectric material layer 413 and provides a piezoelectric voltage to the piezoelectric material layer 413.

In addition, the element 410 is stacked on the right end of the lower support 411, and is laminated on the lower electrode layer 412 'and the lower electrode layer 412' for providing a piezoelectric voltage. A piezoelectric material layer 413 'that contracts and expands to generate a vertical driving force, and an upper electrode layer 414' that is stacked on the piezoelectric material layer 413 'and provides a piezoelectric voltage to the piezoelectric material layer 413'. Doing.

In addition, Korean Patent Application No. P2003-077389 describes the protruding type in addition to the depression type described above.

On the other hand, the optical modulator of the type described in the patent of Bloom, Samsung Electro-Mechanics, etc. can be used as an element for displaying an image. In this case, at least two adjacent elements may form one pixel. Of course, three may be one pixel, four may be one pixel, or six may be one pixel.

However, optical modulators of the kind described in the patents of Bloom, Samsung Electro-Mechanics, etc. have certain limitations in achieving miniaturization. That is, no matter how small the width of the element of the optical modulator can be less than 3um, there is a limit that the distance between the element and the element can not be smaller than 0.5um.

In addition, since at least two or more elements are required to construct a diffractive pixel using such elements, there is a limit in miniaturization of the device.

Accordingly, an object of the present invention is to provide a diffractive light modulator capable of miniaturizing a product by making one pixel using at least one ribbon element.

The present invention for achieving the above object, the base member; It has a ribbon shape, and the center portion is spaced apart from the base member to have a space. The bottom surfaces of both ends are fixed to the base member, and the top surface is formed of a reflective surface to reflect incident light, and an open hole is formed. An upper reflector configured to pass incident light; A lower reflector positioned above the base member and spaced apart from each other to have a space below the upper reflector, and having a reflective surface reflecting light incident through the open hole; And driving means for moving the center of the upper reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector.

In addition, the present invention, the base member; It has a ribbon shape, and the center portion is spaced apart from the base member to have a space. The bottom surfaces of both ends are fixed to the base member, and the top surface is formed of a reflective surface to reflect incident light, and an open hole is formed. A plurality of upper reflectors configured to pass incident light and arranged in parallel with each other to form an array; A lower reflector positioned above the base member and spaced apart from each other to have a space below the upper reflector, and having a reflective surface reflecting light incident through the open hole; And a plurality of driving means for moving a corresponding central portion of the upper reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector.

In addition, the present invention is a base member formed with a depression; An upper reflector having a ribbon shape at both ends, which is attached to an area outside the depression of the base member, intersects the depression, and has an open hole to allow incident light to pass, and an upper surface formed as a reflective surface to reflect incident light; Both ends are fixed to the side wall of the depression formed in the base member in a ribbon shape, and are positioned parallel and spaced apart from the upper reflection part, and the center part is movable up and down, and the lower reflection reflects light incident through the open hole. part; And driving means for moving the lower reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector.

In addition, the present invention, the base member is formed with a depression; Both ends are attached to the area beyond the depression of the base member in a ribbon shape and intersect the depression, and have an open hole to pass incident light, and the upper surface is formed as a reflective surface to reflect the incident light, and are arranged side by side. A plurality of upper reflector to form a; Both ends are fixed to the side wall of the depression formed in the base member in a ribbon shape, and are positioned parallel and spaced apart from the corresponding upper reflecting portion, and the center portion is movable up and down, reflecting the light incident through the open hole. A lower reflector arranged side by side to form an array; And a plurality of driving means for moving the lower reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector.

In addition, the present invention, the light source for emitting light; Both ends of the base member and the base member are fixed to the base member so as to form a space in a ribbon shape, and an open hole is provided to pass the light and has a reflective surface to reflect the incident light and be arranged side by side to form an array. A lower reflector having a plurality of upper reflectors and a reflecting surface positioned above the base member and spaced apart to have a space below the upper reflector and reflecting light incident through the open hole; An open hole base for modulating incident light to generate diffracted light including a plurality of driving means for moving the center of the upper reflecting part up and down to change the amount of diffracted light formed by the reflected light of the upper reflecting part and the lower reflecting part; Diffraction light modulator; An illumination optical unit irradiating light incident from the light source to the open hole-based diffraction light modulator; A filtering optical unit for selecting and passing a desired diffraction light from the diffracted light modulated by the open hole-based diffractive light modulator; And a projection and scanning optical unit for scanning the diffracted light passing through the filtering optical unit to the screen, and a display device using an open hole-based diffractive light modulator.

In addition, the present invention, a substrate; An insulation layer stacked on the substrate; Sacrificial layers formed at both ends of the insulating layer and protruding upward; A lower reflector positioned on the insulating layer and having a reflective surface formed between the sacrificial layers to reflect incident light; A lower support spanning the upper portion of the sacrificial layer and having an open hole; An upper micromirror stacked on a center portion of the lower supporter, the upper side being formed with a reflective surface to reflect incident light, and having an open hole corresponding to the open hole to allow incident light to pass therethrough; Located at both ends of the lower support and provided with a piezoelectric material layer, when a voltage is applied, the center portion of the lower support is moved up and down by contraction and expansion of the piezoelectric material layer to form reflected light of the upper micromirror and the lower reflector. And driving means for changing the amount of diffracted light.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to FIG. 5A.

5A is a perspective view of a portion of an open hole-based diffractive light modulator according to a first embodiment of the present invention.

Referring to the drawings, the open-hole-based diffractive light modulator according to the first embodiment of the present invention includes a base member 501a, an insulating layer 502a, a lower reflector 503a, and an element 510a. have. Here, although the insulating layer and the lower reflector are configured as separate layers, if the insulating layer has a property of reflecting light, the insulating layer itself can function as the lower reflector. In addition, although the insulating layer 502a is formed on the surface of the base member 501a, the insulating layer 502a may not be necessary and the lower reflector 503a may be formed directly without forming the insulating layer 502a.

The base member 501a is provided with a recess to provide an air space to the element 510a, an insulating layer 502a is stacked, a lower reflecting portion 503a is deposited on the upper side, and both sides deviate from the recess. The lower surface of the element 510a is affixed to it. As the base member 501a, a silicon substrate may be used, and as a material, a single material such as Si, Al ₂ O ₃ , ZrO ₂ , Quartz, and SiO ₂ may be used. The bottom and top layers (indicated by dotted lines in the drawing) may be used. Can also be formed using other heterogeneous materials. And the base member 501a can also use a glass substrate.

The lower reflector 503a is formed on the base member 501a and reflects incident light. The lower reflector 503a may be a micro mirror and a metal (Al, Pt, Cr, Ag, etc.) may be used as the material used.

The element 510a has a ribbon shape, and has a lower supporter having lower surfaces at both ends attached to both side regions outside the depression of the base member 501a so that the center portion is spaced apart from the depression of the base member 501a. 511a). Here, the lower support 511a is named because it is located below the piezoelectric layers 520a and 520a '.

Piezoelectric layers 520a and 520a 'are provided on both side surfaces of the lower support 511a, and the driving force of the element 510a is provided by contraction and expansion of the provided piezoelectric layers 520a and 520a'.

Examples of the material constituting the lower support 511a include Si oxide (for example, SiO _2, etc.), Si nitride series (for example, Si ₃ N _4, etc.), ceramic substrates (Si, ZrO ₂ , Al ₂ O _3, etc.), Si Carbides and the like.

The left and right piezoelectric layers 520a and 520a 'are stacked on the lower electrode layers 521a and 521a' for providing the piezoelectric voltage and the lower electrode layers 521a and 521a 'and contract and expand when voltage is applied to both surfaces. And the upper electrode layers 523a, which are stacked on the piezoelectric material layers 522a and 522a 'that generate the vertical driving force, and provide the piezoelectric voltage to the piezoelectric material layers 522a and 522a'. 523a '). When voltage is applied to the upper electrode layers 523a and 523a 'and the lower electrode layers 521a and 521a', the piezoelectric material layers 522a and 522a 'contract and expand to generate vertical movement of the lower support 511a.

Pt, Ta / Pt, Ni, Au, Al, Ti / Pt, IrO ₂ , RuO _2, etc. may be used as the electrode material of the electrodes 521a, 521a ', 523a, 523a'. Deposit by sputter or evaporation.

On the other hand, the upper micro mirror 530a is deposited on the central portion of the lower support 511a and has a plurality of open holes 531a1 to 531a3. Here, the shape of the open holes 531a1 to 531a3 is preferably rectangular, but any closed curve such as circular or elliptical may be used. The lower supporter 511a and the upper micromirror 530a may be referred to as an upper reflector 540a. If the lower support is formed of a light reflective material, the lower support may be formed to function as the upper reflector 540a without using the upper micro mirror.

The open holes 531a1 to 531a3 allow incident light incident on the element 510a to penetrate the incident light to the lower reflector 503a corresponding to the portion where the open holes 531a1 to 531a3 are formed. The portion 503a and the upper micromirror 530a may form pixels.

That is, for example, part (A) of the upper micromirror 530a having the open holes 531a1 to 531a3 and part (B) of the lower reflector 503a may form one pixel.

In other words, the upper micromirror 530a has a reflective surface to reflect incident light to form reflected light, and passes through incident light through the open hole to enter the lower reflector 503a. Then, the lower reflector 503a reflects the incident incident light to form reflected light. As such, the reflected light reflected by the upper micromirror 530a and the reflected light reflected by the lower reflector 503a interfere with each other to cause diffracted light. The light quantity of the diffracted light is changed according to the step between the upper micromirror 530a and the lower reflector 503a.

At this time, incident light incident through the portion where the open holes 531a1 to 531a3 of the upper micromirror 530a are formed may be incident on a corresponding portion of the lower reflector 503a and the upper micromirror 530a and the lower reflector The maximum diffracted light is generated when the interval of 503a becomes an odd multiple of lambda / 4. And, although shown here for only one element 510a, the open hole-based diffractive light modulator of the present invention may be formed by a plurality of parallel elements. That is, the open hole-based diffractive light modulator of the present invention is formed of an element array, and FIGS. 6 and 7 illustrate this well.

By using the element array according to the present invention, it is possible to implement a display device of a desired pixel using a smaller number of elements than in the prior art.

For example, in the prior art, one pixel may be implemented with at least two ribbon elements. In the prior art, since the diffraction efficiency is 50% or less when two ribbon elements forming one pixel are two or less, one pixel is composed of four or six elements to increase the diffraction efficiency. As such, when one pixel is formed of four or more elements, the diffraction efficiency is 70% or more, and the number of elements can be increased to obtain a desired maximum efficiency. In the first embodiment of the present invention, when three open holes are formed in the upper micromirror 530a formed on one element 510a, three open holes 530a1 to 530a3 pass through the incident light to the lower reflector 503a. The same diffraction efficiency as that of one pixel is composed of six elements of. That is, the mirror portion adjacent to the first open hole 530a1 of the upper micromirror 530a according to the first embodiment of the present invention reflects incident light to operate as one ribbon element of the prior art, and the first open hole ( A corresponding lower lower reflector 503a of 530a1 reflects incident light incident through the first open hole 530a1 to act as another ribbon element, and a second open hole of the upper micromirror 530a. The mirror portion adjacent to 530a2 reflects the incident light and acts like another ribbon element of the prior art, and the corresponding lower reflector 503a of the second open hole 530a2 is formed in the second open hole 530a2. Reflects the incident light incident through it and acts like another ribbon element, and the mirror portion adjacent to the third open hole 530a3 of the upper micromirror 530a reflects the incident light, like another ribbon element of the prior art. action The lower reflector 503a corresponding to the lower portion of the third open hole 530a3 reflects the incident light incident through the third open hole 530a3 to operate as another ribbon element. Using the upper micromirror 530a and the lower reflector 503a having the open holes 530a1 to 530a3, one ribbon element can obtain diffraction efficiency obtained when one pixel is formed by using six ribbon elements. 510a can be used.

As an example, when a high definition digital TV format (1080 × 1920) is implemented using such a diffraction type optical modulator, 1080 pixels are vertically configured and each pixel is 1920 optically modulated to configure a frame. . In this case, when one pixel is composed of four or six driving ribbons using the prior art, 1080 x 4 (or 6) driving ribbons are required to configure 1080 pixels, but two or three of the present invention are used. Using ribbon-shaped elements with four open holes, 1080 pixels can be formed using only 1080 × 1 ribbon elements, making it easy to manufacture, increasing productivity, and manufacturing devices with small size.

5B is a perspective view of a portion of an open hole-based diffractive light modulator according to a second embodiment of the present invention.

Referring to the drawings, the open hole-based diffractive light modulator according to the second embodiment of the present invention includes a base member 501b, a lower reflector 503b, and an element 510b.

Here, unlike the first embodiment, the lower reflector 503b is composed of a plurality of lower reflector segments 503b1 to 503b3, and the plurality of lower reflector segments 503b1 to 503b3 are formed of the upper micromirror 530b. The surfaces of the insulating layers 502a of the open holes 531a1 to 531a3 are separated from each other. The other structure is the same as that of FIG. 5A.

5C is a perspective view of a portion of an open hole-based diffractive light modulator according to a third exemplary embodiment of the present invention.

Referring to the drawings, the open-hole-based diffractive optical modulator according to the third embodiment of the present invention is an insulating layer buried silicon substrate (SIMOX SOI; Separation by IMplanted OXygen Silicon-On-Insulator, hereinafter abbreviated " A base member 501c formed of an " insulating layer buried silicon substrate &quot;, a lower reflector 503c, and an element 510c.

In addition, the third embodiment of the present invention differs from the first embodiment of FIG. 5A in that an insulating layer embedded silicon substrate is used instead of a silicon substrate as the base member 501c. Since the manufacturing process is well known, the detailed description is omitted here.

The base member 501c of the insulating layer buried silicon substrate used in the present invention includes a silicon substrate 501c1, a silicon oxide insulating layer 501c2 formed by injecting oxygen ions into the silicon substrate, and a high concentration of oxygen on the silicon substrate. It is composed of a silicon sacrificial layer (501c3) formed by implanting. The silicon sacrificial layer 501c3 is etched under the upper micromirror 530a to secure a moving space (air space) through which the element 510c can move up and down. In addition, the silicon sacrificial layer 501c3 is disposed below the piezoelectric layers 520a and 520a 'such that the upper micromirrors 530a are driven by shrinkage expansion of the piezoelectric materials 522c and 522c' of the piezoelectric layers 520a and 520a '. The part is partially etched. The silicon oxide insulating layer 501c2 may be regarded as an etch stop layer that protects the silicon substrate 501c1 from being etched when the silicon sacrificial layer 501c3 is etched.

The third embodiment of the present invention differs from the first embodiment in that the lower reflector 503c is composed of a plurality of separated lower reflector fragments 503c1 to 503c3. Is the same as

The third embodiment of the present invention differs from the first embodiment in that the silicon sacrificial layer 501c3 provides the moving space (air space) of the element 510c. That is, in the third embodiment of the present invention, a separate depression is not required for the silicon substrate 501c1. In this regard, the silicon sacrificial layer 501c3 may be viewed as a supporting member that supports the element 510c to provide a moving space for the element 510c. The other configuration and operation of the open hole-based diffractive light modulator according to the third embodiment of the present invention are the same as those of the first embodiment.

FIG. 5D is a perspective view of a portion of an open hole-based diffractive optical modulator according to a fourth embodiment of the present invention, and includes a base member 501d, a lower reflector 503d, and an element 510d formed of a silicon substrate. Consists of.

The fourth embodiment of FIG. 5D differs from the first embodiment of FIG. 5A in that the directions of the open holes 531d1 to 531d3 are not aligned in the horizontal direction but in the vertical direction. The other structure is the same as that of FIG. 5A.

5E is a perspective view of a portion of an open hole-based diffractive light modulator according to a fifth embodiment of the present invention.

Referring to the drawings, the open hole-based diffraction optical modulator according to the fifth embodiment is different from the open hole-based diffraction light modulator of the first to fourth embodiments, and the lower support 511e of the element 510e is based on the silicon substrate. Protruding from the member 501e provides an air space, with the result that the element 510e is movable up and down.

That is, the element 510e has an upper micro mirror 530e that reflects incident light and floats on a protrusion of the base member 501e made of a silicon substrate and is movable up and down. In this case, if the lower support has light reflectivity, the lower support may be implemented to perform the role of the upper micro mirror without forming a separate upper micro mirror.

The lower support 511e of the element 510e protrudes to provide an air space to the element 510e, and both ends thereof are attached to the base member 501e.

The insulating layer 502e and the lower reflector 503e are deposited on the base member 501e made of a silicon substrate, and the lower reflector 503e reflects light incident through the open hole. In this case, if the insulating layer has light reflectivity, the insulating layer may serve as the lower reflector without having to deposit a separate lower reflector.

The element 510e has a ribbon shape, and a center portion thereof is protruded from the base member 501e and spaced apart from each other and attached to the base member 501e, respectively.

Piezoelectric layers 520e and 520e 'are stacked on the left and right sides of the upper portion of the element 510e, and the piezoelectric layers 520e and 520e' include lower electrode layers 521e and 521e 'for providing piezoelectric voltages and lower electrode layers ( 521e and 521e ', and are stacked on the piezoelectric material layers 522e and 522e', which contract and expand when voltage is applied to both surfaces, to generate a vertical driving force, and the piezoelectric material layers 522e and 522e '. Top electrode layers 523e and 523e 'that provide piezoelectric voltages to the layers 522e and 522e'.

When the voltage is applied to the upper electrode layers 523e and 523e 'and the lower electrode layers 521e and 521e', the element 510e may move upward to reflect the incident light to form reflected light.

It can be seen that the upper micromirrors 530e are deposited and the open holes 531e1 to 531e3 are disposed in the center portion of the lower support 511e where the piezoelectric layers 520e and 520e 'are not provided. Here, the shape of the open holes 531e1 to 531e3 is preferably rectangular, but any closed curve such as a circular oval may be formed.

The open holes 531e1 to 531e3 allow the lower reflector 503e corresponding to the portion where the open holes 531e1 to 531e3 are formed to form a pixel together with a portion adjacent to the corresponding portion of the upper micro mirror 530e. do.

That is, for example, part (A) of the upper micromirror 530e having the open holes 531e1 to 531e3 and part (B) of the lower reflector 503e may form one pixel.

At this time, the incident light may pass through a portion where the open holes 531e1 to 531e3 of the upper micromirror 530e are formed and enter the corresponding portion of the lower reflector 503e, and the upper micromirror 530e and the lower reflector 503e. It can be seen that the maximum diffracted light is generated when? Is an odd multiple of? / 4.

5F is a perspective view of a portion of an open hole-based diffractive light modulator according to a sixth embodiment of the present invention.

Referring to the drawings, the open hole-based diffraction optical modulator according to the sixth embodiment is different from the open hole-based diffraction optical modulator of the fifth embodiment in that the open holes are aligned in the vertical direction. The other structure is the same as that of FIG. 5E.

5G is a perspective view of a portion of a diffractive light modulator with an open hole according to a seventh embodiment of the present invention; Referring to the drawings, a diffraction light modulator with an open hole according to a seventh embodiment of the present invention is a base member 501g made of a silicon substrate, a lower reflector 503g, and an upper micromirror stacked on a silicon substrate. 510g).

The lower reflector 503g also functions as a lower electrode, and reflects incident light so as to form reflected light.

The upper micromirror 510g has open holes 511g1 to 511g3, and the shape of the open holes 511g1 to 511g3 is preferably rectangular, but any closed curve such as a circular oval may be formed.

The open holes 511g1 to 511g3 allow the lower reflector 503g corresponding to the portion where the open holes 511g1 to 511g3 are formed to form a pixel together with a portion adjacent to the corresponding portion of the upper micromirror 510g. do.

That is, for example, part (A) of the upper micromirror 510g having the open hole and part (B) of the lower reflecting part 503g may form one pixel.

At this time, the incident light may pass through a portion where the open holes 511g1 to 511g3 of the upper micromirror 510g are formed to enter a corresponding portion of the lower reflector 503g, and the upper micromirror 510g and the lower reflector 503g. It can be seen that the maximum diffracted light is generated when? Is an odd multiple of? / 4.

5H is a perspective view of a portion of the diffraction light modulator based on the open hole according to the eighth embodiment of the present invention.

Referring to the drawings, the diffraction light modulator based on the open hole according to the eighth embodiment is different from the diffraction light modulator based on the open hole of the seventh embodiment in that the alignment of the open holes is in the vertical direction. The other structure is the same as that of FIG. 5G. Meanwhile, the first to sixth embodiments of the present invention generate the vertical driving force by using the piezoelectric material layer, and the seventh and eighth embodiments generate the vertical driving force by using the electrostatic force. Drive force can be generated.

Meanwhile, in the fourth to eighth embodiments, the lower reflector is formed of one mirror layer, but as shown in the second embodiment, the lower reflector may be separated into multiple lower reflector segments. That is, the lower reflector may be formed of a plurality of lower reflector segments, and the plurality of lower reflector segments may be separated from each other on the surface of the corresponding insulating layer of the open hole of the upper micro mirror.

5I is a perspective view of a portion of a diffraction light modulator based on an open hole according to a ninth embodiment of the present invention;

Referring to the drawings, a diffraction light modulator based on an open hole according to a ninth embodiment of the present invention includes a base member 501i made of a silicon substrate and a lower reflector formed at an intermediate portion of a depression of the base member 501i. 510i, and an upper micromirror 520i across the surface of the base member 501i. The lower reflector 510i reflects incident incident light to form reflected light, but is also used as an upper electrode.

The lower electrode layer 503i is stacked on the bottom of the depression of the base member 501i, and provides the upper and lower driving force of the lower reflector 510i by the electrostatic force together with the lower reflector (the upper electrode) 510i positioned in the middle portion. do.

That is, when a voltage is applied to the lower electrode 503i and the lower reflector 510i, the lower electrode 503i and the lower reflector 510i are closely contacted by the electrostatic force to generate a driving force to be lowered, and when the voltage is not applied. The upper driving force is generated by the restoring force restored again.

On the other hand, the upper micro mirror 520i is provided with open holes 521i1 to 521i3. Here, the shape of the open holes 521i1 to 521i3 is preferably rectangular, but any closed curve such as a circular oval may be formed.

The open holes 521i1 to 521i3 allow the lower reflector 510i corresponding to the portions where the open holes 521i1 to 521i3 are formed to form pixels together with portions adjacent to the corresponding portions of the upper micro mirror 520i. do.

That is, for example, part (A) of the upper micromirror 520i having the open holes 521i1 to 521i3 and part (B) of the lower reflector may form one pixel.

At this time, the incident light may pass through the open hole of the upper micromirror 520i and enter the corresponding portion of the lower reflector 510i, and the upper micromirror 520i and the lower reflector 520i may be lambda / 4. It can be seen that the maximum diffracted light is generated when the power is odd.

FIG. 5J is an optical modulator based on an open hole according to a tenth embodiment of the present invention, which is different from the ninth embodiment in that the alignment direction is vertical.

Meanwhile, although the silicon substrate is used as the base member in the fourth and seventh to tenth embodiments, the insulating layer buried silicon substrate may be used as in the third embodiment.

6 is a perspective view of an element 1D array of an open hole-based diffractive light modulator according to a first embodiment of the present invention.

Referring to the drawings, the element 1D array of the open-hole-based diffractive optical modulator according to the first embodiment of the present invention has a plurality of elements 610a to 610n having upper micro mirrors in one direction and parallel to each other. Diffracted light is provided with respect to incident incident light. Meanwhile, although the element 1D array of the open hole-based diffractive optical modulator according to the first embodiment has been described herein, the element 1D array of the open hole-based diffraction optical modulator according to the second to tenth embodiments is also the same. Can be implemented.

7 is a perspective view of an element 2D array of an open hole-based diffractive light modulator according to a seventh embodiment of the present invention.

Referring to the drawings, in the element 2D array of the diffraction light modulator based on the open hole according to the seventh embodiment of the present invention, a plurality of elements 710a1 to 710nn are unfolded in the X direction and the Y direction. Herein, the element 2D array of the open hole-based diffractive optical modulator according to the seventh embodiment has been described. However, the element 2D array may be similarly implemented in other embodiments.

Meanwhile, in the present specification, the piezoelectric material layer is mainly described as a single layer, but a multilayer type in which the piezoelectric material layers are laminated in multiple layers is also possible.

8 is a block diagram of a display apparatus using an open hole-based diffractive light modulator according to an exemplary embodiment of the present invention. The optical system used in the display device can be used in a printer or the like. In this case, a drum is used instead of the screen 818 to be described below. In this case, the drum rotates when the drum is used. Scanning optics are not necessary.

Referring to FIG. 8, a display apparatus using a diffractive light modulator according to an exemplary embodiment of the present invention includes a display optical system 802 and a display electronic system 804. The display optical system 802 includes a light source 806 and an illumination optical unit 808 for generating linear light to emit light from the light source 806 to the open hole-based diffractive light modulator 810 as linear light. The open-hole-based diffraction light modulator 810 for modulating the linear light irradiated from the optical unit 808 to form diffraction light, Projection and scanning for condensing the diffracted light passing through the filtering optical unit 812 and the filtering optical unit 812 for passing the diffracted light of the desired order among the diffracted light of various orders and scanning the collected point light as a two-dimensional image Optics 816, and a display screen 818.

The display field 804 is connected to a light source 806, an open hole based diffractive light modulator 810, and a projection and scanning optic 816.

When the linear light is incident from the illumination optical unit 808, the open-hole-based diffraction light modulator 810 generates diffracted light by modulating the incident light under the control of the display electronic system 804.

FIG. 9A is a perspective view illustrating a case where linear light is obliquely illuminated on a plurality of upper micromirrors 812a to 811n of an element (811a to 811n) 1D array of an open hole-based diffraction optical modulator developed by Samsung Electro-Mechanics. When the upper micromirrors 812a to 812n move up and down, the linear light incident by the steps of the upper micromirrors 812a to 812n and the lower reflector 813 is modulated to generate diffracted light. At this time, the formed diffracted light is emitted obliquely because the incident light is obliquely incident.

FIG. 9B is a perspective view illustrating a case in which linear light is vertically illuminated on a plurality of upper micromirrors 812a to 811n of an element (811a to 811n) 1D array of an open hole-based diffraction optical modulator developed by Samsung Electro-Mechanics. When the plurality of upper micromirrors 812a to 812n move up and down, linear light incident by the steps of the upper micromirrors 812a to 812n and the lower reflector 813 is modulated to generate diffracted light. At this time, since the incident light is incident vertically, the zeroth order diffracted light is emitted vertically, and the ± first order diffracted light is emitted left and right, respectively.

On the other hand, the filtering optical system 812 separates the diffracted light of the desired diffraction order when the diffracted light having the multiple procedure orders is incident. The filtering optical system 812 is composed of a Fourier lens (not shown) and a filter (not shown), and selectively passes zero-order diffraction light or ± first-order light among incident diffracted light.

The projection and scanning optics 816 includes a condenser lens (not shown) and a scanning mirror (not shown), and scan the diffracted light incident on the screen 818 under the control of the display electronic system 804. do.

The display field 804 drives a scanning mirror (not shown) of the projection and scanning optics 816. Projection and Scanning The optical device 816 projects the image onto the display screen 818 and scans the display screen 818 to form a two-dimensional image on the display screen 818.

On the other hand, the description of FIGS. 8-9B produces a monochrome image, but may allow the creation of a curly image, which requires two additional light sources, two additional diffractive light modulators, and additional filters to the display optics 802. If included, its implementation is possible.

The present invention as described above, it is possible to configure one pixel using only one drive ribbon element.

In addition, the present invention, by forming a plurality of open holes in the upper micro mirror of the ribbon element, it is possible to obtain diffracted light with improved diffraction efficiency.

In addition, the present invention, by replacing the conventional four or six drive elements with one drive element can improve the yield in the manufacturing process, it is possible to reduce the manufacturing cost.

Claims (57)

Base member; It has a ribbon shape, and the center portion is spaced apart from the base member to have a space. The bottom surfaces of both ends are fixed to the base member, and the top surface is formed of a reflective surface to reflect incident light, and an open hole is formed. An upper reflector configured to pass incident light; A lower reflector positioned above the base member and spaced apart from each other to have a space below the upper reflector, and having a reflective surface reflecting light incident through the open hole; And And a driving means for moving the center of the upper reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector. The method of claim 1, The base member, Board; And A support member protruding from the upper side of the substrate and supporting each end of the upper reflector such that a central portion of the upper reflector is spaced apart from the substrate by forming a space therebetween; And the lower reflector is located above the substrate and reflects light incident through the open hole of the upper reflector.  The method of claim 2, And an insulating layer formed on the substrate and having the lower reflector on an upper side thereof.  The method of claim 1, The base member has a depression for providing a space, The lower reflector is formed in the depression of the base member, And the upper reflector is positioned across the depression such that a central portion of the upper reflector is spaced apart from the lower reflector.  The method of claim 4, wherein And an insulating layer formed on the base member and positioned above the lower reflector. The method of claim 1, The upper reflector, A lower support having a ribbon shape, a center portion of which is spaced apart from the base member to have a space, and having lower ends of both ends fixed to the base member, and having open holes formed to pass incident light; And An open hole is formed above the lower support and is formed at a position corresponding to the open hole of the lower support. An upper surface is formed with a reflective surface to reflect incident light, and an open hole is formed to pass incident light. An open-hole-based diffractive light modulator comprising a micro mirror.  The method of claim 1, The base member has a flat surface; And a center portion of the upper reflector is spaced apart from the lower reflector to secure a space.  The method of claim 1, And the upper reflector comprises a plurality of open holes aligned in the same direction as the direction crossing the base member.  The method of claim 1, And the upper reflector comprises a plurality of open holes aligned in a direction perpendicular to a direction in which the upper reflector crosses the base member.  The method of claim 1, The drive means, One end is positioned at the left end of the upper reflector, and the other end is spaced apart to the left from the center of the upper reflector, and contracts when voltage is applied to both sides of the piezoelectric material layer, including the piezoelectric material layer of the thin film. And a first piezoelectric layer providing vertical driving force by expansion. And One end is located at the right end of the upper reflector, and the other end is spaced to the right from the center of the upper reflector, and contracts when voltage is applied to both sides of the piezoelectric material layer, including the piezoelectric material layer of the thin film. And a second piezoelectric layer providing up and down driving force by expansion.  The method of claim 10, The first piezoelectric layer, The upper reflector becomes a lower electrode; A first piezoelectric material layer having one end positioned at a left end of the upper reflector, the other end spaced to the left from a central portion of the upper reflector, and generating contraction and expansion driving force when a voltage is applied to both surfaces; And Stacked on the first piezoelectric material layer and including a first upper electrode layer for providing a piezoelectric voltage, The second piezoelectric layer, The upper reflector becomes a lower electrode; A second piezoelectric material layer having one end positioned at the right end of the upper reflector, the other end spaced to the right from the center of the upper reflector, and generating a contraction and expansion drive force when a voltage is applied to both sides; And And a second upper electrode layer stacked on the second piezoelectric material layer and providing a piezoelectric voltage.  The method of claim 10, The first piezoelectric layer, The upper reflector becomes a lower electrode; One end is located at the left end of the upper reflector, the other end is located to the left from the central portion of the upper reflector, a plurality of first piezoelectric material layer to generate a contraction and expansion drive force when a voltage is applied to both sides ; A plurality of first upper electrode layers stacked between the plurality of first piezoelectric material layers, for providing a piezoelectric voltage; And Stacked on top of the plurality of first piezoelectric material layers, the second upper electrode layer providing a piezoelectric voltage; The second piezoelectric layer, The upper reflector becomes a lower electrode; A plurality of second piezoelectric material layers having one end positioned at a right end of the upper reflecting portion, the other end spaced to the right from a central portion of the upper reflecting portion, and generating contraction and expansion driving forces when a voltage is applied to both sides. ; A plurality of third upper electrode layers stacked between the plurality of second piezoelectric material layers, for providing a piezoelectric voltage; And And a fourth upper electrode layer stacked on top of the plurality of second piezoelectric material layers and providing a piezoelectric voltage. The method of claim 1, The drive means, The upper reflector is an upper electrode; And the lower reflector as a lower electrode, and wherein the upper reflector is vertically moved by an electrostatic force formed between the upper reflector and the upper reflector.  The method of claim 1, The drive means, And an electromagnetic force driving means for driving the upper reflector up and down using an electromagnetic force. Base member; It has a ribbon shape, and the center portion is spaced apart from the base member to have a space. The bottom surfaces of both ends are fixed to the base member, and the top surface is formed of a reflective surface to reflect incident light, and an open hole is formed. A plurality of upper reflectors configured to pass incident light and arranged in parallel with each other to form an array; A lower reflector positioned above the base member and spaced apart from each other to have a space below the upper reflector, and having a reflective surface reflecting light incident through the open hole; And And a plurality of driving means for moving a corresponding central portion of the upper reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector. The method of claim 15, The base member, Board; And A support member protruding from the upper side of the substrate and supporting both ends of each of the plurality of upper reflecting portions so that a central portion of each of the plurality of upper reflecting portions forms a space with the substrate, And the lower reflector is located above the substrate and reflects light incident through the open holes of the plurality of upper reflectors.  The method of claim 15, The base member has a depression for providing a space, The lower reflector is formed in the depression of the base member, Wherein each of the plurality of upper reflectors is positioned across the depression such that a central portion is spaced apart from the lower reflector and spaced apart from each other, and are arranged side by side to form an array. The method of claim 15, The base member has a flat surface; The center portion of the plurality of upper reflecting portion is spaced apart from the lower reflecting portion to secure space, and are arranged side by side with each other to form an array based diffraction light modulator. A base member having depressions formed therein; An upper micromirror having a ribbon shape, the both ends of which are attached to an area outside the depression of the base member and intersect the depression, having an open hole to pass incident light, and having an upper surface formed as a reflective surface to reflect the incident light;  Both ends are fixed to sidewalls of the recess formed in the base member in a ribbon shape, and are positioned parallel and spaced apart from the upper micromirror, and have a central portion movable up and down, and reflecting light incident through the open hole. part; And And a driving means for moving the lower reflector up and down to change the amount of diffracted light formed by the reflected light of the upper micromirror and the lower reflector. The method of claim 19, The drive means, A lower electrode layer stacked on the bottom of the depression; And And a voltage is applied to the lower reflector by using the lower reflector as an upper electrode, an electrostatic force is generated between the lower electrode layer and the lower reflector to move the lower reflector. A base member having depressions formed therein; Both ends are attached to the area beyond the depression of the base member in a ribbon shape and intersect the depression, and have an open hole to pass incident light, and the upper surface is formed as a reflective surface to reflect the incident light, and are arranged side by side. A plurality of upper micromirrors forming a;  Both ends are fixed to the side wall of the depression formed in the base member in a ribbon shape and are positioned parallel and spaced apart from the corresponding upper micro mirror, and the center portion is movable up and down, reflecting the light incident through the open hole. A lower reflector arranged side by side to form an array; And And a plurality of driving means for moving the corresponding lower reflector up and down to change the amount of diffracted light formed by the reflected light of the upper micromirror and the lower reflector. A light source for emitting light; Both ends of the base member and the base member are fixed to the base member so as to form a space in a ribbon shape, and an open hole is provided to pass the light and has a reflective surface to reflect the incident light and be arranged side by side to form an array. A lower reflector having a plurality of upper reflectors and a reflecting surface positioned above the base member and spaced apart to have a space below the upper reflector and reflecting light incident through the open hole; An open hole base for modulating incident light to generate diffracted light including a plurality of driving means for moving the center of the upper reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector; Diffraction light modulator; An illumination optical unit irradiating light incident from the light source to the open hole-based diffraction light modulator; A filtering optical unit for selecting and passing a desired diffraction light from the diffracted light modulated by the open hole-based diffractive light modulator; And And a projection and scanning optical unit for scanning the diffracted light that has passed through the filtering optical unit to the screen. A light source for emitting light; Both ends of the base member and the base member are fixed to the base member so as to form a space in a ribbon shape, and an open hole is provided to pass the light and has a reflective surface to reflect the incident light and be arranged side by side to form an array. A lower reflector having a plurality of upper reflectors and a reflecting surface positioned above the base member and spaced apart to have a space below the upper reflector and reflecting light incident through the open hole; Open hole base modulating incident light to generate diffracted light including a plurality of driving means for moving the center of the upper reflector up and down to change the amount of diffracted light formed by the reflected light of the upper reflector and the lower reflector. Diffraction light modulator; An illumination optical unit irradiating light incident from the light source to the open hole-based diffraction light modulator; A filtering optical unit for selecting and passing a desired diffraction light from the diffracted light modulated by the open hole-based diffractive light modulator; And And a projection optical unit for projecting the diffracted light that has passed through the filtering optical unit to the drum. Board; An insulation layer stacked on the substrate; Sacrificial layers formed at both ends of the insulating layer and protruding upward; A lower reflector positioned on the insulating layer and having a reflective surface formed between the sacrificial layers to reflect incident light; A lower support spanning the upper portion of the sacrificial layer and having an open hole; An upper micromirror stacked on a center portion of the lower supporter, the upper side being formed with a reflective surface to reflect incident light, and having an open hole corresponding to the open hole to allow incident light to pass therethrough; And Located at both ends of the lower support and provided with a piezoelectric material layer, when a voltage is applied, the center portion of the lower support is moved up and down by contraction and expansion of the piezoelectric material layer to form reflected light of the upper micromirror and the lower reflector. An open-hole-based diffractive light modulator comprising driving means for changing the amount of diffracted light to be. The method of claim 24, The substrate is a silicon substrate, In the driving means, lower electrodes are formed at both ends of the lower support, a piezoelectric material layer is stacked on the lower electrode, and an upper electrode is formed on the piezoelectric material layer, and a voltage is applied to the upper electrode and the lower electrode. The open hole-based diffractive light modulator, characterized in that the contraction or expansion. Base member; An intermediate portion spaced apart from the base member to secure a space, a first surface oriented on the base member and serving as a reflective surface reflecting incident light, and formed on the first surface to allow incident light to pass therethrough A first reflector supported by the base member including at least one open hole; A second reflector positioned between the first reflector and the base member and having a reflective surface spaced apart from the first reflector and reflecting incident light passing through at least one open hole of the first reflector; And An open-hole-based diffraction including driving means for moving the intermediate portion of the first reflector to vary with respect to the second reflector and for varying the amount of diffracted light formed by the reflected light of the first reflector and the second reflector Light modulator. The method of claim 26, The base member, Board; And A support member protruding from the substrate to support the first reflecting portion so that an intermediate portion of the first reflecting portion forms a space with the substrate, And the second reflector is located on the substrate and reflects light incident through the open hole of the first reflector.  The method of claim 27, And an insulating layer formed between the substrate and the second reflecting portion. The method of claim 26, The base member forms a depression for providing space, The second reflecting portion is formed in the depression of the base member, And the first reflector is positioned across the depression such that an intermediate portion is spaced apart from the second reflector. The method of claim 29, The first reflecting portion traverses the depression of the base member, The second reflector is supported by the side wall of the recess formed in the base member and is located in parallel and spaced apart from the first reflector, and the middle part is movable away from or near the first reflector, and passes through the open hole. Reflect the incident light, The driving means moves the second reflector relative to the first reflector to change the amount of diffracted light formed by the reflected light of the first reflector and the second reflector. . The method of claim 30, The drive means, A first electrode layer formed at the bottom of the depression; And When the voltage is applied to the second reflector using the second reflector as the second electrode layer, an electrostatic force is generated between the first electrode layer and the second reflector to move the second reflector. Diffractive light modulator.  The method of claim 29, And an insulating layer positioned between the base member and the second reflecting portion. The method of claim 26, The first reflector, A middle support spaced apart from the base member to form a space, the first support being supported by the base member and configured to pass through the incident light by forming an open hole; And An open hole is formed at a position opposite to the base member of the first support, and an open hole is formed at a position corresponding to the open hole of the first support. And an open hole-based diffractive light modulator comprising a first micro mirror configured to pass through the incident light. delete  The method of claim 26, And the first reflector comprises a plurality of open holes aligned in the same direction as the direction crossing the base member.  The method of claim 26, And the first reflector comprises a plurality of open holes aligned in a direction perpendicular to a direction in which the first reflector crosses the base member. delete The method of claim 36, The drive means, And at least two piezoelectric layer sections formed separately from each other in the first reflecting unit. The method of claim 38, And an electrode layer for providing a piezoelectric voltage to the piezoelectric layer section. delete  The method of claim 38, The piezoelectric layer, A plurality of piezoelectric material layers generating driving force by contraction and expansion when voltage is applied to both sides; A plurality of first electrode layers positioned between the layers of the plurality of piezoelectric material layers and providing piezoelectric voltages; And A second electrode layer positioned at the outermost layer of the piezoelectric material layer and providing a piezoelectric voltage, And the first reflecting portion acts as an electrode of the piezoelectric layer.  The method of claim 26, The drive means, And a first electrode layer and a second electrode layer, and relatively moving the first reflector and the second reflector by an electrostatic force between the first electrode layer and the second electrode layer. delete The method of claim 42, And the second electrode layer comprises the second reflector. delete  The method of claim 26, The drive means, An open hole-based diffractive light modulator, characterized in that for driving the first reflector using an electromagnetic force. Base member; Arranged to form an array, each of which is supported by the base member, an intermediate portion of which is spaced apart from the base member to secure a space, and a surface oriented to the base member is formed as a reflective surface to reflect incident light, A plurality of first reflectors formed with one open hole and configured to pass incident light; A second reflection between the base member and the first reflecting portion, the second reflecting portion being spaced apart from the first reflecting portion to secure a space, and having a reflecting surface reflecting light incident through the open hole of the first reflecting portion; part; And A plurality of driving means for moving a corresponding intermediate portion of each of the first reflecting portions away from or close to the base member to change the amount of diffracted light formed by the reflected light of the first reflecting portion and the second reflecting portion; Hall-based diffractive light modulator. The method of claim 47, The base member, Board; And A support member protruding from the substrate and supporting a plurality of the first reflecting portions so that an intermediate portion of each of the plurality of first reflecting portions is spaced apart from the substrate to secure a space; And the second reflector is formed on the substrate to reflect light incident through the open holes of the plurality of first reflectors. The method of claim 47, The base member is relatively flat in surface; And an intermediate portion of the plurality of first reflecting portions spaced apart from the second reflecting portion to arrange a space to form an array, thereby forming an array.  The method of claim 47, The base member has a depression for providing a space, The second reflecting portion is formed in the depression of the base member, Wherein each of the plurality of first reflecting portions is positioned across the depression such that an intermediate portion is spaced apart from the second reflecting portion and spaced apart, and arranged to form an array. 51. The method of claim 50, The first reflecting portion is across the depression of the base member, The second reflector is arranged to form an array and is supported to be spaced apart from the first reflector at a position corresponding to the first reflector by sidewalls of the depression of the base member, the first reflector Reflects incident light passing through the negative open hole, The driving means moves the corresponding second reflector relatively from the first reflector to change the amount of diffracted light formed by the reflected light of the first reflector and the second reflector. Modulator. A light source for emitting light; A plurality of first reflections supported by the base member so that the intermediate part forms a space, and having an open hole to pass the light and having a reflective surface to reflect incident light and arranged side by side to form an array A second reflecting portion located between the base member and the first reflecting portion, the second reflecting portion spaced apart from the first reflecting portion, and having a reflecting surface reflecting light incident through the open hole; An open-hole-based diffraction modulating incident light to generate diffracted light including a plurality of driving means for moving an intermediate portion of the first reflecting part to vary the amount of diffracted light formed by the reflected light of the first reflecting part and the second reflecting part Optical modulators; An illumination optical unit irradiating light incident from the light source to the open hole-based diffraction light modulator; A filtering optical unit for selecting and passing a desired diffraction light from the diffracted light modulated by the open hole-based diffractive light modulator; And And a projection and scanning optical unit for scanning the diffracted light that has passed through the filtering optical unit to the screen. A light source for emitting light; A plurality of first reflections supported by the base member so that the intermediate part forms a space, and having an open hole to pass the light and having a reflective surface to reflect incident light and arranged side by side to form an array A second reflecting portion located between the base member and the first reflecting portion, the second reflecting portion spaced apart from the first reflecting portion, and having a reflecting surface reflecting light incident through the open hole; An open-hole-based diffraction modulating incident light to generate diffracted light including a plurality of driving means for moving an intermediate portion of the first reflecting part to vary the amount of diffracted light formed by the reflected light of the first reflecting part and the second reflecting part Optical modulators; An illumination optical unit irradiating light incident from the light source to the open hole-based diffraction light modulator; A filtering optical unit for selecting and passing a desired diffraction light from the diffracted light modulated by the open hole-based diffractive light modulator; And And a projection optical unit for projecting the diffracted light that has passed through the filtering optical unit to the drum. Board; At least one sacrificial layer protruding from the substrate; A reflector formed on a substrate between the sacrificial layers and having a reflective surface reflecting incident light; A support span across the sacrificial layer and having an open hole formed therein; A micromirror formed on the support and formed with a reflective surface on a surface oriented to the substrate to reflect incident light, and an open hole corresponding to the open hole to allow incident light to pass therethrough; And Open-hole-based diffraction light including drive means for varying the amount of diffracted light formed by the reflected light of the micromirror and the reflector, including a piezoelectric material layer that moves the middle portion of the support by contraction and expansion when a voltage is applied. Modulator. The method of claim 54, The substrate is a silicon substrate, The driving means is a piezoelectric material layer is formed on the electrode, when the voltage is applied to the open-hole-based diffraction light modulator, characterized in that for generating a driving force by contraction and expansion. The method of claim 26, And the first reflector moves away from or close to the second reflector under control of the driving means. The method of claim 26, The first reflector is an elongated rectangle, the open hole-based diffractive light modulator, characterized in that movable in the lateral direction.

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