KR100830957B1 - An apparatus for cleaning a microfluidic chip having microchannels - Google Patents

Abstract

The present invention relates to a cleaning apparatus for cleaning a microfluidic chip in which microchannels are formed.

The apparatus includes a chip holder for placing a microfluidic chip to be cleaned, and a flow path controller for appropriately distributing a flow path of washing water. In the present invention, the flow path controller can appropriately control the flow path through which the washing water flows, so that the channel of the desired position can be washed or the contamination already formed can be easily removed.

Clean-up, lab-on-a-chip, electrophoresis, microchannels, microfluidics

Description

A device for cleaning a microfluidic chip having microchannels

Figure 1a and 1b is a perspective view and a plan view of an example of an electrophoretic microfluidic chip to which the cleaning apparatus according to the present invention can be applied, respectively.

Figure 2a is a schematic diagram of a microfluidic chip cleaning device according to the present invention.

Figure 2b is a perspective view of a microfluidic chip cleaning device according to the present invention.

Figure 3a is an exploded perspective view of the chip fixing part of the cleaning device according to the present invention.

Figure 3b is a photograph of each part of the chip fixing part of the cleaning device according to the present invention.

Figure 3c is a photograph of the chip holding the microfluidic chip is placed.

4A to 4C are respectively a perspective view, a perspective view, and a plan sectional view of a central fixing part of the flow path controller constituting the washing apparatus according to the present invention;

5a and 5b are a perspective view and a perspective view of the upper rotary plate of the flow path controller constituting the cleaning device according to the present invention.

Figure 6a is a side cross-sectional view of the central fixing portion of the flow path controller constituting the cleaning device according to the present invention.

Figure 6b is a side cross-sectional view of the flow path controller combined with the central fixing portion and the rotating plate.

7A and 7B are photographs taken of respective parts and assembled shapes of the flow path controller, respectively.

8 is a view for explaining a flow path forming process by the combination of the flow path controller central fixing portion and the upper and lower rotary plate.

9 is a graph showing the relative difference between the theoretical and experimental values of the pressure difference across the channels at a given flow pump pressure over time.

Figure 10a and 10b is a microscopic picture of the microchannel after washing with a microfluidic chip of the microfluidic chip used as an electrophoretic lab-on-a-chip, and the cleaning apparatus according to the present invention, respectively.

<Explanation of symbols for the main parts of the drawings>

1: washing liquid container 2: flow pump

3: upper rotating plate 4: center fixing part

5: lower rotating plate 6: tubing

7: chip fixing part upper substrate 8: chip fixing part lower substrate

9: microfluidic chip 10: gasket

11, 12a ~ 12d: tubing connecting member 13a: washing liquid injection portion

13b: washing liquid discharge portion 14a: BI connecting passage

14b: BO connection path 14c: SI connection path

14d: SO connecting passage 15a ~ 15d: hole for washing liquid

16a: chip fixing part substrate fastening member 16b: screw hole

SI: sample inlet SO: sample outlet

BI: Buffer input BO: Buffer outlet

17a: sample channel 17b: separate channel

18: Gasket hole 19a ~ 19d: Side connection passage

20: Gasket attached to the upper rotating plate

100: chip fixing part 200: flow path controller

The present invention relates to a cleaning apparatus for cleaning a microfluidic chip in which microchannels are formed.

The microfluidic chip refers to a chip capable of analyzing various substances present in the chip while flowing a small amount of analyte into the microchannel formed therein. The microfluidic chip is called a lab-on-a-chip (LOC: lab on chip), and is being developed in the form of a chip that can analyze analyte at a time in a small chip. . Microfluidic chips are being used for the analysis, separation, and synthesis of materials, and their fields of use are expanding.

In particular, in recent electrophoresis experiments, instead of fused silica capillary used as a channel for separating samples, a lab manufactured by a micro-electro mechanical system (MEMS) process and a micromachining technique is used. Use on-chip. The lab-on-a-chip is based on a microfluidic chip, and a sample channel into which a sample solution to be analyzed is introduced and discharged, and a separation channel into and out of a buffer (buffer) are formed.

Figures 1a and 1b is a perspective view and a plan view of an example of an electrophoretic microfluidic chip to which the cleaning apparatus according to the present invention can be applied, respectively. The microfluidic chip is provided with a sample channel 17a through which a sample solution flows and a separation channel 17b through which a buffer flows. At both ends of the sample channel 17a, a sample inlet SI and a sample outlet SO through which the sample solution flows are formed. In addition, at both ends of the separation channel 17b, a buffer inlet BI through which a buffer flows in and a buffer outlet BO through which the buffer flows out are formed.

Electrodes are provided at each of the inlets SI and BI and the outlets SO and BO, so that an electric field can be applied to the sample channel 17a and the separation channel 17b. The sample solution is moved from the inlet SI to the outlet SO by an electric field applied to the sample channel 17a. As the sample solution moves as described above, the sample solution is placed at the intersection X between the sample channel 17a and the separation channel 17b. At this time, the particles dispersed in the sample solution are separated from the sample solution by the difference in mobility according to the electric field applied to the separation channel 17b.

The width and depth of the channel formed on the electrophoretic lab-on-a-chip as described above is 100 μm or less, typically tens of μm. In addition, both sample and buffer solutions containing proteins, DNA, cells, and the like are usually water soluble and have a higher viscosity than pure water. Therefore, the sample particles are strongly adsorbed on the channel wall surface.

In this way, when the channel is blocked by adsorption or contamination of the channel wall surface, the function as a lab-on-a-chip is lost. This channel clogging phenomenon maximizes the separation effect by forming a matrix structure with a gel material in addition to the buffer solution, rather than the channel zone electrophoresis (CZE) method, in which the inside of the channel is filled only with a buffer solution. The problem is very serious because it frequently occurs in CGE (channel gel electrophoresis).

As the material of the electrophoretic lab-on-a-chip, plastic such as PDMS (polydimethylsiloxane), glass, quartz, or silicon is used. When using plastics such as PDMS, soft lithography and bonding techniques can be used to produce lab-on-a-chips at relatively low process costs, and as disposable chips that can be used and discarded once. It became.

However, in the case of using glass, quartz, silicon, etc., it is manufactured by dry etching, wet etching, and bonding method, which are very expensive, so that expensive chips are repeated for a long time. I'm using it.

Therefore, after using the electrophoretic lab-on-a-chip, a process of washing the microchannels to prevent contamination is essential. However, to date, satisfactory level of electrophoretic lab-on-a-chip cleaning apparatus has not been developed.

Currently, some of the washing methods used are technical limitations, and thus, the microchannels of the electrophoretic lab-on-a-chip are not completely cleaned.

Among the washing methods currently used, a method of injecting a sample solution by a vacuum pump is a method of continuously flowing the washing solution by applying a vacuum pressure difference across both channels. However, there is a problem that the vacuum pressure difference is absolutely small to sufficiently remove the sample particles adsorbed in the channel.

On the other hand, the built-in chip method adopted by microchip electrophoresis of Shimadzu Instruments, Kyoto of Japan or Caliper Life Sciences, MA of the United States has a chip after use. It can be removed from the container, manually cleaned using a syringe, or washed after use. However, there is a problem that the pressure difference applied to the channel is basically weak, so that a strong flow is not formed and the washing is not sufficiently performed.

The present invention has been proposed to solve the above problems, and in the present invention, the microfluidic chip to be cleaned is placed in the present invention, and the chip fixing portion, which is not leaked, and the washing water are distributed in a desired flow path and the pressure difference. And a flow path controller capable of intensively applying to wash or decontaminate the desired channel. A tubing is connected between the flow path controller and the chip fixing part so that the washing water flows.

According to the present invention, by forming a strong flow in the microchannel of the electrophoretic lab-on-a-chip by the pressure difference of the flow pump, by removing the particles adsorbed in the microchannel by this flow, the microfluidic chip to the particles To prevent contamination.

In particular, the washing apparatus according to the present invention can raise the pressure difference of the flow pump up to 20 bar (bar) to ensure sufficient washing. According to the present invention, it is possible to extend the life of the electrophoretic lab-on-a-chip, and can be used repeatedly for a long time, thereby reducing the purchase cost and manufacturing cost of the chip.

Accordingly, an object of the present invention is to provide a cleaning device for cleaning a microfluidic chip in which microchannels are formed.

The present invention relates to a cleaning apparatus for cleaning a microfluidic chip in which microchannels are formed.

The cleaning apparatus according to the present invention includes a chip holder for placing the microfluidic chip, and a flow path controller for flowing a cleaning liquid to the chip holder.

In the present invention, the chip fixing part includes an upper substrate and a lower substrate, the lower substrate is formed with a groove for placing the microfluidic chip, the upper substrate is formed in the microfluidic chip fine A channel connecting passage connecting the inlet or the outlet of the channel with the outside of the chip fixing part may allow the cleaning liquid to flow between the outside of the chip fixing part and the microchannel.

In addition, in the present invention, the flow path controller includes a central fixing part, an upper rotating plate, a lower rotating plate, and a central axis, wherein the central fixing part, the upper rotating plate, and the lower rotating plate have a hole formed at the center thereof, and the central axis is By forming a shaft through the hole, the central fixing portion, the upper rotating plate, and the lower rotating plate are rotatably coupled about the central axis.

The central fixing portion has a plurality of washing liquid passage holes formed radially at the same distance with respect to the central axis so that the washing liquid can pass between the upper and lower portions of the central fixing portion, respectively, the upper rotating plate and the lower rotating plate, respectively. There is one hole formed.

Hereinafter, with reference to the drawings will be described a preferred embodiment of the present invention. However, the present invention is not limited by the following examples.

2A and 2B are schematic views and perspective views for explaining the microfluidic chip cleaning device according to the present invention, respectively.

As shown in FIGS. 2A and 2B, the microfluidic chip cleaning device according to the present invention includes a chip fixing part 100 for placing the microfluidic chip 9, and a cleaning liquid 1. A flow path controller 200 for flowing to the government 100 is included.

The washing apparatus according to the present invention may further include a pump 2 for introducing the washing liquid in the washing liquid container 1 into the flow path controller 200.

Hereinafter, with reference to FIGS. 2A, 2B, and 3A to 3C, the chip fixing part 100 constituting the cleaning apparatus according to the present invention will be described.

3A is an exploded perspective view of the chip fixing part of the washing apparatus according to the present invention, FIG. 3B is a photograph of each component constituting the chip fixing part, and FIG. 3C is a photograph photographing the chip fixing part.

In the present invention, the chip fixing part 100 includes an upper substrate 7 and a lower substrate 8. The upper substrate 7 and the lower substrate 8 is formed with a screw hole 16b, it can be easily coupled by the fastening member (16a).

The lower substrate 8 is provided with a groove for placing the microfluidic chip 9 therein. The upper substrate 9 is a channel connection connecting the inlet (BI, SI) or outlet (BO, SO) of the micro-channel formed in the microfluidic chip (9) with the outside of the chip fixing part 100 Passages 14a to 14d may be provided to allow the cleaning liquid to flow between the outside of the chip fixing part 100 and the microchannels.

Between the upper substrate 7 and the lower substrate 8, a gasket 10 closely attached to the upper substrate 7, the lower substrate 8, and the microfluidic chip 9 is further prevented from leaking the cleaning liquid. It may include.

The gasket 10 is an inlet (BI, SI) or outlet of the micro-channel so that the cleaning liquid flows between the outside of the chip fixing portion 100 and the micro-channel through the channel connecting passage (14a ~ 14d) The hole 18 should be formed in the position corresponding to (BO, SO). As the gasket 10, a silicon material is preferably used.

Tubing connecting members 12a to 12d for connecting with the tubing are provided at ends exposed to the outside of the chip fixing part of the channel connecting passages 14a to 14d, so that the channel connecting passages 14a to 14d and the tubing are provided. Can be easily connected.

In the present invention, the chip fixing portion is preferably manufactured by molding a transparent plastic (eg, acrylic resin) so that the microfluidic chip therein can be observed or photographed under a microscope.

Hereinafter, with reference to FIGS. 2A, 2B, 4A to 4C, 5A, 5B, 6A, 6B, 7A, and 7B, the flow path controller 200 constituting the washing apparatus according to the present invention will be described. Explain.

4A to 4C are a perspective view, a perspective view, and a planar cross-sectional view of a central fixing unit among the flow path controllers constituting the cleaning device according to the present invention, respectively, and FIGS. 5A and 5B are a perspective view and a perspective view of a rotating plate of the flow path controller, respectively; 6A is a side cross-sectional view of the central fixing part, and FIG. 6B is a side cross-sectional view of the flow path controller in a state in which the central fixing part and the rotating plate are coupled, and FIGS. 7A and 7B respectively photograph each part and the assembled shape of the flow path controller. It is a photograph.

In the present invention, the flow path controller 200 includes a central fixing part 4, an upper rotating plate 3, a lower rotating plate 5, and a central axis A. The center fixing part 4, the upper rotary plate 3, and the lower rotary plate 5 have a hole formed at the center thereof, and the central axis A penetrates the hole to form an axis. Therefore, the center fixing part 4, the upper rotary plate 3, and the lower rotary plate 5 can be rotatably coupled around the central axis (A).

It is preferable that the gasket 20 for preventing leakage is attached to a surface of the upper rotating plate 3 and the lower rotating plate 5 that is in contact with the central fixing part 4.

In the central fixing portion 4, a plurality of washing liquid passing holes 15a to 15d have the same distance with respect to the central axis A to allow the washing liquid to pass between the upper and lower portions of the central fixing portion 4. It is formed radially. In the present embodiment, since the washing solution passage holes 15a to 15d are four, the washing solution passage holes 15a to 15d are formed to form an angle of 90 ° to each other.

In addition, one hole 13a, 13b is formed in each of the upper rotating plate 3 and the lower rotating plate 5. The distance between the holes 13a and 13b and the central axis A formed in the upper rotating plate 3 and the lower rotating plate 5 is a washing liquid passing hole 15a to 15d formed in the central fixing part 4 and the center thereof. The holes 13a and 13b are formed to be equal to the distance between the axes A. FIG.

As the upper rotary plate 3 and the lower rotary plate 5 are rotated about the central axis A, the holes 13a and 13b formed in the upper rotary plate 3 and the lower rotary plate 5 are plural. It may be connected to any one of the holes 15a to 15d for passing through the washing solution.

Meanwhile, the central fixing portion 4 has side connection passages 19a to 19d for connecting the washing liquid passing holes 15a to 15d with the outer surface of the central fixing portion 4 to the washing liquid passing hole 15a. ˜15d) and an outer surface of the central fixing part 4.

The end exposed to the outer side of the side connecting passage (19a ~ 19d) of the central fixing portion 4 is provided with a tubing connecting member 11 for connecting with the tubing, the side connecting passage (19a ~ 19d) Can be easily connected to the tubing.

In addition, the holes 13a and 13b formed in the upper rotating plate 3 and the lower rotating plate 5 are also provided with a tubing connecting member 11 for connecting the tubing, so that the holes 13a to 13b can be easily connected with the tubing. Can be connected.

Hereinafter, with reference to FIGS. 2A, 2B, and 8, the operation of the cleaning device including the chip fixing part 100 and the flow path controller 200 according to the present invention will be described.

In the present invention, the side connecting passages 19a to 19d of the central fixing part 4 and the channel connecting passages 12a to 12d of the chip fixing part 100 of the flow path controller 200 are connected one-to-one by tubing 6. It is.

Thus, by rotating the upper and lower rotary plates 3 and 5 independently of one another about their central axis A, the inlet ports BI and SI or the outlet ports of the microchannels formed in the microfluidic chip 9. Two of the plurality of washing liquid passage holes 15a to 15d connected by the BO and SO and the tubing 6 to select the holes 13a of the upper rotating plate 3 and the lower rotating plate 5. It can be connected to the outside through 13b).

That is, in the case of the upper rotating plate 3, as the upper rotating plate 3 rotates about its central axis A, the holes 13a formed in the upper rotating plate 3 pass through the plurality of washing liquids. Any one of (15a-15d), for example, 15c. The washing solution passage hole 15c is connected to the outer surface of the central fixing part 4 by the side connection passage 19c. In addition, the end connected to the outer surface of both ends of the side connection passage (19c) is connected to the SI connection passage 14c of the chip fixing part 100 by the tubing (6). Therefore, the sample inlet SI of the microfluidic chip 9 may be connected to the outside through the hole 13a formed in the upper rotating plate 3.

In a similar manner, as the lower rotating plate 5 is rotated about its central axis A, the holes 13b formed in the lower rotating plate 3 are passed through the plurality of washing liquid passing holes 15a to 15d. Any one of them, for example, 15d. The washing liquid passage hole 15d is connected to the outer surface of the central fixing part 4 by the side connecting passage 19d. In addition, the end connected to the outer surface of the both ends of the side connection passage (19d) is connected to the SO connection passage 14d of the chip fixing part 100 by the tubing (6). Therefore, the sample outlet SO of the microfluidic chip 9 may be connected to the outside through the hole 13b formed in the lower rotating plate 5.

At this time, the hole 13a formed in the upper rotating plate 3 is connected to the pump 2 so that the washing liquid continuously flows into the hole (washing liquid injection part) 13a of the upper rotating plate 3 at a constant pressure. do. In addition, the washing liquid is discharged from the hole (washing liquid discharge part) 13b formed in the lower rotating plate 5.

As described above, as the upper rotary plate 3 and the lower rotary plate 5 are rotated about its central axis A, two of the plurality of washing liquid passing holes 15a to 15d are provided 15c and 15d. Is selected. That is, the hole 13a of the upper rotating plate 3 is connected to the washing liquid passing hole 15c, and the hole 13b of the lower rotating plate 5 is connected to the washing liquid passing hole 15d.

Therefore, when the washing liquid is introduced into the hole 13a formed in the upper rotating plate 3, the washing liquid is passed through the washing liquid passing hole 15c, the side connecting passage 19c, the tubing, and the SI connecting passage 14c. The sample inlet SI of the microfluidic chip 9 is reached.

On the other hand, since the hole 13b of the lower rotating plate 5 is connected to the washing liquid passage hole 15d, the washing liquid reaching the sample inlet SI passes through the sample channel 17a of the microchannels, SO). The washing liquid discharged to the sample outlet SO is passed through the hole 13b of the lower rotating plate 5 through the SO connection passage 14d, the tubing, the side connection passage 19d, and the washing solution passage hole 15d. Discharged.

That is, the inlet or outlet of the microchannel (SI and SO in the above example) connected through the tubing and the washing liquid passage holes 15a to 15d selected by rotating the upper rotating plate 3 and the lower rotating plate 5 as described above. ), And the washing solution flows in the microchannel formed by the selected inlet or outlet, thereby washing the microchannel formed between the selected inlet and / or outlet.

FIG. 8 illustrates a process of selectively forming a flow path on a microchannel in the microfluidic chip 9 by a combination of the central fixing part 4 and the upper and lower rotating plates 3 and 5 of the flow path controller 200. Drawing.

For example, the upper rotary plate 3 is rotated so that the hole 13a is connected to the washing liquid passage hole 15b connected to the buffer outlet BO on the microfluidic chip, and the lower rotary plate 5 is rotated. When the hole 13b is operated to be connected to the washing liquid passage hole 15d connected to the sample outlet SO on the microfluidic chip, the hole 13b is formed by the buffer outlet BO and the sample outlet SO. The resulting channel can be washed (example shown at the bottom of FIG. 8).

Hereinafter, a result of washing the microfluidic chip for electrophoresis by the cleaning device of the present invention will be described with reference to the accompanying drawings.

[Experimental Example] Post-Wash Cleaning Experiment of Electrophoretic Microfluidic Chip

The microfluidic chip used in this experimental example is a microchip electrophoretic system MCE2010 manufactured by Shimadzu Instruments, Japan, and performed a chip-based protein assay. The width of the microchannel is 110 μm, the depth is 50 μm, and is made of quartz.

The cleaning apparatus according to the invention was used to construct a system as shown in FIG. 2A and to wash the microfluidic chip. Washed for all six flow paths of the channel. To determine when to complete the wash, the experimentally measured pressure difference ΔP _Exp was continuously monitored over time.

FIG. 9 is a graph showing the relative difference between the theoretically calculated pressure difference ΔP _Cal and the experimentally measured pressure difference ΔP _Exp between the SI-BO channels with respect to the pressure change of the flow pump for supplying the washing water. If the channel is contaminated, the cross section of the channel is reduced so that the experimental pressure difference ΔP _Exp is measured higher than the theoretical pressure difference ΔP _Cal at both ends of the channel. As time passed, the relative difference was reduced by the washing effect, and the decrease was faster as the pressure of the pump increased. On the other hand, when the theoretical and experimental relative difference between the pressure difference across the channel is maintained within 1.0%, it is determined that the washing is completed, the washing was finished.

10A and 10B are photographs obtained by observing the original channel and the channel after the completion of the washing under a microscope at the intersection of the sample channel and the separation channel.

As a result of washing the microchannel of the microfluidic chip with the washing apparatus according to the present invention, it can be seen that contaminants in the microchannel are completely removed.

According to the present invention, it is possible to appropriately control the flow path through which the washing water flows by the flow path controller, so that the channel at the desired position can be washed or the contamination already formed can be easily removed. In addition, by forming a strong flow in the microchannel of the electrophoretic lab-on-a-chip by the pressure difference of the flow pump, and by removing the particles adsorbed in the microchannel by this flow, the microfluidic chip is contaminated by the particles To prevent them. In particular, the washing apparatus according to the present invention can raise the pressure difference of the flow pump up to 20 bar (bar) to allow sufficient washing to be made.

According to the present invention, it is possible to extend the life of the electrophoretic wrap-on-a-chip, and can be used repeatedly for a long time, thereby reducing the purchase cost and manufacturing cost of the chip. In particular, it can be usefully used in electrophoretic laboratories where a lot of analytical samples are frequently used. In addition, the present invention may greatly contribute to the development of BioMEMS technology by promoting the study of micro total analysis system (μTAS) based on electrophoresis.

The embodiment according to the present invention is not limited to the above-described embodiments, and various alternatives, modifications, and changes can be made without departing from the scope of the present invention.

Claims (24)

A cleaning device for cleaning a microfluidic chip in which microchannels are formed, A chip fixing part for placing the microfluidic chip, and Including a flow path controller for flowing a cleaning liquid to the chip fixing, The flow path controller includes a central fixing portion, an upper rotary plate, a lower rotary plate, and a central axis, The center fixing portion, the upper rotary plate, and the lower rotary plate has a hole formed in the center thereof, And the central fixing part, the upper rotating plate, and the lower rotating plate are rotatably coupled about the central axis by forming the shaft through the hole. The washing apparatus according to claim 1, further comprising a pump for introducing a washing liquid into the flow path controller. The chip fixing part of claim 1, wherein the chip fixing part comprises an upper substrate and a lower substrate. The lower substrate is formed with a groove for placing the microfluidic chip, The upper substrate has a channel connection passage connecting the inlet or outlet of the microchannel formed in the microfluidic chip with the outside of the chip fixing part, and a cleaning solution is provided between the outside of the chip fixing part and the microchannel. Washing apparatus, characterized in that the flow. The cleaning apparatus of claim 3, further comprising a gasket in close contact with the upper substrate, the lower substrate, and the microfluidic chip so that the cleaning liquid is not leaked between the upper substrate and the lower substrate. 5. The hole of claim 4, wherein the gasket has a hole formed at a position corresponding to an inlet or outlet of the microchannel such that the cleaning liquid flows between the microchannel and the outside of the chip fixing part through the channel connecting passage. Washing device, characterized in that. The cleaning apparatus as claimed in claim 4, wherein the gasket is made of silicon. The washing apparatus as set forth in claim 3, wherein a tubing connecting member for connecting the tubing is provided at an end exposed to the outside of the chip fixing part of the channel connecting passage. The washing apparatus as set forth in claim 1, wherein the chip fixing part is made of transparent plastic. delete The washing apparatus as set forth in claim 1, wherein a gasket for preventing leakage is attached to a surface of the upper rotating plate and the lower rotating plate which contacts the central fixing part. According to claim 1, The central fixing portion is formed with a plurality of washing liquid passing through the hole at the same distance to the central axis so that the washing liquid passes between the upper and lower portions of the central fixing portion, Washing apparatus, characterized in that one hole is formed in each of the upper rotary plate and the lower rotary plate. The method of claim 11, The distance between the hole formed in the upper rotating plate and the lower rotating plate and the central axis is equal to the distance between the hole for passing the cleaning liquid and the central axis formed in the central fixing part, As the upper rotary plate and the lower rotary plate is rotated about the central axis, the hole formed in the upper rotary plate and the lower rotary plate is connected to any one of the plurality of holes for passing through the cleaning liquid. The method of claim 11, The central fixing portion has a side connecting passage for connecting the washing liquid passage hole with the outer surface of the central fixing portion is formed between the washing liquid passage hole and the outer surface of the central fixing portion washing apparatus. The method of claim 13, The end exposed to the outer side of the side connection passage of the central fixing portion is provided with a tubing connecting member for connecting with the tubing, And a tubing connection member for connecting the tubing to the holes formed in the upper and lower rotary plates. delete According to claim 3, The central fixing portion is formed with a plurality of washing liquid passage holes radially at the same distance to the central axis so that the washing liquid passes between the upper and lower portions of the central fixing portion, Washing apparatus, characterized in that one hole is formed in each of the upper rotary plate and the lower rotary plate. The method of claim 16, The distance between the hole formed in the upper rotating plate and the lower rotating plate and the central axis is equal to the distance between the hole for passing the cleaning liquid and the central axis formed in the central fixing part, As the upper rotary plate and the lower rotary plate rotates about the central axis, the hole formed in the upper rotary plate and the lower rotary plate is connected to any one of the plurality of holes for the passage of the washing liquid. The method of claim 16, The central fixing portion has a side connecting passage for connecting the washing liquid passage hole with the outer surface of the central fixing portion is formed between the washing liquid passage hole and the outer surface of the central fixing portion washing apparatus. 19. The method of claim 18, wherein the side connection passage of the central fixing portion and the channel connecting passage of the chip fixing portion is connected one by one by tubing, As the upper rotary plate and the lower rotary plate is rotated about its central axis, two of the plurality of washing liquid passage holes connected to the inlet or outlet of the microchannel formed in the microfluidic chip and the tubing are selected, The cleaning device, characterized in that it can be connected to the outside through the holes of the upper and lower rotary plate. The method of claim 19, The hole formed in the upper rotating plate is connected to the pump, The hole formed in the lower rotating plate discharges the cleaning liquid, As the upper rotating plate and the lower rotating plate is rotated about its central axis, two of the plurality of washing liquid passing holes are selected, And a washing solution flowing in the microchannel formed by an inlet or outlet of the microchannel connected to the selected washing solution passage hole and tubing. delete A flow path controller for flowing the cleaning liquid to the chip fixing, A central fixing part, an upper rotating plate, a lower rotating plate, and a central axis, The center fixing portion, the upper rotary plate, and the lower rotary plate has a hole formed in the center thereof, As the central axis penetrates the hole to form an axis, the central fixing part, the upper rotating plate, and the lower rotating plate are rotatably coupled about the central axis. Herein, the chip fixing part is a chip fixing part for allowing a cleaning liquid to flow between the microchannels to wash the microfluidic chip in which the microchannels are formed. Including an upper substrate and a lower substrate, The lower substrate is formed with a groove for placing the microfluidic chip, The upper substrate has a channel connection passage connecting the inlet or outlet of the microchannel formed in the microfluidic chip with the outside of the chip fixing part, and a cleaning solution is provided between the outside of the chip fixing part and the microchannel. A flow path controller, which can flow. 23. The method of claim 22, wherein the central fixing portion has a plurality of holes for washing liquid passing through the same distance with respect to the central axis so that the washing liquid passes between the upper and lower portions of the central fixing portion, The flow path controller, characterized in that one hole is formed in each of the upper rotary plate and the lower rotary plate. The method of claim 23, And a side connection passage for connecting the washing liquid passage hole to the outer surface of the central fixing portion in the central fixing portion is formed between the washing liquid passing hole and the outer surface of the central fixing portion.

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