KR100815351B1 - Display apparatus using monolith optical system - Google Patents

Abstract

 The present invention relates to a display apparatus using an integrated optical system in which a light source, a cylinder lens, a parabolic lens, and a diffractive optical modulator are integrated into one case in implementing a display apparatus using a diffractive optical modulator.

Diffraction type light modulator, Display, Integral, Cylinder mirror, Parabolic mirror

Description

Display apparatus using monolithic optical system

FIG. 1 shows a typical configuration of an optical microelectromechanical system element applied to an optical switch and an optical modulator using reflection or diffraction of light.

2 is a perspective view of a diffractive optical modulator using a piezoelectric material developed by Samsung Electro-Mechanics.

3 shows an embodiment of an optical device using a piezoelectric diffraction type optical modulator of Samsung Electro-Mechanics.

4 is a block diagram of a display apparatus using an integrated optical system according to an exemplary embodiment of the present invention.

5 is a configuration diagram of a display apparatus using an integrated optical system according to a second exemplary embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

110, 210: laser diode 120, 220: parabolic mirror

130, 230: cylinder mirror 140, 240: diffraction optical modulator

The present invention relates to a display apparatus using an integrated optical system in which a light source, a cylinder lens, a parabolic lens, and a diffractive optical modulator are integrated into one case in implementing a display apparatus using a diffractive optical modulator.

In accordance with the progress of microtechnology, small devices incorporating so-called microelectromechanical systems (MEMS) elements and microelectromechanical system elements are attracting attention.

The microelectromechanical system element is formed as a microstructure on a substrate such as a silicon substrate or a glass substrate, and is an element that electrically and mechanically combines a driving body for outputting a mechanical driving force and a semiconductor integrated circuit for controlling the driving body. to be.

FIG. 1 shows a typical configuration of an optical microelectromechanical system element applied to an optical switch and an optical modulator using reflection or diffraction of light.

The optical microelectromechanical system element 11 shown in FIG. 1 has the board | substrate 12, the board | substrate side electrode 13 formed on the board | substrate 12, and the beam 14 which bridge | crossed the board | substrate side electrode 13 in bridge shape. ). The beams 14 and the substrate-side electrodes 13 are electrically insulated by the gaps 10 therebetween.

The beams 14 are formed on a bridge member 15 made of, for example, a silicon nitide (SiN) film, which is formed on the substrate 12 by hanging the substrate-side electrode 13 in a bridge shape, and the substrate-side substrate 13. It consists of the drive side electrode 16 which is provided on the bridge member 15 opposingly parallel to each other, and serves as the reflecting film which consists of aluminum (Al) film of about 100 nm film thickness, for example. The beams 14 are formed in a so-called bridged manner with their ends supported.

In this optical microelectromechanical system element 11, electrostatic attraction or electrostatic repulsion between the beam 14 and the substrate-side electrode 13 depends on the potential given to the substrate-side electrode 13 and the driving-side electrode 16. Is displaced, and is displaced in parallel and concave with respect to the substrate-side electrode 3, for example, as indicated by the solid and broken lines in FIG.

In the optical microelectromechanical system element 11, light is irradiated onto the surface of the driving side electrode 16, which also serves as a light reflection film, and the reflection direction of the light is different depending on the driving position of the beam 14, in one direction. It can be applied as an optical switch that detects the reflected light and has a switch function.

The optical microelectromechanical system element 11 can also be applied as an optical modulator for modulating light intensity. When the reflection of light is used, the beam 14 is vibrated to modulate the light intensity with the amount of reflected light in one direction per unit time.

When using diffraction of light, a plurality of beams 14 are arranged in parallel with respect to a common substrate side electrode 13 to form an optical modulator, and for example, a single beam having a common substrate side electrode 13 ( The height of the driving side electrode serving as the light reflection film is changed by the operation of the proximity and the separation of 14), and the intensity of the light reflected by the driving side electrode is modulated by the diffraction of the light. This optical modulator is so-called spatial modulation.

Another example of such a spatial light modulator is a grating light valve (GLV) device developed by Silicon Light Machine Co., Ltd. as a light intensity converter for laser displays, that is, an optical modulator. In the diffraction grating light valve device, a common substrate side electrode is formed on an insulating substrate such as a glass substrate, and a plurality of bridged crosses are arranged in parallel to intersect the substrate side electrode.

2 is a perspective view of a recessed diffraction type optical modulator using piezoelectric materials developed by Samsung Electro-Mechanics.

Referring to FIG. 2, the recessed thin film piezoelectric optical modulator developed by Samsung Electro-Mechanics includes a silicon substrate 40 and a plurality of diffraction members 42a to 42n.

Here, the plurality of diffraction members 42a to 42n have a constant width and are regularly aligned to form a recessed thin film piezoelectric optical modulator. In addition, the plurality of diffraction members 42a to 42n have different widths and are alternately arranged to form a recessed thin film piezoelectric optical modulator. In addition, the diffraction members 42a to 42n may be spaced apart from each other at a predetermined interval (almost the same distance as the width of the diffraction members 42a to 42n). In this case, the diffraction members 42a to 42n are formed on the entire upper surface of the silicon substrate 40. The micro mirror layer reflects and diffracts the incident light.

The silicon substrate 40 has depressions in order to provide a space for the diffraction members 42a to 42n, an insulating layer 41 is deposited on the upper surface, and diffraction members 42a to 42n on both sides of the depressions. The end of is attached.

Each diffraction member (herein, only the reference numeral 42a is described in detail but the remaining 42b to 42n is the same) has a rod shape, and the lower surface of both ends is positioned so that the center portion is spaced apart from the depression of the silicon substrate 40. Each part is attached to both side regions beyond the depression of the silicon substrate 40, and the portion located in the depression of the silicon substrate 40 includes a lower support 43a which is movable up and down.

In addition, the diffraction member 42a is stacked on the left end of the lower support 43a, and is laminated on the lower electrode layer 44a and the lower electrode layer 44a for providing a piezoelectric voltage, and contracts when voltage is applied to both surfaces. And a piezoelectric material layer 45a that expands to generate a vertical driving force, and an upper electrode layer 46a that is stacked on the piezoelectric material layer 45a and provides a piezoelectric voltage to the piezoelectric material layer 45a.

In addition, the diffraction member 42a is stacked on the right end of the lower support 43a, and is laminated on the lower electrode layer 44a 'and the lower electrode layer 44a' for providing a piezoelectric voltage. The piezoelectric material layer 45a 'that contracts and expands to generate an up-and-down driving force, and an upper electrode layer 46a' that is stacked on the piezoelectric material layer 45a 'and provides a piezoelectric voltage to the piezoelectric material layer 45a'. It is included.

The micromirror layer 47a is stacked on the lower support 43a in the center of the diffraction member 42a to reflect or diffract incident incident light.

3 shows an embodiment of an optical device using a piezoelectric diffraction type optical modulator of Samsung Electro-Mechanics.

Referring to the drawings, the optical apparatus includes a light source system 50, a condenser 52, an illumination lens system 54, a plate color wheel 57, a diffractive light modulator 58, a Fourier filter system 59, and a projection system. 62, the screen 65 is included.

The light source system 50 includes a plurality of light sources 51a to 51c, and the light collecting unit 52 includes one mirror 53a and a plurality of color discriminating mirrors 53b and 53c.

The plurality of light sources 51a to 51c include, for example, a red light source 51a, a green light source 51b, and a blue light source 51c. The light condenser 52 collects blue light, green light, and red light by one reflection mirror 53a and a plurality of dichroic mirrors 53b and 53c to form a multi-beam to form a single illumination system.

Next, the illumination lens system 54 converts the condensed multiple light into linear parallel light and enters the light modulator 58 through the plate-shaped color wheel 57. Here, the plate-type color wheel 57 is a color filter for transmitting only light of a wavelength corresponding to each color among multiple lights, a coupler to which the color filter is attached, and a coupler attached to the combiner to generate rotational force. With a motor or the like, the color filters attached to the coupler and the plate-shaped plate are rotated to correspond to the rotational speed of the motor, thereby sequentially separating the color of light.

When the linear parallel light of a single wavelength is incident from the plate-shaped color wheel 57, the diffraction type optical modulator 58 performs light modulation on the linear parallel light of the corresponding wavelength during the incident time to form diffracted light and converts the formed diffracted light. The light is incident on the Fourier filter system 59.

The Fourier filter system 59 is preferably composed of a Fourier lens 60 and a color filter 61, which separates diffracted light by orders and transmits only diffracted light of a desired order.

On the other hand, the projection system 62 is provided with the scanner 63 and the projection lens 64, and projects the incident diffracted light to the screen 65.

On the other hand, the above-described optical system is limited in complexity and miniaturization of the device, and many lenses are used, which is inefficient in cost.

Accordingly, the present invention has been made to solve the above problems, and the light source, the cylinder lens, the parabolic lens and the diffractive optical modulator are arranged in one case to reduce the size of the device, to realize a simple optical structure, and to reduce the number of parts. It is an object of the present invention to provide a display device using an integrated optical system capable of achieving cost reduction and the like.

The present invention for solving the above problems, is fixed to the frame, the cavity is formed therein, the shielding case is formed with an input hole and an output hole to allow light to enter and exit the cavity; A light source attached to an input hole of the shielding case, the emission surface of which is directed into the cavity to generate light and to emit light into the cavity; It is attached inside the cavity of the shielding case at a position opposite to the exit surface of the light source, has a parabolic shape, reflects the incident light in the forward direction to be parallel light, and collects the incident light in the reverse direction to the output hole. First reflecting means; It is attached to the inside of the cavity of the shielding case opposite to the first reflecting means, has a cylindrical parabolic shape, reflects the incident light in the forward direction to be focused, and converts the incident light in the reverse direction to the parallel light as the first reflecting means. Second reflecting means for reflecting; And a diffraction type optical modulator attached to an inside of the shielding case opposite to the second reflecting means, modulating incident incident light to form diffracted light and exiting the second reflecting means.

4, a display apparatus using an integrated optical system according to a preferred embodiment of the present invention will be described in detail with reference to FIG. 4.

4 is a block diagram of a display apparatus using an integrated optical system according to an exemplary embodiment of the present invention.

Referring to the drawings, the display device using the integrated optical system according to an embodiment of the present invention, the cavity having an inlet is formed therein, the shielding case for shielding the cavity formed therein from the outside light ( 100), a laser diode (LD) 110 having an exit surface attached to the cavity at the inlet of the shielding case 100 and a cavity inner wall of the shielding case 100, reflecting incident light and being parallel It is attached to the parabolic mirror 120 for changing light, the cavity inner wall of the shielding case 100, and to the cavity inner wall of the shielding case 100, the cylinder mirror 130 for reflecting and condensing incident light and converting it into linear light. And a diffractive light modulator 140 for modulating the incident light to form diffracted light.

The shielding case 100 has a cavity formed therein, and light can spread through the cavity without scattering and loss, and the parabolic mirror 120 and the cylinder mirror 130 can be attached thereto. The shield case 100 should be rigid, transparent, homogenous and free of bubbles or particles therein. In addition, the shield case 100 may be glass, plastic, or a monocrystal semiconductor (monocrystal) may be used, and may be firmly fixed to a frame (not shown).

In addition, the shielding case 100 has an input-output surface 112 having an inlet and an outlet so that the laser diode 110 is attached to the entrance of the input-output surface 112 so that the exit surface faces the cavity interior. Can be. In addition, the shielding case 100 includes an optical modulation surface 142 having an inlet so that the optical modulation surface of the diffraction type optical modulator 140 faces the cavity interior.

The laser diode 110 is attached to the inlet of the input-output surface 112 of the shielding case 100 so that the exit surface faces the cavity, and when the power is supplied, the laser diode 110 exits the cavity. Herein, the laser diode 110 is described as an example of a light source, but a high-luminescence LED (Superluminescent LED) can be used, and the like can be used.

The parabolic mirror 120 is attached to the cavity inner wall of the shielding case 100 corresponding to the exit surface of the laser diode 110, and converts parallel light by reflecting the exit light of the incident laser diode 110. Exit into the joint. Parabolic mirror 120 has a parabolic surface, and a metallic curved mirror, a dielectric multi-layer mirror, or a total internal reflection mirror can be used, and nearly 100%. Must reflect. In addition, the focus of the parabolic mirror 120 should coincide with the center of the exit surface of the laser diode 110.

Of course, the parabolic mirror 120 does not receive the incident light of the laser diode 110 directly, but has a reflecting mirror therebetween and receives the outgoing light of the laser diode 110 incident through the reflecting mirror to receive parallel light. It may be formed.

Next, the cylinder mirror 130 is formed in the cavity inner wall of the shielding case 100 at the corresponding position of the parabolic mirror 120, has a cylindrical parabolic surface, reflects the incident light and collects it into linear light. To be incident on the diffractive optical modulator 140. Of course, the cylinder mirror 130 may be formed on the inner wall of the cavity of the shielding case 100 at the corresponding position of the parabolic mirror 120, but further includes a reflecting mirror therebetween for parallel light incident through the reflecting mirror It can condense and change to linear light, and FIG. 5 illustrates this example.

The cylinder mirror 130 may be a metallic curved mirror, a dielectric multi-layer mirror, or a total internal reflection mirror, and should reflect nearly 100%. . In addition, the focal point of the cylinder mirror 130 should be on a straight line coinciding with the center line of the diffractive optical modulator 140.

On the other hand, the diffractive light modulator 140 modulates the incident linear light as described above to form and emit diffracted light having various diffraction orders. At this time, the path from which the diffracted light is emitted travels opposite to the path through which the incident light emitted from the laser diode 110 passes, and reaches the input-output surface 112.

That is, the diffracted light formed by the diffractive light modulator 140 is now radiated to the cylinder lens 130 on the contrary, and the cylinder lens 130 reflects the diffracted light emitted from the diffractive light modulator 140 to parallel light. Is changed to exit the parabolic mirror (120).

The parabolic mirror 120 then reflects and collects the diffracted light incident from the cylinder lens 130 and changes the linear light to reflect it to the input-output surface 112. At this time, the input-output surface 112 is formed with an outlet outside the inlet so that only diffraction light of a desired order can pass through the diffracted light reflected from the parabolic mirror 120 so that the subsequent display system can use the diffracted light.

 5 is a configuration diagram of a display apparatus using an integrated optical system according to a second exemplary embodiment of the present invention.

Referring to the drawings, in the display device using the integrated optical system according to the second embodiment of the present invention, a cavity having an entrance therein is formed, a shielding case for shielding the cavity formed therein from external light (200), a laser diode (LD) 210 having an exit surface attached to the cavity at the inlet of the shielding case 200, attached to the cavity inner wall of the shielding case 200, and reflects incident light A parabolic mirror 220 for changing parallel light, a cylinder mirror 230 attached to a cavity inner wall of the shielding case 200, reflecting and condensing incident light, and converting it into linear light, a parabolic mirror 220, and a cylinder mirror ( Located between the 230, the reflection mirror 225 for directing the reflected light of the parabolic mirror 220 to the cylinder mirror 230, attached to the cavity inner wall of the shield case 200 and modulates the incident light And a diffractive optical modulator 240 to form an open diffracted light.

As described above, the shielding case 200 has a cavity formed therein such that the parabolic mirror 220, the cylinder mirror 230, and the reflection mirror 225 may be attached thereto.

In addition, the shielding case 200 has an input-output surface 225 having an inlet and an outlet so that the laser diode 210 is attached to the inlet of the input-output surface 225 so that the output surface faces the cavity interior. Can be. In addition, the shielding case 200 includes an optical modulation surface 242 having an inlet, and is attached such that the optical modulation surface of the diffractive optical modulator 240 faces the cavity interior.

Next, the laser diode 210 is attached to the entrance of the input-output surface 212 of the shielding case 200 so that the exit surface faces the cavity, and when the power is supplied, the laser diode exits the cavity.

The parabolic mirror 220 is attached to the cavity inner wall of the shielding case 200 corresponding to the exit surface of the laser diode 210, and converts parallel light by reflecting the emitted light of the incident laser diode 210. Exit the joint.

Of course, the parabolic mirror 220 does not receive the incident light of the laser diode 210 directly, but has a reflective mirror therebetween and receives the incident light of the laser diode 210 incident through the reflective mirror to generate parallel light. It may be formed.

Next, the reflection mirror 225 reflects the parallel light incident from the parabolic mirror 220 toward the cylinder mirror 230 to convert the incident light into an optical path, thereby providing a degree of freedom for the optical path, and thus shielding case 200. ) To reduce the size.

Next, the cylinder mirror 230 is formed on the inner wall of the cavity of the shielding case 200 at the corresponding position of the reflective mirror 225, reflects the incident light and condenses the light into a linear light to diffract light modulator ( 240).

On the other hand, the diffractive light modulator 240 modulates the incident linear light as described above to form and emit diffracted light having various diffraction orders. At this time, the path from which the diffracted light is emitted travels opposite to the path through which the incident light emitted from the laser diode 210 passes and reaches the input-output surface 212.

That is, the diffracted light formed by the diffractive light modulator 240 is now radiated out to the cylinder lens 230, and the cylinder lens 230 reflects the diffracted light emitted from the diffractive light modulator 240 to parallel light. To change to the reflective mirror 225.

Then, the reflection mirror 225 changes the path of the reflected light reflected from the cylinder lens 230 to face the parabolic mirror 220.

The parabolic mirror 220 reflects and collects diffracted light incident from the cylinder lens 230 via the reflecting mirror 225, changes it into linear light, and directs it to the input-output surface 212. At this time, the input-output surface 212 is formed with an outlet outside the inlet so that only diffraction light of a desired order can pass through the diffracted light reflected from the parabolic mirror 220 so that the subsequent display system can use the diffracted light.

According to the present invention as described above, there is an effect of increasing the efficiency of the optical, there is an effect of simplifying the configuration of the optical system.

In addition, according to the present invention, there is an effect to ensure the excellent reliability through a simple optical structure, and to increase the efficiency and cost reduction by reducing the number of parts.

Claims (5)

A shielding case fixed to the frame, having a cavity formed therein, and having an input hole and an output hole formed to allow light to enter and exit the cavity; A light source attached to an input hole of the shielding case, the emission surface of which is directed into the cavity to generate light and to emit light into the cavity; It is attached inside the cavity of the shielding case at a position opposite to the exit surface of the light source, has a parabolic shape, reflects the incident light in the forward direction to be parallel light, and collects the incident light in the reverse direction to the output hole. First reflecting means; It is attached to the inside of the cavity of the shielding case opposite to the first reflecting means, has a cylindrical parabolic shape, reflects the incident light in the forward direction to be focused, and converts the incident light in the reverse direction to the parallel light as the first reflecting means. Second reflecting means for reflecting; And A display using an integrated optical system, which is attached to the inside of the shielding case opposite to the second reflecting means, and includes a diffractive light modulator that modulates incident incident light to form diffracted light and exits the second reflecting means. Device. The method of claim 1, The display device using the integrated optical system, characterized in that the material of the shield case is one of glass, plastic, single crystal semiconductor. The method of claim 1, The light source is a display device using an integrated optical system, characterized in that one of a laser diode, a high-emitting LED (Superlminescent LED). The method of claim 1, It is attached to the inner wall of the shielding case, positioned between the light source and the first reflecting means to reflect the light emitted from the light source to the first reflecting means, and outputs the light emitted from the first reflecting means Display device using an integrated optical system further comprises a third reflecting means for reflecting to the side. The method of claim 1, It is attached to the inner wall of the shielding case, positioned between the first reflecting means and the second reflecting means and reflects the light emitted from the first reflecting means to the second reflecting means, and in the second reflecting means And a fourth reflecting means for reflecting the emitted light to the first reflecting means.

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