KR100783656B1 - The apparatus and method of Nano powder synthesis using collisional processes of plasma charged particles - Google Patents

Abstract

The present invention relates to a nano-powder synthesis apparatus and method using the plasma charged particle collision, and more particularly, after converting the raw material to plasma charged particles to filter to remove impurities having a desired particle size and to impinge the collision. It is an object of the present invention to provide a nanopowder synthesis apparatus and method using plasma charged particle collision for synthesizing component-based metal and ceramic nanopowders.

Nano-powder synthesis apparatus using a plasma charged particle collision according to the present invention, at least one arc source portion for generating an arc discharge on the arc target made of a metal or semiconducting material as a raw material to generate a plasma jet of the plasma charged particles; A magnetic filter part attached to the plasma jet outlet of the arc source part in a bent shape to remove plasma charged particles and neutral plasma particles of a predetermined size or more from the plasma jet emitted from the arc source part; Plasma charged particles filtered by the magnetic filter unit is characterized in that it comprises a nano-powder synthesis chamber which is synthesized into nano-powder to collide.

The present invention described above can produce nanometer-sized multicomponent metal and ceramic micropowders having a desired size and composition without limitation of raw materials, as long as they have a stable melting phenomenon under vacuum or gas atmosphere, and powder synthesis chamber. It delivers the functional nano powder in the form of a thin film to provide an effect that can be produced in-situ a high-performance electromagnetic device.

Nano Powder, Arc Discharge, Plasma, Particle Collision, Magnetic Filter

Description

The apparatus and method of nano-powder synthesis using plasma charged particle collision {@the apparatus and method of Nano powder synthesis using collisional processes of plasma charged particles}

1 is a view showing a nano-powder synthesis apparatus using a plasma charged particle collision according to an embodiment of the present invention,

Figure 2 is a flow chart showing the process of the nano-powder synthesis method using a plasma charged particle impact in accordance with the present invention,

3 is a view showing a filtering process in the magnetic filter unit of the nano-powder synthesis apparatus according to the present invention.

Description of the main symbols in the drawings

100: arc source portion 100 ': second arc source portion

110: arc target 111: second arc target

120: insulation 130: trigger electrode

140: arc discharge chamber 150: focusing solenoid

160: inert gas injector 200: magnetic filter unit

210: filter duct 220: magnetic force generating portion

230: baffle

300: synthesis chamber 310: substrate holder

320: reactive gas supply unit 330: chamber magnetic field magnetic lens unit

400: exhaust portion 410: high vacuum pump

420: low vacuum pump 500: large neutral particles

510: plasma charged particles

The present invention relates to a nano-powder synthesis apparatus and method using the plasma charged particle collision, and more particularly, after converting the raw material to plasma charged particles to filter to remove impurities having a desired particle size and to impinge the collision. The present invention relates to a nanopowder synthesis apparatus using a plasma charged particle collision for synthesizing a component-based metal and ceramic nanopowder, and a method thereof.

In general, nano powder refers to particles having a size of several tens to hundreds of nanometers. The nano powder has excellent reactivity due to the large surface area due to micronization, and because it can exhibit specific electrical and magnetic properties due to quantum effects, Its value is being sought in various industrial fields such as optical functional paints, magnetic fluids, magnetic recording media, various sensors, and biochemical fields.

The method for producing a nanopowder having the above function can be largely divided into a liquid phase method and a gas phase method. As the liquid phase method, a metal salt solution reduction method and a sol-gel method have been widely used in the prior art, but the productivity of the powder is high, but there is a problem in that the powder has a high degree of aggregation and a low purity. On the other hand, inert gas condensation method, chemical vapor condensation method, spray pyrolysis method, etc. are typically used as the gas phase method has a low production efficiency and has a limitation in the production of various nano-powder due to the constraint of the precursor. In addition, the nanopowder manufacturing method of the prior art has a disadvantage that it is difficult to control the composition and particle size in the production of nanoalloy powder.

Recently, a plasma arc discharge gas phase synthesis method has been proposed to prepare nanoparticles of high purity relatively easily. This is a process for producing nanopowder by generating an arc plasma between the electrode and the metal rod to melt the metal, and then condensing the vaporized metal vapor again. In order to manufacture alloy and composite nanopowders using this process, alloying rods or post-treatment processes should be adopted. When alloying raw materials are used, it is difficult to synthesize nano alloy powders with exactly the desired composition due to the difference in the characteristic values (melting point, vapor pressure, specific gravity, etc.) of the constituent materials, and nanopowders are formed because particles having a wide size distribution are formed in arc discharge. There is difficulty in controlling the size of the.

On the other hand, when manufacturing a precision electronic device using the functional nano-powder synthesized by the conventional liquid phase method or gas phase method requires a separate recovery, separation, transfer and deposition, patterning (patterning) process, the actual nano There are many difficulties in applying powder to device fabrication. For example, Fe nano powder is an excellent magnetic material that has a very high magnetization value, and its application range is widely used for magnetic recording media, but due to its extreme instability, explosive reactivity, oxidization, and cohesiveness, MBE (Molecular Beam Epitaxy) Except for the production of nano thin films by the method, there is no method that can be produced practically and stably yet.

The present invention is to solve the problems of the prior art as described above, by filtering the particles generated by the plasma arc discharge using a magnetic filter to remove impurities and to select a particle having a desired size, furthermore It is an object of the present invention to provide an apparatus and method for synthesizing nanopowders using plasma charged particle collision, which can synthesize nanoalloy / composite powder material having a desired composition by artificially colliding and alloying charged particles delivered from an arc generating source. do.

The nanopowder synthesis apparatus using the plasma charged particle collision of the present invention for achieving the above object, by generating an arc discharge on the arc target made of a metal or semi-conductive material which is a raw material for each component of the nanopowder to be synthesized , An arc source unit provided with an arc target for each component element of the nanopowder independently to generate a plasma jet of all particles, and mounted for each component element ; A magnetic filter part attached to the plasma jet outlet of the arc source part in a bent shape so as to remove a predetermined size or more of the plasma charged particles and the neutral plasma particles from the plasma jet emitted from each arc source part; And a nanopowder synthesis chamber in which the plasma charged particles of the arc source portion filtered by the magnetic filter portion are introduced and collide with each other to be synthesized into nanopowders.

The arc source portion in the above configuration, the arc target made of a metal or semiconducting material to be a raw material of the nanopowder; An insulating part for electrically insulating the arc target; An arc discharge chamber in which the arc target is fixed at an inner upper portion and an outlet of the plasma jet generated at the arc target is combined with a magnetic filter; A triggering electrode for generating an arc between the arc target and the arc discharge chamber; A discharge power source for applying different polarities to the arc target and the arc discharge chamber; A focusing solenoid formed on an outer circumferential surface of the arc discharge chamber for focusing the plasma charged fine particles (charged particles) generated through the arc discharge of the arc target and entering the magnetic filter unit; It comprises a inert gas injector for injecting a fluorinated gas which is the atmosphere gas of the arc discharge.

The magnetic filter unit may be bent at an angle to connect the plasma jet outlet of the arc source unit to the plasma jet inlet of the nanopowder synthesis chamber, and the inner surface may be a giant plasma charged particle or a neutral plasma whose path is not changed by a magnetic field. A tubular filter duct having at least one baffle on which particles are formed; It is formed along the outer circumferential surface of the filter duct is configured to include at least one magnetic force generating unit for applying a magnetic field in a predetermined direction varying according to the filtering size of the plasma charged particles into the filter duct.

Alternatively, the magnetic filter part may be configured as an open magnetic force generating part formed by an arrangement of at least one bent electromagnet having a curved shape, and may be configured inside the nanopowder synthesis chamber.

In the configuration of the magnetic filter unit, the magnetic force generating unit may be configured to be connected in series with the arc discharge chamber to receive power having the same polarity as the arc discharge chamber, or to include a DC or pulse type power supply unit for supplying magnetic field generation power. It may be.

Next, the nano-powder synthesis chamber includes a magnetic lens unit for controlling the distribution and the direction of the plasma charged particles of the plasma jet filtered from the magnetic filter unit; A substrate holder positioned on the inner bottom surface of the nanopowder synthesis chamber to condense the synthesized nanopowder; It is configured to include an exhaust for maintaining the vacuum of the entire nanopowder synthesis apparatus.

When the arc source portion or the arc source portion and the magnetic filter portion are configured outside the nanopowder synthesis chamber, the nanopowder synthesis chamber has a synthetic chamber inlet for inflow of the plasma jet.

The nano powder synthesis chamber may further include a gas supply unit for injecting a reaction gas causing a reaction with the synthesized nano powder.

In addition, the nano-powder synthesis chamber and the substrate holder located inside thereof are provided with a temperature control window for cooling the internal temperature, and the substrate holder has characteristics of nano functional powder and thin film formed by condensation of the synthesized nano powder. A bias power supply for applying a bias power supply for control is provided.

Nano-powder synthesis method using the plasma charged particle collision of the present invention for achieving the above object, the plasma jet generation process of arc-discharge the raw material for each component of the nano-powder to be synthesized to form plasma charged particles; Applying a magnetic field to the plasma jet generated in the plasma jet generation process to remove the giant plasma charged particles or the neutral plasma particles to filter the plasma charged particles suitable for the nano-powder to be synthesized; And a nanopowder synthesis process for synthesizing the nanopowder by colliding the plasma charged particles of the raw material for each component of the nanopowder filtered by the magnetic filtering process.

The plasma jet generation process may further include an inert gas supply process for supplying an inert gas as the atmosphere gas of arc generation.

The nano powder synthesis process may further include a reaction gas injection process for injecting a reaction gas reacting with the synthesized nano powder, and reaction of any one of oxidation, nitriding or carbonization of the nano powder by the reaction gas injection process. By inducing the three-component nano-micro-size nanopowders can be synthesized.

The nanopowder synthesis process may further include a nanopowder condensation process for condensing the synthesized nanopowder by adjusting temperature and bias voltage, wherein the nanopowder condensation process is performed by converting the nanopowder into a thin film on the substrate holder. It may be a process of condensation.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

1 is a view showing a nano-powder synthesis apparatus using a plasma charged particle collision according to an embodiment of the present invention.

As shown in FIG. 1, the nanopowder synthesis apparatus using the plasma charged particle collision according to the present invention includes at least one arc source unit 100 generating a plasma jet after converting a raw material into plasma charged particles by arc discharge. )Wow; A magnetic filter unit 200 for forming a plasma jet outflow path of the arc source unit 100 and applying a magnetic field to filter the plasma charged particles by the magnetic field; A nano powder synthesis chamber 300 in which the plasma charged particles filtered by the magnetic filter unit 200 collide with each other and are synthesized as nano powders; It is configured to include an exhaust 400 coupled to the nano-powder synthesis chamber 300 to maintain the interior of the nano-powder synthesis apparatus in a vacuum state.

The arc source unit 100 includes an arc target 110 made of a metal or semiconducting material that is a raw material of the nanopowder; An insulating part 120 made of a material such as BN for electrically insulating the arc target 110; An arc discharge chamber 140 in which the arc target 100 is fixed to an upper portion thereof; A triggering electrode 130 for generating an arc between the arc targets 110 and 110 and the arc discharge chamber 140 having a polarity corresponding thereto; A discharge power source 145 for applying different polarities to the arc target 110 and the arc discharge chamber 140; A focusing solenoid 150 formed on an outer circumferential surface of the arc discharge chamber 140 to focus the plasma charged fine particles (charged particles) generated through the arc discharge of the arc target 110; And an inert gas injector for injecting an inert gas that is an atmosphere gas of arc discharge, and an outlet of the plasma jet is formed in the lower portion of the arc discharge chamber 140 in which the focusing solenoid 150 is located. ) Are combined.

In the configuration of the arc source unit 100, the focusing solenoid 150 performs the function of a drawing electromagnet for transporting the plasma charged particles in a large amount to the magnetic filter unit 200. In FIG. 1, the cathode of the discharge power source 145 is applied to the arc target 110, and the anode is applied to the arc discharge chamber 140, but the embodiment is not limited thereto. .

The magnetic filter unit 200 is formed such that the inlet and outlet of the plasma jet is inclined to have an angle of 30 ~ 100 ° or bent in an S-shape or L-shaped shape of the arc source portion 100 It is configured to connect the plasma jet outlet and the synthesis chamber inlet 301 of the nano powder synthesis chamber 300.

The magnetic filter unit 200 may have a tubular shape having a cross section of a circle or a square. In this case, the magnetic filter unit 200 and the tubular filter duct 210; At least one magnetic force generator 220 formed along an outer circumferential surface of the filter duct 210 and configured of an electromagnet such as a solenoid to apply a magnetic field in a predetermined direction to the inside of the filter duct 210; On the inner side of the filter duct 210 so that giant plasma charged particles or neutral plasma charged particles whose path is not changed by the magnetic field are caught and filtered so as to flow into the nanopowder synthesis chamber 300 from the inside of the filter duct 210. It is configured to include at least one baffle 230 formed. At this time, the magnetic force generating unit 220 is formed of a solenoid-type bending electromagnet having a bent shape to guide the incoming plasma charged particles to the inner substrate of the nano-powder synthesis chamber 300 is the outer peripheral surface of the filter duct 230 Are placed along. Here, the cross-sectional shape of the coil constituting the solenoid may be a coil having a variety of shapes such as circular or plate-like.

At least one of the arc source unit 100 and the magnetic filter unit 200 configured as described above may be provided, and the second arc source unit 100 ′ having the second arc target 111 in FIG. 1. And a second magnetic filter part 200 ′ connecting the second arc source part 100 ′ and the nanopowder synthesis chamber 300 to at least one arc source part 100 and the magnetic filter part 200. It has been shown that can be configured over. At this time, the configuration of the second arc source unit 100 'and the second magnetic filter unit 200' is the same as the arc source unit 100 and the magnetic filter unit 200, but only according to the composition of the nano-powder 110 and the second arc target 111 may be made of different materials.

The nano powder synthesis chamber 300 is formed with a synthetic chamber inlet 301 to which the outlets of at least one magnetic filter unit 200 are coupled, and into the nano powder synthesis chamber 300 inside the synthetic chamber inlet 301. The magnetic lens unit prevents the incoming plasma charged particles from diffusing against each other by the magnetic field and controls the collision density for nano powder synthesis by controlling the flux and focusing of the plasma charged particles. 330 are formed respectively, the inner bottom surface of the nano-powder synthesis chamber 300 is provided with a substrate holder 310 in which the synthesized nano-powder is condensed, the synthesized nano-powder is a three-component metal alloy powder or metal-ceramic alloy A gas supply unit 320 for injecting a reaction gas that causes a reaction such as oxidation, nitriding, and carbonization to be powder is provided.

Herein, the substrate holder 310 of the nanopowder synthesis chamber 300 may be configured to maintain a low temperature through external cooling water or liquid nitrogen introduced into the nanopowder synthesis chamber 300. In addition, the substrate holder 310 may be coupled to a bias power supply 311 and a temperature control device for applying a bias power to control the characteristics of the nano-functional powder and the thin film formed by the condensation of the synthesized nano-powder.

The exhaust unit 400 is a high vacuum pump 410 for forming and maintaining a vacuum in the nano powder synthesis apparatus including the nano powder synthesis chamber 300, the arc source unit 100, and the magnetic filter unit 200. And various vacuum pumps, pipes and valves including the low vacuum pump 420.

In the above-described configuration of the nano-powder synthesis apparatus of the present invention, the magnetic filter unit 200 is located inside the nano-powder synthesis chamber 300 in an open form that does not have to have the filter duct 210 and the baffle 230. It may be configured to. In this case, the magnetic filter unit 200 is a magnetic force generation unit consisting of solenoid-type bending electromagnets having a bent shape to guide the plasma charged particles flowing from the arc source unit 100 to the inner substrate of the nanopowder synthesis chamber 300. It may consist of only. At this time, the filtered macroparticles or neutral plasma particles are discharged through the spaces between the bent electromagnets and are eliminated in the collision for nanopowder synthesis.

The magnetic force generating unit having the above-described configuration may be connected in series with the arc discharge chamber of the arc source unit to receive power having the same polarity as the arc discharge chamber, or may include a DC or pulse type power supply unit supplying magnetic field generation power.

When the magnetic filter unit 200 having the above-described configuration is configured inside the nanopowder synthesis chamber 300, the arc source unit 100 may include the synthesis chamber inlet 301 of the nanopowder synthesis chamber 300. Attached to the outer surface or is configured inside the nano-powder synthesis chamber 300.

Figure 2 is a flow chart showing the process of nanoparticle synthesis method using the plasma charged particle impact of the present invention.

The process of FIG. 2 will be described with reference to FIG. 1.

The negative power is applied to the arc target 100 by the discharge power source 145 generating the pulse power of FIG. 1, and the positive power is applied to the arc discharge chamber 140, thereby providing the arc target 100 and the arc discharge chamber 140. At the same time the arc current is applied between the trigger electrode 130 and the mechanical trigger or the electrical trigger pulse is applied. When a mechanical trigger or an electrical trigger pulse is applied by the trigger generator 130, a small arc (arc spot) is first formed between the trigger target and the arc target 100 serving as a cathode. As a result, the vacuum insulation is temporarily broken down to generate a flow of electrons. This process is intensified to cause arc discharge, and several hundred A current flows between the arc discharge chamber 140 serving as the anode and the arc target 100 serving as the cathode. As a result, the arc target 100 as the cathode is locally melted and rapidly evaporated by high temperature, thereby performing a plasma jet generation process in which a powerful plasma jet made of plasma charged particles is formed (S1).

Since the plasma jet emitted from the arc spot is accompanied by the emission of the large particles 500 that are not ionized, it is introduced into the magnetic filter unit 200 to remove them electromagnetically and the unwanted large plasma charged particles or neutral plasma A magnetic filtering process for removing particles is performed (S2).

Referring to the above-described S2 process in more detail, the magnetic filtering process is a magnetic filter part as a duct type or an open-type electromagnet filter formed in the shape of an inlet and an outlet so as to form an angle of 30 to 100 ° in FIG. Introducing the plasma jet generated by the S1 process into 200 removes the large plasma charged particles or the neutral plasma particles contained in the plasma jet. That is, when the plasma charged particles forming the plasma jet generated by the arc spot generated on the surface of the arc target 100 flow into the curved magnetic filter 200, the ionized ions and electrons are affected by the magnetic field. It bends along the filter, but curves the gentleness of the ionized large plasma charged particles and the neutralized non-ionized plasma particles are linearly removed so that they are easily removed from the plasma jet, so that only fully ionized microplasma charged particles As a result, it is introduced into the nanopowder synthesis chamber 300.

3 is a view illustrating a magnetic filtering process in the above-described magnetic filter unit, and as shown in FIG. 3, among the particles of the plasma jet introduced from the inlet of the magnetic filter unit 200, the plasma charged particles 510 may be formed. Influenced by the magnetic field formed by the magnetic force generating unit 220 is moved along the path a along the filter duct 210 is introduced into the nano-powder synthesis chamber 300. However, the neutral particles or the macroparticles collide with the wall of the filter duct while moving in a straight line like the b-path irrespective of the magnetic field, thereby losing kinetic energy and remaining in the duct or isolated from the baffle 230 installed inside the duct. do. In this case, the size of the particles of the plasma charged particles introduced into the nanopowder synthesis chamber 300 may be selectively controlled by adjusting the strength of the magnetic field.

Referring back to Figure 2 will be described the process of the nano-powder synthesis method using the plasma charged particles of the present invention.

As described above, the fine plasma charged particles 510 filtered by the magnetic filter unit 200 are introduced into the nanopowder synthesis chamber 300. At this time, since the plasma charged particles 510 have a space charge, the plasma charged particles 510 flow into the nanopowder synthesis chamber 300 from the outlet of the magnetic filter unit 200 and simultaneously repel each other, resulting in the charged particle beam spreading. Accordingly, the nanopowder synthesis chamber is adjusted by adjusting the magnetic field strength of the magnetic lens unit 330 located at the synthetic chamber inlet 301 coupled to the outlet of the magnetic filter unit 200 or by adjusting the magnetic field strengths of the magnetic force generating unit 220. By controlling the collision density required for nanopowder synthesis by controlling the focusing as well as the flux of the plasma charged particles flowing into the 300, the plasma charged particles are introduced into the nanopowder synthesis chamber 300. The nanopowder synthesis process of synthesizing the nanopowder is performed by colliding with each other.

Here, when three or more arc sources are mounted or a reactive gas (reactive gas) is supplied through the gas supply unit 320 from the outside of the nanopowder synthesis chamber 300, oxidation by the reaction gas injected. Nitriding and carbonization reactions are induced, so that metal alloy powder or metal-ceramic alloy powder of nano-micro size of three or more components can be prepared (S3).

The nanopowder particles synthesized by the above-described S3 process lose their kinetic energy after collision and are transferred to the inner wall surface of the nanopowder synthesis chamber 300 or the substrate holder 310 to condense. In the nano powder condensation process, the inner surface of the nano powder synthesis chamber 300 and the substrate holder 310 are kept at a low temperature by using external cooling water or liquid nitrogen to maintain the surface and composition of the nano powder particles. It is preferable to be controlled to condense in (S4).

The functional nanopowder material generated during the nanopowder condensation process of the above-described S4 process may be transferred in-situ to an electromagnetic device substrate placed on the substrate holder 310 to perform a process required for device implementation. In this case, the substrate holder 310 may control the characteristics of the nano functional powder and the thin film by controlling the temperature or applying a bias from the outside.

The present invention described above may be performed by mounting two or more combinations of the arc source portion and the magnetic filter portion in the nanopowder synthesis chamber 300 as in the description of FIG. 1, in this case, from the arc target 110. The charged particles of material A are introduced into the nanopowder synthesis chamber 330 from the second arc target 111 in the direction facing the material A and collide with each other. Since these charged particles have a relatively large kinetic energy as described above, alloying or compounding due to the collision occurs easily. In addition, by adjusting the magnetic field strength of the magnetic filter or the magnetic lens unit, the size and focusing density of the charged particles may be adjusted, and thus the composition and size of the nanoalloy / nano composite powder particles synthesized through the collision may be controlled.

The present invention described above provides the following effects.

First, it provides an effect that can produce a variety of nano-alloy or nano-composite powder by producing an arc target consisting of a metal or a semi-conducting material without limiting the raw material and collide with each other by generating fine particles through the arc discharge.

Secondly, the giant neutral particles can be filtered through the magnetic filter, and the kinetic energy and flow rate of the charged particles can be controlled by controlling the magnetic field size of each solenoid therein. It provides the effect of making the alloy / composite powder production efficiently.

Third, the device fabrication process can be carried out in-situ by mounting a substrate for the fabrication of electromagnetic devices in a chamber where nanopowder synthesis occurs due to particle collisions. It provides the effect of making it available.

Claims (14)

Independently equipped with an arc target for each component element of the nanopowder to generate a plasma jet of the plasma charged particles by causing an arc discharge to the arc target made of a metal or semiconducting material as a raw material for each component of the nanopowder to be synthesized An arc source unit mounted for each component element ; A magnetic filter part attached to the plasma jet outlet of the arc source part in a bent shape so as to remove a predetermined size or more of the plasma charged particles and the neutral plasma particles from the plasma jet emitted from each arc source part; The nano-powder synthesis apparatus using a plasma charged particle collision, characterized in that it comprises a; nano-powder synthesis chamber is synthesized into nano-powder by the collision of the plasma charged particles of the arc source portion filtered by the magnetic filter unit . The method of claim 1, wherein the arc source unit, An arc target made of a metal or semiconducting material which is a raw material of the nanopowder; An insulating part for electrically insulating the arc target; An arc discharge chamber in which the arc target is fixed at an inner upper portion and an outlet of the plasma jet generated at the arc target is combined with a magnetic filter; A triggering electrode for generating an arc between the arc target and the arc discharge chamber; A discharge power source for applying different polarities to the arc target and the arc discharge chamber; A focusing solenoid formed on an outer circumferential surface of the arc discharge chamber in order to focus the plasma charged fine particles (charged particles) generated through arc discharge of the arc target and enter the magnetic filter unit; Nano-powder synthesis apparatus using a plasma charged particle collision, characterized in that it comprises an inert gas injector for injecting a fluorinated gas which is the atmosphere gas of the arc discharge. The method of claim 2, wherein the magnetic filter unit, It is bent at an angle to connect the plasma jet outlet of the arc source portion and the plasma jet inlet of the nano-powder synthesis chamber, the inner surface of the at least one of the giant plasma charged particles or neutral plasma particles are not changed path by the magnetic field A tubular filter duct in which the above baffle is formed; Plasma charged particle collision is formed along the outer circumferential surface of the filter duct including at least one magnetic force generating portion for applying a magnetic field in a predetermined direction varying according to the filtering size of the plasma charged particles in the filter duct Nano powder synthesis apparatus using. The method of claim 2, wherein the magnetic filter unit is composed of an open magnetic force generating unit formed of an array of at least one bent electromagnet having a bent shape, the plasma charged particle collision, characterized in that configured inside the nanopowder synthesis chamber Nano powder synthesis apparatus using. The plasma charged particle collision method of claim 3 or 4, wherein the magnetic force generator is configured to be connected in series with the arc discharge chamber to receive power having the same polarity as the arc discharge chamber. Nano Powder Synthesis Device. The nanopowder synthesizing apparatus using plasma charged particle collision according to any one of claims 3 to 4, wherein the magnetic force generating unit has a DC or pulsed power supply unit for supplying magnetic field generating power. The method of claim 1, wherein the nano-powder synthesis chamber, A magnetic lens unit controlling distribution and direction of plasma charged particles of the plasma jet filtered from the magnetic filter unit; A substrate holder positioned on the inner bottom surface of the nanopowder synthesis chamber to condense the synthesized nanopowder; Nano-powder synthesis apparatus using a plasma charged particle collision, characterized in that it comprises an exhaust for maintaining the vacuum of the entire nano-powder synthesis apparatus. 8. The nanopowder synthesis apparatus using plasma charged particle collision according to claim 7, wherein the nanopowder synthesis chamber further comprises a gas supply unit for injecting a reaction gas which reacts with the nanopowder synthesized. The method of claim 7, wherein the substrate holder and the nano-powder synthesis chamber is provided with a temperature control window for cooling the internal temperature, the substrate holder controls the characteristics of the nano-functional powder and the thin film formed by condensation of the synthesized nano-powder A nanopowder synthesis apparatus using a plasma charged particle collision, characterized in that a bias power supply for applying a bias power supply for. A plasma jet generation process of arc-discharging raw materials for each component of the nanopowder to be synthesized to form plasma-charged particles; Applying a magnetic field to the plasma jet generated in the plasma jet generation process to remove the giant plasma charged particles or the neutral plasma particles to filter the plasma charged particles suitable for the nano-powder to be synthesized; Nano-powder synthesis method using a plasma-charged particle collision characterized in that it comprises a nano-powder synthesis process for synthesizing the nano-powder by impinging the plasma charged particles of the raw material for each component of the nano-powder filtered by the magnetic filtering process . The method of claim 10, wherein the plasma jet generation process further comprises an inert gas supply process for supplying an inert gas as the atmosphere gas of arc generation. The method of claim 10, wherein the nano powder synthesis process further comprises a reaction gas injection process for injecting a reaction gas reacted with the synthesized nano powders. The method of claim 10, wherein the nanopowder synthesis process comprises a nanopowder condensation process of coagulating the synthesized nanopowder by controlling a temperature and a bias voltage. The method of claim 13, wherein the nanopowder condensation process is a process of condensing the nanopowder into a thin film on the substrate holder.

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