KR100770779B1 - A sources of electricity device for atmospheric pressure plasma - Google Patents

A sources of electricity device for atmospheric pressure plasma Download PDF

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KR100770779B1
KR100770779B1 KR1020050103222A KR20050103222A KR100770779B1 KR 100770779 B1 KR100770779 B1 KR 100770779B1 KR 1020050103222 A KR1020050103222 A KR 1020050103222A KR 20050103222 A KR20050103222 A KR 20050103222A KR 100770779 B1 KR100770779 B1 KR 100770779B1
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power supply
atmospheric pressure
switching elements
voltage
primary winding
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KR1020050103222A
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KR20070046474A (en
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전의식
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한삼기연 주식회사
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/42—Circuits or arrangements for compensating for or adjusting power factor in converters or inverters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H01F27/32—Insulating of coils, windings, or parts thereof
    • H01F27/323—Insulation between winding turns, between winding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335—Cleaning

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Cleaning In General (AREA)

Abstract

본 발명은 고전압의 직류, 교류 펄스를 발생시키는 대기압 플라즈마 전원장치에서, 1차측 권선은 2개의 스위칭 소자와 상기 2개의 스위칭 소자의 사이에 병렬되어 접속된 전압으로 연결되며, 2차측 권선은 직렬로 접속되는 N개의 더블 턴 트랜스포머로 구성된 것을 특징으로 하는 대기압 플라즈마 전원장치에 관한 것이다.According to the present invention, in the atmospheric plasma power supply generating high voltage direct current and alternating current pulses, the primary winding is connected with a voltage connected in parallel between two switching elements and the two switching elements, and the secondary windings are connected in series. An atmospheric pressure plasma power supply device comprising N double turn transformers connected thereto.

또한, 상기의 대기압 플라즈마 전원장치에서 상기 1차측 권선에 형성된 권수는 사용환경에 따라 상기 2개의 스위칭 소자에 흐르는 전압에 따라 권수를 달리하거나, 상기 2개의 스위칭 소자에 형성된 스위치의 연결 시간을 달리하여 펄스 폭을 달리하는 것을 특징으로 하는 대기압 플라즈마 전원장치로 저전압, 상온, 상압에서 안정적인 고전압을 발생시켜 플라즈마 상태로 만들어 반도체, LCD, PDP 등 생산라인의 오염물질 제거인 세정용 장치, 난분해성 유해가스 제거용 장치로 활용할 수 있다.In addition, the number of turns formed on the primary winding in the atmospheric pressure plasma power supply device may vary depending on the voltage flowing through the two switching elements according to the use environment, or may vary the connection time of the switches formed on the two switching elements. Atmospheric pressure plasma power supply, characterized by varying pulse width, generates stable high voltage at low voltage, room temperature, and atmospheric pressure to make plasma state, cleaning device for removing contaminants in production lines such as semiconductor, LCD, PDP, and non-degradable harmful gas It can be used as a removal device.

플라즈마, 전원장치, 트랜스포머, 반도체, 교류 Plasma, Power Supply, Transformer, Semiconductor, AC

Description

대기압 플라즈마 전원장치{A sources of electricity device for atmospheric pressure plasma}Atmospheric pressure plasma power supply {A sources of electricity device for atmospheric pressure plasma}

도 1은 종래 등록특허의 상세회로도.1 is a detailed circuit diagram of a conventional registered patent.

도 2는 본 발명에 따른 상세 구성을 설명하기 위한 상세회로도.2 is a detailed circuit diagram illustrating a detailed configuration according to the present invention.

도 3은 도 2의 a부분의 작동을 설명하기 위한 작동도.3 is an operation diagram for explaining the operation of the portion a of FIG.

도 4는 도 3의 작동도에 따른 파형도.4 is a waveform diagram according to the operation of FIG.

< 도면의 주요 부분에 대한 부호의 설명 ><Description of Symbols for Main Parts of Drawings>

10: 1차측 권선 20: 2차측 권선10: primary winding 20: secondary winding

A1, B1, A2, B2, ‥‥‥‥‥‥‥, An, Bn: 스위치A1, B1, A2, B2, ‥‥‥‥‥‥‥, An, Bn: Switch

CA1, CB1 , CA2, CB2 ‥‥‥‥‥‥‥, CAn, CBn: 1차측 권선에 감긴 코일C A1 , C B1 , C A2 , C B2 ‥‥‥‥‥‥‥‥, C An , C Bn : coil wound on primary winding

T1, T2, T3, T4, ‥‥‥‥‥‥‥, Tn: 트랜스포머T1, T2, T3, T4, ‥‥‥‥‥‥‥, Tn: Transformer

본 발명은 대기압 플라즈마 발생장치에 관한 것으로서, 더욱 상세하게는 1차측 권선은 두개의 스위치에 따라 더블 턴 방식으로 구성시키고, 2차측 권선은 직렬연결된 다수의 더블 턴 트랜스포머로 이루어진 대기압 플라즈마 발생장치에 관한 것이다.The present invention relates to an atmospheric pressure plasma generator, and more particularly, a primary winding is configured in a double turn method according to two switches, and the secondary winding is an atmospheric pressure plasma generator comprising a plurality of double-turn transformers connected in series. will be.

플라즈마 발생장치는 현재 LCD, PDP 등의 디스플레이 장치의 난분해성 유해가스 제거용인 세정용으로 많이 활용되고 있으며, 대기오염, 수처리, 금속, 비금속, 반도체의 소재 및 표면처리, 식품의 비열 살균처리에 활용하기 위하여 연구되어 지고 있다.Plasma generators are currently used for cleaning to remove harmful gases that are difficult to decompose in displays such as LCDs and PDPs, and are used for air pollution, water treatment, materials and surface treatment of metals, nonmetals and semiconductors, and non-thermal sterilization of food. It is being studied to

그리고 플라즈마 발생장치는 고전압을 발생시키고 제어하기 위하여 1940년대 핵 융합을 위한 고온 플라즈마 연구에서 시작되었으며, 에너지를 일정한 형태로 축적하며 단시간에 인출하거나 전기로 변환하게 된다.In order to generate and control a high voltage, the plasma generator was started in the high temperature plasma research for nuclear fusion in the 1940's, and accumulated energy in a certain form and withdrawn in a short time or converted into electricity.

그러나 고온의 상태에서 플라즈마는 제어하기가 힘들며 고온을 수반하기 때문에 고온 상태로 변환시키려면 많은 에너지가 필요하게 되는 단점 있었다.However, in the high temperature state, the plasma is difficult to control and involves a high temperature, which requires a lot of energy to convert to a high temperature state.

이러한 단점을 극복하기 위하여 전압, 전류, 콘덴서, 트랜스포머를 이용한 대한민국 특허등록 10-0347364는 고전압 대전류의 펄스 발생장치를 제안하고 있다.In order to overcome this drawback, Korean Patent Registration 10-0347364 using voltage, current, capacitor, and transformer proposes a pulse generator of high voltage and high current.

상기 특허는 도 1에서 보는 바와 같이 1차측 권선은 병렬 접속되고 2차측 권선은 직렬로 접속되어, 대전류의 펄스를 형성하는 N개의 싱글 턴 트랜스포머와, 직렬 접속된 충전용 콘덴서 및 스위칭 소자의 브랜치가 각기 M개 병렬 접속되어, 상 기 N개의 싱글 턴 트랜스포머의 1차측 권선에 각기 대전류를 출력하는 N개의 모듈을 포함하여 구성된 것을 특징으로 하는 고전압 대전류의 펄스 발생장치에 관한 것이다.As shown in Fig. 1, the primary windings are connected in parallel and the secondary windings are connected in series, so that the N single-turn transformers forming a high current pulse, the branch of the charging capacitor and the switching element connected in series, It relates to a pulse generator of high voltage and high current, characterized in that each of the M is connected in parallel, comprising N modules for outputting a large current to the primary winding of the N single-turn transformer.

상기 특허에서 발생되는 전류는 싱글 턴 트랜스포머를 채택함으로써 직류만출력되어, 교류를 발생시키지 못하는 문제점이 있었으며, 따라서 계속적인 직류의 유입인 대전류의 유입으로 인하여 단락이나 절연파괴, 콘덴서의 부화가 일어날 수 있는 문제점이 있다.The current generated in the patent has a problem in that only a direct current is output by adopting a single turn transformer, thereby not generating alternating current. Therefore, short circuit, breakdown of insulation, and incubation of a capacitor may occur due to the inflow of a large current which is a continuous inflow of direct current. There is a problem.

본 발명은 상기 특허에서의 문제점을 해결하기 위하여 안출된 것으로서 본 발명의 목적은 상온, 상압에서 안정적인 고전압을 발생시켜 플라즈마 상태로 만들 수 있는 대기압 플라즈마 발생장치를 제공함에 있다.The present invention has been made to solve the problems in the patent as an object of the present invention is to provide an atmospheric pressure plasma generating apparatus capable of generating a stable high voltage at room temperature, atmospheric pressure into a plasma state.

또한, 저전압, 상온, 상압에서 안정적인 고전압을 발생시켜 플라즈마 상태로 만들어 반도체, LCD, PDP 등 생산라인의 오염물질 제거인 세정용 장치, 난분해성 유해가스 제거용 장치로 사용할 수 있는 대기압 플라즈마 발생장치를 제공함에 있다.In addition, it generates a stable high voltage at low voltage, room temperature, and atmospheric pressure to make a plasma state, and an atmospheric pressure plasma generator that can be used as a cleaning device for removing contaminants in production lines such as semiconductors, LCDs, and PDPs, and as a device for removing non-degradable harmful gases. In providing.

상기의 목적을 달성하기 위한 본 발명은 고전압의 직류, 교류 펄스를 발생시키는 대기압 플라즈마 전원장치에서, 1차측 권선은 2개의 스위칭 소자와 상기 2개의 스위칭 소자의 사이에 병렬되어 접속된 전압으로 연결되며, 2차측 권선은 직렬로 접속되는 N개의 더블 턴 트랜스포머로 구성된 것을 특징으로 하는 대기압 플라즈마 전원장치에 관한 것이다.In order to achieve the above object, the present invention provides a high voltage direct current and alternating current pulse in an atmospheric pressure plasma power supply. The primary winding is connected with a voltage connected in parallel between two switching elements and the two switching elements. The secondary winding relates to an atmospheric pressure plasma power supply comprising N double turn transformers connected in series.

또한, 상기의 대기압 플라즈마 전원장치에서 상기 1차측 권선에 형성된 권수는 2개의 스위칭 소자에 흐르는 전압에 따라 권수를 달리하는 것을 특징으로 하는 대기압 플라즈마 전원장치에 관한 것이다.In addition, the number of turns formed in the primary winding in the atmospheric pressure plasma power supply apparatus relates to an atmospheric pressure plasma power supply, characterized in that the number of turns vary according to the voltage flowing through the two switching elements.

또한, 상기의 대기압 플라즈마 전원장치에서 상기 대기압 플라즈마 전원장치에서 발생된 고전압을 반도체 LCD, PDP 등 생산라인의 오염물질 제거인 세정용 장치, 난분해성 유해가스 제거용으로 사용하는 것을 특징으로 하는 대기압 플라즈마 전원장치에 관한 것이다.In addition, in the atmospheric plasma power supply device, the high voltage generated by the atmospheric plasma power supply device is used as a cleaning device for removing contaminants in production lines such as semiconductor LCDs and PDPs, and for removing non-degradable harmful gases. It relates to a power supply.

이하 본 발명에 따른 대기압 플라즈마 전원장치를 첨부된 도면을 참조하여 설명하면 다음과 같다.Hereinafter, an atmospheric pressure plasma power supply apparatus according to the present invention will be described with reference to the accompanying drawings.

도 2는 본 발명에 따른 상세 구성을 설명하기 위한 상세회로도이며, 도 3은 도 2의 a부분의 작동을 설명하기 위한 작동도이며, 도 4는 도 3의 작동도에 따른 파형도이다.2 is a detailed circuit diagram illustrating a detailed configuration according to the present invention, FIG. 3 is an operation diagram for explaining the operation of part a of FIG. 2, and FIG. 4 is a waveform diagram according to the operation diagram of FIG. 3.

본 발명은 도 2에서 보는 바와 같이 1차측 권선(10)은 2개의 스위치(A1, B1, A2, B2,‥‥‥‥‥‥‥, An, Bn)와 상기 스위치의 중앙부에 형성되어 권수가 같거 나 다른 코일(CA1, CB1 , CA2, CB2 ‥‥‥‥‥‥‥, CAn, CBn)이 감겨져 있다.In the present invention, as shown in FIG. 2, the primary winding 10 is formed with two switches A1, B1, A2, B2, ....................................., An, Bn, and the center of the switch. Same or different coils (C A1 , C B1 , C A2 , C B2 ‥‥‥‥‥‥‥, C An , C Bn ) is wound.

상기 1차측 권선(10)에 감겨진 코일(CA1, CB1 , CA2, CB2 ‥‥‥‥‥‥‥, CAn, CBn)은 사용상태에 따라 권수를 달리할 수 있다.Coils C A1 , C B1 , C A2 , C B2 wound on the primary winding 10 ‥‥‥‥‥‥‥, C An , C Bn ) may have different number of turns depending on the usage condition.

2차측 권선(20)은 직렬로 연결되어 있어 1차측 권선에 전류가 흐르면서 전위차가 발생하게 되면 전류가 흐르게 되며 전위차를 발생하게 된다.The secondary winding 20 is connected in series so that when a potential difference occurs while a current flows in the primary winding, a current flows and a potential difference is generated.

2차측 권선(20)은 직렬로 연결되어 전위차는 1차측 권선에 각각 발생된 전위차의 합산만큼 전위차를 발생하게 된다.The secondary windings 20 are connected in series so that the potential difference is generated by the sum of the potential differences generated in the primary windings, respectively.

각 트랜스포머(T1, T2, T3, T4, ‥‥‥‥‥‥‥, Tn)는 1차측 권선에 감긴 코일와 2차측 권선에 감긴 코일에 따라 전압과 전류의 크기를 조절할 수 있다.Each transformer (T1, T2, T3, T4, Tn, Tn) can adjust the magnitude of voltage and current according to the coil wound on the primary winding and the coil wound on the secondary winding.

직류 또는 교류의 고전압의 발생경로는 도 3에서 보는 바와 같이 VCC에 의한 전위차는 A1의 스위치를 on 시키면 도 3의(a)에서 보는 바와 같이 1차측 권선(10)의 코일(CA1)의 전위차는 오른쪽 화살표 방향으로 발생되며 2차측 권선(20)의 전위차는 역방향으로 발생하게 된다.As shown in FIG. 3, the potential difference due to VCC is the potential difference between the coil C A1 of the primary winding 10 as shown in FIG. 3A when the switch of A1 is turned on. Is generated in the direction of the right arrow and the potential difference of the secondary winding 20 is generated in the reverse direction.

A1 스위치를 off 시키고 B1 스위치를 on시키면 1차측 권선(10)의 코일(CB1)전위차는 도 3의(b)에서 보는 바와 같이 왼쪽 화살표 방향으로 발생되며 2차측 권선(20)의 전위차는 역방향으로 발생하게 된다.When the A1 switch is turned off and the B1 switch is turned on, the coil C B1 potential difference of the primary winding 10 is generated in the direction of the left arrow as shown in FIG. 3B, and the potential difference of the secondary winding 20 is reversed. Will occur.

스위칭 소자에 의한 스위치(A1, A2, A3 ‥‥‥‥‥‥‥ An) 중 하나만을 on/off 시키면 1차측 권선에 발생되는 전위차는 도 4에서의 (a)와 같은 파형도를 나타나며, 위상이 같은 직류를 발생시킨다.When only one of the switches A1, A2, A3 ‥‥‥‥‥‥‥ An by the switching element is turned on / off, the potential difference generated in the primary winding has a waveform diagram as shown in FIG. This direct current is generated.

1차측 권선의 스위치(A1, A2, A3, ‥‥‥‥‥‥‥ An) 중 하나만을 on시키고 다른 스위치(B1, B2, B3, ‥‥‥‥‥‥‥, Bn)를 off시키고, 스위치(B1, B2, B3, ‥‥‥‥‥‥‥, Bn) 중 하나만을 on시키고 스위치(A1, A2, A3,‥‥‥‥‥‥‥, An)을 off시키는 것을 반복하게 되면 도 4에서의 (b)와 같은 파형도를 나타내며, 위상이 다른 교류를 발생시킨다.Turn on only one of the switches of the primary winding (A1, A2, A3, ‥‥‥‥‥‥ An) and turn off the other switches (B1, B2, B3, ...) If only one of (B1, B2, B3, ‥‥‥‥‥‥, Bn) is turned on and the switch (A1, A2, A3, ... The same waveform diagram as in (b) is shown, and alternating current is generated with different phases.

2차권선은 직렬로 연결되어 있으므로 1차 권선의 감긴 권수에 따라, 직류 내지 교류의 전류가 흐르게 되며, 높은 전압이 발생하게 되며 상기 발생된 높은 전압의 양끝단자의 사이에는 플라즈마가 발생되게 된다.Since the secondary windings are connected in series, according to the number of turns of the primary winding, a current of direct current or alternating current flows, a high voltage is generated, and a plasma is generated between both terminals of the generated high voltage.

또한, 1차측 권선의 2개의 스위치(A1, B1, A2, B2,‥‥‥‥‥‥‥, An, Bn)의 연결시간을 달리하여 펄스 폭을 달리하여 사용할 전압의 세기를 조절할 수도 있다.In addition, it is also possible to adjust the strength of the voltage to be used by varying the pulse width by varying the connection time of the two switches A1, B1, A2, B2, ..., ..., An, Bn of the primary winding.

본 발명에 의하여 발생한 대기압 플라즈마는 공기중에 있는 O2, H2O 을 분해하여 반도체, LCD, PDP 등 생산라인의 탄화수소 등의 오염물질과 화학 반응하여 오염물질을 CO2, H2O 로 배출하게 하는 세정의 작용을 한다.The atmospheric plasma generated by the present invention decomposes O 2 , H 2 O in the air and chemically reacts with pollutants such as hydrocarbons in production lines such as semiconductors, LCDs, and PDPs to discharge the pollutants to CO 2 , H 2 O. It acts as a cleaning.

본 발명은 상기의 구성에 의하여 저전압, 상온, 상압에서 안정적인 고전압을 발생시켜 플라즈마 상태로 만들어 반도체, LCD, PDP 등 생산라인의 오염물질 제거인 세정용 장치, 난분해성 유해가스 제거용 장치로 활용할 수 있다.The present invention generates a stable high voltage at low voltage, room temperature, and atmospheric pressure by the above configuration to make a plasma state can be utilized as a cleaning device for removing contaminants in production lines such as semiconductors, LCDs, PDPs, etc. have.

본 발명을 상기한 실시예를 들어 구체적으로 설명하였지만, 본 발명은 이에 제한되는 것이 아니고, 해당 기술 분야의 숙련된 당업자의 통상의 지식의 범위 내에서 치환, 변경, 개량이 가능하다.Although the present invention has been described in detail with reference to the embodiments described above, the present invention is not limited thereto, and the present invention may be substituted, changed, and improved within the ordinary knowledge of a person skilled in the art.

Claims (3)

상압에서 고전압의 직류, 교류 펄스를 발생시키는 대기압 플라즈마 전원장치에 있어서,In the atmospheric plasma power supply for generating a high voltage DC and AC pulse at normal pressure, 1차측 권선은 2개의 스위칭 소자와 상기 2개의 스위칭 소자의 사이에 병렬되어 접속된 전압으로 연결되며, 2차측 권선은 직렬로 접속되는 N개의 더블 턴 트랜스포머로 구성되고, 상기 1차측 권선에 형성된 권수는 사용환경에 따라 상기 2개의 스위칭 소자에 흐르는 전압에 따라 권수를 달리하거나, 상기 2개의 스위칭 소자에 형성된 스위치의 연결 시간을 달리하여 펄스 폭을 달리하여 고전압이 발생하고, 발생된 고전압을 반도체 LCD, PDP 등 생산라인의 오염물질 제거인 세정용 장치로 사용하는 것을 특징으로 하는 대기압 플라즈마 전원장치.The primary winding is connected by a voltage connected in parallel between the two switching elements and the two switching elements, and the secondary winding is composed of N double turn transformers connected in series, and the number of turns formed on the primary winding According to the usage environment, the number of turns is changed according to the voltage flowing through the two switching elements, or the connection time of the switches formed on the two switching elements is changed, the high voltage is generated by varying the pulse width, and the generated high voltage is converted into the semiconductor LCD. Atmospheric plasma power supply, characterized in that used as a cleaning device for removing contaminants in the production line, such as PDP. 삭제delete 삭제delete
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990036022U (en) * 1998-02-12 1999-09-15 이종수 Pulse transformer of high pressure pulse generator
KR20000011361U (en) * 1998-12-01 2000-07-05 전주범 Driving record of field effect transistor using pulse transformer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990036022U (en) * 1998-02-12 1999-09-15 이종수 Pulse transformer of high pressure pulse generator
KR20000011361U (en) * 1998-12-01 2000-07-05 전주범 Driving record of field effect transistor using pulse transformer

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