KR100758771B1 - High voltage transformer - Google Patents

Abstract

An object of the present invention is to provide a high-voltage transformer which does not impair the insulation of the mold coil and does not damage the ferrite magnetic core even if the power input to the excimer lamp is increased.

E-type ferrite magnetic cores 11a and 11b, which are covered with an insulating material, have a mold coil 13 having a hollow portion, and a center angle 110a of the E-type ferrite magnetic core in the hollow portion of the mold coil 13. In the high pressure transformer in which the E-type ferrite magnetic core is fixed integrally by the frame members 12a and 12b with the 110b inserted therein, the mold coil 13 is attached to the frame members 12a and 12b. The support member 14 which isolate | separates and supports the magnetic core 11a, 11b is attached, It is characterized by the above-mentioned.

Description

HIGH VOLTAGE TRANSFORMER

1 is a front view showing the configuration of a high-voltage transformer 1 used in a lighting circuit for an excimer lamp according to the present invention;

FIG. 2 is a sectional side view seen from A-A and B-B of the high pressure transformer 1 shown in FIG. 1;

3 is a front view showing the configuration of a high voltage transformer used in a lighting circuit for an excimer lamp according to the prior art;

4 is a side cross-sectional view seen from A-A and B-B of the high pressure transformer 10 shown in FIG.

FIG. 5 is an enlarged perspective view of the mold coil 13 in which a part of the mold coil 13 is cut off to show a cross section.

<Explanation of symbols for main parts of drawing>

One… High voltage transformer 11a, 11b. Ferrite magnetic core

110a, 110b... Convex part of cylindrical shape of ferrite magnetic core

111a, 111b... Outer peripheral surface of the convex parts 110a and 110b

120a, 120b... Convex part of ferrite magnetic core

121a, 121b... Concave surfaces of the convex portions 120a and 120b

12a, 12b... Frame member 13... Mold coil

130... . Hollow portion of mold coil 131.. End of mold coil                 

132... .. Inner peripheral surface of mold coil. Circumferential surface of mold coil

134... Primary coil 135... Secondary coil

14... Support member 15.. screw

16... Nut G1, G2, G3... air gap

 The present invention relates to a high voltage transformer, and more particularly, to a high voltage transformer used in a lighting circuit for an excimer lamp that performs high frequency lighting.

Excimer light irradiation apparatuses are mainly used in the decomposition removal of the organic substance adhering to the panel substrate surface of a liquid crystal panel display element, the surface modification of a panel substrate, etc. in recent years. An excimer lamp as a light source mounted on this excimer light irradiation apparatus has a characteristic of strongly radiating vacuum ultraviolet light of a single wavelength, and has an wavelength of 172 nm in an excimer lamp using, for example, xenon gas, enclosed as a discharge gas. It is known to emit a vacuum ultraviolet light of.

In order to improve the throughput (productivity) in recent years, such excimer lamps have been required to have high output and lengthening, and an increase in input power to the excimer lamps is required. As the power source for the excimer lamp, a high-voltage transformer formed by combining an E-type ferrite magnetic core and a coil (hereinafter, referred to as a mold coil) in which the coil outer surface is molded with an insulating material such as resin is used. MnZn ferrites, NiZn ferrites and the like used as the ferrite magnetic core have the disadvantage of having a low iron loss at high frequency and excellent conversion efficiency, but have a disadvantage of being weak.

FIG. 3 is a front view showing the configuration of a high voltage transformer 10 used in a lighting circuit for an excimer lamp according to the prior art, and FIG. 4 (a) is a side view seen from AA of the high voltage transformer 10 shown in FIG. Sectional drawing and FIG. 4 (b) are sectional side view seen from the BB of the high pressure transformer 10 shown in FIG.

In these figures, 11a and 11b are E type ferrite magnetic cores, respectively, and frame members 12a and 12b for fixing both ferrite magnetic cores 11a and 11b are attached to both sides of the ferrite magnetic cores 11a and 11b. . 13 is a mold coil molded by an insulating material, such as silicone resin, for example. In the hollow portion 130 of the mold coil 13, convex portions 110a and 110b positioned in the center of the pair of E-type ferrite magnetic cores 11a and 11b are inserted, and at the same time, the mold coil 13 and the ferrite are inserted. Between the magnetic cores 11a and 11b, the insulating paper 20 about thickness 1mm is arrange | positioned, for example. In this state, when the nut 16 is attached and screwed to the screw 15 inserted into the screw hole formed in each of the frame members 12a and 12b, the ferrite magnetic core 11a and the ferrite magnetic core 11b are integrated. The mold coil 13 is also fixed to the ferrite magnetic cores 11a and 11b.

FIG. 5 is an enlarged perspective view of the mold coil 13 in which a part of the mold coil 13 is cut off to show a cross section.

In the figure, 134 is a primary coil, 135 is a secondary coil, and 136, 137, and 138 are insulating papers, respectively.                         

The high-pressure transformer 10 shown in FIG. 3 has the outer diameter of the convex parts 110a and 110b located in the center of the ferrite magnetic cores 11a and 11b, and the inner diameter of the mold coil 13 (diameter of the hollow part 130). ), There is almost no difference between the convex portions 110a and 110b and the mold coil 13, and there is almost no void. The reason for this configuration is as follows.

As described above, the ferrite magnetic cores 11a and 11b are mechanically fragile, so that the screwing cannot be performed too strongly. Therefore, if the difference between the outer diameter of the convex parts 110a and 110b and the inner diameter of the mold coil 13 is large, there is a possibility that the mold coil 13 may shift in the radial direction due to vibration during transportation or the like. In this case, there may be a case where the convex portions 120a and 120b positioned at the respective ends of the ferrite magnetic cores 11a and 11b are in contact with the outer circumferential surface 132 of the mold coil 13. In such a state, as shown in FIG. 5, since the secondary coil 135 generating the high voltage is located on the outer circumferential side of the mold coil 13, the convex portions 120a and 120b and the mold coil 13 are formed. If the outer circumferential surface is used in contact with each other, there is a risk that high frequency discharge occurs in the contact portion and the insulation is degraded. For this reason, the structure has almost no gap between the convex parts 110a and 110b and the mold coil 13.

(Patent Document 1) Japanese Patent Application Laid-Open No. 10-241957

(Patent Document 2) Japanese Patent Application Laid-Open No. 2002-353041

However, in the high-voltage transformer having the above structure, when the input power to the excimer lamp is increased in order to meet the recent demand for higher output and longer length of the excimer lamp, there is a problem that the ferrite magnetic core is broken.

In view of the above problems, an object of the present invention is to provide a high-voltage transformer which does not impair the insulation of the mold coil and does not damage the ferrite magnetic core even if the input power to the excimer lamp is increased.

MEANS TO SOLVE THE PROBLEM This invention employ | adopts the following means in order to solve said subject.

The first means has a mold coil which is covered with an E-type ferrite magnetic core and an insulating material and has a hollow portion, and in which the middle angle of the E-type ferrite magnetic core is inserted into the hollow portion of the mold coil. A high pressure transformer in which an E-type ferrite magnetic core is integrally fixed by a member, wherein the frame member is attached to a support member for isolating and supporting the mold coil from the E-type ferrite magnetic core. .

The second means is the high pressure transformer according to the first means, wherein the support member is attached to the frame member in such a manner that the support member is isolated between the mold coil and the E-type ferrite magnetic core so as to be ventilated.

An embodiment of the present invention will be described with reference to FIGS. 1 and 2.

Fig. 1 is a front view showing the configuration of a high voltage transformer 1 used in a lighting circuit for an excimer lamp according to the invention of the present embodiment, and Fig. 2 (a) is a view of the high voltage transformer 1 shown in Fig. 1. Side sectional view seen from AA, FIG. 2 (b) is a side sectional view seen from BB of the high pressure transformer 1 shown in FIG.                     

In these figures, 11a and 11b are E type ferrite magnetic cores, respectively, and the ferrite magnetic cores 11a and 11b are the cylindrical convex parts 110a and 110b which are located in the center, and the convex parts 120a and which are located in the edge part, respectively. 120b) and constitute an approximately E shape. 12a and 12b are frame members attached to fix both ferrite magnetic cores 11a and 11b on both sides of the ferrite magnetic cores 11a and 11b. 13 is a mold coil having a hollow portion 130 molded by an insulating material such as silicone resin or the like. 14 is a support member attached to frame members 12a and 12b by screwing, for example.

The assembly of the high-pressure transformer 1 is performed by first placing the convex portions 110a and 110b positioned at the center of the pair of E-type ferrite magnetic cores 11a and 11b in the hollow portion 130 of the mold coil 13. Insert it. In this state, the convexity of the ferrite magnetic core 11a and the ferrite magnetic core 11b is fixed by attaching and screwing the nut 16 with respect to the screw 15 inserted into the screw hole formed in each of the frame members 12a and 12b. The part 110a and the convex part 110b and the convex part 120a and the convex part 120b are integrally fixed in contact with each other. Next, by attaching the support member 14 to the frame member 12 by screwing or the like, eight parts of the outer circumference of the mold coil 13 are sandwiched between the support members 14 and fixed. As a result, in the state where the space | gap G1, the space | gap G2, and the space | gap G3 were formed between the ferrite magnetic core 11a, 11b and the mold coil 13, the mold coil 13 is a ferrite magnetic core 11a, 11b. Is fixed in the holding.

Here, the dimension etc. of each member which comprise the high pressure transformer 1 of this invention are explained in full detail.

The diameter of the columnar convex parts 110a and 110b located in the center of the ferrite magnetic cores 11a and 11b is φ 30 mm, for example. In addition, the ferrite magnetic cores 11a and 11b appropriately change their materials in accordance with the lighting frequency when the excimer lamp is turned on. For example, when the lighting frequency is 10 kHz to 1 MHz, a MnZn ferrite magnetic core is used, and when 1 MHz or more, a NiZn ferrite magnetic core is used.

The mold coil 13 has a cylindrical shape as shown in FIG. 5, the outer diameter is, for example, φ 60 mm, and the inner diameter is, for example, φ 40 mm. The mold coil 13 uses, for example, insulating paper such as Nomex as a coil core, and uses a litz wire in which a plurality of single wires are bundled for the primary coil 134 and the secondary coil 135. . The outer surface of the mold coil 13 selects and molds arbitrary resins from resins, such as a silicone resin and an epoxy resin.

It is preferable that the support member 14 uses an insulating material so that unwanted discharge does not occur between the support member 14 and the mold coil 13. For example, glass epoxy resin, paper epoxy resin, paper phenol resin, ceramic, etc. are used.

According to the high voltage transformer 1 of the present invention, the ferrite magnetic cores 11a and 11b are damaged even when a power exceeding 1.5 times conventional, for example, 1500W or more is input, in order to increase the output power and lengthen the excimer lamp. The same problem did not occur. The reason can be considered as follows.

In the conventional high voltage transformer 10 shown in FIG. 3 and FIG. 4, when a large electric current flows through the mold coil 13, the self-heating and the ferrite magnetic cores 11a and 11b of the coil are lost. Since heat generated by iron loss is conducted to the mold coil 13, the temperature of the mold coil 13 rises, and the entire mold coil 13 is thermally expanded mainly by thermal expansion of the mold resin. Therefore, the ferrite magnetic cores 11a and 11b are damaged by the stress caused by thermal expansion of the mold coil 13 through the insulating paper 20.

In contrast, in the high-voltage transformer 1 of the present invention, the mold coil 13 is formed between the end portions 131 of the mold coil 13 and the ferrite magnetic cores 11a and 11b, having a gap of about 1 to 2 mm ( G1) is formed. By the presence of the gap G1, even if the mold coil 13 expands to the gap G1 side, the stress due to thermal expansion is not applied to the ferrite magnetic cores 11a and 11b, thereby preventing damage to the ferrite magnetic cores 11a and 11b. It can prevent.

Moreover, in the high pressure transformer 1 of this invention, between the outer peripheral surfaces 111a and 111b of the convex parts 110a and 110b of the ferrite magnetic cores 11a and 11b, and the inner peripheral surface 132 of the mold coil 13, A gap G2 of about 5 mm is formed. In addition, between the concave surfaces 121a and 121b of the convex portions 120a and 120b of the ferrite magnetic cores 11a and 11b and the outer circumferential surface 133 of the mold coil 13, a gap G3 of about 5 mm is provided. Is formed.

By constructing the high pressure transformer 1 of the present invention in this way, in order to increase the output power of the excimer lamp and increase the length of the input power to the high voltage transformer 1 as described above, the voids G2 and G3 are formed, thereby forming a mold coil. The heat dissipation from the inner circumferential surface 132 and the outer circumferential surface 133 of (13) becomes easy, and heat conduction from the ferrite magnetic cores 11a and 11b to the mold coil 13 can also be prevented. As a result, the temperature of the mold coil 13 does not rise too much, and the problem which damages insulation by the resin molded in the mold coil 13 deteriorates can also be solved.

In addition, by providing the air gaps G2 and G3 to be ventilated, cooling of the mold coil 13 can be further improved, and deterioration of the resin molded in the mold coil 13 can be prevented.

Moreover, according to the high pressure transformer 1 of this invention, since the mold coil 13 is fixed by the support member 14, compared with the method of being clamped between the conventional ferrite magnetic cores 11a and 11b, it is more powerful. The mold coil 13 can be accurately positioned at a predetermined position. As a result, even if vibration or the like is applied at the time of transportation, for example, the mold coil 13 does not come into contact with the convex portions 120a and 120b of the ferrite magnetic cores 11a and 11b, so that the mold coil 13 is convex. The occurrence of unwanted discharge due to the contact of the portions 120a and 120b can be reliably prevented.

 According to invention of Claim 1, it has a mold coil covered with the E-type ferrite magnetic core and the insulating member, and has a hollow part, and the frame member in the state which inserted the center angle of the said E-type ferrite magnetic core in the hollow part of the said mold coil. In the high-voltage transformer in which the E-type ferrite magnetic core is fixed integrally, the frame member is provided with a supporting member that isolates and supports the mold coil from the E-type ferrite magnetic core. Even if it is increased, it is possible to provide a high pressure transformer that does not impair the insulation of the mold coil and that the ferrite magnetic core does not break.

According to the invention according to claim 2, since the support member is attached to the frame member in a manner that the space between the mold coil and the E-type ferrite magnetic core is ventilated, the cooling of the mold coil can be further improved, and the mold coil is molded into the mold coil. The deterioration of the resin can be prevented.

Claims (2)

 It has a mold coil covered with an E-type ferrite magnetic core and an insulating material, and has a hollow part, and the center member of the E-type ferrite magnetic core is inserted into the hollow part of the mold coil in the frame member. In the high pressure transformer in which the E-type ferrite magnetic core is fixed integrally, The frame member is provided with a supporting member for separating and supporting the mold coil from the E-type ferrite magnetic core.  The high pressure transformer according to claim 1, wherein the support member is attached to the frame member in such a manner that the support coil is isolated between the mold coil and the E-type ferrite magnetic core to allow ventilation.

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