KR100741172B1 - Detector for centroid position of charge cloud - Google Patents

Abstract

According to the present invention, an external delay line is formed on an upper surface or a lower surface of a circuit board constituting an anode, so that the particle cloud position detection device of the delay line type particle cloud position detection device for detecting the center position of the charge cloud incident from the microchannel plate can be densely formed. To be integrated. In the particle cloud position detecting apparatus of the present invention, the particle cloud position detecting apparatus including an anode detecting a position signal of an electron cloud from an electron cloud amplified from a microchannel plate, wherein the anodes are formed in a first direction and parallel to each other. A first plane having a plurality of first delay lines and a metal pad formed side by side between the first delay lines; A second plane formed below the first plane in a second direction perpendicular to the first direction and having a plurality of second delay lines parallel to each other; A third external delay line formed in the first direction and connecting adjacent lines among the plurality of first delay lines, wherein the first external delay line is formed to be parallel to the first delay lines; The first upper delay line formed in the plane and the first lower delay line formed in the fourth plane and connecting the end points of the adjacent first upper delay line diagonally, the lower plane of the fourth plane in the second direction And a second external delay line connecting the adjacent lines among the plurality of second delay lines.

Microchannel Plate, MCP, Position, Detector, Delay Line

Description

Center of charge cloud detector {DETECTOR FOR CENTROID POSITION OF CHARGE CLOUD}

1 shows a detector having a microchannel plate;

2 shows a first plane with delay lines arranged in the Y-axis direction;

3 shows a second plane with delay lines arranged in the X-axis direction;

4 illustrates a third plane in which a first upper delay line is arranged;

5 is a view showing a fourth plane in which a first lower delay line is arranged;

6 is a view showing a fifth plane in which a second upper delay line is arranged;

FIG. 7 illustrates a sixth plane in which a second lower delay line is arranged;

8A is a diagram schematically showing a configuration of a first external delay line

8B is a diagram schematically showing a configuration of a second external delay line

9 is a cross-sectional view taken along the line X-X 'of FIG.

<Description of the symbols for the main parts of the drawings>

11 First delay line 12 Metal pad

13 First Via 14a Second Via

14b Third Via 21 Second Delay Line

31 First upper delay line 41 First lower delay line

51 Second upper delay line 61 Second lower delay line

100 anodes

The present invention relates to a particle cloud position detection device, and more particularly, to a particle cloud position detection device having an improved degree of integration by forming an external delay line on an upper surface or a lower surface of a circuit board constituting an anode.

Microchannel Plate (MCP) detectors are widely used for the detection and imaging of electrons, ions, ultra violet (UV), soft X-rays, and the like.

As shown in FIG. 1, the MCP detector is composed of two independent components, the MCP 200 and the position detecting anode 100. When the photon beam constituting the light is incident on the MCP 200, the photons are converted into electrons and amplified to form an electron cloud composed of millions of electrons to the anode 100 installed under the MCP 200. Delivered.

The anode 100 detects the position of the electron cloud from the pulsed voltage generated by the electron cloud, and there are various methods such as a wedge method and a delay line method, but currently the most widely used is a delay. It is a line method.

1 uses a delay line anode (100). The anode 100 is composed of a plurality of tortuous delay lines 100a formed in the X-axis direction, and an amplifier 101 is connected to an end of each delay line to sense a voltage generated from the delay line. That is, the pulse type voltage generated by the electron cloud delivered to a certain position on the anode is amplified and sensed by the amplifier 101 connected to each delay line, and the delay at which the pulse is transmitted from the time when the pulse is delivered to each amplifier. By calculating the time it is possible to exactly know the location of the electron cloud.

In this way, one-dimensional position data can be obtained, and in order to obtain two-dimensional position data, delay lines in the X- and Y-axis directions perpendicular to each other must be provided.

On the other hand, each delay line is provided with an external delay line 100b as shown in FIG. 1 to distinguish signals between adjacent delay lines. As described above, since the external delay line 100b is formed outside the area S in which the delay line 100 is formed, that is, the area required for the actual image, an additional space for forming the external delay line is required to reduce the degree of integration. It is a factor that makes it fall.

However, in order to use the MCP detector in a device that occupies a small space such as a small satellite, it is necessary to be more integrated.

As described above, in order to manufacture the integrated position detector with high integration, there is a problem that an external delay line must be configured differently or another method that does not use an external delay line.

Accordingly, the present invention has been made to solve the above problems, it is to provide a particle cloud position detection apparatus that can be mounted on a small satellite by improving the degree of integration by reducing the volume of the position detection device.                         

Furthermore, another object of the present invention is to provide an anode and particle cloud position detection apparatus that can reduce the volume of the detection device by forming an external delay line on the upper or lower surface of the plane constituting the delay line.

The particle cloud position detecting device according to the present invention is a particle cloud position detecting device including an anode for detecting a position signal of an electron cloud from an electron cloud amplified from a microchannel plate, wherein the anode is formed in a first direction A first plane having a plurality of first delay lines parallel to each other and a metal pad formed side by side between the first delay lines; A second plane formed below the first plane in a second direction perpendicular to the first direction and having a plurality of second delay lines parallel to each other; A third external delay line formed in the first direction and connecting adjacent lines among the plurality of first delay lines, wherein the first external delay line is formed to be parallel to the first delay lines; The first upper delay line formed in the plane and the first lower delay line formed in the fourth plane and connecting the end points of the adjacent first upper delay line diagonally, the lower plane of the fourth plane in the second direction And a second external delay line connecting the adjacent lines among the plurality of second delay lines.
The second external delay line may include a second upper delay line formed in a fifth plane to be parallel to the second delay lines, and a second upper delay line formed in a sixth plane to diagonally connect the end points of the adjacent second upper delay lines. It is characterized by consisting of two lower delay lines.

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In this way, the degree of integration may be improved by forming an external delay line on the upper or lower surface of the plane constituting the delay line.

Hereinafter, an inspection apparatus of a flat panel display device according to an exemplary embodiment of the present invention will be described with reference to the accompanying drawings. This embodiment is not intended to limit the scope of the invention, but is presented by way of example only.

2 to 5 illustrate patterns formed on each layer constituting the anode 100.

First, FIG. 2 illustrates the first plane 10 through which the electron clouds are incident from the MCP, and the first delay lines 11a and 11b formed in parallel in the Y-axis direction, that is, the delay lines are arranged at regular intervals. . Accordingly, when the electron clouds are collected in the plurality of first delay lines 11, voltages are generated in the first delay lines 11 according to the amount of collected charges. As described above, the position in the X-axis direction is detected based on the region of the largest voltage among the first delay lines in which the charge is collected.

In addition, the metal pads 12 are disposed between the first delay lines 11 at regular intervals. These metal pads 12 collect charges from the electron cloud like the first delay lines 11, and the collected charges are transferred to the second delay lines 21 to be formed on the lower surface through the first vias 13. .

In addition, a second via 14a different from the first via 13 is disposed outside the electron cloud detection region where the first delay lines 11 are disposed. The second via 14a is for connecting the first delay lines 11 to external delay lines located on the bottom surface.

3 illustrates a second plane 20 formed below the first plane 10, in which second delay lines 21 formed parallel to each other in the X-axis direction are disposed at a predetermined interval. The second delay lines 21 are connected to the metal pad 12 formed in the first plane 10 through the first via 13, and a plurality of metal pads are connected to one delay line. Accordingly, the plurality of metal pads arranged side by side in the X-axis direction are connected to one second delay line 21 to recognize the position of the electron cloud incident on the anode in the Y-axis direction.

In addition, a third via 14b is disposed outside the electron cloud detection region where the second delay lines 21 are disposed. The third via 14b is for connecting the second delay lines 21 to the external delay lines positioned on the lower surface.

4 and 5 are arranged on the lower surface of the second plane 20, the third plane 30 and the fourth plane having a first external delay line (31, 41) connected to the first delay line ( 40) is shown.

In the third plane 30, the first upper delay lines 31a, 31b, and 31c are disposed parallel to the first delay lines 11 on the first plane 10. The arrangement interval is one half of the first delay line. Both edges of the first upper delay line are connected to second vias 14a disposed outside the electron cloud detection region. Meanwhile, the first lower delay lines 41a, 41b, and 41c are disposed in an oblique direction on the fourth plane 40 to connect adjacent first upper delay lines of the third plane 30 in a diagonal direction.

Each of the first external delay lines disposed as described above is connected to upper and lower lines through the second via 14a. First, the first upper delay lines 31a and 31c are connected to the first delay line 11 of the first plane 10 through the second vias 14a and ⓒ. In addition, the first upper delay line is connected to the lower first delay line through the second vias 14a ⓑ, ⓒ, ⓓ, ⓔ, ⓕ.

Accordingly, the first external delay line including the first upper delay line and the first lower delay line forms an external delay line connecting the adjacent first delay lines as shown in FIG. 8A. These external delay lines form a double-wound inductor to delay the transfer of the voltage generated by the electron cloud to the amplifier.

6 and 7 illustrate a fifth plane 50 and a sixth plane disposed on a lower surface of the fourth plane 40 and having second external delay lines 51 and 61 connected to second delay lines. 60).

In the fifth plane 50, second upper delay lines 51a, 51b, and 51c are disposed parallel to the second delay lines 21a and 21b on the second plane 20. The arrangement interval is one half of the second delay line. Both edges of the second upper delay line are connected to third vias 14b disposed outside the electron cloud detection region. Meanwhile, second lower delay lines 61a, 61b, and 61c are disposed in an oblique direction on the sixth plane 60 to connect adjacent second upper delay lines 51 of the fifth plane 50 in a diagonal direction.

Each of the delay lines disposed as described above is connected to upper and lower lines through the third via 14b. First, the second upper delay line is connected to the second delay line 21 of the second plane 20 through the third via 14b. The second upper delay line is also connected to the second lower delay line through the third via 14b.

Accordingly, the second external delay line including the second upper delay line and the second lower delay line forms an external delay line connecting the second adjacent delay lines as illustrated in FIG. 8B. These delay lines form a twice-wound inductor to time delay the transfer of the voltage generated by the electron cloud to the amplifier.

Meanwhile, a ground plane made of metal is formed between the planes to prevent interference with each other, and an insulating film made of a dielectric is provided between the planes and the planes to maintain electrical insulation therebetween. Further, vias are provided to match the positions of the first, second, and third vias on each plane.

FIG. 9 is a cross-sectional view taken along line X-X 'of FIG. 2 and shows a plane, ground plane, and insulating layer stacked thereon. The hatched portion represents the ground plane.

In the above embodiment, the external delay line is configured in the form of an inductor wound twice over two planes, but the present invention is not limited thereto and may be formed only on one plane. That is, a second external delay line is formed to connect two adjacent first delay lines on the first plane in a diagonal direction, and a second external link connects two adjacent second delay lines on the second plane in a diagonal direction. To form a delay line.

Meanwhile, A, A ', B, and B' of FIGS. 4 and 6 respectively describe terminals connected to transfer the voltage generated in the delay line to the amplifier 101.

Although the present invention has been described in that the first delay line, the second delay line, the first external delay line, the second external delay line, etc. are stacked in the order, but not limited to these, the stacking order and shape thereof can be variously changed. Will be apparent to those skilled in the art.

As described above, according to the present invention, it is possible to reduce the volume of the position detection device by forming the external delay line on the upper surface or the lower surface of the delay line rather than arrange the outer portion of the delay line. Can be installed.

The embodiments of the present invention described above and illustrated in the drawings should not be construed as limiting the technical idea of the present invention. The protection scope of the present invention is limited only by the matters described in the claims, and those skilled in the art can change and change the technical idea of the present invention in various forms. Therefore, such improvements and modifications will fall within the protection scope of the present invention as long as it will be apparent to those skilled in the art.

Claims (6)

delete delete In the particle cloud position detection device comprising an anode for detecting the position signal of the electron cloud from the electron cloud amplified from the fine channel plate, The anode, A first plane having a plurality of first delay lines formed in a first direction and parallel to each other, and a metal pad formed side by side between the first delay lines; A second plane formed below the first plane in a second direction perpendicular to the first direction and having a plurality of second delay lines parallel to each other; A first external delay line formed in the first direction and connecting adjacent lines among the plurality of first delay lines, The first external delay line may include a first upper delay line formed in a third plane so as to be parallel to the first delay lines, and a diagonally connecting end point of an adjacent first upper delay line formed in a fourth plane. Consists of one lower delay line, And a second external delay line formed in the second direction on the lower plane of the fourth plane and connecting adjacent lines among the plurality of second delay lines. The method of claim 3, And said first external delay line and said second external delay line are inductors. delete The method of claim 3, The second external delay line is formed in a fifth plane parallel to the second delay lines, and a second lower edge formed in a sixth plane to diagonally connect an end point of an adjacent second upper delay line. Particle cloud position detection device, characterized in that composed of stranded wire.

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