KR100738415B1 - Fine motion manipulator with three joints and three axes parallel fine planar motion manipulation apparatus using the same - Google Patents

Abstract

The present invention is a micro-driving manipulator composed of two joints for the fine linear motion in two directions and a joint for the rotational motion in one direction, and a predetermined number of the micro-driving manipulator in parallel to the substrate in the three-axis direction The three-axis parallel micro-plane motion control device for performing the micro-movement, the three-axis parallel micro-plane motion control device for three micro-drive to perform a linear motion in two directions and a rotational motion in one direction in the plane The manipulator and the three micro-driving manipulators are characterized in that they comprise a substrate (B) which are located at their centers in space and connected to each other. Here, the three micro-driving manipulators are arranged at an angle of 120 ° about the substrate.

Nano, manipulator, manipulator for fine driving, 3-axis, translational, rotational, planar

Description

 FINE MOTION MANIPULATOR WITH THREE JOINTS AND THREE AXES PARALLEL FINE PLANAR MOTION MANIPULATION APPARATUS USING THE SAME}

1 is a block diagram of a three-axis parallel micro-planar motion control device according to the present invention.

FIG. 2 is a diagram illustrating a first micro-driving manipulator of FIG. 1.

3A is a configuration diagram illustrating a parallel linear spring 10 of the micro manipulator of FIG. 2.

Figure 3b is a block diagram showing a double complex linear spring 20 of the manipulator for the fine drive of FIG.

3C is a configuration diagram illustrating the flexible hinge 30 of the manipulator for fine driving of FIG. 2.

4A is a configuration diagram for describing the operation of the parallel linear spring 10 of FIG. 3A.

FIG. 4B is a configuration diagram for explaining the operation 20 of the double-composite linear spring of FIG. 3B.

4C is a configuration diagram illustrating the operation of the flexible hinge 30 of FIG. 3C.

Figure 5 is a block diagram for explaining the translational motion of the three-axis parallel micro-planar motion control device according to the present invention.

Figure 6 is a block diagram for explaining the rotational motion of the three-axis parallel micro-planar motion control device according to the present invention.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manipulator for a microdrive, and in particular, a microdrive manipulator comprising two joints for a fine linear motion in two directions and a joint for a rotational motion in one direction, and a predetermined number of the manipulators for the microdrive. The present invention relates to a three-axis parallel type micro-plane motion manipulation device connected in parallel to the substrate to perform the micro-movement in the three-axis direction in the plane.

Recently, in order to inspect a specimen or to finely manipulate a movement of a predetermined apparatus, a manipulator for micro-drive with precision of nano resolution and manipulating apparatuses manufactured by connecting them to each other have been developed.

Such a micro-driving manipulator includes a piezoelectric element and a substrate connected to the piezoelectric element and hinged to support a predetermined sample. The manipulator for such a microdrive changes the length of the piezoelectric element according to the voltage applied to the piezoelectric element, and thus the substrate connected to the piezoelectric element moves finely. Thus, the specimen placed on the substrate can move finely. On the other hand, the manipulators manufactured by connecting the micro-driving manipulators to each other have different lengths of the piezoelectric elements according to the voltage applied to the piezoelectric elements included in the micro-driving manipulators. Move finely Thus, the specimen placed on any one of the substrates moves finely.

Here, the term 'fine' means physically nano resolution, and the hinge means a metal body formed to have elasticity / resilience as a predetermined metal body.

For example, a three-axis planar parallel operation device (not shown) for driving three axes of X, Y, Θ according to the prior art is a micro-driven manipulator which allows three joints to be driven while supporting each link. And a substrate connecting them to each other. That is, each of the micro-driving manipulator performs the movement by a combination of a translational joint having a linear motion (P) and a rotary joint having a rotational movement (R). In order to realize three axes of motion by three articulated microdrive manipulators in the plane, the three articulation motions of each microdrive manipulator may be one of seven combinations of RRR, RRP, RPR, RPP, PRR, PRP, and PPR. It must consist of one. Among the joint combinations, the manipulators of the micro-manipulators of the RRR and PRR types are implemented with flexible hinges to perform motion with nano resolution. However, although a conventional operating device can be easily implemented using a flexible hinge, there is a disadvantage that a numerical analysis method must be used since direct kinematics does not exist in the form of an explicit function. In addition, the conventional operating device has a disadvantage that the movement area is narrow because the boundary line of the movement area should be implemented in a concave shape.

Accordingly, the present invention has been made to solve the problems of the prior art, and performs a linear motion in two directions and a rotational motion in one direction, has direct kinematics in the form of an explicit function and has a wide range of motion. An apparatus for providing a three-axis parallel type microplanar motion control device which connects a microdrive manipulator and a predetermined number of the microdrive manipulators in parallel to a substrate to perform micromovement in a three-axis direction in a plane. have.

To this end, the micro-driving manipulator according to the present invention is connected to the parallel linear spring 10 for performing a linear movement P in the x-axis direction, and is connected to the parallel linear spring 10 at right angles to the x-axis direction. Direction, a double complex linear spring 20 performing a linear movement P in the y-axis direction, and a rotational motion R in a plane at a predetermined angle Θ connected to the double complex linear spring 20. It is achieved by carrying out including the flexible hinge 30.

In addition, the three-axis planar nano-resolution parallel motion manipulator includes three micro-driving manipulators for performing linear movements in two directions and a rotational movement in one direction, and spatially centering the three micro manipulators. Located in and characterized in that they comprise a substrate (B) connected to each other. Here, the three micro-driving manipulators are arranged at an angle of 120 ° about the substrate.

1 is a block diagram of a three-axis parallel micro-planar motion control device according to the present invention.

The three-axis parallel microplanar motion control device includes a first microdriven manipulator M1, a second microdriven manipulator M2, and a third microcomputer that perform linear motion in two directions and rotational motion in one direction in a plane. The driving manipulator M3 and the board | substrate B which are located in these centers spatially with respect to these 1st-3rd micro manipulators, and are connected to each other. That is, these first to third micro-driving manipulators are arranged at an angle of 120 ° with respect to the substrate (B). Here, since the structures of these first to third micro-driving manipulators are the same, the structure and operation of the first micro-driving manipulator will be described in detail with reference to the drawings.

FIG. 2 is a diagram illustrating the first micro-driving manipulator M1 of FIG. 1. a parallel linear spring 10 performing a linear movement P in the x-axis direction and a linear movement P in the y-axis direction, which is connected to the parallel linear spring 10 and is perpendicular to the x-axis direction. A double complex linear spring 20 to be performed and a flexible hinge 30 connected to the double complex linear spring 20 to rotate in a plane (R) at a predetermined angle (Θ). Each element of the first micro-driving manipulator M1 will be described in detail with reference to the drawings as follows.

3A is a configuration diagram illustrating a parallel linear spring 10 of the micro manipulator of FIG. 2. First and second leaf springs 11-1 and 11-2 fixed to the bottom plates 14-1 and 14-2 side by side at a predetermined distance, and the first and second leaf springs 11-. The first and second plate springs 11- 11 at positions symmetrical to protrude to the sides of the first connecting portion 12 and to face each other, and to the first connecting portion 12 connecting the ends of 1, 11-2 to each other. It consists of the 1st and 2nd reference plates 13-1 and 13-2 which have the shape bent within the length of 1, 11-2. At one end of the end of the first reference plate 13-1, the first fixing part 13-11 and the second fixing part 13-12 protrude upward and downward, and the end of the second reference plate 13-2. At the end of the Han foot, the third fixing portion 13-13 and the fourth fixing portion 13-14 protrude upward and downward.

Figure 3b is a block diagram showing a double complex linear spring 20 of the manipulator for the fine drive of FIG.

The double-composite linear spring 20 is fixed to the first fixing part 13-11 located at one end of the first reference plate 13-1 in FIG. 2, and the first reference plate 13-1. First bent plate spring 22-1 positioned in the space formed between the first connection portion 12 and the second fixing portion positioned on the other side of the end of the first reference plate 13-1 ( 13-2) and a second bent plate spring positioned between the end of the first plate spring 11-1 fixed to the first reference plate 13-1 and the bottom plate 14-1. 22-2) and the 3rd fixed part 13-13 located in the one end of the 2nd reference plate 13-2, and are fixed to the 1st reference plate 13-1 and the 1st connection part 12 ) Fixed to the third bent plate spring 22-3 positioned in the space formed between the second spring plate 22-3 and the fourth fixing portion 13-14 positioned on the other side of the end of the second reference plate 13-2. And a fourth bent plate spring 22-4 positioned between the end of the first plate spring 11-2 fixed to the second reference plate 13-2 and the bottom plate 14-2. do . In addition, the double-composite linear spring 20 has a second connecting portion 21 connecting the end of the first bent plate spring 22-1 and the end of the third bent plate spring 22-3, and the second Third connecting portion 26 connecting the end of the bent plate spring 22-2 and the end of the fourth bent plate spring 22-4, and the first and second reference plates of the parallel linear spring 10. A second connecting portion 21 and a third connecting portion 26 so as to move in a direction perpendicular to the movement direction (x-axis direction) of the (13-1, 13-2) direction (y-axis direction); 4 connection part 25 is included.

FIG. 3C is a block diagram showing the flux hinge 30 of the manipulator for fine driving of FIG. 2.

The flexible hinge 30 is positioned between the third connecting portion 26 and the substrate B of FIG. 3B, and the substrate B is positioned at a predetermined angle Θ in the xy plane with respect to the third connecting portion 26. It is formed to allow the rotational movement (R). Here, the flexible hinge 30 has an elastic force by being circularly formed on both sides with respect to the vertical direction (Z axis; not shown) of the x-y plane about the center point O.

The parallel linear spring 10, the double complex linear spring 20, and the flexible hinge 30 constituting the first micro-driving manipulator M1 are the second and third planar parallel motion micro-driving manipulators M2, Since M3) is formed as the same structure, its detailed description is omitted.

Now, as described above, the operation of the parallel linear spring 10, the double-composite linear spring 20 and the flexible hinge 30 constituting the first micro-drive manipulator M1 will be described in detail with reference to the drawings. .

4A is a configuration diagram for describing the operation of the parallel linear spring 10 of FIG. 3A.

When a predetermined external force is applied to the parallel linear spring 10, the first and second plate springs 11-1 and 11-2 of the parallel linear spring 10 are deformed in the x-axis direction, and accordingly The first connection portion 12 performs parallel movement in the x-axis direction with respect to the bottom plates 14-1 and 14-2. Therefore, the position of the parallel linear spring 10 in equilibrium is changed to the position of the parallel linear spring 10 'in the state moved in the x-axis direction.

FIG. 4B is a configuration diagram for explaining the operation 20 of the double-composite linear spring of FIG. 3B.

When a predetermined external force is applied to the double-composite linear spring 20, the first, second, third and fourth bent springs 22-1, 22-2, 22-3, 22-4 are y-. Deformation occurs in the axial direction, whereby the second, third, and fourth connection portions 21, 26, 25 are provided with the first, second, third, and fourth fixing portions 13-11, 13-12, 13- 13, 13-14) to perform parallel motion in the y-axis direction. Therefore, the position of the double complex linear spring 20 in equilibrium is changed to the position of the double complex linear spring 20 'in the state moved in the y-axis direction.

4C is a configuration diagram illustrating the operation of the flexible hinge 30 of FIG. 3C.

As shown in FIGS. 4A and 4B, the parallel hinge spring 10 moves in the x-axis direction, and the double-composite linear spring 20 moves in the y-axis direction, such that the flexible hinge 30 moves relative to the substrate B. FIG. Rotate Therefore, the position of the substrate B in the equilibrium state is changed to the position of the substrate B 'in the rotational movement state.

Here, since the substrate B is connected with the flexible hinges of the second and third micro-driving manipulators M2 and M3, the movement becomes dependent on these flexible hinges.

Although the structure and operation of the parallel linear spring 10, the double-composite linear spring 20, and the flexible hinge 30 included in the first micro-driving manipulator M1 have been described so far, the second and third fine Parallel linear springs included in the driving manipulators M2 and M3, double complex linear springs and flexible hinges Parallel linear springs included in the first micro-driving manipulator M1 10 and double complex linear springs 20 And the flexible hinge 30, the description thereof will be omitted.

Therefore, as shown in Figs. 4A to 4C, a predetermined external force is applied to the first micro-driving manipulator M1, for example, so that the corresponding parallel linear spring 10 and the double complex linear spring 20 are provided. Each performs linear motion and accordingly the flexible hinge 30 performs a rotational motion R relative to the substrate B. FIG. In a manner in which the first micro-driving manipulator M1 moves, the second and third micro-driving manipulators M2 and M3 also perform a movement. That is, in accordance with the motion of the first to third micro-driving manipulators M1, M2, and M3, the substrate B performs translational and rotational motions in a plane, and this motion will be described in detail with reference to the following drawings. same.

Figure 5 is a block diagram for explaining the translational motion of the three-axis parallel micro-planar motion control device according to the present invention.

In order for the three-axis parallel microplanar motion control device to perform the translational motion, for example, the parallel linear spring and the double-composite linear spring of the first and third microdrive manipulators M1 and M3 are represented by arrows. , The y-axis direction set in itself, as indicated by the arrow, in which the double-composite linear spring of the second micro-driving manipulator M2 moves in the x-axis and y-axis in the respective xy coordinate system Moving to, the substrate B in equilibrium performs parallel motion. That is, as shown in the figure, the center point O of the substrate B in equilibrium is changed to the position O 'of the substrate B' after performing parallel motion.

Figure 6 is a block diagram for explaining the rotational motion of the three-axis parallel micro-planar motion control device according to the present invention.

In order for the three-axis parallel microplanar motion control device to perform a rotational motion, for example, the parallel linear springs and the double-composite linear springs of the first to third microdriven manipulators M1, M2, and M3 are indicated by arrows. As described above, when the x-axis and the y-axis are moved in the xy coordinate system set therein, the equilibrium substrate B is rotated with respect to the center point O. Therefore, as shown in the drawing, the center point O of the equilibrium state B and the center point O 'of the substrate B' are the same after performing the rotational movement, but the points at the radial positions are counterclockwise. Is moved in the direction.

Therefore, the three-axis parallel micro-planar motion control apparatus according to the present invention, by performing the translational and rotational motion in the same manner as in Figs. 5 and 6, although not shown through the drawings, the specimen placed on the substrate of the substrate It can be moved to any position desired by the user in the plane direction. Here, the substrate is also moved to nano resolution because each micro-driving manipulator performs linear motion with nano resolution.

In the embodiment of the present invention, the source of the external force applied to the first to third micro-driving manipulators may be a piezoelectric element, an electric force, or the like.

In the embodiment of the present invention, three manipulators for micro-drive are used, but the number of embodiments can be further increased.

Therefore, the three-axis parallel type micro-planar motion control device according to the present invention is composed of three micro-driven manipulators and substrates connected to each other to perform linear motion in two directions and rotational motion in one direction, and three micro-driven devices. Because the manipulator performs motion at nanoresolution, the substrate can be moved in plane at nanoresolution. In addition, since the manipulation device has a static kinematic structure in the form of an explicit function, its operating area is relatively large.

Claims (6)

delete delete Three micro-driving manipulators that perform two linear motions and one rotational motion in the plane, The three micro-driving manipulator includes a substrate (B) which are spatially located at their centers and connected to each other, Wherein the three micro-driving manipulators are arranged at an angle of 120 ° about the substrate; The micro drive manipulator a parallel linear spring 10 which performs a linear linear motion P in the x-axis direction, A double complex linear spring 20 connected to the parallel linear spring 10 and performing a linear linear motion P in the y-axis direction, which is perpendicular to the x-axis direction; And a flexible hinge (30) connected to the double complex linear spring (20) to rotate in a plane (R) at a predetermined angle (Θ). The method of claim 3, wherein the parallel linear spring 10 First and second springs 11-1 and 11-2 fixed to the bottom plates 14-1 and 14-2 side by side at a predetermined distance, A first connection part 12 connecting one end of the first and second plate springs 11-1 and 11-2 to each other; First and second parts having a shape bent within the lengths of the first and second plate springs 11-1 and 11-2 at positions symmetrical to protrude to the sides of the first connection part 12 to face each other. Three-axis parallel micro-planar motion control device comprising a reference plate (13-1, 13-2). The method of claim 3, wherein the double complex linear spring 20, The first reference plate 13-is fixed to the first fixing part 13-11 positioned at one end of the balanced linear spring 10 and the first reference plate 13-1 performing linear linear motion. A first bent plate spring 22-1 positioned in a space formed between 1) and the first connecting portion 12, It is fixed to the second fixing part 13-12 located on the other side of the end of the first reference plate 13-1, and to the first reference plate 13-1 and the bottom plate 14-1. A second bend plate spring 22-2 positioned between the ends of the first plate spring 11-1 to be fixed; It is fixed to the third fixing part (13-13) located at one end of the second reference plate 13-1, and is formed between the second reference plate 13-2 and the first connection portion 12 A third bend plate spring 22-3 positioned in the space, It is fixed to the fourth fixing part 13-14 positioned on the other side of the end of the second reference plate 13-2, and fixed to the second reference plate 13-2 and the bottom plate 14-2. A fourth bent plate spring 22-4 positioned between the ends of the first plate spring 11-2 to be used, A second connecting portion 21 connecting the end of the first bent plate spring 22-1 and the end of the third bent plate spring 22-3; A third connection part 26 connecting the end of the second bent plate spring 22-2 and the end of the fourth bent plate spring 22-4; The second so as to be movable in a direction perpendicular to the movement direction (y-axis direction) of the first and second reference plates 13-1 and 13-2 of the parallel linear spring 10. Three-axis parallel type micro-planar motion control device comprising a connecting portion 21 and the fourth connecting portion 25 for connecting the third connecting portion (26). The method of claim 5, wherein the flexible hinge 30, Located between the third connecting portion 26 and the substrate B, the substrate B can be rotated (R) at a predetermined angle (Θ) in the xy plane with respect to the third connecting portion 26. Three-axis parallel type micro-plane motion control device characterized in that formed so as to.

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