KR100717870B1 - Logic circuit using mechanical switch - Google Patents

Abstract

A mechanical switch of an electrostatic drive type and a logic circuit using the same are provided. Mechanical switch according to an embodiment of the present invention is the first electrode, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion and the attachment portion formed spaced apart from the second electrode on the insulating layer And a moving electrode formed to extend from the insulating layer and formed of a moving part spaced apart from the second electrode. The logic circuit using the mechanical switch according to the preferred embodiments of the present invention is formed spaced apart from the second electrode on the first electrode, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the insulating layer. It is configured by variously wiring mechanical switches including an attachment portion and a movable electrode extending from the attachment portion, the movable electrode including an insulating layer and a moving portion spaced apart from the second electrode.

Mechanical switch, logic circuit, electrostatic drive

Description

Logic circuit using mechanical switch {LOGIC CIRCUIT USING MECHANICAL SWITCH}

1A and 1B are cross-sectional views of a mechanical switch in accordance with one embodiment of the present invention.

2A is a circuit diagram of a logic circuit using a mechanical switch according to the first embodiment of the present invention.

FIG. 2B is a truth table of the logic circuit of FIG. 2A.

3A is a circuit diagram of a logic circuit using a mechanical switch according to a second embodiment of the present invention.

FIG. 3B is a truth table of the logic circuit of FIG. 3A.

4A is a circuit diagram of a logic circuit using a mechanical switch according to a third embodiment of the present invention.

4B is a truth table of the logic circuit of FIG. 4A.

5A is a circuit diagram of a logic circuit using a mechanical switch according to a fourth embodiment of the present invention.

FIG. 5B is a truth table of the logic circuit of FIG. 5A.

Explanation of symbols on the main parts of the drawings

10: substrate 20: insulating layer

30: first electrode 40: second electrode

50: moving electrode

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanical switch of an electrostatic actuation method and a logic circuit using the same. More particularly, by forming an insulating layer between the first electrode and the second electrode, it is possible to effectively prevent malfunction from occurring. It relates to a mechanical switch that can be and a logic circuit using the same.

Until now, metal integrated circuits (ICs) have contributed a lot to metal oxide semiconductor field effect transistors (MOS FETs) using small size, easy process, and low power consumption. The basic group constituting the digital integrated technology and logic circuit is largely a method using a complementary MOS (CMOS) device, a method using a bipolar junction transistor (BJT) device, a method using a Bipolar CMOS (BiCMOS) device, a method using a GaAs device. It is divided into four, among which the method using the CMOS device is most widely used. CMOS devices are a combination of NMOS transistors and PMOS transistors, and the circuits are complicated and occupy a large area of silicon substrates, but much smaller power consumption opened the era of very large scale ingtegrated circuits (VLSI) in the 1970s. It replaced NMOS transistor. In the early days, it was limited to portable electronic products such as digital wristwatches and calculators, but nowadays, almost all circuits including microprocessors are implemented as CMOS devices.

These CMOS device logic circuits consume less power, are smaller in size due to advances in technology, and are becoming more integrated.However, the leakage current of the MOS transistors themselves causes unnecessary power consumption and harmful environments such as radiation after a long time. It is sensitive to the hazard environment and degrades electrical reliability.

In order to solve such a problem of the MOS transistor, a method of applying a mechanical switch using a micro electromechanical system (MEMS) technology to a digital logic circuit has recently been researched and developed. Looking at a patent on a logic circuit using a conventional mechanical switch (International Patent Publication W99 / 63559) AND logic circuit by adjusting the size of both electrode area under the beam with a central support An OR logic circuit and an inverter logic circuit are implemented. Since this structure is mechanically driven, there is no loss of an electrical signal and it is insensitive to radiation. However, there is a difficulty in finely adjusting the size of both electrodes pulling the beam.

Patents related to logic circuits using mechanical switches (US Pat. No. 6,534839, US Pat. No. 6,548,841) include a first electrode and a second electrode formed on a substrate, and a third electrode having a cantilever shape. It is a nano size mechanical switch that performs electrostatic driving of the first electrode and the third electrode. Such a mechanical switch was used to implement a transmission gate, an AND logic circuit, an OR logic circuit, an inverter logic circuit, and the like. The mechanical switch lowers operating voltage to reduce power consumption and provides fast switching speeds. Existing MOS transistors are scaled down, but as they go down to 70 nm, the size of MOS transistors such as hot electron injection, gate oxide tunneling, and short channel effects is increasing. There are limitations that make it too small to function properly. The mechanical switch is not only limited in the MOS transistor, but also can be advantageous in size reduction because it can exceed the current limit of the MOS transistor, and is advantageous in that it is not affected by radiation or electromagnetic fields.

However, the mechanical switch is so close that the distance between the first electrode and the second electrode is so close that when the third electrode and the first electrode is pulled by the electrostatic force between the first electrode and the third electrode (short) the risk of causing malfunction There is this. Thus, when looking at the inverter logic circuit configured using the mechanical switch, when the output voltage is 0V, 0V is applied to the other side to prevent the problem of outputting unwanted voltage by pulling the cantilever to which 1V is applied. One more electrode was formed. Likewise, when the output voltage is 1V, the cantilever to which 0V is applied is pulled to form an electrode having 1V applied to the other side to prevent the problem of outputting an unwanted voltage. A further fatal drawback is that different logic circuits are constructed and constructed. In other words, logic circuits such as inverter logic circuits and logical product logic circuits are not constituted by one consistent law, but each structure has a different shape, and thus, there is a problem of inconsistency and inconsistency in configuring various logic circuits.

Therefore, the technical problem to be achieved by the present invention is to provide a mechanical switch that can effectively prevent the malfunction caused by forming an insulating layer between the first electrode and the second electrode.

Another technical problem to be solved by the present invention is to provide a logic circuit using a mechanical switch that can form a logic circuit uniformly and consistently using the above-described mechanical switch.

Technical problems to be achieved by the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned above will be clearly understood by those skilled in the art from the following description. Could be.

Mechanical switch according to an embodiment of the present invention for achieving the above technical problem is a first electrode formed on a substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer and the insulation And a moving electrode formed on the layer and spaced apart from the second electrode and extending from the attachment part, the moving electrode including the insulating layer and the moving part spaced apart from the second electrode.

According to another aspect of the present invention, there is provided a logic circuit using a mechanical switch according to a first embodiment of the present invention, a first electrode formed on a first substrate, an insulating layer formed on the first electrode, and a top of the insulating layer. And a moving electrode formed on the second electrode formed on the insulating layer, the attachment part formed to be spaced apart from the second electrode, and a moving part extending from the attachment part and spaced apart from the insulating layer and the second electrode. A first electrode formed on the first mechanical switch and the second substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment formed spaced apart from the second electrode on the insulating layer A second mechanical switch extending from the attachment portion and the attachment portion and including a moving electrode formed of the moving portion formed to be spaced apart from the insulating layer and the second electrode; And a first electrode of the first mechanical switch is connected to a first electrode of the second mechanical switch, and a second electrode of the first mechanical switch is connected to a second electrode of the second mechanical switch. Connected.

A logic circuit using a mechanical switch according to a second embodiment of the present invention for achieving the another technical problem is a first electrode formed on a first substrate, an insulating layer formed on the first electrode, on the insulating layer A second electrode formed on the insulating layer and the insulating layer formed on the insulating layer and a moving electrode extending from the attachment portion and formed from the insulating layer and the second electrode spaced apart from the second electrode. A mechanical switch, a first electrode formed on a second substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment part spaced apart from the second electrode on the insulating layer And a moving electrode extending from the attachment part and comprising a moving part formed to be spaced apart from the insulating layer and the second electrode. A first electrode formed on the substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment part spaced apart from the second electrode on the insulating layer and extending from the attachment part And a first mechanical switch formed on a fourth substrate and a third mechanical switch including a moving electrode formed of a moving part formed to be spaced apart from the insulating layer and the second electrode, an insulating layer formed on the first electrode, and A moving electrode comprising a second electrode formed on the insulating layer and an attachment portion formed to be spaced apart from the second electrode on the insulating layer, and a moving portion extending from the attachment portion and spaced apart from the insulating layer and the second electrode. And a fourth mechanical switch comprising a second electrode of the first mechanical switch, the second electrode of the first mechanical switch being connected to the moving electrode of the second mechanical switch, and The second electrode of the mechanical switch is connected to the second electrode of the third mechanical switch and the second electrode of the fourth mechanical switch, and the first electrode of the first mechanical switch is the third mechanical switch. And a first electrode of the second mechanical switch is connected to a first electrode of the fourth mechanical switch.

In another aspect of the present invention, a logic circuit using a mechanical switch according to a third embodiment of the present invention includes a first electrode formed on a first substrate, an insulating layer formed on the first electrode, and an insulating layer formed on the first electrode. And a moving electrode formed on the second electrode formed on the insulating layer, the attachment part formed to be spaced apart from the second electrode, and a moving part extending from the attachment part and spaced apart from the insulating layer and the second electrode. A first mechanical switch, a first electrode formed on the second substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment formed spaced apart from the second electrode on the insulating layer A second mechanical switch extending from the attachment portion and the attachment portion, the second mechanical switch including a moving electrode formed of the insulating layer and the moving part spaced apart from the second electrode; A first electrode formed on the substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment part spaced apart from the second electrode on the insulating layer and extending from the attachment part And a first mechanical switch formed on a fourth substrate and a third mechanical switch including a moving electrode formed of a moving part formed to be spaced apart from the insulating layer and the second electrode, an insulating layer formed on the first electrode, and A moving electrode comprising a second electrode formed on the insulating layer and an attachment portion formed to be spaced apart from the second electrode on the insulating layer, and a moving portion extending from the attachment portion and spaced apart from the insulating layer and the second electrode. And a fourth mechanical switch comprising a second electrode of the first mechanical switch and a second electrode of the second mechanical switch and the third mechanical switch. Connected to a second electrode of the switch, the movable electrode of the third mechanical switch is connected to a second electrode of the fourth mechanical switch, and the first electrode of the first mechanical switch is the third mechanical switch And a first electrode of the second mechanical switch is connected to a first electrode of the fourth mechanical switch.

In another aspect of the present invention, a logic circuit using a mechanical switch according to a fourth embodiment of the present invention includes a first electrode formed on a first substrate, an insulating layer formed on the first electrode, and an insulating layer formed on the first electrode. And a moving electrode formed on the second electrode formed on the insulating layer, the attachment part formed to be spaced apart from the second electrode, and a moving part extending from the attachment part and spaced apart from the insulating layer and the second electrode. A first mechanical switch, a first electrode formed on the second substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment formed spaced apart from the second electrode on the insulating layer A second mechanical switch extending from the attachment portion and the attachment portion, the second mechanical switch including a moving electrode formed of the insulating layer and the moving part spaced apart from the second electrode; A first electrode formed on the substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment part spaced apart from the second electrode on the insulating layer and extending from the attachment part A third mechanical switch including a moving electrode formed of a moving part formed to be spaced apart from the insulating layer and the second electrode, a first electrode formed on a fourth substrate, an insulating layer formed on the first electrode, and A moving electrode comprising a second electrode formed on the insulating layer and an attachment portion formed to be spaced apart from the second electrode on the insulating layer, and a moving portion extending from the attachment portion and spaced apart from the insulating layer and the second electrode. A fourth mechanical switch comprising: a first electrode formed on a fifth substrate; an insulating layer formed on the first electrode; a second electrode formed on the insulating layer; and the section A fifth mechanical switch including a moving part formed on the layer and spaced apart from the second electrode and extending from the attachment part, and a moving electrode formed of the insulating layer and the moving part spaced apart from the second electrode; A first electrode formed on the substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment portion formed to be spaced apart from the second electrode on the insulating layer and extending from the attachment portion And a sixth mechanical switch including a moving electrode including a moving part formed to be spaced apart from the insulating layer and the second electrode, a first electrode formed on a seventh substrate, an insulating layer formed on the first electrode, and the insulation A second electrode formed on the layer and an attachment portion formed to be spaced apart from the second electrode on the insulating layer and extending from the attachment portion, the insulating layer and the first A seventh mechanical switch including a moving electrode including a moving part formed to be spaced apart from two electrodes, a first electrode formed on an eighth substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and An eighth mechanical switch including an attachment portion formed to be spaced apart from the second electrode on the insulating layer and a movable electrode formed to extend from the attachment portion, the movable electrode being configured to be spaced apart from the insulation layer and the second electrode; And a second electrode of the first mechanical switch is connected to a moving electrode of the third mechanical switch, and a second electrode of the second mechanical switch is connected to a moving electrode of the fourth mechanical switch. And the second electrode of the third mechanical switch is a second electrode of the fourth mechanical switch, a second electrode of the fifth mechanical switch and the sixth mechanical A moving electrode of the fifth mechanical switch is connected to a second electrode of the seventh mechanical switch, and a moving electrode of the sixth mechanical switch is connected to the second electrode of the eighth mechanical switch. A first electrode of the first mechanical switch is connected to a first electrode of the fifth mechanical switch, and a first electrode of the second mechanical switch is connected to the sixth mechanical switch; A first electrode of the third mechanical switch is connected to a first electrode of the eighth mechanical switch, and a first electrode of the fourth mechanical switch is connected to the first electrode of the seventh mechanical switch Is connected to the first electrode.

Specific details of other embodiments are included in the detailed description and the drawings. Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. Like reference numerals refer to like elements throughout.

Hereinafter, a mechanical switch and a logic circuit using the same according to a preferred embodiment of the present invention with reference to the accompanying drawings will be described in detail.

1A and 1B are cross-sectional views of a mechanical switch in accordance with one embodiment of the present invention. As shown in FIGS. 1A and 1B, a mechanical switch according to an embodiment of the present invention includes a first electrode 30, an insulating layer 20, a second electrode 40, and a moving electrode 50. .

The first electrode 30 is formed of a conductive material such as copper, carbon nanotube, polysilicon, etc. on the silicon substrate 10, and the insulating layer 20 is formed of silicon oxide (SiO) on the first electrode 30. ₂ ) or silicon nitride material (SiN _x ). The second electrode 40 is formed of a conductive material such as copper, carbon nanotubes, or polysilicon on the insulating layer 20. The moving electrode 50 is an attaching part 51 formed on the insulating layer 20 and separated from the second electrode 40 by a conductive material such as copper, carbon nanotube, polysilicon, and the like. It extends from 51, and consists of the moving part 52 formed spaced apart from the insulating layer 20 and the 2nd electrode 40. As shown in FIG. The moving part 52 of the moving electrode 50 is formed by the difference between the voltage applied to the first electrode 30 and the voltage applied to the attachment part 51 of the moving electrode 50, and thus the second electrode ( 40 may be formed in a cantilever structure in which the voltage applied to the attachment portion 51 of the moving electrode 50 is transferred to the second electrode 40 and restored to its original position by the elastic force. .

Mechanical switch according to an embodiment of the present invention by forming an insulating layer 20 between the first electrode 30, the moving electrode 50 and the second electrode 40, the moving electrode 50 is electrostatic force In the case where the second electrode 40 is brought into contact with the second electrode 40 by electrostatic driving, short-circuit with the first electrode 30 can be prevented, so that malfunction can be effectively suppressed.

The moving part 52 of the moving electrode 50 has a difference between the voltage applied to the first electrode 30 and the voltage applied to the attachment part 51 of the moving electrode 50 is less than the pull-in voltage V _PI . As shown in FIG. 1A, since the second electrode 40 is not in contact with the second electrode 40, the voltage applied to the attachment portion 51 of the moving electrode 50 is not transmitted to the second electrode 40. Here, the pull-in voltage V _PI is such that the electrostatic force between the first electrode 30 and the moving electrode 50 is greater than the elastic force so that the moving part 52 of the moving electrode 50 contacts the second electrode 40. It may be defined as the difference between the voltage applied to the first electrode 30 and the voltage applied to the moving electrode 50.

The moving part 52 of the moving electrode 50 has a difference between the voltage applied to the first electrode 30 and the voltage applied to the attachment part 51 of the moving electrode 50 is greater than or equal to the pull-in voltage V _PI . 1B, the second electrode 40 is brought into contact with the electrostatic driving by the electrostatic force. Therefore, the voltage applied to the attachment portion 51 of the moving electrode 50 is transferred to the second electrode 40.

That is, when a voltage of Vo is applied to the attachment portion 51 of the moving electrode 50 and a voltage of Vo-V _PI to Vo + V _PI is applied to the first electrode 30, the moving electrode 50 and the first electrode are applied. Since the voltage difference of the electrode 30 is smaller than the pull-in voltage V _PI , the moving part 52 of the moving electrode 50 does not contact the second electrode 40.

On the other hand, it is applied to the voltage Vo to the attaching portion 51 of the moving electrode 50, a voltage more than Vo + V _PI to the first electrode 30 is applied or when a voltage of less than Vo-V _PI applied to the mobile electrode Since the voltage difference between the 50 and the first electrode 30 is greater than the pull-in voltage V _PI , the moving part 52 of the moving electrode 50 is in contact with the second electrode 40.

When a voltage signal is transmitted using a mechanical switch according to an embodiment of the present invention, unlike a conventional transmission gate including an NMOS transistor and a PMOS transistor, only one mechanical switch may transmit the voltage signal. have.

It is preferable that the width W1 of the first electrode 30 is larger than the width W2 of the second electrode 40. As a result, it is possible to effectively suppress the contact of the movable electrode 50 from the second electrode 40 by the voltage applied to the second electrode 40.

2A and 2B, a logic circuit using a mechanical switch according to a first embodiment of the present invention will be described. 2A is a circuit diagram of a logic circuit using a mechanical switch according to the first embodiment of the present invention. FIG. 2B is a truth table of the logic circuit of FIG. 2A.

The logic circuit using the mechanical switch according to the first embodiment of the present invention includes a first mechanical switch 1100 and a second mechanical switch 1200.

The first mechanical switch 1100 may include a first electrode formed on the first substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment portion spaced apart from the second electrode on the insulating layer. And a moving electrode extending from the attachment portion, the moving electrode including an insulating layer and a moving portion spaced apart from the second electrode. That is, it is the same structure as the mechanical switch shown in FIG. 1A.

The second mechanical switch 1200 may include a first electrode formed on the second substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment portion spaced apart from the second electrode on the insulating layer. And a moving electrode extending from the attachment portion, the moving electrode including an insulating layer and a moving portion spaced apart from the second electrode. That is, it is the same structure as the mechanical switch shown in FIG. 1A. However, the first substrate on which the first mechanical switch 1100 is formed and the second substrate on which the second mechanical switch 1200 is formed may be the same substrate or may be separate substrates.

For convenience of description, in FIG. 2A, the first mechanical switch 1100 and the second mechanical switch 1200 omit respective insulating layers and substrates and are briefly shown.

As shown in FIG. 2A, the first electrode 1110 of the first mechanical switch 1100 is connected to the first electrode 1210 of the second mechanical switch 1200, and the first mechanical switch 1100. The second electrode 1120 of) is connected to the second electrode 1220 of the second mechanical switch 1200. Thus, the inverter logic circuit can be configured.

The first power supply voltage VDD is popular with the moving electrode 1130 of the first mechanical switch 1100 to transfer the first power supply voltage VDD to the second electrode of the first mechanical switch 1100. The second power supply voltage GND lower than the first power supply voltage VDD is applied to the moving electrode 1230 of the second mechanical switch 1200 to the second electrode 1220 of the second mechanical switch 1200. The second power supply voltage GND is transferred. Here, the difference between the first power supply voltage VDD and the second power supply voltage GND is equal to or greater than the pull-in voltage V _PI described above.

The first electrode 1110 of the first mechanical switch 1100 and the first electrode 1210 of the second mechanical switch 1200 are connected to input an input signal A, and the first mechanical switch 1100. The second electrode 1120 of) and the second electrode 1220 of the second mechanical switch 1200 are connected to output an output signal B. Here, the first power supply voltage VDD may be used as the high signal 1, and the second power supply voltage GND may be used as the low signal 0.

Specifically, referring to the truth table illustrated in FIG. 2B, when the low signal 0 is input as the input signal A, the moving electrode 1130 of the first mechanical switch 1100 is driven by electrostatic driving by electrostatic force. Since the first mechanical switch 1100 is in contact with the second electrode 1120 to transmit the first power supply voltage VDD, the high signal 1 is output as the output signal B.

On the other hand, when the high signal 1 is input as the input signal A, the moving electrode 1230 of the second mechanical switch 1200 is the second of the second mechanical switch 1200 by electrostatic driving by electrostatic force. Since the second power supply voltage GND is transmitted to the electrode 1220, the low signal 0 is output as the output signal B.

3A and 3B, a logic circuit using a mechanical switch according to a second embodiment of the present invention will be described. 3A is a circuit diagram of a logic circuit using a mechanical switch according to a second embodiment of the present invention. FIG. 3B is a truth table of the logic circuit of FIG. 3A.

The logic circuit using the mechanical switch according to the second embodiment of the present invention includes a first mechanical switch 2100, a second mechanical switch 2200, a third mechanical switch 2300, and a fourth mechanical switch ( 2400).

The first mechanical switch 2100 includes a first electrode, an insulating layer, a second electrode and a moving electrode on the first substrate, and the second mechanical switch 2200 is insulated from the first electrode, on the second substrate. A third mechanical switch 2300 comprising a layer, a second electrode and a moving electrode, wherein the third mechanical switch 2300 comprises a first electrode, an insulating layer, a second electrode and a moving electrode on a third substrate, and a fourth mechanical switch 2400. ) Includes a first electrode, an insulating layer, a second electrode and a moving electrode on the fourth substrate. The first to fourth mechanical switches 2400 have the same structure as the mechanical switch shown in FIG. 1A, except that the first substrate, the second substrate, the third substrate, and the fourth substrate may be the same substrate, or may be separate. It may be a substrate.

For convenience of description, in FIG. 3A, the first to fourth mechanical switches 2100 to 2400 are not shown, and the respective insulating layers and the substrate are omitted.

As shown in FIG. 3A, the second electrode 2120 of the first mechanical switch 2100 is connected to the moving electrode 2230 of the second mechanical switch 2200, and the second mechanical switch 2200 of the second mechanical switch 2200. The second electrode 2220 is connected to the second electrode 2320 of the third mechanical switch 2300 and the second electrode 2420 of the fourth mechanical switch 2400, and the first mechanical switch 2100. The first electrode 2110 is connected to the first electrode 2310 of the third mechanical switch 2300, the first electrode 2210 of the second mechanical switch 2200 is the fourth mechanical switch 2400 Is connected to the first electrode 2410. Thus, the NOR logic circuit can be configured.

The moving electrode 2130 of the first mechanical switch 2100 transfers the first power supply voltage VDD to the moving electrode 2230 of the second mechanical switch 2200 and of the second mechanical switch 2200. The moving electrode 2230 transfers the first power supply voltage VDD transmitted from the moving electrode 2130 of the first mechanical switch 2100 to the second electrode 2220 of the second mechanical switch 2200. The moving electrode 2330 of the third mechanical switch 2300 transfers the second power voltage GND lower than the first power voltage VDD to the second electrode 2320 of the third mechanical switch 2300. Alternatively, the moving electrode 2430 of the fourth mechanical switch 2400 transfers the second power supply voltage GND to the second electrode 2420 of the fourth mechanical switch 2400. Here, the difference between the first power supply voltage VDD and the second power supply voltage GND is equal to or greater than the pull-in voltage V _PI described above.

The first electrode 2110 of the first mechanical switch 2100 and the first electrode 2310 of the third mechanical switch 2300 are connected to input a first input signal A, and the second mechanical switch. The first electrode 2210 of the 2200 and the first electrode 2410 of the fourth mechanical switch 2400 are connected to receive the second input signal B, and the first of the second mechanical switch 2200 of the second electrode 2210 of the second mechanical switch 2200. The second electrode 2220, the second electrode 2320 of the third mechanical switch 2300, and the second electrode 2420 of the fourth mechanical switch 2400 are connected to output an output signal Y. Here, the first power supply voltage VDD may be used as the high signal 1, and the second power supply voltage GND may be used as the low signal 0.

Specifically, referring to the truth table shown in FIG. 3B, when the low signal 0 is input as the first input signal A and the low signal 0 is input as the second input signal B, the first mechanical The moving electrode 2130 of the switch 2100 is brought into contact with the second electrode 2120 of the first mechanical switch 2100 by electrostatic driving by electrostatic force to convert the first power voltage VDD into the second mechanical switch 2200. And the moving electrode 2230 of the second mechanical switch 2200 are also in contact with the second electrode 2220 of the second mechanical switch 2200 by electrostatic driving by electrostatic force. Since the first power supply voltage VDD is transmitted to the second electrode 2220 of the second mechanical switch 2200, the high signal 1 is output as the output signal Y.

On the other hand, other than that, the moving electrode 2330 of the third mechanical switch 2300 transfers the second power supply voltage GND to the second electrode 2320 of the third mechanical switch 2300 by electrostatic driving by electrostatic force. Alternatively, since the moving electrode 2430 of the fourth mechanical switch 2400 transmits the second power supply voltage GND to the second electrode 2420 of the fourth mechanical switch 2400 by electrostatic driving by electrostatic force, The low signal (0) is output as the output signal (Y).

4A and 4B, a logic circuit using a mechanical switch according to a third embodiment of the present invention will be described. 4A is a circuit diagram of a logic circuit using a mechanical switch according to a third embodiment of the present invention. 4B is a truth table of the logic circuit of FIG. 4A.

The logic circuit using the mechanical switch according to the third embodiment of the present invention includes a first mechanical switch 4100, a second mechanical switch 4200, a third mechanical switch 4300, and a fourth mechanical switch ( 4400).

The first mechanical switch 4100 includes a first electrode, an insulating layer, a second electrode and a moving electrode on the first substrate, and the second mechanical switch 4200 is insulated from the first electrode, on the second substrate. A third mechanical switch 4300 comprising a layer, a second electrode and a moving electrode, wherein the third mechanical switch 4300 comprises a first electrode, an insulating layer, a second electrode and a moving electrode on a third substrate, and a fourth mechanical switch 4400. ) Includes a first electrode, an insulating layer, a second electrode and a moving electrode on the fourth substrate. The first to fourth mechanical switches 4400 have the same structure as the mechanical switch shown in FIG. 1A, except that the first substrate, the second substrate, the third substrate, and the fourth substrate may be the same substrate, or may be separate. It may be a substrate.

For convenience of description, in FIG. 4A, the first to fourth mechanical switches 4100 to 4400 are briefly shown with their respective insulating layers and substrates omitted.

As shown in FIG. 4A, the second electrode 4120 of the first mechanical switch 4100 is the second electrode 4220 of the second mechanical switch 4200 and the second of the third mechanical switch 4300. Connected to an electrode 4320, a moving electrode 4330 of the third mechanical switch 4300 is connected to a second electrode 4420 of the fourth mechanical switch 4400, and a first mechanical switch 4100. The first electrode 4110 is connected to the first electrode 4310 of the third mechanical switch 4300, and the first electrode 4210 of the second mechanical switch 4200 is the fourth mechanical switch 4400. ) Is connected to the first electrode 4410. Thus, a NAND logic circuit can be configured.

The moving electrode 4130 of the first mechanical switch 4100 transfers the first power supply voltage VDD to the second electrode 4120 of the first mechanical switch 4100, or the second mechanical switch 4200. The moving electrode 4230 transmits the first power supply voltage VDD to the second electrode 4220 of the second mechanical switch 4200, and the moving electrode 4430 of the fourth mechanical switch 4400 The third mechanical switch 4300 transfers the second power supply voltage GND lower than the first power supply voltage VDD to the moving electrode 4330, and the moving electrode 4330 of the third mechanical switch 4300 is made of a third electrode. The second power supply voltage GND transmitted from the moving electrode 4430 of the four mechanical switch 4400 is transferred to the second electrode 4320 of the third mechanical switch 4300. Here, the difference between the first power supply voltage VDD and the second power supply voltage GND is equal to or greater than the pull-in voltage V _PI described above.

The first electrode 4110 of the first mechanical switch 4100 and the first electrode 4410 of the fourth mechanical switch 4400 are connected to input a first input signal A, and the second mechanical switch. The first electrode 4210 of the 4200 and the first electrode 4310 of the third mechanical switch 4300 are connected so that the second input signal B is input, and the first mechanical switch 4100 of the first electrode 4210 is connected. The second electrode 4120, the second electrode 4220 of the second mechanical switch 4200, and the second electrode 4320 of the third mechanical switch 4300 are connected to output an output signal Y. Here, the first power supply voltage VDD may be used as the high signal 1, and the second power supply voltage GND may be used as the low signal 0.

Specifically, referring to the truth table shown in FIG. 4B, when the high signal 1 is input as the first input signal A and the high signal 1 is input as the second input signal B, the fourth mechanical The moving electrode 4430 of the switch 4400 is in contact with the second electrode 4420 of the fourth mechanical switch 4400 by the electrostatic driving by the electrostatic force, thereby switching the second power voltage GND to the third mechanical switch 4300. The transfer electrode 4330 of the third mechanical switch 4300 is also brought into contact with the second electrode 4320 of the third mechanical switch 4300 by electrostatic driving by electrostatic force. Since the second power supply voltage GND is transmitted to the second electrode 4320 of the third mechanical switch 4300, the low signal 0 is output as the output signal Y.

On the other hand, other than that, the moving electrode 4130 of the first mechanical switch 4100 transfers the first power supply voltage VDD to the second electrode 4120 of the first mechanical switch 4100 by electrostatic driving by electrostatic force. Alternatively, since the movable electrode 4230 of the second mechanical switch 4200 transfers the first power supply voltage VDD to the second electrode 4220 of the second mechanical switch 4200 by electrostatic driving by electrostatic force, The high signal 1 is output as the output signal Y.

5A and 5B, a logic circuit using a mechanical switch according to a fourth embodiment of the present invention will be described. 5A is a circuit diagram of a logic circuit using a mechanical switch according to a fourth embodiment of the present invention. FIG. 5B is a truth table of the logic circuit of FIG. 5A.

The logic circuit using the mechanical switch according to the fourth embodiment of the present invention includes first to eighth mechanical switches 5100 to 5800.

The first mechanical switch 5100 includes a first electrode, an insulating layer, a second electrode and a moving electrode on the first substrate, and the second mechanical switch 5200 is insulated from the first electrode, on the second substrate. A third mechanical switch 5300 includes a layer, a second electrode, and a moving electrode, and the third mechanical switch 5300 includes a first electrode, an insulating layer, a second electrode, and a moving electrode on a third substrate. ) Includes a first electrode, an insulating layer, a second electrode and a moving electrode on a fourth substrate, and the fifth mechanical switch 5500 is a first electrode, the insulating layer, a second electrode and moving on a fifth substrate. And a sixth mechanical switch 5600 includes a first electrode, an insulating layer, a second electrode, and a moving electrode on the sixth substrate, and the seventh mechanical switch 5700 is on the seventh substrate. An eighth mechanical switch 5800 comprising a first electrode, an insulating layer, a second electrode, and a moving electrode; A layer, the second electrode and the moving electrode. The first to eighth mechanical switches 5800 have the same structure as the mechanical switch shown in FIG. 1A, except that the first to eighth substrates may be the same substrate or may be separate substrates.

For convenience of description, in FIGS. 5A, the first to eighth mechanical switches 5100 to 5800 are briefly shown without omitting respective insulating layers and substrates.

As shown in FIG. 5A, the second electrode 5120 of the first mechanical switch 5100 is connected to the moving electrode 5330 of the third mechanical switch 5300, and of the second mechanical switch 5200. The second electrode 5220 is connected to the moving electrodes 5430 and 4430 of the fourth mechanical switch 5400, and the second electrode 5320 of the third mechanical switch 5300 is a fourth mechanical switch ( Connected to a second electrode 5520 of the 5400, a second electrode 5520 of the fifth mechanical switch 5500, and a second electrode 5620 of the sixth mechanical switch 5600, and a fifth mechanical switch The moving electrode 5530 of the 5500 is connected to the second electrode 5720 of the seventh mechanical switch 5700, and the moving electrode 5630 of the sixth mechanical switch 5600 is an eighth mechanical switch ( Is connected to the second electrode 5820 of 5800, and the first electrode 5110 of the first mechanical switch 5100 is connected to the first electrode 5510 of the fifth mechanical switch 5500. Mechanical switch (5200) The first electrode 5210 is connected to the first electrode 5610 of the sixth mechanical switch 5600, and the first electrode 5310 of the third mechanical switch 5300 is the eighth mechanical switch 5800. The first electrode 5810 of the fourth mechanical switch 5400 is connected to the first electrode 5710 of the seventh mechanical switch 5700. Thus, an XOR (Exclusive OR) logic circuit can be constructed.

The moving electrode 5130 of the first mechanical switch 5100 transfers the first power supply voltage VDD to the moving electrode 5330 of the third mechanical switch 5300, and the third mechanical switch 5300. The moving electrode 5330 may transfer the first power supply voltage VDD transmitted from the moving electrode 5130 of the first mechanical switch 5100 to the second electrode 5320 of the third mechanical switch 5300, or The moving electrode 5230 of the second mechanical switch 5200 transfers the first power supply voltage VDD to the moving electrode 5430 of the fourth mechanical switch 5400, and the fourth mechanical switch 5400. The moving electrode 5430 may transfer the first power supply voltage VDD transmitted from the moving electrode 5230 of the second mechanical switch 5200 to the second electrode 5520 of the fourth mechanical switch 5400. The moving electrode 5730 of the seventh mechanical switch 5700 is a moving electrode 5530 of the fifth mechanical switch 5500, which is lower than the first power supply voltage VDD. The second power supply voltage GND is transmitted, and the moving electrode 5530 of the fifth mechanical switch 5500 is the second power supply voltage GND transferred from the moving electrode 5730 of the seventh mechanical switch 5700. Is transferred to the second electrode 5520 of the fifth mechanical switch 5500, or the moving electrode 5830 of the eighth mechanical switch 5800 is moved to the moving electrode 5630 of the sixth mechanical switch 5600. The second power supply voltage GND is transmitted, and the moving electrode 5630 of the sixth mechanical switch 5600 is the second power supply voltage GND transferred from the moving electrode 5830 of the eighth mechanical switch 5800. Is transmitted to the second electrode 5620 of the sixth mechanical switch 5600. Here, the difference between the first power supply voltage VDD and the second power supply voltage GND is equal to or greater than the pull-in voltage V _PI described above.

The first electrode 5110 of the first mechanical switch 5100 and the first electrode 5510 of the fifth mechanical switch 5500 are connected to input a first input signal A, and the second mechanical switch. The first electrode 5210 of the 5200 and the first electrode 5610 of the sixth mechanical switch 5600 are connected to input the inverted signal / A of the first input signal A, and the fourth machine. The first electrode 5410 of the mechanical switch 5400 and the first electrode 5710 of the seventh mechanical switch 5700 are connected to receive a second input signal B, and the third mechanical switch 5300. The first electrode 5310 of the 8th mechanical switch 5800 of the first electrode 5810 is connected to the inverted signal / B of the second input signal (B) is input, the third mechanical switch ( The second electrode 5320 of the 5300, the second electrode 5520 of the fourth mechanical switch 5400, the second electrode 5520 of the fifth mechanical switch 5500, and the sixth mechanical switch 5600. Of the second electrode 5620 is connected to the output signal (Y ) Is output. Here, the first power supply voltage VDD may be used as the high signal 1, and the second power supply voltage GND may be used as the low signal 0.

Specifically, referring to the truth table shown in FIG. 5B, when the high signal 1 is input as the first input signal A and the low signal 0 is input as the second input signal B, the second mechanical The moving electrode 5230 of the switch 5200 is brought into contact with the second electrode 5220 of the second mechanical switch 5200 by electrostatic driving by electrostatic force, thereby converting the first power voltage VDD into the fourth mechanical switch 5400. The moving electrode 5430 of the fourth mechanical switch 5400 is also in contact with the second electrode 5520 of the fourth mechanical switch 5400 by electrostatic driving by electrostatic force. Since the first power supply voltage VDD is transmitted to the second electrode 5420 of the fourth mechanical switch 5400, the high signal 1 is output as the output signal Y.

When the low signal 0 is input as the first input signal A and the high signal 1 is input as the second input signal B, the moving electrode 5130 of the first mechanical switch 5100 is subjected to electrostatic force. Contact with the second electrode 5120 of the first mechanical switch 5100 by the electrostatic drive to transfer the first power supply voltage VDD to the moving electrode 5330 of the third mechanical switch 5300. 3, the movable electrode 5330 of the mechanical switch 5300 is also in contact with the second electrode 5320 of the third mechanical switch 5300 by electrostatic driving by the electrostatic force, thereby converting the first power voltage VDD into the third mechanical Since the signal is transmitted to the second electrode 5320 of the switch 5300, the high signal 1 is output as the output signal Y.

When the high signal 1 is input as the first input signal A and the high signal 1 is input as the second input signal B, the moving electrode 5730 of the seventh mechanical switch 5700 is subjected to electrostatic force. By the electrostatic drive by the contact with the second electrode 5720 of the seventh mechanical switch 5700 to transfer the second power supply voltage (GND) to the moving electrode 5530 of the fifth mechanical switch (5500), fifth The movable electrode 5530 of the mechanical switch 5500 is also brought into contact with the second electrode 5520 of the fifth mechanical switch 5500 by electrostatic driving by electrostatic force to convert the second power voltage GND to the fifth mechanical switch. Since it is transmitted to the second electrode 5520 of (5500), the low signal (0) is output as the output signal (Y).

When the low signal 0 is input as the first input signal A and the low signal 0 is input as the second input signal B, the moving electrode 5830 of the eighth mechanical switch 5800 is subjected to the electrostatic force. By contact with the second electrode (5820) of the eighth mechanical switch (5800) by the electrostatic drive by the second power supply voltage (GND) to the moving electrode (5630) of the sixth mechanical switch (5600), sixth The moving electrode 5630 of the mechanical switch 5600 is also in contact with the second electrode 5620 of the sixth mechanical switch 5600 by electrostatic driving by electrostatic force, thereby switching the second power voltage GND to the sixth mechanical switch. Since it is transmitted to the second electrode 5620 of 5600, the low signal 0 is output as the output signal Y.

The logic circuit using the mechanical switch according to the embodiments of the present invention, by using the mechanical switch according to an embodiment of the present invention, it is possible to configure a logic circuit uniformly and consistently.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the above-described technical configuration of the present invention may be embodied in other specific forms by those skilled in the art to which the present invention pertains without changing its technical spirit or essential features. It will be appreciated that it may be practiced.

Therefore, since the embodiments described above are provided to completely inform the scope of the invention to those skilled in the art, it should be understood that they are exemplary in all respects and not limiting. The invention is only defined by the scope of the claims.

As described above, the mechanical switch according to an embodiment of the present invention forms an insulating layer between the first electrode and the moving electrode and the second electrode, whereby the moving electrode contacts the second electrode by electrostatic driving by electrostatic force. In this case, short circuit with the first electrode can be prevented, so that malfunction can be effectively suppressed.

In addition, the logic circuit using the mechanical switch according to the embodiments of the present invention, by using the mechanical switch according to an embodiment of the present invention, it is possible to configure a logic circuit uniformly and consistently.

Claims (13)

delete delete delete delete delete From the first electrode formed on the first substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A first mechanical switch that is extended and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; And From the first electrode formed on the second substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A second mechanical switch extending and formed, the second mechanical switch including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode, The first electrode of the first mechanical switch is connected to the first electrode of the second mechanical switch, and the second electrode of the first mechanical switch is connected to the second electrode of the second mechanical switch. Logic circuit using a mechanical switch characterized in that. The method of claim 6, The moving electrode of the first mechanical switch transfers a first power supply voltage to the second electrode of the first mechanical switch, The moving electrode of the second mechanical switch transfers a second power supply voltage lower than the first power supply voltage to the second electrode of the second mechanical switch. From the first electrode formed on the first substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A first mechanical switch that is extended and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the second substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A second mechanical switch that extends and includes a moving electrode including the insulating layer and a moving part spaced apart from the second electrode; From the first electrode formed on the third substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A third mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; And A first electrode formed on a fourth substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A fourth mechanical switch extending and formed, the fourth electrode including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode, The second electrode of the first mechanical switch is connected to the moving electrode of the second mechanical switch, and the second electrode of the second mechanical switch is the second electrode of the third mechanical switch and the fourth machine. A first electrode of the first mechanical switch is connected to a first electrode of the third mechanical switch, and a first electrode of the second mechanical switch is connected to the first electrode of the third mechanical switch. A logic circuit using a mechanical switch, characterized in that connected to the first electrode of the fourth mechanical switch. The method of claim 8, The moving electrode of the first mechanical switch transfers a first power supply voltage to the moving electrode of the second mechanical switch, and the moving electrode of the second mechanical switch is transferred from the moving electrode of the first mechanical switch. Transfer the first power supply voltage to a second electrode of the second mechanical switch, The moving electrode of the third mechanical switch transfers a second power voltage lower than the first power voltage to the second electrode of the third mechanical switch, or the moving electrode of the fourth mechanical switch is the fourth machine. And a second power supply voltage to a second electrode of a mechanical switch. From the first electrode formed on the first substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A first mechanical switch that is extended and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the second substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A second mechanical switch that extends and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the third substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A third mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; And A first electrode formed on a fourth substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A fourth mechanical switch extending and formed, the fourth electrode including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode, The second electrode of the first mechanical switch is connected to the second electrode of the second mechanical switch and the second electrode of the third mechanical switch, and the movable electrode of the third mechanical switch is connected to the fourth machine. A first electrode of the first mechanical switch is connected to a first electrode of the third mechanical switch, and a first electrode of the second mechanical switch is connected to the fourth machine Logic circuit using a mechanical switch, characterized in that connected to the first electrode of the switch. The method of claim 10, The moving electrode of the first mechanical switch transfers a first power supply voltage to the second electrode of the first mechanical switch, or the moving electrode of the second mechanical switch is directed to the second electrode of the second mechanical switch. Transferring the first power supply voltage, The moving electrode of the fourth mechanical switch transfers a second power voltage lower than the first power voltage to the moving electrode of the third mechanical switch, and the moving electrode of the third mechanical switch is the fourth mechanical switch. And transferring the second power supply voltage transmitted from the moving electrode of the switch to the second electrode of the third mechanical switch. From the first electrode formed on the first substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A first mechanical switch that is extended and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the second substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A second mechanical switch that extends and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the third substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A third mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; A first electrode formed on a fourth substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A fourth mechanical switch that is extended and includes a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; A first electrode formed on a fifth substrate, an insulating layer formed on the first electrode, a second electrode formed on the insulating layer, and an attachment part formed to be spaced apart from the second electrode on the insulating layer and the attachment part A fifth mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the sixth substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion A sixth mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; From the first electrode formed on the seventh substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed to be spaced apart from the second electrode on the insulating layer and the attachment portion A seventh mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode; And From the first electrode formed on the eighth substrate, the insulating layer formed on the first electrode, the second electrode formed on the insulating layer and the attachment portion formed spaced apart from the second electrode on the insulating layer and the attachment portion An eighth mechanical switch extending and including a moving electrode formed of a moving part spaced apart from the insulating layer and the second electrode, The second electrode of the first mechanical switch is connected to the moving electrode of the third mechanical switch, the second electrode of the second mechanical switch is connected to the moving electrode of the fourth mechanical switch, The second electrode of the third mechanical switch is connected to the second electrode of the fourth mechanical switch, the second electrode of the fifth mechanical switch and the second electrode of the sixth mechanical switch, and the fifth mechanical The moving electrode of the switch is connected to the second electrode of the seventh mechanical switch, the moving electrode of the sixth mechanical switch is connected to the second electrode of the eighth mechanical switch, A first electrode of the first mechanical switch is connected to a first electrode of the fifth mechanical switch, a first electrode of the second mechanical switch is connected to a first electrode of the sixth mechanical switch, The first electrode of the third mechanical switch is connected to the first electrode of the eighth mechanical switch, and the first electrode of the fourth mechanical switch is connected to the first electrode of the seventh mechanical switch. Logic circuit using a mechanical switch characterized in that. The method of claim 12, The moving electrode of the first mechanical switch transfers a first power supply voltage to the moving electrode of the third mechanical switch, and the moving electrode of the third mechanical switch is transferred from the moving electrode of the first mechanical switch. Transfer the first power supply voltage to a second electrode of the third mechanical switch, or The moving electrode of the second mechanical switch transfers the first power supply voltage to the moving electrode of the fourth mechanical switch, and the moving electrode of the fourth mechanical switch transfers from the moving electrode of the second mechanical switch. Delivering the first power supply voltage to the second electrode of the fourth mechanical switch, The moving electrode of the seventh mechanical switch transfers a second power voltage lower than the first power voltage to the moving electrode of the fifth mechanical switch, and the moving electrode of the fifth mechanical switch is the seventh mechanical switch. Transfer the second power supply voltage transmitted from the moving electrode of the switch to the second electrode of the fifth mechanical switch, or The moving electrode of the eighth mechanical switch transfers the second power supply voltage to the moving electrode of the sixth mechanical switch, and the moving electrode of the sixth mechanical switch transfers from the moving electrode of the eighth mechanical switch. And transfer the second power supply voltage to the second electrode of the sixth mechanical switch.

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