KR100715497B1 - MEMs TYPE OPTICAL ADD-DROP MODULE WITH DIVIDED V-TYPE MICROMIRRORS - Google Patents

Abstract

According to the present invention, an offset error of an optical signal according to the thickness of the micromirror is not generated in a MEMS optical switch operated by driving a micromirror to block or change an input / output optical signal, thereby easily packaging an element, and attenuating an optical signal. A MEMS type light regulator equipped with a split V type micromirror.

According to the present invention, a plurality of input and output optical waveguides are symmetrically and equilibrated with each other, and a first input optical waveguide and a second output optical waveguide are disposed on one side and a first output optical wave corresponding to the first input optical waveguide on the other side. A first waveguide and a second input optical waveguide corresponding to the second output optical waveguide and disposed or separated by driving of an actuator on an optical path between the first input optical waveguide and the first output optical waveguide And a micromirror comprising a micromirror and a second micromirror, and a third micromirror and a fourth micromirror inserted into or separated from the optical path between the second input optical waveguide and the second output optical waveguide. In the MEMS type optical switch, the ends of the first input / output optical waveguide and the second input / output optical waveguide are inclined.

MEMS, optical switch, optical attenuator, micromirror, actuator, optical waveguide

Description

MEMS type optical regulator with split V type micromirror {MEMS TYPE OPTICAL ADD-DROP MODULE WITH DIVIDED V-TYPE MICROMIRRORS}

1 is a schematic structural diagram of a case in which a micromirror is separated from an optical path in a MEMS type optical regulator equipped with a divided V type micromirror according to an embodiment of the present invention;

2a and 2b is a schematic structural diagram of the case of light attenuation in a MEMS type light regulator equipped with a split V type micromirror according to an embodiment of the present invention;

3 is a schematic structural diagram of a case where the optical path is changed in a MEMS type optical regulator equipped with a divided V type micromirror according to an embodiment of the present invention;

Figures 4a and 4b is a schematic structural diagram of another case of light attenuation in the MEMS type light regulator equipped with a divided V-type micromirror according to an embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

10: first input optical waveguide 20: first output optical waveguide

15: second input optical waveguide 25: second output optical waveguide

30: first micromirror 31, 32, 36, 37: reflective surface

33: second micromirror 35: fourth micromirror

38: third micromirror

The present invention relates to a MEMS type optical regulator equipped with a split V-type micromirror, and more particularly, to a MEMS type optical switch operated by driving a micromirror to block or change an input / output optical signal. The present invention relates to a MEMS type optical winder equipped with a split V-type micromirror capable of attenuating an optical signal as well as facilitating device packaging without offset error of an optical signal.

In general, a process technology or a process for moving a structure installed on a substrate by a micro electromechanical system (MEMS), which mechanically drives an optical element such as a mirror to block or change an optical path through which light travels. A device-type optical switch made of technology is widely used.

The MEMS type optical switch is basically divided into a unit channel and a multi channel optical switch such as a 1 x 2 configuration and a 2 x 2, and used as a light transmission path by fabricating a waveguide or waveguide in the configuration of the optical switch. It is an optical waveguide.

On the other hand, Variable Optical Attenuator is used to equalize each signal between the front end of the wavelength multiplexer and the amplifier in the long-distance transmission of wideband wavelength division optical communication system. As a part, it outputs a uniform signal by giving a certain loss to several input signals.

In optical communication, the intensity of optical reception required depends on the number and performance of optical parts such as difference in transmission loss of optical fiber due to long and short transmission distance, the number of optical fiber connections, optical branch coupling used in transmission path, etc. Do. Optical attenuators are used to prevent adverse effects on optical components when the reception strength of the optical signal is higher than required, or in order to send optical signals of multiple wavelengths to a single waveguide in a broadband wavelength division multiplexing system. It is used to homogenize. In particular, the MEMS type optical attenuator has advantages of low insertion loss, crosstalk, polarization, and wavelength dependent loss.

In the optical module configuration, both the functions of the optical switch and the optical attenuator are required, and since each element is assembled to form an optical regulator, the structure is complicated and difficult to manufacture, which causes cost increase.

On the other hand, in the MEMS type optical switch as described above, the light from the optical waveguide is reflected in the micromirror, and there is a problem in that an offset error is generated from the optical axis by a predetermined ratio of the thickness of the micromirror.

The present invention has been made to solve the above-mentioned problems, and it is easy to package the device by eliminating offset errors reflected from the micromirrors and deviating from the optical axis of the output optical waveguide, and making it easy to array or matrix. An object of the present invention is to provide a MEMS type light adjuster equipped with a split V type micromirror capable of attenuating signal light by adjusting the micromirror.

In the present invention, a first input optical waveguide 10 for emitting a constant optical signal on one side and a second output optical waveguide 25 for receiving a constant optical signal are disposed, and the first input optical waveguide 10 on the other side. A first output optical waveguide 20 receiving incident light emitted in correspondence to the second output optical waveguide 20 and a second input optical waveguide 15 corresponding to the second output optical waveguide 25 and outputting an optical signal, First and second micromirrors 30 which are inserted into or separated from the optical path between the first input optical waveguide 10 and the first output optical waveguide 20 by driving an actuator to change or attenuate the optical signal. 33 and third and third inserting or leaving the actuator on the optical path between the second input optical waveguide 15 and the second output optical waveguide 25 to change or attenuate the optical signal. And four micromirrors 38 and 35, wherein the first micromirror 30 comprises the first input optical waveguide. A first reflecting surface 31 inclined 45 degrees with respect to the optical path between the furnace 10 and the first output optical waveguide 20 is formed, and the second micromirror 33 has a first input optical waveguide 10. ) And a second reflection surface 32 inclined 135 degrees with respect to the optical path between the first output optical waveguide 20 and the third and fourth micromirrors 38 and 35. It is a MEMS type light regenerative device equipped with a divided V-type micromirror, wherein the third reflection surface 37 and the fourth reflection surface 36 are formed to be symmetrical to the two micromirrors 30 and 33, respectively.

Preferably, the present invention comprises a plurality of the first input and output optical waveguides and the second input and output optical waveguides, wherein the ends of the first input and output optical waveguides and the second input and output optical waveguides are inclined, The ends of the first input and output optical waveguides and the second input and output optical waveguides may be thermally extended, or the ends of the first and output optical waveguides and the second input and output optical waveguides may be formed in a lens shape. have.

Hereinafter, with reference to the accompanying drawings will be described in detail a MEMS type light regulator equipped with a divided V-type micromirror of the present invention. In the reference numerals to the components of the drawings, the same components, even if shown on the other drawings are to have the same reference numerals as possible, it is known that it may unnecessarily obscure the subject matter of the present invention Detailed description of functions and configurations will be omitted.

FIG. 1 is a schematic structural diagram of a case in which a micromirror is separated from an optical path in a MEMS type optical regulator equipped with a divided V-type micromirror according to an embodiment of the present invention, and FIGS. 2A and 2B illustrate an embodiment of the present invention. FIG. 3 is a schematic structural diagram of a case of optical attenuation in a MEMS type optical regulator equipped with a divided V type micromirror. FIG. 3 is a MEMS type optical regulator equipped with a divided V type micromirror according to an embodiment of the present invention. 4A and 4B are schematic structural diagrams of another case of optical attenuation in a MEMS type optical regulator equipped with a divided V-type micromirror according to an embodiment of the present invention.

MEMS-type optical retarder equipped with a split V-type micromirror according to a preferred embodiment of the present invention, as shown in Figures 1 to 4b, the first input optical waveguide 10 and the second output optical waveguide ( 25 is disposed, the first input optical waveguide 20 corresponding to the first input optical waveguide 10 and the second input optical waveguide 15 corresponding to the second output optical waveguide 25 are disposed on the other side. First and second micromirrors 30 and 33 disposed on and separated from the optical path between the first input optical waveguide 10 and the first output optical waveguide 20 by driving of an actuator; And third and fourth micromirrors 38 and 35 which are inserted into or departed from the optical path between the second input optical waveguide 15 and the second output optical waveguide 25. The first micromirror 30 has a first reflecting surface 31 inclined 45 degrees with respect to the optical path between the first input optical waveguide 10 and the first output optical waveguide 20, and the second The micromirror 33 has a second reflecting surface 32 inclined 135 degrees with respect to the optical path between the first input optical waveguide 10 and the first output optical waveguide 20, and the third and fourth micro Mirrors 38 and 35 are formed to be symmetrical with the first and second micromirrors 30 and 33, respectively. In other words, the first to fourth micromirrors 30, 33, 38, and 35 are operated by an actuator (not shown) between the first input optical waveguide 10 and the first output optical waveguide 20, and a second input. The optical waveguide 15 is inserted into or separated from the optical path between the optical waveguide 15 and the second output optical waveguide 25 to change the path of the emitted light through the first and second input optical waveguides 10 and 15.

Meanwhile, in order to change the optical path, as shown in FIG. 3, the first micromirror 30, the fourth micromirror 35, the second micromirror 33, and the third micromirror 38 are mounted on the optical path. Drive the actuator so that it is positioned at. Accordingly, the light emitted through the first input optical waveguide 10 is primarily reflected to the first reflecting surface 31 inclined at 45 degrees of the first micromirror 30, and the fourth of the fourth micromirror 35 is reflected. Reflected second through the reflecting surface 36 is incident on the second output optical waveguide (25). That is, the offset error due to the mirror thickness generated when the first reflection surface 31 is first reflected is canceled when reflected by the fourth reflection surface 36 that is symmetrically reflected so that the offset error does not occur and the second output is not generated. Incident on the optical waveguide 25.

In addition, the optical signal emitted through the second input optical waveguide 15 also enters the first output optical waveguide 20 without causing an offset error through the third reflective surface 37 and the second reflective surface 32. Will be.

Meanwhile, the micromirror functions as an optical attenuator for controlling the intensity of light transmitted to the output optical waveguides 20 and 25 by moving each micromirror while the micromirror is in the optical path or in the optical path. In addition, when one or two micromirrors are moved to attenuate the light, the light that is not transmitted to the main output waveguide and is blocked is transmitted out of the light receiving region of the other output waveguide and is extinguished.

At this time, the ends of the first input and output optical waveguides 10 and 20 and the second input and output optical waveguides 15 and 25 are formed to be inclined, thermally expanded, or formed into a lens shape in order to reduce light loss. Although not limited thereto, it is preferable that a plurality of first input and output optical waveguides and second input and output optical waveguides are formed.

Referring to the operation of the light attenuation in more detail, first, as shown in FIGS. 2A and 2B, some of the light emitted from the input optical waveguides 10 and 15 may be removed. In other words, as shown in FIG. 2A, when the first micromirror 30 is inserted into the optical path formed between the first input optical waveguide 10 and the first output optical waveguide 20 by a predetermined amount, A part of the light emitted through the first input optical waveguide 10 is reflected through the first reflecting surface 31 of the first micromirror 30, and the remaining light is incident on the first output optical waveguide 15. At this time, the light reflected by the first reflecting surface 31 of the first micromirror 30 is reflected through the fourth reflecting surface 36 of the fourth micromirror 35 and the second output optical waveguide 25. It is reflected to the non-light-receiving area of and disappears.

Also, as shown in FIG. 2B, when the third micromirror 38 is inserted into the optical path formed between the second input optical waveguide 15 and the second output optical waveguide 25 by a predetermined portion, the second A portion of the light emitted through the input optical waveguide 15 is reflected through the third reflection surface 37 of the third micromirror 38, and the remaining light is incident on the second output optical waveguide 25. At this time, the light reflected by the third reflecting surface 37 of the third micromirror 38 is reflected through the second reflecting surface 32 of the second micromirror 33 to thereby output the first output optical waveguide 20. It is reflected to the non-light-receiving area of and disappears. As described above, the first micromirror 30 and the third micromirror 38 may be independently controlled.

4A and 4B, the input light may be attenuated in a state in which the light path is changed. That is, the light emitted from the first input optical waveguide 10 is reflected through the first micromirror 30 and the fourth micromirror 35 to be incident on the second output optical waveguide 25, and the second input light The outgoing light emitted through the waveguide 15 is reflected through the third micromirror 38 and the second micromirror 33 to be incident on the first output optical waveguide 20. At this time, in order to attenuate the incident light incident on the second output optical waveguide 25, the fourth micromirror 35 is moved as shown in FIG. 4A, and a part of the second output optical waveguide 25 is moved to the light receiving region of the second output optical waveguide 25. And the rest is irradiated to the non-light-receiving area of the second output optical waveguide 25 and attenuated. In addition, in order to attenuate incident light incident on the first output optical waveguide 20, as shown in FIG. 4B, the second micromirror 33 is moved to partially enter the light receiving region of the first output optical waveguide 20. The rest is irradiated to the non-light-receiving area of the first output optical waveguide 20 and attenuated.

The present invention configured as described above is intended to eliminate optical axis misalignment (offset error), that is, a problem caused by the conventional optical switch principle, that is, the light reflected from the micromirror is out of the optical axis. Since it is reflected symmetrically twice and transmitted to the optical waveguide, the deviation in the optical axis of the optical signal can be eliminated.

In addition, the optical waveguide is located on one side and the actuator is located in a vertical position, it is easy to package the device. In this case, the actuator may be an electrostatic comb actuator, a parallel plate actuator, an electromagnetic force actuator, a thermoelastic actuator, or the like.

An embodiment of the present invention described above and illustrated in the drawings should not be construed as limiting the technical spirit of the present invention. The protection scope of the present invention is limited only by the matters described in the claims, and those skilled in the art can change and change the technical idea of the present invention in various forms. Therefore, such improvements and modifications will fall within the protection scope of the present invention, as will be apparent to those skilled in the art.

According to the present invention as described above it is possible to eliminate the offset error reflected by the micromirror from the optical axis of the output optical waveguide, and the function of the optical attenuator without the additional insertion loss by configuring the function of the optical attenuator in the same space. In addition, an optical waveguide is arranged or matrixed on one side, and an actuator is arranged at a vertical position, thereby making it convenient to package the device.

Claims (5)

delete delete A plurality of input and output optical waveguides symmetrically and in parallel with each other, a first input optical waveguide and a second output optical waveguide disposed at one side, and a first output optical waveguide corresponding to the first input optical waveguide at the other side; A second input optical waveguide corresponding to the second output optical waveguide is disposed, the first micromirror inserted or separated by an actuator on an optical path between the first input optical waveguide and the first output optical waveguide; MEMS type light having a second mirror and a micromirror including a third micromirror and a fourth micromirror inserted into or separated from the optical path between the second input optical waveguide and the second output optical waveguide. In the switch, A MEMS type optical regulator equipped with a divided V-type micromirror, wherein the ends of the first input / output optical waveguide and the second input / output optical waveguide are inclined. A plurality of input and output optical waveguides symmetrically and in parallel with each other, a first input optical waveguide and a second output optical waveguide disposed at one side, and a first output optical waveguide corresponding to the first input optical waveguide at the other side; A second input optical waveguide corresponding to the second output optical waveguide is disposed, the first micromirror inserted or separated by an actuator on an optical path between the first input optical waveguide and the first output optical waveguide; MEMS type light having a second mirror and a micromirror including a third micromirror and a fourth micromirror inserted into or separated from the optical path between the second input optical waveguide and the second output optical waveguide. In the switch, A MEMS type optical switch with a divided V-type micromirror, wherein the ends of the first input / output optical waveguide and the second input / output optical waveguide are thermally extended. A plurality of input and output optical waveguides symmetrically and in parallel with each other, a first input optical waveguide and a second output optical waveguide disposed at one side, and a first output optical waveguide corresponding to the first input optical waveguide at the other side; A second input optical waveguide corresponding to the second output optical waveguide is disposed, the first micromirror inserted or separated by an actuator on an optical path between the first input optical waveguide and the first output optical waveguide; MEMS type light having a second mirror and a micromirror including a third micromirror and a fourth micromirror inserted into or separated from the optical path between the second input optical waveguide and the second output optical waveguide. In the switch, A MEMS type optical switch with a divided V-type micromirror, wherein the ends of the first input / output optical waveguide and the second input / output optical waveguide are formed in a lens shape.

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