KR100666728B1 - Method for Manufacturing Metal Oxide Hollow Nanoparticles - Google Patents

Abstract

The present invention relates to a method for producing nanoparticles by chemical vapor condensation process, using a metal acetylacetonate as a precursor to a method for producing metal oxide hollow nanoparticles having excellent properties in an easier and simpler method in the gas phase synthesis process And it provides a metal oxide hollow nanoparticles produced by this method.

The present invention provides a method for preparing metal oxide hollow nanoparticles by chemical vapor condensation, comprising the steps of: preparing a metal acetylacetonate as a precursor; Vaporizing the metal acetylacetonate prepared as above at a temperature above its melting point; Transferring the vaporized metal acetylacetonate to the reaction zone as described above; Pyrolyzing the metal acetylacetonate in the gas phase transferred to the reaction zone as described above and synthesizing the metal oxide hollow nanoparticles through reaction with oxygen; And a method for producing the metal oxide hollow nanoparticles comprising the step of condensing and collecting the metal oxide hollow nanoparticles synthesized as described above and the metal oxide hollow nanoparticles prepared by the method.

Precursors, metal oxides, hollow, nanoparticles, metal acetylacetonates, chemical vapor condensation

Description

Method for Manufacturing Metal Oxide Hollow Nanoparticles

1 is a schematic diagram of an example of a chemical vapor condensation process that is a metal oxide hollow nanoparticles manufacturing apparatus that can be preferably applied to the present invention

2 is a conceptual diagram of the synthesis mechanism of the metal oxide hollow nanoparticles of the present invention

Figure 3 shows a TEM image of the iron oxide hollow nanoparticles prepared using the iron (III) acetylacetonate as a precursor, (a) is the reaction temperature is 700 ^° C, (b) is 800 ^o C, (c) indicates 900 ^o C, (d) shows a high magnification photograph (HREM) of Fig. 3 (b).

Figure 4 shows the X-ray diffraction pattern of the iron oxide hollow nanoparticles prepared according to the present invention, (a) is the reaction temperature is 700 ^o C, (b) is 800 ^o C, (c) Indicates 900 ^o C

5 is a thermogravimetry graph of iron (III) acetylacetonate

FIG. 6 shows X-ray diffraction patterns and TEM images of iron oxide hollow nanoparticles prepared using iron pentacarbonyl (Fe (CO) ₅ ) as a precursor, and (a) shows X-ray diffraction patterns. (b) shows a TEM picture

FIG. 7 shows X-ray diffraction patterns and TEM images of titanium dioxide hollow nanoparticles prepared by using titanium oxide acetylacetonate as a precursor, wherein (a) shows an X-ray diffraction pattern, ( b) represents a TEM photo

8 shows X-ray diffraction patterns and TEM images of aluminum oxide hollow nanoparticles prepared using aluminum acetylacetonate as a precursor according to the present invention, (a) shows an X-ray diffraction pattern, (b ) Represents a TEM photo

Explanation of symbols on the main parts of the drawings

10. . . Carburetor 20. . . Reactor 30. . . Collector

The present invention relates to a method for producing nanoparticles by chemical vapor condensation process, more specifically, metal oxide hollow nanoparticles having excellent properties in an easy and simple method in the gas phase synthesis process using a metal acetylacetonate as a precursor It relates to a method for producing the metal oxide hollow nanoparticles prepared by the method.

Conventional metal oxide hollow particles originate from metal oxides or polymer materials, and are mainly applied to the fields of transporters and catalysts such as drugs, cosmetics, dyes, and inks.

However, in the case of the metal oxide hollow particles, it is difficult to expect an improvement in properties compared to a wide range of applications, because the size of the prepared metal oxide hollow particles is several hundred nm or more, and the various sizes obtained by reducing the particle size to 100 nm or less This is because a change in functional properties is difficult to expect in the existing process.

The formation mechanism of the hollow particles is highly dependent on the synthesis process. Conventional manufacturing methods include a sol-gel process, a liquid phase synthesis method, a spray pyrolysis process, and a spray drying process, a gas phase synthesis method. Etc.

However, these methods have the disadvantage that they can cause changes in the particle microstructure.

In the case of the sol-gel process, a heat treatment step is performed to remove polymer core particles or internal organic substances to form hollows therein.

At this time, since the aggregation and grain growth between the particles due to the thermal polymer of the particles occurs, it is difficult to produce fine nano-hollow particles of less than 100 nm.

Recently, in consideration of particle growth by heat treatment, research has been conducted to form hollow structures by coating polymer core particles having a size of several tens of nm, but it is very difficult to form a uniform coating layer on the surface of each core particle having a size of several tens of nm or less. Due to the difficulty, successful synthesis results for hollow nanoparticles having a size of less than 100 nm have not been reported to date.

On the other hand, in the case of the gas phase synthesis method such as the spray pyrolysis process and the spray drying process to generate the droplets of the precursor through the nozzle, because the size of the generated droplets are several microns (micron) to produce nano hollow particles of 100 nm or less There is a problem that is difficult.

The present invention is to provide a method for producing a metal oxide hollow nanoparticles having excellent properties in an easier and simpler method in a gas phase synthesis process using a metal acetylacetonate as a precursor and a metal oxide hollow nanoparticles prepared by the method This is the purpose.

EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated.

The present invention provides a method for producing the metal oxide hollow nanoparticles by chemical vapor condensation process,

Preparing a metal acetylacetonate that is a precursor;

Vaporizing the metal acetylacetonate prepared as above at a temperature above its melting point;

Transferring the vaporized metal acetylacetonate to the reaction zone as described above;

Pyrolyzing the metal acetylacetonate in the gas phase transferred to the reaction zone as described above and synthesizing the metal oxide hollow nanoparticles through reaction with oxygen; And

It relates to a method for producing a metal oxide hollow nanoparticles comprising the step of condensing and collecting the metal oxide hollow nanoparticles of the gas phase synthesized as described above.

The present invention also relates to metal oxide hollow nanoparticles prepared by the method of the present invention described above.

EMBODIMENT OF THE INVENTION Hereinafter, this invention is demonstrated in detail.

The present invention is applied to a method for producing metal oxide hollow nanoparticles by chemical vapor condensation process.

The present invention uses a metal acetylacetonate as a precursor, the hollow structure of the metal oxide hollow nanoparticles is formed by the stepwise decomposition of the precursor.

This does not appear when using as a precursor other highly volatile metal-organic precursors in which decomposition of organic groups occurs at a time.

5 shows the results of investigating the pyrolysis behavior of iron (III) acetyl acetonate used for the synthesis of hollow iron nanoparticles by thermogravimetry.

As shown in FIG. 5, it can be seen that the decomposition of the acetylacetonate group (C ₅ H ₇ O ₂ ) is performed stepwise at about 220 ^o C, 300 ^o C and 400 ^o C when the iron (III) acetylacetonate is decomposed. .

That is, in the present invention, a metal acetylacetonate obtained in staged decomposition is used as a precursor.

In the present invention, by using the metal acetylacetonate as a precursor, it is possible to control the crystal phase and the particle size of the hollow nanoparticles only by adjusting the process variables without the need to pre- and post-treatment, depending on the characteristics of the process.

In order to prepare the metal oxide hollow nanoparticles according to the present invention, a metal acetylacetonate precursor must be prepared.

As the metal acetylacetonate, a metal or metal oxide may be combined with an acetylacetonate group, and the acetylacetonate group may be decomposed stepwise as the reaction temperature increases.

Representative examples of the metal acetylacetonate include iron (III) acetylacetonate (Iron (III) acetylacetonate), aluminum acetylacetonate, titanium (IV) acetylacetonate, Cerium (III) acetylacetonate, hydrate, Chromium (III) acetylacetonate, Cobalt (II) acetylacetonate, Copper (II) Acetylacetonate (Copper (II) acetylacetonate), gallium (III) acetylacetonate, manganese (III) acetylacetonate, iron (II) acetylacetonate ( Iron (II) acetylacetonate, Magnesium acetylacetonate (hydrate), Barium acetylacetonate (hydrate), Beryllium acetylacetonate, Cadmium acetylacetonate (hydrate), Calcium acetylacetonate, Cesium acetylacetonate, Indium (III) acetylacetonate, Iridium (III) acetylacetonate Iridium (III) acetylacetonate, Lanthanum acetylacetonate, hydrate, Lead (II) acetylacetonate, Lithium acetylacetonate, Manganese (II) acetyl Acetonate (Manganese (II) acetylacetonate), Nickel (II) acetylacetonate, Nickel (II) acetylacetonate, Palladium (II) acetylacetonate, Platinum (II) acetylacetonate, Rhodium (III) acetylacetonate (Rhodium (III) acetylacetonate), rubidium acetylacetonate, ruthenium (III) acetylacetonate, Silver acetylacetonate, Vanadium (III) acetylacetonate, Vanadyl acetylacetonate, Yttrium (III) acetylacetonate (Yttrium (III) acetylacetonate, hydrate) Zinc acetylacetonate hydrate, and zirconium (IV) acetylacetonate.

The metal acetylacetonate may be prepared in powder form or in the form of a slurry mixed with an organic solvent.

The slurry form may be preferably applied when continuously manufacturing the metal oxide hollow nanoparticles.

When preparing the metal acetylacetonate in the form of a slurry, it is necessary to dissolve the precursor in a suitable organic solvent.

As the organic solvent, any one can be used as long as it dissolves the metal acetylacetonate, and it is preferable that the boiling point is low and the solubility of the metal-organic compound is high.

Representative examples of the organic solvent include isopropyl alcohol, ethyl alcohol, methyl alcohol, acetone, nucleic acid, and the like, more preferably isopropyl alcohol.

Since metal acetylacetonate generally has low solubility in organic solvents, the organic solvent for slurrying the precursor should have good mobility and have a decomposition temperature (boiling point) lower than the melting point of the precursor.

The isopropyl alcohol is a material widely used as a dissolving agent or denaturant, and has a boiling point of 108 ^° C. and is excellent in solubility, and thus is more suitable for preparing a slurry precursor for continuously supplying metal acetylacetonate, and also in a reaction zone. Can be completely decomposed within.

The slurry is continuously injected for a long time through the micropump for the purpose of continuous supply of the precursor in the mass production of the metal oxide hollow nanoparticles, in consideration of this point, the concentration of the metal acetylacetonate is low, that is, high flow Although it is preferable to have a degree, since the productivity will fall when the concentration of the metal acetylacetonate is too low, it is preferable that the concentration of the metal acetylacetonate in the slurry is appropriately selected in consideration of this point, and more preferably. It is maintained at 0.1M to 0.5M.

Next, the metal acetylacetonate prepared as described above is evaporated at a temperature above its melting point.

As described above, the vaporization temperature of the metal acetylacetonate is preferably limited to the melting point or more, preferably between the melting point + 20-30 ° C to the boiling point + 20-30 ° C.

If the vaporization temperature is too high above the boiling point, the bond between the metal ion and the acetylacetonate group is completely broken, so that the stepwise decomposition of the acetylacetonate group for the formation of hollow particles may not occur, and the vaporization temperature is too low. Droplets of precursors may not be formed.

Next, the metal acetylacetonate vaporized as described above is transferred to the reaction zone.

The transport of the vaporized metal acetylacetonate to the reaction zone is preferably carried out using a transport gas, and the preferred transport gas may be helium or argon.

Next. As described above, the metal acetylacetonate in the gas phase transferred to the reaction zone is thermally decomposed, and metal oxide hollow nanoparticles are synthesized through reaction with oxygen.

The reaction temperature and the reaction pressure in the reaction zone is preferably set to 700 ^° C or more and 600 mbar or less, respectively.

If the reaction temperature is too low, it may be synthesized in an amorphous state without forming a crystalline phase, and the reaction temperature is preferably 700 ^° C. or higher, and the upper limit of the reaction temperature is the possibility of particle growth due to the thermally-polymerized nanoparticles. It may be selected in consideration of.

For example, in the case of having a complete crystal phase at a temperature of 1000 ^° C. or higher, such as aluminum oxide, 1500 ^° C. may be set as the upper limit of the reaction temperature.

In addition, when the reaction pressure is too high, since the collision speed between particles increases, particle growth may occur and a large amount of aggregates may be formed. Therefore, the reaction pressure is preferably set to 600 mbar or less.

If the reaction pressure is too low, since the decomposition rate of the acetylacetonate group may increase, hollow particles may not be formed, and may be selected in consideration of this point, and a more preferable reaction pressure is 50 to 600 mbar.

Next, the metal oxide hollow nanoparticles synthesized as described above are condensed and collected to prepare the metal oxide hollow nanoparticles.

Condensation of the metal oxide hollow nanoparticles synthesized as described above is preferably performed so that condensation by thermophoresis of the particles from supersaturated vapor occurs as the temperature is drastically reduced.

According to the present invention, metal oxide hollow nanoparticles having a particle size of 100 nm or less, particularly 50 nm or less and a narrow particle size range can be prepared.

Metal oxide hollow nanoparticles having a particle size and a narrow particle size range of 100 nm or less, particularly 50 nm or less, prepared as described above have various functional characteristics, such as mechanical, magnetic and chemical characteristics, which are distinguished from conventional micron size powders. , Optical, electrical and electronic properties.

Preferably, the metal oxide hollow nanoparticle powder is present in a monodisperse form rather than in the form of aggregates, and the aggregates must have a soft agglomeration that can be easily dispersed by physical or chemical methods. .

In the case of using the metal oxide hollow nanoparticle powder in the monodisperse form or in the form of agglomerates having weak cohesion, a product in the form of dispersed particles, thin films or thick films may be prepared.

Hereinafter, the present invention will be described in more detail with reference to the drawings.

Figure 1 shows an example of a metal oxide hollow nanoparticle manufacturing apparatus that can be preferably applied to the present invention.

As shown in FIG. 1, the nanoparticle production apparatus 1 thermally decomposes a vaporized metal acetylacetonate vaporized by the vaporizer 10 and a vaporized metal acetylacetonate precursor, and simultaneously reacts with oxygen. It comprises a reactor 20 for synthesizing the metal oxide hollow nanoparticles through and a collector 30 for condensing and collecting the metal oxide hollow nanoparticles of the gas phase synthesized in the reactor 20.

The vaporizer 10 is connected to a transport pipe 11 for supplying a transport gas and a precursor to the vaporizer 10, the transport pipe 11 is supplied with a transport gas supply pipe 12 and a precursor for supplying a transport gas Precursor supply pipe 13 is connected, the transport gas supply pipe 12 is provided with a transport gas flow controller 12a, and the transport pipe 11 is provided with a thermocouple 11a.

The reactor 20 is provided with a mixer 21 in the front part in the direction of movement of the reaction gas, and the mixer 21 has an oxygen supply pipe 22 for supplying oxygen in a gas communication relationship. The oxygen supply pipe 22 is equipped with a reaction gas flow controller 22a for controlling the flow rate of oxygen.

In Fig. 1, reference numeral 41 denotes a pressure controller and 42 denotes a vacuum pump.

The method for producing the metal oxide hollow nanoparticles according to the present invention using the nanoparticle production apparatus 1 will be described.

The precursor is supplied to the vaporizer 10 through the precursor supply pipe 13 and the transport pipe 11 to vaporize the precursor.

The vaporized precursor is transferred to the mixer 21 of the reactor 20 by the transport gas supplied through the transport gas supply pipe 12 and the transport pipe 11, and the vapor precursor is transported to the oxygen supply pipe 22. It is mixed with oxygen supplied through to synthesize the metal oxide hollow nanoparticles through the pyrolysis of the gas phase precursor in the reactor and the oxidation reaction of oxygen as a reactive gas.

The metal oxide hollow nanoparticles synthesized as described above are sent to the collector 30 to condense and collect, thereby preparing the metal oxide hollow nanoparticles.

Hereinafter, the present invention will be described in more detail with reference to Examples.

(Example 1)

 In this embodiment, the metal oxide hollow nanoparticle manufacturing apparatus of FIG. 1 was used.

After 3 g of iron (III) acetylacetonate was placed in the evaporator of FIG. 1, the precursor was vaporized by maintaining the temperature in the vaporizer at 200 ^° C., considering that the boiling point of iron acetylacetonate was 183 ^° C.

The vaporized precursor is transferred to a reactor using helium, which is a transporting gas, and thermally decomposed and reacted with oxygen to induce an oxidation reaction to synthesize iron oxide hollow nanoparticles, and observe the synthesis mechanism thereof. Shown in

At this time, the reaction temperature and the reaction pressure were changed in the range of 700 ~ 900 ^° C and 200 ~ 600 mbar, respectively.

The hollow nanoparticles synthesized as described above were condensed and collected in a collector to prepare the iron oxide hollow nanoparticles.

The iron nanoparticles prepared as described above were examined for phase, crystal size, particle size distribution, and the presence of hollow, and the results are shown in Table 1 below.

In addition, TEM photographs of the iron oxide hollow nanoparticles were observed, and the results are shown in FIGS. 3A, 3B, and 3C, and the HREM photographs of FIG. 3B were observed. It is shown in (d) of FIG. 3, and the X-ray diffraction pattern was observed, and the result was shown to FIG. 4 (a), (b), (c).

(A), (b) and (c) of FIG. 3 indicate that the reaction was carried out at a reaction temperature of 700 ^o C, 800 ^o C, and 900 ^o C, respectively, and FIGS. 4 (a), (b) and (c). ) ^Represents the reaction at a reaction temperature of 700 ^o C, 800 ^o C, and 900 ^o C, respectively.

Reaction temperature ( ^o C) Phase Crystal size (nm) Particle size distribution (nm) Precursor Hollow 700 α-Fe ₂ O ₃ γ-Fe ₂ O ₃ Fe ₃ O ₄ 10 21 21 ≤35 Fe (C ₅ H ₇ O ₂ ) ₃ O 800 β-Fe ₂ O ₃ 13 ≤20 Fe (C ₅ H ₇ O ₂ ) ₃ O 900 β-Fe ₂ O ₃ γ-Fe ₂ O ₃ 18 19 ≤20 Fe (C ₅ H ₇ O ₂ ) ₃ O

As shown in FIG. 2, in the case of preparing the metal oxide hollow nanoparticles according to the present invention, the hollow particles are formed by the correlation between the decomposition rate of the acetylacetonate group of the precursor and the nucleation and growth rate at the droplet surface in the reactor. It can be seen that the structure is formed.

As shown in Table 1 and Figure 3, it can be seen that the iron oxide nanoparticle size distribution prepared according to the present invention exists in the range of 35nm or less.

In addition, as can be seen in Figure 3 (d) showing a high magnification photograph of Figure 3 (b), the iron oxide hollow nanoparticles prepared in accordance with the present invention is a 2-3 shell having a thickness of 3-5 nm It was confirmed that each shell had a different crystal orientation.

In addition, as shown in Table 1 and Figure 4, it can be seen that the iron oxide hollow nanoparticles exhibit various crystal phases and average crystal size according to the reaction temperature conditions.

(Comparative Example)

Iron oxide nanoparticles were prepared in the same manner as in Example 1 except for using iron pentacarbonyl (Fe (CO) ₅ ) as a precursor.

At this time, the reaction temperature was 900 ^° C.

X-ray diffraction patterns and TEM images were observed for the iron oxide nanoparticles prepared as described above, and the results are shown in FIGS. 6 (a) and 6 (b), respectively.

As shown in FIG. 6, when the iron oxide nanopowder was prepared using iron pentacarbonyl, the nanoparticles were composed of crystalline phases of α-Fe ₂ O ₃ and γ-Fe ₂ O ₃ , but the hollow structure did not appear. have.

From the above results, it can be seen that the hollow structure of the hollow nanoparticles of iron oxide of the present invention is formed as shown in FIG.

(Example 2)

Titanium (IV) oxide acetylacetonate is used as the precursor, the vaporization temperature is 220 ^o C (melting point: 200 ^o C), and the reaction temperature and the reaction pressure are 900 ^o C and 400 mbar, respectively. Titanium dioxide hollow nanoparticles were prepared in the same manner as in Example 1 except for setting the same.

X-ray diffraction patterns and TEM images were observed for the titanium dioxide hollow nanoparticles prepared as described above, and the results are shown in FIGS. 7A and 7B, respectively.

As shown in FIG. 7 (a), it can be seen that the synthesized titanium dioxide nanopowder is a mixture of the anatase phase and the rutile phase, and the ratio of the two crystal phases is the anatase phase: rutile phase = 4: 6 and the volume ratio of the rutile phase It can be seen that is greater than

The average crystal size was calculated from the Scherrer equation. The anatase phase was 19 nm and the rutile phase was 24 nm.

In addition, as shown in Figure 7 (b), it can be seen that the synthesized titanium dioxide nanoparticles have a hollow structure, the particle size is in the particle size distribution range of 40 nm or less.

(Example 3)

Using aluminum acetylacetonate (Titanium (IV) oxide acetylacetonate) as a precursor, the vaporization temperature is set to 330 ^o C (melting point: 315 ^o C), and the reaction temperature is changed from 850 ^o C to 1000 ^o C, Aluminum oxide hollow nanoparticles were prepared in the same manner as in Example 1, except that the reaction pressure was 400 mbar.

X-ray diffraction patterns and TEM images were observed for the aluminum oxide hollow nanoparticles prepared as described above, and the results are shown in FIGS. 8 (a) and 8 (b), respectively.

As shown in Figure 8 (a), the aluminum oxide nano powder synthesized at the reaction temperature conditions of 850 ^o C, 900 ^o C, 950 ^o C, and 1000 ^o C is composed of δ-Al ₂ O ₃ phase, and As shown in Figure 8 (b), the synthesized aluminum oxide particles are made of a hollow structure, it can be seen that the particle size is within the particle size distribution range of 20 nm or less.

As described above, according to the present invention, hollow particles can be produced more simply by utilizing the thermal decomposition characteristics of the precursor itself, which does not depend on the type of the process.

In addition, according to the present invention, metal oxide hollow nanoparticles having a fine average particle size of 100 nm or less, particularly 50 nm or less, and a particle size distribution in a very narrow range can be manufactured. Given the size granularity, new applications can be explored as properties change.

In addition, the hollow nanoparticles of the present invention can impart electronic and chemical properties in addition to the specific surface area and optical properties of the hollow nanoparticles of the present invention, compared to the conventional hollow particles, which are mainly used in transport or catalyst fields based on low density and wide specific surface area. Therefore, it is more suitable for the application to the advanced field using so-called nanotechnology.

In particular, considering that there are more than 60 kinds of metal acetylacetonates used in the industrial field, the process proposed in the present invention can produce various metal oxide hollow nanoparticles. Overcome the limitations of kind.

Claims (14)

In the method for producing metal oxide hollow nanoparticles by chemical vapor condensation process, Preparing a metal acetylacetonate that is a precursor; Vaporizing the metal acetylacetonate prepared as above at a temperature above its melting point; Transferring the vaporized metal acetylacetonate to the reaction zone as described above; As described above, the metal acetylacetonate in the gaseous phase transferred to the reaction zone was thermally decomposed at a reaction temperature of 700 to 1500 ^° C. and a reaction pressure of 600 mbar or less, and the metal oxide hollow nanoparticles were synthesized through reaction with oxygen. step; And Method for producing a metal oxide hollow nanoparticles comprising the step of condensing and collecting the metal oxide hollow nanoparticles of the gas phase synthesized as described above The method of claim 1 wherein the metal acetylacetonate is Iron (III) acetylacetonate, Aluminum acetylacetonate, Titanium (IV) acetylacetonate, Ce (III) acetylacetonate (Cerium) (III) acetylacetonate, hydrate, chromium (III) acetylacetonate, cobalt (II) acetylacetonate, copper (II) acetylacetonate (Copper (II) acetylacetonate, gallium (III) acetylacetonate, manganese (III) acetylacetonate, iron (II) acetylacetonate, magnesium Acetylacetonate (hydrate), barium acetylacetonate (hydrate), beryllium acetylacetonate, cadmium acetylacetonate (hydrate) Calcium acetylacetonate, Cesium acetylacetonate, Indium (III) acetylacetonate, Iridium (III) acetylacetonate, Lanthanum Lanthanum acetylacetonate (hydrate), lead (II) acetylacetonate, lithium acetylacetonate, manganese (II) acetylacetonate, Manganese (II) acetylacetonate, Nickel (II) acetylacetonate, Palladium (II) acetylacetonate, Platinum (II) acetylacetonate, Rhodium (III) acetylacetonate (Rhodium (III) ) acetylacetonate), rubidium acetylacetonate, ruthenium (III) acetylacetonate, silver acetylacetonate, vanadium (I) II) acetylacetonate (Vanadium (III) acetylacetonate), vanadyl acetylacetonate, yttrium (III) acetylacetonate (hydrate), zinc acetylacetonate hydrate, And zirconium (IV) acetylacetonate (Zirconium (IV) acetylacetonate) is one kind selected from the group consisting of metal oxide hollow nano particles The method of claim 1, wherein the metal acetylacetonate is prepared in powder form. The method of claim 1, wherein the metal acetylacetonate is prepared in the form of a slurry by dissolving in an organic solvent. The method of claim 4, wherein the organic solvent is isopropyl alcohol, ethyl alcohol, methyl alcohol and acetone Method for producing a metal oxide hollow nanoparticles, characterized in that one selected from the group consisting of nucleic acids The method for producing metal oxide hollow nanoparticles according to claim 5, wherein the concentration of the metal acetylacetonate in the slurry is 0.1M to 0.5M. The method for producing metal oxide hollow nanoparticles according to any one of claims 1 to 6, wherein the vaporization is carried out at a melting point + 20-30 占 폚 to a boiling point + 20-30 占 폚. delete delete The method of claim 1, wherein the average particle diameter of the metal oxide hollow nanoparticles is 100nm or less. The method of claim 10, wherein the average particle diameter of the metal oxide hollow nanoparticles is 50 nm or less. The method of claim 10, wherein the metal oxide is iron oxide; And the particle size distribution range is 35 nm or less. The method of claim 10, wherein the metal oxide is titanium dioxide; And the particle size distribution range is 40 nm or less. The method of claim 10, wherein the metal oxide is aluminum oxide; And the particle size distribution range is 20 nm or less.

Images