KR100645903B1 - A Resonator Manufacturing method - Google Patents

A Resonator Manufacturing method Download PDF

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KR100645903B1
KR100645903B1 KR1020000066566A KR20000066566A KR100645903B1 KR 100645903 B1 KR100645903 B1 KR 100645903B1 KR 1020000066566 A KR1020000066566 A KR 1020000066566A KR 20000066566 A KR20000066566 A KR 20000066566A KR 100645903 B1 KR100645903 B1 KR 100645903B1
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acoustic wave
surface acoustic
electrode
wave resonator
forming
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KR1020000066566A
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Korean (ko)
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KR20020036405A (en
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이광렬
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엘지이노텍 주식회사
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/007—Manufacturing frequency-selective devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

본 발명은 정보통신 분야의 각종 필터로 사용되는 표면탄성파 공진기에 관한 것으로서,The present invention relates to a surface acoustic wave resonator used as various filters in the information and communication field,

압전 폴리머 상에 적어도 1개 이상의 전극과 반사기를 형성시키는 제1 단계와, 상기 제1 단계에서 형성된 전극에서 입력 및 출력 단자를 인출시키는 제2 단계와, 상기 제1 및 제2 단계를 통해 전극과 반사기, 단자가 모두 형성된 압전 폴리머를 롤 형태로 형성하여 표면탄성파 공진기를 완성하는 제3 단계를 포함하여 이루어지므로, 초소형이면서 표면탄성파 필터의 이용 분야를 더욱 확대시킬 수 있는 효과를 제공하게 된다.
A first step of forming at least one electrode and a reflector on the piezoelectric polymer, a second step of drawing input and output terminals from the electrode formed in the first step, and an electrode through the first and second steps; Since the third step of forming the surface acoustic wave resonator by forming the piezoelectric polymer formed with both the reflector and the terminal in the form of a roll is provided, it provides an effect of further expanding the field of use of the ultra-small surface acoustic wave filter.

표면탄성파 공진기, 표면탄성파 필터, 압전 폴리머, 전극과 반사기Surface acoustic wave resonators, surface acoustic wave filters, piezoelectric polymers, electrodes and reflectors

Description

롤형 표면탄성파 공진기의 제조방법{A Resonator Manufacturing method} Method for manufacturing roll type surface acoustic wave resonator {A Resonator Manufacturing method}             

도 1은 본 발명에 따른 롤형 표면탄성파 공진기의 제조 방법이 공정순으로 도시된 도면이다.1 is a view showing a method of manufacturing a roll-type surface acoustic wave resonator according to the present invention in the order of process.

<도면의 주요 부분에 관한 부호의 설명><Explanation of symbols on main parts of the drawings>

10 : 압전 폴리머 11 : 전극10 piezoelectric polymer 11 electrode

13, 14 : 입력 및 출력단자 20 : 롤형 표면탄성파 공진기
13, 14: input and output terminal 20: roll type surface acoustic wave resonator

본 발명은 정보통신 분야의 각종 필터로 사용되는 표면탄성파 공진기에 관한 것으로서, 특히 압전 폴리머를 이용하여 1개 이상의 표면탄성파 필터를 설치하여 롤 형태로 공진기를 형성한 후에 전극만 단자용으로 인출하여 초소형이면서 SAW 필터의 이용 분야를 더욱 확대시킬 수 있는 롤형 표면탄성파 공진기의 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to surface acoustic wave resonators used as various filters in the field of information and communication. In particular, one or more surface acoustic wave filters are installed using piezoelectric polymers to form a resonator in a roll form, and then only the electrode is drawn out for the terminal, thereby miniaturizing. In addition, the present invention relates to a method for manufacturing a roll type surface acoustic wave resonator that can further expand the field of application of SAW filters.

일반적으로, 공진기(Resonator)란특정의 주파수에서 공진하는 기능을 가진 소자로써 특정의 주파수를 가진 전기신호를 만들어 내는 것으로 사용된다. In general, a resonator is a device having a function of resonating at a specific frequency and is used to generate an electric signal having a specific frequency.

특히, 표면탄성파 공진기는 표면탄성파 필터와 달리 압전 기판 상에 전극과 반사기를 형성시키고 전극에서 발생하는 표면탄성파 내에 희망의 주파수 특성만이 반사기에 의해 공진하는 것을 이용해 공진기로써 기능을 갖는다. In particular, the surface acoustic wave resonator functions as a resonator by using an electrode and a reflector on a piezoelectric substrate, unlike the surface acoustic wave filter, and resonating only a desired frequency characteristic by the reflector in the surface acoustic wave generated from the electrode.

종래 경우에는 반도체 기판인 실리콘(Si)이나 갈륨비소(GaAs)에 압전 유전체 물질인 ZnO, AlN을 RF 스퍼터링(Sputtering)으로 증착하여 압전 특성으로 인한 공진을 유발하도록 형성하고 있다. Conventionally, ZnO and AlN, which are piezoelectric dielectric materials, are deposited on silicon (Si) or gallium arsenide (GaAs), which are semiconductor substrates, by RF sputtering to form resonance due to piezoelectric properties.

그런데, 종래에는 표면탄성파 공진기의 형태가 일정하게 한정되어 있어 표면탄성파 필터의 이용 분야가 국한되게 되고, 표면탄성파 공진기의 소형화에도 한계가 발생한다는 문제점이 있다.
However, in the related art, the form of the surface acoustic wave resonator is constantly limited, thereby limiting the field of use of the surface acoustic wave filter, and there is a problem in that the miniaturization of the surface acoustic wave resonator occurs.

본 발명은 상기한 종래 기술의 문제점을 해결하기 위하여 안출된 것으로서, 그 목적은 압전 폴리머에 전극과 반사기를 형성시키고 롤 형태로 형성한 후에 전극만 단자용으로 인출하여 표면탄성파 공진기를 형성함으로써 초소형이면서 표면탄성파 필터의 이용분야를 더욱 확대시킬 수 있는 롤형 표면탄성파 공진기의 제조방법을 제공하는데 있다.
The present invention has been made to solve the above-mentioned problems of the prior art, the object of which is to form a surface acoustic wave resonator by forming the surface acoustic wave resonator by drawing the electrode and the reflector in the piezoelectric polymer and then forming the roll form only the electrode It is to provide a method of manufacturing a roll surface acoustic wave resonator that can further expand the field of application of the surface acoustic wave filter.

상기한 과제를 해결하기 위한 본 발명에 의한 의 특징에 따르면, 압전 폴리 머 상에 적어도 1개 이상의 전극과 반사기를 형성시키는 제1 단계와, 상기 제1 단계에서 형성된 전극에서 입력 및 출력 단자를 인출시키는 제2 단계와, 상기 제1 및 제2 단계를 통해 전극과 반사기, 단자가 모두 형성된 압전 폴리머를 롤 형태로 형성하여 표면탄성파 공진기를 완성하는 제3 단계를 포함하여 이루어진다.
According to a feature of the present invention for solving the above problems, a first step of forming at least one electrode and a reflector on the piezoelectric polymer, and withdraw the input and output terminals from the electrode formed in the first step And a third step of completing the surface acoustic wave resonator by forming a piezoelectric polymer in which the electrode, the reflector, and the terminal are formed in a roll shape through the first and second steps.

이하, 본 발명의 바람직한 실시예를 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 1은 본 발명에 따른 롤형 표면탄성파 공진기의 제조 방법이 공정순으로 도시된 도면으로서 본 발명은, 먼저 압전 폴리머(10)의 표면에 전극(11)을 형성시키고 그 전극(11)의 하부에 홀수층의 오코스틱 임피던스 물질의 반사기를 형성시키게 된다.(a 공정)1 is a view illustrating a method of manufacturing a roll type surface acoustic wave resonator according to the present invention in order of the present invention. This will form a reflector of the ohmic impedance material in the layer (step a).

다음에, 상기 압전 폴리머(10) 표면에 형성되어 있는 전극에서 입력 및 출력 단자(13, 14)를 각각 인출시키고(b 공정), 이렇게 전극(11) 및 반사기, 단자(13, 14)가 모두 형성된 압전 폴리머(10)를 롤(Roll) 형태로 말아서 표면탄성파 공진기(20)를 완성하게 된다.(c 공정)Next, the input and output terminals 13 and 14 are drawn out from the electrodes formed on the surface of the piezoelectric polymer 10 (step b), and thus the electrode 11, the reflector and the terminals 13 and 14 are all The formed piezoelectric polymer 10 is rolled in a roll form to complete the surface acoustic wave resonator 20 (step c).

이때, 롤형 표면탄성파 공진기(20)는 압전 폴리머(10) 표면에 여러 개의 전극 및 반사기를 형성시켜 다중 공진기 형태로 제조될 수도 있다. In this case, the roll type surface acoustic wave resonator 20 may be manufactured in the form of multiple resonators by forming a plurality of electrodes and reflectors on the surface of the piezoelectric polymer 10.

이렇게 하여, 본 발명에 의한 롤형 표면탄성파 공진기(20)는 기존 표면탄성파 공진기에 비해 초소형으로 제조되며, 그 이용분야도 더욱 확대되게 된다.
In this way, the roll type surface acoustic wave resonator 20 according to the present invention is manufactured in a very small size compared to the existing surface acoustic wave resonator, and its use field is further expanded.

상기와 같이 구성되는 본 발명의 롤형 표면탄성파 공진기의 제조방법은 압전 폴리머에 전극과 반사기를 형성시키고 롤 형태로 형성한 후에 전극만 단자용으로 인출하여 표면탄성파 공진기를 형성함으로써 초소형이면서 표면탄성파 필터의 이용분야를 더욱 확대시킬 수 있는 효과가 있다.In the method for manufacturing a roll type surface acoustic wave resonator of the present invention configured as described above, an electrode and a reflector are formed on a piezoelectric polymer, and after forming a roll shape, only the electrode is drawn out for the terminal to form a surface acoustic wave resonator. There is an effect that can further expand the field of use.

Claims (1)

압전 폴리머 상에 적어도 1개 이상의 전극과 반사기를 형성시키는 제1 단계와, 상기 제1 단계에서 형성된 전극에서 입력 및 출력 단자를 인출시키는 제2 단계와, 상기 제1 및 제2 단계를 통해 전극과 반사기, 단자가 모두 형성된 압전 폴리머를 롤 형태로 형성하여 표면탄성파 공진기를 완성하는 제3 단계를 포함하여 이루어진 것을 특징으로 하는 롤형 표면탄성파 필터의 제조방법.A first step of forming at least one electrode and a reflector on the piezoelectric polymer, a second step of drawing input and output terminals from the electrode formed in the first step, and an electrode through the first and second steps; And forming a piezoelectric polymer having both a reflector and a terminal in the form of a roll to complete the surface acoustic wave resonator.
KR1020000066566A 2000-11-09 2000-11-09 A Resonator Manufacturing method KR100645903B1 (en)

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