KR100634213B1 - Driving head and personal atomic force microscope having the same - Google Patents

Abstract

The present invention relates to a driving head and a personal atomic force microscope having the same, comprising a cantilever for providing a bending detection part, a driving head for moving the probe up and down, and a scanner for moving a sample in the x and y axis directions. Include. The cantilever has a simple structure having a bending detection unit, and the driving head and the scanner have a large displacement width by bidirectional displacement and elasticity of the flexible hinge. Since the personal atomic force microscope of the present invention has high linearity, hysteresis and creep hardly occur. Therefore, a separate sensor system for calibration is not required, and the desired image can be obtained through one initial calibration.

Atomic force microscope, cantilever, drive head, flexible hinge, scanner

Description

Driving head and personal atomic force microscope having the same {Driving head and personal atomic force microscope having the same}

1 is a cross-sectional view for explaining a drive head according to the present invention.

2 is a schematic view for explaining the operation of the drive head according to the present invention;

3 is a detailed view of the flexible hinge shown in FIG.

4 is a schematic view for explaining an atomic force microscope according to the present invention.

5 to 7 are plan views for explaining the scanner shown in FIG.

FIG. 8 is a cross-sectional view for explaining a voice coil motor VCM for moving a stage shown in FIG. 6.

Figure 9 is a graph showing the hysteresis measurement results of personal atomic force microscope according to the present invention.

10 is a surface photograph of a lattice sample obtained with a personal atomic force microscope according to the present invention.

FIG. 11 is a cross-sectional view taken along the A1-A2 portion of FIG. 10; FIG.

<Explanation of symbols for the main parts of the drawings>

1: probe 2: cantilever

3: bending detection part 4: control part

5: voltage generator 6: actuator

7: head 8: absence

9: sample 10: scanner

11: flexible hinge 12, 30: yoke

13, 33: magnet 14, 31: coil

15: support 20: frame

21: first opening 22: second opening

23: stage 24: third opening

25: flexible hinge 26: hole

32: movement axis

The present invention relates to a driving head and a personal atomic force microscope having the same, and more particularly, to a driving head having a large displacement width capable of both up and down displacement and a personal atomic microscope including the same.

The Scanning Probe Mircoscope (SPM), which can measure nanometer-level surface shapes and properties, plays an important role along with active research in the field of nanotechnology (NT). ) And the like.

STM includes a pointed probe. When the probe is brought close to the surface of the conductor sample and voltage is applied to the probe and the sample, electrons penetrate through the energy wall and the current flows when the gap between the two conductors is very small. This is called a quantum mechanical tunneling phenomenon. On the other hand, if the distance between the probe and the sample is far, the tunneling probability of the electron is sharply lowered, and the current is drastically reduced. At this time, the driver adjusts the height of the probe so that a constant current flows through the probe, and measures the surface of the sample while moving the probe from side to side and back and forth. STM has the disadvantage of not being able to measure electrically nonconducting samples.

In contrast, AFM (hereinafter referred to as atomic force microscope) has the advantage of being able to measure non-conducting samples.

The atomic force microscope includes a rod-shaped cantilever that can be easily bent up and down by minute force, and a probe installed at the end of the cantilever. When the probe approaches the sample surface, a force (pulling force) or a pushing force (repulsive force) is applied between the atoms at the tip of the probe and the atoms at the sample surface. Various methods have been proposed as a method for measuring the deflection of the cantilever generated at this time.

There is a method in which light is irradiated to the cantilever and the angle of the light reflected by the cantilever is detected through a photodiode to maintain a constant distance between the probe and the sample ("Method of controlling probe microscope", US Patent No. .5,955,660, Seiko Instrument), ("Method and apparatus for measuring characteristics of surface using electrostatic force modulation microscopy which operats in contact mode", US Patent No. 6,185,991, PSIA corp., 2001).

To detect the deflection of the cantilever, techniques have been developed that incorporate sensors in the cantilever ("Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement", J. Thaysen et al., Sensor and Actuators 83 (2000) , pp 47-53), ("Self-exciting and self-detecting probe and scanning probe apparatus", US patent No. 6,422,069, 2002, Seiko instruments Inc.).

Although the resolution is lower when the sensor is mounted on the cantilever than when the laser diode and the photo diode are used, alignment and measurement are easy. However, since the conventional atomic force microscope configured as described above uses a piezoelectric driver for driving in the z direction or the x and y directions, hysteresis or creep occurs due to the characteristics of the piezoelectric driver, and x Candidate crystals are a necessity due to the curved linear motion occurring when scanning in the axial and y-axis directions. As such, the conventional atomic force microscopes are complicated because they have an optical structure using a laser diode and a photo diode, and have nonlinearity due to problems such as hysteresis and creep due to the use of a piezoelectric driver. Therefore, an additional system is required to solve the problems caused by nonlinearity and manufacturing costs are high.

SUMMARY OF THE INVENTION An object of the present invention is to provide a driving head capable of both up and down displacements and having a large displacement width.

Another object of the present invention is to provide a personal atomic force microscope having a simple structure and low manufacturing cost.

The drive head according to the present invention for achieving the above object includes a flexible hinge having an elastic portion in a predetermined portion; A support for supporting the flexible hinge and transmitting a predetermined force to the elastic portion of the flexible hinge; A yoke connected to the flexible hinge at a position corresponding to the support; A magnet protruding from the yoke in one direction; It is characterized in that it comprises a coil is fixed on the support and provided in a form overlapping with the magnet.

In addition, a personal atomic microscope according to the present invention for achieving the above object is a probe located on the sample; A cantilever for moving the probe; A warpage detector for changing electrical conductivity depending on the degree of warpage of the cantilever; A control unit for outputting a control signal in accordance with the electrical conductivity provided from the bending detection unit; A driving head for moving the cantilever up and down to maintain a constant distance between the probe and the sample according to the control signal; And a scanner for moving the sample, wherein the drive head is connected to the cantilever and has a flexible hinge having an elastic portion in a predetermined portion; A support for supporting the flexible hinge and transmitting a predetermined force to the elastic portion of the flexible hinge; A yoke connected to the flexible hinge at a position corresponding to the support; A magnet protruding from the yoke in one direction; It is characterized in that it comprises a coil is fixed on the support and provided in a form overlapping with the magnet.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are provided to those skilled in the art to fully understand the present invention, and may be modified in various forms, and the scope of the present invention is not limited to the embodiments described below. .

1 is a cross-sectional view for explaining a driving head according to the present invention.

1, the drive head according to the present invention includes a flexible hinge (11) having an elastic portion in a predetermined portion; A support 15 for supporting the flexible hinge and transmitting a predetermined force to the elastic portion of the flexible hinge; A yoke 12 connected to the flexible hinge at a position corresponding to the support; A magnet 13 protruding from the yoke in one direction; It is configured to include a coil 14 is fixed on the support and provided in a form overlapping with the magnet.

Here, the support 15 and the flexible hinge 11 may be formed of an aluminum alloy, and the like, a predetermined portion having elasticity in the flexible hinge 11 is formed to smooth the bending as shown, It is a groove (part A) formation area | region, such as V type | mold and U type | mold.

At this time, in Figure 1 is shown a predetermined portion (elastic portion) having the elasticity of the flexible hinge 11 is formed at the bottom of the flexible perception 11 is connected to the support 15, this is one embodiment However, the present invention is not limited thereto, and an elastic part having a groove shape, such as the portion A, may be formed in a predetermined region of the body of the flexible hinge 11.

In addition, the magnet 13 provided in the yoke is composed of a permanent magnet in the form of a rod or cylinder, the coil 14 is a circular, square, etc. that can be located inside or outside the magnet 13 Is formed in an empty barrel shape, and overlaps with the magnet.

In FIG. 1, the coil 14 is located inside the magnet 13, and the coil 14 and the magnet 13 serve as a voice coil motor (VCM). Done.

That is, the Lorentz force F is generated in a specific direction by the coil 14 and the magnet 13, and the Lorentz force is directed upward or downward on the support 15 provided with the coil 14. Let's move on.

The operation of the drive head having such a configuration will be briefly described as follows. That is, when a predetermined current I flows through the coil 14, the direction of the magnetic field B formed by the magnet 13 is perpendicular to the direction of the current I flowing through the coil 14. As a result, a Lorentz force F is generated, and the support 15 provided with the coil 14 moves upward or downward by the Lorentz force.

The force generated in the up and down direction by the movement of the support 15 is transmitted to the flexible hinge 11 connected to the support 15, which is the elastic portion (A) of the flexible hinge 11 When the flexible hinge 11 is moved left and right by elasticity, and the object is connected to the end of the support 15, for example, the cantilever 2, the cantilever 2 is lower or lower. Will move to the top.

That is, the driving head may be provided in a personal atomic microscope, in which case a cantilever 2 for moving the probe 1 positioned on the sample is provided at the end of the support 15 so that the cantilever 2 is provided. You can move up and down.

Hereinafter, the operation of the driving head will be described in more detail with reference to FIGS. 2 and 3.

FIG. 2 is a schematic view for explaining the operation of the driving head according to the present invention, which is a cross-sectional view of a part serving as a voice coil motor (VCM), and FIG. 3 is a detailed view of the flexible hinge shown in FIG.

Referring to FIG. 2, the voice coil motor provided in the driving head according to the present invention includes a yoke 12, the magnet 13 provided in the yoke 12, and an inside or an outside of the magnet 13. It consists of a coil 14 positioned and a support 15 provided with said coil.

However, in FIG. 2, unlike FIG. 1, the coil 14 is positioned to surround the outside of the magnet 13, but this is only an example.

When the current I flows through the coil 14 in a state in which the magnetic field B is formed by the magnet 13, the direction of the magnetic field B formed by the magnet 13 and the coil 14 pass through the coil 14. The direction of the flowing current I becomes vertical and the Lorentz force F is generated. The Lorentz force (F) generated at this time is dependent on the magnetic flux density (B), the current (I), the number of turns (n) of the coil 14, and the effective length (L _e ) obtained at the part (space) of the yoke 12. It is determined by the following equation (1).

F = n BIL _e

Here, the magnetic flux density (B) obtained by the magnet circuit is complicated and the calculation process is well known, and is well known through the driving principle of the voice coil motor.

That is, referring to FIG. 1, when the support 15 provided with the coil 14 moves upward by the force F, the flexible hinge 11 connected to the support 15 is accordingly moved. Due to the elasticity of the elastic portion A, the flexible hinge 11 is bent to the right, whereby the support 15 to which the flexible hinge 11 is fixed is driven downward, and consequently connected to the support 15. The cantilever 2 is moved downward.

On the contrary, when the support 15 provided with the coil 14 moves downward by the force F, the flexible hinge 11 connected to the support 15 is elastic part A. Due to the elasticity of the flexible hinge 11 is bent to the left, the support 15 to which the flexible hinge 11 is fixed is driven to the top, as a result the cantilever 2 connected to the support 15 Will move to the top.

Here, the flexible hinge 11 shown in FIG. 3 may be designed through the following Equations 2 to 6 representing the relationship between the force and the displacement applied by the movement of the support 15.

)는 하기의 수학식 2와 같다.Deformation angle of the flexible hinge 11 (

) Is as shown in Equation 2 below.

Where t <R <5t

The correction factor ( k ) is given by Equation 3 below.

k = 0.565t / R + 0.166

Maximum moment of inertial ( M _max ) is given by Equation 4 below.

:

:

Stress concentration factor ( k _t ) is expressed by Equation 5 below.

)는 하기의 수학식 6을 통해 얻을 수 있다. 그러나 탄성범위 내에서만 구동되어야 하므로 최대 응력값에서 0.1 ~ 0.3의 안전계 수를 설정하여 설계한다. Where the maximum deformation angle (

) Can be obtained through Equation 6 below. However, since it should be driven only within the elastic range, design by setting a safety factor of 0.1 ~ 0.3 at the maximum stress value.

As can be seen through the equations (2) to (6), the thickness (b), width (H), and radius (R) of the groove (A portion) of the flexible hinge 11 shown in FIG. Therefore, it is necessary to set the value to fit the required deformation angle and displacement.

4 is a schematic diagram for explaining a personal atomic force microscope having a driving head according to the present invention configured as shown in FIG.

The personal atomic force microscope according to the present invention has a probe 1 positioned on a sample 9, a cantilever 2 for moving the probe 1, and a degree of warpage of the cantilever 2 as shown in FIG. 4. And a control unit 4 for outputting a control signal according to the electric conductivity provided from the warp detecting unit 3 and the probe 1 and the control signal according to the control signal. It comprises a drive head (7) for moving the cantilever (2) up and down in order to maintain a constant distance between the sample (9), the drive head (7) described above with reference to FIGS. Characterized in that it is implemented as a drive head.

The sample 9 is located on the scanner 10 and is moved in the x and y axis directions by the scanner 10. A member 8 may be provided between the driving head 7 and the cantilever 2 to position the cantilever 2 at a predetermined inclination.

The bending detection unit 3 detects the degree to which the cantilever 2 is deformed by a force acting between the probe 1 and the sample 9. A change in resistance, that is, electrical conductivity, is shown depending on the degree of deformation of the cantilever 2. The bending detection unit 3 may be formed by forming a layer doped with ions having piezo resistive characteristics on the cantilever 2 or by attaching a material having piezoelectric resistance characteristics to the outside of the cantilever 2. Can be.

The controller 4 is composed of a voltage generator 5 for outputting a voltage signal according to the electrical conductivity and an actuator 6 for outputting the control signal having a predetermined current amount in accordance with the voltage signal. The voltage generator 5 may be configured as a digital signal processor (DSP).

As shown in FIG. 1, the driving head 7 includes a flexible hinge 11 having one end connected to the cantilever 2 and having an elastic part at a predetermined portion; A support 15 for supporting the flexible hinge and transmitting a predetermined force to the elastic portion of the flexible hinge; A yoke 12 connected to the flexible hinge at a position corresponding to the support; A magnet 13 protruding from the yoke in one direction; It is configured to include a coil 14 is fixed on the support and provided in a form overlapping with the magnet.

5 to 7 are plan views illustrating the scanner 10 illustrated in FIG. 4.

As illustrated in FIGS. 5 to 7, the scanner 10 includes a first opening 21 having a rectangular shape formed at the center and a second opening 22 having a rectangular shape formed at each corner of the first opening 21. In the frame 20 (see FIG. 5), in the first opening 21, in the square-shaped stage 23 in which the specimen 9 is located, and in the second opening 22, respectively. The two opposite corner portions, that is, the lower right corner portion and the upper left corner portion are connected to the stage 23 and the frame 20, and the third opening portion 24 has a rectangular shape at the center thereof. ) Are formed flexible hinges 25 (see FIGS. 6 and 7). FIG. 7 is a detailed view of the portion B shown in FIG. 6.

Here, the flexible hinge 25 is spaced apart from the frame 20 outside the second opening 22 by a predetermined interval, as shown in Figure 7, the first to fourth flexible hinge portions 25a, which are connected to each other at four portions of the sides. 25b, 25c, 25d, each flexible hinge portion 25a, 25b, 25c, 25d is preferably designed in the same manner as the flexible hinge 11 of the drive head 7 described above.

That is, the width of the end of the flexible hinge portion is formed narrower than the center portion so that the flexible hinge portions 25a, 25b, 25c, 25d can be smoothly rotated, it is preferable that the elastic portion is provided at the end.

To this end, a plurality of circular holes 26 may be formed at the ends of the flexible hinges as shown in FIG.

The stage 23 moves in the x-axis and y-axis directions by a voice coil motor (VCM) or the like, and constitutes the flexible hinge 25 in accordance with the x-axis and y-axis movement of the stage 23. The fourth flexible hinge portions 25a, 25b, 25c, and 25d face each other and are rotated in the y-axis and x-axis directions, respectively, as shown in FIG.

That is, the first flexible hinge portion 25a and the third flexible hinge portion 25c which are positioned on the upper and lower sides of the second opening 22 and face each other are y-axised by the movement of the stage 23 as shown. Direction, and the second flexible hinge portion 25b and the fourth flexible hinge portion 25d positioned at the left and right sides facing each other rotate in the x-axis direction by the movement of the stage 23 as shown. .

As shown in FIG. 8, the voice coil motor VCM is provided with a yoke 30 positioned below the stage 23 and two pairs of magnets 33 attached to the yoke 30 and disposed to face each other. And a coil 31 positioned to be perpendicular to the direction of the magnetic field formed between the magnets 33 and a moving shaft 32 fixed to the coil 31 and the stage 23. The direction of the magnetic field is determined by the two pairs of magnets 33, and the moving axis 32 connected to the coil 31 is the x axis according to the direction of the magnetic field and the direction of the current flowing through the coil 31. And the stage 23 is moved as it moves in the y axis direction.

For example, when the stage 23 moves in the x axis direction by a voice coil motor or the like, the second and fourth flexible hinge portions 25b and 25d of the flexible hinge 25 rotate, and the stage 23 is rotated. Is moved in the y axis direction, the first and third flexible hinge portions 25a, 25c of the flexible hinge 25 are rotated to move the specimen 9 in the x and y axis directions.

At this time, the rotation of the first to fourth flexible hinge portions 25a, 25b, 25c, and 25d constituting the flexible hinges 25 must be made with the same displacement (for example, 100 µm or more), so that the overall equilibrium is maintained. The elasticity of the flexible hinge 25 should be the same.

Accordingly, since the x and y axis rotations of the flexible hinge 25 serve as a guide to fix the movement path of the stage 23, the stage 23 is not twisted by the rotation of the flexible hinge 25. Will only move exactly on the x and y axes.

Then, the operation of the personal atomic force microscope according to the present invention configured as described above will be described.

The cantilever 2 is moved with the sample 9 to be measured on the stage 23 of the scanner 10 so that the probe 1 approaches the surface of the sample 9. When the probe 1 is close to the sample 9, a force is generated by the interaction between the probe 1 and the sample 9 as in a general atomic force microscope (AFM), and the generated force causes the The cantilever 2 is bent upwards.

At this time, since the bending degree of the cantilever 2 is represented by a change in electrical conductivity of the bending detection unit 3, the voltage generator 5 transmits a voltage signal according to the electrical conductivity to the actuator 6, The actuator 6 supplies a control signal having a current amount according to the voltage signal to the coil 14 of the drive head 7.

As a predetermined amount of current I flows through the coil 14, the direction of the magnetic field B formed by the magnet 13 is perpendicular to the direction of the current I flowing through the coil 14. Therefore, by the Lorentz force F, the support 15 provided with the coil 14 moves upwards or downwards, and the support is supported by the elasticity of the flexible hinge 11 connected to the support 15. The cantilever 2 connected to the end of 15 is moved downward or upward.

Through the feedback (feed back) of this process, the sample between the probe 1 and the sample 9, that is, the x-axis and y-axis movement by the scanner 10 while the height is kept constant (9) The whole surface is measured.

That is, the three-dimensional shape of the sample 9 is obtained by obtaining values of the z-axis according to the x-axis and y-axis positions.

The drive head of the present invention can be configured to be bi-directional displacement in accordance with the flow direction of the current and to maximize the displacement width by using the elasticity of the flexible hinge to the maximum. Therefore, when the driving head of the present invention is applied to a personal atomic force microscope, it has an improved displacement width in the height direction than the head of the conventional atomic force microscope.

In addition, since the scanner of the present invention has a symmetrical structure, it is insensitive to heat, vibration, and disturbance, and has the same dynamic characteristics in both directions, and almost no hysteresis or creep occurs, thereby causing distortion of the image along the scanning direction. In addition, since the elasticity of the flexible hinge can be utilized to the maximum, it has an improved displacement width than the stage of the conventional atomic force microscope.

9 is a graph showing the hysteresis measurement results of the personal atomic force microscope according to the present invention.

The control voltage was changed from -10V to + 10V, and the displacement amount of the cantilever 2 was measured using a capacitive sensor manufactured by ADE.

Even if the direction of movement of the cantilever 2 changes with the change of the control voltage, the reproducibility hardly decreased, and the change of displacement amount with the change of time also hardly appeared. Therefore, since hysteresis and creep hardly occur compared to the head of the conventional atomic force microscope (AFM), the linearity is very high to obtain a desired image through one initial calibration, and the error range is reduced to about 1%. .

FIG. 10 is a surface photograph of a grating sample having a size of 5 μm obtained with a personal atomic force microscope according to the present invention, and FIG. 11 is a cross-sectional view taken along a portion A1-A2 of FIG. 10.

In measuring the height of 100 nm, it can be seen that a surface image can be obtained with a resolution of about 5 nm or less. The image acquisition rate is closely related to the band of the lowpass filter that reduces noise. Optimized for scanning speeds of around 1Hz.

As described above, the preferred embodiment of the present invention has been disclosed through the detailed description and the drawings. The terms are used only for the purpose of describing the present invention and are not used to limit the scope of the present invention as defined in the meaning or claims. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible from this. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

As described above, the personal atomic force microscope of the present invention includes a bend detection unit, a cantilever for moving the probe, a driving head for moving the cantilever up and down, and a scanner for moving the sample in the x and y axis directions. The cantilever has a simple structure having a bending detection unit, and the driving head and the scanner have a large displacement width by bidirectional displacement and elasticity of the flexible hinge.

Since the personal atomic force microscope of the present invention has high linearity, hysteresis and creep hardly occur. Therefore, a separate sensor system for calibration is not required, and the desired image can be obtained through one initial calibration.

Since the personal atomic force microscope of the present invention can be used on a lab basis in an existing system and a user environment, a user burden on system construction can be reduced. In addition, the cantilever, the driving head and the stage have a simple structure, so that they can be manufactured at low cost. It can be applied to the same step measuring device.

Claims (13)

A flexible hinge having an elastic portion at a predetermined portion; A support for supporting the flexible hinge and transmitting a predetermined force to the elastic portion of the flexible hinge; A yoke connected to the flexible hinge at a position corresponding to the support; A magnet protruding from the yoke in one direction; And a coil fixed to the support and provided in a form overlapping with the magnet. The method of claim 1, The elastic head of the flexible hinge is a drive head, characterized in that the groove forming area is formed to facilitate the bending. The method of claim 2, The groove is a drive head, characterized in that formed in the form of one of the shape of V or V. The method of claim 1, The elastic portion of the flexible hinge is a drive head, characterized in that formed on the lower end of the flexible perception connected to the support. The method of claim 1, The magnet provided in the yoke is a drive head, characterized in that consisting of a permanent magnet in the form of a rod or cylinder. The method of claim 1, The coil is configured to surround the inside or the outside of the magnet, so as to overlap the magnet drive head. A probe positioned on the sample; A cantilever for moving the probe; A warpage detector for changing electrical conductivity depending on the degree of warpage of the cantilever; A control unit for outputting a control signal in accordance with the electrical conductivity provided from the bending detection unit; A driving head for moving the cantilever up and down to maintain a constant distance between the probe and the sample according to the control signal; And A scanner for moving said sample, The drive head includes: a flexible hinge connected to the cantilever and having an elastic portion at a predetermined portion; A support for supporting the flexible hinge and transmitting a predetermined force to the elastic portion of the flexible hinge; A yoke connected to the flexible hinge at a position corresponding to the support; A magnet protruding from the yoke in one direction; Personal atomic microscope characterized in that it comprises a coil is fixed on the support and provided in a form overlapping with the magnet. The method of claim 7, wherein The bending detection unit is a personal atomic microscope, characterized in that the cantilever is formed of a layer doped with ions having a piezoelectric resistance. The method of claim 7, wherein The control unit includes a voltage generator for outputting a voltage signal according to the electrical conductivity; And And an actuator for outputting the control signal having a predetermined amount of current according to the voltage signal. The method of claim 7, wherein The scanner may include a frame having a first opening having a rectangular shape formed at a center thereof and a second opening having a rectangular shape formed at each corner of the first opening; A stage located in the first opening; And Located in the second opening, respectively, two opposite edges are connected to the stage and the frame, the center includes a flexible hinge having a third opening of the rectangular shape, And the flexible hinge parts constituting the flexible hinge rotate in the y and x axis directions, respectively, as the stage moves in the x and y axis directions. The method of claim 10, And the flexible hinge comprises first to fourth flexible hinge portions spaced apart from the frame outside the second opening by a predetermined distance and connected to four portions of each side. The method of claim 11, Personal atom microscope, characterized in that a plurality of circular holes are formed in the end so that the end width of the first to fourth flexible hinge portion is formed narrower than the central portion. The method of claim 10, The stage is moved in the x-axis and y-axis directions by a voice coil motor (VCM), and the first to fourth flexible hinges constituting the flexible hinge face each other in accordance with the x-axis and y-axis movement of the stage, respectively. A personal atomic microscope, which is rotated in the y- and x-axis directions.

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