KR100628889B1 - static elctricity sensor and apparatus for measuring static elctricity having the same - Google Patents

Abstract

In the electrostatic sensor and the electrostatic measuring device, the electrostatic sensor includes an electrode portion that forms a driving voltage with static electricity on the surface of the object, and a light emitting portion having an organic EL that is connected to the electrode portion and emits light by the driving voltage. The static electricity measuring device includes a static electricity sensor and a moving unit for moving the static electricity sensor along the object. Therefore, by using the organic EL and the transparent electrode can accurately determine the distribution of static electricity through the color change of the electrostatic sensor in real time and analyze the electrostatic charging phenomenon can effectively identify the cause of static electricity.

Description

Static sensor and apparatus for measuring static elctricity having the same

1 is a schematic cross-sectional view showing an electrostatic sensor according to Embodiment 1 of the present invention.

2 is a schematic perspective view of a static electricity measuring apparatus according to Embodiment 2 of the present invention.

3 is a schematic perspective view showing a static electricity measuring device according to a third embodiment of the present invention.

FIG. 4 is a schematic cross-sectional view illustrating an electrostatic sensor according to Embodiment 1 installed in the electrostatic measuring device according to Embodiment 3 shown in FIG. 3.

5 is a schematic perspective view of a static electricity measuring apparatus according to Embodiment 4 of the present invention.

FIG. 6 is a schematic cross-sectional view showing an electrostatic sensor according to Embodiment 1 installed in an electrostatic measurement station according to Embodiment 4 shown in FIG. 5.

Explanation of symbols on the main parts of the drawings

10: upper transparent electrode 20: lower transparent electrode

30: organic EL insulation layer 40: control unit

The present invention relates to an electrostatic sensor and an electrostatic measuring device having the same. More particularly, the present invention relates to an electrostatic sensor for measuring a potential generated in a semiconductor substrate or a glass substrate and an electrostatic measuring apparatus having the same.

In general, static elctricity is formed by accumulating and not discharging because the resistance of the surface of the charge generated by charging is large. The static electricity is preferably removed in order to improve the yield in the manufacturing process using a semiconductor substrate or a glass substrate.

There are various factors that generate static electricity in the process of manufacturing a semiconductor substrate or a glass substrate. First, when the non-charger is in contact with the charge, static electricity may be formed on the non-charger with the same polarity as the charge. In addition, when two objects in contact are separated, static electricity may be formed on the two objects due to the electron movement generated by the difference in the coefficient of friction. In the ion implantation process, when ions, electrons, or alpha particles collide with the semiconductor substrate, energy transfer may occur in the semiconductor substrate, thereby generating static electricity. In addition, static electricity may be formed on the semiconductor substrate or the glass substrate when rubbed with the sprayed material, and static electricity may be formed by electron emission due to an increase in electron energy due to a simple temperature rise. In addition, static electricity may be formed by charging when the non-charger is positioned in the electric field.

Static electricity formed by various causes as described above is generated as a main cause of particle defects by collecting dust on a semiconductor substrate or a glass substrate during a manufacturing process. And when the discharge is generated due to static electricity, the potential of the static electricity has a level of several hundred or thousands of volts (Volt). The semiconductor substrate on which the highly integrated chip is formed is severely affected by the destruction of the device even by a charging potential of several tens of volts. In particular, as semiconductor substrates have been large-sized in recent years and liquid crystal display devices (LCDs) have become large screens, effective evaluation methods for surface static electricity and countermeasures against discharge of static electricity are urgently required.

Currently, as a countermeasure for eliminating static electricity formed on a semiconductor substrate or a glass substrate, a local ionizer is installed to apply a positive and negative high voltage to generate a corona discharge, thereby generating air around the electrode. The charge charged by ionization was neutralized with reverse polarized ions in the air to prevent static electricity and prevent charging.

In addition, the static electricity generated in the semiconductor substrate and the glass substrate in the local region was measured by using a point sensor.

However, in the case of using the above-described conventional point sensor, there is a problem in installation because a separate load / unload facility is required for static electricity measurement.

In addition, it was difficult to accurately measure the static electricity distribution of the semiconductor substrate or the glass substrate, and thus, it was difficult to determine the cause of the static electricity by analyzing the electrostatic charging phenomenon.

It is a first object of the present invention to provide an electrostatic sensor which can be driven using surface static electricity of an object.

It is a second object of the present invention to provide an electrostatic measuring device including the electrostatic sensor and capable of measuring static electricity of an object.

According to a preferred embodiment of the present invention for achieving the first object, the electrostatic sensor, the lower transparent electrode is disposed so as to maintain a constant distance from the object with the static electricity on the surface is charged with a polarity opposite to the polarity of the static electricity And an insulating material disposed between the upper transparent electrode disposed to face the lower transparent electrode and the lower and upper transparent electrodes, the upper transparent electrode being charged with a polarity opposite to that of the charged lower transparent electrode. And an organic EL insulating layer including an organic EL layer having pixels of different colors, and connected to the lower and upper transparent electrodes and the organic EL insulating layer, and having a potential difference between the lower and upper transparent electrodes. The controller may include a control unit for controlling the emission color of the pixels of the organic EL layer.

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According to a preferred embodiment of the present invention for achieving the second object, the static electricity measuring device, an electrostatic sensor for measuring the static electricity of the object with the static electricity on the surface, and the electrostatic sensor is moved along the surface of the object The electrostatic sensor may be disposed to maintain a predetermined distance from the surface of the object, the electrostatic sensor is disposed facing the lower transparent electrode and charged with a polarity opposite to the polarity of the static electricity And an insulating material disposed between the lower and upper transparent electrodes, wherein the upper transparent electrode is charged with a polarity opposite to that of the charged lower transparent electrode, and having pixels of different colors. An organic EL insulating layer including an organic EL layer, and the lower and upper transparent electrodes And is connected to the ELK organic insulating layer, it can be made according to the potential difference between the lower and the upper transparent electrode and a control unit for controlling the pixels of the light emission colors of the organic ELK layer.

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Therefore, according to the present invention, since the electrostatic sensor is operated by using the static electricity formed on the surface of the object, it is not necessary to apply a separate driving voltage, and the distribution of static electricity through the color change of the electrostatic sensor in real time by using the organic EL and the transparent electrode. By accurately measuring the voltage and analyzing the electrostatic charge phenomenon, the cause of static electricity can be effectively identified.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic cross-sectional view showing an electrostatic sensor 100 according to Embodiment 1 of the present invention.

Referring to FIG. 1, the electrostatic sensor 100 according to Embodiment 1 of the present invention includes an upper transparent electrode 10, a lower transparent electrode 20, an organic EL insulating layer 30, and a controller 40. .

The upper transparent electrode 10 is provided to correspond to the lower transparent electrode 20 on the lower transparent electrode 20 including the transparent conductive material. The upper transparent electrode 10 may include the same conductive material as the lower transparent electrode 20.

An organic EL insulating layer 30 including an organic EL layer (not shown) is provided between the upper transparent electrode 10 and the lower transparent electrode 20. The organic EL layer has a plurality of pixels, preferably red, green, and blue pixels.

The control unit 40 is provided on side surfaces of the upper transparent electrode 10, the lower transparent electrode 20, and the organic EL insulating layer 30. The controller 40 selectively selects red, green, and blue pixels of the organic EL layer according to the amount of driving voltage charged between the upper transparent electrode 10 and the lower transparent electrode 20. It serves to control to emit light.

The driving principle of the electrostatic sensor 100 including the upper transparent electrode 10, the lower transparent electrode 20, the organic EL insulating layer 30, and the controller 40 will be described below.

First, an object with static electricity on the surface is prepared. Examples of the object that can be used in the present invention include a semiconductor substrate, an LCD glass substrate, a PDP glass substrate, and the like.

The surface of the object and the lower transparent electrode 20 of the electrostatic sensor 100 are adjacent to each other to maintain a constant distance from each other. At this time, the lower transparent electrode 20 is charged with a polarity opposite to that of the static electricity on the surface of the object.

As the lower transparent electrode 20 is charged, the polarity opposite to the polarity of the lower transparent electrode 20 is charged on the upper transparent electrode 110.

Since the polarities of the lower transparent electrode 20 and the upper transparent electrode 10 are different from each other, a driving voltage for driving the organic EL layer included in the organic EL insulating layer 30 is applied to both ends of the organic EL insulating layer 30. do.

The control unit 40 provided on the side surfaces of the upper transparent electrode 10, the lower transparent electrode 20, and the organic EL insulating layer 30 measures the driving voltage to control light emission of the pixels included in the organic EL layer. do.

Specifically, the controller 40 controls all pixels not to emit light when the driving voltage charged between the upper transparent electrode 10 and the lower transparent electrode 30 is 500 V / cm or less. When the driving voltage is greater than 500 V / cm and less than 2000 V / cm, only the green pixels are controlled to emit light, so that the organic EL layer generates green light as a whole. When the driving voltage exceeds 2000 V / cm and below 5000 V / cm, only the green and blue pixels are controlled to emit light selectively, so that the organic EL layer generates blue green light as a whole. When the driving voltage exceeds 5000 V / cm, the red, green, and blue pixels are controlled to emit light, so that the organic EL layer generates white light as a whole.

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2 is a schematic perspective view showing an electrostatic measuring apparatus 1000 according to Embodiment 2 of the present invention.

Referring to FIG. 2, the static electricity measuring apparatus 1000 according to the second exemplary embodiment includes a static electricity measuring sensor 100 and a support 110.

After manually supporting the electrostatic sensor 100 using the support 110, the object 120 is moved through the color change of the electrostatic sensor 100 while moving the position of the electrostatic sensor 100 along the surface of the object 120. The static electricity on the surface can be measured.

3 is a schematic perspective view of an electrostatic measuring apparatus 2000 according to Embodiment 3 of the present invention.

Referring to FIG. 3, the sensor body 230 includes a first reciprocating member 231 and a first power unit 232. The first reciprocating member 231 is designed to be inserted into the first shaft 235 to allow reciprocating motion along the first shaft 235. The first power unit 232 is formed on the first reciprocating member 231 to provide power for the reciprocating motion of the first reciprocating member 231.

Both ends of the first shaft 235 are inserted into and fixed to the second and third reciprocating members 240 and 250. The second and third axes 245, 255 perpendicular to the first axis 235 are inserted into the second and third reciprocating members 240, 250, respectively. Accordingly, the second and third reciprocating members 240 and 250 connected to the first axis 235 are designed to reciprocate relative to each other on the second and third axes 245 and 255.

The second power unit 241 is provided on the side of the second reciprocating member 240. The second power unit 241 provides power for the reciprocating motion of the second reciprocating member 240.

Both ends of the second and third axes 245, 255 are fixed to the first and second fixing parts 260, 270. A support plate 290 having a planar shape for supporting the object 295 is provided between the first fixing part 260 and the second fixing part 270.

Wires 281 and 282 for outputting signals for measured static electricity are connected to the first and second power units 232 and 241, respectively.

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FIG. 4 is a schematic cross-sectional view of the static electricity sensor 100 according to the first embodiment installed in the static electricity measuring apparatus 2000 according to the third embodiment shown in FIG. 3.

Referring to FIG. 4, a single electrostatic sensor 100 is provided below the first reciprocating member 231 of the sensor body 230 to face the object 295.

The electrostatic sensor 100 installed as described above performs the entire scanning on the object 295 through the reciprocating motion of the first reciprocating member 231 and the reciprocating motion of the second and third reciprocating members 240 and 250. do.

Here, since the static electricity sensor 100 is driven by the surface static electricity of the object as described above, there is no need to apply a separate driving voltage.

The signal scanned on the surface of the object is output through first and second wires 281 and 282 connected across the first power unit 232 and the second power unit 241. Thereafter, the output signal is input to a scanning computer (not shown) for displaying the result of the scanning to monitor the scanning result in color on the front surface of the object 295.

5 is a schematic perspective view showing an electrostatic measuring apparatus 3000 according to Embodiment 4 of the present invention.

The static electricity measuring device according to the fourth embodiment of the present invention is substantially the same as the third embodiment except for using the line body 333 instead of the sensor body 230 and the first shaft 235 according to the third embodiment. Do.

Both ends of the line body 333 are fixed to the second and third reciprocating members 340 and 350.

FIG. 6 is a schematic cross-sectional view of the static electricity sensor 100 according to the first embodiment installed in the static electricity measurement station 3000 according to the fourth embodiment shown in FIG. 5.

Referring to FIG. 6, a plurality of electrostatic sensors 100 are provided below the line body 333 to face the object 395.

According to another embodiment of the present invention, instead of the plurality of electrostatic sensors 100 may be provided with a single electrostatic sensor 100 having a size corresponding to the line body 333.

The line body 333 installed as described above reciprocates in parallel with the second and third axes 345 and 355 to perform full-scale scanning of the object 395.

The power part 341 formed on the side surface of the second reciprocating member 340 is connected to a wire 382 for outputting a signal for measuring static electricity.

According to the present invention, since the electrostatic sensor is operated by using static electricity formed on the surface of an object such as a semiconductor substrate or a glass substrate, a separate driving voltage is not required, and the color of the electrostatic sensor is real-time by using organic EL and a transparent electrode. The change accurately measures the distribution of static electricity and analyzes the electrostatic charging phenomena to effectively identify the cause of static electricity generation.

As described above, although described with reference to the embodiments of the present invention, those skilled in the art will be variously modified and modified within the scope of the present invention without departing from the spirit and scope of the invention described in the claims below. It will be appreciated that it can be changed.

Claims (14)

A lower transparent electrode disposed to maintain a constant distance from an object having a static electricity on a surface thereof, the lower transparent electrode being charged with a polarity opposite to the polarity of the static electricity; An upper transparent electrode disposed to face the lower transparent electrode; An organic EL layer disposed between the lower and upper transparent electrodes, the insulating material including an insulating material to charge the upper transparent electrode with a polarity opposite to that of the charged lower transparent electrode, and having pixels of different colors; Organic EL insulation layer; And And a control unit connected to the lower and upper transparent electrodes and the organic EL insulating layer, and configured to control emission colors of pixels of the organic EL layer according to a potential difference between the lower and upper transparent electrodes. delete delete delete delete A static electricity sensor for measuring static electricity of an object having static electricity on a surface; And A moving unit for moving the electrostatic sensor along the surface of the object, The electrostatic sensor, A lower transparent electrode disposed to maintain a predetermined distance from the surface of the object and charged with a polarity opposite to that of the static electricity; An upper transparent electrode disposed to face the lower transparent electrode; An organic EL layer disposed between the lower and upper transparent electrodes, the insulating material including an insulating material to charge the upper transparent electrode with a polarity opposite to that of the charged lower transparent electrode, and having pixels of different colors; Organic EL insulation layer; And And a controller connected to the lower and upper transparent electrodes and the organic EL insulating layer, and configured to control the emission color of the pixels of the organic EL layer according to a potential difference between the lower and upper transparent electrodes. Electrostatic measuring device. delete delete delete delete The method of claim 6, wherein the moving unit, First axis; A first reciprocating member and a first reciprocating member arranged on the first shaft and inserted into the first shaft to be reciprocated along the first axis, and disposed on the first reciprocating member, for driving the reciprocating motion of the first reciprocating member A sensor body comprising a first power unit for providing a; Second and third axes perpendicular to the first axis and adjacent to both ends of the first axis; Second and third reciprocating members in which both ends of the first shaft are inserted and fixed and the second and third shafts are inserted, respectively; A second power unit disposed on a side of the second reciprocating member and configured to provide power to allow the second and third reciprocating members to reciprocate along the second and third axes; And And first and second fixing portions for fixing both ends of the second and third axes. The method of claim 6, wherein the moving unit, A line-shaped body having an electrostatic sensor disposed below; Second and third axes perpendicular to an extension direction of the line body and adjacent to both ends of the line body; Second and third reciprocating members in which both ends of the line body are inserted and fixed and the second and third axes are inserted, respectively; A second power unit disposed on a side of the second reciprocating member and configured to provide power to allow the second and third reciprocating members to reciprocate along the second and third axes; And And first and second fixing portions for fixing both ends of the second and third axes. The electrostatic measuring apparatus according to claim 12, wherein a plurality of the electrostatic sensors are disposed at predetermined intervals below the line body. The electrostatic measuring apparatus of claim 12, wherein a single electrostatic sensor is formed at a lower portion of the line body to correspond to a lower portion of the line body.

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