KR100614798B1 - Scrap elimination apparatus - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scrap discharging apparatus of a semiconductor sawing apparatus, and comprising: a guide duct through which scrap is introduced and guided; and a scrap installed on a bottom surface of the guide duct to lift and discharge the scrap by a fluid provided from the outside. Consists of the discharge means, the scrap injected into the guide duct is discharged by the air injected inclined upward through the air injection hole, so that the scrap discharge device is not interrupted by the problem that the scrap is caught in the guide side plate or pulley during discharge. Scrap can be discharged.

Semiconductor, Saw Device, Leadframe, Scrap, Discharge

Description

Scrap Ejector {SCRAP ELIMINATION APPARATUS}

1 is a plan view schematically showing a sawing and handler system for a semiconductor manufacturing process equipped with a conventional scrap discharge device;

FIG. 2 is a perspective view showing the scrap discharging apparatus shown in FIG. 1;

3 is a vertical sectional view showing the scrap discharging apparatus shown in FIG.

4 is a reference diagram showing an operating state when the scrap is put into the rear pulley region of the scrap discharge device shown in FIG.

5 is a plan view showing a sawing and handler system for a semiconductor manufacturing process including a scrap discharge device according to a first embodiment of the present invention;

6 is a perspective view showing the installation state of the scrap discharge device shown in FIG.

FIG. 7 is a perspective view illustrating the scrap discharging device illustrated in FIG. 5;

8 is a plan view of the scrap discharging apparatus shown in FIG.

FIG. 9 is a cross-sectional view taken along the line A-A in FIG. 8;

FIG. 10 is a reference view showing the inside of the fluid supply block of the scrap discharge device shown in FIG.

11A and 11B are reference views illustrating a connection relationship between a fluid supply block and a fluid injection pipe of the scrap discharge device of FIG. 7;

12 is a reference diagram showing a pneumatic circuit and a hydraulic pressure circuit in the scrap discharge device shown in FIG.

FIG. 13 is a reference diagram illustrating a state in which air is ejected in the scrap discharge device illustrated in FIG. 7;

14A and 14B are reference diagrams showing a hydraulic pressure circuit when discharging scraps using hydraulic pressure as a scrap discharge apparatus according to a second embodiment of the present invention.

15A and 15B are reference diagrams showing a pneumatic circuit and a hydraulic circuit in the case of discharging scrap by using pneumatic pressure and water pressure as a scrap discharge apparatus according to a third embodiment of the present invention.

FIG. 16 is a vertical sectional view showing the structure of the water tank shown in FIGS. 14A and 15A;

17 is a perspective view showing a scrap discharging device according to a fourth embodiment of the present invention.

* Description of the symbols for the main parts of the drawings *

100: guide duct 110: scrap opening

120: scrap outlet 130: scrap guide plate

140: scrap blocking plate 150: fluid guide plate

160: finishing plate 170: support

200: fluid spray pipe 210: fluid spray hole

220: guide protrusion 230: guide groove

300: fluid supply means 310: fluid supply block

320: fluid supply pipe 330: fluid distribution pipe

340: flow control means 400: scrap box

The present invention relates to a scrap discharging apparatus, and more particularly, to a scrap discharging apparatus for a semiconductor sawing apparatus capable of smoothly discharging scrap generated in the sawing process of a semiconductor strip.

Semiconductor packages are mass-produced in semi-finished packages through a variety of processes through strips of strips consisting of multiple semi-finished package groups. The semiconductor package thus manufactured is aligned with a vision inspection apparatus while seated on a chuck table, and then transferred to a sawing apparatus and subjected to a singulation process that is separately separated.

Through this singulation process, a functionally unnecessary part of the package, that is, a resin or metal part (commonly called a scrap after cutting) is cut by a sawing device so that the semiconductor strip is separated into individual semiconductor packages. Separated by. The scrap cut in this way is discharged to the outside by the scrap discharge device.

Figure 1 shows a sawing and handler system for a semiconductor manufacturing process equipped with a conventional scrap ejection apparatus.

As shown in FIG. 1, in a sawing and handler system for a semiconductor manufacturing process equipped with a conventional scrap discharge device, the strip S drawn from the onloader device 10 by the strip picker 12 is a chuck table ( It is transferred to the spindle 30 by 20) and cut into individual packages P, and then delivered to the handler device 40 by the package picker 42 via the cleaning device 41. At this time, the scrap (SR) separated from the strip (S) is discharged through the scrap remover (34) by the scrap and remover (34) by the washing and cooling water sprayed from the spindle nozzle 32 attached to the spindle (30) Discharged to the device. The scrap (SR) introduced into the scrap discharge device is carried on the conveyor belt 60 of the scrap discharge device is finally discharged to the scrap box (80).

Hereinafter, the conventional scrap discharging apparatus will be described in detail with reference to FIGS. 2 and 3. FIG. 2 is a perspective view showing the scrap discharging device shown in FIG. 1, and FIG. 3 is a vertical sectional view showing the scrap discharging device shown in FIG.

As shown in Figures 2 and 3, the conventional scrap discharge device is largely composed of the main frame 50, the conveyor belt 60 and the drive motor 70. The main frame 50 is an element supporting each component, the upper side of the belt guide rail 52 for guiding the conveyor belt 60 is formed in the longitudinal direction, both sides of the guide side plate The 54 is extended so that it may protrude. The conveyor belt 60 is a component for discharging scrap while circulating along the belt guide rail 52, and has a plurality of discharge holes 62 for discharging the washing water injected from the spindle nozzle 32. The drive motor 70 is connected to the drive pulley 72 installed in close contact with the conveyor belt 60 is an element that provides a driving force to the conveyor belt (60). On the other hand, the conveyor belt 60 is supported by the rear pulley 74, the front pulley 76 and the idle pulley 78.

However, when the scrap SR is discharged by being loaded on the conveyor belt 60 of the conventional scrap discharging device, the scrap SR jumps to both ends of the conveyor belt 60 and the belt guide rail 52 If it is caught between the guide side plates 54, the scrap discharge device should be stopped. That is, as shown in Figure 4, the scrap (SR) is conveyed while sandwiched between the belt guide rail 52 and the guide side plate 54 to enter the rear pulley 74, the conveyor belt 60 is smoothly transferred. Since it can not be stopped the operation of the drive motor 70 and must be restarted after removing the scrap (SR) sandwiched between the rear pulley (74) and the conveyor belt (60).

As such, when scrap SR is caught between the conveyor belt 60 and the guide side plate 54 or between the conveyor belt 60 and the rear pulley 74, there is a hassle to remove these scraps one by one.

The present invention has been proposed to solve the above-mentioned conventional problems, and an object of the present invention is to provide a scrap discharging device for a semiconductor sawing device that can smoothly discharge the scrap generated in the sawing process of the semiconductor strip. .

In order to achieve the above object, the scrap discharging device for a semiconductor sawing device according to the present invention is provided with a guide duct through which scrap is introduced and guided to the bottom of the guide duct, thereby floating the scrap by fluid provided from the outside. It characterized in that it comprises a scrap discharge means for discharging while.

Here, the fluid is preferably air of high pressure.

In addition, the scrap discharge means is formed on the bottom surface of the guide duct is composed of a plurality of fluid injection pipe for injecting air provided from the outside, the upper surface of the fluid injection pipe a plurality of cut inclined upward in the discharge direction of the scrap It characterized in that the fluid injection hole is formed.

In addition, the scrap discharge means is a fluid supply pipe for supplying air provided from the outside, a fluid distribution pipe connected to the fluid supply pipe for distributing air provided from the fluid supply pipe to the fluid injection pipe, the fluid distribution pipe and the fluid Installed between the injection pipe, it may further include a flow rate adjusting means for adjusting the amount of air provided to each of the fluid injection pipe.

In addition, the amount of air provided to the plurality of fluid injection pipes installed in the guide duct by the flow control means is controlled, the amount of air provided toward the fluid injection pipe disposed in the center from the fluid injection pipe disposed in the outside increases It is desirable to adjust as possible.

In addition, the inside of the tip of the guide duct is characterized in that the fluid guide plate for guiding the air so that the air injected through the fluid injection holes formed in the tip of the fluid injection pipe is discharged along the upper surface of the fluid injection pipe is inclined downwardly installed do.

Hereinafter, a first embodiment according to the present invention will be described in detail with reference to the accompanying drawings.

In describing the components of the embodiments according to the present invention, components corresponding to those of the sawing and handler system for a semiconductor manufacturing process equipped with the scrap discharging apparatus of the prior art are given the same names and the same reference numerals. Shall be. In addition, a portion into which the scrap SR is introduced based on the traveling direction of the scrap SR is defined as a front end, and a portion from which the scrap SR is discharged is defined as a rear end. In addition, the symmetrically arranged elements will be described by giving reference numerals to only one element.

Figure 5 shows a sawing and handler system for a semiconductor manufacturing process equipped with a scrap discharge device according to a first embodiment of the present invention.

As shown in FIG. 5, in the sawing and handler system for a semiconductor manufacturing process provided with a scrap discharge device according to the first embodiment of the present invention, a strip drawn out from the onloader device 10 by the strip picker 12 S is transferred to the spindle 30 by the chuck table 20, cut into individual packages P, and then transferred to the handler apparatus 40 by the package picker 42. At this time, the scrap (SR) separated from the strip (S) is discharged through the scrap remover (34) by the scrap and remover (34) by the washing and cooling water sprayed from the spindle nozzle 32 attached to the spindle (30) Discharged to the device. The scrap SR introduced into the scrap discharge device is finally discharged into the scrap box 400 through the guide duct 100. The scrap discharging apparatus according to the present invention discharges the scrap by the pressure of the fluid provided from the outside, the scrap discharging apparatus according to the first embodiment is an embodiment in which the scrap is discharged by the pressure of the air in the fluid.

In this case, DI water (Deionized Water) is generally used as the washing water sprayed from the spindle nozzle 32. This DI water refers to pure water without any impurities except the ions generated by self-ionization by removing all the ions dissolved in the water, and because the electric conductivity is not buried, the package is cleaned and sawed. It has a suitable property as a cooling water of.

Hereinafter, the scrap discharging apparatus will be described in detail with reference to FIGS. 6 to 9. 6 is a perspective view showing the installation state of the scrap discharge device shown in Figure 5, Figure 7 is an attempt to show the scrap discharge device shown in Figure 5, Figure 8 is a plan view of the scrap discharge device shown in Figure 7, FIG. 9 is a cross-sectional view taken along line AA of FIG. 8.

The scrap discharge device is composed of a guide duct 100, a fluid injection pipe 200 and the fluid supply means (300).

The guide duct 100 is an element to which the scrap (SR) is introduced and guided. Scrap inlet 110 is formed in the top end of the guide duct 100 is scrap (SR) is injected, the rear end of the guide duct 100 is scrap discharge port (120) is discharged scrap (SR) is discharged Is formed open. The scrap guide plate 130 is formed on the sidewall of the scrap inlet 110 on which the scrap SR is introduced, and on the other side of the scrap SR, a scrap cutoff prevents the scrap SR from protruding to the outside. The plate 140 protrudes upward. In addition, the upper portion of the scrap guide plate 130 and the scrap blocking plate 140 is made of vertical surfaces (132, 142) and the lower portion is made of inclined surfaces (134, 144), to smoothly guide the introduced scrap (SR) Doing. In addition, the guide duct 100 is installed to be inclined downward in the traveling direction of the scrap SR by the support 170 so as to smoothly discharge the scrap SR. In addition, a scrap box 400 where scrap SR is finally collected is installed at a lower portion of the scrap discharge port 120 of the guide duct 100.

On the other hand, the rear end of the guide duct 100 is formed to have a rectangular cross-section as a whole, if the structure that can be introduced into the scrap (SR) may be designed and changed in various shapes.

The fluid injection pipe 200 is an element for discharging air while injecting the scrap SR by injecting air provided from the fluid supply means 300 as a scrap discharge means. The fluid injection pipe 200 is composed of a plurality of pipes formed on the bottom of the guide duct (100). The upper surface of the fluid injection pipe 200 is formed with a plurality of fluid injection holes 210 are cut (or cut) inclined upward at a predetermined angle in the discharge direction of the scrap (SR). If the angle of the fluid injection hole 210 is increased, the flotation force of the scrap SR is increased, and if the angle is decreased, the discharge force of the scrap SR is increased, and the angle of the fluid injection hole 210 is designed. It may be appropriately selected depending on the conditions. In addition, the rear ends of the fluid injection pipes 200 are closed by a closing member 212 such as a bolt.

Meanwhile, the fluid injection hole 210 may be formed by wire cutting, and the fluid injection pipe 200 is attached to the bottom surface of the guide duct 100 by a known coupling means such as welding. . In addition, the installation number and installation location of the fluid injection pipe 200 may be selected according to the design conditions. In addition, in the present embodiment, the fluid injection pipe 200 is attached so that the fluid injection holes 210 are arranged in a line, but various arrangements such as zigzag may be possible. On the other hand, the scrap (SR) is sandwiched between the fluid injection pipe 200 disposed on the outermost of the plurality of fluid injection pipes 200 installed in the guide duct 100 and the inner surface of the guide duct 100. In order to prevent the closing plate 160 is installed.

In this way, even though the scrap SR falls on the bottom surface of the guide duct 100, the scrap SR is almost in line contact with the fluid injection pipe 200, and thus is not easily attached.

The fluid supply means 300 is connected to the front end of the fluid injection pipe 200 is an element for supplying air to the fluid injection pipe 200. 11A and 13, the fluid supply means 300 is a fluid supply pipe 320 for supplying air from the outside, and the air supplied from the fluid supply pipe 320 connected to the fluid supply pipe 320 The amount of air provided to each of the fluid injection pipes 200 is installed between the fluid distribution pipe 330 for distributing the fluid injection pipe 200 and the fluid distribution pipe 330 and the fluid injection pipe 200. Consists of a flow rate control means 340 to control the. On the other hand, the fluid distribution pipe 330 and the fluid control means 340 is built in the fluid supply block 310 installed on the front end side of the guide duct (100). In addition, reference numeral 331 is a closing member such as a bolt, the end of the fluid distribution pipe 330 that is not connected to the fluid injection pipe 200 by these closing members 331 is closed.

In addition, the upper portion of the fluid supply block 310, the fluid guide plate 150 is installed to be inclined downward into the front end of the guide duct (100). The fluid guide plate 150 guides the air so that the air injected through the fluid injection holes 210 formed at the front end of the fluid injection pipe 200 flows out to the front end of the fluid injection pipe 200 along the upper surface of the fluid injection pipe 200. It plays a role. As such, the air is strongly injected along the upper surfaces of the fluid injection pipes 200 by the fluid guide plate 150, so that the scrap SR may be effectively prevented from being attached between the fluid injection pipes 200. In addition, the fluid guide plate 150 also serves to guide the scrap injected into the guide duct 100 to the fluid injection pipe (200). On the other hand, in this embodiment, the fluid guide plate 150 is installed on the upper portion of the fluid supply block 310, it may be installed on one side of the inner surface of the front end of the guide duct 100 according to the design conditions.

On the other hand, since the scrap (SR) introduced into the guide duct 100 is driven to the center of the bottom surface of the guide duct 100 by gravity, the fluid powder disposed in the center from the fluid injection pipe 200 disposed on the outside It is preferable to adjust the flow rate control means 340 to increase the amount of air provided toward the pipe 200. In addition, although the set screw is provided as the flow control means 340 in this embodiment, various flow control means such as a valve may be used according to design conditions.

On the other hand, Figure 11b discloses another embodiment of the fluid supply means 300.

The fluid supply means 300 shown in FIG. 11B includes a fluid supply pipe 320 for supplying air from the outside, and a fluid supply block for properly distributing air provided from the fluid supply pipe 320 to the fluid injection pipe 200. 310 and the flow control means 340 is installed between the fluid supply block 310 and the fluid supply pipe 320 to adjust the amount of air provided to the fluid injection pipe (200). In addition, the flow rate control means 340 and the fluid supply block 310 is hermetically connected by a fluid connection pipe 342.

Here, the fluid supply block 310 is composed of a first block 312 and a second block 314 are tightly coupled to each other by a predetermined fastening means 318 such as a bolt. The first block 312 is formed with a first connection hole 313 in which the fluid connection pipe 342 is hermetically coupled, and the second block 314 communicates with the first connection hole 313. And a second connection hole communicating with the fluid distribution groove 315 for distributing air provided through the first connection hole 313 and the fluid distribution groove 315 and in which the fluid injection pipe 200 is hermetically coupled. 316 is formed. In this example, the plurality of fluid injection pipes 200 are divided into several groups, and the flow rate is configured to be controlled for each of the divided groups. On the other hand, in Figure 11b is a fluid injection pipe 200 is composed of nine pipes, three of them are grouped into groups, each group is connected to the fluid distribution groove 315 by each of the flow control means 340 An example is disclosed in which the flow rate supplied to the group is designed to be controlled. At this time, the scrap (SR) introduced into the guide duct 100 is driven to the center of the bottom surface of the guide duct 100 by gravity, so that the amount of air supplied to the group of the fluid injection pipe 200 disposed in the middle to control the most It is desirable to be.

As such, when the fluid injection pipes 200 are bundled and controlled in several groups, the structure of the fluid supply means 300 is simplified, and the control of the amount of air supplied to each of the fluid injection pipes 200 is easy.

Meanwhile, in the present embodiment, the fluid spray pipe 200 composed of nine tubes is controlled by grouping three, but the number of tubes forming the fluid spray pipe 200 and the number of grouping into groups vary depending on the design conditions. Can be selected.

Hereinafter, the pneumatic circuit and the hydraulic pressure circuit of the scrap discharge device according to the present embodiment will be described with reference to the accompanying drawings.

12 is a reference diagram showing a pneumatic circuit and a hydraulic pressure circuit in the case of discharging scrap from the scrap discharging apparatus according to the present embodiment, and FIG. 13 is a reference diagram showing a state in which air is ejected from the scrap discharging apparatus. Here, the pneumatic circuit for the air injected through the fluid injection pipe 200 is shown by a solid line, the hydraulic circuit for the water injected through the spindle nozzle 32 is shown by a dashed line. In addition, reference numerals W1 and W2 denote DI water and general constant, respectively, and reference numeral A denotes a scrap discharge air provided from the outside for the discharge of scrap.

First, looking at the pneumatic circuit for the scrap discharge air injected through the fluid injection pipe 200, the air (A) provided from the outside is compressed while passing through the air compressor 301, the compressed air at high pressure flow rate The total flow rate is controlled by the control valve 302 and then supplied to the fluid supply pipe 320. As such, the high pressure air supplied to the fluid supply pipe 320 passes through the fluid distribution pipe 330 and is then supplied to each of the fluid injection pipes 200 after the air supply amount is adjusted by the flow control means 340. It is injected in the direction inclined upward with respect to the traveling direction of the scrap (SR) through the fluid injection hole 210 of the fluid injection pipe (200). On the other hand, the air injected through the fluid injection hole 210 formed at the tip of the guide duct 100 is guided to the fluid guide plate 150 is strongly discharged along the upper surface of the fluid injection pipe 200 ( 13).

Next, looking at the hydraulic circuit for the washing and cooling water sprayed through the spindle nozzle 32, DI water (W1) made by distilled water passing through the cation and anion exchange resin sequentially stored in the DI water tank (31) The DI water W1 is sprayed toward the package P through the spindle nozzle 32 provided on one side of the spindle 30 by a pump (not shown) controlled by a predetermined controller. The scrap SR is injected into the scrap discharge device via the scrap remover 34 by the DI water W1 sprayed in this way and discharged. On the other hand, the DI water (W1) is used as the washing and cooling water sprayed through the spindle nozzle 32 in the present embodiment, it may be designed to use a general constant according to the design conditions.

By such a configuration, since the scrap (SR) introduced into the guide duct 100 is discharged to the scrap box 400 through the guide duct 100 while floating by the air action as described above, As a result, the problem of having to stop the scrap discharging device due to a problem such that the scrap SR is caught in the scrap discharging device has been solved.

Hereinafter, a scrap discharge device according to a second embodiment of the present invention will be described with reference to the accompanying drawings.

14A is a reference diagram showing a hydraulic pressure circuit in the case of discharging scraps by using hydraulic pressure as a scrap discharge apparatus according to a second embodiment of the present invention.

The scrap discharging device according to the second embodiment has a configuration basically the same as that of the first embodiment, and only uses the hydraulic pressure instead of pneumatic pressure as an operating force for discharging the scrap SR injected into the guide duct 100. There is. In addition, as the washing and cooling water injected through the spindle nozzle 32, DI water (W1) is used as in the first embodiment, and the general water (W2) is used as the scrap discharge water to apply the discharge force to the scrap. Doing.

As shown in FIG. 14A, the hydraulic pressure circuit of the scrap discharging apparatus according to the second embodiment includes a water filter 304 for purifying the scrap discharged water W2 recovered after being injected into the guide duct 100 and purified water. The water tank 305 for constantly circulating and storing the waste water discharged, The water pump 306 for applying an operating force to the waste water discharged in the water tank 305, and the waste water discharged by the water pump 306 It is comprised by the flow control valve 307 which controls a flow volume.

As such, the scrap discharged water stored in the water tank 305 is compressed while passing through the water pump 305, and the high pressure compressed scrap discharged water is controlled by the flow control valve 307 after the total flow rate is controlled. It is supplied to the supply pipe 320. As such, the scrap discharged water supplied to the fluid supply pipe 320 is inclined upward with respect to the traveling direction of the scrap SR through the fluid injection hole 210 of the fluid injection pipe 200 as in the first embodiment. Sprayed through the fluid ejection hole 210 formed at the tip of the guide duct 100 is guided to the fluid guide plate 150 to be strongly sprayed along the upper surface of the fluid ejection pipe 200. do. In addition, the scrap discharge water injected into the guide duct 100 is designed to discharge the scrap while circulating through the water filter 304, the water tank 305, the water pump 306 and the flow control valve 307. On the other hand, the DI water (W1) is used as the washing and cooling water sprayed through the spindle nozzle 32 in the present embodiment, it may be designed to use a general constant according to the design conditions.

On the other hand, in Fig. 14B, as a modification of the second embodiment, an example in which both the washing and cooling water sprayed through the spindle nozzle 32 and the scrap discharge water applying the discharge force to the scrap are used as the normal constant W2. And, unlike the scrap discharge apparatus shown in Fig. 14B, the scrap discharged water is not circulated, and the discharged and washed water used once are designed to be discharged outward.

Hereinafter, a scrap discharge device according to a third embodiment of the present invention will be described with reference to the accompanying drawings.

FIG. 15A is a reference diagram showing a pneumatic circuit and a hydraulic circuit in the case of discharging scrap by using both pneumatic and hydraulic pressure as a scrap discharging apparatus according to a third embodiment of the present invention.

The scrap discharging device according to the third embodiment has the same configuration as that of the first embodiment, and merely uses the hydraulic pressure as well as pneumatic pressure as an operating force for discharging the scrap SR injected into the guide duct 100. There is. In addition, as the washing water and the cooling water sprayed through the spindle nozzle 32, DI water W1 is used as in the first embodiment. However, depending on the design conditions, it may be designed such that general water is used instead of DI water W1 as such washing and cooling water. In addition, the waste water discharged to the scrap is applied to the normal waste water (W2) as the wastewater, and the waste water injected into the guide duct 100, as in the second embodiment of the water filter 304, water tank 305, the water pump 306 and the flow control valve 307 is designed to discharge the scrap while circulating. That is, the third embodiment combines the pneumatic circuit of the first embodiment and the hydraulic circuit of the second embodiment.

On the other hand, in Fig. 15B, as a modification of the third embodiment, an example in which both the washing and cooling water injected through the spindle nozzle 32 and the scrap discharge water applying the discharge force to the scrap are used as the general constant W2. And, unlike the scrap discharge apparatus shown in Figure 15b, the scrap discharged water is not circulated, and once used, the discharged water and the washing water are designed to be discharged to the outside.

Meanwhile, FIG. 16 discloses the structure of the water tank 305 shown in FIGS. 14A and 15A in detail. As shown in FIG. 16, since the flow rate corresponding to the washing and cooling water injected through the spindle nozzle 32 is designed to be discharged to the outside, the scrap supplied into the water tank 305 through the water filter 304 is shown. Effluents are always at a constant level.

Hereinafter, a fourth embodiment according to the present invention will be described with reference to the accompanying drawings.

17 is a perspective view showing a scrap discharging device according to a fourth embodiment of the present invention.

As shown in FIG. 17, the scrap discharge apparatus according to the fourth embodiment is a guide duct 100 instead of the fluid injection pipe 200 in which the fluid injection hole 210 is formed as a means for discharging while lifting the scrap SR. A plurality of guide protrusions 220 and guide grooves 230 are disposed alternately along the longitudinal direction at the bottom of the bottom.

This embodiment has the advantage that similar effects can be obtained as a simple structure compared to the embodiments described above.

As in the above example, the present invention may be variously applied using the same principle by appropriately modifying the above embodiments. Therefore, it should be interpreted that the above description does not limit the scope of the present invention, which is defined by the limits of the following claims.

As described above, the present invention provides a scrap discharging apparatus having a new structure that solves the problems occurring in the scrap discharging process and the complexity of the conveyor belt and the conveyor belt driving means as in the prior art.

The scrap discharging apparatus according to the present invention is discharged by the air injected inclined upwardly through the fluid injection hole, so that the scrap discharging device is stopped due to the problem that the scrap is caught in the guide side plate or pulley during discharge. It is possible to discharge the scraps smoothly because the scraps fall on the bottom surface of the guide duct and are not easily attached since they are almost in line contact with the air spray pipe or the guide protrusion.

Claims (6)

In the scrap discharging device for discharging scrap generated during the singulation process of the semiconductor sawing equipment, A guide duct through which the scrap is introduced and guided; Scrap discharge device is installed on the bottom surface of the guide duct, the scrap discharge device characterized in that it comprises a plurality of fluid injection pipes formed with fluid injection holes cut inclined upward in the discharge direction of the scrap on the upper surface. The method of claim 1, The fluid provided through the fluid injection hole is a scrap discharge device, characterized in that the high pressure air (air). The method of claim 2, And the scrap is in direct contact with the bottom surface of the guide duct, and discharges the scrap while floating the scrap by air provided through the fluid ejection holes of the fluid ejection pipe. The method of claim 3, The scrap discharge means, A fluid supply pipe for supplying air provided from the outside; A fluid distribution pipe connected to the fluid supply pipe and distributing air provided from the fluid supply pipe to the fluid injection pipe; And a flow rate adjusting means installed between the fluid distribution pipe and the fluid injection pipe to adjust the amount of air provided to each of the fluid injection pipes. The method of claim 4, wherein The amount of air provided to the plurality of fluid ejection pipes installed in the guide duct is controlled by the flow rate adjusting means, and the amount of air provided from the fluid ejection pipe disposed at the outer side to the fluid ejection pipe disposed at the center is increased. Scrap discharge device characterized in that the. The method of claim 2, Inside the tip of the guide duct, And a fluid guide plate for guiding the air so that the air injected through the fluid injection holes formed at the tip of the fluid injection pipe flows out along the upper surface of the fluid injection pipe.

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