KR100583642B1 - SYSTEM FOR MEASURING HCl IN BCl3 - Google Patents

SYSTEM FOR MEASURING HCl IN BCl3 Download PDF

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KR100583642B1
KR100583642B1 KR1019990015929A KR19990015929A KR100583642B1 KR 100583642 B1 KR100583642 B1 KR 100583642B1 KR 1019990015929 A KR1019990015929 A KR 1019990015929A KR 19990015929 A KR19990015929 A KR 19990015929A KR 100583642 B1 KR100583642 B1 KR 100583642B1
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hydrochloric acid
boron trichloride
gas
supply line
supply
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KR1019990015929A
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Korean (ko)
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KR20000072958A (en
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정원덕
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삼성전자주식회사
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/36—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for bakery products, e.g. biscuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D5/00—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper
    • B65D5/20—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper by folding-up portions connected to a central panel from all sides to form a container body, e.g. of tray-like form
    • B65D5/30—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper by folding-up portions connected to a central panel from all sides to form a container body, e.g. of tray-like form with tongue-and-slot or like connections between sides and extensions of other sides
    • B65D5/301—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper by folding-up portions connected to a central panel from all sides to form a container body, e.g. of tray-like form with tongue-and-slot or like connections between sides and extensions of other sides the tongue being a part of a lateral extension of a side wall
    • B65D5/307—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper by folding-up portions connected to a central panel from all sides to form a container body, e.g. of tray-like form with tongue-and-slot or like connections between sides and extensions of other sides the tongue being a part of a lateral extension of a side wall combined with a tongue provided in an adjacent side wall
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D5/00—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper
    • B65D5/42—Details of containers or of foldable or erectable container blanks
    • B65D5/44—Integral, inserted or attached portions forming internal or external fittings
    • B65D5/46—Handles
    • B65D5/46008—Handles formed separately from the container body
    • B65D5/46024—Straps used as handles with anchoring elements fixed in slots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D5/00—Rigid or semi-rigid containers of polygonal cross-section, e.g. boxes, cartons or trays, formed by folding or erecting one or more blanks made of paper
    • B65D5/42—Details of containers or of foldable or erectable container blanks
    • B65D5/64—Lids
    • B65D5/66—Hinged lids
    • B65D5/6626—Hinged lids formed by folding extensions of a side panel of a container body formed by erecting a "cross-like" blank
    • B65D5/665—Hinged lids formed by folding extensions of a side panel of a container body formed by erecting a "cross-like" blank the lid being held in closed position by self-locking integral flaps or tabs
    • B65D5/6661—Flaps provided over the total length of the lid edge opposite to the hinge
    • B65D5/6664—Flaps provided over the total length of the lid edge opposite to the hinge combined with flaps or tabs provided at the side edges of the lid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D65/00—Wrappers or flexible covers; Packaging materials of special type or form
    • B65D65/38—Packaging materials of special type or form
    • B65D65/42—Applications of coated or impregnated materials

Abstract

본 발명은 삼염화붕소(BCl3)내의 염산(HCl)을 평가하기 위한 측정 시스템에 관한 것이다. 본 발명의 측정 시스템은 측정기, 가스 캐비넷 그리고 염산 공급부를 구비한다. 상기 측정기는 가스 셀을 구비하여 삼염화붕소내의 염산의 농도를 측정한다. 상기 가스 캐비넷은 상기 측정기와 제 1 공급라인으로 접속되어 상기 측정기에 삼염화붕소를 공급한다. 상기 염산 공급부는 상기 제 1 공급라인에 접속되어 일정한 농도로 희석된 염산을 상기 측정기에 공급하는 역할을 한다. 이와 같은 구성을 갖는 삼염화붕소내의 염산을 평가하기 위한 측정 시스템에 의하면, 독성과 부식성을 가진 가스인 경우에도 성분의 분석이 가능하므로 이를 바탕으로 해서 생산성 향상 및 수율 향상을 가져올 수 있다.The present invention relates to a measurement system for evaluating hydrochloric acid (HCl) in boron trichloride (BCl 3 ). The measuring system of the present invention has a meter, a gas cabinet and a hydrochloric acid supply. The meter comprises a gas cell to measure the concentration of hydrochloric acid in boron trichloride. The gas cabinet is connected to the meter and the first supply line to supply boron trichloride to the meter. The hydrochloric acid supply unit is connected to the first supply line and serves to supply hydrochloric acid diluted to a constant concentration to the measuring instrument. According to the measurement system for evaluating the hydrochloric acid in boron trichloride having such a configuration, even in the case of a gas having toxic and corrosive, it is possible to analyze the components, thereby improving productivity and yield.

Description

삼염화붕소내의 염산을 평가하기 위한 측정 장치{SYSTEM FOR MEASURING HCl IN BCl3}Measuring apparatus for evaluating hydrochloric acid in boron trichloride {SYSTEM FOR MEASURING HCl IN BCl3}

도 1은 본 발명의 실시예에 의한 삼염화붕소내의 염산을 평가하기 위한 측정 시스템을 설명하기 위한 다이어그램;1 is a diagram for explaining a measurement system for evaluating hydrochloric acid in boron trichloride according to an embodiment of the present invention;

도 2는 본 발명의 실시예에 의한 가스 캐비넷을 설명하기 위한 다이어그램 및;2 is a diagram for explaining a gas cabinet according to an embodiment of the present invention;

도 3은 본 발명의 실시예에 의한 삼염화붕소내의 염산의 평가결과를 보여주기 위한 그래프이다.3 is a graph showing the evaluation results of hydrochloric acid in boron trichloride according to an embodiment of the present invention.

* 도면의 주요 부분에 대한 부호의 설명* Explanation of symbols for the main parts of the drawings

202 : 저장탱크 204 : 분기관202: storage tank 204: branch pipe

206 : 제 1 공급라인 208 : 질소 가스탱크206: first supply line 208: nitrogen gas tank

210 : 측정장치 212 : 염산 발생기210: measuring device 212: hydrochloric acid generator

214 : 유량 조절기 216 : 제 2 공급라인214: flow regulator 216: second supply line

218 : 밸브 220 : 가스 캐비넷218 valve 220 gas cabinet

222 : 가스 셀 224 : 감지기222: gas cell 224: detector

226 : 제 2 펌프 228 : 제 1 펌프226: second pump 228: first pump

230 : 염산 공급부 232 : 기억장치230: hydrochloric acid supply unit 232: memory device

236 : 헬륨 가스탱크236 helium gas tank

본 발명은 화학 약품에 대한 측정 시스템에 관한 것으로, 좀 더 구체적으로는 삼염화붕소내의 염산을 평가하기 위한 측정 시스템에 관한 것이다.The present invention relates to a measurement system for chemicals, and more particularly to a measurement system for evaluating hydrochloric acid in boron trichloride.

삼염화붕소(BCl3)는 반도체 제조공정중에 메탈 라인 에칭(metal line etching)에 사용되며 부식성과 독성을 가지고 있다. 또한, 수분(H2O)과 반응할 경우에 수소염화물(hydrogen Chloride)를 형성하는 특징이 있다. 그러므로 상기 삼염화붕소와 수분이 반응할 경우에는 상기 삼염화붕소에는 수분 대신 염산(HCl)이 존재하게 된다. 상기 염산이 상기 삼염화붕소에 존재할 경우에는 공정 상에서 여러가지 문제점이 발생하게 되는데, 특히 메탈 라인 에칭(metal line etching)시에 에칭율(etch rate)이 감소하고, 강한 부식성을 가진 염산에 의해 부식된 설비에서 파티클(particle)이 발생하게 된다. 이러한 문제점들은 바로 수율에 직접적인 영향을 미치게 되므로 상기 삼염화붕소내의 염산의 농도를 측정하는 것은 상기 삼염화붕소의 품질을 검증하는 경우에 매우 중요한 일이다. 하지만, 기존의 가스 색층분석(gas chromatography)이나 습도 분석기(moisture analyzer)로는 설비의 손상 및 오염문제로 강한 독성과 부식성을 가진 상기 삼염화붕소내의 염산의 농도를 정확하게 측정할 수 없는 문제점이 발생한다.Boron trichloride (BCl 3 ) is used for metal line etching in semiconductor manufacturing processes and is corrosive and toxic. In addition, it is characterized by the formation of hydrogen chloride (hydrogen chloride) when reacted with water (H 2 O). Therefore, when the boron trichloride reacts with water, hydrochloric acid (HCl) is present in the boron trichloride instead of water. When the hydrochloric acid is present in the boron trichloride, various problems occur in the process, in particular, the etching rate is reduced during metal line etching, and the equipment is corroded by hydrochloric acid having strong corrosiveness. Particles are generated in the Since these problems directly affect the yield, measuring the concentration of hydrochloric acid in the boron trichloride is very important when verifying the quality of the boron trichloride. However, there is a problem in that conventional gas chromatography or humidity analyzer cannot accurately measure the concentration of hydrochloric acid in the boron trichloride having strong toxicity and corrosiveness due to damage and contamination of the equipment.

본 발명은 이와 같은 종래의 문제점을 해결하기 위한 것으로, 삼염화붕소내의 염산을 평가할 수 있는 새로운 형태의 측정 시스템을 제공하는데 있다.The present invention is to solve such a conventional problem, to provide a new type of measurement system capable of evaluating the hydrochloric acid in boron trichloride.

상술한 목적을 달성하기 위한 본 발명의 특징에 의하면, 삼염화붕소내의 염산을 평가하기 위한 측정 시스템은 측정기, 가스 캐비넷 그리고 염산 공급부를 구비한다. 상기 측정기는 삼염화붕소내의 염산의 농도를 측정한다. 상기 가스 캐비넷은 상기 측정기와 제 1 공급라인으로 접속되어 상기 측정기에 삼염화붕소를 공급한다. 상기 염산 공급부는 상기 제 1 공급라인에 접속되어 일정한 농도로 희석된 염산을 상기 측정기에 공급하는 역할을 한다According to a feature of the invention for achieving the above object, a measuring system for evaluating hydrochloric acid in boron trichloride comprises a meter, a gas cabinet and a hydrochloric acid supply. The meter measures the concentration of hydrochloric acid in boron trichloride. The gas cabinet is connected to the meter and the first supply line to supply boron trichloride to the meter. The hydrochloric acid supply unit is connected to the first supply line and supplies hydrochloric acid diluted to a constant concentration to the measuring instrument.

이와 같은 본 발명에서 상기 측정기는 가스 셀을 더 구비하고, 상기 제 1 공급라인은 내부면에 불화물의 막을 구비하여, 상기 제 1 공급라인의 부식을 방지한다.In the present invention as described above the measuring device further comprises a gas cell, the first supply line is provided with a film of fluoride on the inner surface, to prevent corrosion of the first supply line.

이와 같은 본 발명을 적용하면, 독성과 부식성을 가진 가스인 경우에도 성분의 분석이 가능하므로 이를 바탕으로 해서 생산성 향상 및 수율 향상을 가져올 수 있다.Applying the present invention as described above, even in the case of a gas having toxic and corrosive, it is possible to analyze the components based on this can lead to improved productivity and improved yield.

이하 본 발명의 실시예를 첨부도면 도 1 내지 도 2에 의거하여 상세히 설명한다. 동일한 구성요소에 대해서는 동일한 참조번호를 병기한다.Hereinafter, embodiments of the present invention will be described in detail with reference to FIGS. 1 and 2. Like reference numerals designate like elements.

도 1은 본 발명의 실시예에 의한 삼염화붕소내의 염산을 평가하기 위한 측정 시스템을 설명하기 위한 다이어그램이고 도 2는 본 발명의 실시예에 의한 가스 캐 비넷을 설명하기 위한 다이어그램이다.1 is a diagram for explaining a measurement system for evaluating hydrochloric acid in boron trichloride according to an embodiment of the present invention and Figure 2 is a diagram for explaining a gas cabinet according to an embodiment of the present invention.

도 1 내지 도 2를 참조하면, 삼염화붕소(BCl3)내의 염산(HCl)을 평가하는 시스템은 크게 세 부분으로 구성되는데 그 세 부분은 상기 삼염화붕소내의 염산을 측정하는 측정장치(210), 상기 삼염화붕소가 수용되어 있는 가스 캐비넷(gas cabinet)(220) 그리고 일정한 농도로 희석된 염산을 상기 측정기에 공급하는 역할을 하는 염산 공급부(230)이다. 먼저 상기 가스 캐비넷(220)에는 상기 삼염화붕소가 수용되어 있는 저장탱크(202)와 상기 저장탱크(202)에 연결된 분기관(manifold)(204) 그리고 실제 공정상에서 만일 삼염화붕소가 누출되는 경우에 분기관(204)을 클로즈시킬 수 있는 공기 밸브(pneumatic valve)(234)가 구비되어 있다. 그리고 상기 분기관(204)을 통해 추출된 샘플이 상기 측정장치(210)까지 연결되게 하는 제 1 공급라인(206)이 구비되어 있다. 상기 염산 공급부(230)에는 질소(N2) 가스탱크(208)와 염산 발생기(HCl generator)(212) 그리고 상기 질소가스와 염산가스를 양을 조절할 수 있는 유량 조절기(mass flow controller; MFC)(214)와 상기 가스들을 이송하기 위한 제 2 공급라인(216) 및 밸브(valve)(218)등이 구비되어 있다. 상기 측정장치(210)에는 상기 제 1 공급라인(206)을 통해서 이송된 삼염화붕소를 수용하는 가스 셀(gas cell)(222)과 감지기(detector)(224)로 구성된다. 본 발명의 실시예에서는 상기 측정장치(210)로 FT-IR spectroscopy를 이용한다. 상기 FT-IR은 IR(infrared) 빔을 농도를 알고자 하는 가스에 주사하여 그 가스 분자의 진동(vibration)과 회전(rotation)에 따른 에너지의 차이를 이용하여 스 펙트럼(spectrum)을 구한다. 고로 본 발명의 실시예에서는 상기 가스 셀(222)에 분석하고자 하는 상기 삼염화붕소를 넣고 상기 IR 빔을 주사하여 상기 감지기(224)로 스펙트럼을 검출한다. 검출된 데이타는 기억장치(예를 들어 컴퓨터)(232)로 전송되어 계속 저장될 수 있다. 하지만 상기 FT-IR까지 상기 삼염화붕소 가스를 운반하기 위해서 사용되는 제 1 공급라인(206)과 제 2 공급라인(216)에는 부식성 및 독성을 방지할 수 있는 방지수단이 설치되어야 한다. 본 발명의 실시예에서는 통상적으로 사용되는 EP SUS316L의 재질을 가진 제 1 공급라인(206)과 제 2 공급라인(216)의 내부면에 아이런 불화물(iron fluoride)의 막을 형성시켜서 부식성 가스가 이송되는 경우에도 특별한 화학 반응이 발생하지 않도록 한다. 또한, 상기 측정 시스템은 상기 측정장치(210)와 연결된 제 1 펌프(228)와 상기 가스 캐비넷(220)에 연결된 제 2 펌프(226)를 구비한다. 상기 제 1 펌프(228)는 상기 측정장치(210)의 상기 감지기(224)의 내부를 진공으로 유지하여 감도(sensitivity)를 좋게 해주는 역할을 한다. 상기 제 2 펌프(226)는 상기 가스 캐비넷(220)의 내부를 퍼지(purge)하는 경우에 사용된다. 1 to 2, the system for evaluating hydrochloric acid (HCl) in boron trichloride (BCl 3 ) is composed of three parts, the three parts measuring device 210 for measuring the hydrochloric acid in the boron trichloride, the A gas cabinet 220 containing boron trichloride and a hydrochloric acid supply unit 230 serving to supply hydrochloric acid diluted to a certain concentration to the measuring instrument. First, the gas cabinet 220 includes a storage tank 202 in which the boron trichloride is accommodated, a manifold 204 connected to the storage tank 202, and in the case of boron trichloride leakage in an actual process. A pneumatic valve 234 is provided that can close the engine 204. A first supply line 206 is provided to connect the sample extracted through the branch pipe 204 to the measuring device 210. The hydrochloric acid supply unit 230 includes a nitrogen (N 2 ) gas tank 208, a hydrochloric acid generator (HCl generator) 212, and a mass flow controller ( MFC) capable of adjusting amounts of the nitrogen gas and hydrochloric acid gas ( 214 and a second supply line 216 and a valve 218 for conveying the gases. The measuring device 210 includes a gas cell 222 and a detector 224 for receiving boron trichloride transported through the first supply line 206. In the embodiment of the present invention, the measurement apparatus 210 uses FT-IR spectroscopy. The FT-IR scans an IR (infrared) beam into a gas whose concentration is to be determined and obtains a spectrum using a difference in energy due to vibration and rotation of the gas molecules. Therefore, in the exemplary embodiment of the present invention, the boron trichloride to be analyzed is inserted into the gas cell 222, and the spectrum is detected by the detector 224 by scanning the IR beam. The detected data can be sent to storage (eg computer) 232 for continued storage. However, the first supply line 206 and the second supply line 216 used to transport the boron trichloride gas up to the FT-IR should be provided with a prevention means for preventing corrosiveness and toxicity. In the embodiment of the present invention to form a film of iron fluoride (iron fluoride) on the inner surface of the first supply line 206 and the second supply line 216 having a material of EP SUS316L which is commonly used to transport the corrosive gas Even if a special chemical reaction does not occur. The measuring system also includes a first pump 228 connected to the measuring device 210 and a second pump 226 connected to the gas cabinet 220. The first pump 228 serves to improve the sensitivity by maintaining the inside of the sensor 224 of the measuring device 210 in a vacuum. The second pump 226 is used to purge the inside of the gas cabinet 220.

그럼 상술한 측정장치를 사용하여 상기 삼염화붕소내의 염산을 분석하는 과정을 설명하면 다음과 같다. 먼저 상기 분기관(204)과 상기 제 1 공급라인(206)사이에 누출되는 곳이 없는지를 검사한다. 다음으로 도 2에 도시된 헬륨(He) 가스탱크(236과 238)를 먼저 공급시켜 상기 제 1 공급라인(206)의 불순물을 제거한다. 상기 제 1 공급라인(206)에 부식을 막기 위해서 상기 아이런 불화막을 만든다. 상기 저장탱크(202)로부터 상기 삼염화붕소를 추출하여 상기 측정장치(210)의 상기 가스 셀(222)에 수용한다. 이 과정은 약 7분정도가 소요된다. 5분마다 상기 염산의 농도를 상술한 측정장치를 이용해서 약 1시간 동안 측정한다. 농도값의 측정이 끝난 시스템은 상기 헬륨 가스를 이용하여 약 20회 이상 퍼지시키면서 크리닝한다. 측정된 농도값을 보정(calibration)하기 위해서 먼저 염산 공급부(230)를 이용하여 만든 염산을 질소 가스를 이용하여 희석하여, 5 step 정도의 농도를 3번씩 만들어서 그 농도와 상승 면적(peak area)를 계산한 값을 기록한다. 그리고 농도와 상기 상승 면적을 대입하여 MIDAC GRAMS/32 소프트웨어를 이용하여 상기 염산의 보정 커브(calibration curve)를 그린다. 이렇게 미리 보정 곡선을 구한 후에 상기 염산 공급부(230)에서 임의로 조정이 가능한 염산의 농도로 미리 실험해 본 데이타를 이용하여 측정된 농도값을 보정하고 최종 결과를 정리하면 도 3에 도시된 것과 같은 결과를 얻는다.Then, the process of analyzing the hydrochloric acid in the boron trichloride using the above-described measuring device is as follows. First, there is no leak between the branch pipe 204 and the first supply line 206. Next, the helium (He) gas tanks 236 and 238 illustrated in FIG. 2 are first supplied to remove impurities from the first supply line 206. The iron fluoride film is formed to prevent corrosion in the first supply line 206. The boron trichloride is extracted from the storage tank 202 and accommodated in the gas cell 222 of the measuring device 210. This process takes about seven minutes. Every 5 minutes, the concentration of hydrochloric acid is measured for about 1 hour using the measuring apparatus described above. After the measurement of the concentration value, the system is cleaned while purging about 20 times using the helium gas. In order to calibrate the measured concentration value, first, hydrochloric acid made by using the hydrochloric acid supply unit 230 is diluted with nitrogen gas, and the concentration and peak area are made by making three concentrations of about 5 steps three times. Record the calculated value. Subsequently, the calibration curve of hydrochloric acid is drawn using MIDAC GRAMS / 32 software by substituting the concentration and the rising area. After calculating the calibration curve in advance, the concentration value of hydrochloric acid, which can be arbitrarily adjusted in the hydrochloric acid supply unit 230, is preliminarily adjusted using the data obtained, and the final result is summarized as shown in FIG. Get

도 3을 참조하면, A사와 M사의 삼염화붕소내의 염산의 평가결과이다. 약 60분간 플로우(flow)시킨 경우에 초기에 높았던 염산의 농도가 차츰 안정되어가는 것을 알 수 있다. 특히 25분 이후부터는 안정적인 모습을 보이고 있는 것을 알 수 있다. 그러므로 초기의 염산의 농도가 높았던 이유는 삼염화붕소를 초기에 부착하는 단계에서 수분이 유입되어 생긴 결과라고 유추되며 실제 공정상에서 염산의 농도를 유지하기 위해서는 미리 헬륨과 같은 가스를 사용하여 설비들을 충분히 드라이(dry)시킨 상태에서 공정을 진행하는 것이 생산성을 높일 수 있다는 결론을 얻을 수 있다.Referring to Fig. 3, it is an evaluation result of hydrochloric acid in boron trichloride of A company and M company. It can be seen that the concentration of hydrochloric acid, which was initially high when the flow was flowed for about 60 minutes, gradually became stable. In particular, it can be seen that after 25 minutes, it is stable. Therefore, the reason why the initial concentration of hydrochloric acid is high is inferred to be the result of the inflow of water during the initial attaching of boron trichloride. In order to maintain the concentration of hydrochloric acid in the actual process, dry the facilities sufficiently using a gas such as helium in advance. It can be concluded that running the process in a dry state can increase productivity.

이와 같은 본 발명을 적용하면, 독성과 부식성을 가진 가스인 경우에도 성분의 분석이 가능하므로 이를 바탕으로 해서 생산성 향상 및 수율 향상을 가져올 수 있다.
Applying the present invention as described above, even in the case of a gas having toxic and corrosive, it is possible to analyze the components based on this can lead to improved productivity and improved yield.

Claims (3)

삼염화붕소내의 염산을 평가하기 위한 측정 장치에 있어서,In the measuring device for evaluating hydrochloric acid in boron trichloride, 삼염화붕소내의 염산의 농도를 측정하기 위한 측정기와; A measuring device for measuring the concentration of hydrochloric acid in boron trichloride; 상기 측정기와 제 1 공급라인으로 접속되어 상기 측정기에 삼염화붕소를 공급하기 위한 가스 캐비넷; 및 A gas cabinet connected to the meter and a first supply line to supply boron trichloride to the meter; And 상기 제 1 공급라인에 접속되어 일정한 농도로 희석된 염산을 상기 측정기에 공급하기 위한 염산 공급부;A hydrochloric acid supply unit connected to the first supply line for supplying hydrochloric acid diluted to a constant concentration to the measuring device; 를 포함하는 것을 특징으로 하는 삼염화붕소내의 염산을 평가하기 위한 측정 장치.Measuring apparatus for evaluating hydrochloric acid in boron trichloride, characterized in that it comprises a. 제 1 항에 있어서, The method of claim 1, 상기 제 1 공급라인의 내부면에는 상기 제 1 공급라인의 부식을 방지하는 불화물의 막이 형성된 것을 특징으로 하는 삼염화붕소내의 염산을 평가하기 위한 측정 장치.A measuring device for evaluating hydrochloric acid in boron trichloride, characterized in that a film of fluoride is formed on the inner surface of the first supply line to prevent corrosion of the first supply line. 제 1 항에 있어서, The method of claim 1, 상기 측정기는, 가스 셀을 더 포함하는 것을 특징으로 하는 삼염화붕소내의 염산을 평가하기 위한 측정 장치.The measuring device further comprises a gas cell, the measuring device for evaluating the hydrochloric acid in boron trichloride.
KR1019990015929A 1999-05-03 1999-05-03 SYSTEM FOR MEASURING HCl IN BCl3 KR100583642B1 (en)

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Citations (4)

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Publication number Priority date Publication date Assignee Title
US4081247A (en) * 1976-02-02 1978-03-28 Beckman Instruments, Inc. Method and apparatus for the chemiluminescent detection of HCl
US4105508A (en) * 1976-04-02 1978-08-08 Commissariat A L'energie Atomique Method and device for analysis of a mixture of hydrochloric acid and organochlorine compounds contained in gases derived in particular from the incineration of organochlorine compounds
JPH01107148A (en) * 1987-10-20 1989-04-25 Agency Of Ind Science & Technol Concentration measuring method of hydrochloric acid in solution of hydrochloric acid containing chlorine
KR19990054227A (en) * 1997-12-26 1999-07-15 윤종용 Impurity Analysis System of Boron Chloride Gas and Impurity Analysis Method Using Boron Chloride Gas

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4081247A (en) * 1976-02-02 1978-03-28 Beckman Instruments, Inc. Method and apparatus for the chemiluminescent detection of HCl
US4105508A (en) * 1976-04-02 1978-08-08 Commissariat A L'energie Atomique Method and device for analysis of a mixture of hydrochloric acid and organochlorine compounds contained in gases derived in particular from the incineration of organochlorine compounds
JPH01107148A (en) * 1987-10-20 1989-04-25 Agency Of Ind Science & Technol Concentration measuring method of hydrochloric acid in solution of hydrochloric acid containing chlorine
KR19990054227A (en) * 1997-12-26 1999-07-15 윤종용 Impurity Analysis System of Boron Chloride Gas and Impurity Analysis Method Using Boron Chloride Gas

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