KR100581420B1 - Multi-level substrate processing apparatus - Google Patents

Abstract

A substrate processing apparatus having a substrate transfer board and a substrate processing chamber is provided. The substrate transfer keyboard includes a transfer chamber and a transfer mechanism. The transfer mechanism includes a rotary drive, an arm connected to the drive to rotate in a vertical direction, and a substrate holder rotatably connected to an end of the arm by an artificial joint. The arm can raise and lower the substrate holder vertically. The substrate processing chamber is fixedly connected to the transfer chamber in different vertical layers.

Description

Multilayer Substrate Processing Equipment {MULTI-LEVEL SUBSTRATE PROCESSING APPARATUS}

TECHNICAL FIELD The present invention relates to a substrate processing apparatus, and more particularly, to an apparatus having substrate processing chambers in different vertical layers on a transfer chamber.

Mattson technology is a system known as the ASPEN system that allows two semiconductor wafers to be pushed into or out of the process chamber at the same time. In the prior art, batch systems, single wafer systems, cluster tool systems, and the like are known. U.S. Patent 4,951,601 discloses a substrate manufacturing apparatus and a substrate transfer apparatus having multiple process chambers. U. S. Patent No. 5,180, 276 discloses a substrate transfer device having two substrate holders. U.S. Patent 5,270,600 discloses a coaxial drive shaft assembly of a substrate transfer device. U.S. Patent 4,094.772 discloses a rotatable pallet capable of holding four wafers. US Pat. No. 4,381,965 discloses a multilayer planar electrode plasma etchant. US Pat. No. 4,675,096 discloses entry and retraction chambers having side-by-side entry and retraction positions. Other conventional techniques are as follows.

U.S. Pat. 4,208,159, US Patent 4,666,366, US Patent 4,721,971, US Patent 4,730,975, US Patent 4,907,467, US Patent 4,909,701, US Patent 5,151,008, US Patent 5,333,986, US Patent 5,447,409 European Patent Publication No. 0423608, Japanese Patent Publication No. 2-292153

1 is a schematic plan view of a substrate processing apparatus according to the prior art,

2A is a schematic plan view showing an embodiment of a substrate processing apparatus according to the present invention;

FIG. 2B is a schematic partial detail view of the apparatus shown in FIG. 2A;

FIG. 2C is a partial detailed view of the arm of the apparatus shown in FIG. 2B in an extended state; FIG.

FIG. 2D is a partial detail view showing an arm placed on the front side of the processing module on the right side in the retracted position as shown in FIG. 2B;

FIG. 2E is a partial detail view of the arm shown in FIG. 2D in an extended state;

3 is a schematic side view of the apparatus shown in FIG. 2A,

4 is a schematic cross-sectional view of a joint between the two arm parts shown in FIG. 3,

5A is a schematic plan view of another embodiment of a substrate processing apparatus of the present invention,

FIG. 5B is a schematic side view of the apparatus shown in FIG. 5A,

6 is a schematic plan view of another embodiment of a substrate processing apparatus of the present invention;

7 is a schematic partial side view of another embodiment of a substrate processing apparatus of the present invention;

8 is a schematic side view illustrating an embodiment of an artificial joint part.

According to an embodiment of the present invention, a substrate processing apparatus having a substrate transfer board and a substrate processing chamber is provided. The substrate transfer panel includes a transfer chamber and a transfer mechanism for moving the substrate into and out of the transfer chamber. The substrate processing chamber is fixedly connected to the transfer board. The first processing chamber is located in a plane directly above the second processing chamber. The transfer mechanism transfers the substrate into and out of the first and second processing chambers.

According to yet another embodiment of the present invention, a substrate transfer mechanism for moving a substrate into and out of the substrate processing chamber includes a rotary drive, a first arm and a first substrate holder. The first arm is rotatably connected to the drive to the drive. The arm has a first arm portion rotatably connected to a second arm portion. The first substrate holder is rotatably connected to the second arm portion. At least one of the arm portions rotates in the vertical direction when it is rotated.

According to yet another embodiment of the present invention, a substrate transfer mechanism for transferring the substrate into and out of the substrate processing chamber includes a first arm and a substrate holder. The first arm has two arm parts rotatably connected to each other so that the arm parts can move in parallel vertical directions as they rotate relative to each other. The substrate holder is movably installed on one of the arm portions by an artificial joint portion.

According to still another embodiment of the present invention, a substrate processing apparatus includes a substrate transfer board, a substrate processing chamber, and a controller. The substrate transfer panel includes a transfer chamber and a substrate transfer mechanism. The substrate processing chamber is fixedly connected to the transfer chamber. The processing chambers are located in at least two different horizontal planes, wherein at least two processing chambers are located in the horizontal plane. The controller is for controlling the substrate transfer mechanism for entering and retracting the substrate into the processing chamber in a vertically different horizontal plane.

According to another embodiment of the invention, the substrate transfer mechanism for the substrate processing apparatus includes a drive, two arms and two substrate holders. The arm is rotatably connected to the drive to move in the vertical direction. Each substrate holder is connected to a respective arm.

According to the method according to the present invention, a method of transferring substrates in a substrate processing apparatus includes providing a substrate transfer mechanism having a continuous connection member rotatably connected to each other. The continuous connecting member has a substrate holder connected at an end of the transfer mechanism, and the method of the present invention allows rotation of the continuous connecting members relative to each other so that the substrate holder can enter and retract straight into the substrate processing chamber. Control is further included.

According to another method of the present invention, a method of transferring a substrate in a substrate processing apparatus includes providing a substrate transfer mechanism having an arm connecting a drive to a substrate holder. The arm has an arm portion rotatably connected with respect to each other at an intermediate joint and rotatably connected to a drive at an inner joint, and a substrate holder is coupled to the arm for movement along two or more orthogonal axes of rotation at the end joint. It is rotatably connected. The method further includes controlling the rotational movement of the drive and the substrate holder and the arm portion to enter and retract the substrate holder into the substrate processing chamber at different horizontal and vertical positions.

1 shows a substrate processing apparatus 10 according to the prior art. The conventional processing apparatus 10 includes a transfer board 12, four substrate processing modules 14, and two substrate lifting modules 16. The transfer plate 12 has a transfer chamber 18 and a transfer mechanism 20. The transfer mechanism 20 moves the substrate from the various substrate processing modules 14 and the substrate elevating module 16.

2A shows an embodiment of a substrate processing apparatus according to the present invention. The substrate processing apparatus 22 is provided with the transfer board 24, four substrate processing modules 26, 27, 28, and 29, and two board | substrate raising / lowering modules 30 and 31. As shown in FIG.

The transfer panel 24 includes a transfer chamber 32 and a transfer mechanism 34. As shown in the illustrated embodiment, the transfer chamber 32 has a normal rectangular shape, and two substrate lifting modules 30 and 31 are connected at one side thereof, and four processing modules 26 at the other side thereof. 27, 29, 29) are connected. As shown in FIG. 3, each elevating module 30, 31 has a frame 36 fixedly connected to the transfer chamber 32. A movable gate 38 is provided at each connection of the transfer chamber 32 and the elevating modules 30, 31. Each elevating module 30, 31 holds the cassette 40 of the substrate S. As shown in FIG. The cassette 40 is moved up and down by the elevating modules 30 and 31. Each lift module 30, 31 is provided with another movable gate 42 to enter or remove the cassette 40. As another embodiment, any suitable type of board lifting module or board supply module may be provided.

Each substrate processing module 26, 27, 28, 29 is fixedly connected to the transfer chamber 32 and includes a frame 44 having a gate mechanism 46 therebetween. The gate mechanism 46 opens the path between the transfer chamber 32 and the processing modules 26, 27, 28, 29, and isolates the processing modules 26, 27, 28, 29 from the transfer chamber 32. To close the path between them. The processing modules 26, 27, 28, 29 may be appropriately made according to any suitable substrate processing type such as heating the substrate or cooling the substrate. In the embodiment shown in the figure, the processing modules 26, 27, 28, 29 are arranged in a shape stacked in two layers. The first processing module 26 is located directly above the second processing module 27. In another embodiment, the first processing module 26 may be located above the second processing module 27, but may not be located directly above it vertically. That is, the central axis of the first processing module 26 may be slightly off the central axis of the second processing module 27. In another embodiment, the first processing module 26 may be completely shifted from the vertical position with respect to the second processing module 27 to be offset from each other. Similarly, the third processing module 28 may be offset from the fourth processing module 29, and may be any suitable combination of any form, such as being offset from each other, arranged vertically next to each other, or arranged in pairs. It is possible. The two pairs of modules 26, 27 and 28, 29 are located next to each other next to each other. Comparing the processing device 10 shown in FIG. 1 with the processing device 22 shown in FIG. 2A, the front width W ₂ of the processing device 22 shown in FIG. 2A is shown in FIG. 1. It can be seen that it is considerably smaller than the front width W ₁ of (10). When the multi-layer substrate processing apparatus is located in the same space, the shape of the processing apparatus shown in FIG. 2A can place more processing units side by side in the same horizontal space than the conventional processing apparatus 10. The conventional processing apparatus 10 and the processing apparatus 22 of FIG. 2A both have the same number of processing modules, that is, four processing modules. Thus, these devices can perform substantially the same function within the same time. The use of the processing apparatus 22 of the present invention occupies only a smaller space than the space occupied by the conventional processing apparatus 10 even when using the same number of apparatuses. In this way, more new processing devices 22 can be used in the same horizontal space than conventional processing devices 10. In addition, the processing apparatuses 22 of the present invention can be arranged side by side close to each other to facilitate access to the processing modules 26, 27, 28, 29 during maintenance (all of which are accessible from one side). So).

The conventional transfer mechanism 20 was only needed to move the substrate in a single horizontal direction, and only a small range of vertical movement was possible to mount or remove the substrate. On the other hand, in the transfer mechanism 34 of the present invention, it is required to be able to position and remove the substrate from the upper processing modules 26 and 28 and the lower processing modules 27 and 29 positioned so that the vertical positions are shifted from each other. do. The embodiment shown in FIG. 3 is provided with a rotatable drive 48, an arm 50 and a substrate holder 52 which are pivotable to the transfer mechanism 34.

The rotary drive 48 is connected to the main controller 54. The main controller 54 is provided with a computer that is connected to other components of the processing device 22, such as components such as gates 38, 42, 46. The main controller 54 controls the axial rotation of the rotary drive 48 as indicated by arrow A1. The arm 50 is usually comprised by the 1st arm part 56 and the 2nd arm part 58. As shown in FIG. The first arm portion 56 is pivotally connected to the drive 48 by a joint 60 so that it can only pivot in the vertical direction with respect to the drive 48 as indicated by arrow A2. That is, the first arm portion 56 is constrained to move in a different direction except for being rotated in the vertical direction with respect to the drive 48. One end portion of the second arm portion 58 is pivotally connected to the opposite end of the first arm portion 56 by a joint 62 so that the second arm portion 58 can move as indicated by arrow A3. An artificial joint 64 is provided at the other end of the second arm 58. The articulation portion 64 functions to connect the substrate holder 52 to the arm 50, which articulation portion 64 is pivotable to the arm 50 by the joint 66 so as to be pivotable as indicated by arrow A4. Is fitted. The joint 64 is connected to the joint 66 so that it can only rotate in the vertical direction with respect to the second arm 58. The substrate holder 52 is connected to the upper portion of the joint portion 64 so as to be rotatable as indicated by arrow A5. The substrate holder 52 is also connected to the joint 64 so as to be rotatable only in the horizontal direction with respect to the joint 64.

FIG. 3 shows that the transfer mechanism 34 is in position B to enter the substrate S into the lower right processing module 27. Also shown in FIG. 3 is a dotted line where the transfer mechanism 34 is in position C, which enters the substrate S into the upper right processing module 26. As can be seen by contrasting the two positions B and C, the substrate holder 52 is horizontal at both positions B and C. That is, in the transfer mechanism 34 of the present invention, the substrate holder can always be horizontal at any position of the transfer mechanism 34. As such, the substrate holder 52 is always kept horizontal, which is very helpful in preventing the substrate S from falling from the holder 52. 4 shows a portion of the joint 62. As shown in the figure, a channel 68 is formed in the first arm portion 56. The second arm portion 58 is connected to the first arm portion 56 by a shaft 70. The shaft 70 has a vacuum seal 72 at the joint and is fixedly connected to the second arm portion 58. The shaft 70 extends into the first arm portion 56 and is rotatably connected by two bearings 74. The inlet through which the shaft 70 enters the first arm portion 56 is provided with a vacuum seal, such as a ferrofluidic seal 76 or a lip seal. The shaft 70 has a channel 78 and the second arm portion 58 also has a channel 80. The three channels 68, 78, 80 are paths that allow the control cable 82 to pass through the arm 50 to the joint 64, specifically the substrate holder 52. The joint motion control unit 84 is located in the first arm unit 56. In the embodiment shown in the figure, the joint movement control unit 84 is an electric motor for rotating the shaft 70 in the axial direction with respect to the first arm portion 56. The joint motion control unit 84 is connected with a portion 82 ′ of the control cable 82. In the embodiment shown in the figure, the control cable 82 is an electrical cable that is connected to the controller 54 and / or a power source (not shown) through the rotary drive 48 to the rear. The manner in which the first arm portion 56 is connected to the rotary drive 48 at the joint 60 is substantially the same as that at the other joint 62. Likewise, the manner in which the joint 64 is connected to the second arm portion 58 at the joint 66 is substantially the same as the manner at which the joint 64 is connected. However, as another embodiment, any suitable type of mechanical joint structure and connection structure may be used for the three joints 60, 62, 66. Also, the joint structures do not necessarily need to be substantially identical to each other. Although the joint motion control unit 84 has been described above as an electric motor, an electrical position sensor or encoder 85a is included in the joint motion control unit 84 that can signal the position of these two elements relative to each other. It is preferable. The position encoder may be omitted. Control cable 82 may include hydraulic conduits or pneumatic conduits. Also in channels 62, 78, 80, substrate holder 52 is passed through the channel for such as an apparatus or mechanism (not shown) to help retain substrate S in substrate holder 52. Another cable or conduit that extends to connect) may pass through. The articulation portion 64 is provided with a horizontal rotation portion 65 connected to the substrate holder 52 so as to rotate as shown by arrow A5. The transfer chamber 32 is preferably maintained in the absence of air, ie in a vacuum. To this end, seals 72 and 76 and other seals not shown are provided in the joint. In order to protect the control cable and other controllers in the arm and to protect the state of the transfer chamber 32, the channels 68, 78, 80 are preferably sealed in isolation from the transfer chamber 32 in a vacuum. To prevent corrosion due to corrosive gases that may enter the transfer chamber 32 from the processing modules 26, 27, 28 and 29, to block the harmful effects of extreme high and / or low temperatures caused by the module and to In order to isolate from electrical noise interference, control cables and other controllers within the arm must remain separated from the transfer chamber 32. The vacuum state of the transfer chamber 32 must be protected from contaminating particles or gas effects, such as by lubrication in the controller and joint. On the other hand, as another embodiment, it is also possible to keep the channels 68, 78, 80 in a vacuum.

As described above, in order to prevent the substrate S from moving on the substrate holder, the substrate holder 52 must be kept horizontal. To this end, the controller 54 uses the joint 66 based on the position of the two first and second arm portions 56, 58 relative to each other and the position of the first arm portion 56 relative to the rotary drive 48. It automatically controls the rotation of the articulation portion 64 relative to the arm 50 at. The position sensors at the two joints 60, 62 signal the position of the rotary drive 48 and the position relative to each other of the first and second arm portions to send to the controller 54. The controller 54 is preprogrammed to select the position of the articulation 64 relative to the second arm portion 58 based on the preprogrammed information so that the substrate holder 52 can be held horizontally. As another embodiment, the controller may use an algorithm based on the sensing results of the rotation drive 48, the first arm portion 56 and the second arm portion 58 position. As another example, the joint 64 may be configured to have an active self-controlling leveling device. In addition, non-horizontal substrate movement may occur in embodiments such as when the substrate is actively held by the holder. On the other hand, it is also possible to equip the substrate processing apparatus 22 with a three-dimensional beacon / optical sensor such as shown in U.S. Patent No. 5,279,309, which is incorporated by reference.

The transfer mechanism 34 is controlled by the controller 54 to enter or retract the substrate holder 52 into the processing module 26, 27, 28, 29 and the elevating module 30 in a substantially shortest distance continuous operation. Controlled. This is accomplished by the horizontal rotation 65 and the rotation drive 48 rotating as the arm 50 is extended or retracted to compensate for the radially outward or inward movement of the arm 50. For example, as shown in FIGS. 2B and 2C, when the arm 50 extends from the retracted position of FIG. 2B to the extended position of FIG. 2C, the rotary drive 48 also rotates in the direction of arrow A1a and is horizontal. The rotary part 65 also rotates in the direction of arrow A5a. The rotation ratio to arrows A1a and A5a is controlled by the controller 54 based on the rotation of the arm portion of the arm 50 so that the substrate holder 52 and the substrate S can enter the processing module 28 at the substantially shortest distance. Controlled by Similarly, when the arm 50 is retracted from the extended position of FIG. 2C to the retracted position of FIG. 2B, the rotation drive 48 also rotates in the direction of the arrow A1b and the horizontal rotation part 65 also rotates in the direction of the arrow A5b. This operation causes the substrate holder to withdraw substantially from the processing module at the shortest distance. Similar supplemental rotation occurs when the substrate holder 52 enters or retracts from the lower left processing module 29. 2d and 2e show the entry and retraction operations of the arm 50 to the upper right processing module 26. Supplementary rotations A1 _c and A5 _c are made while the arm is extended, and supplementary rotations A1d and A5 _d are made while the arm is retracted. Similar supplemental rotation is also made for the lower right hand treatment module 27. Similarly, similar supplemental rotations are made to the entry and retraction operations for the elevating modules 30, 31. If the embodiment of the module 26, 27, 28, 29, 30, 31 is properly arranged and has a suitable entrance to the non-supplementary movement path of the entry and retraction of the transfer mechanism, the rotary drive 48 and the horizontal rotation 65 May not require a supplementary rotation. In another embodiment, the rotary drive (based on the movement of the first arm portion 56 and the second arm portion 58, rather than a controller that moves the horizontal rotary portion 65 and the rotary drive 48 to achieve supplemental rotation) Supplementary rotation may also be achieved by a direct mechanical linkage to the arm 58, which mechanically rotates 48 and horizontal rotation 65. This may be accomplished by means such as gears, belts and / or bands, etc., as disclosed in US Pat. No. 5,431,529, which is incorporated herein by reference. With regard to the ability of the arm 50 to move the substrate holder in the vertical direction when the first and second arm portions 56, 58 are moved in rotation, the transfer mechanism 34 is coupled to the modules 26, 27, 28, 29,. There is no need for a rotary drive 48 that can move vertically to raise and lower the substrate within 30, 31. However, if desired, the rotary drive 48 may be provided with a vertical transfer mechanism. In another embodiment, the joint portion 64 includes a vertical mover connected to the controller 54 to move the substrate holder 52 vertically up and down within the modules 26, 27, 28, 29, 30, 31. It may be provided. Alternatively, arm 50 may be configured to have two or more arm portions. In addition to the rotating arm portion, it may further include an arm portion that can be folded and stretched. It is also possible to use a substrate holder capable of simultaneously holding and transporting one or more substrates, as shown in US patent application Ser. No. 08 / 587,087.

5a and 5b show another embodiment according to the invention. The substrate processing apparatus 100 of the embodiment shown in the figure has an upper shape similar to the processing apparatus shown in FIG. However, the processing apparatus 100 of this embodiment includes eight processing modules 102, a transfer chamber 104 having a regular hexagonal shape, a transfer mechanism 106, and four lifting modules 108. Doing. As shown in FIG. 5B, the processing module 102 includes two layers D and E in the processing apparatus 100. The processing modules 102 are arranged in four positions F, G, H and I, with two modules stacked up and down at each position. The transfer mechanism 106 is substantially the same as the transfer mechanism 34 shown in FIG. However, in the present embodiment, the first arm portion 110 is provided at the center with respect to the rotary drive 112. Moreover, the 2nd arm part 114 is attached to a 1st arm part so that it may have a center axis in the same plane as the center axis of a 1st arm part. However, any configuration of arm that can be properly rotated vertically can be used. As can be seen from FIG. 1 and FIG. 5A, the processing apparatus 100 of the present invention indicated by the member number 100 and the conventional processing apparatus 10 indicated by the member number 10 occupy the same lower area. However, the processing apparatus 100 of the present invention has twice as many substrate processing modules, resulting in higher productivity per unit area than the conventional processing apparatus 10.

6 illustrates another embodiment of the present invention. In the present embodiment, the substrate processing apparatus 200 is substantially the same as the processing apparatus 22 shown in FIG. 2A except for the transfer mechanism 202. The processing apparatus 200 of the present embodiment includes a transfer chamber 32, four processing modules 26, 27, 28, and 29, and two lifting modules 30 and 31. The transfer mechanism 202 includes one main rotor 204, two second rotors 206, two arms 208, and two substrate holders 210. The main rotor 204 can rotate the two second rotors 206 and their arms 208 clockwise or counterclockwise. The two second rotors 206 are independently rotatable. Thus, the main rotor need not be used to move the substrate between the elevating module 30, 31 and the processing module 26, 27, 28, 29. According to the same format as in the present embodiment, the output per hour can be increased. The processing apparatus shown in FIG. 2A may also have multiple substrate holders as shown in FIG. 6 instead of two separate substrate holders. In this case, of course, the modules 26, 27, 28, 29, 30, 31 need to be configured in a form that can accommodate multiple substrates and multiple substrate holders.

7 shows another embodiment of the present invention. In the present embodiment, the transfer mechanism 220 includes three arms 222, 224, and 226, an artificial joint 228, a substrate holder 229, and a vertical mover 230. The substrate processing apparatus is provided with the processing module 232 arrange | positioned by several layers perpendicular | vertical to three layers. The first arm 22 is maintained in a substantially vertical direction, and the mover 203 is formed with the other arm portions 224 and 226, the joint portion 228 and the holder (with respect to the central axis of the first arm 222). The first arm portion 222 is rotated in the axial direction so as to rotate 229. The combination of the vertical movement of the first arm and the rotational movement of the other arm portions 223, 226 allows the substrate holder 229 to enter or retract from the different processing modules 232 arranged vertically in three layers. Of course, it is also possible to arrange | position processing module more than three layers. In addition, the modules need not be vertically arranged in a straight line, and modules in neighboring layers may be arranged to be offset from each other. This configuration may require proper duct lines for the module and may be provided with motor installation zones for portions of the module for operation. 8 illustrates another embodiment of the artificial joint 250. In the present embodiment, the second arm portion 58 is rotatably connected to the upper portion of the joint portion 250 as indicated by arrow A4 ₈ . Horizontal turn 252 is located at the bottom of articulation 250 and rotates as indicated by arrow A5 ₈ . In this type of embodiment, the substrate holder 254 can move between opposing sides of the processing apparatus without rotating the arm relative to the main rotor. The arm merely uses the rotor 252 to change the orientation of the substrate holder 254 to cause the joint 252 to move back and forth like a weight movement. In other embodiments, other joint shapes may be used as appropriate.

What has been described above is for explaining the embodiments of the present invention, and thus, various modifications and selections may be made within the spirit and scope of the present invention.

Claims (57)

A substrate transfer panel having a transfer chamber and a transfer mechanism for moving the substrate into and out of the transfer chamber; A plurality of substrate processing chambers connected to the transfer chamber, wherein a first processing chamber of the processing chambers is located directly above a second processing chamber, wherein the first processing chamber and the second processing chamber are the transfer chamber; Substrate processing chambers individually and independently coupled to the And the transfer mechanism transfers the substrate by entering and retracting the substrate into the first and second processing chambers. 2. The transfer mechanism of claim 1, wherein the transfer mechanism includes a rotary drive and an arm rotatably connected to the drive, wherein the arm consists of two consecutively connected arm portions arranged to pivot in a vertical direction. Substrate processing apparatus, characterized in that. The substrate processing apparatus of claim 2, wherein the transfer mechanism further comprises a substrate holder connected to one end of the arm portion by an artificial joint portion. 4. The substrate processing apparatus of claim 3, wherein the joint portion is employed to pivot in two or more different directions with respect to the arm. The substrate processing apparatus of claim 1, wherein the transfer mechanism includes a substrate holder at an end portion and includes an arm that can be vertically rotated. 6. A substrate processing apparatus according to claim 5, further comprising means for continuously holding the substrate holder in a horizontal position even when the arm is pivoted vertically. The processing chamber of claim 1, wherein the processing chamber is arranged vertically shifted from the first processing chamber located on the first horizontal plane, and is perpendicular to the second processing chamber located on the second horizontal plane that is shifted in the vertical position. And a third processing chamber arranged in a displaced direction, wherein the entry and withdrawal into the first, second and third processing chambers is performed at three different vertical positions, respectively. The method of claim 1, wherein the transfer mechanism, Rotary drive; A first arm pivotally connected to said drive and having a first arm portion pivotally connected to a second arm portion; And A first substrate holder rotatably connected to the second arm portion, And at least one arm portion of said arm portions pivots in a vertical direction when he rotates. The substrate processing apparatus of claim 8, wherein the substrate holder is connected to the second arm portion by an artificial joint portion that rotates in two different directions. 9. The substrate processing apparatus of claim 8, wherein the transfer mechanism further comprises means for holding the substrate holder in a horizontal position when the arm moves. The substrate processing apparatus of claim 8, wherein the first and second arm portions are constrained to have horizontal rotational movements with respect to each other, and the first arm portion is constrained to have horizontal rotational movements with respect to the rotational drive. . The apparatus of claim 8, wherein the arm is employed to move the substrate holder to a different vertical position with respect to the rotary drive. The substrate processing apparatus of claim 8, wherein the transfer mechanism further comprises a second arm similar to the first arm, and a second substrate holder connected to an end of the second arm. The substrate processing apparatus of claim 13, wherein the rotary drive includes two rotary drive units, and each of the drive units is connected to each arm. The substrate processing apparatus of claim 8, wherein the transfer mechanism further includes control means for controlling relative movement of the drive, the arm portion, and the substrate holder with respect to each other. The substrate processing apparatus according to claim 15, wherein the control means includes a position detection sensor at a joint portion between the drive and the arm. The substrate processing apparatus according to claim 15, wherein the control means includes a joint driver in a joint portion between the drive and the arm. The substrate processing apparatus according to claim 15, wherein the arm portion is provided with a channel through which a part of the control means passes. 19. The substrate processing apparatus according to claim 18, wherein the transfer mechanism is provided with a seal for maintaining a sealed state of the channel in the joint at a joint between the drive and the arm portion. The method of claim 1, wherein the transfer mechanism, A first arm having two arm portions rotatably connected to each other to move side by side in a vertical direction when turning relative to each other; A substrate holder movably mounted to any one of the arm portions by an artificial joint portion; And said artificial joint is pivotable in at least one direction to maintain the substrate holder in a horizontal position. 21. The substrate processing apparatus of claim 20, wherein the joint portion is constrained to rotate only in two directions. 21. The substrate processing apparatus of claim 20, wherein any one of the arm portions is pivotally connected to a horizontally rotatable rotary drive. 21. The apparatus of claim 20, wherein the arm portions move the substrate holder to different vertical positions when pivoting relative to each other. 21. The substrate processing apparatus of claim 20, wherein the transfer mechanism further comprises a second arm similar to the first arm and a second substrate holder connected to an end of the second arm. 25. The substrate processing apparatus of claim 24, wherein the transfer mechanism includes two rotary drive units, and each drive unit is connected to each arm. 21. The substrate processing apparatus of claim 20, wherein the transfer mechanism further comprises control means for controlling relative movement of the arm portion and the substrate holder with respect to each other. 27. The substrate processing apparatus of claim 26, wherein the control means includes a position detection sensor at a joint between the arm portion and the substrate holder. The substrate processing apparatus according to claim 26, wherein the control means includes a joint driver in a joint between the arm portion and the substrate holder. A substrate transfer panel having a substrate transfer mechanism and a transfer chamber; Substrate processing chambers connected to the transfer chamber and positioned in two or more different horizontal planes arranged vertically; A controller for moving a substrate transfer mechanism for entering and retracting a substrate from a processing chamber in said different horizontal planes; At least one processing chamber is located on at least one of the horizontal surfaces, and two or more processing chambers arranged vertically are individually and independently coupled to the transfer chamber. 30. A substrate processing apparatus according to claim 29, wherein said substrate transfer mechanism has an arm having a substrate holder, said arm moving said substrate holder into and out of a transfer chamber located on two horizontal planes. 31. The apparatus of claim 30, wherein the arm is connected to a horizontally rotatable drive, wherein the drive rotates the arm and the substrate holder in angular motion relative to the drive. 32. The apparatus of claim 31, wherein the transfer mechanism has a joint and the controller is coupled to a joint driver at the joint. 33. The apparatus of claim 32, wherein said controller keeps said substrate holder horizontal. 34. The substrate processing apparatus of claim 33, wherein the controller controls the drive, the arm, and the joint to enter and retract the substrate holder into the substrate processing chamber at a linear distance. 35. The substrate processing apparatus of claim 34, wherein the arms have two arm portions rotatably connected to each other and connected to the drive so as to pivot only vertically with respect to the drive. 36. The substrate processing apparatus of claim 35, further comprising a sensor coupled to the controller for detecting and signaling a position of a drive, an arm portion, and a substrate holder relative to each other. A drive; Two arms pivotally connected to the drive so as to pivot in a vertical direction, each arm comprising two arms having two or more arm portions; A substrate transfer mechanism for a substrate processing apparatus having two substrate holders connected to each of the arms. 38. The substrate transfer mechanism of claim 37, wherein the drive has two drive portions, each drive portion having an arm pivotally connected thereto. The substrate transport mechanism of claim 38, wherein the drive portion rotates the arms independently of each other. 39. The substrate transport mechanism of claim 38, wherein the drive rotates two drive portions about the central axis of the drive to move the arms from one side of the drive to the opposite side. 38. The substrate transfer mechanism of claim 37, wherein the two arms are pivotally connected to the drive portion so that they can pivot only in the vertical direction. 38. The substrate transport mechanism of claim 37, further comprising means for keeping the substrate holder horizontal. Providing a substrate transfer mechanism having a continuous connection member rotatably connected with respect to each other, the continuous connection member having a substrate holder coupled to an end of the substrate transfer mechanism; And Controlling the rotational movement of the continuous connecting members to enter and retract the substrate holder into and away from the substrate processing chamber at a straight line distance. 44. The method of claim 43, further comprising moving the continuous connecting members in angular motion relative to each other to move the substrate holder vertically. 45. The method of claim 44, further comprising holding the substrate holder horizontal when the substrate holder moves. 44. The method of claim 43, wherein the continuous connecting member includes an arm pivotally connected to the rotor, the rotor rotating in a first horizontal rotational direction and the arm pivoting in a direction perpendicular to the rotor. Substrate transfer method. 47. The method of claim 46, wherein the substrate holder is connected to the arm by an articulation, the articulation being rotated with respect to the arm in a second horizontal rotational direction opposite to the first horizontal rotational direction. 48. The method of claim 47, wherein the articulation moves the substrate holder in a vertical direction by angularly moving relative to the arm when the arm moves vertically while holding the substrate holder horizontal. A driver is connected to a substrate holder that is rotatably connected to the arm for movement along two or more orthogonal axes of rotation at the end joint and is rotatable at the intermediate joint relative to each other and rotatable to the drive at the inner joint. Providing a substrate transfer mechanism having an arm having two continuously connected arm portions connected thereto; Controlling the rotational movement of the drive and the substrate holder and the arm portion to enter and retract the substrate holder into the substrate processing chamber at different horizontal and vertical positions. A substrate transfer panel having a substrate transfer chamber and a substrate transfer mechanism disposed in the substrate transfer chamber, the substrate transfer mechanism having two arm portions movably connected to each other and a substrate holder connected to the arm portion, And the two arm portions have a sealed channel such that a control cable extends through the channel to a connection of the substrate holder. A transfer chamber; Two or more substrate processing chambers, individually and independently coupled to the transfer chamber, and offset from each other in a vertical direction; A robot located at least partially within the transfer chamber, the robot entering and withdrawing substrates in the transfer chamber into the substrate processing chambers, Entry and withdrawal into the processing chambers are each performed at different vertical positions. 52. The substrate processing apparatus of claim 51, wherein the substrate processing chambers each have a separate frame fixedly connected to the transfer chamber. 52. The apparatus of claim 51, wherein the substrate processing chambers are arranged at least partially perpendicular to each other. The method of claim 51, A third substrate processing chamber connected to the transfer chamber, the third substrate processing chamber being arranged to be perpendicular to the at least one processing chamber of the substrate processing chambers; And the entry and withdrawal into the third processing chamber and the at least one processing chamber are each at different vertical positions. 52. The substrate processing apparatus of claim 51, wherein the substrate processing chambers are at least partially arranged horizontally offset from each other. A transfer chamber; Two or more substrate processing chambers connected to the transfer chamber; A robot for transferring substrates between said transfer chamber and said substrate processing chambers, And the transfer chamber forms a separate and independent substrate transfer path between the substrate processing chambers, and the individual substrate transfer paths are arranged to be shifted perpendicularly to each other. The method of claim 56, wherein And the substrate processing chambers each have a frame fixedly connected to the transfer chamber.