KR100571908B1 - Optical disk for near field recording/reproducing - Google Patents

Optical disk for near field recording/reproducing Download PDF

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KR100571908B1
KR100571908B1 KR1019990038698A KR19990038698A KR100571908B1 KR 100571908 B1 KR100571908 B1 KR 100571908B1 KR 1019990038698 A KR1019990038698 A KR 1019990038698A KR 19990038698 A KR19990038698 A KR 19990038698A KR 100571908 B1 KR100571908 B1 KR 100571908B1
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recording
film
light
optical disc
reproducing
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KR1019990038698A
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Korean (ko)
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KR20010027113A (en
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노명도
유장훈
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삼성전자주식회사
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403Layers; Shape, structure or physical properties thereof
    • G11B7/24056Light transmission layers lying on the light entrance side and being thinner than the substrate, e.g. specially adapted for Blu-ray® discs
    • G11B7/24059Light transmission layers lying on the light entrance side and being thinner than the substrate, e.g. specially adapted for Blu-ray® discs specially adapted for near-field recording or reproduction
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372Lenses
    • G11B7/1374Objective lenses
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B2220/00Record carriers by type
    • G11B2220/20Disc-shaped record carriers
    • G11B2220/25Disc-shaped record carriers characterised in that the disc is based on a specific recording technology
    • G11B2220/2537Optical discs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Head (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

광원과, 이 광원에서 조사된 광을 집속시키는 대물렌즈와, 광디스크에서 반사된 광을 수광하는 수광부 및, 입사광을 수광부에 집속시키는 수광렌즈를 포함하는 니어필드용 광 기록재생장치에 의해 기록 재생되는 니어필드 기록/재생용 광디스크가 개시되어 있다.The near field optical recording and reproducing apparatus includes a light source, an objective lens for focusing light emitted from the light source, a light receiving part for receiving light reflected from the optical disk, and a light receiving lens for focusing incident light on the light receiving part. A near field recording / reproducing optical disc is disclosed.

이 개시된 니어필드 기록/재생용 광디스크는 광(L)이 입사되는 쪽으로부터 순차로 배치된, 두께 X를 갖는 보호막, 제1유전체막, 니어필드가 형성되는 기록막, 제2유전체막, 반사막 및, 기판을 포함하며, 보호막의 두께 X는 하기의 수학식을 만족하는 것을 특징으로 한다.The disclosed nearfield recording / reproducing optical disc includes a protective film having a thickness X, a first dielectric film, a recording film on which a nearfield is formed, a second dielectric film, a reflecting film and sequentially arranged from the side from which light L is incident. And a substrate, wherein the thickness X of the protective film satisfies the following equation.

<수학식>Equation

Figure 111999011093138-pat00001
Figure 111999011093138-pat00001

여기서, NAO : 광검출을 위한 수광렌즈의 개구수이고,Where NAO is the numerical aperture of the light receiving lens for photodetection,

NA : 대물렌즈의 개구수이고,          NA is the numerical aperture of the objective lens,

h : 수광부에 수광되는 신호 빔의 반경이며,          h: radius of the signal beam received by the light receiving unit,

k : 보호막에서 반사되는 수광부 빔의 반경(H)와 신호빔의 반경          k: Radius (H) of the light-receiving part beam reflected from the protective film and the radius of the signal beam

(h)의 배율 (k = H/h) 이다.                (h) is the magnification (k = H / h).

Description

니어필드 기록/재생용 광디스크{Optical disk for near field recording/reproducing}Optical disk for near field recording / reproducing

도 1은 일반적인 니어필드용 광 기록재생장치를 보인 개략적인 도면.1 is a schematic diagram showing a general near field optical recording and reproducing apparatus.

도 2는 일반적인 니어필드용 광 기록재생장치의 광학적 배치를 보인 개략적인 도면.2 is a schematic view showing an optical arrangement of a general near field optical recording and reproducing apparatus.

도 3은 종래의 니어필드 기록/재생용 광디스크를 보인 개략적인 도면.Fig. 3 is a schematic diagram showing a conventional nearfield recording / reproducing optical disc.

도 4는 본 발명의 니어필드 기록/재생용 광디스크를 설명하는데 필요한, NA, NA0, H, h를 보인 니어필드용 광 기록재생장치의 광학적 배치를 보인 도면.Fig. 4 is a diagram showing the optical arrangement of the nearfield optical recording / reproducing apparatus showing NA, NA0, H, h necessary for explaining the nearfield recording / reproducing optical disc of the present invention.

도 5는 본 발명의 일 실시예에 따른 니어필드 기록/재생용 광디스크를 보인 개략적인 도면.Fig. 5 is a schematic diagram showing an optical disc for nearfield recording / reproducing according to an embodiment of the present invention.

도 6은 본 발명의 다른 실시예에 따른 니어필드 기록/재생용 광디스크를 보인 개략적인 도면.Fig. 6 is a schematic diagram showing an optical disc for nearfield recording / reproducing according to another embodiment of the present invention.

< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>

51...광원 53...렌즈요소 55...수광렌즈51 ... light source 53 ... lens element 55 ... light receiving lens

57...수광부 100...광디스크 111...보호막57.Receiver 100 ... Optical disk 111 ... Protective shield

113...제1유전체막 115...기록막 117...제2유전체막113 First dielectric film 115 Recording film 117 Second dielectric film

119...반사막 121...기판 130...윤활막119 ... Reflective film 121 ... Substrate 130 ... Lubrication film

본 발명은 니어필드(near field) 기록/재생용 광디스크에 관한 것으로서, 상세하게는 슬라이더에 탑재된 렌즈의 부상높이에 따라 발생하는 면반사 광량의 변동을 억제할 수 있도록 구조가 개선된 니어필드 기록/재생용 광디스크에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical disc for near field recording / reproducing, and more particularly, to a near field recording in which the structure is improved to suppress fluctuations in the amount of surface reflection light generated by the height of the lens mounted on the slider. And an optical disc for reproduction.

일반적으로 니어필드란 광디스크에 근접되게 배치된 광학요소와 광디스크 사이의 간격이 20∼300nm 정도로 근접된 상태에서 데이터의 기록 재생을 수행하는 기술을 말한다.In general, nearfield refers to a technique for performing data recording and reproducing in a state in which the distance between the optical element and the optical disk disposed in proximity to the optical disk is about 20 to 300 nm.

도 1 및 도 2를 참조하면, 일반적인 니어필드용 광 기록재생장치는 베이스에 대해 왕복 회전 가능하게 설치된 스윙암(21)과, 상기 스윙암(21)에 회전 구동력을 제공하는 액튜에이터(23)와, 공기동압에 의해 광디스크(10)에 대해 부상된 채로 광디스크(10)의 트랙을 스캔할 수 있도록 상기 스윙암(21)의 단부에 설치된 슬라이더(25) 및, 이 슬라이더(25)에 설치되어 광학식으로 정보를 재생할 수 있도록 상기 광디스크(10)에 광스폿을 형성하는 광학요소(31)를 구비한 광헤드(30)를 포함하여 구성된다. 여기서, 광디스크는 상변화형 광디스크와, 광자기디스크를 포함하는 것으로, 광디스크로서 광자기디스크를 채용한 경우에는 상기 광헤드(30)는 자계변조를 위한 코일(35)을 더 구비한다.1 and 2, a general near field optical recording and reproducing apparatus includes a swing arm 21 installed to reciprocally rotate with respect to a base, and an actuator 23 for providing a rotation driving force to the swing arm 21; And a slider 25 provided at the end of the swing arm 21 so that the track of the optical disk 10 can be scanned while being lifted against the optical disk 10 by pneumatic pressure, and mounted on the slider 25 and optically mounted. And an optical head 30 having an optical element 31 for forming an optical spot on the optical disc 10 so as to reproduce information. Here, the optical disk includes a phase change type optical disk and an optical magnetic disk. When the optical magnetic disk is employed as the optical disk, the optical head 30 further includes a coil 35 for magnetic field modulation.

상기 광학요소(31)는 반사거울(32)과, 대물렌즈(33) 및, 고체함침렌즈(SIL : Solid Immersion Lens) 또는 고체함침미러(SIM : Solid Immersion Mirror)로 된 소형렌즈(34)를 포함하여 구성된다. The optical element 31 includes a reflective mirror 32, an objective lens 33, and a small lens 34 made of a solid immersion lens (SIL) or a solid immersion mirror (SIM). It is configured to include.

도 2는 소형렌즈(34)로 굴절형 고체함침렌즈를 채용한 장치를 예로 들어 보인 것으로, 소형렌즈(34)는 송수광부(40)에서 조사된 광이 큰 입사각으로 광디스크(10)에 집속되도록 한다. 이로써 광디스크(10)에 맺힌 광스폿 크기를 줄일 수 있다.2 illustrates an apparatus employing a refractive-type solid-impregnated lens as the small lens 34, and the small lens 34 is configured to focus light irradiated from the transmitting and receiving part 40 onto the optical disk 10 at a large incident angle. do. As a result, the size of the light spot formed on the optical disc 10 can be reduced.

상기 송수광부(40)는 대물렌즈(33)에 적합한 직경을 갖는 레이저 광을 조사하며, 상기 반사거울(32)은 상기 송수광부(40)로부터 입사되는 광을 대물렌즈(33) 쪽으로 반사시킨다. 상기 대물렌즈(33)는 입사광을 상기 소형렌즈(34)에 집광시키며, 상기 소형렌즈(34)는 광디스크(10)에 니어필드를 형성한다.The transmitter / receiver 40 irradiates laser light having a diameter suitable for the objective lens 33, and the reflection mirror 32 reflects the light incident from the transmitter / receiver 40 toward the objective lens 33. The objective lens 33 focuses incident light onto the small lens 34, and the small lens 34 forms a near field on the optical disc 10.

상기 슬라이더(25)는 서스펜션(26)에 의해 광디스크(10)에 접촉되는 방향으로 바이어스되어 있다. 이 슬라이더(25)는 상기 광디스크(10)가 회전하기 시작하면 그 부력에 의해 광디스크(10)로부터 부상하게 되는데, 이때 형성되는 상기 광학요소(34)와 광디스크(10) 사이의 에어갭(G)이 전술한 20∼300nm 정도의 근접간격이 되는 것이다.The slider 25 is biased in the direction in which the suspension 26 is in contact with the optical disc 10. The slider 25 floats from the optical disc 10 by its buoyancy when the optical disc 10 starts to rotate. At this time, the air gap G between the optical element 34 and the optical disc 10 is formed. This is a close interval of about 20 to 300 nm.

여기서, 상기 에어갭(G)의 간격이 상기 송수광부(40)에서 조사되는 광의 파장보다 큰 경우에는 상기 광디스크는 상기 니어필드로부터 벗어난 영역에 위치되고, 굴절과 전반사 법칙에 의하여 개구수가 큰 광은 소형렌즈(34)의 광출사면에서 전반사되기 때문에 상기 광디스크(10) 상에 광스폿을 형성하는데 기여하지 못하게 된다. 반면, 상기 에어갭(G)이 사용광의 파장보다 작은 경우에는 상기 광디스크(10)에 맺힌 광스폿 크기는 소망하는 광스폿 크기에 가깝게 된다.Here, when the distance between the air gap (G) is greater than the wavelength of the light irradiated from the light receiving section 40, the optical disk is located in the area away from the near field, the light having a large numerical aperture by the law of refraction and total reflection Since it is totally reflected at the light exit surface of the small lens 34, it does not contribute to forming the light spot on the optical disk 10. On the other hand, when the air gap G is smaller than the wavelength of the use light, the size of the light spot formed on the optical disc 10 is close to the desired light spot size.

이와 같은 구성의 니어필드 기록/재생용 광 기록재생장치의 매체로 채용되는 종래의 광디스크는 도 3에 도시된 바와 같이, 기판(11)과, 이 기판에 순차로 적층된 반사막(12), 제1유전체막(13), 기록막(14), 제2유전체막(15) 및, 보호막(16)으로 구성된다. 여기서, 상기 광학요소(31)를 통하여 집속된 광은 상기 보호막(16)과, 상기 제2유전체막(15)을 투과하여 상기 기록막(14)에 니어필드를 형성하고, 이 기록막(14)에서 반사된 광은 재차 상기 제2유전체막(15)과 보호막(16)을 투과하여 상기 광학요소(31)에 전달된다. The conventional optical disc employed as the medium of the nearfield recording / reproducing optical recording / reproducing apparatus having such a configuration includes a substrate 11, a reflective film 12 sequentially stacked on the substrate, It consists of one dielectric film 13, recording film 14, second dielectric film 15, and protective film 16. Here, light focused through the optical element 31 passes through the passivation layer 16 and the second dielectric layer 15 to form a near field in the recording layer 14, and the recording layer 14 The reflected light is transmitted to the optical element 31 through the second dielectric film 15 and the passivation film 16 again.

상기 광디스크(10)는 트랙피치가 0.3 ~ 0.4㎛이고, V형상을 가지며 깊이 0.15 ~ 0.3㎛인 그루브(G)를 가진다. 여기서, 반사막(12), 제1유전체막(13), 기록막(14), 제2유전체막(15) 및 보호막(16)의 두께는 수학식 1과 같다.The optical disc 10 has a track pitch of 0.3 to 0.4 µm, a V shape, and a groove G having a depth of 0.15 to 0.3 µm. Here, the thicknesses of the reflective film 12, the first dielectric film 13, the recording film 14, the second dielectric film 15, and the protective film 16 are expressed by Equation (1).

Figure 111999011093138-pat00002
Figure 111999011093138-pat00002

이와 같이, 구성된 광디스크(10)는 도 3에 도시된 바와 같이, 상기 그루브(G)가 형성된 부분의 상부 형상이 그루브(G) 형상에 대응되게 굴곡진다. 또한, 광디스크 표면에 해당되는 보호막 상면이 상기 그루브(G) 형상에 대응되는 굴 곡을 가진다. As described above, the configured optical disc 10 is bent so that the upper shape of the portion where the groove G is formed corresponds to the shape of the groove G. As shown in FIG. In addition, the upper surface of the protective film corresponding to the surface of the optical disk has a curve corresponding to the shape of the groove (G).

그러므로, 굴절률 1.65인 고굴절률의 소형렌즈(34)에 의해 상기 에어갭(G)을 통과하여 상기 광디스크(1)에 집속시, 상기 광학요소(31)의 부상높이에 따라 발생되는 면반사 광량의 변동 및 수광부로 집속되는 잡음광과 소망하는 신호광이 혼재하게 되어 신호특성이 열화되는 문제점이 있다.Therefore, when the high refractive index small lens 34 having a refractive index of 1.65 is focused on the optical disc 1 through the air gap G, the amount of surface reflection light generated according to the height of the floating of the optical element 31 is concentrated. There is a problem in that the signal characteristic is deteriorated because the noise light focused on the fluctuation and the light receiving unit and the desired signal light are mixed.

본 발명은 상기의 점을 감안하여 안출된 것으로서, 보호층의 두께를 조절하여 니어필드 광학계를 이루는 광학요소의 부상 높이에 따라 발생되는 면반사 광량의 변동이 억제되도록 구조가 개선된 니어필드 기록/재생용 광디스크를 제공하는데 목적이 있다.The present invention has been made in view of the above-mentioned, the near field recording / structure is improved to control the thickness of the protective layer to suppress the variation in the amount of surface reflection light generated according to the height of the rise of the optical element constituting the near-field optical system It is an object to provide an optical disc for reproduction.

상기 목적을 달성하기 위한 본 발명은, 광원과, 이 광원에서 조사된 광을 집속시키는 렌즈요소와, 광디스크에서 반사된 광을 수광하는 수광부 및, 입사광을 수광부에 집속시키는 수광렌즈를 포함하는 니어필드용 광 기록재생장치에 의해 기록 재생되는 니어필드 기록/재생용 광디스크에 있어서, 광(L)이 입사되는 쪽으로부터 순차로 배치된, 두께 X를 갖는 보호막, 제1유전체막, 니어필드가 형성되는 기록막, 제2유전체막, 반사막 및, 기판을 포함하며, 상기 보호막의 두께 X는 하기의 수학식을 만족하는 것을 특징으로 한다.The present invention for achieving the above object, the near field including a light source, a lens element for focusing the light irradiated from the light source, a light receiving unit for receiving the light reflected from the optical disk, and a light receiving lens for focusing the incident light to the light receiving unit In the nearfield recording / reproducing optical disc recorded and reproduced by the optical recording / reproducing apparatus, a protective film having a thickness X, a first dielectric film, and a nearfield, which are sequentially arranged from the side from which light L is incident, are formed. And a recording film, a second dielectric film, a reflecting film, and a substrate, wherein the thickness X of the protective film satisfies the following equation.

<수학식>Equation

Figure 111999011093138-pat00003
Figure 111999011093138-pat00003

여기서, NAO : 광검출을 위한 수광렌즈의 개구수이고,Where NAO is the numerical aperture of the light receiving lens for photodetection,

NA : 렌즈요소의 개구수이고,          NA is the numerical aperture of the lens element,

h : 수광부에 수광되는 신호 빔의 반경이며,          h: radius of the signal beam received by the light receiving unit,

k : 보호막에서 반사되는 수광부 빔의 반경(H)와 신호빔의 반경          k: Radius (H) of the light-receiving part beam reflected from the protective film and the radius of the signal beam

(h)의 배율 (k = H/h) 이다.                 (h) is the magnification (k = H / h).

이하, 첨부된 도면을 참조하면서 본 발명에 따른 바람직한 실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명의 실시예에 따른 니어필드 기록/재생용 광디스크는 도 4에 도시된 바와 같은 광학적 구성을 가지는 니어필드용 광 기록재생장치에 채용된다.The nearfield recording / reproducing optical disc according to the embodiment of the present invention is employed in the nearfield optical recording / reproducing apparatus having the optical configuration as shown in FIG.

도 4를 참조하면, 니어필드용 광 기록재생장치는 광원(51)과, 이 광원(51)에서 조사된 광을 집속시키는 렌즈요소(53)와, 광디스크(100)에서 반사된 광을 수광하는 수광부(57) 및, 입사광을 수광부(57)에 집속시키는 수광렌즈(55)를 포함한다. 여기서, 렌즈요소(53)는 도 2을 참조하여 설명된 대물렌즈(도 2의 33)와 소형렌즈(34)를 포함하여 구성되며, 개구수 NA를 가진다. 상기 렌즈요소(53)는 정보의 기록, 재생시 공기동압에 의해 상기 광디스크(100)에 대해 소정의 에어갭 만큼 부상된다. 상기 수광렌즈(55)는 개구수 NAO를 가지며, 입사되는 평행광을 집속시켜 상기 수광부(57)에 광스폿이 맺히도록 한다. 여기서, 상기 수광부(57)에 수광 된 광 중 광디스크(100)의 기록막에서 반사된 광은 반경 h를 가지며, 상기 광디스크(100)의 보호막(111)에서 반사된 광은 반경 H를 가진다.Referring to Fig. 4, the near field optical recording and reproducing apparatus receives a light source 51, a lens element 53 for condensing light emitted from the light source 51, and a light reflected from the optical disc 100. A light receiving unit 57 and a light receiving lens 55 for focusing incident light onto the light receiving unit 57 are included. Here, the lens element 53 includes the objective lens (33 in FIG. 2) and the small lens 34 described with reference to FIG. 2, and has a numerical aperture NA. The lens element 53 floats with respect to the optical disc 100 by a predetermined air gap due to pneumatic pressure during recording and reproduction of information. The light receiving lens 55 has a numerical aperture NAO, and focuses incident parallel light to form a light spot on the light receiving unit 57. Herein, the light reflected by the recording film of the optical disc 100 has the radius h among the light received by the light receiving part 57, and the light reflected by the protective film 111 of the optical disc 100 has the radius H.

도 5를 참조하면, 본 발명의 실시예에 따른 광디스크는 상기 렌즈요소(도 4의 53)에 대향되는 면 즉, 광(L)이 입사되는 쪽에서 순차로 적층된 두께 X를 갖는 보호막(111), 제1유전체막(113), 니어필드가 형성되는 기록막(115), 제2유전체막(117), 반사막(119) 및, 기판(121)을 포함하여 구성된다. 여기서, 상기 광디스크(100)의 제조는 기판(121), 반사막(119), 제2유전체막(117), 기록막(115), 제1유전체막(113) 및 보호막(111) 순서로 진행된다.Referring to FIG. 5, an optical disk according to an exemplary embodiment of the present invention has a protective film 111 having a thickness X sequentially stacked on a surface opposite to the lens element 53 of FIG. 4, that is, the light L is incident. And a first dielectric film 113, a recording film 115 on which a near field is formed, a second dielectric film 117, a reflective film 119, and a substrate 121. As shown in FIG. The optical disc 100 is manufactured in the order of the substrate 121, the reflective film 119, the second dielectric film 117, the recording film 115, the first dielectric film 113, and the protective film 111. .

상기 기판(121)은 글래스, 폴리 카보네이트(PC), 폴리메틸메타아크릴레이트(PMMA), 아크릴레이트계 재질 등으로 구성된다, 이 기판(121) 상에는 하기의 수학식 2를 만족하는 트랙피치(TP), 그루브(G)가 형성된다.The substrate 121 is made of glass, polycarbonate (PC), polymethyl methacrylate (PMMA), an acrylate-based material, and the like. On the substrate 121, a track pitch (TP) satisfying Equation 2 below is provided. ), Grooves G are formed.

Figure 111999011093138-pat00004
Figure 111999011093138-pat00004

여기서, 상기 트랙피치 및 그루브(G)는 인젝션, 2P(포토 폴리머) 방법에 의해 제조되는 것이다. 따라서, 상기한 광학적 그루브 깊이는 상기 기판(121) 상에 물리적으로 인입 형성된 그루브의 깊이

Figure 111999011093138-pat00005
와 상기 보호막(111)의 두께에 의해 결정된다. Here, the track pitch and groove (G) is produced by the injection, 2P (photopolymer) method. Therefore, the optical groove depth is the depth of the grooves physically introduced on the substrate 121.
Figure 111999011093138-pat00005
And the thickness of the protective film 111.

따라서, 그루브의 물리적 깊이

Figure 111999011093138-pat00006
의 증가 없이, 보호막(111)의 두께 결정에 의하여 광학적 그루브 깊이를 증가시킬 수 있어서, 그루브 형성이 용이하다.Thus, the physical depth of the groove
Figure 111999011093138-pat00006
Without increasing, the optical groove depth can be increased by determining the thickness of the protective film 111, so that groove formation is easy.

상기 반사막(119)은 상기한 바와 같이 트랙 및 그루브가 형성된 기판(121) 상에 성막되는 것으로, 알루미늄(Al), 니켈(Ni), 구리(Cu), 백금(Pt), 은(Ag) 및, 금(Au) 등의 금속으로 구성된다.The reflective film 119 is formed on the substrate 121 on which the tracks and grooves are formed as described above, and includes aluminum (Al), nickel (Ni), copper (Cu), platinum (Pt), silver (Ag), and the like. And metals such as gold (Au).

상기 제1 및 제2유전체막(113)(117) 각각은

Figure 111999011093138-pat00007
화합물 또는
Figure 111999011093138-pat00008
재질로 구성된다.Each of the first and second dielectric layers 113 and 117
Figure 111999011093138-pat00007
Compound or
Figure 111999011093138-pat00008
It is made of material.

상기 기록막(115)은 광자기 재질 또는 상변화 재질로 구성되며, 선택된 재질에 따라 광디스크의 종류가 결정된다. The recording film 115 is made of a magneto-optical material or a phase change material, and the type of the optical disc is determined according to the selected material.

즉, 상기 기록막(115)으로

Figure 111999011093138-pat00009
Figure 111999011093138-pat00010
및,
Figure 111999011093138-pat00011
등으로 구성된 광자기 재질을 선택한 경우는 광자기형 디스크가 되며, 상기 기록막(115)으로
Figure 111999011093138-pat00012
Figure 111999011093138-pat00013
Figure 111999011093138-pat00014
등으로 구성된 상변화 재질을 선택한 경우는 상변화형 광디스크가 된다.That is, to the recording film 115
Figure 111999011093138-pat00009
Figure 111999011093138-pat00010
And,
Figure 111999011093138-pat00011
In the case of selecting a magneto-optical material composed of a light source or the like, it becomes a magneto-optical disk, and the recording film 115
Figure 111999011093138-pat00012
Figure 111999011093138-pat00013
Figure 111999011093138-pat00014
In the case of selecting a phase change material composed of a light source, a phase change type optical disc is used.

여기서, 제1유전체막(113), 기록막(115), 제2유전체막(117) 및, 반사막(119)의 두께는 다음 수학식3을 만족하는 것이 바람직하다.Here, the thicknesses of the first dielectric film 113, the recording film 115, the second dielectric film 117, and the reflective film 119 preferably satisfy the following equation (3).

Figure 111999011093138-pat00015
Figure 111999011093138-pat00015

상기 보호막(111)은 무기물 재질 또는 유기물 재질로 구성된다. 상기 보호막(111)은 비정질 DLC, SiN 및

Figure 111999011093138-pat00016
로 구성된 무기물 중에서 선택된 어느 하나의 재질 또는 아크릴레이트계 또는 포토폴리머 레진으로 구성된 유기물 중에서 선택된 어느 하나의 재질로 된다.The passivation layer 111 is made of an inorganic material or an organic material. The protective layer 111 is formed of amorphous DLC, SiN and
Figure 111999011093138-pat00016
It is made of any one material selected from inorganic materials consisting of or an organic material consisting of an acrylate-based or photopolymer resin.

상기 보호막(111)으로 무기물 재질을 선택한 경우는 스퍼터링 방법, 증착(Evaporation) 방법 등을 통해 형성된다. 한편, 유기물 재질을 선택한 경우는 스핀 코팅법, 2P법 등을 통해 형성되며, 그 재질 특성 즉, 보호막(111)의 굴절률과, 점성률(Viscosity) 각각은 수학식 4를 만족하는 것이 바람직하다.When the inorganic material is selected as the passivation layer 111, it is formed through a sputtering method or an evaporation method. On the other hand, when the organic material is selected, it is formed through a spin coating method, 2P method, etc., the material properties, that is, the refractive index and the viscosity (Viscosity) of each of the protective film 111 preferably satisfy the equation (4).

Figure 111999011093138-pat00017
Figure 111999011093138-pat00017

또한, 수축률에 있어서, 상기 유기물 재질의 보호막은 수축률이 7% 이하인 것이 바람직하다.In the shrinkage rate, the protective film made of the organic material may have a shrinkage rate of 7% or less.

상기 보호막(111)은 입사광 중 상기 소형렌즈의 경면에서 반사되는 광의 광량이 최소가 되도록 결정되어야 한다. 이를 위하여 상기 보호막(111)의 두께 X는 하기의 수학식 5를 만족하는 범위에서 결정된다.The passivation layer 111 should be determined so that the amount of light reflected from the mirror surface of the small lens among the incident light is minimized. To this end, the thickness X of the protective film 111 is determined in a range satisfying Equation 5 below.

Figure 111999011093138-pat00018
Figure 111999011093138-pat00018

여기서, NAO, NA, h 각각은 도 4를 참조하여 설명된 바와 같으며, k 는 보호 막(111)에서 반사되는 수광부 빔의 반경 H와 신호빔의 반경 h의 배율(k=H/h)을 나타낸 것이다.Here, each of NAO, NA, and h is as described with reference to FIG. 4, where k is a magnification of the radius H of the light-receiving part beam reflected from the protective film 111 and the radius h of the signal beam (k = H / h). It is shown.

보다 바람직하게는 보호막(111)의 두께 X는 수학식 6을 만족한다.More preferably, the thickness X of the protective film 111 satisfies Equation 6.

Figure 111999011093138-pat00019
Figure 111999011093138-pat00019

수학식 5를 바탕으로, 보호층 두께 X를 설정한 예를 표 1에 나타내었다.Based on Equation 5, an example of setting the protective layer thickness X is shown in Table 1.

광학계Optical system 실시예 1Example 1 실시예 2Example 2 NAONAO 0.050.05 0.10.1 NANA 1.651.65 1.651.65 kk 1010 1010 h[㎛]h [μm] 5050 22 X[㎛]X [μm] 8.38.3 0.70.7

도 6을 참조하면, 본 발명에 따른 광디스크는 상기한 보호막(111) 상에 1 내지 3 nm 두께로 코팅 형성된 윤활막(130)을 더 포함할 수 있다.Referring to FIG. 6, the optical disk according to the present invention may further include a lubricating film 130 formed on the protective film 111 coated with a thickness of 1 to 3 nm.

상기 윤활막(130)으로는 포블린 지 돌(Fomblin Z Dol), 포블린 2001(Fomblin 2001) 등의 윤활제와, 혼합되는 용매 갈덴 에스 브이(Galdel SV) 등이 사용된다.As the lubricating film 130, lubricants such as Foblin Z Dol and Foblin 2001, and a mixed solvent, Galdel SV, may be used.

이와 같이 윤활막(130)을 코팅 형성함으로써 광 기록재생장치의 슬라이더가 초기 접촉 이동시 원활히 움직이도록 할 수 있다.By coating the lubricating film 130 in this manner, the slider of the optical recording / reproducing apparatus can be smoothly moved during initial contact movement.

상기한 바와 같이 구성된 본 발명에 따른 니어필드 기록/재생용 광디스크는 보호막에 의해 반사되는 수광부 빔의 크기가 기록막에서 반사되는 신호빔의 크기의 k배가 되도록 광디스크 보호막의 두께를 설계함으로써 니어필드 광학계를 이루는 광학요소의 부상 높이에 따라 발생되는 면반사 광량의 변동이 억제되도록 한다.In the nearfield recording / reproducing optical disc according to the present invention configured as described above, the nearfield optical system is designed by designing the thickness of the optical disc protective film such that the size of the light receiving portion beam reflected by the protective film is k times the size of the signal beam reflected from the recording film. Fluctuation of the amount of surface reflection light generated according to the height of the float of the optical element constituting the is to be suppressed.

또한, 그루브 깊이를 조절하고 그루브 내의 공간을 그루브 보호층으로 채움으로써, 그루브의 물리적 깊이를 얕게 하면서도 고굴절률의 그루브 보호층에 의해 깊은 그루브의 광학적 깊이를 얻을 수 있어서 트랙신호를 증가시킬 수 있어서, 고밀도 광디스크의 제작을 용이하게 한다.In addition, by adjusting the groove depth and filling the space in the groove with the groove protective layer, the optical depth of the deep groove can be increased by the high refractive index groove protective layer while the groove depth is shallow, thereby increasing the track signal. It facilitates the fabrication of high density optical discs.

Claims (9)

광원과, 이 광원에서 조사된 광을 집속시키는 대물렌즈와, 광디스크에서 반사된 광을 수광하는 수광부 및, 입사광을 수광부에 집속시키는 수광렌즈를 포함하는 니어필드용 광 기록재생장치에 의해 기록 재생되는 니어필드 기록/재생용 광디스크에 있어서,The near field optical recording and reproducing apparatus includes a light source, an objective lens for focusing light emitted from the light source, a light receiving part for receiving light reflected from the optical disk, and a light receiving lens for focusing incident light on the light receiving part. In the near field recording / reproducing optical disc, 광(L)이 입사되는 쪽으로부터 순차로 배치된,Disposed sequentially from the side from which light L is incident, 두께 X를 갖는 보호막, 제1유전체막, 니어필드가 형성되는 기록막, 제2유전체막, 반사막 및, 기판을 포함하며,A protective film having a thickness X, a first dielectric film, a recording film on which a near field is formed, a second dielectric film, a reflective film, and a substrate, 상기 보호막의 두께 X는 하기의 수학식을 만족하는 것을 특징으로 하는 니어필드 기록/재생용 광디스크.And the thickness X of the protective film satisfies the following equation. <수학식>Equation
Figure 111999011093138-pat00020
Figure 111999011093138-pat00020
여기서, NAO : 광검출을 위한 수광렌즈의 개구수이고,Where NAO is the numerical aperture of the light receiving lens for photodetection, NA : 대물렌즈의 개구수이고,          NA is the numerical aperture of the objective lens, h : 수광부에 수광되는 신호 빔의 반경이며,          h: radius of the signal beam received by the light receiving unit, k : 보호막에서 반사되는 수광부 빔의 반경(H)와 신호빔의 반경          k: Radius (H) of the light-receiving part beam reflected from the protective film and the radius of the signal beam (h)의 배율 (k = H/h) 이다.                (h) is the magnification (k = H / h).
제1항에 있어서, 상기 보호막은,The method of claim 1, wherein the protective film, 비정질 DLC, SiN 및
Figure 111999011093138-pat00021
로 구성된 무기물 중에서 선택된 어느 하나의 재질로 된 것을 특징으로 하는 니어필드 기록/재생용 광디스크.
Amorphous DLC, SiN and
Figure 111999011093138-pat00021
The near-field recording / reproducing optical disc, characterized in that made of any one material selected from inorganic matter.
제1항에 있어서, 상기 보호막은,The method of claim 1, wherein the protective film, 아크릴레이트계 또는 포토폴리머 레진으로 구성된 유기물 중에서 선택된 어느 하나의 재질로 된 것을 특징으로 하는 니어필드 기록/재생용 광디스크.An near field recording / reproducing optical disc, characterized in that it is made of any one material selected from organic materials composed of acrylate-based or photopolymer resins. 제3항에 있어서, 상기 보호막의 굴절률과, 점성률(Viscosity) 각각은 하기의 조건식을 만족하는 것을 특징으로 하는 니어필드 기록/재생용 광디스크.4. The near field recording / reproducing optical disc of claim 3, wherein each of the refractive index and the viscosity of the protective film satisfies the following conditional expression. <조건식><Conditional expression>
Figure 111999011093138-pat00022
Figure 111999011093138-pat00022
제1항에 있어서, The method of claim 1, 상기 제1 및 제2유전체막 각각은
Figure 111999011093138-pat00023
화합물 또는
Figure 111999011093138-pat00024
재질로 되고,
Each of the first and second dielectric films
Figure 111999011093138-pat00023
Compound or
Figure 111999011093138-pat00024
Material,
상기 기록막은
Figure 111999011093138-pat00025
로 구성된 광자기 재질 중에서 선택된 어느 하나의 재질로 된 광자기용 재질이고,
The recording film
Figure 111999011093138-pat00025
It is a magneto-optical material made of any one material selected from magneto-optical materials composed of
상기 반사막은
Figure 111999011093138-pat00026
로 구성된 금속 중에서 선택된 어느 하나의 재질로 된 것을 특징으로 하는 니어필드 기록/재생용 광디스크.
The reflective film
Figure 111999011093138-pat00026
An optical disc for nearfield recording / reproducing, characterized in that the material is made of any one selected from metals.
제1항에 있어서,The method of claim 1, 상기 제1 및 제2유전체막 각각은
Figure 111999011093138-pat00027
화합물 또는
Figure 111999011093138-pat00028
재질로 되고,
Each of the first and second dielectric films
Figure 111999011093138-pat00027
Compound or
Figure 111999011093138-pat00028
Material,
상기 기록막은
Figure 111999011093138-pat00029
로 구성된 상변화 재질 중에서 선택된 어느 하나의 재질로 되고,
The recording film
Figure 111999011093138-pat00029
It is made of any one material selected from phase change material consisting of
상기 반사막은
Figure 111999011093138-pat00030
로 구성된 금속 중에서 선택된 어느 하나의 재질로 된 것을 특징으로 하는 니어필드 기록/재생용 광디스크.
The reflective film
Figure 111999011093138-pat00030
An optical disc for nearfield recording / reproducing, characterized in that the material is made of any one selected from metals.
제1항에 있어서, The method of claim 1, 제1유전체막, 기록막, 제2유전체막 및, 반사막의 두께는 다음 수학식을 만족하는 것을 특징으로 하는 니어필드 기록/재생용 광디스크.The thickness of the first dielectric film, the recording film, the second dielectric film, and the reflective film satisfies the following equation, wherein the near field recording / reproducing optical disc. <수학식>Equation
Figure 111999011093138-pat00031
Figure 111999011093138-pat00031
제1항에 있어서, 상기 보호막 상에 1 내지 3 nm 두께로 코팅 형성된 윤활막을 더 포함하는 것을 특징으로 하는 니어필드 기록/재생용 광디스크.The near field recording / reproducing optical disc according to claim 1, further comprising a lubricating film formed on the protective film in a thickness of 1 to 3 nm. 제1항 내지 제8항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 8, 상기 기판 상에는 하기의 조건식을 만족하는 트랙피치(TP), 그루브가 형성된 것을 특징으로 하는 니어필드 기록/재생용 광디스크.A near pitch recording / reproducing optical disc, wherein a track pitch (TP) and a groove are formed on the substrate. <조건식><Conditional expression>
Figure 111999011093138-pat00032
Figure 111999011093138-pat00032
KR1019990038698A 1999-09-10 1999-09-10 Optical disk for near field recording/reproducing KR100571908B1 (en)

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Citations (3)

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Publication number Priority date Publication date Assignee Title
JPH1092012A (en) 1996-09-13 1998-04-10 Nec Corp Phase transition type optical disk medium and recording and reproducing method of information
KR19980018793A (en) * 1996-08-20 1998-06-05 니시무로 타이조 Information recording medium for land / groove recording (DATA RECORDING MEDIUM FOR LAND / GROOVE RECORDING)
JPH10320862A (en) 1997-05-16 1998-12-04 Sony Corp Recording and reproducing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980018793A (en) * 1996-08-20 1998-06-05 니시무로 타이조 Information recording medium for land / groove recording (DATA RECORDING MEDIUM FOR LAND / GROOVE RECORDING)
JPH1092012A (en) 1996-09-13 1998-04-10 Nec Corp Phase transition type optical disk medium and recording and reproducing method of information
JPH10320862A (en) 1997-05-16 1998-12-04 Sony Corp Recording and reproducing device

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