KR100536290B1 - Fabrication method of piezoelectric valve using multilayer ceramic actuator for fluidic control system - Google Patents

Abstract

The present invention discloses a method for manufacturing a multilayer type piezoelectric valve.

According to the invention, a first process for forming the inlet and outlet of the valve seat die; A second process of shaping the seat on the valve seat die; A third process of depositing and patterning a nitride film on the valve seat die; A fourth step of selectively bonding the valve actuator die and the seat die; A fifth process of manufacturing a diaphragm in the valve actuator die; A sixth process of anodic bonding the multilayer ceramic actuator and the actuator die using a heat resistant glass thin film; Forming a PDMS sealing pad using a SU-8 mold; And an eighth process of packaging the stacked piezoelectric valve manufactured through the above steps using stainless steel. Since the effect of the present invention is excellent in linearity as compared with the conventional stainless steel valve, various electromechanical parts and It can be usefully applied as a fluid control device in the field of micro electro micro system (MEMS).

Description

Method for Manufacturing Piezoelectric Valve for Fluid Control System Using Multi-Layered Ceramic Actuator {FABRICATION METHOD OF PIEZOELECTRIC VALVE USING MULTILAYER CERAMIC ACTUATOR FOR FLUIDIC CONTROL SYSTEM}

The present invention relates to a method for manufacturing a piezoelectric valve device for a fluid control system using a multilayer ceramic actuator. More specifically, the present invention relates to a fine micrometer of 10 cubic centimeters per minute or less. It relates to a piezoelectric valve manufacturing method capable of flow control.

Recently, the interest in the micro electromechanical system technology that can detect and adjust the micro-changes of the environment by combining the computer and the mechanical devices such as sensors and actuators. Among them, the convergence / combination industry of IT (Information Technology), BT (Bio Technology) and NT (Nano Technology), which has enormous market potential in the fields of medical, transportation, and control as future core industries, will grow and develop significantly. It is expected to be. Therefore, ultra-precision fluid control requiring very small flow rates and sample control such as drug delivery systems (DDS), micro total analysis systems (μ-TAS) and mass flow controllers (MFC) The research and development of equipment is greatly increasing.

Recently, research on small valves incorporating three-dimensional actuators such as electrostatic, shape memory alloy (SMA), thermopneumatic, and electromagnetic (magnetic) has begun. However, in the case of the electrostatic valve, although the response speed is fast, a large applied voltage of 100 volts or more is required and the driving force is low. The shape memory alloy and the thermopneumatic valve have a slow response speed, a complicated manufacturing process, and a high temperature rise. It has the disadvantage of material deformation and stress. Electromagnetic valves also have the problem of high power consumption and low driving force.

Among these valves, valves using piezoelectrics have been actively developed. The use of piezoelectric strain as mechanical energy has advantages such as light weight, high speed response, low power consumption, and high driving power, which can be used as a power source for various actuators, and control micro displacement, protein and DNA chips (Doxy Chip). It can be applied to small analysis system. Currently, some research is being conducted on the development of a micro hydraulic control system that can control and process ultra fine energy or materials using piezoelectric thin films. However, piezoelectric thin films have sufficient driving force or response speed to control ultra fine energy or materials. I have a problem that doesn't exist.

The present invention has been made to solve the above problems, the object of the present invention is excellent displacement characteristics, can reduce the error between processes, easy to replace and repair parts, multilayer ceramic actuator for application in the ultra-fine fluid control system The present invention provides a method of manufacturing a piezoelectric valve having superior linearity and repeatability of flow rates and excellent leakage characteristics than a conventional actuator.

In order to achieve the above object, a method of manufacturing a piezoelectric valve for ultrafine flow rate control using a multilayer ceramic actuator according to the aspect of the present invention,

A first process of forming the inlet and outlet of the valve seat die; A second process of shaping the seat on the valve seat die; A third process of depositing and patterning a nitride film on the valve seat die; A fourth step of selectively bonding the valve actuator die and the seat die; A fifth process of manufacturing a diaphragm in the valve actuator die; A sixth process of anodic bonding the multilayer ceramic actuator and the actuator die using a heat resistant glass thin film; Forming a PDMS sealing pad using a SU-8 mold; And an eighth process of packaging the stacked piezoelectric valve manufactured through the above steps using stainless steel.

Specifically, the heat-resistant glass thin film is characterized in that the Pyrex # 7740.

In addition, the first process may include depositing an oxide film having a thickness of 1.5 μm on the upper and lower portions of the silicon substrate 200 and patterning the inlet and outlet using photolithography; And using a tetramethylammonium hydroxide solution diluted 15 to 25 wt.% In ultrapure water, placed in a heater equipped with magnetic steel, and maintaining a 75 to 85 ° C to manufacture a valve inlet and outlet. do.

In addition, the oxide film is characterized by having a thickness of 1.0 to 2㎛.

In addition, the second process uses the tetramethylammonium hydroxide solution in which 5 to 15 wt.% Of dissolved in ultrapure water is obtained by re-validating the valve seat die and performing valve channel and seat patterning on the front surface of the valve seat die by photolithography. Positioned in the heater to maintain a constant temperature, characterized in that the step of producing the valve seat and the chamber.

In addition, the tetramethylammonium hydroxide solution in which 5-15 wt.% Is dissolved in the ultrapure water is placed in a heater and maintained at 75 to 85 ° C.

In addition, the third process is the step of depositing a nitride film of 500 kPa for 5 minutes at a constant temperature by using the atmospheric pressure vapor deposition apparatus valve seat die; And removing the nitride film other than the valve seat and the chamber using a hydrofluoric acid solution for a predetermined time to produce a valve seat die.

In addition, the valve seat die is characterized by depositing a nitride film of 500 kPa for 5 minutes at 900 ~ 1100 ℃ using an atmospheric vapor deposition apparatus.

In addition, it is characterized in that the nitride film other than the valve seat and the chamber is removed using a hydrofluoric acid solution for 25 to 35 seconds.

In addition, the fourth process is a step of mixing hydrochloric acid and hydrogen peroxide in a predetermined ratio; Washing the sheet die and the actuator die in a solution for 10 minutes, mixing sulfuric acid and hydrogen peroxide in a ratio and then rinsing in the solution for a predetermined time; Performing initial direct bonding for a predetermined time in the vacuum chamber; And forming an actuator die and a sheet die bonded structure by performing post-heat treatment for a predetermined time at a predetermined temperature.

In addition, the hydrochloric acid and hydrogen peroxide are characterized in that the mixing ratio of 3: 1.

In addition, the sulfuric acid and hydrogen peroxide are mixed at 3: 1, and then washed in the solution for 5 to 15 minutes.

In addition, it is characterized in that the initial direct bonding for about 24 hours in the vacuum chamber of 1 × 10 ^-6 Torr.

In addition, the step of post-heat treatment for about 1 hour at a temperature of 900 ~ 1100 ℃ characterized in that the step of forming the actuator die and sheet die bonding structure.

The fifth process is a step of patterning the bonded actuator die and the sheet die by using a photolithography method to pattern an oxide film on the entire surface of the actuator die.

In addition, the fifth process is a process of manufacturing a diaphragm by inserting the bonded actuator and the sheet die in a Teflon holder and injecting it into a solution in which tetramethylammonium hydroxide is added to ultrapure water at a predetermined ratio to maintain a constant temperature. It is characterized by.

In addition, the bonded actuator and the sheet die is inserted into a Teflon holder and injected into a solution in which tetramethylammonium hydroxide is added to the ultrapure water at a ratio of 15 to 25 wt.% To maintain 75 to 85 ° C. .

In addition, the laminated ceramic actuator and the actuator die bonding process of the sixth step includes depositing a predetermined amount of applied power 1 W / ㎠, argon gas using a high frequency sputtering method to the multilayer ceramic actuator by using a high frequency sputtering method Characterized in that.

In addition, the laminated ceramic actuator is characterized in that the Pyrex glass is injected by applying an applied power of 1 W / cm 2 and 15 to 25 sccm of argon gas by using a high frequency sputtering method and deposited to a thickness of 4 to 6 ㎛.

The method may further include anodic bonding the multilayer ceramic actuator and the actuator die 211 on which the Pyrex glass thin film of the sixth process is deposited for a predetermined time at a constant DC voltage and a predetermined application temperature.

In addition, the laminated ceramic actuator and the actuator die 211 is characterized in that the step of anodic bonding for 1 hour at a DC voltage of 600V, an applied temperature of 350 ~ 450 ℃.

In addition, the seventh process comprises the steps of preparing a SU-8 mold on the acrylic mold, and mixing the PDMS solution with the curing agent on the SU-8 mold in a predetermined ratio; It is a process of manufacturing a PDMS sealing pad by applying a spin coater and removing bubbles for a predetermined time in a vacuum chamber for 10 ^-6 Torr to remove bubbles in the PDMS solution by heat treatment at a predetermined temperature for a predetermined time. do.

In addition, the PDMS solution is mixed on the SU-8 mold with a curing agent in a ratio of 10: 1.

In addition, in order to remove the bubbles in the PDMS solution, the bubbles are removed in a vacuum chamber with 10 ^-6 Torr for 35 to 45 minutes, and the heat treatment is performed for about 1 hour at a temperature of 65 to 75 ℃.

In addition, the eighth process is a step of manufacturing a holder for supporting the laminated ceramic actuator using a stainless steel having a predetermined radius, and a valve holder and bolt for supporting the bonded valve actuator die and the seat die.

In addition, the stainless steel is characterized by having a radius of 1-3 cm.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.

1 is a flowchart illustrating a manufacturing method of a multilayer piezoelectric valve using a multilayer ceramic actuator according to the present invention.

The multilayer ceramic actuator used in the present invention is a piezoelectric body having a size of 5 mm × 5 mm × 20 mm and having a displacement of 16 μm when a DC voltage of 150 V is applied, and the actuator die 211 and the valve seat die 200 are 2 × 2. The P-type silicon substrate 200 having a cm size and a thickness of 510 μm, and the PDMS sealing pad 219 is prepared by mixing a PDMS solution and a curing agent in a ratio of 10: 1 to manufacture a sealing pad, followed by an etching process. The laminated piezoelectric valve is manufactured by the direct bonding process and the positive electrode bonding process.

To this end, the process proceeds to step S101 to deposit an oxide film of 1.5 ㎛ on the upper and lower portions of the silicon substrate 200, remove the entrance and exit oxide film using photolithography, and then tetramethylammonium hydroxide 15 in ultrapure water (DI Water) The valve inlet and outlet 201 is manufactured by placing the magnetic stir in a heater equipped with magnetic stir to 25 wt.%, Maintaining 75 to 85 ° C.

In step S103, after re-oxidation of the sheet die 200, the front surface of the sheet die is channelized with photolithography and sheet patterning, and tetramethyl diluted 5-15 wt.% In ultrapure water. The valve seat 205 and the chamber 207 are fabricated by placing them in a heater using an ammonium hydroxide solution and etching them at 75 to 85 ° C.

In step S105, the nitride film 209 of 500 kPa is deposited for 5 minutes at 900 to 1100 ° C. using the atmospheric pressure vapor deposition apparatus, and the nitride film other than the valve seat 205 and the chamber 207 is deposited. Remove with hydrofluoric acid (HF) solution for 25-35 seconds.

In step S107, hydrochloric acid (HCl) and hydrogen peroxide (H ₂ O ₂ ) is mixed at a ratio of 3: 1, and the sheet die 200 and the actuator die 211 are washed in the solution for 5 to 15 minutes to remove inorganic contaminants. After removing sulfuric acid and hydrogen peroxide in a 3: 1 mixture, the solution was washed for 5 to 15 minutes, and then directly bonded in a vacuum chamber of 1 × 10 ^-6 Torr for 23 to 26 hours to provide direct heat treatment. ) Is post-annealed at a temperature of 900 to 1100 ° C for about 1 hour.

In operation S109, after the bonded actuator 211 die and the sheet 200 die are patterned with an oxide film on the entire surface of the actuator die 211 using photolithography, the bonded actuator and the sheet die 200 are teflon holders (Teflon Holder). ) And injected into a solution in which tetramethylammonium hydroxide is dissolved at a rate of 15 to 25 wt.% In ultrapure water to maintain a temperature of 70 to 90 ° C. in a heater to produce a diaphragm 213. It is done.

In the step S111, the Pyrex # 7740 glass 217 is injected into the multilayer ceramic actuator 215 using a high-frequency sputtering device, and applied power of 1 W / cm 2 and 15 to 25 sccm of argon (Ar) gas to be deposited to a thickness of 5 μm. Thereafter, the multilayer ceramic actuator 215 and the actuator die 211 on which the Pyrex # 7740 glass thin film is deposited are anodic bonded for about 1 hour at a DC voltage of 600 V and an applied temperature of 350 to 450 ° C.

In step S113, the SU-8 solution is applied on an acrylic mold to a thickness of 1 mm using a spin coater, and then 5 minutes at 60 to 70 ° C. for about 60 to 80 minutes at 90 to 100 ° C. for 5 minutes. Soft-baked, UV exposure for 650 to 750 seconds with an intensity of 33.4 ㎽ / ㎠, heat treatment for 5 minutes at 60 to 70 ° C for 20 minutes at 90 to 100 ° C (PEB; Post Expose Bake) Do After developing with PGMEA (Propylene Glycol Monomethyl Ether Acetate) for 30 to 50 minutes, washing with isopropyl alcohol (IPA: Isopropyl Alcohol), and then drying with nitrogen (N ₂ ) gas, 150 to 200 Hard bake for 20 minutes at ℃ to prepare a SU-8 mold. In addition, SU-8 mold PDMS solution and the curing agent 10 on: to ^10-6 Torr in a vacuum chamber (Vacuum Chamber) 30 in order to remove air bubbles and mixed in the ratio 1, is applied using a spin coater, and the internal solution of PDMS After removing bubbles for about 50 minutes, the PDMS sealing pad 219 is manufactured by heat treatment at a temperature of 60 to 80 ° C. for 1 hour.

In the final step S115, the holder 221 for supporting the multilayer ceramic actuator 215 and the valve holder 223 and the bolt for supporting the actuator die 211 / valve seat die 200 using 2 cm radius stainless steel are used. 225) characterized in that the manufacturing.

2A to 2H are cross-sectional views of a stacked piezoelectric valve manufacturing process for explaining each process of FIG. 1.

FIG. 2A illustrates the deposition of a 1.5 μm oxide layer on the upper and lower portions of the valve seat die 200 and patterning the inlet and outlet using photolithography, and then using a solution in which 15 to 25 wt.% Of tetramethylammonium hydroxide is dissolved. The valve inlet 201 and the outlet 203 are manufactured by etching and placing it in a heater.

FIG. 2B shows that the valve seat die 200 is reoxidized, and then the front surface of the seat die is etched with a 10 wt.% Solution of tetramethylammonium hydroxide by photolithography channels and sheet patterning to form a valve seat 205 and The chamber 207 is manufactured.

In FIG. 2C, after the nitride film 209 is deposited on the valve seat die 200 using an atmospheric vapor deposition apparatus, the nitride film 209 other than the valve seat 205 and the chamber 207 is removed.

FIG. 2D illustrates initial cleaning of the valve seat die 200 and the actuator die 211 by cleaning. In addition, the post-heat treatment is performed at 900 to 1100 ° C. for about 1 hour.

FIG. 2E shows that the bonded actuator 211 die and the sheet 200 die are patterned with an oxide film on the entire surface of the actuator die using photolithography, and then the bonded actuator and sheet die are inserted into a Teflon holder and tetramethylammonium hydroxide The diaphragm 213 is manufactured by etching with a solution.

2F deposits a Pyrex # 7740 glass 217 on the multilayer ceramic actuator 215 and then anodic-bonds the multilayer ceramic actuator and actuator die 211 on which the Pyrex # 7740 glass thin film is deposited.

Figure 2g is after manufacturing the SU-8 mold, the PDMS solution on the SU-8 mold using a spin coater, remove the bubbles and heat treatment to produce a PDMS sealing pad 219.

2H manufactures a holder 221 for supporting the stacked ceramic actuator 215 and a valve holder 223 and a bolt 225 for supporting the actuator die 211 / valve seat die 200 using stainless steel. .

3A-3B are sheet die micrographs prepared by the present invention.

FIG. 3A is a scanning electron microscope (SEM) photograph of a sheet die having a diameter of 500 μm and a thickness of 510 μm.

It can be seen that the sidewalls of the sheet die inlet prepared by etching with tetramethylammonium hydroxide solution were made with good flatness. Therefore, it can be seen that it is possible to manufacture an inlet that can form laminar flow during fluid movement.

3B is a micrograph of a sheet die with a chamber diameter of 1 cm, a number of sheets, and a sheet width of 100 μm.

 It can be seen that the sheet and sidewalls of the sheet die 200 prepared by etching with a tetramethylammonium hydroxide solution exhibit very good flatness. It can be seen that the valve seat maintains a flatness capable of performing the opening and closing role of the valve. It can also be seen that the sidewall portion maintains flatness that can be joined to the actuator die.

Figure 4a is an electron scanning micrograph of the SU-8 mold having a radius of 500 ㎛, 500 ㎛ thickness.

It can be seen that the SU-8 mold exhibiting smooth flatness and shape can be produced by confirming a very smooth flatness of the surface and sidewalls of the SU-8 mold located on the acrylic mold.

Figure 4b is an electron scanning micrograph of the PDMS sealing pad prepared by the SU-8 mold, has a radius of 500 ㎛, thickness of 500 ㎛.

It can be seen that the PDMS mold manufactured by the SU-8 mold has the same shape and shape as that of the SU-8 mold, so that it is possible to manufacture the valve PDMS sealing pad 219 having excellent flatness.

FIG. 5 is a photograph of a multilayer piezoelectric valve in which a multilayer ceramic actuator, an actuator die, a seat die, a PDMS sealing pad, and a valve package are sequentially joined.

 Therefore, it was confirmed that the multilayer piezoelectric valve for high precision flow control could be manufactured using the multilayer ceramic actuator proposed in the present invention.

What has been described above is only an embodiment for a method of manufacturing a multilayer piezoelectric valve for high precision flow control using a multilayer ceramic actuator according to the present invention, and the present invention is not limited to the above-described embodiment, and is claimed in the following claims. As described above, any person having ordinary knowledge in the field of the present invention without departing from the gist of the present invention will have the technical spirit of the present invention to the extent that various modifications can be made.

As described above, according to the present invention, after fabricating a sheet die using a silicon micromachining method to fabricate a multilayer piezoelectric valve for high precision flow control using a multilayer ceramic actuator, an actuator die was fabricated and directly bonded to the manufactured sheet die. , The actuator die and the laminated ceramic actuator are anodic bonded using Pyrex glass, and the sheet die with precise displacement control and shape and excellent flatness can be manufactured, and the piezoelectric valve with little leakage characteristics can be manufactured. It has an effect. In addition, when PDMS is used as a sealing pad in the present invention, since the process can be manufactured by a simple ultraviolet lithography method, mass production is possible at a lower cost than glass, and it is possible to manufacture a sealing pad for preventing leakage showing excellent flatness and elastic properties. Since it is possible, there is an effect that can be usefully applied to various elements for oil pressure.

1 is a flow chart illustrating a manufacturing process of a piezoelectric valve using a multilayer ceramic actuator according to the present invention as a driving unit.

Figure 2a to 2h is a cross-sectional view of the manufacturing process of the piezoelectric valve using a multilayer ceramic actuator as a drive unit according to an embodiment of the present invention.

3A to 3B are micrographs of a piezoelectric valve seat die in which a valve inlet and a seat according to the present invention are manufactured.

4A is a micrograph of a SU-8 mold according to the present invention.

Figure 4b is a micrograph of the sealing pad produced using PDMS according to the present invention.

5 is a micrograph of a piezoelectric valve manufactured using a silicon substrate according to the present invention as a valve body.

<Description of the symbols for the main parts of the drawings>

 200: valve seat die 201: inlet

 203: outlet 205: valve seat

 207 chamber 209 nitride film

 211: actuator die 213: diaphragm

 215: Stacked Ceramic Actuator 217: Pyrex # 7740 Glass

 219: PDMS sealing pad 221: multilayer ceramic actuator holder

 223 valve holder 225 bolt

Claims (26)

In the laminated piezoelectric valve manufacturing method using a laminated ceramic actuator, A first process of forming the inlet and outlet of the valve seat die; A second process of shaping the seat on the valve seat die; A third process of depositing and patterning a nitride film on the valve seat die; A fourth step of selectively bonding the valve actuator die and the seat die; A fifth process of manufacturing a diaphragm in the valve actuator die; A sixth process of anodic bonding the multilayer ceramic actuator and the actuator die using a heat resistant glass thin film; Forming a PDMS sealing pad using a SU-8 mold; And Ultra-precision flow control piezoelectric valve manufacturing method using a multilayer ceramic actuator, characterized in that the eighth process for packaging the laminated piezoelectric valve manufactured by the step using stainless steel. The method of claim 1, wherein the heat-resistant glass thin film is Pyrex # 7740. The method of claim 1, wherein the first process comprises: depositing an oxide film having a thickness of 1.5 μm on the upper and lower portions of the silicon substrate 200 and patterning the inlet and outlet using photolithography; And Using a tetramethylammonium hydroxide solution diluted 15 to 25 wt.% In ultrapure water and placed in a heater equipped with magnetic steel, and maintaining a valve inlet and outlet at 75 to 85 ° C. Method of manufacturing piezoelectric valves for ultra-precision flow rate control using multilayer ceramic actuators. The method of claim 3, wherein the oxide film has a thickness of 1.0 μm to 2 μm. 5. The method of claim 1, wherein the second step is to re-validate the valve seat die, the entire surface of the valve seat die by photolithography and valve channel and seat patterning to dissolve 5-15 wt.% In ultrapure water. Method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a multilayer ceramic actuator, characterized in that the step is located in the heater using a side solution, maintaining a constant temperature and manufacturing the valve seat and the chamber. The ultra-precision flow rate using the multilayer ceramic actuator of claim 5, wherein the tetramethylammonium hydroxide solution in which 5-15 wt.% Is dissolved in the ultrapure water is placed in a heater and maintained at 75 to 85 ° C. Method of manufacturing piezoelectric valve for control. The method of claim 1, wherein the third process comprises the steps of: depositing a nitride film of 500 kPa for 5 minutes at a constant temperature by using an atmospheric vapor deposition apparatus on a valve seat die; And removing the valve sheet and the nitride film other than the chamber using a hydrofluoric acid solution for a predetermined time to produce a valve seat die. 2. A method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a multilayer ceramic actuator. 8. The method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a multilayer ceramic actuator according to claim 7, wherein the valve seat die is deposited with a 500 kPa nitride film for 5 minutes at 900 to 1100 DEG C using an atmospheric vapor deposition apparatus. The method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a multilayer ceramic actuator according to claim 7, wherein the nitride film other than the valve seat and the chamber is removed using a hydrofluoric acid solution for 25 to 35 seconds. The method of claim 1, wherein the fourth process comprises: mixing hydrochloric acid and hydrogen peroxide at a predetermined ratio; Washing the sheet die and the actuator die in a solution for 10 minutes, mixing sulfuric acid and hydrogen peroxide in a ratio and then rinsing in the solution for a predetermined time; Performing initial direct bonding for a predetermined time in the vacuum chamber; And forming an actuator die and a sheet die junction structure by performing post-heat treatment at a predetermined temperature for a predetermined time. The method of claim 10, wherein the hydrochloric acid and hydrogen peroxide are mixed at a ratio of 3: 1 by using a multilayer ceramic actuator. 11. The method of claim 10, wherein the sulfuric acid and hydrogen peroxide are mixed at 3: 1 and then washed in the solution for 5 to 15 minutes. The piezoelectric valve manufacturing method of claim 10, wherein the first direct contact is performed in the vacuum chamber of 1 × 10 ⁻⁶ Torr for about 24 hours. The method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a multilayer ceramic actuator according to claim 10, wherein the actuator die and the sheet die joining structure are formed by performing post-heat treatment at 900 to 1100 ° C for about 1 hour. 5. The method of claim 1, wherein the fifth process is a step of patterning the bonded actuator die and the sheet die by using a photolithography method to pattern an oxide film on the entire surface of the actuator die. . The method of claim 1, wherein the fifth process inserts the bonded actuator and the sheet die into a Teflon holder and injects the solution with tetramethylammonium hydroxide added to ultrapure water at a ratio to maintain a constant temperature to etch the diaphragm. Ultra-precision flow control piezoelectric valve manufacturing method using a multilayer ceramic actuator, characterized in that the manufacturing process. The method of claim 16, wherein the bonded actuator and the sheet die are inserted into a Teflon holder and injected into a solution in which tetramethylammonium hydroxide is added to ultrapure water at a rate of 15 to 25 wt.% To maintain 75 to 85 ° C. Ultra-precision flow rate control piezoelectric valve manufacturing method using a laminated ceramic actuator, characterized in that. According to claim 1, The laminated ceramic actuator and the actuator die bonding process of the sixth step is to deposit a predetermined thickness by injecting a predetermined amount of applied power 1 W / ㎠, argon gas using a high frequency sputtering method to the multilayer ceramic actuator using a high frequency sputtering method Ultra-precision flow control piezoelectric valve manufacturing method using a multilayer ceramic actuator, characterized in that it comprises a step of. 19. The multilayer ceramic actuator according to claim 18, wherein Pyrex glass is deposited to a thickness of 4 to 6 µm by injecting 1 W / cm2 of applied power and 15 to 25 sccm of argon gas using a high frequency sputtering method. Piezoelectric valve manufacturing method for high precision flow control using. The method of claim 1, wherein the laminated ceramic actuator and the actuator die 211, on which the Pyrex glass thin film of the sixth process is deposited, are anodic-bonded for a predetermined time at a predetermined DC voltage and a predetermined application temperature. Method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a ceramic actuator. 21. The piezoelectric piezoelectric actuator of claim 20, wherein the multilayer ceramic actuator and the actuator die 211 are anodized at a DC voltage of 600 V and an applied temperature of 350 to 450 ° C. for 1 hour. Valve manufacturing method. The method of claim 1, wherein the seventh process comprises the steps of preparing a SU-8 mold on the acrylic mold and mixing the PDMS solution with the curing agent on the SU-8 mold in a proportion; It is a process of manufacturing a PDMS sealing pad by applying a spin coater and removing bubbles for a predetermined time in a vacuum chamber for 10 ^-6 Torr to remove bubbles in the PDMS solution by heat treatment at a predetermined temperature for a predetermined time. Piezoelectric valve manufacturing method for ultra-precision flow rate control using a multilayer ceramic actuator. 23. The method of claim 22, wherein the PDMS solution is mixed on the SU-8 mold with a curing agent in a ratio of 10: 1. 23. The method of claim 22, wherein in order to remove bubbles in the PDMS solution, the bubbles are removed in a vacuum chamber at 10 ^-6 Torr for 35 to 45 minutes and heat treated at a temperature of 65 to 75 ° C for about 1 hour. Method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a ceramic actuator. The method of claim 1, wherein the eighth process is a step of manufacturing a holder supporting the laminated ceramic actuator using a stainless steel having a predetermined radius and a valve holder and a bolt supporting the bonded valve actuator die and the seat die. Method of manufacturing a piezoelectric valve for ultra-precision flow rate control using a multilayer ceramic actuator. The method of claim 25, wherein the stainless steel has a radius of 1 to 3 cm.