KR100525997B1 - Substrate Cassette for Liquid Crystal Display - Google Patents

Substrate Cassette for Liquid Crystal Display Download PDF

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Publication number
KR100525997B1
KR100525997B1 KR1019980018547A KR19980018547A KR100525997B1 KR 100525997 B1 KR100525997 B1 KR 100525997B1 KR 1019980018547 A KR1019980018547 A KR 1019980018547A KR 19980018547 A KR19980018547 A KR 19980018547A KR 100525997 B1 KR100525997 B1 KR 100525997B1
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South Korea
Prior art keywords
substrate
liquid crystal
substrate cassette
crystal display
handle
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KR1019980018547A
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Korean (ko)
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KR19990085868A (en
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양두흠
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삼성전자주식회사
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Publication of KR19990085868A publication Critical patent/KR19990085868A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명의 액정표시장치용 기판 카세트는 상부판에 설치된 이송용 손잡이를 구성하는 강심재가 상부판과 측면 프레임의 내부를 관통하여 하부판의 측면부에까지 연장하여 설치되도록 구성된다.The substrate cassette for the liquid crystal display device of the present invention is configured such that the steel core constituting the transfer handle installed on the upper plate extends through the upper plate and the side frame to the side portion of the lower plate.

따라서, 작업자가 손잡이를 아래로 눌러 측면 프레임들을 외측으로 휘어지게 한 상태에서 기판 카세트의 해당 슬롯에 기판을 로딩/언로딩하여 기판의 외측면부와 기판 카세트의 측면 프레임의 내벽과의 마찰을 방지함으로써 오염원인 미세 입자의 발생을 방지할 수 있다.Thus, the operator loads / unloads the substrate into the corresponding slot of the substrate cassette while the operator pushes the handle down to deflect the side frames outward, thereby preventing friction between the outer surface of the substrate and the inner wall of the side frame of the substrate cassette. It is possible to prevent the generation of fine particles that are a source of contamination.

Description

액정표시장치용 기판 카세트Substrate Cassette for Liquid Crystal Display

본 발명은 액정표시장치용 기판 카세트에 관한 것으로, 더욱 상세하게는 기판이 로딩/언로딩될 때 기판의 양측면부와, 기판 카세트의 측면 프레임의 내벽과의 충돌이 방지되어 오염원인 미세 입자가 발생되지 않도록 한 액정표시장치용 기판 카세트에 관한 것이다.The present invention relates to a substrate cassette for a liquid crystal display device, and more particularly, when the substrate is loaded / unloaded, collision between both side portions of the substrate and the inner wall of the side frame of the substrate cassette is prevented, thereby generating fine particles as a pollutant. The present invention relates to a substrate cassette for a liquid crystal display device.

일반적으로 알려진 바와 같이, 액정표시장치용 기판은 하나의 공정설비에서 처리되고 나면 다음 공정설비나 계측설비에서의 처리를 위해 해당하는 설비로 이송된다. 카세트는 기판의 이송 효율을 향상시키기 위해 가능한 한 많은 기판들을 적재할 수 있도록 기판 카세트의 대향하는 내측면에 슬롯들(slot)이 형성된다.As is generally known, a liquid crystal display substrate is processed in one process facility and then transferred to the corresponding facility for processing in the next process facility or measurement facility. The cassette is formed with slots on opposite inner surfaces of the substrate cassette so as to load as many substrates as possible to improve the transfer efficiency of the substrate.

종래의 기판 카세트(10)는 도 1 및 도 2에 도시된 바와 같이, 사각형상의 상부판(11)과 하부판(13)이 일정 간격을 두도록 이들 양자의 대향하는 좌, 우 양측면에 사다리 형상의 측면 프레임들(15)이 쌍으로 나사 결합되고, 상부판(11)의 상부면 중앙부에 이송용 손잡이들(17)이 일정 거리를 두고 2개 설치되도록 구성된다. 각각의 측면 프레임들(15)의 측벽에 기판(1)의 수납용 슬롯들을 형성하기 위한 수평가이드(16)가 일체로 연결된다.As shown in FIGS. 1 and 2, the conventional substrate cassette 10 has a ladder-shaped side surface on both opposite left and right sides thereof so that the rectangular upper plate 11 and the lower plate 13 are spaced apart from each other. Frames 15 are screwed in pairs, and two transfer handles 17 are installed at a central distance in the center of the upper surface of the upper plate 11. Horizontal guides 16 for forming the receiving slots of the substrate 1 are integrally connected to the side walls of the respective side frames 15.

이와 같이 구성된 종래의 기판 카세트에서는 좌, 우 대향하는 측면 프레임들(15)의 간격이 기판(1)의 가로 길이에 대응하여 형성된다.In the conventional substrate cassette configured as described above, the interval between the left and right side side frames 15 is formed corresponding to the horizontal length of the substrate 1.

그런데, 측면 프레임들(15)과 상, 하부판(11),(13)이 모두 동일한 딱딱한 경성 재질로 이루어지므로 카세트(10)의 슬롯에 기판(1)을 로딩하거나 카세트(10)의 슬롯으로부터 기판(1)을 언로딩할 때, 기판(1)의 양측면부와 측면 프레임(15)의 내벽과의 사이에 충분한 여유 공간이 확보되지 않기 때문에 기판(1)의 양측면부와 측면 프레임(15)의 내벽이 면접하여 충돌하기 쉽다.However, since the side frames 15 and the upper and lower plates 11 and 13 are all made of the same hard material, the substrate 1 may be loaded in the slot of the cassette 10 or the substrate may be removed from the slot of the cassette 10. When unloading (1), sufficient clearance is not secured between both side portions of the substrate 1 and the inner wall of the side frame 15, so that both side portions of the substrate 1 and the side frame 15 The inner wall is easily interviewed and collided.

기판(1)의 로딩/언로딩이 반복 수행됨에 따라 미세입자가 다량으로 발생하면, 기판(1)은 물론 기판 카세트(10)도 미세입자에 의해 오염된다.When a large amount of fine particles occurs as the loading / unloading of the substrate 1 is repeatedly performed, not only the substrate 1 but also the substrate cassette 10 are contaminated by the fine particles.

이후, 오염된 기판이나 기판 카세트를 해당 공정장비에서 해당 공정조건으로 완벽하게 처리하더라도 제품 불량을 피할 수 없다.Subsequently, even if the contaminated substrate or substrate cassette is completely processed under the process conditions in the process equipment, product defects cannot be avoided.

따라서, 본 발명의 목적은 기판이 카세트에 수납될 때 기판과 기판 카세트의 충돌을 방지하여 오염원인 미세 입자의 발생을 억제하도록 한 것이다.Therefore, an object of the present invention is to prevent the collision of the substrate and the substrate cassette when the substrate is stored in the cassette to suppress the generation of fine particles as a source of contamination.

본 발명의 다른 목적은 다음의 상세한 설명 및 첨부된 도면에 의해 보다 명확해질 것이다.Other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

이와 같은 목적을 달성하기 위한 본 발명에 의한 액정표시장치용 기판 카세트는 상, 하부판의 대향하는 좌, 우 양측면부에 측면 프레임이 쌍으로 연결되면서 기판이 로딩/언로딩될 때 기판과의 충돌을 방지하기 위해 측면 프레임이 외측으로 휘어지도록 구성된다.In order to achieve the above object, a substrate cassette for a liquid crystal display according to the present invention has a side frame connected to a pair of opposing left and right side surfaces of an upper and a lower plate, thereby preventing collision with the substrate when the substrate is loaded / unloaded. The side frame is configured to bend outward to prevent it.

기판을 슬롯에 수납할 때 기판의 양측면부가 측면 프레임들의 내벽에 충돌하지 않도록 측면 프레임이 외측으로 휘어지도록 상부판에 강심재의 손잡이가 설치되고 강심재가 상부판과 측면 프레임 및 하부판에 관통 삽입된다.When storing the substrate in the slot, the handle of the core is installed on the upper plate so that the side frame is bent outward so that both side portions of the substrate do not collide with the inner walls of the side frames, and the core is inserted through the upper plate, the side frame and the lower plate.

이하, 본 발명에 의한 액정표시장치용 기판 카세트를 첨부된 도면을 참조하여 상세히 설명하기로 한다.Hereinafter, a liquid crystal display substrate cassette according to the present invention will be described in detail with reference to the accompanying drawings.

도 3을 참조하면, 본 발명의 기판 카세트(20)는 사각형상의 상부판(21)과 하부판(23)이 일정 간격을 두고 대향하도록 이들 양자의 대향하는 좌, 우 양측면에 사다리 형상의 측면 프레임들(25)이 복수 쌍으로 나사 결합되고, 상부판(21)의 상부면 중앙부에 이송용 손잡이(27)가 설치되도록 구성된다. 측면 프레임들(25)의 측벽에 기판(1)의 수납용 슬롯들을 형성하기 위한 수평돌출부들(16)이 일체로 연결된다.Referring to FIG. 3, the substrate cassette 20 of the present invention has ladder-shaped side frames on opposite left and right sides thereof so that the rectangular upper plate 21 and the lower plate 23 face each other at a predetermined interval. 25 is screwed in a plurality of pairs, the transfer handle 27 is configured to be installed in the center of the upper surface of the upper plate (21). Horizontal protrusions 16 for forming the receiving slots of the substrate 1 are integrally connected to the side walls of the side frames 25.

손잡이(27)를 구성하는 강심재가 상부판(21), 하부판(23) 및 측면 프레임(25)의 재질과 다르며, 상부판(21)의 좌, 우 양측면과 좌, 우 양측의 측면 프레임들(25)의 내부를 연속적으로 관통하여 하부판(23)의 측면부까지 연장하여 설치된다.The steel core constituting the handle 27 is different from the material of the upper plate 21, the lower plate 23, and the side frame 25, and the left and right sides and the left and right side frames of the upper plate 21 ( Continuously penetrates through the inside of the 25, it is installed to extend to the side portion of the lower plate (23).

이와 같이 구성되는 본 발명의 기판 카세트에 기판을 로딩/언로딩하는 과정을 살펴보면, 먼저, 액정표시장치용 기판(1)을 기판 카세트(20)의 해당 슬롯에 로딩하기 위해 손잡이(27)를 상부판(21)을 향해 아래로 누르면, 손잡이(27)를 구성하는 강심재가 연속하여 측면 프레임들(25)의 내부에 관통하여 삽입되어 있으므로 좌, 우 양측의 측면 프레임들(25)이 원래의 수직상태에서 일점쇄선으로 도시된 바와 같이, 외측으로 휘어진다.Looking at the process of loading / unloading the substrate in the substrate cassette of the present invention configured as described above, first, the handle 27 to the top to load the liquid crystal display substrate 1 in the corresponding slot of the substrate cassette 20 When pressed downward toward the plate 21, since the steel core constituting the handle 27 is continuously inserted through the inside of the side frames 25, the side frames 25 on both the left and right sides are originally vertical. As shown by the dashed-dotted line in a state, it bends outward.

이때, 좌, 우 양측의 측면 프레임들(25)은 중앙부에서 가장 큰 간격으로 벌어진다. 따라서, 좌, 우 양측의 측면 프레임들(25)이 기판(1)의 길이 사이즈보다 큰 간격으로 벌어지므로 기판(1)의 양측면부가 측면 프레임들(25)의 내벽에 전혀 마찰하지 않고 기판(1)이 해당 슬롯에 로딩된다.At this time, the left and right side frame 25 is opened at the largest interval in the center. Therefore, since the left and right side frames 25 are spaced at a larger distance than the length of the substrate 1, both side portions of the substrate 1 do not rub against the inner walls of the side frames 25 at all. ) Is loaded into the slot.

기판(1)을 카세트(20)의 해당 슬롯으로부터 언로딩하는 경우에도 이와 마찬가지로, 좌, 우 양측의 측면 프레임들(25)이 기판(1)의 길이 사이즈보다 큰 간격으로 벌어지므로 기판(1)의 양측면부가 측면 프레임들(25)의 내벽에 전혀 마찰하지 않고 기판(1)이 해당 슬롯에 언로딩된다.Similarly, when the substrate 1 is unloaded from the corresponding slot of the cassette 20, the left and right side frames 25 are opened at a larger interval than the length of the substrate 1. Both side portions of the substrate 1 are unloaded into the slots without friction with the inner walls of the side frames 25.

한편, 기판 카세트(20)에 로딩된 기판(1)을 계속 보관하는 경우, 손잡이(27)을 위로 당기면, 측면 프레임들(25)이 다시 원래의 수직 상태로 되돌아온다. 따라서, 측면 프레임들(25)의 내벽이 기판(1)의 좌, 우 양측면과 밀착하므로 기판(1)의 유동이 방지되며 보관된다.On the other hand, when the substrate 1 loaded on the substrate cassette 20 is continuously stored, when the handle 27 is pulled up, the side frames 25 are returned to their original vertical state again. Therefore, since the inner walls of the side frames 25 are in close contact with both left and right sides of the substrate 1, the flow of the substrate 1 is prevented and stored.

이상에서 살펴본 바와 같이, 본 발명에 의한 액정표시장치용 기판 카세트는 상부판에 설치된 이송용 손잡이를 구성하는 강심재가 상부판과 측면 프레임의 내부를 관통하여 하부판의 측면부에까지 연장하여 설치되도록 구성된다.As described above, the liquid crystal display substrate cassette according to the present invention is configured such that the steel core constituting the transfer handle installed on the upper plate extends to the side portion of the lower plate through the inside of the upper plate and the side frame.

따라서, 작업자가 손잡이를 아래로 눌러 측면 프레임들을 외측으로 휘어지게 한 상태에서 기판 카세트의 해당 슬롯에 기판을 로딩/언로딩하여 기판의 외측면부와 기판 카세트의 측면 프레임의 내벽과의 마찰을 방지함으로써 오염원인 미세 입자의 발생을 방지할 수 있다.Thus, the operator loads / unloads the substrate into the corresponding slot of the substrate cassette while the operator pushes the handle down to deflect the side frames outward, thereby preventing friction between the outer surface of the substrate and the inner wall of the side frame of the substrate cassette. It is possible to prevent the generation of fine particles that are a source of contamination.

한편, 본 발명은 도시된 도면과 상세한 설명에 기술된 내용에 한정하지 않으며 본 발명의 사상을 벗어나지 않는 범위 내에서 적용 가능함은 이 분야에 통상의 지식을 가진 자에게는 자명한 사실이다.On the other hand, it is obvious to those skilled in the art that the present invention is not limited to the contents described in the drawings and detailed description, and can be applied within the scope without departing from the spirit of the present invention.

도 1은 종래의 기술에 의한 액정표시장치용 기판 카세트를 나타낸 사시도.1 is a perspective view showing a substrate cassette for a liquid crystal display device according to the prior art.

도 2는 도 1의 I-I선을 따라 절단한 단면도.FIG. 2 is a cross-sectional view taken along line II of FIG. 1. FIG.

도 3은 본 발명에 의한 액정표시장치용 기판 카세트를 나타낸 단면도.3 is a cross-sectional view showing a substrate cassette for a liquid crystal display device according to the present invention.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

1: 기판 10: 기판 카세트 11: 상부판 13: 하부판 15: 측면 프레임 16: 수평 가이드 17: 손잡이 20: 기판 카세트 21: 상부판 23: 하부판 25: 측면 프레임 26: 수평돌출부 27: 손잡이DESCRIPTION OF SYMBOLS 1: Substrate 10: Substrate cassette 11: Top plate 13: Bottom plate 15: Side frame 16: Horizontal guide 17: Handle 20: Board cassette 21: Top board 23: Bottom plate 25: Side frame 26: Horizontal protrusion 27: Handle

Claims (3)

하부판;Bottom plate; 상기 하부판과 소정 간격을 두고 대향하며, 이송용 손잡이를 구비하는 상부판; 및An upper plate facing the lower plate at a predetermined interval and having a transfer handle; And 상단이 상기 상부판과 결합되고 하단이 상기 하부판과 결합되어 상기 상부판 및 상기 하부판의 양 측면부에 서로 대향하도록 설치되며, 기판을 수납하기 위한 슬롯들이 형성하기 위하여 일체로 연결된 수평돌출부들을 구비하는 측면 프레임들을 포함하며,The upper side is coupled to the upper plate and the lower side is coupled to the lower plate is installed so as to face each other on both side portions of the upper plate and the lower plate, the side having integrally connected horizontal projections to form slots for receiving the substrate Including frames, 상기 손잡이를 구성하는 강심재가 상기 측면 프레임들의 내부를 관통하여 상기 하부판까지 삽입 설치된 것을 특징으로 하는 액정표시장치용 기판 카세트.And a steel core constituting the handle is inserted into the lower plate through the inside of the side frames. 제 1 항에 있어서, 상기 손잡이가 아래로 눌러 지면, 상기 측면 프레임들이 원래의 수직상태에서 외측으로 휘어지는 것을 특징으로 하는 액정표시장치용 기판 카세트.The liquid crystal display substrate cassette according to claim 1, wherein when the handle is pressed downward, the side frames are bent outward from the original vertical state. 제 2 항에 있어서, 상기 손잡이가 위로 당겨지면, 상기 측면 프레임들이 원래 위치로 되돌아와 수직 상태를 유지하는 것을 특징으로 하는 액정표시장치용 기판 카세트.The liquid crystal display substrate cassette of claim 2, wherein when the handle is pulled upward, the side frames return to their original positions to maintain a vertical state.
KR1019980018547A 1998-05-22 1998-05-22 Substrate Cassette for Liquid Crystal Display KR100525997B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960006386A (en) * 1994-07-08 1996-02-23 양승택 Encryption and Decryption Method of Digital Information
JPH08244909A (en) * 1995-03-14 1996-09-24 Hitachi Electron Eng Co Ltd Aligning glass substrate within cassette
JPH0992713A (en) * 1995-09-22 1997-04-04 Sutaaraito Kogyo Kk Substrate cassette
JPH09216685A (en) * 1996-02-08 1997-08-19 Nippon Valqua Ind Ltd Cassette for substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960006386A (en) * 1994-07-08 1996-02-23 양승택 Encryption and Decryption Method of Digital Information
JPH08244909A (en) * 1995-03-14 1996-09-24 Hitachi Electron Eng Co Ltd Aligning glass substrate within cassette
JPH0992713A (en) * 1995-09-22 1997-04-04 Sutaaraito Kogyo Kk Substrate cassette
JPH09216685A (en) * 1996-02-08 1997-08-19 Nippon Valqua Ind Ltd Cassette for substrate

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